2003 04catalog

User Manual: 2003-04catalog

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Technical alterations reserved

P R O D U C T S

Printed in Germany on chlorine-free bleached paper

LV_05301 GK 3.27.03.2003

A N D

B O O K

V A C U U M

R E F E R E N C E

L E Y B O L D

Vacuum Solutions

2003
2004

Application Support
Service

R E F E R E N C E

LEYBOLD VACUUM

101.01.02

L E Y B O L D

P R O D U C T S

V A C U U M
A N D

B O O K

2003 04

TRIVAC

C01

Rotary Vane Vacuum Pumps, Oil-Sealed,
1.5 to 65 m3 x h-1, (0.7 to 38.3 cfm)
S 1.5, Single-Stage
TRIVAC E, Two-Stage
TRIVAC B, Two-Stage

Rotary Vane Vacuum Pumps

Contents
General
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.03

Pumps
Small Compact Pump S 1.5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.04
TRIVAC E, Two-Stage Rotary Vane Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.06
TRIVAC D 2.5 E. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.08
S 1.5

TRIVAC E

TRIVAC B

TRIVAC B, Two-Stage Rotary Vane Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TRIVAC D 4 B and D 8 B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TRIVAC D 16 B and D 25 B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TRIVAC D 40 B and D 65 B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TRIVAC D 16 B-DOT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TRIVAC D 16 B-Ex (Explosion Blast Wave Resistant) . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C01.10
C01.12
C01.16
C01.20
C01.22
C01.24

TRIVAC BCS, Two-Stage Rotary Vane Vacuum Pumps. . . . . . . . . . . . . . . . . . . . . . . . . . . .
TRIVAC D 16 BCS to D 65 BCS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TRIVAC D 16 BCS-PFPE to D 65 BCS-PFPE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Motor Dependant Data for the TRIVAC B, BCS and BCS-PFPE . . . . . . . . . . . . . . . . . . . . . . .

C01.26
C01.28
C01.32
C01.36

Accessories for TRIVAC E and B
TRIVAC BCS

Exhaust Filters AF 8 to AF 25 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Condensate Traps AK 8 to AK 25 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Exhaust Filter Drain Tap, Oil Drain Tap, Oil Drain Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Oil Suction Facility Controlled by Solenoid Valve AR-V . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Manually Operated Oil Suction Facility AR-M. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dust Separators AS 8-16 and AS 30-60 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Molecular Filters MF 8-16 and MF 30-60. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Fine Vacuum Adsorption Traps FA 2-4 to FA 30-60 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dust Filters FS 2-4 to FS 30-60 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cold Trap TK 4-8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
RST Refillable Traps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SE Smoke Eliminator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Compact Oil Mist Exhaust Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C01.40
C01.40
C01.42
C01.43
C01.43
C01.44
C01.44
C01.45
C01.46
C01.47
C01.48
C01.49
C01.50

Accessories for TRIVAC B
Condensate Traps AK 4-8, AK 16-25, AK 40-65. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Exhaust Filters AK 4-8, AK 16-25, AK 40-65 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Exhaust Filters with Lubricant Return ARP 4-8, AR 4-8, AR 16-25, AR 40-65. . . . . . . . . . . .
Exhaust Filters with Lubricant Return ARS 16-25 and ARS 40-65 . . . . . . . . . . . . . . . . . . . .
Mechanical Oil Filters OF 4-25 and OF 40-65. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Chemical Oil Filters CF 4-25 and CF 40-65 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Chemical Oil Filters with Safety Isolation Valve CFS 16-25 and CFS 40-65 . . . . . . . . . . . . . .
Inert Gas System, IGS 16-25 and IGS 40-65. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Limit Switch System LSS 16-25 and LSS 40-65 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Electrical Indicator System EIS 16-25 and EIS 40-65. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Roots Pump Adaptor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Oil Filtering System OF1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C01.52
C01.53
C01.54
C01.55
C01.56
C01.56
C01.57
C01.58
C01.59
C01.60
C01.61
C01.62

General Accessories
Flange Components, Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.64
Oil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.65

Miscellaneous
60 Hz Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.70

C01.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

General

.5

TR

S1

Pu

IVA
C
TR D
IVA 2.5
E
C
TR D
IVA 4 B
C
TR D
IVA 8 B
C
TR D 1
IVA 6 B
C
TR D
IVA 25
C B
TR D
IVA 40
C B
TR D
IVA 65
C B
TR D
IVA 16
B
TR C D -DO
IVA 16 T
C B
TR D 1 -Ex
IVA 6 B
C
CS
TR D
,D
IVA 40
25
B
BC
TR C D CS
S
IVA 65
C D BC
S
TR
IVA 16 +
C
D
TR D 4 25
IVA 0 B BC
C D CS SP
65 -PFP FPE
BC E
SPF
PE

m

ps

Applications and Accessories

Applications
Production of semiconductors
Vacuum coating
Research and development
Chemistry/pharmaceuticals
Metallurgy/furnaces
Lamps and tubes manufacture
Car industry
Laser engineering
Space simulation
Analytical engineering
Environment engineering
Cooling and air-conditioning
Electrical engineering
Mechanical engineering
Medicine technology
Vacuum drying cabinets
Chemistry and research labs
Freeze drying systems
Backing pump for high vacuum pump systems

Accessories

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Page

AK condensate trap

C01.40/52

AF exhaust filters

C01.40/53

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Exhaust filter drain tap

C01.42

Oil drain tap

C01.42

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Oil drain kit

C01.42

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AR-V oil suction facility *)

C01.43

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AR-M oil suction facility *)

C01.43

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AS dust separators

C01.44

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MF molecular filters

C01.44

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FA fine vacuum adsorption traps

C01.45

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FS dust filters

C01.46

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TK cold trap

C01.47

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AR exhaust filters
with lubricant return

C01.54

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ARS exhaust filters
with lubricant return

C01.55

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OF mechanical oil filters

C01.56

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CF chemical oil filters

C01.56

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CFS chemical oil filters
with safety blocking valve

C01.57

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IGS inert gas system

C01.58

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LSS limit switch system

C01.59

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EIS electrical indicator system

C01.60

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RIS remote indicator system
(remote monitoring)

C01.61

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Roots pump adaptors

C01.62

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Valves, flange components

C01.64

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Vacuum pump oils

C01.65

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*)
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

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For pumps with gas ballast only

C01.03

C01

Rotary Vane Vacuum Pumps

Small Compact Pump

S 1.5 Small Compact Pump
The S 1.5 is a single-stage, oil-sealed rotary vane
pump with a gas ballast valve. It is driven by a
flange mounted AC motor. The shaft of the pump
and the shaft of the motor are linked by means of
a pinned coupling.

Advantages to the User
♦ Very small and light-weight
♦ Low ultimate pressure
♦ High water vapor tolerance
♦ Low noise operation
♦ Simple to connect
♦ Easy to maintain and use

Typical Applications
DN 16 KF

DN 6

d

♦ In all areas of vacuum engineering where a
low intake pressure is required

a

♦ Evacuation of refrigerant circuits

h1

♦ For suction, lifting, emptying, filling and
tensioning

h

♦ For installation in mobile instruments

Supplied Equipment
b2

l1

c

l
a

mm
in.

b

b1

b2

45 ≈185 145 100
1.77 ≈7.3 5.71 3.94

c

d

9
.35

20
.79

h

♦ DN 16 small flange connection on the intake
side

b1

b

♦ Centering ring and clamping ring

h1

♦ Exhaust port designed as a DN 6 hose nozzle

160 192
6.30 7.56

♦ Carrying handle
♦ Built-in ON/OFF switch and overcurrent
circuit breaker

Dimensional drawing for the S 1.5

♦ Oil filling

10
750

10
mbar
10 2

Torr
10

Pressure

10 1
10 0

1

10-1

10

10-2

10

-3

10

10

0

2

4

6

-1
-2

10

-2

10

-1

1

10

Torr

750

2,0
m3 x h -1

cfm
1

1,75

Pumping speed

3

-3

1,5
0.75

1,25

1,0
0.5

0,75

0,5

0.25

-3

0,25

8 min 10

0
10 -3

Time

10 -2

10 -1

10 0

10 1

mbar

10 3

0

Pressure
without gas ballast
with gas ballast

Pump-down characteristics of a 10 l vessel at 50 Hz

C01.04

without gas ballast
with gas ballast

Pumping speed characteristics at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Small Compact Pump

Rotary Vane Vacuum Pumps

S 1.5

Technical Data

50 Hz

60 Hz

Nominal pumping speed 1)

m3 x h-1 (cfm)

1.9 (1.1)

2.3 (1.3)

Pumping speed 1)

m3 x h-1 (cfm)

1.75 (1)

2.1 (1.2)

Ultimate partial pressure
without gas ballast 1)

mbar (Torr)

3 x 10-2 (2.3 x 10-2)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

5 x 10-1 (3.8 x 10-1)

Water vapor tolerance 1)

mbar (Torr)

> 15 (> 11.3)

Water vapor capacity

g/h (lbs/hr)

19 (42)

Oil filling, min./max.

l (qt)

0.11/0.14

Admissible ambient temperature

°C (°F)

40 (104)

Motor rating

W (hp)

80 (.11)

Nominal speed

rpm

Type of protection
Weight

1500

IP
kg (lbs)

Connections,
Intake
Exhaust

DN
DN

Or dering Information
S 1.5 with AC motor, 230 V (208-252 V ±5%),
50/60 Hz, with 2 m long mains cord and EURO plug

1800
54
10 (22.1)

16 KF
6

S 1.5
Part No. 101 01

AK 8 condensate trap

Part No. 190 60

Oil drain tap (M 16 x 1.5)

Part No. 190 90

Connection components
Elbow (1x) DN 16 KF
Centering ring with O-ring (2x) DN 16 KF
Clamping ring (2x) DN 16 KF

Part No. 184 36
Part No. 183 26
Part No. 183 41

1)

C01

To DIN 28 400 and following numbers

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.05

Rotary Vane Vacuum Pumps

TRIVAC E

TRIVAC E, Two-Stage, Oil-Sealed Rotary Vane Vacuum Pump

TRIVAC D 2.5 E

The TRIVAC E pump is an oil-sealed vacuum
pump operating according to the rotary vane
principle. Oil which is injected into the pump
chamber is used for sealing, lubrication and
cooling purposes.
New customers’ requirements as well as increased
environmental requirements gave rise to the
further development of the successful range of
TRIVAC B pumps.
The result is the new TRIVAC E rotary vane
vacuum pump.
Beyond the usual quality and reliability of the
B series pumps, the TRIVAC E pump offers
improvements in the area of quieter operation,
smaller size and improved service-friendliness.
The intake and exhaust ports are equipped with
small flanges. Besides standard voltages and frequencies, LEYBOLD offers world motors, which
are specially required by OEMs.
The new TRIVAC E pump includes also a set of accessories which also fits to the TRIVAC D 4 - 16 B.

Advantages to the User

Typical Applications

♦ Highly reliable

♦ Mass spectrometers

♦ Small and compact

♦ Electron beam microscopes

♦ Quiet operation

♦ Sterilizers

♦ Environmentally compatible (low oil consumption, EMI compatible; IP 54 protection)

♦ Freeze-drying systems

♦ Process quality (little backstreaming of oil)

♦ TV tube

♦ Motors for all standard supply voltages and
frequencies

♦ General vacuum engineering

♦ Safe and intelligent vacuum protection
(hermetically sealed)

♦ Chemical and research labs

♦ Backing pump for high vacuum pump
systems

Supplied Equipment

♦ Free of yellow metals
♦ Compliance with international standards
(CE, UL and CSA)
♦ Suitable for continuous operation at
1000 mbar (750 Torr)
♦ Low power consumption
♦ Better individual performance given by
3 stage gas ballast device
♦ High water vapor tolerance

♦ Dirt trap
♦ Oil filling included separately (standard N 62;
special oil HE-200 in the U:S:)
♦ Gas ballast device
♦ Main cord with the specific plug for Euro,
USA and Japan motors
♦ Optional: Main cord with country specific plug
for the world motor
♦ With handle

♦ Simplified customizing ability
ALL PUMPS ARE SUBJECTED TO A VACUUM
TEST BEFORE DELIVERY !

C01.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

TRIVAC E

C01

TRIVAC E

A
E
F
DN

O

DN

J

P

K
B
L

M

TRIVAC

G
H

R

IN

OUT

IN
OIL
OUT

N

A

B

C

EURO
JAP, USA

World
1~

EURO
JAP ,USA

World
1~

mm

388.5

393.5

210.5

227.5

127

in.

15.3

15.7

8.29

8.96

5

E

F

G

162.5

75.5

6.40

2.97

D
EURO

JAP

USA

World
1~

127

148.5

153.5

153.5

*

5

5.85

6.04

6.04

EURO World
JAP, USA 1 ~

Q

D

C

H

J

K

L

M

N

O

119.5

225

231.5

225

182

177

113

27

4.70

8.86

9.90

8.86

7.16

6.97

4.45

1.06

Q

R

DN

15

83

84.5

16 KF

.59

3.27

3.33

16 KF

P

* Condensors in the connection box

Dimensional drawing for the TRIVAC D 2.5 E
-4

-3

10
10

10

-2

10

10

-1

1

10

Torr

750

1

5

m 3x h -1

cfm

Pumping speed

D 2,5 E

1
10

0

0.5

8
6
4

2

0.1
10
Pumping speed of the TRIVAC D 2.5 E at 50 Hz (60 Hz curves at the end of the section)

-1

10

-4

2

4 68

10

-3

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

10

-2

10

-1

0

10
Pressure

10

1

2

10 mbar 10

3

C01.07

Rotary Vane Vacuum Pumps

TRIVAC E

D 2.5 E

Technical Data

50 Hz

60 Hz

Nominal pumping speed 1)

m3 x h-1 (cfm)

3.2 (1.9)

3.6 (2.1)

Pumping speed 1)

m3 x h-1 (cfm)

2.7 (1.6)

3.3 (1.9)

Ultimate partial pressure without gas ballast mbar (Torr)

≤ 5 x 10-4 (≤ 3.8 x 10-4)

Ultimate total pressure without gas ballast 2) mbar (Torr)

≤ 2 x 10-3 (≤ 1.5 x 10-3)

Ultimate total pressure with gas ballast
Step 2 2)

mbar (Torr)

≤ 3 x 10-2 (≤ 2.3 x 10-2)

Water vapor tolerance
Step 1
Step 2
Step 3

mbar (Torr)
mbar (Torr)
mbar (Torr)

10 (7.5)
20 (15)
30 (22.5)

Water vapor capacity
Step 1
Step 2
Step 3

gm/h
gm/h
gm/h

20
40
60

Oil filling, max./min.

l (qt)

0.7/0.4 (0.7/0.4 )

Noise level

dB(A)

≤ 47

Admissible ambient temperature

°C (°F)

10 to 50 (50 - 122) (EURO motor) / 10 to 40 (50 - 104) (USA/Japan motor)

Motor rating 50/60 Hz

W (HP)

Nominal speed 50/60 Hz

rpm

Type of protection

250 (0.34)

300 (0.41)

1400

1600

IP

54

Weight (with oil filling)

kg (lbs)

15.3 (33.7)

Dimensions (W x H x D)

mm (in.)

127 x 225 x 383 (5 x 8.86 x 15)

Connections (Intake and Exhaust)
1)

To DIN 28 426 T1

DN
2)

16 KF

To DIN 28 400 and following numbers

Motor Dependent Data
Motors for
D 2.5 E

Voltage
V

Frequency
Hz

Voltage
tolerance

Power consumption Nominal current
W (HP)
A

Protection

Nominal speed
rpm

Euro

1~

220-240/230

50/60

+/– 5 %

250/300 (0.34/0.41)

1.8/1.4

IP 54

1400/1600

Japan

1~

100

50/60

+/– 5 %

250/300 (0.34/0.41)

5.5/4.0

IP 54

1400/1600

USA

1~

110-120

60

+/– 5 %

300 (0.41)

3.3

IP 54

1600

1~

100-120;
200-240

250/300 (0.34/0.41)

4.4/3.0
2.2/1.5

IP 54

1400/1600

World

C01.08

50/60

+/– 5 %

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC E

Ordering Information
TRIVAC E with 1.8 m long mains cord
EURO-Version, 1-ph., 220-240 V, 50 Hz; 230 V, 60 Hz
Earthed plug
UK plug
CH plug
US version, 1-ph., 110-120 V, 60 Hz, NEMA plug
Japan version,1-ph.,100 V, 50/60 Hz, NEMA plug
Single phase world motor (without mains cord)
Further variants upon request

Rotary Vane Vacuum Pumps

D 2.5 E

Part No. 140 000
Part No. 140 004
Part No. 140 005
Part No. 140 002
Part No. 140 003
Part No. 140 001

C01

Accessories
Connection cable for single phase world motor
230 V earthed plug
230 V UK plug
230 V CH plug
230 V NEMA plug (200-240 V)
115 V NEMA plug (100-120 V)

Part No. 200 81 091
Part No. 200 81 097
Part No. 200 81 099
Part No. 200 81 141
Part No. 200 81 090

Exhaust filter AF 8

Part No. 190 50

Replacement filter elements for AF 8 (pack of 5)
FE 8

Part No. 190 80

Exhaust filter drain tap (G 1/4")

Part No. 190 95

Manual oil return AR-M via gas ballast inlet
(kit for AF 8-16)

Part No. 190 93

Oil suction AR-V controlled by a solenoid valve
via the gas ballast inlet (kit for AF 8-16)

Part No. 190 92

Condensate trap AK 8

Part No. 190 60

Oil drain tap (M 16 x 1.5)

Part No. 190 90

Oil drain kit (M 16 x 1.5)

Part No. 190 94

Connection components
Elbow (1x) DN 16 KF
Centering ring with O-ring (2x) DN 16 KF
Clamping ring (2x) DN 16 KF

Part No. 184 36
Part No. 183 26
Part No. 183 41

Spare parts
Maintenance kit 1
(oil separation, oil box seal)

Part No. 200 40 022

Repair set 1
(valves, oil separation, oil box seal)

Part No. 200 40 024

Complete set
(oil separation, sealing, wearing parts)

Part No. E 100 000 347

For further accessories see Section
“Accessories for TRIVAC E and B”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.09

Rotary Vane Vacuum Pumps

TRIVAC B

TRIVAC B, Two-Stage Rotary Vane Vacuum Pumps TRIVAC D 4 B to D 65 B

The TRIVAC B is the logical step ahead within the
well-proven TRIVAC concept. Here the performance and the characteristics of the pumps have
been adapted without compromise to market
requirements. The TRIVAC-B pumps with their
comprehensive range of accessories have proven
themselves time and again as rugged pumps in
many and varied applications.
The pump body is assembled from individual
parts without sealing components. The parts are
pinned in order to ensure easy disassembly and
reassembly of the parts.
All pumps from the D 4 B to the D 25 B model
are equipped either with single-phase AC or
three-phase AC motors. D 40 - 65 B models are
equipped with three-phase motors. Moreover, all
pumps of the B series are available also without
the motor.

Advantages to the User

Typical Applications

♦ High water vapor tolerance

See section “General, Applications and
Accessories”

♦ Continuous operation even at 1000 mbar
♦ Built-in oil pump; pressure-lubricated sliding
bearings

Supplied Equipment

♦ All controls as well as the oil sight glass are
located on the front face

Small flanges, centering and clamping rings. The
intake flange contains a dirt trap.

♦ Either vertical or horizontal intake and exhaust
ports

A carrying handle is standard for all pumps up to
the D 25 B. TRIVAC B pumps with single phase
motors are delivered with main cord and main
plug, ready for immediate operation.

♦ Exchangeable inner body
♦ Anti-suckback valve controlled via the oil
pressure
♦ Free of yellow metals
♦ Service-friendly

In the TRIVAC B, the pump unit and the motor
are linked by an elastic coupling.

♦ Ideal as backing pump for medium and high
vacuum applications, because of low oil
backstreaming

The TRIVAC B range is a modular system which
divides into three groups:

♦ Highly leaktight (He3 capable)

TRIVAC 4/8 Series
TRIVAC 16/25 Series
TRIVAC 40/65 Series

Standard TRIVAC B pumps come with a filling of
N 62 special oil (HE-200 in the U.S.), others with
special oil fillings can be specified.
ALL PUMPS ARE SUBJECTED TO A VACUUM
TEST BEFORE DELIVERY!

Custom Models
♦ Brake fluid
♦ Oils for refrigerating machines, e.g. ester oils
for refrigerant circuits with R 134 a
♦ Pressure burst resistant (for the new
refrigerants propane and isobutane)
♦ He3-tight (for cryostats)
♦ Special motors

C01.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC B

Rotary Vane Vacuum Pumps

TRIVAC D 16 B-DOT

C01

The TRIVAC B-DOT pumps operate with brake
fluid (DOT 4) as the sealing and lubricating agent.
Therefore these pumps are equipped with EPDM
seals. EPDM is highly compatible with brake
fluid.
As to the D 8 B-DOT, D 25 B-DOT and D 40 BDOT please ask us for a quotation.

Advantages to the User

Supplied Equipment

♦ Matching exhaust filters with EPDM gaskets
(AF-DOT)

♦ Oil fill screws have been screwed out and are
included separately (European pumps only)

♦ Except for the seals and the operating agent
the TRIVAC B-DOT pumps are identical to the
oil-sealed TRIVAC B pumps

♦ Pump is supplied in an air-tight bag
containing silica gel (European pumps only)

Typical Applications

♦ The remaining quantity of brake fluid (0.7 l) is
supplied separately in a bottle

♦ For filling of brake fluid circuits in the automotive industry

TRIVAC D 16 B-Ex, Explosion Protected and Pressure Burst Resistant

ATEX products upon request!

Today the manufacturers of modern air-conditioning and refrigerating equipment must be capable
of reliably complying with the relevant standards.
For the new flammable refrigerants propane and
isobutane (R 290 and R 600a) and their mixtures,
any risk of personal injury in the event of an
explosion must be avoided. This is to comply
with the European safety regulations for compressors and vacuum pumps EN 1012 in force
since January 1, 1995.
Due to the pressure burst resistant design, such
a hazard to persons or equipment can be excluded in the case of explosions.

Flame arresters on the intake and the exhaust
sides prevent the propagation of an explosion to
upstream or downstream parts of the system.

Supplied Equipment

Advantages to the User

♦ Without flame arresters

♦ Pressure burst resistant (12 bar abs.
(160 psi, gauge) test pressure)

Technical Note

Typical Applications
♦ Application in the refrigerating and air-conditioning and cooling industry, for pumping of
R 290 and R 600 a only.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

♦ Including pressure burst resistant exhaust
filter AF 16-25

For approval regarding other flammable substances please ask for a quotation.
All TRIVAC B pumps are available with explosion
protected motors.

C01.11

Rotary Vane Vacuum Pumps

TRIVAC B

TRIVAC D 4 B and D 8 B

TRIVAC D 8 B

a

DN

c

e1

e

b

b2

* Depending on the motor
USA pumps max. length
D 4 B 485 mm (19.1“)
D 8 B 555 mm (21.9“)

h
h4

n

m

h1

h2

h3

o
b1

l
l1

Type

DN

D 4 B (Part No. 113 04, 113 08, 113 09) 16 KF mm
in.
D 4 B (Part No. 113 03, 112 45)
16 KF mm
in.
D 4 B (Part No. 112 46)
16 KF mm
in.
D 8 B (Part No. 113 14, 113 18, 113 21) 16 KF mm
in.
D 8 B (Part No. 113 13, 113 55)
16 KF mm
in.
D 8 B (Part No. 113 56)
16 KF mm
in.

a

b

b1

b2

75
2.95
75
2.95
75
2.95
100
3.94
100
3.94
100
3.94

162
6.38
162
6.38
162
6.38
162
6.38
162
6.38
162
6.38

147
5.79
147
5.79
147
5.79
147
5.79
147
5.79
147
5.79

132
5.23
132
5.23
132
5.23
132
5.23
132
5.23
132
5.23

h2

h3

h4

l

l1

m

n

o

100
–
170 265 215
3.94 – 6.69 10.43 8.46
100 102
–
265 215
3.94 4.02 – 10.43 8.46
100 89
–
265 215
3.94 3.5
– 10.43 8.46
100
–
170 265 215
3.94 – 6.69 10.43 8.46
100 102
–
265 215
3.94 4.02 – 10.43 8.46
100 89
–
265 215
3.94 3.5
– 10.43 8.46

c

e

e1

h

h1

200
7.87
200
7.87
200
7.87
200
7.87
200
7.87
200
7.87

230
9.06
230
9.06
230
9.06
230
9.06
230
9.06
230
9.06

259
10.20
234
9.21
223
8.78
259
10.20
234
9.21
223
8.78

–
–
437
17.21
438
17.24
–
–
462
18.19
463
18.23

455
17.91
–
–
–
–
480
18.90
–
–
–
–

198
7.80
198
7.80
198
7.80
198
7.80
198
7.80
198
7.80

99
3.90
99
3.90
99
3.90
99
3.90
99
3.90
99
3.90

108
4.25
108
4.25
108
4.25
108
4.25
108
4.25
108
4.25

-5

-3

10

-1

1

Dimensional drawing for the TRIVAC D 4 B and D 8 B

10
10
750
Torr

Pressure

10

0

10

D8B
D4B

-1

10

1
10
10

-2

10

10

-3

10

10

10

1

0

1

2

3

4

5

6 min 8

Time
without gas ballast
with gas ballast

Pump-down characteristics of a 10 l vessel at 50 Hz

C01.12

-1
-2

10

10

-2

10

10

Torr

750

2

50

D8B

m3 x h-1

Pumping speed

3

10
mbar
2
10

-4

10

cfm

D4B

1

10
5

1
0.5

0

0.1

-3

10

-1
-5

10

-4

10

-3

10

-2

10

Ultimate partial pressure without gas ballast
Ultimate total pressure without gas ballast
Ultimate total pressure with gas ballast

-1

10

10

0

3

1

10

mbar

10

Pressure

Pumping speed characteristics at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC B

Rotary Vane Vacuum Pumps

TRIVAC D 4 B

Technical Data

50 Hz

60 Hz

50 Hz

TRIVAC D 8 B

60 Hz

Nominal pumping speed 1)

m3 x h-1 (cfm)

4.8 (2.8)

5.8 (3.4)

9.7 (5.7)

11.6 (6.9)

Pumping speed 1)

m3 x h-1 (cfm)

4.2 (2.5)

5 (3)

8.5 (5)

10.2 (6)

Ultimate partial pressure
without gas ballast 1)

C01

10-4 (0.75 x 10-4)

mbar (Torr)

Ultimate total pressure without gas ballast 1) mbar (Torr)

< 2 x 10-3 (< 1.5 x 10-3)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 5 x 10-3 (< 3.8 x 10-3)

Water vapor tolerance 1)

mbar (Torr)

30 (22.5)

25 (18.8)

Water vapor capacity

gm/h

93

157

Oil filling, min./max.

l (qt)

0.3 / 0.8 (.3 / .85)

0.3 / 0.9 (.3 / .95)

Noise level 2) to DIN 45 635,
without/with gas ballast

dB(A)

50 / 52

Admissible ambient temperature

°C (°F)

12 - 40 (54 - 104)

Motor rating 2)

W (HP)

370 (.50)

Nominal speed

rpm

Type of protection 3)
Weight 2)
Connections, Intake and Exhaust

1500

1800

IP
kg (lbs)

1500

1800

54
18.7 (41.2)

DN

21.2 (46.7)
16 KF

1)

To DIN 28 400 and following numbers
Weight, motor rating and noise levels for the pumps with 230 V, 50 Hz AC motor only.
Any data that deviate from the above for pumps with other motors, and other motor-dependent data are given in section “Products”,
paragraph “Motor Dependent Data for the TRIVAC B, BCS and BCS-PFPE”
3) Global versions only. North and South American versions are TEFC
2)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.13

Rotary Vane Vacuum Pumps

TRIVAC B

Version for the North and South American Continents
Ordering Information
TRIVAC B,
with 1-phase motor
115 V, 60/50 Hz, NEMA plug
208-230 V, 60/50 Hz, NEMA plug
with 3-phase motor
208-230/460 V, 60 Hz / 200-220/380 V, 50 Hz

TRIVAC D 4 B

TRIVAC D 8 B

Part No. 912 45-1
Part No. 912 45-2

Part No. 912 55-1
Part No. 912 55-2

Part No. 912 46-2

Part No. 912 56-2

two-stage

two-stage

Global Version
Ordering Information
TRIVAC B,
with 1-phase motor
230 V, 50 Hz
230 V, 50/60 Hz
115 V, 60 Hz
100 V, 50 Hz / 110 V, 60 Hz
100 V, 50 Hz / 110 V, 60 Hz
with 3-phase motor
230/400 V, 50 Hz / 250/440 V, 60 Hz
230/400 V, 50 Hz, Exe II T3

TRIVAC D 4 B

TRIVAC D 8 B

Part No. 112 45
Part No. 113 09
Part No. 113 03
Part No. 113 04
Part No. 113 08 (SHC 224)

Part No. 112 55
Part No. 113 21
Part No. 113 13
Part No. 113 14
Part No. 113 18 (SHC 224)

Part No. 112 46
Part No. 113 06

Part No. 112 56
Part No. 113 16

two-stage

two-stage

Accessories
FS 2-4 dust filter

Part No. 186 05

FA 2-4 fine vacuum adsorption trap

Part No. 187 05

Adsorption trap with aluminium oxide

Part No. 854 14

Activated aluminium oxide, 1.3 kg (2 l approx.)

Part No. 854 10

TK 4-8 cold trap

Part No. 188 20

AF 4-8 exhaust filter

Part No. 189 06

AR 4-8 exhaust filter with lubricant return

Part No. 189 20

AK 4-8 condensate trap

Part No. 188 06

OF 4-25 mechanical oil filter

Part No. 101 91

CF 4-25 chemical oil filter

Part No. 101 96

Connector for gas ballast inlet M 16 x 1.5 – DN 16 KF

Part No. 168 40

Oil drain tap M 16 x 1.5

Part No. 190 90

Spare parts
Inside section
Seal kit

C01.14

Part No. E 200 10 989

Part No. E 200 10 991
Part No. 197 20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC B

Rotary Vane Vacuum Pumps

N otes

C01

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.15

Rotary Vane Vacuum Pumps

TRIVAC B

TRIVAC D 16 B and D 25 B

TRIVAC D 25 B

a

DN

c

e1

e

b2

b

* Depending on the motor
USA pumps max. length
D 16 B 560 mm (22.1“)
D 25 B 660 mm (26“)

h
h4

n

m

h1

h2

h3

o
b1

l
l1

Type

DN

D 16 B (Part No. 113 25, 113 29)
D 16 B (Part No. 112 65)
D 16 B (Part No. 112 66, 113 33)
D 16 B (Part No. 113 27)
D 16 B (Part No. 113 34)
D 25 B (Part No. 113 36, 113 39, 112 75)
D 25 B (Part No. 112 76)
D 25 B (Part No. 112 37)

Dimensional drawing for the TRIVAC D 16 and D 25 B

b1

b2

177
6.97
175
6.89
175
6.89
175
6.89
175
6.89
177
6.97
177
6.97
177
6.97

150
5.91
150
5.91
150
5.91
150
5.91
150
5.91
150
5.91
150
5.91
150
5.91

Torr
D 25 B
D 16 B

1

10-1

10

-2

10
10
0

1

2

3 min 4

Time
without gas ballast
with gas ballast

Pump-down characteristics of a 100 l vessel at 50 Hz

C01.16

c

h2

h3

h4

l

l1

m

n

o

250
9.84
250
9.84
250
9.84
u. r.
u. r.
250
9.84
250
9.84
250
9.84
u. r.
u. r.

226
8.90
226
8.90
226
8.90
u. r.
u. r.
226
8.90
226
8.90
226
8.90
u. r.
u. r.

263
10.35
263
10.35
263
10.35
u. r.
u. r.
263
10.35
263
10.35
263
10.35
u. r.
u. r.

271
10.67
274
10.79
236
9.29
u. r.
u. r.
262
10.32
271
10.67
262
10.32
u. r.
u. r.

–
–
–
–
490
19.29
u. r.
u. r.
507
19.96
–
–
566
22.28
u. r.
u. r.

566
22.28
507
19.96
–
–
u. r.
u. r.
–
–
626
24.65
–
–
u. r.
u. r.

280
11.02
280
11.02
280
11.02
u. r.
u. r.
280
11.02
280
11.02
280
11.02
u. r.
u. r.

140
5.51
140
5.51
140
5.51
u. r.
u. r.
140
5.51
140
5.51
140
5.51
u. r.
u. r.

132
5.20
132
5.20
132
5.20
u. r.
u. r.
132
5.20
132
5.20
132
5.20
u. r.
u. r.

10

-1
-2

e

e1

-5

-2

-4

h

-3

10

10

10

10

-1

1

10

Torr

750

2

50

m3 x h-1

D 25 B
D 16 B

10

10 0

10

h1

135
–
266 298
5.32 – 10.47 11.73
135
–
170 298
5.32 – 6.69 11.73
135 89
–
298
5.32 3.50 – 11.73
135 u. r. u. r. u. r.
5.32 u. r. u. r. u. r.
135 111
–
298
5.32 4.37 – 11.73
135
–
266 298
5.32 – 10.47 11.73
135 111
–
298
5.32 4.37 – 11.73
135 u. r. u. r. u. r.
5.32 u. r. u. r. u. r.

10

750

10 1

10-3

b
190
7.48
190
7.48
190
7.48
190
7.48
190
7.48
190
7.48
190
7.48
190
7.48

Pumping speed

Pressure

10 3
mbar
10 2

a

25 KF mm 82
in. 3.23
25 KF mm 82
in. 3.23
25 KF mm 82
in. 3.23
25 KF mm 82
in. 3.23
25 KF mm 82
in. 3.23
25 KF mm 142
in. 5.59
25 KF mm 142
in. 5.59
25 KF mm 142
in. 5.59
u. r. = upun request

cfm

10

1

10
5

10

0

1
0.5

-3

10-1

0.1
-5

10

-4

10

-3

10

-2

10

Ultimate partial pressure without gas ballast
Ultimate total pressure without gas ballast
Ultimate total pressure with gas ballast

10

-1

10

0

1

10

3

mbar

10

Pressure

Pumping speed characteristics at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC B

Rotary Vane Vacuum Pumps

TRIVAC D 16 B

Technical Data

TRIVAC D 25 B

50 Hz

60 Hz

50 Hz

60 Hz

Nominal pumping speed 1)

m3 x h-1 (cfm)

18.9 (11.1)

22.7 (13.4)

29.5 (17.4)

35.4 (20.9)

Pumping speed 1)

m3 x h-1 (cfm)

16.5 (9.7)

19.8 (11.7)

25.7 (15.1)

30.8 (18.2)

Ultimate partial pressure
without gas ballast 1)

C01

10-4 (0.75 x 10-4)

mbar (Torr)

Ultimate total pressure without gas ballast 1) mbar (Torr)

< 2 x 10-3 (1.5 x 10-3)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 5 x 10-3 (3.8 x 10-3)

Water vapor tolerance 1)

mbar (Torr)

25 (18.8)

Water vapor capacity

gm/h

305

476

Oil filling, min./max.

l (qt)

0.5 / 1.0 (0.5 / 1.1)

0.6 / 1.4 (0.6 / 1.5)

Noise level 2) to DIN 45 635,
without/with gas ballast

dB(A)

52 / 54

Admissible ambient temperature

°C (°F)

12 - 40 (54 - 104)

Motor rating 2)

W (HP)

750 (1)

Nominal speed

rpm

Type of protection 3)
Weight 2)
Connections, Intake and Exhaust

1500

1800

1800

54

IP
kg (lbs)

1500

26 (57.3)

DN

32 (70.6)
25 KF

1)
2)

To DIN 28 400 and following numbers
Weight, motor rating and noise levels for the pumps with AC motor, 50 Hz, only.
Any data that deviate from the above for pumps with other motors, and other motor-dependent data are given in section “Products”,
paragraph “Motor Dependent Data for the TRIVAC B, BCS and BCS-PFPE”
3) Global versions only. North and South American versions are TEFC

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.17

Rotary Vane Vacuum Pumps

TRIVAC B

Version for the North and South American Continents
Ordering Information
TRIVAC B,
with 1-phase motor
115 V, 60/50 Hz, NEMA plug
208-230 V, 60/50 Hz, NEMA plug
with 3-phase motor
208-230/460 V, 60 Hz / 200-220/380 V, 50 Hz

TRIVAC D 16 B

TRIVAC D 25 B

Part No. 912 65-1
Part No. 912 65-2

–
Part No. 912 75-2

Part No. 912 66-2

Part No. 912 76-2

two-stage

two-stage

Global Version
Ordering Information
TRIVAC B,
with 1-phase motor
230 V, 50 Hz
230 V, 50/60 Hz
100 V, 50 Hz / 110 V, 60 Hz
100 V, 50 Hz / 110 V, 60 Hz
115 V, 60 Hz
115 V, 60/50 Hz, NEMA plug
208-230 V, 60/50 Hz, NEMA plug
with 3-phase motor
230/400 V, 50 Hz / 250/440 V, 60 Hz
230/400 V, 50 Hz / 250/440 V, 60 Hz
230/400 V, 50 Hz, Exe II T3
200/346 V, 50 Hz / 208/360 V, 60 Hz
208-230/460 V, 60 Hz / 200-220/380 V, 50 Hz

TRIVAC D 16 B

TRIVAC D 25 B

Part No. 112 65
Part No. 113 25
–
Part No. 113 29 (SHC 224)
–
Part No. 912 65-1
Part No. 912 65-2

Part No. 112 75
Part No. 113 35
Part No. 113 36
Part No. 113 39 (SHC 224)
Part No. 113 48
–
Part No. 912 75-2

Part No. 112 66
Part No. 113 33 (RCF - E68N)
Part No. 113 27
Part No. 113 34 (RCF - E68N)
Part No. 912 66-2

Part No. 112 76
–
Part No. 113 37
–
Part No. 912 76-2

two-stage

two-stage

Accessories
FS 8-16 dust filter

Part No. 186 10

AS 8-16 dust separator

Part No. 186 11

MF 8-16 molecular filter

Part No. 186 12

FA 8-16 fine vacuum adsorption trap

Part No. 187 10

Adsorption trap with aluminium oxide
Activated aluminium oxide, 1.3 kg (2 l approx.)

Part No. 854 15
Part No. 854 10

AF 16-25 exhaust filter

Part No. 189 11

AR 16-25 exhaust filter with lubricant return

Part No. 189 21

AK 16-25 condensate trap

Part No. 188 11

OF 4-25 mechanical oil filter

Part No. 101 91

CF 4-25 chemical oil filter

Part No. 101 96

Connector for gas ballast inlet M 16 x 1.5 – DN 16 KF

Part No. 168 40

Oil drain tap

Part No. 190 90

Spare parts
Inside section
Seal kit

C01.18

Part No. E 200 10 956

Part No. E 200 10 960
Part No. 197 21

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC B

Rotary Vane Vacuum Pumps

N otes

C01

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.19

Rotary Vane Vacuum Pumps

TRIVAC B

TRIVAC D 40 B and D 65 B

TRIVAC D 65 B

a

c

DN

e

b2

b

* Depending on the motor
USA pumps max. length
D 40 B 760 mm (30“)
D 65 B 840 mm (33.1“)

h3

n
Type

m

D 40 B (Part No. 113 45)
D 40 B (Part No. 113 47)
D 65 B (Part No. 112 96, 113 57)
D 65 B (Part No. 113 55)

Dimensional drawing for the TRIVAC D 40 and D 65 B

o
b1

40 KF mm
in.
40 KF mm
in.
40 KF mm
in.
40 KF mm
in.
40 KF mm
in.

a

b

b1

b2

135
5.32
135
5.32
135
5.32
213
8.39
213
8.39

264
10.39
264
10.39
264
10.39
264
10.39
264
10.39

234
9.21
234
9.21
234
9.21
234
9.21
234
9.21

206
8.11
206
8.11
206
8.11
206
8.11
206
8.11

-5

10

3

10

D 65 B
D 40 B

10-1

1
10
10

10-2

10
0

1

2

3 min 4

Time

e

h

h1

h2

h3

l

m

n

o

676
26.61
u. r.
u. r.
667
26.26
750
29.53
u. r.
u. r.

382
15.04
382
15.04
382
15.04
382
15.04
382
15.04

191
7.52
191
7.52
191
7.52
191
7.52
191
7.52

190
7.48
190
7.48
190
7.48
190
7.48
190
7.48

-1
-2

-4

-3

10

-2

10

10

-1

1

10

Torr

750

2

m xh

Pumping speed

Pressure

Torr

10 0

10-3

10

750

10 1

c

166 111 355 336 308 302
6.54 4.37 13.98 13.23 12.13 11.89
166 u. r. u. r. u. r. u. r. u. r.
6.54 u. r. u. r. u. r. u. r. u. r.
166 111 355 336 308 302
6.54 4.37 13.98 13.23 12.13 11.89
166 111 355 336 308 302
6.54 4.37 13.98 13.23 12.13 11.89
166 u. r. u. r. u. r. u. r. u. r.
6.54 u. r. u. r. u. r. u. r. u. r.

u. r. = upon request

10
10 3
mbar
10 2

h2

l
DN

D 40 B (Part No. 112 86)

h

h1

50

D 65 B
D 40 B

-1

cfm

10

1

10
5

10

0

1
0.5

-3

10

0.1

-1
-5

10

-4

10

-3

10

-2

10

10

-1

10

0

1

10

mbar

3

10

Pressure
without gas ballast
with gas ballast

Pump-down characteristics of a 100 l vessel at 50 Hz

C01.20

Ultimate partial pressure without gas ballast
Ultimate total pressure without gas ballast
Ultimate total pressure with gas ballast

Pumping speed characteristics at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC B

Rotary Vane Vacuum Pumps

TRIVAC D 40 B

Technical Data

TRIVAC D 65 B

50 Hz

60 Hz

50 Hz

60 Hz

Nominal pumping speed 1)

m3 x h-1 (cfm)

46 (27)

55 (32.5)

75 (44)

90 (53)

Pumping speed 1)

m3 x h-1 (cfm)

40 (24)

48 (28)

65 (38)

78 (46)

Ultimate partial pressure without gas ballast 1) mbar (Torr)

10-4 (0.75 x 10-4)

Ultimate total pressure without gas ballast 1) mbar (Torr)

< 2 x 10-3 (< 1.5 x 10-3)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 5 x 10-3.(< 3.8 x 10-3)

Water vapor tolerance 1)

mbar (Torr)

C01

40 (30)

Water vapor capacity

gm/h

1184

1925

Oil filling, min./max.

l (qt)

1.7 / 2.6 (1.8 / 2.7)

2.0 / 3.3 (2.1 / 3.5)

Noise level 2) to DIN 45 635,
without/with gas ballast

dB(A)

57/59

Admissible ambient temperature

°C (°F)

12 - 40 (54 - 104)

Motor rating 2)

W (HP)

2200 (3)

Nominal speed

rpm

Type of protection 3)

1500

1800

IP

Weight 2)

kg (lbs)

Connections, Intake and Exhaust

1500

1800

54
68 (150)

DN

80 (177)
40 KF

Version for the North and South American Continents
Ordering Information
TRIVAC B,
with 3-phase motor
208-230/460 V, 60 Hz / 200-220/380 V, 50 Hz

TRIVAC D 40 B

TRIVAC D 65 B

Part No. 912 86-2

Part No. 912 96-2

two-stage

two-stage

Global Version
Ordering Information
TRIVAC B,
with 3-phase motor
230/400 V, 50 Hz / 250/440 V, 60 Hz
230/400 V, 50 Hz, Exe II T3
200/346 V, 50 Hz / 208/360 V, 60 Hz

Accessories

TRIVAC D 40 B

TRIVAC D 65 B

Part No. 112 86
Part No. 113 45
Part No. 113 47

Part No. 112 96
Part No. 113 55
Part No. 113 57

two-stage

Roots pump adaptor

two-stage

Part No. 168 30

FS 30-60 dust filter

Part No. 18615

AS 30-60 dust separator

Part No. 186 16

MF 30-60 molecular filter

Part No. 186 17

FA 30-60 fine vacuum adsorption trap

Part No. 187 15

Adsorption trap with aluminium oxide
Activated aluminium oxide, 1.3 kg (2 l approx.)

Part No. 854 16
Part No. 854 10

AF 40-65 exhaust filter

Part No. 189 16

AR 40-65 exhaust filter with lubricant return

Part No. 189 22

AK 40-65 condensate trap

Part No. 188 16

OF 40-65 mechanical oil filter

Part No. 101 92

CF 40-65 chemical oil filter

Part No. 101 97

Connector for gas ballast inlet M 16 x 1.5 – DN 16 KF

Part No. 168 40

Oil drain tap

Part No. 190 90

Spare parts
Inside section

Part No. E 200 10 933

Seal kit

Part No. E 200 10 944
Part No. 197 22

1)

To DIN 28 400 and following numbers
2) Weight, motor rating and noise levels for the pumps with 3-phase motor, 50 Hz, only.
Any data that deviate from the above for pumps with other motors, and other motor-dependent data are given in section “Products”, paragraph “Motor Dependent Data for the TRIVAC B, BCS and BCS-PFPE”
3) Global versions only. North and South American versions are TEFC
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.21

Rotary Vane Vacuum Pumps

TRIVAC B

TRIVAC D 16 B-DOT

TRIVAC D 16 B-DOT

a

DN

c

b2

e

b

h
h4

n

m

Type

DN

D 16 B-DOT (Part No. 114 06/10)

25 KF

h1

h2

h3

o
b1

l

mm
in.

a

b

b1

b2

c

h

h1

h2

h3

l

m

n

o

82

190

175

150

135

298

250

226

265

482

3.23 7.48 6.89 5.91 5.31 11.7 9.84 8.90 10.4

19

280

140

132

11

5.51 5.20

Dimensional drawing for the TRIVAC D 16 B-DOT

-5

10
3

10

2

10

1

10

10

0

1

10

-1

10

10

-2

10

10

-3

10

750

-3

10

-2

10

10

-1

1

10

Torr

750

2

50

m x h -1
3

Torr

-1

-2

0

Pumping speed

Pressure

10
mbar

-4

10

10 1

cfm
10
5

10 0

1
0.5

10 -1

0.1
0.05

-3

10
2

4
Time

6 min 8

10-2
10 -5

0.01

10 -4

10 -3

10 -2

10 -1

10 0

10 1

mbar

10 3

Pressure
Ultimate total pressure without gas ballast
Ultimate total pressure with gas ballast

Pump-down characteristics of a 10 l vessel at 50 Hz

C01.22

Pumping speed characteristics at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC B

Technical Data

50 Hz

Rotary Vane Vacuum Pumps

TRIVAC D 16 B-DOT

60 Hz

Nominal pumping speed 1)

m3 x h-1 (cfm)

18.9 (11.1)

22.7 (13.4)

Pumping speed 1)

m3 x h-1 (cfm)

16.5 (9.7)

19.8 (11.7)

Ultimate partial pressure without gas ball.1)

mbar (Torr)

Ultimate total pressure without gas ballast 1) mbar (Torr)

< 6 x 10-1 (< 4.5 x 10-1)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 9 x 10-1 (< 6.75 x 10-1)

Water vapor tolerance 1)

mbar (Torr)

25 (18.75)

Water vapor capacity

gm/h

259

Brake fluid filling, min./max.

l (qt)

0.45 / 1.0 (0.5 / 1.1)

Noise level to DIN 45 635,
without/with gas ballast

dB(A)

52 / 52

Admissible ambient temperature

°C (°F)

12 - 40 (54 - 104)

Motor rating

W (HP)

550 (0.75)

Nominal speed

rpm

Type of protection 2)
Weight

1500
54

kg (lbs)

26 (57.3)

DN

Ordering Information
TRIVAC B-DOT,
with 3-phase motor
230/400 V, 50 Hz; 250/440 V, 60 Hz
230/400 V, 50 Hz; 250/440 V, 60 Hz
with 1-phase motor 115 V, 60 Hz
with 3-phase motor 208-230/460 V, 60 Hz
208-220/380 V, 50 Hz

25 KF

Global version

Seal kit
2)

TRIVAC D 16 B-DOT

North and South America version

Part No. 114 06
Part No. 114 10 (with float switch)

AF 16-25 DOT exhaust filter

1)

1800

IP

Connections, Intake and Exhaust

C01

–

Part No. 914 62
Part No. 914 63
Part No. 124 16
Part No. 200 39 059

To DIN 28 400 and following numbers
Global versions only. North and South American versions are TEFC

As to the D 8 B-DOT, D 25 B-DOT and D 40 B-DOT please ask us for a quotation.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.23

Rotary Vane Vacuum Pumps

TRIVAC B

TRIVAC D 16 B-Ex (Explosion Blast Wave Resistant)

TRIVAC D 16 B-Ex

l
l1

b

b2

b1

h1

h

b3

l2
Type

b

D 16 B-Ex

mm
in.

b1

b2

b3

h

h1

l

l1

230 362 405 132 310 250 578 232
9.06 14.3 15.9 5.20 12.2 9.84 22.8 9.13

l2
280
11

Dimensional drawing for the TRIVAC 16 B-Ex (explosion blast wave resistant)

-5

10
3

10

2

10

1

10

10

0

1

10

-1

10

10

-2

10

10

-3

10

750
Torr

-1

-2

0

-3

10

-2

10

10

-1

1

10

Torr

750
50

m3 x h -1

Pumping speed

Pressure

10
mbar

10

-4

10

2

10 1

cfm
10
5

10 0

1
0.5

10 -1

0.1
0.05

-3

2

4
Time

6 min 8

10-2
10 -5

0.01

10 -4

10 -3

10 -1

10 -2

10 0

10 1

mbar

10 3

Pressure
without gas ballast
with gas ballast

Pump-down characteristics of a 10 l vessel at 50 Hz

C01.24

Ultimate partial pressure without gas ballast
Ultimate total pressure without gas ballast
Ultimate total pressure with gas ballast

Pumping speed characteristics at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC B

Rotary Vane Vacuum Pumps

TRIVAC D 16 B-Ex (Explosion Blast Wave Resistant)

Technical Data

Two-Stage

Nominal pumping speed 1)

m3 x h-1 (cfm)

18.9 (11.1)

Pumping speed 1)

m3 x h-1 (cfm)

16.5 (9.7)

Ultimate partial pressure without gas ballast 1)mbar (Torr)

10-4 (0.75 x 10-4)

Ultimate total pressure without gas ballast 1) mbar (Torr)

< 2 x 10-3 (< 1.5 x 10-3)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 5 x 10-3 (< 3.8 x 10-3)

Water vapor tolerance 1)

mbar (Torr)

25 (18.75)

Water vapor capacity

gm/h

305

Oil filling, min./max.

l (qt)

0.45 / 1.0 (0.5 / 1.1)(N 62)

Noise level to DIN 45 635,
without/with gas ballast

dB(A)

52 / 54

Admissible ambient temperature

°C (°F)

12 - 40 (54 - 104)

Motor rating

W (HP)

750 (1)

Nominal speed

Weight
with flame arresters
Connections
intake side
pressure side

1500

rpm

Type of protection

54

IP

50 (110.3)

kg (lbs)

G 3/4"
G 1"

Inside thread
Inside thread

Ordering Information

TRIVAC D 16 B-Ex (Explosion Blast Wave Resistant)

TRIVAC D 16 B-Ex (according to 94/9 EC) 2)
TRIVAC D 16 B-Ex (for propane and butane only) 3)
with explosion protected 3-phase motor
(Exe II T 3) 230/400 V, 50 Hz,
includes AF 16-25 exhaust filter,
specially modified for burst resistant
1)
2)
3)

C01

Two-Stage

Upon request
Part No. 113 30

To DIN 28 400 and following numbers
Available in June 2003
The pump is checked at pressures up to 12 bar absolute (160 psi, gauge)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.25

Rotary Vane Vacuum Pumps

TRIVAC BCS

TRIVAC BCS, Two-Stage Rotary Vane Vacuum Pumps

TRIVAC SYSTEM

The TRIVAC BCS pumps are oil-sealed vacuum
pumps operating according to the rotary vane
principle. Oil which is injected into the pump
chamber is used for sealing, lubrication and
cooling purposes.

Advantages to the User

The pump body is assembled from individual
parts without sealing components. The parts are
pinned in order to ensure easy disassembly and
reassembly of the parts.

♦ Built-in oil pump

The TRIVAC BCS are available with a three-phase
motor (The North and South American TRIVAC
D 16/25 BCS are also available with single-phase
motors). The motor is connected to the pumping
section via an elastic coupling.
In addition, the TRIVAC BCS is ready for system
integration (adaptable to different applications).

♦ Compact design
♦ Low noise operation with hardly any
vibrations

♦ Corrosion protected – the use of yellow
metals has been avoided; only grey cast iron,
surface treated aluminium, steel and stainless
steel is used.

♦ Continuous operation even at 1000 mbar
(750 Torr)

♦ Double shaft seal

♦ Pressure-lubricated sliding bearings

Typical Applications

♦ Anti-suckback valve controlled via the oil
pressure, no backstreaming of oil, independent of the operating mode, with or without
gas ballast

♦ In all areas of vacuum engineering

♦ Low backstreaming of oil within the pump
♦ High pumping speed down to ultimate pressure
♦ Either vertical or horizontal intake and exhaust
ports

♦ Pumping of corrosive or aggressive media
♦ Production of semiconductors and in the area
of chemistry
♦ Research and production
♦ Generation of rough and medium vacuum
♦ Backing pump in pump sets, i.e. in connection
with Roots, diffusion, turbo or cryo pumps

♦ All controls as well as the oil sight glass are
located on the face side

Supplied Equipment

♦ Low power consumption

♦ Small flanges

♦ Produces very little heat

♦ Centering, sealing and clamping rings

♦ Exchangeable inner section

♦ The intake port includes a dirt trap

♦ Main flow oil filters may be fitted

BCS pumps are supplied with a filling of mineral
oil N 62, HE-200 oil or perfluoropolyether (PFPE)
synthetic oil.

♦ Very long service life
♦ Modular system
♦ Service-friendly

C01.26

♦ Built-in temperature switch for temperature
monitoring

ALL PUMPS ARE SUBJECTED TO A VACUUM
TEST BEFORE DELIVERY!
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC BCS
TRIVAC SYSTEM

TRIVAC BCS-PFPE

The TRIVAC BCS and its accessories

In many applications the use of synthetic lubricants like perfluoropolyether (PFPE) offers for
superior characteristics compared to mineral oils.

♦ CFS, chemical filter with safety isolation valve
♦ ARS, exhaust filter with lubricant return
♦ IGS, inert gas system
♦ LSS, limit switch system and
♦ EIS, electrical indicator system
make up the TRIVAC SYSTEM.

Rotary Vane Vacuum Pumps
BCS-PFPE pumps have been especially prepared
for operation with PFPE and are supplied without
the oil filling. We recommend using our operating
fluid PFPE NC 1/14 or HE-1600 and always to
install a chemical oil filter CF/CFS.

Advantages of perfluoropolyther (PFPE) NC 1/14
and HE-1600:

C01

♦ Practically inert against all chemical and
oxidizing influences.
♦ No polymerization under the influence of high
energy radiation.
♦ PFPE is non-flammable. Leybold NC1/14 has
the approval of BAM (Federal Institute for
Materials Research and Testing) for pumping
of pure oxygen.
♦ In part significantly increased oil change intervals.
♦ Thermally highly stable. Thermal decomposition will only occur at temperatures over
290 °C (554 °F).

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.27

Rotary Vane Vacuum Pumps

TRIVAC BCS

TRIVAC D 16 BCS to D 65 BCS

TRIVAC D 25 BCS with ARS and CFS (left) and TRIVAC D 65 BCS with CFS, ARS, IGS, LSS, EIS – TRIVAC SYSTEM (right)

a

b2

DN

c

h4

Type

m

D 16 BCS (Part No. 113 68)

40 KF mm
in.
40 KF mm
in.
40 KF mm
in.
40 KF mm
in.

D 25 BCS (Part No. 113 78)
D 40 BCS (Part No. 113 88)
D 65 BCS (Part No. 118 98)

b
* Depending on the motor

h1

o
b1

h

USA pumps max. length
D 16 BCS 560 mm (22.1“)
D 25 BCS 660 mm (26“)
D 40 BCS 760 mm (30“)
D 65 BCS 840 mm (33.1“)

h3

h3
h2

l

DN

b2

4

h2

n

b

h1

h

o
b1

a

b

b1

b2

c

e

h

h1

h2

h3

h4

l

m

n

o

82
3.23
143
5.63
135
5.32
213
8.39

190
7.48
190
7.48
264
10.39
264
10.39

175
6.89
175
6.89
234
9.21
234
9.21

150
5.91
150
5.91
206
8.11
206
8.11

135
5.32
135
5.32
166
6.54
166
6.54

89
3.50
111
4.37
111
4.37
111
4.37

263
10.35
236
9.29
355
13.98
355
13.98

226
8.90
226
8.90
308
12.13
308
12.13

250
9.84
250
9.84
336
13.23
336
13.23

298
11.73
298
11.73
–
–
–
–

236
9.29
262
10.32
302
11.89
302
11.89

490
19.29
566
22.28
676
26.61
747
29.41

280
11.02
280
11.02
382
15.04
382
15.04

140
5.51
140
5.51
191
7.52
191
7.52

132
5.20
132
5.20
190
7.48
190
7.48

10 -1

1

Dimensional drawing for the TRIVAC D 16 to D 65 BCS

10-5
103
mbar

3

0

D 25 BCS

10

10-2

10

Torr 750
50

-1

D 16 BCS
D 65 BCS
D 40 BCS

1

10-1

10

10-2

10
10
0

2

4
Time

6 min 8

-1

-2

10
Pumping speed

Pressure

Torr

101

10-3

10-3

cfm
10
5

m xh

102

10

10

750

10-4

2

1

10 0

1
0.5

D 65 BCS
D 40 BCS
D 25 BCS
D 16 BCS

10 -1

0.1
0.05

-3

10 -2
10-5

0.01

10-4

10-3

10-1

10-2

100

101 mbar

103

Pressure
without gas ballast
with gas ballast

Pump-down characteristics of a 100 l vessel at 50 Hz

C01.28

Ultimate partial pressure without gas ballast
Ultimate total pressure without gas ballast
Ultimate total pressure with gas ballast
Pumping speed characteristics at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC BCS

TRIVAC
D 16 BCS

Technical Data

Rotary Vane Vacuum Pumps

TRIVAC
D 25 BCS

TRIVAC
D 40 BCS

TRIVAC
D 65 BCS

Nominal pumping speed 50/60 Hz 1)

m3 x h-1 (cfm)

18.9 (11.1) / 22.7 (13.4)

29.5 (17.4) / 35.4 ( 20.9)

46 (27) / 55 (32.5)

75 (44) / 90 (53)

Pumping speed 50/60 Hz 1)

m3 x h-1 (cfm)

16.5 (9.7) / 19.8 (11.7)

25.7 (15.1) / 30.8 (18.2)

40 (24) / 48 (28)

65 (38) / 78 (46)

Ultimate partial pressure
without gas ballast 1)

mbar (Torr)

10-4 (0.75 x 10-4)

Ultimate total pressure without gas ballast 1)

mbar (Torr)

< 2 x 10-3 (< 1.5 x 10-3)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 5 · 10-3 (< 3.8 x 10-3)

Water vapor tolerance 1)

mbar (Torr)

25 (18.8)

25 (18.8)

40 (30)

40 (30)

Water vapor capacity

gm/h

305

476

1184

1925

Oil filling, min./max.

l (qt)

0.45 / 1.0 (0.5/1.1)

0.6 / 1.4 (0.6/1.5)

1.7 / 2.6 (1.8/2.7)

2.0 / 3.3 (2.1/3.5)

Noise level 2) to DIN 45 635,
without/with gas ballast

dB(A)

52 / 54

52 / 54

57 / 59

57 / 59

1500 (2)

2200 (3)

Admissible ambient temperature

°C (°F)

Motor rating 2)

W (HP)

Nominal speed 50/60 Hz
Type of protection 3)
Weight 2)
Connections, Intake and Exhaust

12 - 40 (54 - 104)
750 (1)

750 (1)
1500 / 1800

rpm

54

IP
kg (lbs)
DN

26 (57.3)

32 (70.6)

68 (150)

80 (176.4)

25 KF

25 KF

40 KF

40 KF

1)

To DIN 28 400 and following numbers
Weight, motor rating and noise levels for the pumps with 3-phase motor, 50 Hz, only.
Any data that deviate from the above for pumps with other motors, and other motor-dependent data are given in section “Products”,
paragraph “Motor Dependent Data for the TRIVAC B, BCS and BCS-PFPE”
3) Global versions only. North and South American versions are TEFC
2)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.29

C01

Rotary Vane Vacuum Pumps

TRIVAC BCS

Version for the North and South American Continents
Ordering Information
TRIVAC BCS,
with 1-phase motor
115 V, 60/50 Hz, NEMA plug
200-230 V, 60 Hz, NEMA plug
with 3-phase motor
208-230/460 V, 60 Hz / 200-220/380 V, 50 Hz

TRIVAC
D 16 BCS

TRIVAC
D 25 BCS

TRIVAC
D 40 BCS

TRIVAC
D 65 BCS

Part No. 913 68-1
–

–
Part No. 913 78-2

–
–

–
–

Part No. 913 68-2

Part No. 913 78-3

Part No. 913 88-2

Part No. 913 98-2

two-stage

two-stage

two-stage

two-stage

Global Version
TRIVAC
D 16 BCS

TRIVAC
D 25 BCS

TRIVAC
D 40 BCS

TRIVAC
D 65 BCS

Part No. 113 68

Part No. 113 78

Part No. 113 88

Part No. 113 98

–

–

Part No. 168 30

Part No. 168 30

Exhaust filter with lubricant return
ARS 16-25
ARS 40-65

Part No. 189 56
–

Part No. 189 56
–

–
Part No. 189 57

–
Part No. 189 57

Condensate separator
AK 16-25
AK 40-65

Part No. 188 11
–

Part No. 188 11
–

–
Part No. 188 16

–
Part No. 188 16

Chemical filter with safety blocking valve
CFS 16-25
CFS 40-65

Part No. 101 76
–

Part No. 101 76
–

–
Part No. 101 77

–
Part No. 101 77

Inert gas system
IGS 16-25
IGS 40-65

Part No. 161 76
–

Part No. 161 76
–

–
Part No. 161 77

–
Part No. 161 77

Limit switch system
LSS 16-25
LSS 40-65

Part No. 161 06
–

Part No. 161 06
–

–
Part No. 161 07

–
Part No. 161 07

Electrical indicator system
EIS 16-25
EIS 40-65

Part No. 160 96
–

Part No. 160 96
–

–
Part No. 160 97

–
Part No. 160 97

Ordering Information
TRIVAC BCS
with 3-phase motor
230/400 V, 50 Hz / 250/440 V, 60 Hz

two-stage

two-stage

two-stage

two-stage

Accessories
Roots pump adaptor

RIS remote indicator system, remote monitoring

Part No. 188 96

MBS moisture barrier system

Part No. 189 67

Spare parts
Inside section
Seal kit

C01.30

Part No. 200 39 762

Part No. 200 39 764

Part No. 200 39 758

Part No. 200 39 760

Part No. 197 31

Part No. 197 31

Part No. 197 32

Part No. 197 32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC BCS

Rotary Vane Vacuum Pumps

N otes

C01

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.31

Rotary Vane Vacuum Pumps

TRIVAC BCS-PFPE

TRIVAC D 16 BCS-PFPE to D 65 BCS-PFPE

TRIVAC D 25 BCS-PFPE with CFS 16-25 and ARS 16-25 (left) and TRIVAC D 65 BCS-PFPE with CFS 40-65 (right)

a

b2

DN

c

b

b2

b

* Depending on the motor

h4

4

h2

n

m

Type

D 25 BCS-PFPE (Part No. 113 79, 154 51)
D 40 BCS-PFPE (Part No. 113 89)
D 40 BCS-PFPE (Part No. 154 52)
D 65 BCS-PFPE (Part No. 113 99)
D 65 BCS-PFPE (Part No. 54 54)

h2

h1

o
b1

l
DN

D 16 BCS-PFPE (Part No. 113 69, 154 50)

h3

25 KF mm
in.
25 KF mm
in.
40 KF mm
in.
40 KF mm
in.
40 KF mm
in.
40 KF mm
in.

h3

h
h1

USA pumps max. length
D 16 BCS-PFPE 560 mm (22.1“)
D 25 BCS-PFPE 660 mm (26“)
D 40 BCS-PFPE 760 mm (30“)
D 65 BCS-PFPE 840 mm (33.1“)

h

o
b1

a

b

b1

b2

c

e

h

h1

h2

h3

h4

l

m

n

o

82
3.23
142
5.59
135
5.32
135
5.32
213
8.39
213
8.39

190
7.48
190
7.48
264
10.39
264
10.39
264
10.39
264
10.39

175
6.89
175
6.89
234
9.21
234
9.21
234
9.21
234
9.21

150
5.91
150
5.91
206
8.11
206
8.11
206
8.11
206
8.11

135
5.32
135
5.32
166
6.54
166
6.54
166
6.54
166
6.54

111
4.37
111
4.37
111
4.37
111
4.37
111
4.37
111
4.37

263
10.35
263
10.35
355
13.98
355
13.98
355
13.98
355
13.98

226
8.90
226
8.90
308
12.13
308
12.13
308
12.13
308
12.13

250
9.84
250
9.84
336
13.23
336
13.23
336
13.23
336
13.23

298
11.73
298
11.73
–
–
–
–
–
–
–
–

262
10.32
262
10.32
302
11.90
302
11.90
302
11.90
302
11.90

507
19.96
566
22.28
670
26.38
714
28.11
750
29.53
796
31.34

280
11.02
280
11.02
382
15.04
382
15.04
382
15.04
382
15.04

140
5.51
140
5.51
191
7.52
191
7.52
191
7.52
191
7.52

132
5.20
132
5.20
190
7.48
190
7.48
190
7.48
190
7.48

Dimensional drawing for the TRIVAC D 16 to D 65 BCS-PFPE

10-5
750
3

Pressure

10-3

10-2

10 -1

1

10

Torr 750
50

-1

10 1

cfm
10
5

10 0

1
0.5

m xh

10 2

D 25 BCS-PFPE
D 16 BCS-PFPE
D 40 BCS-PFPE

10 1

D 65 BCS-PFPE

10 0

Torr
10
1

10 -1

10

10 -2

10

10 -3
0

10

2

4
Time

6 min 8

without gas ballast

Pump-down characteristics of a 100 l vessel at 50 Hz

C01.32

10-4

10 2

-1

-2

Pumping speed

10
mbar

3

D 65 BCS-PFPE
D 40 BCS-PFPE

10 -1

0.1
0.05

D 25 BCS-PFPE
D 16 BCS-PFPE

-3

10 -2
10 -5

0.01

10

-4

10

-3

10

-2

Ultimate partial pressure without gas ballast
Ultimate total pressure with gas ballast

10

-1

10

0

10

1

mbar

10

3

Pressure

Pumping speed characteristics at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

TRIVAC BCS-PFPE

Technical Data

TRIVAC D 16
BCS-PFPE

TRIVAC D 25
BCS-PFPE

TRIVAC D 40
BCS-PFPE

TRIVAC D 65
BCS-PFPE

Nominal pumping speed 50/60 Hz 1)

m3 x h-1 (cfm)

18.9 (11.1) / 22.7 (13.4)

29.5 (17.4) / 35.4 ( 20.9)

46 (27) / 55 (32.5)

75 (44) / 90 (53)

Pumping speed 50/60 Hz 1)

m3 x h-1 (cfm)

16.5 (9.7) / 19.8 (11.7)

25.7 (15.1) / 30.8 (18.2)

40 (24) / 48 (28)

65 (38) / 78 (46)

Ultimate partial pressure
without gas ballast 1)

mbar (Torr)

< 8 · 10-4 (< 6 x 10-4)

Ultimate total pressure without gas ballast 1)

mbar (Torr)

< 2 · 10-3 (< 1.5 x 10-3)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 5 · 10-3 (< 3.8 x 10-3)

Ultimate total pressure with
reduced gas ballast, 200 l x h-1 1)

mbar (Torr)

< 2 · 10-3 (< 1.5 x 10-3)

< 2 · 10-3 (< 1.5 x 10-3)

–

–

Lubricant filling
min./max.
upon delivery

l (qt)
l (qt)

0.45 / 1.0 (0.5 / 1.1)
0.2 (0.2)

0.6 / 1.4 (0.6 / 1.5)
0.4 (0.4)

1.5 / 2.5 (1.6 / 2.6)
0.6 (0.6)

2.0 / 3.5 (2.1 / 3.7)
0.75 (0.8)

Noise level 2) to DIN 45 635,
without/with gas ballast

dB(A)

52 / 54

52 / 54

57 / 59

57 / 59

Admissible ambient temperature

°C (°F)

12 3) - 40 (54 - 104)

12 - 40 (54 - 104)

12 - 40 (54 - 104)

12 - 40 (54 - 104)

Motor rating 2)

W (HP)

550 (0.75)

750 (1)

2200 (3)

2200 (3)

Nominal speed 50/60 Hz
Type of protection 4)
Weight 2)
Connections, Intake and Exhaust

1500 / 1800

rpm

54

IP
kg (lbs)
DN

27 (59.5)

33 (72.8)

71 (156.6)

83 (183)

25 KF

25 KF

40 KF

40 KF

1)

To DIN 28 400 and following numbers
Weight, motor rating and noise levels for the pumps with 3-phase motor, 50 Hz, only.
Any data that deviate from the above for pumps with other motors, and other motor-dependent data are given in section “Products”,
paragraph “Motor Dependent Data for the TRIVAC B, BCS and BCS-PFPE”
3) Cold start temperature to DIN
4) Global versions only. North and South American versions are TEFC
2)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.33

C01

Rotary Vane Vacuum Pumps

TRIVAC BCS-PFPE

Version for the North and South American Continents
Ordering Information
TRIVAC BCS,
with 1-phase motor
115 V, 60/50 Hz, NEMA plug
200-230 V, 60 Hz, NEMA plug
with 3-phase motor
208-230/460 V, 60 Hz / 200-220/380 V, 50 Hz

TRIVAC D 16
BCS-PFPE
two-stage

TRIVAC D 25
BCS-PFPE
two-stage

TRIVAC D 40
BCS-PFPE
two-stage

TRIVAC D 65
BCS-PFPE
two-stage

Part No. 913 69-1
–

–
Part No. 913 79-2

–
–

–
–

Part No. 913 69-2

Part No. 913 79-3

Part No. 913 89-2

Part No. 913 99-2

Global Version
TRIVAC D 16
BCS-PFPE

TRIVAC D 25
BCS-PFPE

TRIVAC D 40
BCS-PFPE

TRIVAC D 65
BCS-PFPE

Part No. 113 69
Part No. 154 50

Part No. 113 79
Part No. 154 51

Part No. 113 89
Part No. 154 52

Part No. 113 99
Part No. 154 54

–

–

Part No. 168 30

Part No. 168 30

Exhaust filter with lubricant return
ARS 16-25
ARS 40-65

Part No. 189 56
–

Part No. 189 56
–

–
Part No. 189 57

–
Part No. 189 57

Condensate trap
AK 16-25
AK 40-65

Part No. 188 11
–

Part No. 188 11
–

–
Part No. 188 16

–
Part No. 188 16

Chemical filter with safety isolation valve
CFS 16-25
CFS 40-65

Part No. 101 76
–

Part No. 101 76
–

–
Part No. 101 77

–
Part No. 101 77

Inert gas system
IGS 16-25
IGS 40-65

Part No. 161 76
–

Part No. 161 76
–

–
Part No. 161 77

–
Part No. 161 77

Limit switch system
LSS 16-25
LSS 40-65

Part No. 161 06
–

Part No. 161 06
–

–
Part No. 161 07

–
Part No. 161 07

Electrical indicator system
EIS 16-25
EIS 40-65

Part No. 160 96
–

Part No. 160 96
–

–
Part No. 160 97

–
Part No. 160 97

Ordering Information
TRIVAC BCS-PFPE,
with 3-phase motor
230/400 V, 50 Hz / 250/440 V, 60 Hz
200/400 V, 50 Hz / 220/440 V, 60 Hz

two-stage

two-stage

two-stage

two-stage

Accessories
Roots pump adaptor

RIS remote indicator system, remote monitoring

Part No. 188 96

MBS moisture barrier system

Part No. 189 67

Spare parts
Inside section
Seal kit

C01.34

Part No. 200 39 763

Part No. 200 39 765

Part No. 200 39 154

Part No. 200 39 156

Part No. 197 41

Part No. 197 41

Part No. 197 42

Part No. 197 42

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TRIVAC BCS-PFPE

Rotary Vane Vacuum Pumps

N otes

C01

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.35

Rotary Vane Vacuum Pumps

TRIVAC B, BCS, BCS-PFPE

TRIVAC D 16 + 25 B (BCS (-PFPE))

TRIVAC D 4 + 8 B

Motor Dependent Data for the TRIVAC B, BCS and BCS-PFPE

C01.36

Part No.

Part No.

D4B
113 04 / 113 08 (SHC 224)

D8B
113 14 / 113 18 (SHC 224)

113 03

113 13

112 45

112 55

113 09

113 21

112 46

112 56

113 06

113 16

912 45-1

–

912 45-2

–

912 46-2

–

–

912 55-1

–

912 55-2

–

912 56-2

D 16 B
D 16 BCS
D 16 BCS-PFPE
113 29 (SHC 224)
–
–
–
–
–
113 25
–
–
112 65
–
–
112 66 / 113 33 (RCF - E68N)
113 68
–
–
–
113 69
113 27 / 113 30 (Ex)
–
–
113 34 (RCF - E68N)
–
–
114 06 DOT / 114 10 DOT LSS
–
–
–
–
154 50
912 65-1
913 68-1
913 69-1
912 65-2
–
–
912 66-2
913 68-2
913 69-2
–
–
–
–
–
–

D 25 B
D 25 BCS
D 25 BCS-PFPE
113 36 / 113 39 (SHC 224)
–
–
113 48
–
–
112 75
–
–
–
–
–
–
–
–
112 76
113 78
113 79
113 37
–
–
–
–
–
–
–
–
–
–
154 51
–
–
–
–
–
–
–
–
–
912 75-2
913 78-2
913 79-2
912 76-2
913 78-3
913 79-3

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Nominal current (A) 1)

Size

Region

8.7

80

Japan

5.6

70

USA

0.5

2.9

70

Euro

0.37

0.5

2.9

70

Wide range

0.37

0.5

70

Euro (USA)

0.37

0.5

1.95/1.12
1.73/1.0
1.92/1.11

70

Euro

0.25

0.33

NEMA 56 C

USA

0.25

0.33

NEMA 56 C

USA

0.25

0.33

NEMA 56 C

USA

0.55

0.75

NEMA 56 C

USA

0.55

0.75

NEMA 56 C

USA

0.75

1

7
8.8
3.2-3.5
3.6-4.4
1.5-1.6/0.8
1.6/0.8
9.4
13
4.8-4.7
5.5-6.5
3.4-3.4/1.7
3.1 -/1.7

NEMA 56 C

USA

109-121

0.75

1

12.5

90

USA

50
60

95-105
95-115

0.75

1

14.5
14.5

90

Japan

230

50

208-252

0.75

1

6.3

90

Euro

380 66 003
1~

230

50

218-242

0.55

0.75

5.0

80

Euro

380 66 001
3~

230/400
250/440

50
60

218-242/380-420
240-277/415-480

0.55

0.75

2.85/1.65
2.5/1.45

70

Euro (USA)

380 66 002
3~

230/400
250/440

50
60

218-242/380-420
240-277/415-480

0.75

1

3.55/2.05
3.25/1.85

80

Euro (USA)

200 10 409
3 ~ Exe II CT3

230/400

50

218-242/380-420

0.75

1

3.4/1.97

80

Euro

200 10 410
3~

200/346
208/360

50
60

190-210/330-365
190-230/330-400

0.75

1

4.3/2.5
4.3/2.5

80

200 10 299
3~

230/400
250/440

50
60

218-242/380-420
240-265/415-460

0.55

0.75

3.2/1.85
2.8/1.6

70

Japan, South
and Central America
USA
Euro

100 000 807
3~

200/400
220/440

50
60

190-220/380-440
190-240/380-480

0.75

1

4.3/2.15
4.0/2.0

80

Wide range

722 60 117
1~

115
115

60
50

103-126
103-126

0.55

0.75

9.4
13

NEMA 56 C

USA

722 60 005
1~

208-230
208-230

60
50

187-253
187-253

0.55

0.75

4.8-4.7
5.5-6.5

NEMA 56 C

USA

722 60 135
3~

208-230/460
208-220/380

60
50

187-253/414-506
187-242/342-418

0.75

1

3.4-3.4/1.7
3.1/1.7

NEMA 56 C

USA

722 60 022
1~

200-230

60

180-253

1.1

1.5

9.6-9.2

NEMA 56 C

USA

722 60 071
3~

200-230/460
200/380

60
50

180-253/414-506
180-220/342-418

1.1

1.5

9.0-8.0
9.6-9.2

NEMA 56 C

USA

Motor voltage (V)

Frequency (Hz)
± 5%

Voltage range (V)

100
110
115

50
60
60

95-105
95-115
109-121

230

50

230

Power
kW

HP

0.37
0.37

0.5
6.1
0.5

218-242

0.37

230/400
250/440
230/400

50
60
50
60
50

208-252
208-252
218-242/380-420
240-277/415-480
218-242/380-420

115
110
200-230
200-220
200-230/460
200/380
115
115
208-230
208-230
208-230/460
208-220/380

60
50
60
50
60
50
60
50
60
50
60
50

103-126
99-121
180-253
180-220
180-253/414-506
180-220/342-418
103-126
103-126
187-253
187-253
187-253/414-506
187-242/342-418

200 10 679
1~

115

60

200 10 408
1~

100
110

380 66 004
1~

200 10 404
1~
200 10 403
1~
380 66 008
1~
200 39 867
1~
380 66 006
3~
200 10 406
3 ~ EXE II CT3
722 60 095
1~
722 60 096
1~
722 60 067
3~
722 60 117
1~
722 60 005
1~
722 60 135
3~

C01
TRIVAC D 4 + 8 B

Ref. No. 1- or 3-ph

1)

Rotary Vane Vacuum Pumps

TRIVAC D 16 + 25 B (BCS (-PFPE))

TRIVAC B, BCS, BCS-PFPE

Will be changed for engineering reasons in 2003

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.37

Rotary Vane Vacuum Pumps

TRIVAC B, BCS, BCS-PFPE

TRIVAC D 40 + 65 B
(BCS(-PFPE))

Motor Dependent Data for the TRIVAC B, BCS and BCS-PFPE

D 4/8 B
Shaft dimensions l d / l
Size of flange A/B

C01.38

Part No.

Part No.

D 40 B
D 40 BCS
D 40 BCS-PFPE
112 86
113 88
113 89
113 45
–

D 65 B
D 65 BCS
D 65 BCS-PFPE
112 96
113 98
113 99
113 55
–

113 47
–
–
–
–
154 52
912 86-2
913 88-2
913 89-2

113 57
–
–
–
–
154 54
912 96-2
913 98-2
913 99-2

D 16/25

D 40

D 65 B

S 1.5

14 / 30
19 / 40
24 / 50
28 / 60
11 / 23
140 / 95 160 / 110 160 / 110 160 / 110 120 / 100

Type of protection:
Type of motor:
Rotational speed 50/60 Hz:

IP 54
B 14
1500 / 1800

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

1)

Ref. No.
1- or 3-ph

Motor voltage (V)

Frequency (Hz)
± 5%

Voltage range (V)

380 66 012
3~

230/400
250/440

50
60

200 10 411
3 ~ Exe II CT3

230/400

200 10 412
3~

Power

Rotary Vane Vacuum Pumps

Nominal current (A) 1)

Size

Region

kW

HP

218-242/380-420
240-277/414-480

2.2

3

8.65/5.0
7.8/4.5

90

Euro (USA)

50

218-242/380-420

2.2

3

9.4/5.4

100

Euro

200/346
208/360

50
60

190-210/330-365
190-230/330-400

2.2

3

10.1/5.85
10.1/5.85

90

200 15 402
3~

200/400
220/440

50
60

190-220/380-440
190-240/380-480

2.2

3

11.8/5.9
10/5

100

Japan, South
and Central America
USA
Wide range

722 60 011
3~

200-230/460
200-220/380-415

60
50

180-253/414-506
180-242/342-418

3

4

9.0-8.4/4.2
9.4-9.6/4.6-4.7

NEMA 182 TC

USA

C01
TRIVAC D 40 + 65 B
(BCS(-PFPE))

TRIVAC B, BCS, BCS-PFPE

Will be changed for engineering reasons in 2003

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.39

Rotary Vane Vacuum Pumps

Accessories for TRIVAC E and B

Exhaust Filters AF 8, AF 25 / Condensate Traps AK 8, AK 25

Exhaust filter (left) and condensate trap (right)

Exhaust-Filter

Condensate Trap

Technical Information

Oil mists and aerosols are retained in the exhaust
filter.

Condensate traps prevent the formation of condensate in the pump as well as the backstreaming of fluids.

The exhaust filter is not capable of retaining toxic
and/or aggressive gases. For such applications
we recommend the use of an exhaust gas line
(e.g. a gas washer).

Advantages to the User

Since the material is not resistant to all gases and
solvents, a materials compatibility chart is available upon request.

Advantages to the User
♦ Filtering of the exhaust gas by removal of
entrained lubricant particles
♦ Emptying via drain screw or exhaust filter
drain tap
♦ Separation efficiency > 99 %
♦ Filter elements (made of glass fiber) are
exchangeable

♦ Can be connected to either the intake or the
exhaust side
♦ Protects against condensate forming from
sucked in vapors or gases (intake line)
♦ Protects against backstreaming liquids
(exhaust line)
♦ Emptying via drain screw/drain tap

h1

Type
AF 8/AK 8
AF 25/AK 25

mm
in.
mm
in.

a
a1
b
66.4 38 115
2.61 1.50 4.53
115 80 165
4.53 3.15 6.50

b1
c
d
h
h1
57.5 M 6 20 145 15.5
2.26
0.79 5.71 0.61
82.5 M 10 20 250 30
3.25
0.79 9.84 1.18

h

d
b
b1
c

a1

a

Dimensional drawing for the exhaust filters and condensate trap

C01.40

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for TRIVAC E and B

Technical Data
Connection to pump
(necessary accessories: elbow)

TRIVAC

Connection flanges
Max. filling level (for vertical installation)
Permissible leak rate
Max. continuous temperature

DN
ml (qt)

AF 8

AK 8

AF 25

AK 25

D 2.5 E; D 4 B

D 2.5 E; D 4 B

D 16 B

D 16 B

D8B

D8B

D 25 B

D 25 B

16 KF

16 KF

25 KF

25 KF

60 (0.06)

60 (0.06)

285 (0.3)

285 (0.3)

mbar x l x s-1

≤ 1 · 10-5

°C (°F)

90 (194)

Material

Ordering Information
Exhaust filter

Rotary Vane Vacuum Pumps

C01

PA 6

AF 8

AK 8

AF 25

AK 25

Part No. 190 50

–

Part No. 190 53

–

Part No. 190 95

Exhaust filter drain tap

–

Part No. 190 60

–

Part No. 190 63

Replacement filter element (pack of 5)
FE 8
FE 25

Part No. 190 80
–

–
–

–
Part No. 190 83

–
–

Elbow (1x)

Part No. 184 36

Part No. 184 36

Part No. 184 37

Part No. 184 37

Centering ring with O-ring (2x)
aluminium / NBR
stainless steal / FPM

Part No. 183 26
Part No. 883 46

Part No. 183 26
Part No. 883 46

Part No. 183 27
Part No. 883 47

Part No. 183 47
Part No. 883 47

Clamping ring (2x)

Part No. 183 41

Part No. 183 41

Part No. 183 42

Part No. 183 42

Condensate trap

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.41

Rotary Vane Vacuum Pumps

Accessories for TRIVAC E and B

Exhaust Filter Drain Tap
l1

b
G1/4" BPS
SW 17

The exhaust filter drain tap simplifies draining of
the oil from the exhaust filter.

mm
in.

SW 6

b1

a
a1
b
b1
l
l1
l2
8.5
5
23
20
41
26
10
0.33 0.20 0.90 0.79 1.61 1,02 0,39

l2

a1
a

Dimensional drawing for the exhaust filter drain tap

l

Technical Note
Tec hnic al Data

May also be used in connection with the condensate separator AK.

Exhaust Filter Drain Tap

mbar x l x s -1

Leak rate

Order ing Information

≤ 10-5

Exhaust Filter Drain Tap
Part No. 190 95

Exhaust filter drain tap

Oil Drain Tap
a
l
l1
l2
10.5 76
22
11
0.41 2.99 0.87 0.43

mm
in.

SW 19

a

M16 x 1,5

l2

This oil drain tap may be screwed into the oil
drain when wanting to change the oil in the rotary
vane pumps. It is also suited for the condensate
separators and exhaust filters of the TRIVAC B
series.

l
Dimensional drawing for the oil drain tap

Oil Drain Tap

Tec hnic al Data
Leak rate

mbar x l x s-1

Order ing Information

Oil Drain Kit

Tec hnic al Data
Length

mbar x l x s-1

Order ing Information
l = 280 mm = 11 in.

Oil drain kit

Oil Drain Tap

Oil Drain Kit
mm (in.)

Leak rate

≤ 10-5

Part No. 190 90

Oil drain tap

l

Hose nozzle

l1

280 (11)
≤ 10-5

Oil Drain Kit
Part No. 190 94

Dimensional drawing for the oil drain kit

C01.42

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for TRIVAC E and B

Rotary Vane Vacuum Pumps

AR-V Oil Suction Facility Controlled by Solenoid Valve
The oil suction facility AR-V with its solenoid
valve allows the removal of oil via the gas ballast
which has collected in the exhaust filter. When
the valve is closed the gas ballast remains fully
operational.
For this, a hose link is provided between the
exhaust filter and the gas ballast.

C01

Technical Note
If oil which has collected in the exhaust filter is to
be removed, the solenoid valve is opened briefly.
AR-V oil suction facility controlled by solenoid valve (kit without exhaust filter)

Tec hnic al Data
mbar x l x s-1

Leak rate

Or der ing Information
AR-V oil suction facility controlled by solenoid valve
24 V DC, 4 W, normally closed

AR-V Oil Suction Facility
Controlled by Solenoid Valve
≤ 10-5

AR-V Oil Suction Facility
Controlled by Solenoid Valve
Part No. 190 92

AR-M Manually Operated Oil Suction Facility
The oil suction facility AR-M allows the removal
of oil via the gas ballast which has collected in
the exhaust filter, whereby the gas ballast
remains fully operational as long as the angled
ball valve remains closed.
For this, a hose link is provided between the
exhaust filter and the gas ballast.

Technical Note
If oil which has collected in the exhaust filter is to
be removed, the angled ball valve is manually
opened briefly.

AR-M manually operated oil suction facility (kit without exhaust filter)

Tec hnic al Data
Leak rate

mbar x l x s-1

Order ing Information
AR-M manually operated oil suction facility

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

AR-M Manually Operated
Oil Suction Facility
≤ 10-5

AR-M Manually Operated
Oil Suction Facility
Part No. 190 93

C01.43

Rotary Vane Vacuum Pumps

Accessories for TRIVAC E and B

Dust Separators AS 8-16, AS 30-60 / Molecular Filters MF 8-16, MF 30-60
a

a1

DN 40 KF

c

d1

DN

d

h

k

AS 30-60 dust separator (MF 30-60 molecular filter is similar)

h1

Dust separators protect pumps against contamination and damage by sucked-in dust.

Advantages to the User

DN 40 KF

♦ Dust separators for large quantities of dust

Type
AS/MF 8-16

DN
25 KF

♦ Two-stage, thus hardly any throttling

AS/MF 30-60

40 KF

♦ Cyclone (for coarse dust) and wet filter (for
fine dust)
♦ Dust separator and molecular filter have the
same housing (for easy conversion)

Typical Application
♦ Separation of coarse and medium size dust
starting at a grain size of 2 µm.

Technical Information
Installing a dust filter in the intake line of the
pump will throttle its pumping speed at low
intake pressures more than at higher intake
pressures. This must be taken into account when
designing a vacuum system.
Even when large quantities of dust are deposited,
the throttling effect will hardly increase.

TRIVAC

Capacity for dust
Capacity for resin vapors or similar

%
%
l (qt)

kg (lbs)

Impact ring filling

l (qt)

c
43
1.69
70
2.76

ld
133
5.24
205
8.07

l d1
162
6.38
234
9.12

h
247
9.72
530
20.9

h1
150
5.91
395
15.6

h2
37
1.46
190
7.48

k
–
–
75
2.95

Supplied Equipment

Technical Information

Blanked off drain port.

Installing a molecular filter in the intake line of
the pump will throttle its pumping speed at low
intake pressures more than at higher intake pressures. This must be taken into account when
designing a vacuum system.

Molecular filters are used to separate vapors of
a high molecular weight (i. e. monomers, vapors
from resins).

Supplied Equipment
Blanked off drain port.

Advantages to the User
♦ Molecular filter and dust separator have the
same housing (for easy conversion)
♦ Separation of high-molecular weight vapors
♦ Protection of the pump’s oil against damaging
vapors

AS 8-16

Throttling of the pumping speed
at 1 mbar (0.75 Torr) intake pressure, approx.
at 10 mbar (7.5 Torr) intake pressure, approx.

a1
100
3.94
190
7.48

Dimensional drawing for the AS dust separators and MF molecular filters

Technical Data
Connection to pump

a
181
7.13
310
12.2

mm
in.
mm
in.

h2

AS 30-60

MF 8-16

MF 30-60

D 16 B

D 25 B

D 40 B

D 65 B

D 16 B/BCS

D 25 B/BCS

D 40 B/BCS

D 65 B/BCS

10
5

15
7

8
4

16
9

10
5

15
7

8
4

16
9

0.6 (0.6)

2.0 (2.1)

–

–

–

–

0.15 (0.3)

0.35 (0.8)

0.5 (0.5)

3.5 (3.7)

–

–

Active charcoal filling

kg (lbs)

–

–

0.6 (1.3)

1.4 (3.1)

Weight

kg (lbs)

4.5 (9.9)

18.4 (40.6)

4.5 (9.9)

18.4 (40.6)

Ordering Information

AS 8-16

AS 30-60

MF 8-16

MF 30-60

Part No. 186 11
–

Part No. 186 16
–

–
Part No. 186 12

–
Part No. 186 17

Replacement filter insert

–

Part No. 178 43

–

–

Replacement active charcoal insert
Active charcoal, undried, 5 kg (11 lbs)

–
–

–
–

Part No. 178 07
Part No. 178 10

Part No. 178 08
Part No. 178 10

Dust separator
Molecular filter

C01.44

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Accessories für TRIVAC E and B

Fine Vacuum Adsorption Traps FA 2-4, FA 8-16, FA 30-60
0.01

0.001
10

Pumping speed

Fine vacuum adsorption traps are vacuum-tight
vessels which offer a high adsorption capacity
especially for water vapor.

Advantages to the User
♦ Total pressures of 1.5 x 10-5 mbar (1.125 x
10-5 Torr) can be attained with a two-stage
rotary vane vacuum pump

C01

FA 30 - 60
FA 8 - 16
FA 2 - 4

10

3

10

2

10

1

10

0

8
6
4
2

10

-3

4 68

2

10

♦ Zeolite filling can be easily regenerated (baked
at 300 °C (572 °F))
♦ High conductance

7.5

4

l .s-1

Heating rod and
fine vacuum adsorption trap

Torr

0.1

-2

10

-1

0

10 mbar10

1

Pressure
Conductances of fine vacuum adsorption traps as a function of the intake pressure of the TRIVAC

Typical Application
a

♦ Producing a vacuum which is free of water
vapor

b
d
d1

Technical Information
Liquid nitrogen in the adsorption trap will increase its adsorption capacity.
The conductance of the adsorption trap is higher
than the pumping speed of the corresponding
pump. See figure where the average pressure
ahead and after the fine vacuum adsorption trap
is plotted on the horizontal axis.
The adsorption traps may be installed in the
intake line.

d2

Type
FA 2-4

DN
16 KF mm
in.
FA 8-16 25 KF mm
in.
FA 30-60 40 KF mm
in.

a
70
2.76
90
3.54
110
4.33

b
d
d1
d2
d3
h
h1
128 42
38 115 80 330 291
5.04 1.65 1.50 4.53 3.15 13 11.5
157.5 52
48 135 100 390 345
6.20 2.05 1.89 5.34 3.94 15.4 13.6
200 62
58 160 120 460 406
7.87 2.44 2.28 6.30 4.72 18.1 16

h
h1

d3

Dimensional drawing for the FA fine vacuum adsorption trap

Tec hnic al Data

FA 2-4

FA 8-16

FA 30-60

D 2.5 E
D 4/8 B

D 16/25 B/BCS

D 40/65 B/BCS

0.3 (0.7)

0.7 (1.5)

1.25 (2.8)

1

4

9

200

200

300

FA 2-4

FA 8-16

FA 30-60

Part No. 187 05

Part No. 187 10

Part No. 187 15

Heating rod for adsorption trap

Part No. 854 21

Part No. 854 21

Part No. 854 23

Molecular sieve zeolite 13 X, 1 kg (2.2 lbs)

Part No. 854 20

Part No. 854 20

Part No. 852 20

Connection to pump

Zeolite filling, approx.

TRIVAC

kg (lbs)

Conductance below 10-2 mbar (0.075 Torr)
Power rating of the heating rod
at a main voltage of 220 V

l x s-1

W

Or der ing Information
Fine vacuum adsorption trap filled with zeolite,
without heating rod

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.45

Rotary Vane Vacuum Pumps

Accessories for TRIVAC E and B

Dust Filters FS 2-4, FS 8-16, FS 30-60
a

a
c

c

DN

DN
h

h

h1
h1

Dust filter

The dust filters protect the pumps against the
intake of dust.

b

b

b1

FS 2-4, FS 8-16

FS 30-60

Advantages to the User
♦ Easy to disassemble
♦ Vacuum-tight cast iron casing
♦ Replacement filters may be easily exchanged
♦ Separates dusts from a grain size of 1 µm

Technical Information
Installing a dust filter in the intake line of the
pump will throttle its pumping speed at low
intake pressures more than at higher intake
pressures. This must be taken into account when
designing a vacuum system.
Since the dust filters have only a small dust
collecting chamber, we recommend – in the case
of larger dust quantities – the two-stage dust
separators from the AS range.
The dust filters should be installed in a horizontal
flow so that the filter insert may be removed by
pulling it down and out.

Type
FS 2-4

DN
16 KF

FS 8-16

25 KF

FS 30-60

40 KF

a
90
3.54
110
4.33
130
5.12

mm
in.
mm
in.
mm
in.

b
112
4.41
150
5.91
190
7.48

l b1
–
–
–
–
170
6.69

c
30
1.18
50
1.97
60
2.36

h, approx.
105
4.13
125
4.92
225
8.86

Dimensional drawing for the FS dust filters

Tec hnic al Data
Connection to pump

Weight

FS 2-4
TRIVAC

Throttling of the pumping speed
at 1 mbar (0.75 Torr), approx.
at 10 mbar (7.5 Torr), approx.

%
%
kg (lbs)

Order ing Information
Dust filter
Replacement filter insert

FS 8-16

FS 30-60

D 2.5 E
D4B

S8B
D8B

D 16 B

D 25 B

D 40 B

D 65 B

6
4

10
7

12
6

18
9

12
3

25
8

1.0 (2.2)

1.6 (3.5)

7.5 (16.5)

FS 2-4

FS 8-16

FS 30-60

Part No. 186 05

Part No. 186 10

Part No. 186 15

Part No. 178 32

Part No. 178 33

Part No. 178 35

Part No. 200 39 051

Part No. 971 98 251

Replacement wadding cartridges (1 set = 10 pieces) Part No. 200 39 050

C01.46

h1, approx.
165
6.50
205
8.07
250
9.84

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for TRIVAC E and B

Rotary Vane Vacuum Pumps

TK 4-8 Cold Trap

C01
TK 4-8 cold trap

The cold trap protects the pump against
damaging vapors.

Advantages to the User

mm
in.

b
b1
b2
a
a1
140 125 130 102 ≈ 26
5.51 4.92 5.12 4.02 ≈ 1

mm
in.

d1
d2
d3
h
h1
h2
20
8
10 220 60 ≈ 16
0.79 0.31 0.39 8.66 2.36 ≈ 0.6

♦ Rugged and implosion resistant
♦ May be fitted directly on the flange of the
pump
♦ Safe draining of the condensate without
problems
♦ Casing made of corrosion resistant stainless
steel

Dimensional drawing for the TK 4-8 cold trap

♦ Simple filling with refrigerant (liquid nitrogen
(LN2) or a mixture of acetone and carbon dioxide ice)

Tec hnic al Data
Connection to pump

TK 4-8
TRIVAC

D 2.5 E
D 4/8 B

l (qt)

0.4 (0.4)

Typical Applications
♦ Prevention of oil from backstreaming into the
vacuum system when operating at ultimate
pressure
♦ Freezing of gases and vapors in the laboratory

Capacity for refrigerant, approx.
Connections
Weight

DN

16 KF

kg (lbs)

4 (8.8)

Or der ing Information
Cold trap

TK 4-8
Part No. 188 20

Drain tap for the intake side, vacuum-tight

Part No. 190 90

Elbow (1x)

Part No. 184 36

Centering ring
aluminum/NBR (2x)
stainless steel/FPM (2x)

Part No. 183 26
Part No. 183 46

Clamping ring (2x)

Part No. 183 41

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.47

Rotary Vane Vacuum Pumps

Accessories for TRIVAC E and B

Version for the North and South American Continents

RST Refillable Traps
D
C

A

B

RST Refillable trap

The RST traps are made from 304 stainless steel,
and when specified with stainless steel filtration
media, are fully suited for corrosive applications.
The media is inserted directly into the trap. This
ensures direct contact with the trap walls. There
is no oil path between the trap wall and the retainer gasket to reduce trap effectiveness.

CLAMP

Model

Flange

RST16KF DN 16 KF both ends
RST25KF DN 25 KF both ends
RST40KF DN 40 KF both ends

Dimension

lA

lB

C

D

mm
in.
mm
in.
mm
in.

KF 16

63
21/2
76
3
102
4

83
31/4
108
41/4
102
4

133
51/4
171
63/4
178
7

KF 25
KF 40

Dimensional drawing for the RST

Advantages to the User
♦ Refillable

Tec hnic al Data

RST16KF

RST25KF

RST40KF

D 4/8 B/BCS

D 16/25 B/BCS

D 40/65 B/BCS

RST16KF

RST25KF

RST40KF

RST16KF, 1.9 lb (0.9 kg)

Part No. 99 171 135

–

–

Applications

RST25KF, 2.6 lb (1.2 kg)

–

Part No. 99 171 136

–

Foreline traps are utilized whenever long-term
effects of mechanical pump oil back migration
into the pumped chamber or higher vacuum (oil
diffusion) pump may be undesirable. Copper
wool for standard applications and stainless steel
wool for corrosive applications are available.

RST40KF, 4.1 lb (1.9 kg)

–

–

Part No. 99 171 137

Filtering media
Stainless steel
RF Copper

Part No. 99 171 141
Part No. 99 171 145

Part No. 99 171 141
Part No. 99 171 146

Part No. 99 171 141
Part No. 99 171 147

BUNA-N Gasket

Part No. 725 80 005

Part No. 725 80 006

Part No. 725 80 007

♦ Two Filtration Media
♦ Easy to Clean
♦ Easy to Recharge
♦ KF Flanges

C01.48

Connection to pump

TRIVAC

Or der ing Information

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Accessories for TRIVAC E and B

Version for the North and South American Continents

SE Smoke Eliminator

C01
Model
SE 2-4

Flange
DN 16 KF

SE 8-16

DN 25 KF

SE 30-60

DN 40 KF

Dimension
mm
in.
mm
in.
mm
in.

A
64
21/2
127
5
267
101/2

B
76
3
152
6
121
43/4

C
70
23/4
51
2
57
21/4

SE Smoke eliminator

The Leybold SE Smoke Eliminator can be utilized
on all TRIVAC B Rotary Vane Pumps where pump
fluid loss at the exhaust port must be eliminated.
These filters consist of a replaceable two-stage
coalescing element mounted in a steel housing.
For maintenance purposes, the top of the housing can be removed by loosening a single bolt.
The filter assembly attaches to the exhaust port
of the TRIVAC pump by means of a KF flange.
Since three models are available, an SE Smoke
Eliminator is available for each TRIVAC pump
model.

Advantages to the User

Dimensional drawing for the SE

Tec hnic al Data
Connection to pump

Or der ing Information

♦ Two Stage Design

Smoke Eliminator

♦ Three Sizes For All TRIVAC B Models

Replacement Element
RE 2-4
RE 8-16
RE 30-60

♦ KF Flanges

TRIVAC

SE 2-4

SE 8-18

SE 30-60

D 4/8 B

D 16/25 B

D 40/65 B

SE 2-4

SE 8-18

SE 30-60

Part No. 99 171 125 Part No. 99 171 126
Part No. 99 171 128

–

–
–

Part No. 99 171 129

–

Part No. 99 171 127

–
Part No. 99 171 130

Applications
When any oil sealed mechanical vacuum pump is
used to pump a fixed volume from atmospheric
pressure to some lower pressure or when a
dynamic gas flow from a process stream is
pumped, some mechanical pump fluid loss will
occur at the exhaust of the pump. The more often
a fixed volume is cycled from atmospheric pressure to a lower pressure or the longer a pump
operates at a relatively high inlet pressure in a
dynamic flow condition, the greater will be the
fluid loss at the exhaust port of the pump.

By utilizing a coalescing exhaust filter for these
applications, the fluid and exhaust gases are
separated, and in the case of the SE Smoke Eliminator, the coalesced fluid is allowed to drain
back into the pump fluid reservoir. Annoying oil
fog to the atmosphere is thus eliminated.

NOTE - For applications where toxic, corrosive,
radioactive or precious gases are pumped, we
highly recommend the use of our AF Coalescing
Exhaust Filters instead of the SE Smoke Eliminator. The AF is an in-line type coalescing filter and
much more suitable for these applications.

Eventually, after about a year's normal operation,
the coalescing element will become totally saturated and oil fog will be apparent when high inlet
pressures are prevailing. The low cost coalescing
element can be easily replaced.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.49

Rotary Vane Vacuum Pumps

Accessories for TRIVAC E and B

Version for the North and South American Continents

Compact Oil Mist Exhaust Filters
C

Typ
DN 25
D

mm
in.

A
196.85
7 3/4

B
22.23
7/8

lC
133.35
5 1/4

D
22.23
7/8

A

B

Compact oil mist exhaust filter

Dimensional drawing for the compact oil mist exhaust filter

Applications and Equipment

Features and Specifications

♦ Rotary vane pumps

♦ Minimum 99.97 % D.O.P. on 3 micron
particles

♦ Vacuum furnaces, ovens and degassing
♦ Refrigeration and air condition
♦ Vacuum freeze drying
♦ Vacuum metallizing
♦ Vacuum coating

♦ Autoclaving, sterilization

Technica l Data

scfm (m3/hr)
scfm (m3/hr)
kg (lbs)

Ordering Information
Compact oil mist exhaust filter
Replacement filter insert filter

C01.50

♦ 1/8" NPT oil drain

♦ Compact, low profile design

♦ Easy release V-band clamp

♦ Stainless steel housing and internals

♦ Seamless drawn housings - no welds to rust
or vibrate apart
♦ Easy field maintenance
♦ Operating temperature:
40 °F (4 °C) to 220 °F (104 °C)

♦ Leak detection

Connection to pump
ISO inlet and outlet
Nominal vacuum pump rating
Element rating
Weight, approx.

♦ Captures oil fog, mist or smoke from exhaust
of oil lubricated vacuum pumps

♦ Pleated filter element provides increased surface area for low back pressure

♦ Laboratory furnaces, test stands

♦ Back pressure valve designed to release
element at 7.35 PSI (0.5 bar) differential for
pump safety

Compact Oil Mist Exhaust Filter
TRIVAC D16/25B
DN 25
20 (34)
20 (34)
1 (2.2)

Compact Oil Mist Exhaust Filter
Part No. 721-87-113
Part No. 721-87-099

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for TRIVAC E and B

Rotary Vane Vacuum Pumps

N otes

C01

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.51

Rotary Vane Vacuum Pumps

Accessories for TRIVAC B

Condensate Separators AK 4-8, AK 16-25, AK 40-65
DN

DN

c

e

h1
h

AK 4-8 condensate separator

h2

Separators protect the pump against condensate.
*)

Advantages to the User
♦ May be used either on the intake or the
exhaust side

Type
AK 4-8

♦ Independent of the direction of flow

AK 16-25 25 KF

♦ Condensate level check via inspection glass

AK 40-65 40 KF

DN
16 KF

mm
in.
mm
in.
mm
in.

a
90
3.54
110
4.33
140
5.51

b
90
3.54
125
4.92
156
6.14

b

a

M8x30
DIN 933

♦ May be installed without accessories

c
120
4.72
142
5.59
170
6.69

e
60
2.36
71
2.80
85
3.35

h
194
7.64
214
8.43
300
11.8

h1
178
7.01
193
7.60
271
10.7

h2
–
–
–
–
261
10.3

♦ Resists solvents
*) Supporting screw, only for AK 40-65

Dimensional drawing for the AK condensate separators

♦ All seals madeof FPM
♦ Simple to clean

Typical Application

Technical Information

♦ Easy to use

♦ Prevention of the collection of liquids in
the intake line

Depending upon the layout and pipe run of an
exhaust line, it may be necessary to install a
separator to prevent condensate draining back to
the pump.

♦ Drained via drain screw or drain tap

Technical Data
Connection to pump

AK 4-8

AK 16-25

AK 40-65

D4B
D8B

D 16 B/BCS (-PFPE)
D 25 B/BCS (-PFPE)

D 40 B/BCS (-PFPE)
D 65 B/BCS (-PFPE)

l (qt)

0.66 (0.7)

1.2 (1.3)

3.0 (3.2)

kg (lbs)

1.7 (3.7)

2.4 (5.3)

5.5 (12.1)

AK 4-8

AK 16-25

AK 40-65

Part No. 188 06

Part No. 188 11

Part No. 188 16

TRIVAC

Capacity for condensate
Weight

Ordering Information
Condensate separator
Drain tap for the intake side, vacuum-tight

Part No. 190 90

Oil drain tap (exhaust side)

Part No. 190 90

Adaptor DN 16 KF – hose nozzle DN 7

Part No. 182 90

–

–

For further accessories see Section
“Accessories for TRIVAC E and B”

C01.52

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Accessories for TRIVAC B

Exhaust Filters AF 4-8, AF 16-25, AF 40-65
DN

DN

c

e

C01
h1
h

AF 4-8 exhaust filter

h2

Exhaust filters retain oil mists and aerosols.
*)

Advantages to the User
a

M8x30
DIN 933

♦ Can be fitted without additional accessories

b

♦ Separation efficiency over 99 %
♦ Exchangeable filter inserts

Type
AF 4-8

DN
16 KF

♦ Built-in over-pressure relief valve (threshold
at about 1.5 bar (7.2 psi, differential))

AF 16-25

25 KF

AF 40-65

40 KF

♦ Sight glass for checking of the quantity of
collected oil
♦ Resistant against solvents

mm
in.
mm
in.
mm
in.

a
90
3.54
110
4.33
140
5.51

b
90
3.54
125
4.92
156
6.14

c
120
4.72
142
5.59
170
6.69

e
60
2.36
71
2.80
85
3.35

h
194
7.64
214
8.43
300
11.8

h1
178
7.01
193
7.60
271
10.7

h2
–
–
–
–
261
10.3
*) Supporting screw only for AF 40-65

Dimensional drawing for the AF exhaust filter

♦ All seals made of FPM

Typical Application

Technical Information

♦ Easy to clean and use

♦ Improvement of oil separating capacity

An exhaust line must be connected in case of
hazardous exhaust gases.

♦ Retains dirt and cracked products

Technical Data

AF 4-8

AF 16-25

AF 40-65

TRIVAC

D 4/8 B

D 16/25 B/BCS

D 40/65 B/BCS

l (qt)

0.4 (0.4)

0.5 (0.5)

1.0 (1)

kg (lbs)

1.9 (4.1)

3.2 (7.1)

6.5 (14.3)

AF 4-8

AF 16-25

AF 40-65

Part No. 189 06

Part No. 189 11

Part No. 189 16

Replacement filter element
FE 4-8
FE 16-25
FE 40-65

Part No. 189 71
–
–

–
Part No. 189 72
–

–
–
Part No. 189 73

Oil drain tap

Part No. 190 90

Part No. 190 90

Part No. 190 90

Connection to pump
Max. capacity for condensate, approx.
Weight

Ordering Information
Exhaust filter

For further accessories see Section
“Accessories for TRIVAC E and B”

Technical Data
Connection to pump

AF 16-25 DOT
TRIVAC

–

D 16 B-DOT

–

AF 16-25 DOT

Ordering Information
Exhaust filter

–

Part No. 124 16

–

Replacement filter element, FE 16-25 DOT

–

Part No. 200 10 304

–

For further accessories see Section
“Accessories for TRIVAC E and B”
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.53

Rotary Vane Vacuum Pumps

Accessories for TRIVAC B

Exhaust Filters with Lubricant Return ARP 4-8, AR 4-8, AR 16-25, AR 40-65
Supplied Equipment

Technical Information

Intermediate flange, connecting lines with hollow
screws, required gaskets as well as mounting
screws for the intake flange.

The AR is connected to the exhaust port of the
TRIVAC B, the return line is connected at the
intermediate flange under the intake port.
An exhaust line must be connected in case of
hazardous exhaust gases.

AR 4-8 exhaust filter with lubricant return

c
DN

DN

e

h

ARP 4-8 exhaust filter with lubricant return

h1

h2

This combination of an exhaust filter with a floatcontrolled valve considerably extends the maintenance intervals for the TRIVAC B.
1)
M8x40,
DIN 933

Advantages to the User
♦ Filtering the exhaust air of entrained lubricant
particles
♦ Lubricant return with the aid of a floatcontrolled valve back into the intake port
♦ No operating costs caused by lost lubricant

Type
AR 4-8
AR 16-25
AR 40-65

♦ Hardly any oil consumption
♦ Standard filter element

DN
a
16 KF mm 45
in. 1.77
25 KF mm 55
in. 2.17
40 KF mm 70
in. 2.76

b1
a

b2
f
g

b1
90
3.54
125
4.92
156
6.14

b2
136
5.35
167
6.57
–
–

c
120
4.72
142
5.59
170
6.69

e
60
2.36
71
2.80
85
3.35

f
100
3.94
120
4.72
152
5.98

g
113
4.37
–
–
195
7.68

h
194
7.64
214
8.43
300
11.8

Dimensional drawing for the AR exhaust filters with lubricant return
(dimensions for the ARP exhaust filter with lubricant return upon request)

h1
179
7.05
194
7.64
271
10.7

h2
167
6.57
182
7.17
261
10.3

1) Supporting screw only for AR 40-65

♦ Built-in over-pressure relief valve

Tec hnic al Data

♦ Resists solvents
♦ All seals made of FPM
♦ The top head may be easily rotated (either
parallel or perpendicular to bottom body)
[Only AR 4-8 to AR 16-25]

Typical Application
♦ Extending the maintenance intervals

ARP 4-8

Connection to pump

TRIVAC

D 4/8 B

D 4/8 B

D 16/25 B/BCS

D 40/65 B/BCS

For opening the float-controlled valve
required amount of oil N 62
remaining amount of oil N 62

cm3 (qt)
cm3 (qt)

–
–

430 (0.45)
350 (0.37)

510 (0.54)
430 (0.45)

760 (0.80)
700 (0.74)

Weight

kg (lbs)

1.7 (3.8)

3.1 (6.8)

4.7 (10.4)

8.5 (18.7)

Or der ing Information
Exhaust filter with oil return

Replacement filter element
FE 8

ARP 4-8

AR 4-8 AR 16-25 AR 40-65

Part No.
140 065

Part No.
189 20

Part No.
189 21

Part No.
189 22

Part No.
190 80

–

–

–

–

–

Part No.
189 72
–

–

FE 4-8

C01.54

AR 4-8 AR 16-25 AR 40-65

FE 16-25

–

Part No.
189 71
–

FE 40-65

–

–

Part No.
189 73

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for TRIVAC B

Rotary Vane Vacuum Pumps

Exhaust Filters with Lubricant Return ARS 16-25, ARS 40-65

C01
ARS 40-65

This combination of an exhaust filter with a floatcontrolled valve considerably extends the maintenance intervals of the TRIVAC BCS.

h
h1

The ARS is part of the TRIVAC SYSTEM.

b1
b

Advantages to the User
♦ Lubricant return with the aid of a floatcontrolled valve back into the intake port

Type
ARS 16-25

♦ The intake port may be easily exchanged
(either vertical or horizontal orientation)

ARS 40-65

♦ No operating costs caused by lost lubricant
♦ Hardly any oil consumption
♦ Visual indication of the differential pressure
♦ Standard filter element
♦ All aluminium parts are surface protected
♦ Built-in over-pressure relief valve

mm
in.
mm
in.

b
≈ 360
≈ 14.2
≈ 468
≈ 18.4

b1
176
6.93
234
9.21

h
282
11.1
381
15

h1
264
10.4
356
14

Dimensional drawing for the ARS mounted on a TRIVAC BCS

Supplied Equipment
Intermediate flange, connecting lines with hollow
screws, required gaskets as well as mounting
screws for the intake flange.
Wrapped in foil for shipping.

♦ Resists solvents
♦ All seals made of FPM
♦ May also be used on the TRIVAC B

Typical Application
♦ Filtering the exhaust air of entrained lubricant
particles

Technical Information
An exhaust line must be connected in case of
hazardous exhaust gases.
The ARS is connected to the exhaust port of the
TRIVAC BCS, the return line is connected at the
intermediate flange under the intake port.
The ARS is cleaned in the factory to such an
extent, that it may be operated either with mineral
oil (e.g. N 62 or HE-200) or perfluoropolyther
(PFPE e.g. NC 1/14 or HE-1600).

Tec hnic al Data
Connection to pump

TRIVAC

Connection flanges

DN

ARS 16-25

ARS 40-65

D 16/25 B; D 16/25 BCS (-PFPE)

D 40/65 B/BCS (-PFPE)

25 KF

40 KF

Amount of oil required for opening
the float-controlled valve
N 62 /HE-200
PFPE

cm3 (qt)
cm3 (qt)

510 (0.54)
340 (0.36)

760 (0.80)
420 (0.44)

Remaining amount of oil
N 62 /HE-200
PFPE

cm3 (qt)
cm3 (qt)

430 (0.45)
300 (0.31)

700 (0.74)
390 (0.41)

Weight with intermediate flange, tubing
and filter, without lubricant
kg (lbs)

4.7 (10.4)

8.5 (18.7)

ARS 16-25

ARS 40-65

Part No. 189 56

Part No. 189 57

Part No. 189 72
–

–
Part No. 189 73

Or der ing Information
Exhaust filter with lubricant return
Replacement filter element
FE 16-25
FE 40-65

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.55

Rotary Vane Vacuum Pumps

Accessories for TRIVAC B

Mechanical Oil Filters OF 4-25, OF 40-65 / Chemical Oil Filters CF 4-25, CF 40-65
OF / CF 4-25
Type
OF 4-25

mm
in.
mm
in.
mm
in.
mm
in.

CF 4-25
OF 40-65

OF 4-25 mechanical oil filter

a
≈ 100
≈4
≈ 100
≈4
135
5.31
135
5.31

CF 40-65

Since there is a pressure-lubrication system with
an oil pump in every TRIVAC B, it is possible to
connect main flow oil filters.

b
200
7.87
315
12.4
–
–
–
–

h
150
5.91
160
6.30
239
9.41
307
12.1

2

l
–
–
–
–
296
11.7
296
11.7

3

1

h

4
a

b

1 Interchangeable filter
2 Maintenance indicator

3 Connection flange
4 Pin for protection against twisting

OF / CF 40-65

l

These filters are available either for mechanical
filtering (OF types) or combined chemical/mechanical filtering (CF types).
h

Advantages to the User
♦ Main flow oil filter
♦ Longer service life for the oil depending on
the type of application
♦ Can be installed without problems to the
TRIVAC B
♦ Hose connections are not required
♦ Easily interchangeable filters
♦ Only a small amount of oil needs to be added
when changing the filters
♦ Expansion of the range of applications in case
of special requirements
♦ Same casing for OF and CF types

Technical Data

a

Dimensional drawings for the OF mechanical oil filters and CF chemical oil filters

♦ Greater reliability by standard maintenance
indicator
♦ Built-in bypass valve
♦ Owing to the highly effective adsorbent for
polar substances, an up to ten-fold adsorption
effect is attained over normal bleaching
earth (CF)
♦ Prevents mechanical damage to the pump

OF 4-25

CF 4-25

Typical Application
♦ Separation of fine particles from the
pump’s oil (sizes between 5 and
10 µm (OF))

OF 40-65

CF 40-65

Connection to pump

TRIVAC

D 4/8 B, D 16/25 B

D 40/65 B

Nominal throughput

l x h-1

900

2000

5 to 10
to 3

5 to 10
to 3

Separation, mechanical oil filter
chemical oil filter

µm
µm

Permissible operating pressure

bar (psig)

2.5 (21.7)

2.5 (21.7)

Opening pressure, non-return valve
bypass valve

bar (psid)
bar (psid)

0.12 (1.7)
2.5 ± 0.3 (21.7 ± 4.3)

0.12 (1.7)
2.5 ± 0.3 (21.7 ± 4.3)

1 (1)
1 (1)

2.5 (2.6)
2 (2.1)

4.0 (8.8)

10 (22.1)

Topping up amount during first time installation
filter exchange
Weight, ready for operation, dry

l (qt)
l (qt)
kg (lbs)

Or dering Information

OF 4-25

CF 4-25

OF 40-65

CF 40-65

Part No. 101 91

–

Part No. 101 92

–

–

Part No. 101 96

–

Part No. 101 97

Part No. 189 91

–

–

–

WF 40-65 interchangeable filter, paper 0.75 l (0.8 qt)

–

–

Part No. 189 92 (2x)

–

WF Alu 4-65 interchangeable filter, paper and Al2O3, 1 l (1 qt)

–

Part No. 189 96

–

Part No. 189 96 (2x)

Mechanical oil filter
Chemical oil filter
WF 4-25 interchangeable filter, paper, 0.5 l (0.5 qt)

C01.56

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for TRIVAC B

Rotary Vane Vacuum Pumps

Chemical Filters with Safety Isolation Valve CFS 16-25, CFS 40-65

C01
h

CFS 40-65

The CFS chemical filters with safety isolation
valve are main flow oil filters for the TRIVAC B
and BCS pumps.
The CFS is part of the TRIVAC SYSTEM.
b1

Advantages to the User

b

♦ The CFS is included in the main lubricant flow

Type
CFS 16-25

♦ Rapid filter exchange – the pump may contiue
to operate while changing the filters

CFS 40-65

♦ Visual indication of the filter’s condition
through a maintenance indicator
♦ Aluminium component with isolation valve for
one or two interchangeable filters
♦ All aluminium parts are surface protected
♦ May be operated with different interchangeable filters
♦ Over-pressure relief valve in the interchangeable filters

mm
in.
mm
in.

b
≈ 327
≈ 12.9
≈ 390
≈ 15.4

b1
176
6.9
234
9.21

h
264
10.4
356
14

Dimensional drawing for the CFS (mounted on a TRIVAC BCS)

Tec hnic al Data

CFS 16-25

CFS 40-65

Connection to pump

TRIVAC

D 16/25 BCS (-PFPE)

D 40/65 BCS (-PFPE)

Nominal throughput

l x h-1

900

2000

Permissible operating pressure

bar (psig)

2.5 (21.7)

♦ Prepared for connection of a differential pressure switch and an oil pressure switch

Opening pressure
Non-return valve
Bypass valve

bar (psid)
bar (psid)

0.12 (1.7)
2.5 ± 0.3 (21.7 ± 4.3)

♦ May also be used on the TRIVAC B pumps

Filter medium

Technical Information

Lubricant filling when using WF Alu-Part
Weight, ready for operation, dry

The CFS is cleaned in the factory to such an
extent, that it may be operated either with mineral
oil (e.g. N 62 or HE-200) or perfluoropolyther
(PFPE e.g. NC 1/14 or HE-1600).

Chemical filter with safety isolation valve

Supplied Equipment

WF Alu-Part combination filter,
paper and Al2O3, 1.6 l (1.7 qt)

All gaskets and mounting parts required for
installation.
Aluminium particle filters (WF Alu-Part) sealed
for shipping are included separately.

Al2O3
l (qt)

1.4 (1.5)

3.3 (3.5)

kg (lbs)

7.0 (15.4)

15.5 (34.1)

CFS 16-25

CFS 40-65

Part No. 101 76

Part No. 101 77

Part No. 189 99

Part No. 189 99 (2x)

Part No. 200 09 804

Part No. 200 09 804 (2x)

Part No. 189 90

Part No. 189 90 (2x)

Or der ing Information

WF particle filter, paper, 1.6 l (1.7 qt)
WFG particle filter,
paper with support mesh, 1 l (1 qt)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.57

Rotary Vane Vacuum Pumps

Accessories for TRIVAC B

Inert Gas System IGS 16-25, IGS 40-65

h

IGS

This accessory, which is controlled via solenoid
valves, permits the controlled admission of
special gases into the TRIVAC BCS.
The IGS is part of the TRIVAC SYSTEM.
b

Advantages to the User
♦ Ready for connection to an inert gas supply
♦ Solenoid valve for reduced gas ballast
♦ Solenoid valve for purging the oil box
♦ Float throughput gauge with throttling valve
adjustable from 200 to 700 l x h-1

b1
Type
IGS 16-25
IGS 40-65

♦ Connects directly on to the TRIVAC BCS

Typical Applications
♦ Reduction of the contamination levels in the
lubricant
♦ Reduction in the dwell time of volatile substances within the pump

Technical Information
The amount of inert gas ballast is restricted by a
nozzle to 200 l x h-1. Larger quantities are used
for purging.

b1
≈ 294
≈ 11.6
≈ 369
≈ 14.5

h
264
10.4
356
14

Dimensional drawing for the IGS (mounted on a TRIVAC BCS)

♦ The flowing quantity can be read directly
♦ System protection by a non-return valve
(requires a reservoir pressure of at least
3 bar (29 psi, gauge)) – this reliably prevents
the reservoir vessel from being evacuated

mm
in.
mm
in.

b
176
6.93
234
9.21

Tec hnic al Data
Connection to pump

TRIVAC

IGS 16-25

IGS 40-65

D 16/25 BCS (-PFPE)

D 40/65 BCS (-PFPE)

Min. amount of admitted gas at a
reservoir pressure of 3.0 bar (29 psig)

l x h-1

200

Max. amount of admitted gas at a
reservoir pressure of 6.0 bar (72.5 psig)

l x h-1

1450

V DC

24

W

10

Supply voltage for the solenoid valves
Power consumption
Weight

kg (lbs)

Connection thread

G (BPS)

Or der ing Information
Inert gas system

1.0 (2.2)

1.4 (3.1)
1/8"

IGS 16-25

IGS 40-65

Part No. 161 76

Part No. 161 77

Supplied Equipment
Solenoid valves with connection cables and plugs
for connection to the electric indicator system
EIS, the required connecting pieces, mounting
screws and cover panel.

C01.58

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Accessories for TRIVAC B

Limit Switch System LSS 16-25, LSS 40-65

C01
LSS

This accessory consists of a package of limit
switches. It is used to monitor system functions.

h1

h

The LSS is part of the TRIVAC-SYSTEM.
The package of limit switches includes:

s

b

♦ Differential pressure switch to monitor the
CFS

b1

♦ Oil pressure switch to monitor the operating
pressure

Type
LSS 16-25

♦ Flow switch to monitor the inert gas flow

LSS 40-65

♦ Pressure switch to monitor the pressure in
the oil box of the pump
♦ Connection cable and plug for the temperature
switch used for temperature monitoring

mm
in.
mm
in.

b
176
6.9
234
9.21

b1
≈ 327
≈ 12.9
≈ 390
≈ 15.4

h
264
10.4
356
14

h1
≈ 279
≈ 11
≈ 371
≈ 14.6

s
60
2.36
60
2.36

Dimensional drawing for the LSS (mounted on a TRIVAC BCS)

Tec hnic al Data

LSS 16-25

LSS 40-65

D 16/25 BCS (-PFPE)

D 40/65 BCS (-PFPE)

♦ Float switch with housing to monitor the oil
level

Connection to pump
Operating voltage

V DC

24

Advantages to the User

Switching capacity

W/A

10/0.4

♦ Errors are indicated well in advance so that it
will in most cases be possible to complete the
process for the running batch

Type of protection

IP

♦ The switching action is independent of the
optical displays (for optimum reliability)
♦ The temperature switch is already present in
the TRIVAC BCS

Weight, approx.

TRIVAC

kg (lbs)

Or der ing Information
Limit switch system

54
2.5 (5.5)

LSS 16-25

LSS 40-65

Part No. 161 06

Part No. 161 07

Typical Application
♦ Changing the status in case operating conditions arise which are not permissible

Supplied Equipment
Fully wired-up switches with plugs as well as all
required gaskets and mounting parts.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.59

Rotary Vane Vacuum Pumps

Accessories for TRIVAC B

Electrical Indicator System EIS 16-25, EIS 40-65

EIS

This accessory electrically links all switches from
the limit switch system and the electrical indicator system so that the position of each switch is
indicated optically by LEDs.

h

b

The EIS is part of the TRIVAC SYSTEM.

Advantages to the User
♦ Connects directly to the LSS
♦ LEDs arranged conveniently on the side of the
BCS which carries the controls
♦ Socket and plug for supplying and controlling
the connected valves, no soldering is required
♦ Socket for remote signal transmission
♦ For direct, compact installation to the IGS
♦ IP 54 protection
♦ Each pair of LEDs (red or green) is clearly
marked

Supplied Equipment
Housing, complete with all sockets for the components of the system.
Socket and plug for 24 V DC supply.
Socket for operating the solenoid valves of the
IGS and remote data transmission.
Cover panel and all required mounting screws.

b1

Type
EIS 16-25
EIS 40-65

mm
in.
mm
in.

b
176
6.93
234
9.21

b1
≈ 256
≈ 10.1
≈ 314
≈ 12.4

Dimensional drawing for the EIS (mounted on a TRIVAC BCS)

Tec hnic al Data
Connection to pump

TRIVAC

EIS 16-25

EIS 40-65

D 16/25 BCS (-PFPE)

D 40/65 BCS (-PFPE)

Input voltage

V DC

24

Output voltage

V DC

24

Maximum current

A

3

Type of protection

IP

54

Weight
without cover panel
with cover panel

kg (lbs)
kg (lbs)

Or der ing Information
Electrical indicator system
Connection plug for transmission
of the “green” signals

C01.60

h
264
10.4
356
14

2.5 (5.5)
4.0 (8.8)

EIS 16-25

EIS 40-65

Part No. 160 96

Part No. 160 97

Part No. 200 80 078

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for TRIVAC B

Rotary Vane Vacuum Pumps

Roots Pump Adaptor

C01
Roots pump adaptor

The Roots pump adaptor allows the direct
installation of a Roots pump on a TRIVAC
D 40/65 B/BCS.

Advantages to the User
♦ Compact and space-saving
♦ Short and direct connection between the
pumps
♦ Minimal conductance loss
♦ Easy installation

Typical Application
♦ Simple assembly of a small pump system

Pump system consisting of a TRIVAC D 65 BCS and a RUVAC WS 251

R o o ts Pu mp Ad a p to r

Tec hnic al Data
Connection to pump

TRIVAC

D 40/65 B/BCS (-PFPE)
and RUVAC WA/WAU/WS/WSU 251

Weight, approx.

kg (lbs)

11.5 (25.4)

Order ing Information
Roots pump adaptor

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

R o o ts Pu mp Ad a p to r
Part No. 168 30

C01.61

Rotary Vane Vacuum Pumps

Accessories for TRIVAC B

Version for the North and South American Continents

OF1000 Oil Filtering System
OF 1000 Oil Filtering Systems are designed to
remove acids and particulates from the lubricating fluid used in Leybold mechanical vacuum
pumps. The systems are located externally from
the vacuum pump, and utilize their own integral
gear pump in conjunction with a bypass to continuously recycle fluid through a filtering medium;
the medium is housed in an element/canister
assembly which additionally serves to absorb
heat, and thus reduce the operating temperature
of the vacuum pump.
OF1000 Systems are available in both single- and
dual-canister designs. Both types are highly compact and reliable, and can be supplied in models
for standard or chemically severe applications.

OF1000 Oil Filtering System

Advantages to the User

Applications

♦ Choice of Single- and Dual-Canister Models
for Standard or Chemically Severe Applications

Standard series models are widely used in silicon
production processes, including LPCVD, lowpressure epitaxy, ion implantation, reactive ion
etching and several plasma processes. Such processes employ a variety of gases which can react
with pump fluid, resulting in the formation of
sludge, particulates and acids. The standard
OF1000 model has proven effective at extending
maintenance intervals in such applications.

♦ Compact Design
♦ Reliable Operation
♦ Choice of Four Filtering Elements
♦ Dripless Quick Disconnects for Easy Removal
and Replacement of Filter Elements
♦ Recessed Lid and Oil Level – No Oil Spillage
♦ Conductive Teflon Hoses for Static Charge
Dissipation – No Oil Leakage Due to Static
Burning
♦ Integral Gear Pump with Built-In Bypass
♦ Fluid Sight Glass and Flow Monitor
♦ Pressure Gauge
♦ Small Precharge Fluid Volume
♦ Single Phase 50/60 Hz Motors Standard

Similarly, chemically resistant OF1000C models
have proven successful in aluminum etching and
other processes where boron trichloride and
other highly toxic gases are employed. The canister, gear pump, fittings and quick disconnects of
the corrosive-service model have been specially
treated with a fluorocarbon material that substantially increases the life of these components.

Single-canister OF1000 models are distinguished
by their smaller footprint while dual-canister configurations afford the advantages of multi-media
filtration and increased oil capacity. Dual-canister
models are designed for series flow through two
side-by-side mounted canisters, and thus can be
used to filter oil through two different media on
the same pass or for double filtration through
elements containing the same medium. The
models also enable the vacuum pump to operate
at somewhat lower temperatures, while providing
it with a larger supply of clean, filtered oil.
All OF1000 models are supplied with a choice of
four filtering elements. The Fullers Earth element
provides high capacity for standard acids and can
be used to trap particulates down to 10 micron in
size. Hydrophilic, activated alumina and fiberglass
particulate elements are also available. The
hydrophilic element is particularly effective for
hydrolized acids, and can also be used to trap
particles as small as 1 micron. The activated
alumina element provides 10 micron particulate
retention and is extremely effective for Lewis
acids and polar compounds. The fiberglass element is suitable for particulate removal down to
10 micron.
The element/canister assembly of OF1000
systems is easy to install, extremely easy to
remove and replace. The recessed lid and oil level
of the assembly safeguards against the possibility
of spillage. Dripless quick disconnects are also
provided for easy canister removal and safer disposal of the filtering element and oil.
OF1000 Systems also come equipped with flexible Teflon hoses designed to resist dielectric
breakdown. The systems thus ward against the
possibility of oil leaks due to pinholing or static
burning of the hose.

C01.62

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for TRIVAC B

Rotary Vane Vacuum Pumps

Version for the North and South American Continents
Single-Canister
Systems

Technical Data
Gear Pump Motor

Dual-Canister
Systems

Gear Pump

0.7 gpm @ 1800 RPM

Pressure Gauge

0 to 100 psig (0 to 70 kPa)

Pump Fluid Capacity

15 lb perfluorinated polyether
or 3.75 qt hydrocarbon oil

Flexible Hoses
Dimensions

C01

1/6 HP, 115/208/220V, single phase, 50/60Hz,
wired for 115V, with on/off switch 1)

29 lb perfluorinated polyether
or 7.25 qt hydrocarbon oil

3/8 in. l.D. teflon/carbon black with stainless steel braid – 4 ft lengths 2)
in. (mm)

16 x 14 x 11 (406 x 356 x 279)

23 x 14 x 11 (585 x 356 x 279)

–

series 3)

45

60

Single-Canister
Systems

Dual-Canister
Systems

Part No. 898 550

Part No. 898 552

Part No. 898 551

Part No. 898 553

Part No. 898 561

Part No. 898 554

Part No. 898 555
Part No. 898 556
Part No. 898 566

Part No. 898 557 (front), Part No. 898 555 (rear)
Part No. 898 558 (front), Part No. 898 556 (rear)
Part No. 898 559 (front), Part No. 898 566 (rear)

Aluminum Oxide — High Capacity for Reagent Grade
HCI; Removes Lewis Acids and PolarCompounds;
10 Micron Particulate Retention

Part No. 898 504

Part No. 898 504

Fullers Earth — Acid and Particulate Filter with
Capacity of 34 ml Reagent Grade HCI;
10 Micron Particulate Retention

Part No. 898 505

Part No. 898 505

Hydrophilic — Water and HCI Acid Absorbing
Capabilities; 1 Micron Particulate Retention

Part No. 898 506

Part No. 898 506

Particulate — Fiberglass Element with 10 Micron
Particulate Retention

Part No. 898 507

Part No. 898 507

Flow Arrangement
Weight (Dry)

lb

Ordering Information
Oil Filtering System
OF1000 Less Filtering Element and Oil
OF1000 Prepared for PFPE,
Less Filtering Element and Oil
OF1000C Chemically Severe Service.
Prepared for PFPE Fluid

Accessories
Spare Filter Canister Assembly
With Quick Disconnect
Prepared for PFPE, With Quick Disconnect
Chemically Severe Service

Filtering Elements

1)

Hazardous duty models and special voltages also available
Optional 6, 10 and 15 feet hoses available
3) 0ptional parallel flow arrangement also available
2)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.63

Rotary Vane Vacuum Pumps

General Accessories

Flange Components, Valves
1
2

3

Our range of flange components and valves is
described in detail in Product Sections C13 and
C14.
Given in the following are only some components
which you might find particularly useful when
planning your system.

Isolation Valve
♦ The pump is allowed to warm up with the
intake line isolated
♦ The pump may continue to operate in the
energy-saving and environmentally compatible
ultimate pressure mode when the vacuum
chamber is vented briefly
♦ The pump may be left on after completion of
the process so as to regenerate the oil

Branch (Cross)
♦ Installing a cross in the intake line permits the
connection of a vacuum gauge and a venting
valve

Flange Connections
Each flange connection requires one each centering and clamping ring.

4

1
2
3
4
5
6
7
8
9
10

Small flange connection
Bellows
Dust filter
Blank flange
Condensate separator
Rotary vane pump
Exhaust filter
Oil filter
Cross
Small flange connection
for the venting valve
or for a blank flange
11 Venting valve DN 10 KF
12 Right-angled valve,
manually operated

12

11

10

6

9

8

7

Example of connecting a pump with accessories

DN 16 KF

DN 25 KF

DN 40 KF

Small flange connection
Clamping ring
Centering ring, aluminum/CR
Centering ring, stainless steel/FPM

Part No. 183 41
Part No. 183 26
Part No. 883 46

Part No. 143 42
Part No. 183 27
Part No. 883 47

Part No. 183 43
Part No. 183 28
Part No. 883 48

Bellows

Part No. 872 41

Part No. 872 43

Part No. 872 45

Right-angled valve, manually operated
Aluminum casing
Stainless steel casing

Part No. 287 11
Part No. 288 11

Part No. 287 12
Part No. 288 12

Part No. 287 13
Part No. 288 13

Blank flange for (reducing) cross
Aluminium
Stainless steel

Part No. 184 46
Part No. 884 36

Part No. 184 41
Part No. 884 41

Part No. 184 41
Part No. 884 41

–
–

Part No. 184 17
Part No. 884 92

Part No. 184 19
Part No. 884 94

Cross DN 16 KF
Aluminum
Stainless steel

Part No. 184 71
Part No. 884 85

–
–

–
–

Small flange connection for venting valve
or blank flange
Clamping ring
(Adaptor) centering ring, aluminum/NBR
(Adaptor) centering ring, stainless steel/FPM

Part No. 183 41
Part No. 183 56
Part No. 883 56

Part No. 183 41
Part No. 183 21
Part No. 883 21

Part No. 183 41
Part No. 183 21
Part No. 883 21

Venting valve DN 10 KF
Aluminum
Stainless steel

Part No. 173 24
Part No. 173 37

Part No. 173 24
Part No. 173 37

Part No. 173 24
Part No. 173 37

Ordering Information

Reducing cross (to DN 10 KF)
Aluminum
Stainless steel

C01.64

5

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General Accessories

Rotary Vane Vacuum Pumps

Vacuum Pump Oils
Lubricating oils for rotary vacuum pumps need to
fulfil demanding requirements. Their vapor pressure must be low at high temperatures and the
water content and water uptake must be minimal.
Their viscosity characteristics need to be flat,
lubricating properties need to be excellent and
they must resist cracking upon being mechanically stressed.
All the vacuum pump oils listed in the following
have been subjected in our factory laboratories to
very comprehensive tests closely resembling the
conditions encountered in practice by the pumps
from the TRIVAC series.
We therefore recommend the exclusive use of
vacuum pump oils fully qualified by Leybold so
as to ensure optimum performance of the Leybold vacuum pumps and also to ensure optimum
oil change intervals.
Under vacuum conditions lubricating oils, especially those with additives may behave quite differently than expected. Additives may adversely
affect the attainable ultimate pressure and may
react with the media being pumped.
When using not suitably qualified third party oils,
the oil change intervals and the performance of
the vacuum pump may be reduced. Also unwanted deposits may occur which may even cause
severe damage to the vacuum pump.
In order to adapt the pumps to the different applications of our customers, different types of oil
are used in the TRIVAC pumps.
In order to adapt the pumps to the different applications of our customers, different types of oil
are used in the TRIVAC pumps.
Please note that owing to differing properties not
all types of oil may be used in all pumps of the
TRIVAC series. If you can not find the combination of pump and oil you require please ask us for
a quotation.

Lubricant Types
Mineral Oils
Mineral oils are products distilled and refined
from crude oil. These do not consist of precisely
defined compounds but rather consist of a complex mixture. The way in which the mineral oil is
pre-treated and its composition is decisive as to
the applications it will be suited for. Depending
on the distribution of the hydrocarbons and the
dominance of certain properties, mineral oils are
grouped according to paraffin-base, naphthenic
and aromatic. For the purpose of attaining especially low ultimate pressures, mineral oils must
be selected on the basis of a core fraction.
The thermal and chemical resistance of mineral
oils has been found to be adequate in the majority of applications. They offer a high degree of
compatibility with elastomers and resistance to
hydrolysis.

Synthetic Oils
Synthetic oils are produced by a chemical reaction. The group of synthetic oils includes liquids
differing widely as to their chemical structure and
composition. Correspondingly their physical and
chemical properties differ considerably. Synthetic
oils are used in those cases where special properties of the oil are required which can not be
fulfiled by mineral oils.
The oils given in the following belong to the
group of synthetic oils:

Polyalphaolefin (PAO) Oils
Polyalphaolefin oils are synthetic hydrocarbons
which are paraffin like, but have a uniform structure. Thermal and chemical resistance is better
compared to mineral oils. Elastomer compatibility
and resistance against hydrolysis are comparable
to mineral oils.

Ester oils

depend on the type of ester oil. Elastomer compatibility and resistance against hydrolysis are
not so good compared to mineral oils.

Perfluorinated polyether
(PFPE)
These are oils which are only composed of carbon (C), fluorine (F) and oxygen atoms (O). The
existing C-O and C-F bonds are highly stable. For
this reason PFPE oils are practically inert against
all chemical and oxidising influences.
Perfluorinated polyethers will not polymerise
under the influence of high energy radiation.
PFPE is non-flammable. Leybold NC1/14 has the
approval of BAM (Federal Institute for Materials
Research and Testing) for pumping of pure oxygen.
Perfluorinated polyethers are used when pumping strongly reactive substances like oxygen
(O2), fluorine F2 and uranium hexafluoride UF6.
Regarding Lewis acids (for example, boron trifluoride BF3, aluminum trichloride AlCl3) they are
not completely inert. Here reactions may take
place at temperatures over 100 °C (212 °F).
Perfluorinated polyethers are thermally highly
stable. Thermal decomposition may only take
place at temperatures of over 290 °C (554 °F).
Caution: Perfluorinated polyethers will – when
decomposed – release toxic and corrosive gases:
hydrogen fluoride HF, carbonyl difluoride COF2.
For this reason open fires must be avoided in the
workspace where PFPE is being used. Do not
smoke in the workspace where PFPE is being
used.
Only suitably prepared pumps must be used in
connection with perfluorinated polyethers, since
it is essential that the pump be free of hydrocarbons. Changing from one basic type of oil to
PFPE must be left exclusively to authorised Service Centers. The pumps will have to be fully disassembled and carefully cleaned. Gaskets and filters will have to be exchanged and suitable greases will have to be used.

Ester oils are organic compounds which excel
especially through their high thermal resistance
to cracking compared to mineral oils. Chemical
resistance is generally quite good, but will

For all lubricants from our line of products you may obtain Safety Data Sheets from the Dept. Technical
Support in Cologne.
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.65

C01

Rotary Vane Vacuum Pumps

General Accessories

Oil recommendations for various areas of application
Application Data
Type of oil

Examples of areas of application
and process media

Special Oil
N62

White Oil
NC2

Paraffin-base mineral oil,
core faction, free of additives
Standard oil for Leybold Germany
For pumping air, chemically inert
permanent gases
(noble gases, for example),
water vapor, solvent vapors
in the case of laboratory pumps operated with cold traps

Remarks

The ultimate pressures stated in our
catalogs are based on operation of
the pump with N62 (except
for the DOT and PFPE pumps)
Service life may be extended through
the use of an oil filter

Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Vapor pressure
at 020 °C (68 °F)
at 100 °C (212 °F)

Middle molecular weight

Mixed base mineral oil

Polyalphaolefin PAO

For pumping small quantities of
chemically reactive substances like
halogens (for example, bromine Br2,
iodine I2), halogen acids (for example.
hydrogen chloride HCl, hydrogen bromide HBr), halogenated hydrocarbons
(for example, bromomethane CH3Br,
trichloromethane CHCl3), Lewis acids
(for example, aluminum chloride AlCl3,
titanium tetrachloride TiCl4),
acetic acid CH3COOH

For pumping corrosive contaminants
in the gas, acid vapors (for example,
sulfuric acid H2SO4), organic acid
chlorides (for example
acetyl chloride CH3COCl).

Cold starting at low temperatures is
possible. Pumping of chemically inert
permanent gases (for example,
noble gases) water vapor in small
quantities, refrigerants R 717
(ammonia NH3)

When pumping the aforementioned
process media, humidity must be
avoided

When pumping the aforementioned
process media, humidity must be
avoided

Service life may be extended through
the use of an oil filter

Service life may be extended through
the use of an oil filter

Do not use chemical oil filters
Avoid corrosion at standstill
Suited
Conditionally suited
Not suited

Suited
Conditionally suited
Not suited

Special Oil
N62

White Oil
NC2

PROTELEN

SHC 224

90
10

90
10

140
11

29
5.6

> 255 (491)

> 260 (500)

250 (482)

230 (446)

< 1 x 10-5 (< 8 x 10-6)
< 3 x 10-3 (< 2 x 10-3)

< 1 x 10-5 (< 8 x 10-6)
< 1 x 10-3 (< 8 x 10-4)

4 x 10-4 (3 x 10-4) 3)
1 x 10-2 (8 x 10-3)

1 x 10-5 (0,75 x 10-5)
8 x 10-3 (6 x 10-3)

0.88 2)

0.87 2)

0.90

0.83

°C (°F)

< -9 (16)

< -15 (5)

-30 (- 22)

< - 55 (- 67)

g/mol

550

530

450

476

PROTELEN

SHC 224

°C (°F)
mbar (Torr)
mbar (Torr)

Density at 15 °C (59 °F)
Pour point

Medicinal, high purity white oil, paraffin-base, core fraction, free of additives, sulphur and aromatic compounds

Suited
Conditionally suited
Not suited

mm2/s (= cSt)
mm2/s (= cSt)

Flash point

SHC 224

Suited
Conditionally suited
Not suited

Technical Data
Viscosity
at 040 °C (104 °F)
at 100 °C (212 °F)

PROTELEN

g/ml

Or dering
Information

Special oil
N62

White Oil
NC2

01 litre (1.06 qt)

Part No. 177 01

–

–

Part No. 200 28 181

05 litres (5.29 qt)

Part No. 177 02

Part No. 177 29

Part No. 177 07

–

20 litres (21.14 qt)

Part No. 177 03

Part No. 177 27

Part No. 177 08

–

180 kg (397.35 lbs)

Part No. 177 05

–

Part No. 177 10

–

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
2) at 20 °C (68 °F)
3) at 60 °C (140 °F)

C01.66

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General Accessories

Application Data
Type of oil
Examples of areas of application
and process media

Remarks

Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Technical Data
Viscosity
at 040 °C (104 °F)
at 100 °C (212 °F)

mm2/s (= cSt)
mm2/s (= cSt)

Flash point
Vapor pressure
at 020 °C (68 °F)
at 100 °C (212 °F)

°C (°F)
mbar (Torr)
mbar (Torr)

Density at 15 °C (59 °F)

g/ml

Rotary Vane Vacuum Pumps

ANDEROL® 555

ANDEROL® RCF-E68N

NC 10

Diester oil

Polycarboxylic acid ester

Alkyl sulphonic acid ester

Used at elevated temperatures,
pumping of air, chemically inert
permanent gases (noble gases,
for example), carbon dioxide CO2,
carbon monoxide CO, aliphatic compounds (for
example methane CH4, propane C3H8, ethylene
C2H4), organic solvent vapors

Cooling and air-conditioning
applications. For refrigerants
(for example halocarbon, R134a),
HCFC (for example, R123),
HFC (for example, R218),
CFC (for example, R12) and
HC (for example, R600a)

When pumping process media
which tend to polymerise
(for example, styrene C8H8,
butadiene C4H6).

Do not pump any inorganic acids
(HCL, HF, for example),
no free halogens (CL2, F2, for example)
or alkaline media (NH3, for example)

Use only correspondingly
modified pumps

Do not use a chemical oil filter

Mixing with other types of oil must
be absolutely avoided

Mixing with other types of oil must
be absolutely avoided

Do not pump any inorganic acids
(for example HCl, HF)

Do not pump any inorganic acids
(for example HCl, HF)

Suited
Conditionally suited
Not suited

Suited
Conditionally suited
Not suited

Suited
Not suited
Not suited

ANDEROL® 555

ANDEROL® RCF-E68N

NC 10

94
9

68
10

38
4

250 (482)

260 (500)

225 (437)

7 x 10-5 (5 x 10-5)
1.5 x 10-3 (1 x 10-3)

No known
No known

1 x 10-4 (8 x 10-5)
No known

0.96

1.00

1.05 2)

°C (°F)

-42 (-44)

-54 (-65)

-30 (-22)

g/mol

530

Not applicable

Not applicable

ANDEROL® 555

ANDEROL® RCF-E68N

NC 10

01 litre (1.06 qt)

Part No. 200 10 272

Part No. 200 02 754

–

05 litres (5.29 qt)

Part No. 200 10 891

–

–

20 litres (21.14 qt)

Part No. 200 00 193

–

Part No. 177 25

Pour point
Middle molecular weight

Ordering
Infor mation

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
2) at 20 °C (68 °F)
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
ANDEROL® is a trademark of ANDEROL BV

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.67

C01

Rotary Vane Vacuum Pumps

Application Data
Type of oil
Examples of areas of application
and process media

Remarks

General Accessories

DOT 4

NC 1/14

Brake fluid

Perfluorinated polyether PFPE

Filling of brake fluid circuits in the car industry

For pumping strong oxidants like oxygen,
O2, ozone O3, nitrogen oxides NOx and
sulphur oxides (SO2, SO3) as well as reactive
substances like halogens
(for example fluorine F2,
chlorine Cl2), hydrogen halides
(for example hydrogen chloride HCl,
hydrogen bromide HBr), uranium hexafluoride UF6,
and conditionally Lewis acids (for example,
boron trichloride BCl3)

Use only in pumps modified for DOT 4

Use only in pumps modified for PFPE

Mixing with other types of oil
must be absolutely avoided

Mixing with other types of oil must be absolutely avoided
Avoid pumping water vapour,
especially with corrosive media (see above)
The use of a chemical oil filter CF / CFS
is strongly recommended

Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Not suited
Not suited
Suited

Technical Data
Viscosity
at 040 °C (104 °F)
at 100 °C (212 °F)

DOT 4

NC 1/14

mm2/s (= cSt)
mm2/s (= cSt)

No known
>2

47
5

°C (°F)

> 120 (248)

– 2)

mbar (Torr)
mbar (Torr)

1.3 (0.98)
No known

3 x 10-7 (2.25 x 10-7)
6 x 10-4 (4.5 x 10-4)

1.05

1.89 3)

Not applicable

- 40 (- 40)

Not applicable

2500

DOT 4

NC 1/14

Part No. 200 10 037

Part No. 177 38

Flash point
Vapor pressure
at 020 °C (68 °F)
at 100 °C (212 °F)
Density at 15 °C (59 °F)
Pour point

g/ml
°C (°F)

Ordering
Information
1 litre (1.06 qt)

Suited
Suited
Suited

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
2) Caution: Perfluorinated polyether compounds will, when being decomposed at temperatures over 290 °C (554 °F), release toxic and corrosive gases.
For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used
3) at 20 °C (68 °F)

C01.68

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General Accessories

Rotary Vane Vacuum Pumps

Version for the North and South American Continents
Application Data
Type of oil
Examples of areas of application
and process media

HE-200
Paraffin-base mineral oil, core faction, free of additives

Perfluorinated polyether PFPE

Standard oil for Leybold USA

For pumping strong oxidants like oxygen,
O2, ozone O3, nitrogen oxides NOx and
sulphur oxides (SO2, SO3)
as well as reactive substances like
halogens (for example fluorine F2,
chlorine Cl2), hydrogen halides
(for example hydrogen chloride HCl,
hydrogen bromide HBr),
uranium hexafluoride UF6,
and conditionally Lewis acids
(for example, boron trichloride BCl3)

For pumping air, chemically inert permanent gases
(noble gases, for example),
water vapor, solvent vapors
in the case of laboratory pumps operated with cold traps

The ultimate pressures stated in our catalogs are based on
operation of the pump with HE-200
(except for the DOT and PFPE pumps)

Remarks

HE-1600

C01

Use only correspondingly modified pumps
Mixing with other types of oil must be
absolutely avoided

Service life may be extended through the use of an oil filter
The uptake of water vapor must be avoided
The use of an oil filter is strongly recommended
Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Suited
Conditionally suited
Not suited

Technical Data
Viscosity
at 040 °C (104 °F)
at 100 °C (212 °F)

mm2/s (= cSt)
mm2/s (= cSt)

Flash point
Vapor pressure
at 025 °C (77 °F)
at 100 °C (212 °F)

°C (°F)
mbar (Torr)
mbar (Torr)

Density at 20 °C (68 °F)
Pour point
Molecular weight

g/ml
°C (°F)

Ordering
Inform ation

HE-200

Suited
Suited
Suited

HE-1600

58
9.1

140 2)
7

224 (435)

– 3)

4.7 x 10-6 (3.5 x 10-6)
3.9 x 10-4 (2.9 x 10-4)

7 x 10-7 (5 x 10-7) 2)
3 x 10-4 (2 x 10-4)

0.88

1.86

- 10 (14)

- 40 (- 40)

480

3000

HE-200

HE-1600

01 qt (1 l)

Part No. 98 198 006

–

01 gal (3.8 l)

Part No. 98 198 007

–

05 gal (18.9 l)

Part No. 98 198 008

–

55 gal (208 l)

Part No. 98 198 010

–

Bottle 02 lb (0.91 kg)

–

Part No. 898 564-1

Bottle 04 lb (1.81 kg)

–

Part No. 898 564-2

Bottle 16 lb (7.25 kg)

–

Part No. 898 564-4

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
2) at 20 °C (68 °F)
3) Caution: Perfluorinated polyether compounds will, when being decomposed at temperatures over 290 °C (554 °F), release toxic and corrosive gases.
For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.69

Rotary Vane Vacuum Pumps

60 Hz Curves
Version for the North and South American Continents

101

cfm

Pumping Speed

100

10-1

8
6
4
2

-2

10

10-5

2

4 68

10-4

10-3

10-2

10-1

100

101

102

100

101

102

Pressure

Total Pressure without gas ballast

Torr

103

Total Pressure with gas ballast
Partial Pressure without gas ballast

Pumping speed characteristics for the TRIVAC D 2.5 E at 60 Hz

101
D8B

cfm

Pumping Speed

100
D4B

10-1

8
6
4
2

10-2
10-5

2

4 68

10-4

10-3

10-2

10-1
Pressure

Total Pressure without gas ballast

Torr

103

Total Pressure with gas ballast
Partial Pressure without gas ballast

Pumping speed characteristics for the TRIVAC D 4 B and D 8 B at 60 Hz

102

Pumping Speed

cfm

D25B

101

D16B

100

8
6
4
2

10-1
10-5

2

4 68

10-4

10-3

10-2

Total Pressure without gas ballast

10-1
Pressure

100

101

102

Torr

103

Total Pressure with gas ballast
Partial Pressure without gas ballast

Pumping speed characteristics for the TRIVAC D 16 B and D 25 B at 60 Hz

C01.70

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

60 Hz Curves

Rotary Vane Vacuum Pumps

Version for the North and South American Continents
102
D65B

Pumping Speed

cfm

C01

101

D40B

100

8
6
4
2

-1

10

10-5

2

4 68

10-4

10-3

10-2

Total Pressure without gas ballast

10-1

100

101

Pressure

102

Torr

103

Total Pressure with gas ballast
Partial Pressure without gas ballast

Pumping speed characteristics for the TRIVAC D 40 B and D 65 B at 60 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C01.71

Rotary Vane Vacuum Pumps

C01.72

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

SOGEVAC

C02

Rotary Vane Vacuum Pumps
single-stage, oil-sealed,
10 - 1200 m3 x h-1 (5.9 - 707 cfm)

Rotary Vane Vacuum Pumps

Contents
General
Product Range, Features and Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.03

Products
Rotary Vane Vacuum Pumps
SOGEVAC SV 10 B/SV 16 B. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 25 B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 40 B/SV 65 B. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 100 B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 16/SV 25 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 40/SV 65/SV 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 200/SV 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 630/SV 630 F/SV 750 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SOGEVAC SV 1200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C02.04
C02.06
C02.08
C02.12
C02.16
C02.18
C02.22
C02.26
C02.28
C02.32

Accessories
Dust Filters (Suction Side) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SL Condensate Traps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SEP Separators and SEPC Condensers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Special Oil Sight Glass . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Gas Ballast Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Thermal Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Ball Valves and Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Oil Filtering System OF3000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Other Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Mounting Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Exhaust Filter Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Bourdon Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Connection Fittings
for SOGEVAC SV 16, SV 25 and SV 10 B, SV 16 B, SV 25 B . . . . . . . . . . . . . . . . . . . . .
for SOGEVAC SV 40, SV 65, SV 100 and SV 40 B, SV 65 B, SV 100 B . . . . . . . . . . . . . .
for SOGEVAC SV 200, SV 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
for SOGEVAC SV 500, SV 630, SV 630 F, SV 750. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
for SOGEVAC S V 1200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C02.34
C02.36
C02.37
C02.38
C02.38
C02.38
C02.39
C02.40
C02.41
C02.42
C02.42
C02.43
C02.44
C02.45
C02.46
C02.47
C02.48

Miscellaneous
Central Vacuum Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.49
Vacuum Pump Oils . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.55
60 Hz Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.59

C02.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Rotary Vane Vacuum Pumps

Product Range, Features and Design
Oil sealed rotary vane vacuum pumps are being
used in all areas of vacuum engineering. They are
equally suited for both industrial production and
research applications. They may be used to generate a rough and medium vacuum or as backing
pumps in pump combinations with Roots pumps
or high vacuum pumps. By design, rotary vane
pumps run quietly and do not produce much
noise.
Many years of experience in vacuum engineering
and the latest developments in pump technology
combine in the SOGEVAC range the capability to
adapt to the requirements of both the industry
and the environment. The comprehensive range
(pumping speeds ranging from 16 to
1200 m3 x h-1 (9.4 to 707 cfm)) allows every
customer to select the right pump for his particular needs.
With the new range of compact pumps from 10 to
100 m3 x h-1 1 these characteristics are even
more pronounced.

Application Examples
◆
◆
◆
◆
◆
◆
◆
◆
◆

Car industry
Food industry
Furnaces and plants
Laser technology
Medicinal technology
Metallurgy
Power engineering, long-distance energy
Space simulation
Vacuum coating

Advantages to the User
◆

◆
◆
◆
◆
◆

◆
◆
◆
◆
◆
◆
◆
◆

◆
◆

Operation from atmospheric pressure to
ultimate pressure
High pumping speed also at low pressures
Low noise level
Low vibrations
Integrated exhaust filter, up to 99.9% efficient
No oil loss owing to the integrated
oil return line
Exhaust gas free of oil mists
Efficient air cooling (standard)
Water cooling (optional)
Low space requirement, easy to install
Rugged
Maintenance-friendly
Compact design
For direct fitting to Roots pumps
from SV 100 B or SV 100 up
Optimum size-to-performance ratio
High water vapor tolerance

◆
◆

For use in various applications
Wide range of accessories available for adaptation to differing problems

Design Principle
SOGEVAC pumps are oil sealed rotary vane
pumps. Oil injected into the pump chamber for
sealing, lubrication and cooling of the pump is
recycled from the pump’s oil reservoir and filtered before it is injected. The lubricant system is
rated for continuous operation at high intake
pressures so that the pumps may be used in a
versatile manner in most rough vacuum applications (accessories are required for some pumps).
The oil carried with the process gas is roughly
separated in the oil box before the discharged
gas enters the integrated exhaust filters where
the fine oil mist is trapped. The thus filtered oil is
collected in the oil box and then supplied back to
the pump.
This demister system, optimized to suit all operating conditions of the vacuum pump ensures oilmist free exhaust gas (degree of separation over
99.9%) even at high intake pressures and when
pumping vapors.
LEYBOLD rotary vane pumps from the SOGEVAC
series excel through numerous special features:

Compact Design
The pumps have been so designed that efficiency
of the pumps will be high.
Except for the SV 10 B to SV 65 B, the motor is
linked depending on requirements to the pumping section directly via a coupling or via V-belts
as a pedestal motor. All vacuum components like
anti-suckback, exhaust filter with oil return line
needed for a complete vacuum unit as well as the
optimized placement of all controls and monitoring components allow for an extremely compact
unit.
Integrated anti-suckback valve

Quiet Operation
SOGEVAC pumps are designed throughout to
keep the noise level as low as possible. This is
ensured by optimized running and sliding speeds
and the selection of low-noise drive motors, as
well as perfected manufacturing techniques using
CNC automatic machines for optimized tolerances
and reproducibility of the individual components.

Anti-Suckback Valve
A valve is built into the intake of the SOGEVAC
pumps. This “anti-suckback valve” is protected
by a metal wire-mesh filter. During standstill of
the pump (for example due to shutting down or a
power failure) this valve closes the intake. This
prevents the pressure from rising in the connected chamber while the pump is vented at the same
time. Any suck-back of pump oil into the vacuum
system is thus also effectively prevented. This
blocking process operates under all operating
conditions (below 800 mbar (600 Torr)) and even
when the gas ballast valve is open.

Protection of the
Environment
The built-in exhaust filter ensures an oil-mist free
exhaust gas over the entire range of operating
pressures – from atmospheric pressure to ultimate pressure.

Supplied Equipment
All pumps are delivered with the required quantity
of oil: SV 10 B to SV 65 (B) in a separate
canister, whereas the SV 100 (B) to SV 1200
already contain the oil and are thus ready for
operation.

High pumping speed right down to ultimate pressure

Wide range of accessories
Protection of the environment with
integrated exhaust filters

Maintenance friendly

Compact design

Efficient air cooling

Low noise level

Outstanding features of the SOGEVAC pumps

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.03

C02

Rotary Vane Vacuum Pumps

SOGEVAC SV 10 B/SV 16 B

SOGEVAC SV 16 B

1)

1)

l2

b
l3

l

3)

b1
4)
l5

l4

l1

b2
b3
b4

1)

h

b5

h5

2)

h1

h2
h3

1)
2)
3)
4)

1 ph. motor
3 ph. motor
Space for fitting the exhaust filter
Space for the motor’s ventilation

b6

l6
l7

b7

2)

l8

b8
b9

Type

b

SV 10 B/16 B

b1

b2

b3

b4

b5

b6

b7

b8

h4

b9

h

h1

h2

h3

h4

h5

l

l1

l2

l3

l4

l5

l6

2)

l7

l8

mm 279 117 72 67 7 109 52 100 112 230 142 152 158 4 15 199 200 72 315 244 237 100 90 148 309
in. 10.98 4.61 2.83 2.64 0.28 4.29 2.05 3.94 4.41 9.06 5.59 5.98 6.22 0.16 0.59 7.83 7.87 2.83 12.4 9.91 9.33 3.94 3.54 5.83 12.17

Dimensional drawing for the SOGEVAC SV 10 B and SV 16 B

10

2

50
CFM
20

Pumping Speed

m3 x h-1

SV 16 B
10

10

1

5

8
6

SV 10 B

4

2

1

0

10
-1
10

2

4

6 8

10

0

without gas ballast
with gas ballast

10

1

10

2

mbar

10

3

Pressure

Pumping speed characteristics of the SOGEVAC SV 10 B and SV 16 B at 50 Hz (60 Hz curves at the end of the section)

C02.04

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps
SOGEVAC SV 10 B

Technical Data

SOGEVAC SV 16 B

50 Hz

60 Hz

50 Hz

60 Hz

Nominal speed 1)

m3 x h-1 (cfm)

11 (6.5)

13 (7.7)

16 (9.4)

19 (11.2)

Pumping speed 1)

m3 x h-1 (cfm)

9.5 (5.6)

11.5 (6.8)

15 (8.8)

17 (10)

Ultimate partial pressure without gas ballast 1

mbar (Torr)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

Water vapor tolerance 1)
Water vapor capacity

≤ 1 (≤ 0.75)

≤ 2 (≤ 1.5)

≤ 2 (≤ 1.5)

mbar (Torr)

10 (7.5)

15 (11.3)

10 (7.5)

15 (11.3)

kg x h-1 (qt/hr)

20 (21)

30 (32)

30 (32)

50 (53)

Oil capacity

l (qt)

Noise level 2)

dB(A)

Admissible ambient temperature

0.5 (0.53)
62 (1f) - 60 (3f)

kW (hp)

Type of protection

66 (1f) - 64 (3f)

0.55 (1)

min-1 (rpm)
IP

62 (1f) - 60 (3f)

66 (1f) - 64 (3f)

12 to 40 (54 to 104)
0.75 (1.5)

0.55 (1)

0.75 (1.5)

3000 (3000)

3000 (3000)

55-F

55-F

Weight (with oil filling)

kg (lbs)

20 (41.15)

20.5 (45.25)

Dimensions (W x H x D)

mm (in.)

315 x 281 x 199 (12.4 x 11.06 x 7.83)

315 x 281 x 199 (12.4 x 11.06 x 7.83)

Connections
intake (Inside thread)

Ordering Information
SOGEVAC SV 10 B/SV 16 B 1)
with three-phase motor, with gasballast
230/400 V, 50 Hz und 230/460 V, 60 Hz (CEI)
200 V, 50/60 Hz
with single-phase motor, with gasballast
230 V, 50/60 Hz (CEI)
115 V, 60 Hz
100 V, 50/60 Hz
Other voltages/frequencies 4)
Filling with special oil

G

C02

0.5 (0.53)

12 to 40 (54 to 104)

°C (°F)

Motor power
Nominal speed

≤ 1 (≤ 0.75)

3/4" + 1/2"

3/4" + 1/2"

3/4" + 1/2"

SOGEVAC SV 10 B

50 Hz

3/4" + 1/2"

SOGEVAC SV 16 B

60 Hz

50 Hz

60 Hz

Part No. 960 100
Part No. 960 115

Part No. 960 160
Part No. 960 175

Part No. 960 105
Part No. 960 110
Part No. 960 114
upon request
upon request

Part No. 960 165
Part No. 960 170
Part No. 960 174
upon request
upon request

Accessories

upon request

Spare parts

upon request

1)

To DIN 28 400 and following numbers
Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of 1 m
3) Please indicate when ordering a pump
2)

Technical description see Section “General”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.05

Rotary Vane Vacuum Pumps

SOGEVAC SV 25 B

SOGEVAC SV 25 B

b5

l2
l1
1)
2)

l3

b3

l4

Space for fitting the exhaust filter
Space for the motor’s ventilation

h2

l

1)

l6

l8

h

h1

b4

h7

h6

h5

h4

h3

2)

b2

h8

b1
b

1), 2), 3)

Part No. 960 255 / 256 / 257

275
10.83
Part No. 960 261
275
10.83
Part No. 960 266
275
10.83
Part No. 960 250 / 251 / 252 / 253 231
9.09

b6
b7

l7
l5

Type

b

SV 25 B

1)

mm
in.

1)

b1

b2

b3

b4

b5

h

h1

h2

h3

231 58 44 89 157 211 173 246 50
9.09 2.28 1.73 3.50 6.18 8.31 6.81 9.69 1.97

h4

h5

2)

3)

2)

3)

h6

b

h7

h8

l

l1

l2

l3

l4

l5

l6

l7

h4

h5

193
7.6
235
9.25
253
9.96
–
–

208
8.19
224
8.82
224
8.82
209
8.23

l8

211 211 19 280 65 356 56 155 190 80 11 100
8.31 8.31 0.75 11.02 2.56 14.02 2.20 6.10 7.48 3.15 0.43 3.94

Dimensional drawing for the SOGEVAC SV 25 B

10

2

50
CFM
20

Pumping Speed

m3 x h-1

10
10

1

5

8
6
4

2

1

0

10
-1
10

2

4

6 8

10

0

without gas ballast
with gas ballast

10

1

10

2

mbar

10

3

Pressure

Pumping speed characteristics of the SOGEVAC SV 25 B at 50 Hz (60 Hz curves at the end of the section)

C02.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Technical Data

50 Hz

Nominal speed 1)

m3 x h-1 (cfm)

26 (15.3)

Pumping speed 1)

m3 x h-1 (cfm)

22.5 (13.3)

SOGEVAC SV 25 B

31 (18.3)
25 (14.7)

Ultimate partial pressure without gas ballast 1) mbar (Torr)

≤ 0.5 (≤ 0.4)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

≤ 0.8 (≤ 0.6)

Water vapor tolerance 1)

mbar (Torr)

Water vapor capacity

kg x h-1 (qt/hr)

Oil capacity

dB(A)

Admissible ambient temperature

kW (hp)

64
0.9 (1.2)

kg (lbs)

Dimensions (W x H x D)

mm (in.)

Connections
intake
exhaust

Ordering Information

1.1 (1.5)
3000 (3000)
55-F

IP

Weight (with oil filling)

67
12 to 40 (54 to 104)

min-1 (rpm)

Type of protection

C02

100 (???)
0.5 (0.53)

°C (°F)

Motor power
Nominal speed

10 (7.5)
85 (90)

l (qt)

Noise level 2)

60 Hz

26 (57.4)

27 (59.6)
356 x 275 x 246 (14.02 x 10.83 x 9.69)
3/4" + 1/2"
3/4"

G
G

50 Hz

SOGEVAC SV 25 B

60 Hz

SV 25 B 1)

SOGEVAC
with three-phase motor, without gasballast
200-230/400 V, 50 Hz (CEI)
200-230/400-460 V, 60 Hz (CEI)
200-230/400 V, 50 Hz, NPT flanges (CEI)
200-230/400-460 V, 60 Hz, NPT flanges (CEI)
with three-phase motor, with gasballast
200-230/400 V, 50 Hz (CEI)
200-230/400-460 V, 60 Hz (CEI)
200-230/400 V, 50 Hz, NPT flanges (CEI)
200-230/400-460 V, 60 Hz, NPT flanges (CEI)
with single-phase motor, without gasballast
230 V, 50/60 Hz (CEI)
230 V, 50/60 Hz, NPT flanges (CEI)
115 V, 60 Hz
100 V,50/60 Hz
with single-phase motor, with gasballast
230 V, 50/60 Hz (CEI)
230 V, 50/60 Hz, NPT flanges (CEI)
115 V, 60 Hz
100 V,50/60 Hz
Other voltages/frequencies 4)
Filling with special oil

Part No. 960 250
–
Part No. 960 252
–
Part No. 960 251
–
Part No. 960 253
–
Part No. 960 255
–
–
–
Part No. 960 256
Part No. 960 257
Part No. 960 261
Part No. 960 266
upon request
upon request

Accessories

upon request

Spare parts

upon request

1)

To DIN 28 400 and following numbers
Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of 1 m
3) European and Japanese pumps have BSP, North and South American versions have NPT
4) Please indicate when ordering a pump
2)

Technical description see Section “General”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.07

Rotary Vane Vacuum Pumps

SOGEVAC SV 40 B/SV 65 B

SOGEVAC SV 65 B

l

l3

1)

l2
b1

l4

l1
l8

b2

l5

h1

b3

h

h2

b4

1)
2)
3)

b3

Space for fitting the exhaust filter
Space for the motor’s ventilation
Only SV 65 B

Type
SV 40 B
SV 65 B

mm
in.
mm
in.

l7

l6

2)

b

l9

b

b1

b2

b3

b4

h

h1

h2

l

l1

l2

284
11.2
320
12.6

160
6.3
170
6.69

74
2.9
95
3.74

235
9.25
254
10

46
1.8
50
1.97

255
10.04
266
10.47

265
10.43
264
10.39

217
8.54
216
8.50

350
13.78
350
13.78

143
6.63
166
6.54

425
16.7
480
18.9

l3

l4

l5

l6

510 – 40 1)
20.1 – 1.57 1)
565 215 – 215
22.2 8.46 – 8.46

l7

l8

150
5.91
150
5.91

43
1.69
52
2.05

1)

Europe
USA / JPN / TWN

l6
220
8.66
226
8.89

Dimensional drawing for the SOGEVAC SV 40 B and SV 65 B with standard motor, European version

29.918
10

29.9

29.530

Inches.Hg
25.980

0

2

50
SV 65 B

CFM
20

Pumping Speed

m3 x h-1

SV 40 B
10

10

1

5

8
6
4

2

1

0

10
-1
10
10

1

2

4

6 8

10

0

10

2

without gas ballast
with gas ballast

10

1

10

2

10

3

10

4

mbar

10

3

Pa

10

5

Pressure

Pumping speed characteristics of the SOGEVAC SV 40 B and SV 65 B at 50 Hz (60 Hz curves at the end of the section)

C02.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps
SOGEVAC SV 40 B

Technical Data

SOGEVAC SV 65 B

50 Hz

60 Hz

50 Hz

60 Hz

Nominal speed 1)

m3 x h-1 (cfm)

44 (25.9)

53 (31.2)

59 (34.8)

71 (41.8)

Pumping speed 1)

m3 x h-1 (cfm)

38.5 (22.7)

47 (27.7)

54 (31.8)

64 (37.7)

Ultimate partial pressure without gas ballast 1) mbar (Torr)

≤ 0.5 (≤ 0.4)

≤ 0.5 (≤ 0.4)

Ultimate total pressure
with standard gasballast 1)
with small gasballast 2)

mbar (Torr)
mbar (Torr)

≤ 1.5 (≤ 1.1)
≤ 0.8 (≤ 0.6)

≤ 1.5 (≤ 1.1)
≤ 0.8 (≤ 0.6)

Water vapor tolerance
with standard gasballast 1)
with small gasballast

mbar (Torr)
mbar (Torr)

30 (22.5)
10 (7.5)

30 (22.5)
10 (7.5)

Water vapor capacity, max.
with standard gasballast
with small gasballast

kg x h-1 (qt/hr)
kg x h-1 (qt/hr)

Oil capacity

l (qt)

Mean noise level 3)

dB(A)

Admissible ambient temperature
Motor power
Nominal speed
Type of protection

4)
5)

2.0 (2.1)
63

60

12 to 40 (54 to 104)

64
12 to 40 (54 to 104)

1.5 (2.0)

1.5 (2.0)

1.8 (2.5)

min-1 (rpm)

1500 (v)

1800 (1800)

1500 (1500)

1800 (1800)

IP

mm (in.)
mm (in.)

3)

60

1.25 (1.32)
0.42 (0.44)

1.1 (1.5)

Dimensions (W x H x D)
Eur
USA / JPN / TWN

2)

1.0 (1.1)
0.36 (0.38)

kW (hp)

kg (lbs)

1)

0.90 (0.95)
0.34 (0.36)
1.0 (1.05)

°C (°F)

Weight (with oil filling)

Connections
intake
exhaust

0.76 (0.80)
0.28 (0.30)

C02

G
G

55-F
43 (94.9)

55-F
45 (99.3)

425 x 284 x 265 (16.7 x 11.2 x 10.4)
455 x 284 x 265 (16.7 x 11.2 x 10.4

1 1/4"
1 1/4"

1 1/4"
1 1/4"

49 (108.2)

52 (114.8)

480 x 320 x 264 (18.9 x 12.6 x 10.4)
480 x 320 x 264 (18.9 x 12.6 x 10.4)

1 1/4"
1 1/4"

1 1/4"
1 1/4"

To DIN 28 400 and following numbers
Ordering Information see Section “Accessories”
Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of 1 m
IEC-Motor (Europa) 50/60 Hz in IP 55, NEMA-Motor in TEFC
European and Japanese pumps have BSP, North and South American versions have NPT

Technical description see Section “General”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.09

Rotary Vane Vacuum Pumps

Or dering Information
SOGEVAC SV 40 B/SV 65 B 1)
with three-phase motor,
without gasballast, without oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (CEI)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz
with three-phase motor,
without gasballast, with oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (CEI)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz
with three-phase motor,
with small gasballast, without oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (CEI)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz
with three-phase motor,
with small gasballast, with oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (CEI)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz
with three-phase motor,
with standard gasballast, without oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (CEI)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz
with three-phase motor,
with standard gasballast, with oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (CEI)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz
Other voltages/frequencies 2)
Filling with special oil 2)

SOGEVAC SV 40 B

50 Hz

60 Hz

SOGEVAC SV 65 B

50 Hz

60 Hz

Part No. 960 300
–
–
–

Part No. 960 400
–
–

Part No. 960 302
–
–
–

Part No. 960 402
–
–
–

Part No. 960 301
Part No. 960 311
Part No. 960 321
Part No. 960 316

Part No. 960 401
Part No. 960 411
Part No. 960 421
Part No. 960 416

Part No. 960 303
Part No. 960 313
Part No. 960 323
Part No. 960 316

Part No. 960 403
Part No. 960 413
Part No. 960 423
Part No. 960 418

Part No. 960 305
Part No. 960 312
Part No. 960 322
Part No. 960 317

Part No. 960 405
Part No. 960 412
Part No. 960 422
Part No. 960 417

Part No. 960 307
Part No. 960 314
Part No. 960 324
Part No. 960 319
upon request
upon request

Part No. 960 407
Part No. 960 414
Part No. 960 424
Part No. 960 419
upon request
upon request

Accessories

upon request

upon request

Spare parts

upon request

upon request

1)
2)

European and Japanese pumps have BSP, North and South American versions have NPT
Please indicate when ordering a pump

C02.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

N otes

C02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.11

Rotary Vane Vacuum Pumps

SOGEVAC SV 100 B

SOGEVAC SV 100 B

l

l9

l2
l3
l4

l1
l6

l5

b2

b1

h1

h3

h2

b3

l7

b4

l8
1)
2)

b5

Space for fitting the exhaust filter and cooling
Space for the motor’s ventilation

Type
SV 100 B

b1
mm
in.

b2

b3

1)

Europe

b4

b5

h1

h2

h3

h4

209 95 258 320 400 271 220 271
8.23 3.74 10.16 12.60 15.75 10.67 8.66 10.67

l

1)

l1

350 160
13.78 6.30

1)

l2
1)
1)

l3

l4

l5

l6

l7

10

29.9

29.530

l8

l9

590 330 53 225 27 225 150
23.23 12.99 2.09 8.86 1.06 8.86 5.91

Dimensional drawing for the SOGEVAC SV 100 B

29.918

h4

Inches.Hg
25.980

USA
JPN / TWN

mm
in.
mm
in.
mm
in.

h4

l2

270
10.63
290
11.42
275
10.83

695
27.36
755
29.72
715
28.15

0

2

50
CFM
20

Pumping Speed

m 3 x h-1

10
10

1

5

8
6
4

2

1

0

10
-1
10
10

1

2

4

6 8

10

0

10

1

10

2

10

2

10

3

10

4

without gas ballast
with gas ballast

mbar

10

3

Pa

10

5

Pressure

Pumping speed characteristics of the SOGEVAC SV 100 B at 50 Hz (60 Hz curves at the end of the section)

C02.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Technical Data

50 Hz

SOGEVAC SV 100 B

60 Hz

Nominal speed 1)

m3 x h-1 (cfm)

97.5 (57.4)

117 (68.9)

Pumping speed 1)

m3 x h-1 (cfm)

87.5 (51.5)

105 (61.8)

Ultimate partial pressure without gas ballast 1)mbar (Torr)

≤ 0.5 (≤ 0.38)

Ultimate total pressure
with standard gasballast 1)
with small gasballast 2)

mbar (Torr)
mbar (Torr)

≤ 1.5 (≤ 1)
≤ 0.8 (≤ 0.6)

Water vapor tolerance
with standard gasballast 1)
with small gasballast

mbar (Torr)
mbar (Torr)

30 (22.5)
15 (11.3)

Water vapor capacity, max.
with standard gasballast
with small gasballast

kg x h-1 (qt/hr)
kg x h-1 (qt/hr)

Oil capacity

l (qt)

Mean noise level 3)

dB(A)

Admissible ambient temperature
Motor power
Nominal speed
Type of protection

kW (hp)
min-1 (rpm)

Dimensions (W x H x D)
Eur
USA
JPN / TWN

mm (in.)
mm (in.)
mm (in.)

1)
2)
3)
4)
5)

61

G
G

64
12 to 40 (54 to 104)

2.2 (3.0)

3.0 (4.0)

1500 (1500)

1800 (1800)
55-F

IP
kg (lbs)

1.70 (1.80)
0.60 (0.63)
2.0 (2.1)

°C (°F)

Weight (with oil filling)

Connections
intake
exhaust

1.60 (1.69)
0.45 (0.48)

C02

75 (165.6)

88 (194.3)
695 x 400 x 270 (27.4 x 15.7 x 10.6)
755 x 400 x 290 (29.7 x 15.7 x 11.4)
715 x 400 x 275 (28.1 x 15.7 x 10.8)

1 1/4"
1 1/4"

1 1/4"
1 1/4"

To DIN 28 400 and following numbers
Ordering Information see Section “Accessories”
Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of 1 m
IEC-Motor (Europa) 50/60 Hz in IP 55, NEMA-Motor in TEFC
European and Japanese pumps have BSP, North and South American versions have NPT

Technical description see Section “General”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.13

Rotary Vane Vacuum Pumps

Ordering Information

50 Hz

SOGEVAC SV 100 B 1)
with three-phase motor,
without gasballast, without oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (NEMA)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz (JIS)
with three-phase motor,
without gasballast, with oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (NEMA)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz (JIS)
with three-phase motor,
with small gasballast, without oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (NEMA)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz (JIS)
with three-phase motor,
with small gasballast, with oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (NEMA)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz (JIS)
with three-phase motor,
with standard gasballast, without oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (NEMA)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz (JIS)
with three-phase motor,
with standard gasballast, with oilfilter
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
230/460 V, 60 Hz and 400 V, 50 Hz (NEMA)
230/400 V, 50/60 Hz (CEI)
200 V, 50/60 Hz (JIS)
Other voltages/frequencies 2)
Filling with special oil 2)

Accessories
Spare parts

SOGEVAC SV 100 B

60 Hz

Part No. 960 500
–
–
–
Part No. 960 502
–
–
–
Part No. 960 501
Part No. 960 511
Part No. 960 521
Part No. 960 516
Part No. 960 503
Part No. 960 513
Part No. 960 523
Part No. 960 516
Part No. 960 505
Part No. 960 512
Part No. 960 522
Part No. 960 517
Part No. 960 507
Part No. 960 514
Part No. 960 524
Part No. 960 519
upon request
upon request
upon request
upon request

1)

European and Japanese pumps have BSP, North and South American versions have NPT
2) Please indicate when ordering a pump

C02.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

N otes

C02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.15

Rotary Vane Vacuum Pumps

SOGEVAC SV 16/SV 25

SOGEVAC SV 25

b

h3

h2

b2
b3

Option: 712 34 720
Water cooling

b4

Lifting lug

Water supply

b5

ø G 1/2"

ø G 1/2"

b1

l1

l2

Water discharge

a

l3
l4

a2

2

1

h4

h

3

h5
h6

h1

a1

b7
b9

b8

l
1

b10

2

b6
Type SV
16 / 25 mm
in.

a
250
9.84

a1
15
0.59

a2
b
b1
65 263 116
2.56 10.35 4.57

3

b2
115
4.53

b3
105
4.13

b4
45
1.77

b5
40
0.46

b6
198
7.8

b7
50
1.97

b8
25
0.98

Ventilation
Option: 710 42 890
Electrical connection
Space for fitting the exhaust filter

b9
90
3.54

b10
34
1.34

h
200
7.87

h1
49
1.93

h2
218
8.58

h3
236
9.29

h4
192
7.56

h5
20
0.79

h6
l
l1
67 422 218
2.64 16.61 8.58

l2
36
0.71

l3
170
6.69

l4
20
0.79

Dimensional drawing for the SOGEVAC SV 16 and SOGEVAC SV 25

10

Pressure

100

mbar

10
%

3

m xh

Torr

100

750

2

50
cfm
20

SV 16

-1

90

2

10

10

101

99

1

1008

99,9

6
4

2
-1

10

10

SV 25

10

10-1

1

0

0

5

10

15 20

Pumping speed

Torr

103

Vacuum

750

SV 25
SV 16

-1

10 1

1
10

99,99
25 s 30

0
8
6
4

Time
without gas ballast
with gas ballast

5

2

10

-1

10-1

2

4

6 8

100

101

102

mbar

103

Pressure
Pump-down characteristics of a 10 l vessel at 50 Hz

C02.16

Pumping speed characteristics of the SOGEVAC SV 16 and SV 25 at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps
SOGEVAC SV 16

Technical Data

SOGEVAC SV 25

50 Hz

60 Hz

50 Hz

60 Hz

Nominal speed 1)

m3 x h-1 (cfm)

16 (9.4)

19 (11)

25 (14.7)

29 (17)

Pumping speed 1)

m3 x h-1 (cfm)

14.5 (8.5)

17 (10)

22.5 (13.3)

25.5 (15)

Ultimate partial pressure without gas ballast 1)mbar (Torr)

< 0.5 (≤ 0.4)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 1.5 (≤ 1.1)

Water vapor tolerance 1)

mbar (Torr)

40 (30)

kg x h-1 (qt/hr)

Water vapor capacity

Noise level

Admissible ambient temperature

1.8 (2)

dB(A)

56

kW (hp)

0.55 (1)

0.75 (1.5)

min-1 (rpm)

Nominal speed
Type of protection

1500 (1500)
23

IP

Weight (with oil filling)

kg (lbs)

Dimensions (W x H x D)

mm (in.)

Connections
Intake 3)
Exhaust 3)

12 to 40 (54 to 104)

°C (°F)

Motor power

G ((BSP) Inside thread)
G ((BSP) Inside thread)

Or dering Information
SOGEVAC SV 16/SV 25 3)
with three-phase motor and
integrated gas ballast valve
230/400 V, 50 Hz
208 - 230/460 V, 60 Hz
200 V, 50/60 Hz
with single-phase motor and
integrated gas ballast valve
100 V, 50 Hz
230 V, 50 Hz
115 V, 60 Hz
230 V, 60 Hz
Other voltages/frequencies 4)
Filling with special oil

C02

0.45 (0.47)

l (qt)

Oil capacity
2)

0.3 (0.32)

23 (50.7)

24 (52.9)
422 x 263 x 236 (16.61 x 10.35 x 9.29)

1/2"
1/2"

1/2"
1/2"

SOGEVAC SV 16

SOGEVAC SV 25

Part No. 109 01
Part No. 109 80
Part No. 955 01

Part No. 109 03
Part No. 109 90
Part No. 955 03

Part No. 955 30
Part No. 109 00
Part No. 109 81
Part No. 109 82

Part No. 955 32
Part No. 109 02
Part No. 109 91
Part No. 109 92

upon request
upon request

Accessories
Water cooling kit 4), 5)

Part No. 712 34 720

Oil level monitor 4), 5)

Part No. 711 19 108

Exhaust filter gauge, mechanical 4), 5)

Part No. 951 91

Spare parts
Exhaust filter cartridge

Part No. 712 32 023

Vanes, set of 3 pieces

Part No. 712 34 370

Set of gaskets NBR (standard)

Part No. 971 97 152

Set of gaskets FPM

Part No. 712 30 010

Repair kit complete

Part No. 712 41 270

Pump module complete

Part No. 712 32 230

Part No. 712 32 220

1)

To DIN 28 400 and following numbers
Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of 1 m
3) European and Japanese pumps have BSP, North and South American versions have NPT
4) Please indicate when ordering a pump
5) Can be retrofitted
2)

Technical description see Section “General”
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.17

Rotary Vane Vacuum Pumps

SOGEVAC SV 40/SV 65/SV 100

SOGEVAC SV 100

Top view
DRAUFSICHT
Exhaust port

A max

X
a3

a4

lb
AUSPUFFSTUTZEN
øb

a2

B
b4

Y

b1

H

b3

h1 h3

h2

b2

Type
l a (G) l b (G) Amax (Europe) Amax (USA) a0
SV 40 mm 1 1/4" 1 1/4"
655
660
365
in. 1 1/4" 1 1/4"
25.79
25.99 14.37
SV 65 mm 1 1/4" 1 1/4"
695
750
405
in. 1 1/4" 1 1/4"
27.36
22.56 15.94
SV 100 mm 1 1/4"
2"
800
810
470
in. 1 1/4"
2"
31.5
31.9
18.5

øD

a1

Inlet port
ANSAUGSTUTZEN
la
øa

a0

a1
190
7.48
230
9.06
250
9.94

a2
167
6.57
167
6.57
285
11.22

a3
163
6.42
163
6.42
195
7.68

P

Z

a4 B (Europe)
45
300
1.77 11.8
45
300
1.77 11.8
42
440
1.65 17.32

B (USA) b1 (Europe) b1 (USA) b2
325
183
198 0
12.8
7.20
8.20 0
325
183
198 0
12.8
7.20
8.20 0
440
185
185 44
17.32
7.28
7.28 1.73

b3 b4 (Europe) b4 (USA)
98
145
160
3.86
5.71
6.30
98
145
160
3.86
5.71
6.30
119
219
219
4.69
8.62
8.62

l D/P
M8/8
M8/8
M8/8
M8/8
M10/8
M10/8

H
260
10.24
260
10.24
280
11

h1
237
9.3
237
9.3
273
10.75

h2
h3
X
Y
216 270 350 100
8.5 10.63 13.78 3.94
216 270 350 100
8.5 10.63 13.78 3.94
220 300 350 100
8.66 11.81 3.78 3.94

Z
150
5.9
150
5.9
200
7.87

Dimensional drawing for the SOGEVAC SV 40 to SV 100 with standard motor, European version

29.921

Pressure

100

10

1

10-1

102

90

101

99

10-1
0

m xh

%

100

40

60

99,99
80 s 100

Time
without gas ballast
with big gas ballast (option)

-1

C02.18

0

Inches
x Hg
500
cfm
100

SV 100

50

10
10

5

1
10 -2

10 -1

10 0

10 1

10 2

10 0

10 1

10 2

10 3

10 4

without gas ballast
with gas ballast

Pump-down characteristics of a 100 l vessel at 50 Hz

25.980

SV 65

100

99,9

20

29.530

SV 40
3

mbar

29.9

1000
0

Pumping speed

Torr

103

Vacuum

750

SV 100
SV 65
SV 40

29.918

mbar
Pa

10 3
10 5

Pressure

Pumping speed characteristics of the SOGEVAC SV 40 to SV 100 at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Technical Data

SOGEVAC SV 40

SOGEVAC SV 65

SOGEVAC SV 100

50 Hz

60 Hz

50 Hz

60 Hz

50 Hz

60 Hz

Nominal speed 1)

m3 x h-1 (cfm)

45 (26.5)

55 (32.4)

65 (38.3)

78 (45.9)

100 (58.9)

120 (70.6)

Pumping speed 1)

m3 x h-1 (cfm)

40 (23.6)

48 (28.3)

53 (31.2)

64 (37.7)

94 (55.4)

113 (66.5)

Ultimate partial pressure without
gas ballast 1)

mbar (Torr)

< 0.5 (≤ 0.4)

< 0.5 (≤ 0.4)

< 0.5 (≤ 0.4)

< 0.5 (≤ 0.4)

< 0.5 (≤ 0.4)

< 0.5 (≤ 0.4)

Ultimate total pressure
with standard gas ballast 1)
with big gas ballast (Option) 2)

mbar (Torr)
mbar (Torr)

< 1.5 (≤ 1.1)
< 4 (≤ 3)

< 1.5 (≤ 1.1)
< 4 (≤ 3)

< 1.5 (≤ 1.1)
< 4 (≤ 3)

< 1.5 (≤ 1.1)
< 4 (≤ 3)

< 1.5 (≤ 1.1)
< 4 (≤ 3)

< 1.5 (≤ 1.1)
< 4 (≤ 3)

Water vapor tolerance
with standard gas ballast 1)
with big gas ballast

mbar (Torr)
mbar (Torr)

15 (11.3)
30 (22.5)

20 (15)
40 (30)

25 (18.8)
50 (37.5)

25 (18.8)
40 (30)

25 (18.8)
50 (37.5)

30 (22.5)
60 (45)

kg x h-1 (qt/hr)
kg x h-1 (qt/hr)

0.3 (0.32)
0.6 (0.63)

0.7 (0.73)
1.25 (1.3)

1.0 (1.05)
2.0 (2.1)

1.2 (1.3)
1.9 (2.0)

1.7 (1.8)
3.5 (3.7)

2.0 (2.1)
4.2 (4.4)

Water vapor tolerable load
with standard gas ballast
with big gas ballast
Oil capacity, min.

l (qt)

2.0 (2.1)

2.0 (2.1)

2.0 (2.1)

2.0 (2.1)

3.5 (3.7)

3.5 (3.7)

Noise level 3)

dB(A)

63

68

64

69

70

74

°C (°F)

12 - 40 (54 - 104)

12 - 40 (54 - 104)

12 - 40 (54 - 104)

12 - 40 (54 - 104)

12 - 40 (54 - 104)

12 - 40 (54 - 104)

kW (hp)

1.1 (1.5)

1.5 (2.0)

1.5 (2.0)

1.8 (2.5)

2.2 (3.0)

3 (4.0)

1450 (1450)

1750 (1750)

1450 (1450)

1750 (1750)

1450 (1450)

1750 (1750)

55

TEFC/55 4)

55

TEFC/55 4)

55

TEFC/55 4)

40 (88.2)

41 (90.4)

46 (101.4)

47 (103.4)

96 (211.2)

97 (213.4)

655 x 300 x 260

655 x 300 x 260

695 x 300 x 260

695 x 300 x 260

800 x 440 x 280

Admissible ambient temperature
Motor power
Nominal speed
Type of protection

min-1 (rpm)
IP

Weight (with oil filling)

kg (lbs)

Dimensions (W x H x D)

mm (in.)

(25.79x11.81x10.24) (25.79x11.81x10.24)

Connection 5)
Intake, thread
Exhaust, thread
1)
2)
3)
4)
5)

G (BSP)
G (BSP)

1 1/4"
1 1/4"

1 1/4"
1 1/4"

(25.95x11.81x10.24) (25.95x11.81x10.24) (31.50x17.32x11.02)

1 1/4"
1 1/4"

1 1/4"
1 1/4"

1 1/4"
2"

800 x 440 x 280
(31.50x17.32x11.02)

1 1/4"
2"

To DIN 28 400 and following numbers
Ordering Information see Section “Accessories”
Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of 1 m
CEI motor (Europe) 50/60 Hz has IP 55, NEMA motor (North and South America) has TEFC
European and Japanese pumps have BSP, North and South American versions have NPT

Technical description see Section “General”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.19

C02

Rotary Vane Vacuum Pumps

Ordering Information
SOGEVAC SV 40/SV 65/SV 100 1)
with three-phase motor, without gas ballast
230/400 V, 50 Hz and 230/460 V, 60 Hz (CEI)
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
200 V, 50/60 Hz (JIS)
with three-phase motor and
integrated gas ballast valve
230/400 V, 50 Hz and 230/460 V, 60 Hz (CEI)
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)
208 - 230/460 V, 60 Hz (NEMA) [400 V, 50 Hz]
200 V, 50/60 Hz (JIS)
Other voltages/frequencies 2)
Filling with special oil 2)

SOGEVAC SV 40

SOGEVAC SV 65

SOGEVAC SV 100

50 Hz

50 Hz

50 Hz

60 Hz

60 Hz

60 Hz

Part No. 109 04
–
Part No. 955 04

Part No. 109 06
–
Part No. 955 06

–
Part No. 109 10
Part No. 955 10

Part No. 109 05
–
Part No. 950 05
Part No. 955 05

Part No. 109 07
–
Part No. 950 07
Part No. 955 07
upon request
upon request

–
Part No. 109 11
Part No. 950 11
Part No. 955 11

–

–

Part No. 953 30

Adaptor for Roots pump RUVAC 251 or 501 2), 3)

Part No. 711 19 108

Part No. 711 19 108

Part No. 711 19 108

Oil level monitor 2)

Part No. 711 19 111

Part No. 711 19 111

Part No. 711 19 111

Thermal switch 2), 3)

Part No. 711 19 171

Part No. 711 19 171

Part No. 711 19 172

Water cooling kit 2), 3)

Part No. 951 94

Part No. 951 94

Part No. 951 94

Exhaust filter gauge, mechanical 2), 3)

Part No. 951 23

Part No. 951 23

Part No. 951 28

Great gasballast 2), 3)

Part No. 196 60

Part No. 196 60

Part No. 951 32

Oil filter

Part No. 712 12 718

Part No. 712 12 718

Part No. 712 13 158

Exhaust filter cartridge

Part No. 710 64 763

Part No. 710 64 763

Part No. 710 64 763
(2 pieces required)

Vanes, set of 3 pieces

Part No. 714 01 060

Part No. 714 01 070

Part No. 714 01 510

Set of gaskets NBR (standard)

Part No. 971 97 252

Part No. 971 97 252

Part No. 971 97 452

Set of gaskets FPM

Part No. 714 03 490

Part No. 714 03 490

Part No. 714 03 500

Set of gaskets EPDM

Part No. 714 03 510

Part No. 714 03 510

–

Repair kit complete

Part No. 714 03 540

Part No. 714 03 550

Part No. 714 03 560

Pump module complete

Part No. 710 01 710

Part No. 710 01 730

Part No. 710 01 750

Accessories

Gas ballast valve, electromagnetic 24 V DC 2), 3)

Spare parts

1)

European (CEI motor) and Japanese (JIS motor) pumps have BSP, North and South American (NEMA motor) versions have NPT
Please indicate when ordering a pump
3) Can be retrofitted
2)

C02.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

N otes

C02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.21

Rotary Vane Vacuum Pumps

SOGEVAC SV 200/SV 300

SOGEVAC SV 300

Top view
DRAUFSICHT
a2

a4

b5

Exhaust
port l b
AUSPUFFSTUTZEN

b

A max.
Y
B
b4

b3

b1
H

h1

h3

h2

b2
a3

(Option 63 ISO-K)

X

c
a0

Z

a1

Inlet
port
ANSAUGSTUTZEN
Øa

la
Type
SV 200
SV 300

mm
in.
mm
in.

l a (G) l b (G)
2"
2"
2"
2"
2"
2"
2"
2"

Amax a0
a1
a2
a3
a4
B
b1
b2
940 548 390 252 62 214 535 394 50
37.0 21.57 15.35 9.92 2.44 8.43 21.06 15.51 1.97
1080 656 378 313
0
264 535 394 50
42.52 25.83 14.88 12.32 0 10.39 21.06 15.51 1.97

b3
b4
b5
140 269 40
5.51 10.59 1.57
140 269 40
5.51 10.59 1.57

c
H
h1
h2
h3
M10 415 352 392 318
M10 16.34 13.86 15.43 12.52
M10 415 352 392 318
M10 16.34 13.86 15.43 12.52

X
Y
Z
350 150 300
13.78 5.91 11.81
350 150 300
13.78 5.91 11.81

Dimensional drawing for the SOGEVAC SV 200 and SV 300, European version

29.921

100

103

3

m xh

Pressure

SV 200
101

1

100

10-1

10-2

25.980

0

Inches
x Hg
500

-1

SV 300

cfm

SV 200

100

100

50

10
10

5

10-1

10-2
0”
0’

60”
1’

120” 180” 240” 300”
s
2’
3’
4’
5’
min
Time

without gas ballast
with gas ballast

1
10-2

10-1

10 0

10 1

10 2

10 0

10 1

10 2

10 3

10 4

without gas ballast
with gas ballast

Pump-down characteristics of a 1000 l vessel at 50 Hz

C02.22

29.530

SV 300

102

10

29.9

1000

mbar

Pumping speed

750
Torr

29.918

Pressure

mbar
Pa

10 3
10 5

Pumping speed characteristics of the SOGEVAC SV 200 and SV 300 at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps
SOGEVAC SV 200

Technical Data

SOGEVAC SV 300

50 Hz

60 Hz

50 Hz

60 Hz

Nominal speed 1)

m3 x h-1 (cfm)

180 (106)

220 (129.5)

280 (164.9)

340 (200.3)

Pumping speed 1)

m3 x h-1 (cfm)

170 (100.1)

200 (117.8)

240 (141.4)

290 (170.8)

Ultimate partial pressure without
gas ballast 1)

mbar (Torr)

< 8 x 10-2 (≤ 6 x 10-2)

< 8 x 10-2 (≤ 6 x 10-2)

< 8 x 10-2 (≤ 6 x 10-2)

< 8 x 10-2 (≤ 6 x 10-2)

Ultimate total pressure with gas ballast 1)

mbar (Torr)

< 0.7 (≤ 0.5)

< 0.7 (≤ 0.5)

< 0.7 (≤ 0.5)

< 0.7 (≤ 0.5)

Water vapor tolerance
with standard gas ballast 1)
with big gas ballast 2)

mbar (Torr)
mbar (Torr)

30 (22.5)
50 (37.5)

40 (30)
50 (37.5)

30 (22.5)
50 (37.5)

40 (30)
50 (37.5)

kg x h-1) (qt/hr)

3.4 (3.6)

5.4 (5.7)

5.4 (5.7)

7.4 (7.8)

Water vapor capacity
with standard gas ballast
Oil capacity, min.

l (qt)

5.0 (5.3)

5.0 (5.3)

8.5 (8.9)

8.5 / 11.5

Noise level 3)

dB(A)

69

73

70

74

°C (°F)

12 to 40 (54 to 104)

12 to 40 (54 to 104)

12 to 40 (54 to 104)

12 to 40 (54 to 104)

kW (hp)

4.0 (5.5)

5.5 (7.5)

5.5 (7.5)

7.5 (10.0)

1450 (1450)

1750 (1750)

1450 (1450)

1750 (1750)

55

TEFC/55 5)

55

TEFC/55 5)

Admissible ambient temperature
Motor power
Nominal speed
Type of protection

min-1 (rpm)
IP

Weight (with oil filling)

kg (lbs)

140 (308.7)

155 (341.8)

180 (396.9)

195 (430)

Dimensions (W x H x D))

mm (in.)

940 x 535 x 415
(37 x 21.06 x 17.71)

940 x 535 x 415
(37 x 21.06 x 17.71)

1080 x 535 x 415
(42.51 x 21.06 x 17.71)

1080 x 535 x 415
(42.51 x 21.06 x 17.71)

G (BSP)
G (BSP)

2"
2"

2"
2"

2"
2"

2"
2"

Connections 4)
Intake, thread
Exhaust, thread
1)

To DIN 28 400 and following numbers
Ordering Information see Section “Accessories”
3) Operated at the ultimate pressure without or with gas ballast, free-field measurement at a distance of 1 m
4) European and Japanese pumps have BSP, North and South American versions have NPT
5) CEI motor (Europe) 50/60 Hz has IP 55, NEMA motor (North and South America) has TEFC
2)

Technical description see Section “General”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.23

C02

Rotary Vane Vacuum Pumps

Ordering Information

SOGEVAC SV 200
50 Hz

SOGEVAC SV 200/SV 300 1)
with three-phase motor, without gas ballast
230/400 V, 50 Hz and 460 V, 60 Hz (CEI)2)
200 V, 50/60 Hz (JIS)
with three-phase motor and
integrated gas ballast valve
230/400 V, 50 Hz and 460 V, 60 Hz (CEI) 2)
208 - 230/460 V, 60 Hz (NEMA) [400 V, 50 Hz] 2)
200 V, 50/60 Hz (JIS)
Other voltages/frequencies 3)
Filling with special oil 3)

SOGEVAC SV 300

60 Hz

50 Hz

60 Hz

Part No. 109 26
Part No. 955 26

Part No. 109 30
Part No. 955 36

Part No. 109 27
Part No. 950 27
Part No. 955 27

Part No. 109 31
Part No. 950 31
Part No. 955 37
upon request
upon request

Accessories
Adaptor for Roots pump 3), 4)
RUVAC 501 (BR 2)
RUVAC 1001 (BR 2)
Mounting pedestal for fitting to a Roots pump

Part No. 953 90
Part No. 953 91
Part No. 711 19 209

Part No. 953 90
Part No. 953 91
Part No. 711 19 209

Oil level monitor 3), 4)

Part No. 953 96

Part No. 953 96

Thermal switch 3), 4)

Part No. 951 36

Part No. 951 36

Exhaust filter gauge, mechanical 3), 4)
Exhaust filter monitoring switch, electric 3)

Part No. 951 94
upon request

Part No. 951 94
upon request

Great gasballast 3), 4)

Part No. 951 30

Part No. 951 30

Part No. 951 31

Part No. 951 31

Two gas ballasts 3)

upon request

upon request

Water cooling with thermostatic valve 3)

upon request

upon request

Oil filter

Part No. 710 18 858

Part No. 710 18 858

Exhaust filter cartridge (4x required)

Part No. 710 64 763

Part No. 710 64 773

Vanes, set of 3 pieces

Part No. 714 12 000

Part No. 714 12 010

Set of gaskets NBR (standard)

Part No. 971 97 552

Part No. 971 97 652

Set of gaskets FPM

Part No. 714 36 730

Part No. 714 36 740

Repair kit complete

Part No. 714 36 190

Part No. 714 36 200

Pump module complete

Part No. 714 36 770

Part No. 714 36 780

Gas ballast valve, electromagnetic 24

V DC 3), 4)

Spare parts

1)

European and Japanese pumps have BSP, North and South American versions have NPT
CEI motor (Europe) 50/60 Hz has IP 54, NEMA motor (North and South America) has TEFC
3) Please indicate when ordering a pump
3) Can be retrofitted
2)

Note: Further pump options upon request (for example, water cooled pumps)

C02.24

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

N otes

C02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.25

Rotary Vane Vacuum Pumps

SOGEVAC SV 500

SOGEVAC SV 500

b3

a6

b4

h4
h3

h

h2

h1

ELECTRICAL BOX

a

WATER CONNECTION
b2

GAS BALLAST VALVE

X

a1

a2
h6
b5

b6

h5

b7
b1
b

Type

a

SV 500 mm
in.

a1

a2

a3

a4

a5

a4

Z

a3

a5

a6

1543 510 400 722 424 90
60.75 20.08 15.75 28.43 16.69 3.54

b

63
2.48

b1

b2

894 878 315
35.2 34.57 12.4

OF- 3000
FILTER SYSTEM CONNECTION

Y

b3

b4

241
9.49

80
3.15

b5

b6

b7

h

h1

353 303 372 780 140
13.9 11.93 14.65 30.71 5.51

h2
240
9.45

h3

h4

X

Y

Z

800 471 > 500 > 500 > 500
31.5 18.54 > 19.69 > 19.69 > 19.69

Dimensional drawing for the SOGEVAC SV 500

29.921
10

750

3

10

0
3

10

10

10

SV 500

2

90

1

99

8
6
4

10

25.980

Inches
x Hg

0

3

500
cfm

-1

0

0

10

20

40 60
Time

99,9
80 s 100

100
50

2

SV 500
10

1

108

5

2

1

6
4

10

2

1

Pumping speed

Pressure

100

29.530

29.9

mxh

mbar

Vacuum %

Torr

29.918

0
-2

10

10

0

2

4 68

-1

10

1

10

10

10

0

10

1

10 mbar

2

10

3

10

2

4

Pa

10

3

10

5

Pressure
without gas ballast
with gas ballast
Pump-down characteristics of a 1000 l vessel at 50 Hz

C02.26

Pumping speed characteristics of the SOGEVAC SV 500 at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Technical D ata

SOGEVAC SV 500

Nominal speed 1)

m3 x h-1 (cfm)

570 (335.7)

Pumping speed 1)

m3 x h-1 (cfm)

510 (300.4)

Ultimate partial pressure 1)
without gas ballast
Gas ballast

< 8 x 10-2 (≤ 6x 10-2)

mbar (Torr)

Number / base type

1 + (1 option) / manual

Ultimate total pressure
with standard gas ballast

mbar (Torr)

< 1 (≤ 0.75)

Water vapor tolerance
with 1 gas ballast
with 2 gas ballast

mbar (Torr)
mbar (Torr)

40 (30)
60 (45)

Water vapor capacity
with 1 gas ballast
with 2 gas ballast

kg x h-1 (qt/hr)
kg x h-1 (qt/hr)

Or der ing Informa tio n
SOGEVAC SV 500 1)
with three-phase motor, integrated
gas ballast valve (manual), air-cooled
and over-temperature switch (pump)
200 V, 50/60 Hz (JIS)
400c V, 50 Hz (+10% -6%) (CEI)
230/460 V, 60 Hz (NEMA) [400 V, 50 Hz]
Other voltages/frequencies 2)
Filling with special oil 2)

SOGEVAC SV 500

Part No. 956 54
Part No. 956 55
Part No. 956 57
upon request
upon request

Accessories

13 (14)
19.5 (???)

Adaptor for Roots pump 2), 3)
RUVAC 1001
RUVAC 2001

Part No. 953 47
Part No. 953 48

Oil level monitor 3), 4)

Part No. 953 97

kW (hp) - min-1

11 (15) - 1500

Exhaust filter gauge
mechanical 2), 3)
Exhaust filter monitoring switch
electric 2)

Mains voltage

V

400 ∆ (± 10 %)

Water cooling with thermostatic valve 2)

upon request

Type of protection

IP

54 F

Second gas ballast valve 2), 3)

upon request

Noise level 2)
Motor power
rated rotational speed

Pump rated rotational speed

dB(A)

71

min-1 (rpm)

880 (880)

Oil type / Capacity
Weight (with oil filling)

l (qt)
kg (lbs)

Connection
Intake
Exhaust

DN
DN

upon request

Exhaust DN 100 PN 10 - 100 ISO-K
(Europe only) 2), 3)

Part No. 951 89

GS 77 / 35 (37)

Intake flange, DN 100 ISO-K 2), 3)

standard

630 (1389)

Side exhaust, DN 100 ISO-K 2), 3)

Part No. 951 88

Air (option: water 4))

Cooling

Part No. 951 95

yes

Thermal switch (pump)

100 PN 10
& 100 ISO-K
l 80
DN 100 PN 10
& 100 ISO-K 4)

C02

4" ANSI 150 100 ISO-K
4" ANSI 150 100 ISO-K
–

Spare parts
Oil filter

Part No. 714 05 318

Exhaust filter cartridge (8x required)

Part No. 710 64 773

Vanes, set of 3 pieces

Part No. 714 12 020

Set of gaskets NBR / FPM (standard)

Part No. 971 97 701

Set of gaskets FPM

Part No. 714 05 380

Pump module complete

Part No. 714 19 360

1)

Junction box with six terminals for star/delta circuit
Please indicate when ordering a pump
3) Can be retrofitted
4) Option
2)

Note: Further pump options upon request (pump, water cooled, for example)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.27

Rotary Vane Vacuum Pumps

SOGEVAC SV 630/SV 630 F/SV 750

SOGEVAC SV 630

Lateral exhaust (optional)

OPTION: SEITLICHER AUSPUFF

b10
b 11

a
DN 1

b12

DN 2
h5

h9

h

h6

h4
h3

M 22x1,5

h2
X

a1
a2

h1

M 16x14

a3

b4

b1

h8

b
b2

h7
b3
a4

Type

a

SV 630/750 mm
in.
SV 630 F
mm
in.

1606
63.23
1601
63.03

a1

–
–
1614
63.54

a2

510
20.08
510
20.08

a3

400
15.75
400
15.75

a4

a5

a6

–
– 424
–
– 16.69
120 369 424
4.72 14.53 16.69

a7

90
3.54
90
3.54

a8

785
30.91
785
30.91

b
880
34.65
774
30.47

WASSER
AUSLASS
Water discharge
WASSER
EINLASS
Water supply

b6

Y

b1

303
11.93
303
11.93

b2

372
14.65
372
14.65

b7

b5
a5
a6 a
8
b3

–
–
462
18.19

b8
b9

Z

a7

OF- 3000
FILTER SYSTEM CONNECTION

b4

b5

353
13.9
353
13.9

>900
35.43
>900
35.43

b6

315
12.4
315
12.4

b7

b8

255
10.04
255
10.04

173
6.81
173
6.81

b9

b10 b11 b12

878 – 241
34.57 – 9.49
878 460 242
34.57 18.11 9.53

80
3.15
80
3.15

h

h1

780 140
30.71 5.51
638 40
25.12 1.58

h2

240
9.45
140
5.51

h3

–
–
447
17.6

h4

h5

800
31.5
698
27.48

392
15.43
351
13.82

25.980

0

h6

471
18.54
429
16.89

h7

605
23.82
505
19.88

h8

X

Y

Z

530 >500 >500 >500
20.87 >19.69 >19.69 >19.69
488 >500 >500 >500
19.21 >19.69 >19.69 >19.69

Dimensional drawing for the SOGEVAC SV 630 (F) and SV 750

103

mbar

Pressure

100

SV 630

102

SV 630 F

10

90

3. -1

SV 750

10

101

99

1

100

99,9

10-1

10-1

10-2

10-2
0

40

99,999
60 80 100 s 120
Time

without gas ballast
with gas ballast

29.530

29.9

Inches
x Hg
500

m h

99,99

20

29.918

3

%

10
Pumping speed

Torr

29.921

0

Vacuum

750

cfm
100
50

2

SV 750
SV 630 (F)

10

10

1

5
1

10

0
-2

10

0

10

10

10

-1

10

0

10

1

10

1

10 mbar

2

10

3

10

2

4

Pa

10

3

10

5

Pressure
Pump-down characteristics of a 1000 l vessel at 50 Hz

C02.28

Pumping speed characteristics of the SOGEVAC SV 630 (F) and SV 750 at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps
SOGEVAC SV 630

Technical Data

SOGEVAC SV 630 F

SOGEVAC SV 750

50 Hz

60 Hz

50 Hz

60 Hz

50 Hz

Nominal speed 1)

m3 x h-1 (cfm)

700 (412.3)

840 (494.8)

700 (412.3)

840 (494.8)

840 (494.8)

Pumping speed 1)

m3 x h-1 (cfm)

640 (377)

755 (444.7)

640 (377)

755 (444.7)

755 (444.7)

Ultimate partial pressure without
gas ballast 1)

mbar (Torr)

< 8 x 10-2 (< 6 x 10-2)

< 8 x 10-2 (< 6 x 10-2)

< 8 x 10-2 (< 6 x 10-2)

Ultimate total pressure
with standard gas ballast 1)

mbar (Torr)

≤ 0.7 (≤ 0.53)

≤ 0.7 (≤ 0.53)

≤ 0.7 (≤ 0.53)

Number/ Type

1 (+1 option) / manual

1 (+1 option) / EM 24 VDC

1 (+1 option) / manual

Gas ballast
Water vapor tolerance
with 1 gas ballast
with 2 gas ballasts

mbar (Torr)
mbar (Torr)

40 (30)
60 (45)

50 (37.5)
70 (52.5)

25 (18.8)
35 (26.3)

30 (22.5)
40 (30)

50 (22.5)
70 (30)

Water vapor capacity
with 1 gas ballast
with 2 gas ballasts

kg x h-1) (qt/hr)
kg x h-1) (qt/hr)

17 (18)
26 (27)

24 (25)
34 (35)

11 (12)
15 (16)

14 (15)
19 (20)

24 (25)
34 (35)

35 (37)

35 (37)

35 (37)

Oil capacity min.

l (qt)

Noise level 2)

dB(A)

≤ 75

≤ 78

≤ 75

≤ 78

≤ 78

°C (°F)

12 to 40 (54 to 104)

12 to 40 (54 to 104)

12 to 40 (54 to 104)

12 to 40 (54 to 104)

12 to 40 (54 to 104)

kW (hp)

15 (20)

18.5 (25)

15 (20)

18.5 (25)

18.5 (25)

Admissible ambient temperature
Motor power
Nominal motor speed / Pump speed
Type of protection

min-1 (rpm)
IP

Cooling

1500 / 990 (1500 / 990) 1800/1170 (1800/1170) 1500 / 990 (1500 / 990) 1800/1170 (1800/1170) 1500 / 1170 (1500 / 990)
54 - F/TEFC 3)

54 - F

54 - F/TEFC 3)

54 - F

54 - F

air (water) 4)

water (+ thermostatic valve)

air (water) 4)

Weight (with oil filling)

kg (lbs)

630 (1389)

630 (1389)

630 (1389)

Dimensions (W x H x D)

mm (in.)

1606 x 880 x 800
(63.23 x 34.64 x 31.49)

1601 x 878 x 698
(63.03 x 34.56 x 27.48)

1606 x 880 x 800
(63.23 x 34.64 x 31.49)

100 ISO-K + 100 PN 10 / 100 ISO-K + 4" ASA 150
l 80 (100 ISO-K 3), 4)) / 100 ISO-K + 4" ASA 150

160 DIN
100 ISO-K

100 ISO-K + 100 PN 10
l 80 (100 ISO-K 4))

Connection
Intake (EUROPE/USA)
Exhaust (EUROPE/USA)

DN1
DN2

1)

To DIN 28 400 and following numbers
Operated at the ultimate pressure without gas ballast, free-field measurement at a distance of 1 m
3) CEI motor (Europe) 50/60 Hz has IP 54, NEMA motor (North and South America) has TEFC
4) Option
2)

Technical description see Section “General”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.29

C02

Rotary Vane Vacuum Pumps

Ordering Information

SOGEVAC SV 630
50 Hz

SOGEVAC SV 630 1)
with three-phase motor,
integrated gas ballast valve (manual),
air-cooled and over-temperature switch (pump)
200 V, 50/60 Hz (JIS)
400c V, 50 Hz (+10% -6%) and
460 V, 60 Hz (±10%) (CEI)
230/460 V, 60 Hz (NEMA) [400 V, 50 Hz]
SOGEVAC SV 630 F 1)
with three-phase motor,
integrated gas ballast valve (EM 24 V DC),
controlled anti-suckback valve (EM 24 V DC),
water-cooled and over-temperature switch
(pump and motor)
200 V, 50/60 Hz (JIS)
400c V, 50 Hz (+10% -6%) and
460 V, 60 Hz (±10%) (CEI)
230/460 V, 60 Hz (NEMA) [400 V, 50 Hz]
SOGEVAC SV 750 1)
with three-phase motor,
integrated gas ballast valve (manual),
air-cooled and over-temperature switch (pump)
400c V, 50 Hz (±10%) (CEI)
Other voltages/frequencies 2)
Filling with special oil 2)

60 Hz

SOGEVAC SV 630 F
50 Hz

60 Hz

SOGEVAC SV 750
50 Hz

Part No. 956 62

–

–

Part No. 956 63
Part No. 956 65

–
–

–
–

–

Part No. 956 66

–

–
–

Part No. 956 67
Part No. 956 69

–
–

–
upon request
upon request

–
upon request
upon request

Part No. 956 75
upon request
upon request

Adaptor for Roots pump 2), 3)
RUVAC 1001
RUVAC 2001

Part No. 953 47
Part No. 953 48

Part No. 953 47
Standard

Part No. 953 47
Part No. 953 48

Oil level monitor 2), 3

Part No. 953 97

Part No. 953 97

Part No. 953 97

Exhaust filter gauge, mechanical 2), 3

Part No. 951 95
upon request

Part No. 951 95
upon request

Part No. 951 95
upon request

Second gas ballast valve 2), 3)

upon request

upon request

upon request

Water cooling with thermostatic valve 2)

upon request

Standard

upon request

Part No. 951 89

Standard

Part No. 951 89

Standard

Part No. 714 03 480

Standard

Accessories

Exhaust filter monitoring switch, electric 2)

Exhaust DN 100 PN 10 - 100 ISO-K (Europe only) 2), 3
Intake flange, DN 100 ISO-K 2), 3
Lateral exhaust, DN 100 ISO-K 2), 3

Part No. 951 88

Spare parts
Oil filter

Part No. 714 05 318

Exhaust filter cartridge (10x required)

Part No. 710 64 773

Vanes, set of 3 pieces

Part No. 714 12 020

Set of gaskets NBR / FPM (standard)

Part No. 971 97 701

Set of gaskets FPM

Part No. 714 05 380

Repair kit complete

Part No. 714 05 390

Pump module complete
1)
2)

Part No. 714 05 390

Part No. 714 18 560

Part No. 714 08 510

Junction box with 6 terminals for star/delta circuit – SV 750 works only at 50 Hz
3) Can be retrofitted
Please indicate when ordering a pump

Note: Further pump options upon request (for example, water cooled pumps)

C02.30

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

N otes

C02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.31

Rotary Vane Vacuum Pumps

SOGEVAC SV 1200

SOGEVAC SV 1200

DN 160 ISO-K

b

DN 125

l

h1
h

h

b1 1)

l1

l2 2)

l3

b1 1)

b2
l5

l4
ød
b3

l6

b4

b5
b6

Type
SV 1200 mm
in.

b

b1

b2

b3

b4

b5

b6

ld

h

h1

h2

l

l1

l2

l3

l4

l5

l6

640

600

1021

180

380

268

740

100

660

1010

40

185

1638

500

548

915

1345

823

25.20 23.62 40.20 7.09 14.96 10.55 29.13 3.94 25.98 39.76 1.57

Dimensional drawing for the SOGEVAC SV 1200

1)

7.28 64.49 19.69 21.57 36.02 52.95 32.40

Clearance for cooling air

10

100

10 2

10

10 1

99

1

10 08

99,9

3

m xh

90

SV 1200

10-1

6
4
2

10 -1
0 10 20 30 40 50
Time
without gas ballast
with 1 gas ballast
with 2 gas ballasts

s

Clearance for filter exchange

-1

1

10

100

Torr

750

10 4
%

99,99
70

Pumping speed

Pressure

0

mbar

Vacuum

10

750
Torr

3

2)

5000
cfm

-1

10 3

1000
500

10 2

100
50

10 18

10
5

6
4

SV 1200

2

10 0
10 -1

2

4

6 8

10 0

10 1

1
10 2

mbar

10 3

Pressure
without gas ballast
with 1 gas ballast
with 2 gas ballasts

Pump-down characteristics of a 1000 l vessel at 50 Hz

C02.32

Pumping speed characteristics of the SOGEVAC SV 1200 at 50 Hz (60 Hz curves at the end of the section)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps
SOGEVAC SV 1200

Technical D ata

50 Hz

60 Hz

Nominal speed 1)

m3 x h-1 (cfm)

1150 (677)

Pumping speed 1)

m3 x h-1 (cfm)

1070 (630)

Ultimate partial pressure without
gas ballast 1)
mbar (Torr)

< 0.1 (≤ 0.08)

Ultimate total pressure
with 1 standard gas ballast 1) mbar (Torr)
with 2 gas ballasts 2)
mbar (Torr)

< 1.5 (≤ 1.1)
< 2.0 (≤ 1.5)

SOGEVAC SV 1200
with three-phase motor,
integrated gas ballast valves,
air-cooled and over-temperature switch
400c V, 50 Hz (CEI) 4)
208 - 230/460 V, 60 Hz (NEMA) 5)
Other voltages/frequencies 6)
Filling with special oil 6)

mbar (Torr)
mbar (Torr)

Water vapor capacity
with 1 gas ballast
with 2 gas ballasts

kg x h-1 (qt/hr)
kg x h-1 (qt/hr)

Oil capacity min.

l (qt)

Noise level 3)

dB(A)

Admissible ambient temperature

Water cooling with thermostatic valve 2)

20 (15)
40 (30)

12.5 (13)
25 (26)
60 (63)
75

78

°C (°F)

12 to 40 (54 to 104)

kW (hp)

22 (30)

Type of protection

IP

54

54-F TEFC 7)

Weight (with oil filling)

kg (lbs)

1370 (3021)

Dimensions (W x H x D)

mm (in.)

1660 x 1005 x 1050
(65.35 x 39.57 x 41.34)

1)
2)
3)

4)
5)
6)
7)
8)

Part No. 109 70
Part No. 950 70
upon request
upon request

C02

DN
DN
DN

upon request

Adaptor for Roots pump 6), 8)

Nominal motor speed / Pump speed
min-1 (rpm) 1460/700 (1460/700) 1750/700 (1750/700)

Connection
Intake
Exhaust
Option 6)

SOGEVAC SV 1200

Accessories

Water vapor tolerance
with 1 gas ballast
with 2 gas ballasts

Motor power

Order ing Inform a tio n

125 PN 10

ANSI 150 - 6" 5)

160 ISO-K
125 PN 10

ANSI 150 - 6" 5)
–

RUVAC 2001
RUVAC 3001

Part No. 953 37
Part No. 953 38

Oil level monitor 6), 8)

Part No. 953 99

Exhaust filter monitoring switch
electric 6)

upon request

Spare parts
Oil filter

Part No. 712 14 598

Exhaust filter cartridge (14x required)

Part No. 710 64 773

Vanes, set of 3 pieces

Part No. 712 14 310

Set of gaskets NBR (standard)

Part No. 971 96 681

Set of gaskets FPM

Part No. 712 36 060

Repair kit complete (50 Hz)

Part No. 712 34 800

Pump module complete (50 Hz)

Part No. 712 26 820

To DIN 28 400 and following numbers
With 2 gas ballasts
Operated at the ultimate pressure without gas ballast,
free-field measurement at a distance of 1 m
Junction box with 6 terminals for star/delta circuit
NEMA (for North and South American versions)
Please indicate when ordering a pump
CEI motor (Europe) 50/60 Hz has IP 54, NEMA motor (North and South America) has TEFC
Can be retrofitted

Technical description see Section “General”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.33

Rotary Vane Vacuum Pumps

Accessories

Dust Filters (Suction Side)
Typ

lA

lB

C

D

F 16-25

mm
G 1/2"
G 1/2"
54 104
in.
G 1/2"
G 1/2"
2.13 4.09
F 40
mm
G 1 1/4"
G 1 1/4"
74 115
in.
G 1 1/4"
G 1 1/4" 2.91 4.53
F 65-100 mm
G 1 1/4"
G 1 1/4"
98 172
in.
G 1 1/4"
G 1 1/4" 3.86 6.77
F 200-300 mm
G 2"
G 2"
118 287
in.
G 2"
G 2"
4.65 11.3
F 200-300 mm
63 ISO-K
63 ISO-K 160 357
in.
63 ISO-K
63 ISO-K 6.3 14.06
F 630
mm DN 100 PN 10 DN 100 PN 10 220 358
in. DN 100 PN 10 DN 100 PN 10 8.66 14.09
F 630
mm 100 ISO-K
100 ISO-K 220 358
in. 100 ISO-K
100 ISO-K 8.66 14.09
Dimensional drawing for the dust filters F 16-25 to F 1200

SOGEVAC SV 40 with connected F 40 dust filter
and different types of filter cartridges

The filters consist of a steel housing and a lid
with three quick locking clips

Advantages to the User

lE

F

100
3.94
135
5.31
172
6.77
200
7.87
258
10.16
340
13.39
340
13.39

70
2.76
75
2.95
130
5.12
230
9.06
250
9.84
250
9.84
250
9.84

øE

F

øA

øE

D

D
C

øA
øB
C

øB

C

Polyester Filter Cartridge

Activated Charcoal Cartridge

◆ Separation of particles down to 3 µm
(Moist process: dust, powers, chips etc.)

◆ Absorbs vapors of high molecular weight
(solvent and acid vapors, alkaline solutions
etc.)

◆ Same housing for different cartridges

Metal Filter Cartridge

◆ High separation capacity

◆ 0.08 mm mesh

◆ Quickly exchangeable cartridge

◆ Collects solid particles down to 0.08 mm (plastics, paper, packaging materials, food stuffs)

Paper Filter Cartridge
(Standard)

Weight
(kg/lbs)
1
2.2
1.5
3.31
2
4.4
4.5
9.9
15
33.1
33
72.8
32
70.6F

Technical Notes
We recommend installing the filters horizontally
on a 90° bend. This will prevent separated particles from falling into the intake line when disassembling the filter.
When using an activated charcoal filter it is
recommended to also install a paper cartridge filter between the pump and the activated charcoal.

◆ Separates particles down to 1 µm
(Dry process: dust, powers, chips etc.)

Technical Data
Dust Filter
Throttling of pumping speed through a clean filter
Efficiency for 1 µm particles

Paper cartridge
2%
98 %

Polyester Filter Cartridge
2%
98 %

Metal cartridge
1%
–

Activated charcoal cartridge
2%
–

Paper cartridge
Part No. 951 50
Part No. 710 40 762
Part No. 951 55
Part No. 710 46 118
Part No. 951 60
Part No. 712 13 283
Part No. 951 65
Part No. 951 68
Part No. 712 13 293
Part No. 951 71
Part No. 951 72
Part No. 710 35 242
Part No. 951 75
Part No. 710 35 242

Polyester-Filterpatrone
Part No. 711 27 094
Part No. 710 40 762
Part No. 711 27 104
Part No. 710 46 118
Part No. 711 27 114
Part No. 712 13 283
Part No. 711 27 124
—
Part No. 712 13 293
Part No. 711 27 164
—
Part No. 712 61 508
Part No. 711 27 144
Part No. 712 61 508

Metal cartridge
Part No. 711 27 093
Part No. 710 65 813
Part No. 711 27 103
Part No. 710 49 083
Part No. 711 27 113
Part No. 712 13 324
Part No. 711 27 123
Part No. 711 27 126
Part No. 712 13 334
Part No. 711 27 163
Part No. 711 27 167
Part No. 710 37 734
Part No. 711 27 143
Part No. 710 37 734

Activated charcoal cartridge
Part No. 711 27 092
Part No. 710 65 713
Part No. 711 27 102
Part No. 710 49 103
Part No. 711 27 112
Part No. 712 13 304
Part No. 711 27 122
Part No. 711 27 125
Part No. 712 13 314
Part No. 711 27 162
Part No. 711 27 166
Part No. 710 37 724
Part No. 711 27 142
Part No. 710 37 724

Part No. 714 10 820
Part No. 714 10 830
Part No. 714 10 840
Part No. 714 10 850
Part No. 712 41 032

Part No. 714 10 820
Part No. 714 10 830
Part No. 714 10 840
Part No. 714 10 850
Part No. 712 41 032

Part No. 714 10 820
Part No. 714 10 830
Part No. 714 10 840
Part No. 714 10 850
Part No. 712 41 032

Part No. 714 10 820
Part No. 714 10 830
Part No. 714 10 840
Part No. 714 10 850
Part No. 712 41 032

Ordering Information
Dust Filter
F 16-25 for SV 16, SV 25 (G 1/2")
Spare cartridge for F 16-25
F 40 for SV 40 (G 1 1/4")
Spare cartridge for F 40
F 65-100 for SV 65, SV 100 (G 1 1/4")
Spare cartridge for F 65-100
F 200-300 for SV 200, SV 300 (G 2")
F 200-300 for SV 200, SV 300 (63 ISO-K)
Spare cartridge for F 200-300 (G 2" or 63 ISO-K)
F 630 for SV 630 (F), SV 750 (DN 100 PN 10)
F 630 for SV 630 (F), SV 750 (100 ISO-K)
Spare cartridge for F 630 (DN 100 PN or 100 ISO-K)
F 1200 for SV 1200 (DN 125 PN 10)
Spare cartridge for F 1200 (2 are required)

Spare parts
Set of gaskets for F 16-25
Set of gaskets for F 40
Set of gaskets for F 65-100
Set of gaskets for F 200-300
O-ring gasket for F 630 / F 1200

C02.34

NBR
NBR
NBR
NBR
NBR

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Accessories

Version for the North and South American Continents

Dust Filters F (Suction Side)
Typ
F-50

D

F-100

B

F-200

mm
in.
mm
in.
mm
in.

A
111
4.38
171
6.75
267
10.5

B
76
3
107
4.19
124
4.88

lD
151
15.94
187
7.38
222
8.75

lF
1/2 NPT
1/2 NPT
1 1/4 NPT
1 1/4 NPT
2 NPT
2 NPT

C02

F
A

F

SOGEVAC SV 40 with connected F-100 dust filter
and different types of filter cartridges

High efficiency F filters are recommended for use
at the inlet of SOGEVAC Rotary Vane Vacuum
Pumps for protection against process contaminants, e.g., fiberglass particles, plastic dusts,
resins and food-processing by-products. The filters are available with easily replaceable cartridge
elements for particle filtration of dusts and particulates down to ten microns, or activated carbon
elements for the adsorption of chemical vapor.

Service area needed
G

C
H

F

A
E

Typ
F-600

D

mm
in.
F-1200 mm
in.

B

A
689
27.13
740
29.13

B
76
3
102
4

C
356
14
483
19

lD
470
18.5
521
20.5

E
76
3
102
4

lF
4“ ANSI
4“ ANSI
6“ ANSI
6“ ANSI

G
381
15
381
15

H
305
12
406.5
16

F

Dimensional drawings for the dust filters F 50 to F 200 (top) and F 600 to F 1200 (bottom)

Technical Data
Dust Filter
New cartridge pressure loses
Efficiency for 10 micron particulates
Filter for SV 16, SV 25, UV 25
Filter for SV 40, SV 65, SV 100
Filter for SV 200, 300
Filter for SV 500, 630
Filter for SV 1200

%
%

Polyester
2
98
–
–
–
F-600
F-1200

Metal
1
–
–
F-100
F-200
–
–

Paper
2
98
F-50
F-100
F-200
–
–

Carbon
2
–
–
F-100
F-200
–
–

Polyester
–
–
–
–
–
–
Part No. 898 470
Part No. 898 471
Part No. 898 475
Part No. 898 476

Metal
–
–
Part No. 898 527
Part No. 704 44 400
Part No. 898 530
Part No. 704 45 400
–
–
–
–

Paper
Part No. 899 460
Part No. 899 461
Part No. 898 528
Part No. 704 13 901
Part No. 898 531
Part No. 704 14 901
–
–
–
–

Carbon
–
–
Part No. 898 529
Part No. 704 13 906
Part No. 898 532
Part No. 704 14 908
–
–
–
–

Ordering Information
Dust Filter
F-50
Replacement element for F-50
F-100
Replacement element for F-100
F-200
Replacement element for F-200
F-600
Replacement element for F-600
F-1200
Replacement element for F-1200

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.35

Rotary Vane Vacuum Pumps

Accessories

SL Condensate Traps
øA

øA

øD

E
øD

A

øH

E

B
C

B

B
C

øH

C øF

øJ; 3x120°

øD

SOGEVAC SV 40 with SL 40 condensate trap

øG

E

The SL 16-25 condensate trap consists of a steel
separator whereas the collection vessel is made
of transparent plastic.
Condensate traps SL 40 to SL 1200 are welded
steel collection vessels acting as condensate
traps. These are equipped with connecting
threads.

Advantages to the User
◆ Protection of the pumps against liquids which
might condense in the intake or the exhaust
line when pumping vapors

Type
SL 40

mm
in.
SL 65-100 mm
in.
SL 200-300 mm
in.
SL 630
mm
in.
SL 1200
mm
in.

A
200
7.87
300
11.81
300
11.81
550
21.65
550
21.65

B
350
13.78
510
20.08
865
34.06
880
34.65
880
34.65

C
100
3.94
150
5.91
150
5.91
210
8.27
210
8.27

D
G 1 1/4"
G 1 1/4"
G 1 1/4"
G 1 1/4"
G 2"
G 2"
G 3"
G 3"
G 4"
G 4"

E
60
2.36
170
6.69
170
6.69
300
11.81
300
11.81

F
12
0.47
12
0.47
9
0.35
9
0.35

G
400
15.75
400
15.75
600
23.62
600
23.62

øH

J
360
14.17
360
14.17
514
20.24
514
20.24

H
G 3/8"
G 3/8"
G 1/2"
G 1/2"
G 1/2"
G 1/2"
G 1 1/4"
G 1 1/4"
G 1 1/4"
G 1 1/4"

Dimensional drawings for the condensate traps; SL 16-25 (left), SL 40 (middle) and SL 65-100 up to SL 1200 (right)

Technical Notes
The condensate traps are equipped with a sight
glass tube, so that it is easy to determine when to

empty the vessels. The condensate drain is sealed by a screw-in cap. This cap may be
replaced by a drain cock.

Technical Data
Condensate Trap
For pump
Condensate capacity
Weight

SOGEVAC SV
l (qt)
kg (lbs)

SL 16-25
16/25 and
10 B/16 B/25 B
2 (2.1)
3.5 (7.7)

SL 40
40 and
40 B
4 (4.2)
5 (11)

SL 65-100
40/65/100 and
40 B/65 B/100 B
16 (16.9)
11 (24.3)

SL 200-300
200/300

SL 630
500/630/750

SL 1200
500/630/750/1200

40 (42.3)
17 (37.5)

80 (84.6)
58 (127.9)

80 (84.6)
59 (130.1)

SL 16-25
951 38
–
–

SL 40
951 40
711 30 111
–

SL 65-100
951 42
711 30 113
–

SL 200-300
951 44
711 30 113
–

SL 630
951 47
711 30 105
711 18 033

SL 1200
951 48
711 30 105
711 18 033

Ordering Information
Condensate Trap
Condensate trap
Drain cock
Double spigot for drain cock

Part No.
Part No.
Part No.

Version for the North and South American Continents
Technical Data
Condensate Trap
For pump
Condensate capacity
Weight

SOGEVAC SV
l (qt)
kg (lbs)

SL 16-25
16/25 + UV 25
2 (2.1)
3.5 (7.7)

SL 40
40
4 (4.2)
5 (11)

SL 65-100
65/100
16 (16.9)
11 (24.3)

SL 200-300
200/300
40 (42.3)
17 (37.5)

SL 630
500/630/750
80 (84.6)
58 (127.9)

SL 1200
630/750/1200
80 (84.6)
59 (130.1)

SL 16-25
951 38 (BSP)
–
–

SL 40
951 43 (NPT)
711 30 113
–

SL 65-100
951 43 (NPT)
711 30 113
–

SL 200-300
951 45 (NPT)
711 30 113
–

SL 630
951 47 (BSP)
711 30 105
711 18 033

SL 1200
951 48 (BSP)
711 30 105
711 18 033

Ordering Information
Condensate Trap
Condensate trap
Drain cock
Double spigot for drain cock

C02.36

Part No.
Part No.
Part No.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Vane Vacuum Pumps

SEP Separators and SEPC Condensers
A
D

A
D

C

C

DN

DN

E

F

E

F

B

Seperator
Abscheider

Abscheider
Seperator
B

Venting
valve
Belüftungsventil
Glasschale
Glass
bowl
Kondensator
Condenser

Venting valve
Belüftungsventil

G

Glass bowl
Glasschale
1/2 "

Type
SEP 40

mm
in.
SEP 63 mm
in.
SEP 100 mm
in.
SEPC 40 mm
in.
SEPC 63 mm
in.
SEPC 100 mm
in.

The separators from the SEP and the condensers
from the SEPC range have been designed to be
integrated in the vacuum circuit. They are
employed in all those cases where the pumped
gases may contain liquid drops (SEP), condensable vapors (SEPC) or solid particles which may
impair proper operation of the pumps.

Advantages to the User
◆ Large capacity for solids

A
310
12.2
400
15.75
480
18.9
310
12.2
400
15.75
480
18.9

B
417
16.42
567
22.32
624
24.57
700
27.56
835
32.87
900
35.43

C
33
1.3
50
1.97
65
2.56
33
1.3
50
1.97
65
2.56

l/DxE
07 / 080 x 080
0.28 / 3.15 x 3.15
11 / 110 x 110
0.43 / 4.33 x 4.33
11 / 110 x 110
0.43 / 4.33 x 4.33
07 / 080 x 080
0.28 / 3.15 x 3.15
11 / 110 x 110
0.43 / 4.33 x 4.33
11 / 110 x 110
0.43 / 4.33 x 4.33

F
15
0.59
20
0.79
20
0.79
15
0.59
20
0.79
20
0.79

G
260
10.24
350
13.78
460
18.11
260
10.24
350
13.78
460
18.11

G
WasserWater
anschlüsse
connections

Dimensional drawings for the separators (left) and condensers (right)

◆ Large condensation surface (SEPC)
◆ Visible level
◆ Easy to disassemble for cleaning
◆ Easy to drain, even in the presence of solids

Typical Applications
◆ Draining (SEP)
◆ Packaging (SEP)
◆ Conveying/filling under vacuum (SEP/SEPC)
◆ Drying (SEPC)
◆ Degassing (SEPC)
◆ and many more

Technical Data
Separator
Condenser
For pump
SOGEVAC SV
Connection flange
DN
Capacity of the bowl
l (qt)
Condensation area
m2
Condensation capacity 1)
l/h
For water 2)
l/h
Water connection dia. mm (in.)
Weight
kg (lbs)

SEP 40
–
40/65/100
40 KF
6 (6.3)
–
–
–
–
15 (33.1)

SEP 63
–
200/300
63 ISO-K
12 (12.7)
–
–
–
–
20 (44.1)

SEP 100
–
630/750
100 ISO-K
12 (12.7)
–
–
–
–
40 (88.2)

–
SEPC 40
40/65/100
40 KF
6 (6.3)
2.5
10
1500
19 (0.75)
30 (66.2)

–
SEPC 63
200/300
63 ISO-K
12 (12.7)
5
20
3000
19 (0.75)
40 (88.2)

–
SEPC 100
630/750
100 ISO-K
12 (12.7)
5
20
3000
19 (0.75)
65 (143.3)

SEP 100
–
–
SEPC 40
953 60
953 64
953 61
953 65
712 43 380

–
SEPC 63
953 66
953 67

–
SEPC 100
953 68
953 69

Ordering Information
Separator
Condenser
Steel design
Stainless steel design
Support

Part No.
Part No.
Part No.

SEP 40
–
953 54
953 55

SEP 63
–
953 56
953 57

1)

For water vapor at a vapor pressure of 60 mbar (45 Torr)

2)

Cooling water at a supply temperature of 10 °C (50 °F) and a discharge temperature < 15 °C (< 59 °F)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.37

C02

Rotary Vane Vacuum Pumps

Accessories

Special Oil Sight Glass

Gas Ballast Valve

Thermal Switch

Geöffneter
Gasballast
Gas ballast
open

Thermal switch for the oil
Öltemperatur-Thermoschalter

The special oil sight glass may be used instead of
the standard one. It is equipped with a glass window and may be installed when wanting to pump
aggressive gases or vapors.

The pumps SOGEVAC SV 16, SV 25, SV 500,
SV 630 (F) and SV 750 are equipped as standard
with a gas ballast.
The SV 1200 is equipped as standard with two
manual gas ballast valves.

The thermal switch is built into the oil circuit. It
responds as soon as the temperature of the
pump exceeds the maximum operating temperature. This accessory is recommended when operating the pump at high ambient temperatures.
Ratings for the normally closed contact:
250 V AC, 50 Hz - 10 A
125 V AC, 50 Hz - 12 A
30 V DC - 5 A

Pumps SV 40 to SV 300 may be ordered either
with or without gas ballast valve.
The gas ballast valve may also easily be retrofitted to the SV 40 to SV 300 (either standard,
large or solenoid).

The SV 500, SV 630 (F), SV 750 and SV 1200
include this switch as a standard.

Technical Notes
The gas ballast valve permits pumping of condensable vapors.
The permissible quantities of water are stated in
the technical data section.

Ordering Information
SOGEVAC
Gas ballast valve
(standard)
Thermal switch
Special oil sight glass
Oil level monitor
Gas ballast, big
Gas ballast,
with EM 24 V DC valve
Exhaust filter monitoring switch
electric
1)

Second gas ballast possible. Contact LEYBOLD

2)

Please state when ordering the pump

C02.38

SV 40
SV 65
SV 100
SV 200 1, 2)
Part No.
Part No.
Part No.
Part No.
951 26
951 26
951 27
951 29
–
Part No. 2)
Part No. 2)
Part No. 2)
Part No. 2)
711 19 111
711 19 111
711 19 111
951 36
–
Part No.
Part No.
Part No.
Part No.
712 19 488
712 19 488
712 19 488 712 19 488
Part No.
Part No.
Part No.
Part No.
Part No.
711 19 108 711 19 108 2) 711 19 108 2) 711 19 108 2)
953 96
–
Part No.
Part No.
Part No.
Part No.
196 60
196 60
951 32
951 30
–
Part No.
Part No.
Part No.
Part No.
951 23
951 23
951 28
951 31
SV 16/25
integrated

–

–

–

–

SV 300 1, 2)
Part No.
951 29
Part No. 2)
951 36
Part No.
712 19 488
Part No.
953 96
Part No.
951 30
Part No.
951 31

upon request upon request

SV 500/630/7501, 2) SV 630 F 1, 2)
integrated
integrated
(manual)
(24 V DC)
integrated
integrated

SV 1200 1, 2)
integrated
(manual)
integrated

integrated

integrated

integrated

Part No.
953 97
Part No.
951 33 1)
Part No.
951 34 2)

Part No.
953 97
Part No.
951 34 1)
standard

Part No.
953 99
–
upon request 2)

upon request

upon request

upon request

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Vane Vacuum Pumps

Ball Valves and Valves

C02
Type
Ball valve

Ball valve 1 1/4"

Advantages to the User
◆ Leak rate < 1 x 10-6 mbar x l x s-1
(≤ 0.75 x 10-6 Torr x l x s-1)
◆ Seals on both sides against the atmosphere
◆ Opens against atmospheric pressure

mm
in.
Ball valve
mm
in.
Ball valve
mm
in.
Ball valve
mm
in.
Right-angle valve mm
in.
Control valve
mm
in.
Control valve with
blocking valve
mm
in.

A
G 3/8 "
G 3/8 "
G 1/2 "
G 1/2 "
G 1 1/4 "
G 1 1/4 "
G 2"
G 2"
100 ISO-K
100 ISO-K
G 1/2"
G 1/2"

B
45
1.77
53
2.09
103
4.06
134
5.28
–
–
128
5.04

C
38
1.5
44
1.73
96
3.8
120
4.72
345
13.58
–
–

D
43
1.69
50
1.97
140
5.51
175
6.89
–
–
–
–

E
25
0.98
29
1.14
–
–
–
–
108
4.25
–
–

G 1/2"
G 1/2"

175
6.89

–
–

–
–

–
–

ØA

ØA
B
ØA

ØA
B

Dimensional drawings for the ball valves; G 3/8 " and G 1/2 " (left), G 1 1/4 " and G 2 " (middle) and right-angle valves (right)
and for the control valves (bottom)

◆ Small size
◆ Simple and quick to operate
◆ Pressure range from 10-2 to 1000 mbar
(0.75 x 10-2 to 750 Torr)

Materials
The housing of the ball valves is made of brass,
the ball of hard-chrome plated brass, the valve
seat of PTFE.

The housing of the right angle valve is made of
aluminium, the spindle and valve plate are sealed
with an O-ring and are made of stainless steel.

Ball valve

Ball valve

Ball valve

Ball valve

Right-angle valve

Control valve

F/M 3/8" BSP
0.12 (0.3)

F/M 1/2" BSP
0.15 (0.33)

F/F 1 1/4" BSP
1.24 (2.7)

F/F 2" BSP
3.22 (7.1)

DN 100 ISO-K
8.0 (17.6)

F/M 1/2" BSP
0.135 (0.3)

Type

Ball valve

Ball valve

Ball valve

Ball valve

Right-angle valve

Control valve

Part No.

711 30 111

711 30 113

711 30 105

711 30 107

107 81

951 86

◆ Smaller models serve as venting valves
Information on the blocking components is provided in the Product Section C14 “Vacuum Valves”.

Technical Data
Type
Connection
Weight

kg (lbs)

Control valve with
blocking valve
F/M 1/2" BSP
0.369 (0.81)

Ordering Information
Control valve with
blocking valve
951 87

Version for the North and South American Continents
Technical Data
Type
Connection

Ball valve
1/2-inch NPT(F)

Ball valve
1 1/4-inch NPT(F)

C

B

Ordering Information
Type
Part No.

BV50
899 810

BV100
899 800

Type
BV50
mm
in.
BV100
mm
in.

A

B

C

54 41 102
2.13 1.63 4
102 67 140
4 2.63 5.5

A

Dimensional drawing for the ball valves BV

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.39

Rotary Vane Vacuum Pumps

Accessories

Version for the North and South American Continents

OF3000 Oil Filtering System for SOGEVAC
The OF3000 is a compact, highly mobile filtering
system designed for use with mechanical pumps
in applications generating large volumes of heavy
particulate filtration.
A positive feed gear pump and check valve
assembly protect against excessive backpressure
in the canister should the filter element become
clogged. Flexible hoses and matched dripless
connectors ensure easy maneuverability of the
OF3000’s rollaround cart, while also eliminating
the possibility of oil spills.

OF3000

Operation

Advantages to the User

Filtering Elements

Contaminated oil is removed from the drain location on the vacuum pump and is cycled to the
element assembly. Clean oil is subsequently circulated back to the oil fill port of the vacuum
pump.

◆ Compact, mobile design

Fullers Earth - Provides high capacity for standard acids and can be used to trap particulates
down to 10 micron size.

The tangential flow inlet port to the oil filter canister allows full oil flow while utilizing the entire
filter capability of the element. This translates
into longer filter life, fewer element changes, and
less oil loss.

◆ No spillage - recessed lid and oil level

Similarly, chemically severe OF3000C models
have proven successful in aluminum etching and
other processes where boron tricloride and other
highly toxic gases are employed. the canister,
gear pump, fittings and quick disconnects of the
corrosive-service model have been specially treated with a fluorocarbon material that subtantially
increases the life of these components.

C02.40

◆ Choice of five filter elements
◆ Dripless quick disconnects for easy removal
and replacement of filter elements
◆ Conductive teflon hoses for static charge dissipation
◆ Integral gear pump with built-in bypass
◆ Pressure gauge
◆ Oil sight glass
◆ Single phase 50/60 Hz motor standard

Hydrophylic - Effective for hydrolized acids and
particulates as low as one micron.
Activated Alumina - Effective on Lewis acids and
polar compounds. Can be used to trap particulates down to 10 microns.
Particulate (Paper) - Suitable for particulate
removal down to 10 microns.
Particulate (Fiberglass) - Suitable for particulate
removal down to 10 microns.

◆ Tangential flow inlets - improves oil flow
◆ Canister drain valve

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Vane Vacuum Pumps

Version for the North and South American Continents
Technical D ata

OF3000
1/6 HP, 115/208/220 V,single phase, 50/60 Hz,
wired for 115 V, with on/off switch

Gear pump motor

0.7 gpm @ 1800 rpm

Gear pump

0 to 100 psig (0 to 70 kPa)

Pressure gauge
Fluid capacity (approx.)
Flexible hoses

Order ing Inform a tio n
OF3000, less element and oil (standard)

Part No. 898 625

OF3000C, coated, prepared for PFPE

Part No. 899 450

OF3000, prepared for PFPE

Part No. 899 455

C02

Accessories

3

gal

OF3000

in. I.D. 78 teflon/carbon black with stainless steel braid
- 6 ft lengths

Dimensions

in. (mm)

18 x 14 x 26 (457 x 355 x 661)

Weight (dry)

lbs (kg)

65 (29.4)

Aluminum oxide

Part No. 898 523

Hydrophilic

Part No. 898 525

Fullers earth

Part No. 99 171 159
Part No. 898 599

Particulate (paper)

Part No. 99 171 158

Particulate (fiberglass)

Version for the North and South American Continents

Other Accessories
External Carbon Exhaust Filters
An external type spin-on filter made of activated
carbon on a polxester cloth housed in wire mesh.
Used for providing additional protection from oil
odor or mist expelled from pump exhaust.
requires NPT type nipple and street elbow for
perferred vertical mounting. SV 16/25 requires
nipple only.

Model

Fits Pump
Models

Thread Size

Part No.

Replacement
Element

SVXCXF 50

SV 16/25/UV 25

1/2" NPTF

899 502

899 503

SVXCXF 100

SV 40/65

1 1/2" NPTF

899 500

899 501

SVXCXF 200

SV 100/200/300

2" NPTF

899 498

899 499

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.41

Rotary Vane Vacuum Pumps

Accessories

Mounting Accessories

SOGEVAC SV 300 with RUVAC WAU 501

SOGEVAC SV 630 F with RUVAC WAU 2001

Installation accessories are available for the
SOGEVAC SV 40 to SV 300.
The base frame (1) simplifies installation of the
pump in systems and also simplifies any mainte-

nance work. The bracket for electrical connections (2) is attached to the base frame; the solenoid control system is attached to this bracket.

Ordering Information
1

SOGEVAC
Base frame

SV 40
SV 65
Part No.
Part No.
711 19 203
711 19 203
Oil drain cock G 3/4"
Part No.
Part No.
711 30 114
711 30 114
Bracket for electric connections
Part No.
Part No.
711 19 223
711 19 223
Base frame for
not
not
Roots installation
possible
possible
1)
Required for mounting the WAU 1001 on to the SV 200/300

2

SV 100
Part No.
711 19 205
Part No.
711 30 114
Part No.
711 19 223
Part No.
711 19 204

SV 200
Part No.
711 19 208
Part No.
711 30 114
Part No.
711 19 226
Part No.
711 19 209

SV 300
Part No.
711 19 208
Part No.
711 30 114
Part No.
711 19 226
Part No.
711 19 209

Exhaust Filter Gauge
SV 40 - SV 300

Manometer

SV 500 - SV 1200

Seal
Dichtung

Adapter

The manometer (40 mm dia.), glued in the adapter, will replace the oil filling plug. Dial has 2
colors:

red:

green: 1000 < P < 1450 mbar abs.
(< 1087.5 Torr abs.)
Exhaust filter OK

Technical Information
Indication of the manometer is only valid when
the pump has reached its working temperature.

Ordering Information
For pump
SOGEVAC
Manometer
(with adapter and seal) Part No.
2)
Not visible over SV 1200

C02.42

P > 1450 mbar abs.
(> 1087.5 Torr abs.)
Exhaust filter clogged

SV 16/25

SV 40 to SV 300

SV 500 to SV 1200 2)

951 91

951 94

951 95

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Vane Vacuum Pumps

Bourdon Vacuum Gauges

C02

øa

øa

b

b

0,6 0,4
0,8

ød

0,2

1

0,4

0

0,6

0,2

400
0,8

0

l

1,0

øa
mm
in.

a
40
1.57

l
48
1.89

l1
36
1.42

Dimensional drawing for the Bourdon vacuum gauge Part No. 951 90

1000

l1
l1

l
d
G 1/8“
G 1/8“

800

0

l
l1

600

200

ød

mm
in.

a
90
3.54

b
55
2.17

b1
30
1.18

b1
d
G 1/8“
G 1/8“

l
70
2.76

DN 16 KF
l1
15
0.59

mm
in.

Dimensional drawing for the Bourdon vacuum gauge Part No. 951 92

a
80
3.15

b
36
1.42

l
105
4.13

l1
64
2.52

Dimensional drawing for the Bourdon vacuum gauge Part No. 160 40

45°

a1
l

b

b2

b1

h

d

a2

a
mm
in.

DIAVAC DV 1000 (1)

Advantages to the User
◆ Simple, rugged and vibration insensitive
vacuum gauges for the rough vacuum range
◆ Linear response
◆ Clear dial which can also be read from a great
distance
◆ Readings independent of atmospheric
pressure

a
180
7.09

a1
170
6.69

a2
166
6.54

b
166
6.54

c
b1
156
6.14

b2
152
5.98

c
166
6.54

d
4.5
0.18

h
155
6.10

l
203.5
8.01

Dimensional drawing and panel cut-out for the DIAVAC DV 1000

Technical Data
Measuring range
Vacuum connection
Scale length
Overall height
Weight
Indication

mm (in.)
mm (in.)
g (lbs)

0 to 100 %
M 1/8" BSP
55 (2.17)
48 (1.89)
60 (0.13)
low pressure
in bar

0 to 1 bar
M 1/2" BSP
140 (5.51)
115 (4.53)
560 (1.24)
absolute pressure
in mbar

0 to 1020 mbar
DN 16 KF
140 (5.51)
105 (4.13)
300 (0.66)
absolute pressure
in mbar

1 to 1000 mbar
DN 40 KF
270 (10.63)
166 (6.54)
2700 (5.96)
absolute pressure
in mbar

Ordering Information
Bourdon vacuum gauge
Part No. 951 90
Part No. 951 92
Part No. 160 40
Part No. 160 67
Standard vacuum gauge for all SOGEVAC pumps is Part No. 951 92.
Further information on other vacuum gauges (1) is provided in Product Section C16 “Total Pressure Gauges”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.43

Rotary Vane Vacuum Pumps

Accessories

Connection Fittings for SOGEVAC SV 16, SV 25 and SV 10 B, SV 16 B, SV 25 B
7

9

10

2

11

12

13

14

The fittings presented have been specially matched
to the SOGEVAC pumps. We recommend to use
only these or other components from LEYBOLD
for connecting SOGEVAC pumps, so as not to
impair the pumping speed of the pumps or the
leak tightness of the system.
More information on further fittings is provided in
Product Section C13 “Vacuum Fittings and
Feedthroughs”.

5

4

6

2

3

8

1

SV 16/25
Connection fittings for SOGEVAC SV 16, SV 25 and SV 10 B, SV 16 B, SV 25 B

Technical Data and Ordering Information
Item Description
1 Screw coupling
2 Threaded flange adaptor 1)
3 Centering ring 1)
4 Clamping ring
5 Hose connection
6 Hose connection 1)
7 PVC tubing
8 Tee piece
9 Vacuum control valve
10 Vacuum control valve with blocking valve
11 Ball valve
12 Bourdon vacuum gauge
13 Elbow 90°
14 Dust filter 2)
with paper cartridge
with activated charcoal cartridge
with metal cartridge
with polyester filter cartridge
1) With NBR-O-Ring
2) See “Dust Filters F (Suction Side)” for other options
M = Outside thread
F = Inside thread

C02.44

Connection
G M/F 1/2"
G M 1/2" – DN 16 KF
DN 16 KF
DN 10/16 KF
DN 16 KF – DN 25 mm
G M 1/2" – DN 25 mm
Ø 25 mm, 1 m long
G M/F/F 1/2"
G M 1/2"
G M 1/2"
G M/F 1/2"
G M/F 1/2" NPTF
G M 1/2"
G M/F 1/2"
G M/F 1/2"
G M/F 1/2" NPT
G M/F 1/2"
G M/F 1/2"

Material
Al
Al, anodized
Al
Al
Al, anodized
Al, anodized
PVC
Al, anodized
Brass/Al
Brass, nickeled/Al
Brass, nickeled
Brass, nickeled
Al, anodized

SV 16, SV 25
Part No. 711 18 020
Part No. 711 18 120
Part No. 183 26
Part No. 183 41
Part No. 711 18 300
Part No. 711 18 011
Part No. 711 18 323
Part No. 711 18 250
Part No. 951 86
Part No. 951 87
Part No. 711 30 113
Part No. 899 810
Part No. 951 92
Part No. 711 18 210
Part No. 951 50
Part No. 899 460
Part No. 711 27 092
Part No. 711 27 093
Part No. 711 27 094

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Vane Vacuum Pumps

Connection Fittings for SOGEVAC SV 40, SV 65, SV 100 and SV 40 B, SV 65 B, SV 100 B
18

17

16

15

19

C02

11
10
6
8
9

7

4

5

3

1

2

12

13

14

20

21

Connection fittings for SOGEVAC SV 40, SV 65, SV 100 and SV 40 B, SV 65 B, SV 100 B

Technical Data and Ordering Information
Item
1
2
3
4
5
6

Description
Screw coupling 1)
Double nipple
Ball valve
Threaded flange adaptor 1)
Centering ring
Clamping ring

Connection
G M/F 1 1/4"
G M/M 1 1/4"
G F/F 1 1/4"
G M 1 1/4" BSP – DN 40 KF
DN 40 KF
DN 32/40 KF

Hose connection 1)
G M 1 1/4" / DN 40 mm
l 10 x 25 mm, 1 m long
Rubber hose
Hose connection 1)
G M 1 1/4" – DN 10
Hose connection
DN 40 KF/DN 40 mm
l 40 mm, 1 m long
PVC tubing
Tee reducer bush
G F/F/F 1 1/4" – 1 1/4" – 1/2"
Elbow 90°
G F/F 1 1/4"
Dust filter 2)
G M/F 1 1/4"
with paper cartridge
with activated charcoal cartridge
with metal cartridge
wit h polyester filter cartridge
15 Bourdon vacuum gauge
G M 1/2"
16 Ball valve
G M/F 1/2"
17 Threaded flange adaptor 1)
G M 1/2" – DN 16 KF
18 Vacuum control valve
with blocking valve
G M 1/2"
19 Vacuum control valve
G M 1/2"
20 Condensate trap
G M/F 1 1/4" – 1 1/4" – 3/8"
21 Condensate trap
G F/F/F 1 1/4" – 1 1/4" – 1/2"
1) incl. O-ring
2) See “Dust Filters F (Suction Side)” for other options
M = Outside thread
F = Inside thread
7
8
9
10
11
12
13
14

Material
Al, NBR
Steel
Brass, nickeled
Al, anodized
Al
Al

SV 40
Part No. 711 18 023
Part No. 711 18 033
Part No. 711 30 105
Part No. 711 18 123
Part No. 183 28
Part No. 183 43

SV 65
Part No. 711 18 023
Part No. 711 18 033
Part No. 711 30 105
Part No. 711 18 123
Part No. 183 28
Part No. 183 43

SV 100
Part No. 711 18 023
Part No. 711 18 033
Part No. 711 30 105
Part No. 711 18 123
Part No. 183 28
Part No. 183 43

Al, anodized

Gray cast iron
Gray cast iron

Part No. 711 18 013
Part No. 172 03
Part No. 711 18 153
Part No. 711 18 303
Part No. 711 18 324
Part No. 711 18 263
Part No. 711 18 213

Part No. 711 18 013
Part No. 172 03
Part No. 711 18 153
Part No. 711 18 303
Part No. 711 18 324
Part No. 711 18 263
Part No. 711 18 213

Part No. 711 18 013
Part No. 172 03
Part No. 711 18 153
Part No. 711 18 303
Part No. 711 18 324
Part No. 711 18 263
Part No. 711 18 213

Brass, nickeled
Al, anodized

Part No. 951 55
Part No. 711 27 102
Part No. 711 27 103
Part No. 711 27 104
Part No. 951 92
Part No. 711 30 113
Part No. 711 18 120

Part No. 951 60
Part No. 711 27 112
Part No. 711 27 113
Part No. 711 27 114
Part No. 951 92
Part No. 711 30 113
Part No. 711 18 120

Part No. 951 60
Part No. 711 27 112
Part No. 711 27 113
Part No. 711 27 114
Part No. 951 92
Part No. 711 30 113
Part No. 711 18 120

Part No. 951 87
Part No. 951 86
Part No. 951 40
Part No. 951 42

Part No. 951 87
Part No. 951 86
–
Part No. 951 42

Part No. 951 87
Part No. 951 86
–
Part No. 951 42

Al, anodized
Al, anodized

Brass, nickeled/Al
Brass, nickeled/Al

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.45

Rotary Vane Vacuum Pumps

Accessories

Connection Fittings for SOGEVAC SV 200, SV 300
5

20

4

21

18

17

16

15

14

19

10

1

2

11

12

5
4
3
9

8

6

7

13

Connection fittings for SOGEVAC SV 200 and SV 300

Technical Data and Ordering Information
Item
1
2
3
4
5

Description
Screw coupling 1)
Double nipple
Threaded flange adaptor 1)
Centering ring with outer ring 1)
Set of clamping screws DN ISO-K
(4 pieces)

Hose connection 1)
PVC tubing
Hose connection 1)
PVC tubing
Ball valve
Tee reducer
Elbow 90°
Dust filter 2)
with paper cartridge
with activated charcoal cartridge
with metal cartridge
with polyester filter cartridge
14 Bourdon vacuum gauge
15 Ball valve
16 Threaded KF small-flange adaptor 1)
17 Vacuum control valve with blocking valve
18 Vacuum control valve
19 Condensate trap
20 Elbow 90°
21 Dust filter with paper cartridge
1) incl. O-ring
2) See “Dust Filters F (Suction Side)” for other options
M = Outside thread
F = Inside thread
6
7
8
9
10
11
12
13

C02.46

Connection
G M/F 2"
G M/M 2" – 150 mm
G M 2" – DN 63 ISO-K
DN 63 ISO-K

Material
Al, anodized
Steel
Steel, zinc coated
Al, CR

M10 x 24

Steel, zinc coated

Part No. 267 01

G M 2" – DN 50 mm
l 50 mm, 1 m long

Al, anodized
PVC
Al, anodized

Part No. 711 18 015
Part No. 711 18 325
Part No. 711 18 016
Part No. 711 18 326
Part No. 711 30 107
Part No. 711 18 265
Part No. 711 18 215

G M 2" – DN 60 mm
l 60 mm, 1 m long
G F/F 2"
G F/F/F 2" – 2" – 1/2"
G F/F 2"
G M/F 2"

G M 1/2"
G M/F 1/2"
G M 1/2" – DN 16 KF
G M 1/2"
G M 1/2"
G F/F/F 2" – 2" – 1/2"
DN 63 ISO-K
DN 63 ISO-K

Brass, nickeled
Gray cast iron
Gray cast iron

Brass, nickeled/Al
Al, anodized
Brass, nickeled/Al
Brass, nickeled/Al
Stainless steel

SV 200 and SV 300
Part No. 711 18 025
Part No. 711 18 035
Part No. 711 18 126
Part No. 268 05

Part No. 951 65
Part No. 711 27 122
Part No. 711 27 123
Part No. 711 27 124
Part No. 951 92
Part No. 711 30 113
Part No. 711 18 120
Part No. 951 87
Part No. 951 86
Part No. 951 44
Part No. 887 25
Part No. 951 68

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Accessories

Connection Fittings for SOGEVAC SV 500, SV 630, SV 630 F, SV 750
10
8

9

11

17

16

6

C02
7

5

12

4

3

2

1

13

15 14

18 19

20 21

Connection fittings for SOGEVAC SV 500, SV 630, SV 630 F and SV 750

Technical Data and Ordering Information
Item
1
2
3
4
5
6
7

Description
PVC tubing
Hose connection
Coupling
Adaptor flange
Adaptor flange
Hose connection
Roots adaptor
Roots adaptor
8 O-ring
9 Centering ring with O-ring
10 Elbow 90°
11 Dust filter F 630 1)
with paper cartridge
with activated charcoal cartridge
with metal cartridge
with polyester filter cartridge
12 Manually operated blocking valve
13 Adaptor
14 Adaptor flange with tubulation
15 Collar flange
16 Ball valve
17 Bourdon vacuum gauge
18 Elbow 90°
19 Set of clamps for DN ISO-K
Set = 4 pieces
20 Centering ring 2)
21 Dust filter 1)
with paper cartridge
with activated charcoal cartridge
with metal cartridge
Screwset (not drawn)
Set = 8 Screws and 8 nuts
M = Outside thread
F = Inside thread

Connection
l 90 mm, 1 m long
DN 100 PN 10 – DN 90 mm
DN 100 – PN 10
DN 100 PN 10 – G 4" F
DN 100 PN 10 – F3" G
G 4" M – DN 90
RUVAC 1001
RUVAC 2001
l 110 x 5
DN 100 PN 10 – DN 100 ISO-K
DN 100 PN 10
DN 100 PN 10

Material

SV 500, SV 630, SV 630 F and SV 750
Part No. 711 18 329
Part No. 711 18 362
Part No. 711 18 342
Part No. 711 18 372
Part No. 711 18 370
Part No. 711 18 017
Part No. 953 47
Part No. 953 48
Part No. 712 42 882
Part No. 711 18 391
Part No. 711 18 284

Steel
Stainless steel/Al/Rubber
Steel
Steel
Steel/NBR
Steel/NBR
Steel/FPM
NBR
Al/NBR
Steel

DN 100 PN 10
DN 100 PN 10 – 100 ISO-K
DN 100 PN 10 (Tube l 108)
DN 100 PN 10 – DN 100 ISO-K
G 1/2" M/F
G 1/2" M
DN 100 ISO-K
M 10 x 24

Gray cast iron
Al
Steel
Steel
Brass, nickeled/Al
Stainless steel
Steel, zinc coated

Part No. 951 71
Part No. 711 27 162
Part No. 711 27 163
Part No. 711 27 164
Part No. 711 30 116
Part No. 711 18 336
Part No. 711 18 351
Part No. 711 18 383
Part No. 711 30 113
Part No. 951 92
Part No. 887 26
Part No. 267 01

DN 100 ISO-K
DN 100 ISO-K

Al/CR

Part No. 268 06
Part No. 951 72
Part No. 711 27 166
Part No. 711 27 167

DN 100 PN 10
Steel, zinc coated
See “Dust Filters F (Suction Side)” for other options

1)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Part No. 714 12 440
2)

incl. O-ring

C02.47

Rotary Vane Vacuum Pumps

Accessories

Connection Fittings for SOGEVAC SV 1200
9

5

4

3

2

10

11

12

13

14

15

1

8

7

6

Connection fittings for SOGEVAC SV 1200

Technical Data and Ordering Information
Item
1
2
3
4
5
6

Description
PVC tubing
Hose connection
Kupplung
Flange with tubulation 1)
Roots adaptor
Adaptor flange

7
8
9
10

Connection
l 90 mm, 1 m long
DN 125 PN 10 – DN 90 mm
DN 125 PN 10
DN 125 (Tube 139.7)
RUVAC 2001
DN 125 PN 10 – G 4" F

Collar flange
DN 125 PN 10 – DN 160 ISO-K
Electropneumatic valve
DN 125 PN 10
Hose connection
G 4" M – DN 90 mm
O-ring
165 x 5
165 x 5
11 Centering ring 1)
DN 125 PN 10 – DN 160 ISO-K
12 Elbow 90°
DN 125 PN 10
13 Dust filter 2)
DN 125 PN 10
with paper cartridge
with activated charcoal cartridge
with metal cartridge
with polyester filter cartridge
14 Bourdon vacuum gauge
G 1/2" M
15 Ball valve
G 1/2" M/F
1)
incl. O-ring
2)
See “Dust Filters F (Suction Side)” for other options
M = Outside thread

C02.48

Material
PVC
Steel
Stainless steel/Al/Rubber
Steel
Steel
Steel

SV 1200
Part No. 711 18 329
Part No. 711 18 363
Part No. 711 18 343
Part No. 712 28 863
Part No. 953 37
Part No. 711 18 117

Steel
Gray cast iron
Steel/NBR

Part No. 711 18 386
Part No. 715 69 202
Part No. 711 18 017

NBR
FPM
Al
Steel

Part No. 712 42 902
Part No. 712 42 912
Part No. 711 18 396
Part No. 711 18 287

Brass, nickeled/Al

Part No. 951 75
Part No. 711 27 142
Part No. 711 27 143
Part No. 711 27 144
Part No. 951 92
Part No. 711 30 113

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps

Miscellaneous

Version for the North and South American Continents

Central Vacuum Systems

C02
H

H

L
Pump model

W

L

Tank size (gal)

L

W

H

Tank mount - simplex
SV 16, UV 25
SV 40, SV 65
SV 100
SV 200, SV 300

30
60
80
120

42 (1067)
50 (1270)
65 (1651)
70 (1778)

20 (508)
25 (635)
25 (635)
28 (711)

51 (1295)
48 (1219)
56 (1422)
58 (1473)

Tank mount - duplex
SV 16, UV 25
SV 40, SV 65
SV 100
SV 200
SV 300

60
80
120
240
240

50 (1270)
65 (1651)
71 (1803)
84 (2134)
84 (2134)

27 (686)
30 (762)
32 (813)
38 (965)
43 (1092)

53 (1346)
53 (1346)
53 (1346)
64 (1626)
64 (1626)

Stack mount - duplex and triplex
SV 16, UV 25
SV 40
SV 65
SV 100
SV 200
SV 300

60
80
120
120
200
200

45 (1143)
49 (1245)
62 (1575)
68 (1727)
68 (1727)
68 (1727)

38 (965)
42 (1067)
45 (1143)
42 (1067)
50 (1270)
58 (1473)

56 (1422)
56 (1422)
88 (2235)
88 (2235)
91 (1626)
91 (1626)

W

Central vacuum systems, tank mounted [left] and stack mounted [right]; dimensions in inch, dimensions in brackets ( ) are in mm

Standard Equipment

♦ Standard “ON/OFF/AUTO” switch

Options

♦ ASME® rated receiver tank

♦ Elapsed time meters

♦ Tank or stack mounted pumps

♦ Flexible configurations for one, two, or three
SOGEVAC pumps

♦ Inlet particulate filters

♦ Larger receiver tank

♦ Lead/Lag or continuous operation of pumps

♦ Special inlet filters

♦ Manual isolation valves

♦ Adjustable pressure switch for control of
vacuum level

♦ Automatic isolation valves

♦ Simple operation, high reliability, easy
maintenance
♦ Complete package with gauges and NEMA12
controls

♦ Air cooled Sogevac pumps with built-in “antisuckback” valves

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

♦ Special design controls per customer
specification

C02.49

Rotary Vane Vacuum Pumps

Miscellaneous

Version for the North and South American Continents

Central Vacuum Systems
Perfor manc e Char a c te r is tic s

Technical D a ta

SV 16

UV 25

SV 40

SV 65

SV 100

SV 200

SV 300

Free air displacement

cfm (m3 x h-1)

11 (18.6)

17.7 (30)

32.4 (55)

45.9 (77.9)

70.6 (119.8)

129.5 (219.8)

200.3 (340)

Actual pumping speed

cfm (m3 x h-1)

10 (16.9)

15.3 (26)

28.3 (48)

37.7 (64)

66.5 (112.9)

117.8 (200)

170.8 (289.9)

Guaranteed base pressure

in HgVac

29.89

29.89

29.89

29.89

29.89

< 29.99

< 29.99

Base pressure with gas ballast

in HgVac

29.80

29.80

29.80

29.80

29.80

< 29.90

< 29.90

Water vapor tolerance

in HgVac

29.01

29.01

28.74

28.74

28.74

28.80

28.80

0.5

0.5

0.73

1.3

2.1

5.7

7.8

dB(A)

58

59

64

65

72

73

74

hp

1

1.5

2

3

5

7.5

10

rpm

1750

1750

1750

1750

1750

1750

1750

Water vapor pumping with gas ballast

qt/hr

Noise level at 3 feet with 1 pump running
without gas ballast
Motor
Pump rotational speed
Oil capacity

qt

2

2

2

2.5

3.75

5.5

9

Inlet / exhaust-NPT

in.

1/2 / 1/2

1/2 / 3/4

1-1/4 / 1-1/4

1-1/4 / 1-1/4

1-1/4 / 2

2/2

2/2

Pump weight

lbs

50.7

83.8

90.4

103.4

213.4

341.8

430.0

Central vacuum system, simplex

Central vacuum system, duplex

Central vacuum system, triplex

C02.50

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Miscellaneous

Rotary Vane Vacuum Pumps

Version for the North and South American Continents

Central Vacuum Systems
Technical Data

Tank Mount

Tank Mount

Stack Mount

Simplex

Duplex

Duplex and Simplex

SV 16, UV 25

Tank size (gal)

30

60

60

SV 40

Tank size (gal)

60

80

80

SV 65

Tank size (gal)

60

120

120

SV 100

Tank size (gal)

80

120

120

SV 200

Tank size (gal)

120

240

200

SV 300

Tank size (gal)

120

240

200

Ordering Information
System
Simplex
Duplex
Triplex

Part No.

C

–

––––

––––

––––

––––

––––

C02
XX
––––

S
D
T

Pumps
SV 16 (1 hp)
UV 25 (1.5 hp)
SV 40 (2 hp)
SV 65 (3 hp)
SV 100 (5 hp)
SV 200 (7 hp)
SV 300 (10 hp)

016
025
040
065
100
200
300

Mounting
Tank mount
Stack mount

T
S

Voltage
460/3/60
230/3/60
230/1/60 (available for SV 16/UV 25 only)
208/3/60
115/1/60 (available for SV 16/UV 25 only)

A
B
C
D
E

Duty
C
D

Continuous
Demant Start/Stop

103

(inHgVAC)

29.9

29.8

29.5

29

28 27 26 25

20 15 10 0
SV1200
SV630

Pumping Speed

cfm
SV300
SV200

102

SV100
SV65
SV40
SV16

101

8
6
4
2

100
10-2

10-1

100

101
Total Pressure

102

Torr

103

Pumping speed characteristics for the Central Vacuum Systems at 60 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.51

Rotary Vane Vacuum Pumps

Miscellaneous

Central Vacuum Systems

CV 1000 – 2/300

CV 300 – 2/65

CV 60 M – 1/40

Description

Many Combinations

Advantages to the User

Independently of the properties of the gases
which are to be pumped, central vacuum systems
are defined according to the following engineering requirements:

◆ Modular system

◆ Two different types of control

◆ Pumps having pumping speeds from
16 to 1200 m3/h (9.4 to 706.8 cfm)

◆ Pressure control between two adjustable
pressures for central systems with one or
two pumps

◆ Operating pressure
◆ Quantity of gas to be pumped

◆ Backup volumes from 30 to 1500 l (32 qt to
1586 l) (larger buffer volumes upon request)

◆ Duration of the pumping cycle

◆ Very short delivery time (due to the modular
system)

◆ Choice of control system

Contact us for further information.

◆ Changeover and safety unit for two or three
pumps
◆ Simple process-independent set-up
◆ Operating hours counter for each pump

Mobile vacuum station CV 30-LABO for laboratories

C02.52

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Miscellaneous

Rotary Vane Vacuum Pumps

Technical Data and Ordering Information
Central type

Vessel
size
l (qt)

Nominal
pumping speed
m3 x h-1

Connection
BSP

Mains voltage
at 50 Hz
V

Required
Power
kW (hp)

Part No.

0.75 (1)
0.75 (1)
1.1 (1.5)
1.1 (1.5)
1.5 (2)
1.5 (2)
1.1 (1.5)
1.5 (2)
1.1 (1.5)
1.5 (2)
2.5 (3.4)
1.1 (1.5)
1.5 (2)
2.5 (3.4)
4 (5.4)
5.5 (7.5)
2.5 (3.4)
4 (5.4)
5.5 (7.5)
2.5 (3.4)
4 (5.4)
5.5 (7.5)

954 00
954 01
954 02
954 03
954 04
954 05
954 06
954 07
954 08
954 09
954 10
954 11
954 12
954 13
954 14
954 15
954 16
954 17
954 18
954 19
954 20
954 21

2.2 (3)
3 (4.1)
2.2 (3)
3 (4.1)
5 (6.8)
2.2 (3)
3 (4.1)
5 (6.8)
8 (10.9)
5 (6.8)
8 (10.9)
11 (15)
5 (6.8)
8 (10.9)
11 (15)

954 52
954 53
954 54
954 55
954 56
954 57
954 58
954 59
954 60
954 61
954 62
954 63
954 64
954 65
954 66

Central Vacuum System with 1 Pump and Basic Control
60M – 1 x 25
60 – 1 x 25
60M – 1 x 40
60 – 1 x 40
60M – 1 x 65
60 – 1 x 65
150 – 1 x 40
150 – 1 x 65
300 – 1 x 40
300 – 1 x 65
300 – 1 x 100
500 – 1 x 40
500 – 1 x 65
500 – 1 x 100
500 – 1 x 200
500 – 1 x 300
750 – 1 x 100
750 – 1 x 200
750 – 1 x 300
1000 – 1 x 100
1000 – 1 x 200
1000 – 1 x 300

60 (63.42)
60 (63.42)
60 (63.42)
60 (63.42)
60 (63.42)
60 (63.42)
150 (158.56)
150 (158.56)
300 (317.12)
300 (317.12)
300 (317.12)
500 (528.54)
500 (528.54)
500 (528.54)
500 (528.54)
500 (528.54)
750 (792.81)
750 (792.81)
750 (792.81)
1000 (1057.08)
1000 (1057.08)
1000 (1057.08)

25
25
40
40
65
65
40
65
40
65
100
40
65
100
200
300
100
200
300
100
200
300

1 1/4"
1 1/4"
1 1/4"
1 1/4"
1 1/4"
1 1/4"
1 1/4"
1 1/4"
2"
2"
2"
2"
2"
2"
2"
2"
2"
2"
2"
2"
2"
2"

230, 1~
400, 3~
230, 1~
400, 3~
230, 1~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~

Central Vacuum System with 2 Pumps and Basic Control
150 – 2 x 40
150 – 2 x 65
300 – 2 x 40
300 – 2 x 65
300 – 2 x 100
500 – 2 x 40
500 – 2 x 65
500 – 2 x 100
500 – 2 x 200
750 – 2 x 100
750 – 2 x 200
750 – 2 x 300
1000 – 2 x 100
1000 – 2 x 200
1000 – 2 x 300

150 (158.56)
150 (158.56)
300 (317.12)
300 (317.12)
300 (317.12)
500 (528.54)
500 (528.54)
500 (528.54)
500 (528.54)
750 (792.81)
750 (792.81)
750 (792.81)
1000 (1057.08)
1000 (1057.08)
1000 (1057.08)

80
130
80
130
200
80
130
200
360
200
360
560
200
360
560

1 1/4"
1 1/4"
1 1/4"
1 1/4"
1 1/4"
2"
2"
2"
2"
2"
2"
2"
2"
2"
2"

400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~

Central Vacuum System with 2 Pumps and Changeover and Safety Unit
150 – 2 x 40 MAS
150 – 2 x 65 MAS
300 – 2 x 40 MAS
300 – 2 x 65 MAS
300 – 2 x 100 MAS
500 – 2 x 40 MAS
500 – 2 x 65 MAS
500 – 2 x 100 MAS
500 – 2 x 200 MAS
750 – 2 x 100 MAS
750 – 2 x 200 MAS
750 – 2 x 300 MAS
1000 – 2 x 100 MAS
1000 – 2 x 200 MAS
1000 – 2 x 300 MAS

150 (158.56)
150 (158.56)
300 (317.12)
300 (317.12)
300 (317.12)
500 (528.54)
500 (528.54)
500 (528.54)
500 (528.54)
750 (792.81)
750 (792.81)
750 (792.81)
1000 (1057.08)
1000 (1057.08)
1000 (1057.08)

40 / 80
65 / 130
40 / 80
65 / 130
100 / 200
40 / 80
65 / 130
100 / 200
180 / 360
100 / 200
180 / 360
280 / 560
100 / 200
180 / 360
280 / 560

1 1/4"
1 1/4"
1 1/4"
1 1/4"
1 1/4"
2"
2"
2"
2"
2"
2"
2"
2"
2"
2"

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~
400, 3~

2.2 (3)
3 (4.1)
2.2 (3)
3 (4.1)
5 (6.8)
2.2 (3)
3 (4.1)
5 (6.8)
8 (10.9)
5 (6.8)
8 (10.9)
11 (15)
5 (6.8)
8 (10.9)
11 (15)

954 77
954 78
954 79
954 80
954 81
954 82
954 83
954 84
954 85
954 86
954 87
954 88
954 89
954 90
954 91

C02.53

C02

Rotary Vane Vacuum Pumps

Miscellaneous

Control Principles for Central Vacuum Systems
p

p
Central vacuum system with one pump > 100m3·h-1

Central vacuum system with one pump (general)

S1

S1

S0

S0

t

t
< 10 min

Central vacuum system with basic controller

> 10 min

Central Vacuum System with
Basic Controller
The basic controller is controlled through 2 freely
selectable switching thresholds. The controller
drives the vacuum pump or a valve. In the case
of pumps with pumping speeds over 100 m3/h
(58.9 cfm) the switching frequency is either
restricted to 6 times per hour or they are
controlled by a valve.

p
S2

S1

S0

Delay= 10=min
Verzögerung
10 min
Central vacuum system with switching and safety module (MAS)

t
11 Pumpe
pump
22 Pumpen
pumps
Pumpvorgang
Pumping
stoppedgestoppt

Central Vacuum System with
Switching and Safety Module
This controller has 3 switching thresholds and is
for 2 pumps running in parallel. At peak demand
both pumps, and during normal demand only one
pump will be running. After pre-defined intervals
the pumps will change so as to evenly spread the
number of operating hours across both pumps.

C02.54

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General Accessories

Rotary Vane Vacuum Pumps

Vacuum Pump Oils
Lubricating oils for rotary vacuum pumps need to
fulfil demanding requirements. Their vapor pressure must be low at high temperatures and the
water content and water uptake must be minimal.
Their viscosity characteristics need to be flat,
lubricating properties need to be excellent and
they must resist cracking upon being mechanically stressed.
All the vacuum pump oils listed in the following
have been subjected in our factory laboratories to
very comprehensive tests closely resembling the
conditions encountered in practice by the pumps
from the SOGEVAC series.
We therefore recommend the exclusive use of
vacuum pump oils fully qualified by Leybold so
as to ensure optimum performance of the
Leybold vacuum pumps and also to ensure optimum oil change intervals.
Under vacuum conditions lubricating oils may
behave quite differently than expected. When
using not suitably qualified third party oils, the
oil change intervals and the performance of the
vacuum pump may be reduced. Also unwanted
deposits may occur which may even cause
severe damage to the vacuum pump.
For these reasons please understand that we
must make our warranty commitment dependent
on the use of oils which have been qualified by
us. Damages caused by the use of not suitably
qualified lubricating oils are not covered by our
warranty.
In order to adapt the pumps to the different applications of our customers, different types of oil
are used in the SOGEVAC pumps.
Please note that owing to differing properties not
all types of oil may be used in all pumps of the
SOGEVAC series. If you can not find the combination of pump and oil you require by way of a
Part. No., please ask us for a quotation.

Lubricant types
Mineral oils
Mineral oils are products distilled and refined
from crude oil. These do not consist of precisely
defined compounds but rather consist of a complex mixture. The way in which the mineral oil is
pre-treated and its composition is decisive as to
the applications it will be suited for. Depending
on the distribution of the hydrocarbons and the
dominance of certain properties, mineral oils are
grouped according to paraffin-base, naphthenic
and aromatic. For the purpose of attaining especially low ultimate pressures, mineral oils must
be selected on the basis of a core fraction. The
thermal and chemical resistance of mineral oils
has been found to be adequate in the majority of
applications. They offer a high degree of compatibility with elastomers and resistance to hydrolysis.

Synthetic oils
Synthetic oils are produced by a chemical reaction. The group of synthetic oils includes liquids
differing widely as to their chemical structure and
composition. Correspondingly their physical and
chemical properties differ considerably. Synthetic
oils are used in those cases where special properties of the oil are required which can not be
fulfilled by mineral oils.

The oils given in the following belong to the
group of synthetic oils:

Ester oils
Ester oils are organic compounds which excel
especially through their high thermal resistance
to cracking compared to mineral oils. Chemical
resistance is generally quite good, but will
depend on the type of ester oil. Elastomer compatibility and resistance against hydrolysis are
not so good compared to mineral oils.

Perfluorinated polyether
(PFPE)
These are oils which are only composed of carbon (C), fluorine (F) and oxygen atoms (O). The
existing C-O and C-F bonds are highly stable. For
this reason PFPE oils are practically inert against
all chemical and oxidising influences.
Perfluorinated polyether will not polymerise
under the influence of high energy radiation.
PFPE is non-flammable. Leybold NC1/14 has the
approval of BAM (Federal Institute for Materials
Research and Testing) for pumping of pure oxygen.
Perfluorinated polyether are used when pumping
strongly reactive substances like oxygen (O2),
fluorine F2 and uranium hexafluoride UF6.
Regarding Lewis acids (for example, boron trifluoride BF3, aluminum trichloride AlCl3) they are
not completely inert. Here reactions may take
place at temperatures over 100 °C (212 °F).
Perfluorinated polyether are thermally highly stable. Thermal decomposition may only take place
at temperatures of over 290 °C (554 °F).
Caution: Perfluorinated polyether will – when
decomposed – release toxic and corrosive gases:
hydrogen fluoride HF, carbonyl difluoride COF2.
For this reason open fires must be avoided in the
workspace where PFPE is being used. Do not
smoke in the workspace where PFPE is being
used.
Only suitably prepared pumps must be used in
connection with perfluorinated polyether, since it
is essential that the pump be free of hydrocarbons. Changing from one basic type of oil to
PFPE must be left exclusively to authorised
Service Centers. The pumps will have to be fully
disassembled and carefully cleaned. Gaskets and
filters will have to be exchanged and suitable
greases will have to be used.

For all lubricants in our line of products you may obtain Safety Data Sheets from the Dept. Technical
Support in Cologne.
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.55

C02

Rotary Vane Vacuum Pumps

General Accessories

Oil recommendations for various areas of application
Application Data
Type of oil

Examples of areas of application
and process media

Remarks

Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Technical Data

Special oil GS 32

Special oil GS 77

FM 32

FM 68

Paraffin-base mineral oil with
additives to improve oxidization
stability and wearing properties

Paraffin-base mineral oil with
additives to improve oxidization
stability and wearing properties

Medicinal white oil with additives –
in accordance with FDA and
USDA H1

Medicinal white oil with additives –
in accordance with FDA and
USDA H1

Standard oil

Standard oil

For pumping air, chemically inert
permanent gases (noble gases, for
example), water vapor, solvent
vapors pumped by laboratory
pumps operated with cold traps

For pumping air, chemically inert
permanent gases (noble gases, for
example), water vapor, solvent
vapors pumped by laboratory
pumps operated with cold traps

Food sector acc. to USDA H1
approved for accidental contact
with foodstuffs

Food sector acc. to USDA H1
approved for accidental contact
with foodstuffs

The ultimate pressures stated in
our catalogs are based on operation of the pump with GS 32 (except
for the DOT and PFPE pumps)

The ultimate pressures stated in
our catalogs are based on operation of the pump with GS 77 (except
for the DOT and PFPE pumps)

Suited
Suited
Not suited

Suited
Suited
Not suited

Suited
Suited
Not suited

Suited
Suited
Not suited

Special oil GS 32

Special oil GS 77

FM 32

FM 68

Viscosity at 40 °C (104 °F)

mm2/s

30

77

32

68

Viscosity at 100 °C (212 °F)

mm2/s

6

10

6

9

Flash point

°C (°F)

220 (428)

245 (473)

228 (442)

260 (500)

5 x 10-3 (6.7 x 10-3)

1 x 10-3 (0.75 x 10-3)

5 x 10-3 (6.7 x 10-3)

1 x 10-3 (0.75 x 10-3)

0.86

0.87

0.87

0.87

-27 (17)

-24 (11)

-9 (-16)

-18 (0)

FM 32

FM 68

Vapor pressure
at 100 °C (212 °F)

mbar (Torr)

Density at 15 °C
Pour point

g/ml
°C (°F)

Ordering
Information

Special oil GS 32

Special oil GS 77

001 litre (1.06 qt)

Part No. 711 17 772

–

Part No. 711 17 782

–

002 litres (2.1 qt)

Part No. 711 17 723

–

–

–

005 litres (5.29 qt)

Part No. 711 17 724

Part No. 711 17 774

Part No. 711 17 783

Part No. 711 17 784

025 litres (26.43 qt)

–

Part No. 711 17 776

–

Part No. 711 17 786

060 litres (63.42 qt)

Part No. 711 17 727

–

–

–

200 litres (211.42 qt)

–

Part No. 711 17 779

–

–

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR

C02.56

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General Accessories

Application Data Anderol® 495 Anderol® 555

NC 10

Rotary Vane Vacuum Pumps

DOT 4

NC 1/14

Ester oil

Ester oil

Alkyl sulphonic acid ester

Brake fluid

Perfluorinated polyether PFPE

Examples of areas of application
and process media

Used at elevated
temperatures.
Starting of the pump at
temperatures between
0 and 12 °C
(32 and 54 °F)

Used at elevated temperatures, pumping of air, chemically inert permanent
gases (noble gases, for
example),
carbon dioxide CO2, carbon
monoxide CO, aliphatic
compounds (for example
methane CH4, propane
C3H8, ethylene C2H4),
organic solvent vapors

Used for pumping process
media which tend to polymerise (for example, styrene
C8H8, butadiene C4H6)

Filling of brake fluid circuits in the car industry
only

For pumping strong oxidants like oxygen, O2, ozone O3, nitrogen oxides NOx
and sulphur oxides (SO2, SO3) as well
as reactive substances like halogens
(for example fluorine F2, chlorine Cl2),
halogen hydracide (for example hydrogen chloride HCl, hydrogen bromide
HBr), uranium hexafluoride UF6, and
conditionally Lewis acids (for example,
boron trichloride BCl3)

Remarks

Do not pump any
inorganic acids
(HCL, HF, for example),
no free halogens
(CL2, F2, for example) or
alkaline media (NH3,
for example)

Do not pump any
inorganic acids
(HCL, HF, for example),
no free halogens
(CL2, F2, for example) or
alkaline media (NH3,
for example)

Do not use a chemical
oil filter

Use only in pumps
modified for DOT 4

Use only in pumps modified for PFPE

Mixing with other types of oil
must be absolutely avoided

Mixing with other types
of oil must be absolutely
avoided

Suited
Conditionally suited
Not suited

Suited
Conditionally suited
Not suited

Suited
Not suited
Not suited

Type of oil

Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Technical Data

Anderol® 495 Anderol® 555

Do not pump any
inorganic acids
(for example HCl, HF)!

Mixing with other types of oil must be
absolutely avoided
Avoid pumping water vapour, especially in connection with corrosive media
(see above)
The use of a chemical oil filter CF / CFS
is strongly recommended

Not suited
Not suited
Suited

Suited
Suited
Suited

NC 10

DOT 4

NC 1/14

38

N/I

47

Viscosity at 40 °C (104 °F)

mm2/s

Viscosity at 100 °C (212 °F)

mm2/s

6

9

4

>2

5

Flash point

°C (°F)

245 (473)

250 (482)

210 (410)

> 120 (> 248)

No known 3)

Vapor pressure
at 20 °C (68 °F)

mbar (Torr)

No known

7 x 10-5 (9.3 x 10-5)

1 x 10-4 (0.75 x 10-4)

1.3 (1)

3 x 10-7 (2.5 x 10-7)

Vapor pressure
at 100 °C (212 °F)

mbar (Torr)

No known

1,5 x 10-3 (2 x 10-3)

No known

No known

6 x 10-4 (8 x 10-4)

0.92

0.96

1.05 2)

1.05

1.89 2)

°C (°F)

-57 (-71)

-42 (-44)

-15 (-5)

No known

-40 (-40)

g/mol

No known

530

No known

No known

2,500

NC 10

DOT 4

NC 1/14

Density at 15 °C (59 °F)
Pour point
Middle molecular weight

28

g/ml

Ordering
Inform ation

94

Anderol® 495 Anderol® 555

001 litre (1.06 qt)

–

–

–

Part No. 200 10 037

Part No. 177 38/Part No. 711 17 792

002 litres (2.1 qt)

Part No. 711 17 763

–

–

–

–

005 litres (5.29 qt)

Part No. 711 17 764

Part No. 711 17 754

–

–

–

020 litres (26.43 qt)

Part No. 711 17 766

Part No. 711 17 756

Part No. 177 25

–

–

060 litres (63.42 qt)

Part No. 711 17 767

Part No. 711 17 757

–

–

–

200 litres (211.42 qt)

–

Part No. 200 03 257

–

–

–

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
2) at 20 °C (68 °F)
3) Caution: When being decomposed at temperatures over 290 °C (554 °F), toxic and corrosive gases will be released. For this reason open fires must be avoided in the workspace where PFPE is
being used. Do not smoke in the workspace where PFPE is being used
ANDEROL® is a trademark of ANDEROL BV
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.57

C02

Rotary Vane Vacuum Pumps

General Accessories

Version for the North and South American Continents
Application Data
Type of oil

Examples of areas of application
and process media

Remarks

Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Technical Data

HE-100

HE-700

Paraffin-base mineral oil with
additives to improve oxidization
stability and wearing properties

Paraffin-base mineral oil with
additives to improve oxidization
stability and wearing properties

Standard oil

Standard oil

For pumping air, chemically inert
permanent gases (noble gases, for
example), water vapor, solvent
vapors pumped by laboratory
pumps operated with cold traps

For pumping air, chemically inert
permanent gases (noble gases, for
example), water vapor, solvent
vapors pumped by laboratory
pumps operated with cold traps

The ultimate pressures stated in
our catalogs are based on operation
of the pump with HE-100 (except
for the DOT and PFPE pumps)

The ultimate pressures stated in our
catalogs are based on operation of
the pump with HE-700 (except for
the DOT and PFPE pumps)

Suited
Suited
Not suited

Suited
Suited
Not suited

HE-100

HE-700

Viscosity at 40 °C (104 °F)

mm2/s

32

79

Viscosity at 100 °C (212 °F)

mm2/s

5.3

9.5

Flash point

°C (°F)

206 (403)

224 (435)

2.1 x 10-3 (1.6 x 10-3)

1.6 x 10-2 (1.2 x 10-2)

-27 (-17)

-20 (-4)

Vapor pressure
at 93 °C (200 °F)
Pour point

mbar (Torr)
°C (°F)

Or dering
Information

HE-100

HE-700

01 qt

Part No. 898 537

–

01 gal

Part No. 898 538

Part No. 726 25 023

55 gal

Part No. 898 539

Part No. 726 25 022

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1)

Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR

Note: HE-100 is the standard oil for SV 16 to SV 100, HE-700 is the standard oil for SV 200 to SV 1200

C02.58

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

60 Hz Curves

Rotary Vane Vacuum Pumps

Version for the North and South American Continents
10

2

50
CFM
20

Pumping Speed

m3 x h-1

SV 16 B
10

C02

10

1

5

8
6

SV 10 B

4

2

1

0

10
-1
10

2

4

6 8

10

0

10

1

10

2

10

mbar

3

Pressure

without gas ballast
with gas ballast

Pumping speed characteristics for the SOGEVAC SV 10 B and SV 16 B at 60 Hz

10

2

50
CFM
20

Pumping Speed

m3. h-1

10
10

1

5

8
6
4

2

10

1

0

10

2

-1

4

6 8

10

10 -1

0

10

1

10

mbar

102

101

10 0

without gas ballast
with gas ballast
without gas ballast

2

Torr

10

3

750

Pressure

gasB ballast
Pumping speed characteristics for the SOGEVACwith
SV 25
at 60 Hz

29.918
10

29.9

29.530

Inches.Hg
25.980

0

2

50
SV 65 B

CFM
20

Pumping Speed

m3 x h-1

SV 40 B
10

10

1

5

8
6
4

2

1

0

10
-1
10
10

1

2

4

6 8

10

0

10

1

10

2

10

2

10

3

10

4

without gas ballast
with gas ballast

mbar

10

3

Pa

10

5

Pressure

Pumping speed characteristics for the SOGEVAC SV 40 B and SV 65 B at 60 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.59

Rotary Vane Vacuum Pumps

60 Hz Curves

Version for the North and South American Continents
29.918

29.9

29.530

Inches.Hg
25.980

0

10 3

3

m xh

500
CFM
200

-1

100

Pumping speed

10 2

50

1
10 1

8
6
4
2

10

0

10

-1

10

2

4

10

0

10

1

10

2

10

2

10

3

10

4

6 8

1

without gas ballast
with gas ballast

mbar

10

3

Pa

10

5

Torr

750

Pressure

Pumping speed characteristics for the SOGEVAC SV 100 B at 60 Hz

10

10

-1

1

10

100

2

SV 25
3

m xh

50
cfm
20

SV 16

-1

10

Pumping speed

10 1

5

1
10 0

8
6
4
2

10

-1

10-1

2

4

6 8

100

101

without gas ballast
with gas ballast

102

mbar

103

Pressure

Pumping speed characteristics for the SOGEVAC SV 16 and SV 25 at 60 Hz

29.921

29.918

29.9

29.530

25.980

0

1000

500

SV 40
3

m xh

-1

Pumping speed

cfm

SV 65

100

SV 100

100

Inches
x Hg

50

10
10

5

8
6
4
2

1

2

4

6 8

10 -2
10-2

10 -1
10-1

10 0
100

without gas ballast
with gas ballast

101
101

10 2
102

mbar
Torr

10 3
750

Pressure

Pumping speed characteristics for the SOGEVAC SV 40 to SV 100 at 60 Hz

C02.60

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rotary Vane Vacuum Pumps
Version for the North and South American Continents
29.921

29.918

29.530

29.9

25.980

0

Inches
x Hg

1000
3

m xh

500
SV 300
SV 200

-1

cfm

Pumping speed

100
100

C02

50

10
10 8

5

6
4
2

1

2

4

6 8

10 -2

10 -1

10-2

10 0

10-1

101

10 2

100
101
Pressure

without gas ballast
with gas ballast

102

mbar
Torr

10 3
750

Pumping speed characteristics for the SOGEVAC SV 200 and SV 300 at 60 Hz

29.921
10
3

29.918

29.530

29.9

25.980

Inches
x Hg

0

3

500
cfm

-1

Pumping speed

mxh

10

100
50

2

SV 500
10

1

10 8

5

6
4
2

10

1

0

10 -2

2

4 68

10-2

10 -1

10 0

10-1

101

100

without gas ballast
with gas ballast

10 2

mbar

101

102

29.530

25.980

Torr

10 3
750

Pressure

Pumping speed characteristics for the SOGEVAC SV 500 at 60 Hz

29.921
10

29.918

29.9

Inches
x Hg

0

3

500

3. -1

m h

Pumping speed

10

cfm
100
50

2

SV 750
SV 630 (F)

10

10

1

5
1

10

0
-2

10

0

10

10

10

-1

10

0

10

1

10

1

10 mbar

2

10

3

10

2

4

Pa

10

3

10

5

Pressure
Pumping speed characteristics for the SOGEVAC SV 630 (F) and SV 750 at 60 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C02.61

Rotary Vane Vacuum Pumps

60 Hz Curves
Version for the North and South American Continents

10

-1

1

10

100

Torr

750

10 4
3

Pumping speed

m xh

5000
cfm

-1

10 3

1000
500

10 2

100
50

10 18

10
5

6
4

SV 1200

2

10 0
10 -1

2

4

6 8

10 0

10 1

1
10 2

mbar

10 3

Pressure
without gas ballast
with 1 gas ballast
with 2 gas ballasts

Pumping speed characteristics for the SOGEVAC SV 1200 at 60 Hz

C02.62

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C03

Dry Compressing Piston
Vacuum Pumps

EcoDry L
EcoDry M

Dry Compressing Piston Vacuum Pumps

Contents
General
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.03
General Information on the EcoDry L and M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.04

Products
EcoDry L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.06
EcoDry M. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.10

Accessories
EcoDry L
Cart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.14
Roots Pump Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.15
Gasballast Valve, manually operated (Retrofit Kit) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.16

EcoDry M
Exhaust Silencer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.17
Vibration Absorbing Feet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.17
Vibration Absorbing Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.18

EcoDry L and EcoDry M 15/20
Solenoid Gas Ballast Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.19

Miscellaneous
60 Hz Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.20

C03.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Application and Accessories

Dry Compressing Piston Vacuum Pumps

ry
Ec

oD

Ec

Pu

m

oD

p

ry

L

M

15

/2

0/

30

Applications and Accessories

Applications in physics

♦

♦

Applications in loadlock

♦

♦

Vacuum locks

♦

♦

Mass spectrometers

♦

♦

Electron microscope

♦

♦

Lamps and bulbs manufacture

♦

♦

Coating systems

♦

♦

Applications

Freeze drying

♦

Backing of Turbomolecular pumps and Compound-Turbomolecular pumps

Accessories

C03

♦

♦

Page

Cart

C03.14

♦

Roots pump adapter

C03.15

♦

Gas ballast valve, manually operated (retrofit kit)

C03.16

♦

Exhaust silencer

C03.17

♦

Vibration absorbing feet

C03.17

♦

Vibration absorbing kit

C03.18

Solenoid gas ballast valve

C03.19

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

♦
♦

♦

C03.03

Dry Compressing Piston Vacuum Pumps

General Information on the EcoDry L

EcoDry L - The New Dry Compressing Piston Vacuum Pump for Clean Processes
The EcoDry L (see Fig. 1) is a 4-stage absolutely
dry compressing piston vacuum pump of the
latest generation.

1st stage

It does not have any oil lubricated components
and does not contain hydrocarbon lubricants.
The four pistons are of the double-action type.
This means that there is a compression chamber
both at the top and the bottom of each piston.

2nd stage

3rd and 4th stage

Fig. 1 Cross section of the EcoDry L

The gas which is pumped enters through slits
which are controlled by the action of the piston,
into the compression chamber where it is
compressed against a large valve which extends
over the entire cross section of the piston (see
Fig. 2).

Valve

These valves have been designed to be extremely
rugged and will operate very reliably.
Compared to other vacuum pumps, the rational
speed is very low (about 900 to 1100 rpm; for
50/60 Hz operation).

Piston

Fig. 2 Piston and valve arrangement

For the purpose of an optimised distribution of
the moving mass and also for the purpose of
reducing the noise and vibration levels, the

from the
1st stage

Exhaust

In combination with the standard integrated
bypass valve (see Fig. 3 and 4) which drives the
compression stages mechanically and for this
reason most reliably, the amount of power
consumed is highly attractive over the entire
operating pressure range.
The EcoDry L is simple by design and consists
only of a few components. Therefore, no special
tools will be required for servicing.

pistons have been arranged opposing each other.
During the compression cycle the pistons move
at low contact forces and entirely dry so that the
bushings are hardly subject to any wear at all.
Sealing is performed through dynamic seals
which provide a dry seal in the direction of the
drive unit and a grease seal (free of hydrocarbons)
in the direction of the atmosphere.
The extremely favourable and low coefficient of
friction between the surface of the piston or the
sealing surface and the bushing is the basis for
the very high level of reliability and the low power
consumption of this pump.

The standard operating hours counter in the
junction box of the motor allows the user to
precisely check the number of operating hours.
The accessories which are available have been
adapted specifically to the areas of application for
this pump and allow the EcoDry L to be adapted
in the best possible way to the requirements of
the specific application.

Moreover, during servicing of the pump no
special alignments or adjustments will be
required since the components which replace the
wearing parts have already been adapted to the
pump so as to ensure reliable operation.

Fig. 3 Bypass valve, > 200 mbar (> 150 Torr) intake pressure

to 2nd,
3rd
and 4th
stage

During operation, any maintenance or care
requirements have been reduced to a minimum
because it is not necessary to check any oil levels
or exchange and replace any exhaust filter
components and alike.
The EcoDry L is available for three-phase mains
supplies and with its standard motor it may be
installed almost anywhere in the world without
modifications.

Fig. 4 Bypass valve, < 200 mbar (< 150 Torr) intake pressure

C03.04

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General Information on the EcoDry M

Dry Compressing Piston Vacuum Pumps

EcoDry M - Extension of the Product Range of Piston Vacuum Pumps
Like the well-proven EcoDry L, the EcoDry M
incorporates a dry sliding mechanism without the
need for oil or hydrocarbons.
Through the further development and optimisation of the compression cycle, the EcoDry
M 15/30 attains through its three compression
stages a base pressure (total) in the lower part of
the 10-2 mbar range.

EcoDry M vertical (as delivered)

Since the EcoDry M 15/20/30 may be operated
either vertically (as normally delivered) or
horizontally, this pump is highly flexible when it
has to be integrated into the customer’s system.

EcoDry M horizontal

Inlet

Gas ballast
V1, V2, V3

Exhaust
1

2
4

4

4
3

3

2. stage

3

Crank case
1 Bypass valve

2 Exhaust valve

3 Inlet valve

integrated
non-return valve

3. stage

1. stage
Evacuation port
for crank case

4 Load reduction valve

Gasflow diagram for the EcoDry M 15

Inlet

Exhaust
1

Gas ballast
V1, V2, V3

In contrast to the EcoDry L, the EcoDry
M 15/20/30 is equipped, besides the well-proven
inlet slits, also with pressure controlled inlet
valves. These cut the power requirement during
the intake phase of the individual compression
stages.
This results is a lower overall power requirement
of the pump, thereby making operation of the
pump more cost-effective.
The EcoDry M 15/20/30 does not require any
external cooling media like cooling water for
example.
The EcoDry M 15/20/30 is offered with different
motor versions allowing operation of the pump
off almost any mains voltage and frequency in
the world (see technical data)
Also new is the universal frequency controlled
motor which may be operated off all single phase
mains world-wide (90 to 264 V, 50/60 Hz).

2
4

4

4
3

3

1. stage

Gasflow diagram for the ECODRY M 15
1 Bypass valve

4
3

2. stage

3

1. stage

Crank case

Evacuation port
for crank case
4 Load reduction valve

3 Inlet valve

2 Exhaust valve

Integrated
non-return valve

3. stage

Gasflow diagram for the EcoDry M 30 (three compressing stages)

2

3,0
A
2,5

kW
1,8
1,6
1,4

Current

2,0

Current 50 Hz (M 15)
Current 60 Hz (M 15)
Power requirements 50Hz 400V (M 30)
Power requirements 60Hz 400V (M 30)
Power requirements 50Hz 400V (M 15)
Power requirements 60Hz 400V (M 15)

1,2
1

1,5

0,8
1,0

0,6
0,4

0,5

0,2
0,0

1

10

100

mbar

0
1000

Inlet Pressure

15EcoDry
with EMOD
motor
V, 50/60
Current / power vs.
inlet pressure
for the
ECODRYforMthe
consumption
vs. inlet
pressure
M 153-phase
to 30 with
400400
V, 50/60
Hz Hz
three-phase motor

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C03.05

C03

Dry Compressing Piston Vacuum Pumps

EcoDry L

Dry Compressing Piston Vacuum Pump
Our positive displacement pump EcoDry L is
really very simple: No blower, no water cooling,
no grease-lubricated bearings in the vacuum, and
of course no oil.
In fact, the design principle of the EcoDry L is so
simple that the unit can operate for approximately
two years with no maintenance (depending on
the application).
For proper use of the EcoDry L please contact our
sales department.
Maintenance is simple and can be done worldwide by Leybold Service.

EcoDry L, right with silencing hood on cart

l

l1

l4

DN 25 KF

l2

l3

b

l8

The EcoDry L is available as a complete system
with silencing hood and fitted on to a cart. This
helps to cut the already low noise level to an even
much lower level (see ordering information).

b1

DN 40 KF

k6
l5
h2
h1

h4

h5
d

h

l6

b
mm
in.

b1

b2

ld

h

h1

h3

l7
h2

h3

h4

h5

b2
h6

l

l1

l2

l3

l4

l5

l6

l7

220 70 154 200 572 267 309 585 322 159 40 755 304 451 281 161 145 4
8.66 2.76 6.06 7.87 22.52 10.51 12.17 23.03 12.68 6.26 1.57 29.72 11.97 17.76 11.06 6.34 5.71 0.16

l8

417 172
16.42 6.77

Dimensional drawing for the EcoDry L

l

b

h

h1
l3

l2

l4

b1

l1
b
mm
in.

b1

h

324
300 642
12.76 11.81 26.85

h1
13
0.51

l

l1

l1

974
892 845.5
38.35 35.12 33.29

l1

l2

59.5
2.34

40
1.57

Dimensional drawing for the EcoDry L on cart with silencing hood

C03.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Advantages to the User

Typical Applications

♦ Maintenance-poor, free of oil and
bearing lubrication, free of hydrocarbons

♦ Applications in physics

♦ Low level of particle emmissions

♦ Transfer chambers

♦ Long service life and most reliable

♦ Mass spectrometers

♦ Low power consumption

♦ Electron microscopes

♦ Low operating costs (no waste disposal costs
for oil etc.)

♦ Lighting

♦ Service friendly
♦ No additional blower and water cooling
system is required
♦ Plug & play

♦ Loadlock chambers

Dry Compressing Piston Vacuum Pumps

1000
mbar
100
Intake Pressure

EcoDry L

10
1
0,1
0,01
0

♦ Thinfilm coaters
♦ Forevacuum pump for dry high-vacuum
systems

20

40

60

80
Time

100

120 s 140

EcoDry L

Pump down curve of the EcoDry L connected to a 83 l vessel at 60 Hz
without gas ballast

♦ Pumping of oxygen concentrations over
21 percent by volume upon request

♦ High pumping speed at low pressure

♦ Totally dry compression chamber
♦ Leak tight
♦ Runs at 1100 rpm (60 Hz mains)
♦ Integrated operating hours counter in the
motor junction box
♦ Full cross section valves

60
m3/h
50

Pumping Speed

♦ No grease-lubricated bearing in the vacuum
section

40
30
20
10
0
0,01

0,1

1
10
Inlet Pressure

100

1000
mbar

Pumping speed characteristic for the EcoDry L without gas ballast (50 Hz)

♦ Gas ballast (optional)
♦ High water vapor tolerance with gas ballast
(optional)
♦ For both horizontal and vertical operation 1)

1)

When planning to operate the EcoDry L horizontally please
contact LEYBOLD sales first.

The versions equipped with a silencing hood can only be
operated vertically!

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C03.07

C03

Dry Compressing Piston Vacuum Pumps

EcoDry L

Technica l Data
Max. pumping speed
50 Hz
60 Hz

EcoDry L
m3 x h-1 (cfm)
m3 x h-1 (cfm)

38 (22)
48 (28)

Ultimate total pressure
50 Hz, without gas ballast 1)

mbar (Torr)

6 x 10-2 (3 x 10-2)

Max. permissible inlet pressure
Max. permissible permanent inlet pressure
1.5 kW (2.0 hp) motor
2.2 kW (3.0 hp) motor

mbar (Torr)
mbar (Torr)
mbar (Torr)
mbar (Torr)

1000 (750)

Water vapor tolerance, max. 2)

mbar (Torr)

Main voltage

≤ 30 (22.5)
1000 (750)
30 (22.5)
3 P - AC 190 - 210 V, 50 Hz
3 P - AC 190 - 250 V, 60 Hz
3 P - AC 380 - 420 V, 50 Hz
3 P - AC 380 - 500 V, 60 Hz

Motor power requirements 3)
Motor rating, max. 3)

W (hp)
W (hp)

≤ 500 (≤ 0.7) at ultimate pressure
1500 (2.0)

Max. ambient temperature

°C (°F)

≤ + 50 (≤ + 122)

min-1
min-1

approx. 900
approx. 1100

Speed
50 Hz
60 Hz
Type of protection
Weight, approx.
with silencing hood
Part No. 130 106, approx.
Part No. 130 105, approx.

IP

54

kg (lbs)

95 (209.5)

kg (lbs)
kg (lbs)

140 (309)
145 (320)

dB(A)
Noise level (60 Hz operation) 4)
Versions with silencing hood (60 Hz operation) 4) dB(A)

64
≤ 58

Connections
Inlet port fitting
Exhaust port fitting

40 KF
25 KF

Ordering Information

DN
DN

5)

EcoDry L

EcoDry L with 1.5 kW (2.0 hp) 7)

Part No. 139 50

EcoDry L with 1.5 kW (2.0 hp) motor and gasballast 7)

Part No. 123 15

EcoDry L (1.5 kW motor) with silencing hood
(fitted to cart, fan 230 V) 6)

Part No. 130 106

EcoDry L with 2.2 kW (3.0 hp) motor 7)

Part No. 123 00

EcoDry L (2.2 kW motor) with silencing hood
(fitted to cart, fan 230 V) 6)

Upon request

Cart

Part No. 139 52

Roots pump adapter

Part No. 139 55

Gas ballast valve
manually operated
solenoid

Part No. 123 05
Part No. 169 50

1)
2)
3)
4)
5)
6)
7)

By delivery
Version with gas ballast (position III)
Version with 1.5 kW (2.0 hp) motor
Operating at ultimate pressure
Other EcoDry L versions upon request
Other EcoDry L versions with silencing hood upon request
Higher pumped off volumes > 100 l (3.5 ft3) < 1 m3 are possible with optional 2.2 kW (3.0 hp) motors

C03.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

EcoDry L

Dry Compressing Piston Vacuum Pumps

N otes

C03

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C03.09

Dry Compressing Piston Vacuum Pumps

EcoDry M

EcoDry M - Modular Line of Dry Compressing Piston Vacuum Pumps
Like the well-proven EcoDry L, the EcoDry M
incorporates a dry sliding mechanism, and thus
neither oil nor lubricants containing hydrocarbons.
Through the further development and optimisation of the compression cycle, the EcoDry
M 15/30 attains through its three compression
stages a base pressure (total) in the lower part of
the 10-2 mbar (0.75 x 10-2 Torr) range.
The modular design of the EcoDry M allows us to
offer besides the EcoDry M 15 (Seff about
15 m3/h (8.8 cfm)), also the EcoDry M 20 (Seff
about 20 m3/h (11.8 cfm)) and the EcoDry M 30
(Seff ≈ 30 m3/h (17.8 cfm)).
These pumps basically differ by the way in which
the third stage of the pump is arranged.
In the EcoDry M 15 the three compression
stages are connected in series.
In the EcoDry M 20 the 1st and 2nd stage are
connected in parallel and the 3rd stage in series.
In the M 30 all stages operate like those of the M
15 in 3 compressing stages whereby the 2nd and
the 4th stage form the single compressing stage
(1st stage).
This results in the higher pumping speed of
about 20 m3/h (11.8 cfm) and a base pressure
(total) in the middle of the 10-1 mbar range for
the EcoDry M 20.

EcoDry M line

vertically installed
l1

l2

l3

h7
h6

h2

h1
h3 h4

h

h5

b1

a

Ø 6,5

h8

l6

l5

Durchgangsloch
6,5 für M6
hole
dia. 6.5 for M6

l4
l
l7

l8

l7

l8
b3 b2
b3 b2

b
b

horizontal
Type
M 15/20

FC-Motor mm
in.
M 30
FC-Motor mm
in.
M 15/20 DS-Motor mm
in.
M 30
DS-Motor mm
in.
M 15/20 WS-Motor mm
in.
M 30
WS-Motor mm
in.

a

b

b1

b2

b3

h

h1

h2

h3

h4

h5

h6

h7

h8

l

l1

76
2.99
76
2.99
76
2.99
76
2.99
76
2.99
76
2.99

180
7.09
180
7.09
180
7.09
180
7.09
180
7.09
180
7.09

146
5.75
146
5.75
146
5.75
146
5.75
146
5.75
146
5.75

138
5.43
140.5
5.53
138
5.43
140.5
5.53
138
5.43
140.5
5.53

121
4.76
121
4.76
121
4.76
121
4.76
121
4.76
121
4.76

352.5
13.88
369
14.53
352.5
13.88
369
14.53
352.5
13.88
369
14.53

228
8.98
242.5
9.55
228
8.98
242.5
9.55
228
8.98
242.5
9.55

230
9.06
230
9.06
148
5.83
148
5.83
150
5.91
150
5.91

335
13.19
349.5
13.76
335
13.19
344.5
13.56
335
13.19
349.5
13.76

316
12.44
330.5
13.01
316
12.44
330.5
13.01
316
12.44
330.5
13.01

186
7.32
186
7.32
186
7.32
186
7.32
186
7.32
186
7.32

93
3.66
107.5
4.23
93
3.66
107.5
4.23
93
3.66
107.5
4.23

37.5
1.48
36
1.42
37.5
1.48
36
1.42
37.5
1.48
36
1.42

373,5
14.7
390
15.35
373,5
14.7
390
15.35
388
12.28
390
15.35

598
23.54
713
28.07
594
23.39
709
27.91
598
23.54
723
28.46

89
3.5
89
3.5
89
3.5
89
3.5
89
3.5
89
3.5

l2

l3

191 300.5
7.52 11.83
304 300.5
11.97 11.83
191 269.5
7.52 10.61
304 269.5
11.97 10.61
191 300.5
7.52 11.83
304 300.5
11.97 11.83

l4

l5

l6

l7

l8

495
19.49
495
19.49
495
19.49
495
19.49
495
19.49
495
19.49

289
11.28
399.5
15.73
289
11.28
399.5
15.73
289
11.28
399.5
15.73

105.5
4.15
111.5
4.39
105.5
4.15
111.5
4.39
105.5
4.15
111.5
4.39

289
11.28
399.5
15.73
289
11.28
399.5
15.73
289
11.28
399.5
15.73

101
3.98
213
8.39
101
3.98
213
8.39
101
3.98
213
8.39

Dimensional drawing for the EcoDry M 15/20 and M 30 with FC motor; DS and WS motor similaire (dimensions listed are with standard feet)

C03.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Avantages to the User

Typical Applications

♦ Maintenance-poor, free of oil and
bearing lubrication, free of hydrocarbons

♦ Applications in physics

♦ Extremely low particle emissions on the intake
and exhaust sides

♦ Transfer chambers

♦ Rugged and most reliable

♦ Electron microscopes

♦ Low power consumption

♦ Lighting

♦ Loadlock chambers
♦ Mass spectrometers

♦ Service friendly

♦ Thinfilm coaters

♦ Air cooling

♦ Freeze drying

♦ Plug & play

♦ Forevacuum pump for dry high-vacuum
systems

♦ Good pumping speed characteristic at low
base pressure
♦ High water vapour tolerance (gas ballast
standard)

Dry Compressing Piston Vacuum Pumps

30
25

m3/h
Pumping Speed

EcoDry M

20
15
10
5
0

10-2

10-1

100

101

102

mbar

103

Inlet Pressure
M 15 - 60 Hz
M 20 - 60 Hz
M 30 - 60 Hz

Pumping speed vs. inlet pressure for the EcoDry M 15 to M 30

♦ Pumping of oxygen concentrations over
21 percent by volume upon request

♦ No grease lubricated bearings in the vacuum
section
♦ Leak tight
♦ Compact size
♦ Runs at 750 rpm (60 Hz mains)
♦ Rugged full cross section exhaust valves
♦ For both horizontal and vertical operation

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C03.11

C03

Dry Compressing Piston Vacuum Pumps

EcoDry M

Smart Drive Technology for a Tailor-made Vacuum
To increase the performance of the EcoDry M
piston vacuum pumps, the use of a frequency
converter integrated within the motor is
recommended.
LEYBOLD VACUUM is now offering this universal
feature for the entire EcoDry M line
(EcoDry M 15, M 20 and M30).

EcoDry M with FC motor

Avantages to the User

Technical Data

♦ Universal – can be run off all AC mains worldwide (50 and 60 Hz)

♦ Mains supply voltage range 90 to 264 V
(13 A – 7 A) at 50/60 Hz

♦ Cost-effective to purchase and operate

♦ Motor speed manually adjustable in three
steps to 750, 1000 and 1200 rpm

♦ Increased pumping speed by up to 18%
compared to standard 50 Hz AC mains
powered versions

3

4
2

♦ RS 485 C and analog interface (0-10 V)

11

1
2
3
4
5
6
7
8
9
10
11

♦ Menu controlled two key operation for
selecting the required speed range of 750,
1000 or 1200 rpm
♦ Infinitely variable speed control from 750 to
1200 rpm via analog interface
♦ Process and application control is possible by
connecting vacuum gauges with an analog
output (0-10 V); THERMOVAC TM 21, for
example

9

8

7

Ready to operate / control via serial protocol
Accelerate
4 x 7 segment display
Nominal speed
Actual speed
Volt, Amps, hours
Overspeed
Frequency select
Operating hours
Fault
Normal operation

2000

♦ Conserving, low-wear operation through welldefined speed control

EcoDry
EcoDr
y M 30 @ 1200/1000/750 rpm

1500

EcoDry
EcoDr
y M 20 @ 1200/1000/750 rpm
EcoDry
EcoDr
y M 15 @ 1200/1000/750 rpm

Current / W

♦ CE and NRTL compliant

10

LC display on the operating unit

♦ “Economy” operation (load optimised
operation) can be set up in a well-defined
manner to reduce power consumption,
vibration and noise levels.

♦ LC display for indicating operational information like speed, operating hours, status

5
6

1

1000

500

0
0.01

0.1

1

10

100

1000

Inlet Pressure / mbar
Current/power uptake vs. inlet pressure for the EcoDry M 15 to 30

C03.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

EcoDry M

EcoDry M 15

Technical Data

3-phase motor

FC motor

Dry Compressing Piston Vacuum Pumps
EcoDry M 20

*)

3-phase motor

FC motor

EcoDry M 30
3-phase motor

FC motor

No. of cylinders

3

3

4

No. of stages

3

2

3

Max. pumping speed

50 Hz 1)
60 Hz 1)
50/60 Hz 1)
50/60 Hz 1)
50/60 Hz 1)

m3 x h-1 (cfm)
m3 x h-1 (cfm)
m3 x h-1 (cfm)
m3 x h-1 (cfm)
m3 x h-1 (cfm)

Ultimate pressure (absolute) 2)
3-phase motor
60 Hz
FC motor *) at 1000 min-1 50/60 Hz

mbar (Torr)
mbar (Torr)

Max. permissible inlet pressure
Max. permissible permanent inlet pressure

mbar (Torr)

Atmosphere
100 (75)

Atmosphere
100 (75)

Atmosphere
100 (75)

Water vapor tolerance (with gas ballast)

mbar (Torr)

25 (18.8)

25 (18.8)

25 (18.8)

mbar x l x s-1 (atm x cc x sec (within 2%))

≤ 1 x 10-4

≤ 1 x 10-4

≤ 1 x 10-4

at 0750 min-1
at 1000 min-1
at 1200 min-1

Leak rate (integral)

Power consumption
at < 10 mbar (7.5 Torr) inlet pressure

W (hp)

Motors
3-phase, 50 Hz (IP 54)
3-phase, 60 Hz (IP 54)
FC motor, 50/60 Hz (IP 44)
Rotational speed
with 3-phase motor
50 / 60 Hz
with FC motor
50 / 60 Hz
via analog interface 0-10 V, 50/60 Hz
Noise level at ultimate pressure without gas ballast
(50 Hz at 3-phase and 750 min-1 with FC motor)
Ambient temperature

V
V
V
min-1
min-1
min-1

lying
Weight, approx.

–
–
11 (6.5)
15 (8.8)
16 (9.4)

19 (11.2)
22 (12.9)
–
–
–

–
–
14 (8.2)
18 (10.5)
22 (12.9)

5.5 x 10-2 (4.1 x 10-2)
–
8 x 10-1 (6 x 10-1)
–
–
5.5 x 10-2 (4.1 x 10-2)
–
8 x 10-1 (6 x 10-1)

300 (0.41)

280 (0.38)

- 10 % to + 5 %
220-240/346-415
–
200-277/380-480
–
–
90-264
1000 / 1200
–
–

–
750/1000/1200
750-1200, variable

300 (0.41)

280 (0.38)

- 10 % to + 5 %
220-240/346-415
–
200-277/380-480
–
–
90-264
1000 / 1200
–
–

–
750/1000/1200
750-1200, variable

27 (15.9)
30 (17.7)
–
–
–

–
–
19 (11.2)
25 (14.7)
30 (17.7)

5.5 x 10-2 (4.1 x 10-2)
–
–
5.5 x 10-2 (4.1 x 10-2)

450 (0.6)

330 (0.45)

- 10 % to + 5 %
220-240/346-415
–
200-277/380-480
–
–
90-264
1000 / 1200
–
–

–
750/1000/1200
750-1200, variable

dB(A)

≤ 59

≤ 59

≤ 59

°C (°F)

0 to + 50 (32 to + 122)

0 to + 50 (32 to + 122)

0 to + 50 (32 to + 122)

25 KF
25 KF

25 KF
25 KF

25 KF
25 KF

Connections
Inlet port fitting
Exhaust port fitting
Dimensions, approx. (L x W x H)
standard,flanges at motor side
standing

14 (8.2)
16 (9.4)
–
–
–

DN
DN

mm
(in.)
mm
(in.)
kg (lbs)

Or dering Info rmation
EcoDry M
3-phase DC motor
1-phase AC motor
115 V, 50/60 Hz (USA)
230 V, 50/60 Hz (EURO)
FC motor, 90 - 264 V
FC motor, 90 - 264 V and silencing hood
Exhaust silencer

545 x 182 x 356
(21.5 x 7.17 x 14.0)

598 x 182 x 356

545 x 182 x 356

598 x 182 x 356

(23.5 x 7.17 x 14.0) (21.5 x 7.17 x 14.0) (23.5 x 7.17 x 14.0)

713 x 182 x 369
(28.1 x 7.17 x 14.5)

545 x 356 x 211

598 x 356 x 211

598 x 356 x 211

709 x 369 x 211

713 x 369 x 211

(21.5 x 14.0 x 8.3)

(23.5 x 14.0 x 8.3) (21.5 x 14.0 x 8.3) (23.5 x 14.0 x 8.3)

(27.9 x 14.5 x 8.3)

(28.1 x 14.5 x 8.3)

53 (117)

59 (130.2)

40.5 (89.4)

47 (103.8)

EcoDry M 15
Part No. 130 000

–

545 x 356 x 211

709 x 182 x 369
(27.9 x 7.17 x 14.5)

40.5 (89.4)

47 (103.8)

EcoDry M 20
Part No. 130 010

–

EcoDry M 30
Part No. 130 030

Part No. 130 001
–
Part No. 130 011
–
Part No. 130 031
–
Part No. 130 002
–
Part No. 130 012
–
Part No. 130 032
–
–
Part No. 130 005
–
Part No. 130 015
–
Part No. 130 033
–
Part No. 130 006
–
–
–
Part No. 130 034
Part No. 130 050

Part No. 130 050

Part No. 130 050

Vibration absorber (set of 4 pieces)

Part No. 130 051

Part No. 130 051

Part No. 130 051

Vibration absorbing kit

Part No. 130 052

Part No. 130 052

Part No. 130 052

Solenoid gas ballast valve

Part No. 169 50

Part No. 169 50

Part No. 169 50

Universal silencing hood

Part No. 130 056

Part No. 130 056

Part No. 130 056

Cable set for universal silencing hood
for FC motor
for 3-phase DC motor
for 1-phase AC motor

Part No. 130 057
Part No. 130 058
Part No. 130 059

Part No. 130 057
Part No. 130 058
Part No. 130 059

Part No. 130 057
Part No. 130 058
Part No. 130 059

1)
2)
*)

–

According to DIN 28400 and subsequent numbers
By delivery
FC motor = Frequency Controlled Motor

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C03.13

C03

Dry Compressing Piston Vacuum Pumps

Accessories EcoDry L

Cart

Rotatable castors, arrestable in both directions of rotation
b

EcoDry L on the cart

l

l1

l2

l3

l4

b3

ld

l d1 l d1

154
6.06

226
8.90

200
7.87

61
2.40

h1

h3

h4

h1

h2

l9

h5

h3

h7
l9

l8

l7

l10

l4

l10

l11

h5

h6

159
6.26

13
0.5

l5

l6

145
5.71

l12

l13

78.5
3.09

40
1.57

h

180 572
7.09 22.52
h7

l

60 755
10.35 29.72
l7

l8

4
417 450
0.16 16.42 17.72
l14

l15

172 299
6.77 11.77

Avantages to the User

d1

l11
l12

l3

mm 815 892 95
in. 32.09 35.12 3.74

h

d
l15

l2

mm 304 451 261 161
in. 11.97 17.76 10.28 6.34

l5

l6

h2

l1

h4

d2

b1

mm 267 309 263 40
in. 10.51 12.17 10.35 1.57

b1

DN 40 KF

l14

DN 25 KF

b2

mm 300 70
in. 11.81 2.76

♦ Makes the EcoDry L easy to move

h6

♦ Compact

b2
b3
b

l13

♦ Rugged and safe design

Dimensional drawing for the cart with the EcoDry L

♦ 2 rotatable and two fixed castors
(the rotatable castors are arrestable)
♦ Feet for secure positioning

l1

♦ Can be retrofitted to any EcoDry L
♦ Silencing hood may be retrofitted

h4

Technical Note
h

This cart has been designed to accept any
EcoDry L alone and it has not been designed as
a platform for an EcoDry L with a Roots pump.
Only the vertical version of the EcoDry L (as
shown) may be placed on the cart.

l2
h3
h2
h1

mm
in.

l
Center of gravity for the EcoDry L on its cart (values in brackets apply to the pump alone without the cart)

Technical Data
Dimensions (W x H x D)
Weight, approx.

C03.14

h1
60
2.36

h2

h3

h4

l

l1

l2

283
263 309
892 755 368
11.14 10.35 12.17 35.12 29.72 14.49

Cart
mm (in.)

892 x 108 x 300 (35.12 x 4.25 x 11.81)

kg (lbs)

15.5 (34.2)

Ordering Information
Cart

h
572
22.52

Cart
Part No. 139 52
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories EcoDry L

Dry Compressing Piston Vacuum Pumps

Roots Pump Adapter
The Roots pump adapter permits direct
installation of a RUVAC WS/WSU 251 Roots
pump to an EcoDry L.

C03
EcoDry L with WSU 251

Supplied equipment

Advantages to the User

Technical Note

♦ Short link to the Roots pump

Please contact our sales department when planning to operate the EcoDry L in connection with a
Roots pump.

♦ Wider feet for secure positioning
♦ Measurement flange may be screwed-in
directly

The Roots pump can not be placed on a cart.

Technical Data
Weight, approx.

Roots Pump Adapter
kg (lbs)

Or dering Information
Roots pump adapter consisting of adapter,
O-ring, feet and bolts
DN 10/16 KF / M 16 x 1.5 measurement flange

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

4.4 (9.7)

Roots Pump Adapter
Part No. 139 55
Part No. 168 40

C03.15

Dry Compressing Piston Vacuum Pumps

Accessories EcoDry L

Gas Ballast Valve, manually operated (Retrofit Kit)
3

The manually operated gas ballast valve is used
to operate the EcoDry L pump in connection with
condensable media, like water vapor, for example.

4

1
2
3
4
5
6

2

Hex. adapter (SW 27)
Rubber adjustment ring
Hex. socket screw
Scale
Housing cover
Flat gasket

This valve has three different positions which
ensure that the gas ballast flow can be adapted to
suit the particular application.
By using the retro-fit kit, the range of applications
covered by a standard EcoDry L (without gas
ballast) is extended to applications involving
water vapor.

1

6

5

Sectional view through the fitted gas ballast valve

Avantages to the User
♦ Easy retrofitting
♦ Simple to use
♦ Water vapor tolerance down to 30 mbar
(22.5 Torr) guaranteed

Technical Data
Dimensions (dia. x h)

Gas Ballast Valve, manually operated
mm (in.)

45 x 45 (1.77 x 1.77)

Gas Ballast Valve, manually operated

Ordering Information

Part No. 123 05

Gas ballast valve, manually operated

Gas Ballast Quantities
Position on the
gas ballast valve
2

‰

Water vapor
in kg x h-1

0.37 (0.22)

0.025

1.0 (0.59)

0.09

2.25 (1.32)

1.0

3

0

1

Pumped quantity
in m3 x h-1 (cfm)

GB

2
3

0

1

GB

2
3

0

1

= 30 mbar (22.5 Torr) water vapor tolerance
GB

C03.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories EcoDry M

Dry Compressing Piston Vacuum Pumps

Exhaust Silencer
The noise level of the EcoDry M is similar to that
of oil-sealed rotary vane vacuum pumps and is
setting new standards for dry-compressing
vacuum pumps. If no exhaust line is required,
this simple exhaust silencer may be fitted when
pumping only inert or permanent gases. The
silencer is fitted simply by exchanging the
exhaust port on the pump against the exhaust
silencer.

C03

Exhaust silencer

Exhaust Silencer

Technical Data
Dimensions (dia. x h)

mm (in.)

48 x 122 (1.89 x 4.80)

Exhaust Silencer

Or dering Information

Part No. 130 050

Exhaust silencer

Vibration Absorbing Feet
Owing to the innovative arrangement of the
pistons within the EcoDry M, the vibration levels
are basically low.
However, for most vibration sensitive applications
these vibration absorbing feet are needed to
decouple the vibrations from the surface
supporting the pump.

Vibration absorbing foot

Technical Data

Vibration Absorbing Feet

Bore diameter

mm (in.)

6.5 (0.26)

Distance between the bores

mm (in.)

76 (2.99)

Or dering Information
Vibration absorbing feet, Set of 4

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vibration Absorbing Feet
Part No. 130 051

C03.17

Dry Compressing Piston Vacuum Pumps

Accessories EcoDry M

Vibration Absorbing Kit
This vibration absorbing kit was specifically
developed for those applications which are most
demanding vibration-wise, like some analytical
applications.
The vibration absorbing kit reduces the vibrations
transferred to the pump’ supporting surface and
the intake line to a level significantly below the
vibration levels produced by a rotary vane
vacuum pump.

Vibration absorbing kit

Technical Data
Dimensions (W x H x D)
Weight, approx.

Vibration Absorbing Kit
mm (in.)

440 x 315 x 70 (17.32 x 12.40 x 2.76)

kg (lbs)

4.7 (10.38)

Or dering Information
Vibration absorbing kit

C03.18

Vibration Absorbing Kit
Part No. 130 052

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories EcoDry L and M

Dry Compressing Piston Vacuum Pumps

Solenoid Gas Ballast Valve
The solenoid gas ballast valve allows preventive
operation with gas ballast when pumping
condensable media.
The gas ballast may be operated either with
ambient air or an inert gas like nitrogen, for
example. A coupling for connecting a PVC hose
of 6 mm dia. x 1 is provided.
This valve is of the normally open type and may
thus be used as a permanent gas ballast. When
wanting to cyclically supply the gas ballast into
the pump, a voltage of 24 V DC is required to
drive the gas ballast valve.
Fitting the solenoid gas ballast valve to the EcoDry L (left) and the EcoDry M (right)

Avantages to the User
♦ Protection against condensation within the
pump
♦ No contamination by the ambient air (when
using inert gas)
♦ Low consumption of inert gas
♦ Can be used on all EcoDry L and M versions

Technical Data
Control voltage

EcoDry L
V DC

Permissible inert gas pressure, absolute

Inert gas flow

EcoDry M

24

bar

Inert gas connection

Solenoid Gas Ballast Valve

1 to 4
Hose connection for PVC hose 6 mm dia. x 1 (0.24 in. dia. x 0.04 in.)

m3 · h-1 (cfm)

0.15 to 0.7 (0.09 x 0.4)

Or dering Information
Solenoid gas ballast valve

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

0.10 to 0.55 (0.06 x 0.32)

Solenoid Gas Ballast Valve
Part No. 169 50

C03.19

C03

Dry Compressing Piston Vacuum Pumps

60 Hz Curves

Version for the North and South American Continents
10 -2

Torr

10 1

10 0

10 -1

750

60
m /h
50

30

40

20

Pumping speed

3

cfm

30
20

10

10
0

10 -2

10 1

10 0

10 -1

10 2

10 3
mbar

Inlet Pressure

Pumping speed characteristics for the EcoDry L for 60 Hz, without gas ballast

10

-2

10

-1

10

0

10

1

10

2

Torr

750

25

Pumping speed

m3/h
20

10

15
10

cfm

5
0
10

-2

10

-1

10

0

10

1

10

2

mbar

10

3

Intake Pressure
Pumping speed vs. inlet pressure for the EcoDry M 15/30 at 60 Hz

10

-2

10

-1

10

0

10

1

10

2

Torr

750

25

Pumping speed

m3/h
20

10

15
10

cfm

5
0
10

-2

10

-1

10

0

10

1

10

2

mbar

10

3

Intake Pressure
Pumping speed vs. inlet pressure for the EcoDry M 20 at 60 Hz

C03.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

DIVAC

C04
Diaphragm Vacuum Pumps

Diaphragm Vacuum Pumps

Contents
General
Survey of the range for the DIVAC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.03
The customized diaphragm pump and
the accessories recommended for your application in the chemical laboratory. . . . . . . . . . . C04.04

Products
Diaphragm Vacuum Pumps for the Chemical Laboratory
Single-Stage Diaphragm Vacuum Pumps DIVAC 0.6, 1.2, 2.2 . . . . . . . . . . . . . . . . . . . . . C04.06
Dual-Stage Diaphragm Vacuum Pumps DIVAC 0.6 L, 1.2 L, 2.2 L . . . . . . . . . . . . . . . . . . C04.08
Dual-Stage Diaphragm Vacuum Pumps with Automatic Drying System
DIVAC 1.2 L AD, 2.2 L AD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.10
Modular Laboratory Pump Concept . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.12
Components for the modular DIVAC System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.13
DIVAC SR, SH, SC Sub-assemblies. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.14
Dry Compressing Backing Pumps for Turbomolecular Pumps . . . . . . . . . . . . . . . . . . . . . . C04.16
DIVAC 0.8 T and 0.8 LT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.18
DIVAC 2.5 T and 2.5 VT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.20
DIVAC 3.6 TC and 4.8 VT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.22

C04.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General Informations
What this Series Offers

Backing Pumps

This range of vacuum pumps was developed
especially for laboratory operations and as
backing pumps for (wide range) turbomolecular
pumps. It satisfies the highest expectations in
terms of precision, reliability and ease of use.

The DIVAC T range of diaphragm pumps
comprises backing pumps which are used in all
applications requiring an especially low base
pressure while having to maintain an oil-free
vacuum.

The DIVAC line of vacuum pumps is the logical
continuation of diaphragm pump technology
which has proven its quality in decades of
service.

The DIVAC T pumps have been specially
developed as backing pumps for wide range
high-vacuum turbomolecular pumps. They meet
the requirements for a dry vacuum and a long
service life.

Laboratory Pumps

The DIVAC TC pumps are capable of handling
aggressive and corrosive gases as encountered in
research or in connection with sputtering
processes. The parts of the pump in contact with
the medium are made of PTFE (Teflon), FFPM
(Kalrez) and PVDF (Solef), and for this reason the
pumps are highly resistant to the media
mentioned.

Through the laboratory pumps and the three
different pumping speeds available for the same
base pressure and through the modular design,
the optimum DIVAC L pump system*) can be
implemented in each case.
DIVAC L diaphragm pumps are suited for almost
all requirements in the chemistry lab. They are
basically corrosion and solvent resistant since
their parts in contact with the pumped medium
are made of PTFE (Teflon), FFPM (Kalrez) and
PVDF (Solef).

DIVAC T pumps may be used both free-standing
and integrated in applications or certain devices,
and for this reason they are used in the areas of
mass spectrometry, analytical and in general
applications.

The newly developed automatic drying system is
used in all applications where very moist and wet
gases need to be pumped over extended periods
of time. Here the pumping speed remains
constant and the service life of the pumps is not
impaired by the liquid.

Diaphragm Vacuum Pumps
Application Examples
Laboratory Pumps
♦ Vacuum filtration
♦ Vacuum distillation
♦ Vacuum drying
♦ On rotary evaporators
♦ To extract and transfer gases
♦ Gel drying

C04

♦ Steam sterilization

Backing Pumps
♦ Backing pump for wide range turbomolecular
pumps
♦ Mass spectrometry
♦ Medicine technology
♦ Analytical technology
♦ General rough and medium vacuum
applications

*) Comprising the DIVAC diaphragm pump and a DIVAC sub-assembly

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.03

Diaphragm Vacuum Pumps

Modular Diaphragm Pump System for the Chemical Laboratory

♦

sti

lla

tio
tra

♦

♦

♦

♦
♦

DIVAC 2.2 L
DIVAC 1.2 L AD

♦
♦

♦

DIVAC 2.2L AD
Base plate

♦

Separator

(intake side)

Separator

(exhaust side)

Dr
yi
dr ng in
yin t
g c he
ab
ine
Dr
t
yin
(2 g c
ca abi
bin ne
ets ts
wi
th
Ro
on
tar
ep
ye
um
va
p)
po
ra
tor
St
ea
m
ste
ril
isa
tio
n

n

tio

n

pre
aly

Di

DIVAC 1.2 L

Fil

♦

An

DIVAC 0.6 L

Su

bli

ma

sis

tio

Mo
du
dia lar
ph
ra
gm

n

pu

pa

ra

mp

tio

sy

n

ste

m

The customized diaphragm pump and the accessories recommended for your application in the chemical laboratory

♦

♦

♦

♦

♦

♦

♦

♦
♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

♦

High-performance condenser
(including stand and holder)

Vacuum controller

♦

♦

Gas ballast unit
Corresponds to the DIVAC system

♦

–

–

–

SR 0.6 L

SH 0.6 L

♦

♦

SH 2.2 L

SH 2.2 L

SC 1.2 L

–

DIV

DIVAC system: SR 0.6 L, 1.2 L, 2.2 L

C04.04

DIVAC system: SH 0.6 L, 1.2 L, 2.2 L

DIVAC system: SC 0.6 L, 1.2 L, 2.2 L

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Modular Diaphragm Pump System for the Chemical Laboratory
Advantages to the User
♦ Good base vacuum of 8 mbar (100 mbar for
single-head DIVAC pumps)
♦ All parts of the pump head in contact with the
gas are resistant against aggressive media
through the use of PTFE (Teflon), FFPM
(Kalrez) and PVDF (Solef)
♦ Dry compressing, oil-free
♦ Very high water vapour tolerance

Features of the Modular
Designed Laboratory
Pumpsystem
♦ All system components are combined to form
assemblies which can be easily replaced or
retrofitted
♦ Easy relocation since the entire assembly is
mounted as a unit on a stable base plate for
easy transportation

♦ Low maintenance costs and long service
intervals through the use of high-quality
components which are well-proven

♦ Individual components with plug connectors
for easy removal and mounting

♦ Simple maintenance by staff of the customer

♦ For the SC configuration – with separator,
high-performance condenser and controller –
all electrical connections are arranged inside
the control unit and made by way of plug
connectors

♦ Low noise operation
♦ Portable, compact, small footprint
♦ Can be operated in any orientation

♦ Compact design – Small footprint

♦ Overheat protection for the vacuum pump by
means of a thermofuse

♦ Trouble-free provisions for mounting
additional laboratory equipment in grooved
rails, on laboratory stands and crossbars in
the assembly

♦ Available in three pumping speed categories

♦ Simple replacement of diaphragms and valves

♦ Illuminated mains switch on the pump

Diaphragm Vacuum Pumps
Additional Benefits of the
Automatic Drying System
♦ High vapour and condensate tolerance through
the newly developed automatic drying system
♦ Maintaining of maximum pumping speed
♦ Longer durability of the structured diaphragm
♦ Individual adaptation of the drying cycle to
different processes
♦ Vacuum chamber is not vented during the
drying phase
♦ Overnight evacuations are possible through
the automatic cycling system

♦ Modular system
– can easily be adapted to special
requirements
♦ Wide range of accessories like separator,
condenser, base plate, vacuum controller

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.05

C04

Diaphragm Vacuum Pumps

Modular Diaphragm Pump System for the Chemical Laboratory

Single-Stage Diaphragm Vacuum Pumps DIVAC 0.6, 1.2, 2.2
Typical Applications
Vacuum generation for
♦ Rotary evaporators
♦ Drying chambers
♦ Filtration units
♦ Distillation configurations
♦ Gel dryers

b1

l1

d
l2
h

b

l
Type

b

DIVAC 0.6
DIVAC 1.2
DIVAC 2.2

Dimensional drawing for the DIVAC 0.6, 1.2 and 2.2

1013

Torr

100
0

2

4

6

min

C04.06

l2

98

146

10

G 1/8“

187

248

256

55

5.75

0.39

G 1/8“

7.36

9.76

10.08

2.17

mm

110

159

10

G 1/4“

207

260

268

59

in.

4.33

6.26

0.39

G 1/4“

8.15

10.24

10.55

2.32

mm

122

171

10

G 1/4“

226

289

297

59

in.

4.8

6.73

0.39

G 1/4“

8.9

11.38

11.69

2.32

100

Torr

750

DIVAC 0.6
DIVAC 1.2
DIVAC 2.2

10

1

10
0
1
10

Time
Curves of pump-down time of a 10 l vessel

l1

3.86

l / min

200
0

l

in.

10

Pumping Speed

Pressure

400

h

100

DIVAC 2.2
DIVAC 1.2
DIVAC 0.6

600

l d (Turned out)

mm

750

mbar

b1

Curves of pumping capacity

2

10

Pressure

mbar

1013
1000

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Modular Diaphragm Pump System for the Chemical Laboratory

Technical Data
Max. pumping speed (atm.)

DIVAC 0.6

m3 · h-1 (cfm)

0.6 (0.4)

Diaphragm Vacuum Pumps

DIVAC 1.2
1.2 (0.7)

Ultimate pressure

mbar (Torr)

≤ 100 (≤ 75)

Max. exhaust back pressure (absolute)

mbar (Torr)

2000 (1500)

DIVAC 2.2
2.0 (1.2)

1

Pump heads
Connections
Inlet (suction side)
Exhaust (delivery side)
Thread

DN
DN
G

Noise level acc. to DIN 45 635 Part 13, approx.

dB(A)

G 1/8"

Hose nozzle ID 10
Hose nozzle ID 10
G 1/4"

G 1/4"

47

50

52

Permissible gas admission temperature, approx. °C (°F)

+ 5 bis + 40 (+41 to +104)

Permissible ambient temperature, approx.

°C (°F)

+ 5 bis + 40 (+41 to +104)

Voltage / nominal frequency (1 ph. motor)
Earthed plug
NEMA plug
NEMA plug

V/Hz
V/Hz
V/Hz

C04

230 ± 10% / 50
115 ± 10% / 60
100 ± 10% / 50/60
44

Protective class

IP

Motor power *)

W

100

130

180

Current consumption *)

A

0.6

0.9

1.35

Motordrehzahl
50 Hz
60 Hz
Dimensions (W *) x H *) x D), approx.
Weight, approx.

min-1
min-1

1500
1800

mm (in.)

256 x 146 x 187 (10.08 x 5.75 x 7.36)

268 x 159 x 207 (10.55 x 6.3 x 8.15)

297 x 171 x 226 (11.69 x 6.73 x 8.9)

kg (lbs)

5.9 (13.02)

7.1 (15.57)

10.3 (22.74)

Material
Pump head
Structured diaphragm
Valves
Nozzles

PTFE (Teflon)
PTFE coated
FFPM (Kalrez)
PVDF (Solef)

DIVAC 0.6

DIVAC 1.2

DIVAC 2.2

Diaphragm vacuum pump, 230 V, 50 Hz,
with 2.3 m (8 ft) power cord and earthed plug

Part No. 127 60

Part No. 127 61

Part No. 127 62

Diaphragm vacuum pump, 100 V, 50/60 Hz,
with 2.3 m (8 ft) power cord and NEMA plug

upon request

upon request

upon request

Diaphragm vacuum pump, 115 V, 60 Hz,
with 2.3 m (8 ft) power cord and NEMA plug

upon request

upon request

upon request

Spare partsparts kit consisting of
1 diaphragm, 2 gasket rings, 2 valve disks

Part No. 127 63

Part No. 127 64

Part No. 127 65

Part No. 200 650 25 (2x)

Part No. 200 650 26 (2x)

Part No. 200 650 26 (2x)

Ordering Information

Hose nozzles
(1 exhaust port and 2 inlet ports)
*)

for 230 V / 50 Hz version

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.07

Diaphragm Vacuum Pumps

Modular Diaphragm Pump System for the Chemical Laboratory

Dual-Stage Diaphragm Vacuum Pumps DIVAC 0.6 L, 1.2 L, 2.2 L
Typical Applications
Vacuum generation for
♦ Rotary evaporators
♦ Drying chambers
♦ Filtration units
♦ Distillation configurations
♦ Gel dryers

b1

l1

d
l2
h

b

l
Type

b

DIVAC 0.6 L
DIVAC 1.2 L
DIVAC 2.2 L

Dimensional drawing for the DIVAC 0.6 L, 1.2 L and 2.2 L

100
0

4

8

12
Time

16 min

98

140

10

G 1/8“

187

273

281

55

3.86

5.51

0.39

G 1/8“

7.36

10.75

11.06

2.17

mm

110

159

10

G 1/4“

207

304

312

59

in.

4.33

6.06

0.39

G 1/4“

8.15

11.97

12.28

2.32

mm

122

166

10

G 1/4“

226

334

341

59

in.

4.8

6.54

0.39

G 1/4“

8.9

13.15

13.43

2.32

1

2

10

10

C04.08

Torr

750

24

1

10

DIVAC 0.6 L
DIVAC 1.2 L
DIVAC 2.2 L

0

10

-1

10

0

10

2

4

6 8

1

2

10

10
Pressure

Curves of pump-down time of a 10 l vessel

l2

10

Pumping Speed

Pressure

Torr

200
0

l1

l / min

DIVAC 0.6 L
DIVAC 1.2 L
DIVAC 2.2 L

400

l

2

750

600

h

in.

0

mbar

l d (Turned out)

mm

10
1013

b1

3

mbar

10

Curves of pumping capacity

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Modular Diaphragm Pump System for the Chemical Laboratory

Technical Data
Max. pumping speed (atm.)

m3 · h-1 (cfm)

Diaphragm Vacuum Pumps

DIVAC 0.6 L

DIVAC 1.2 L

DIVAC 2.2 L

0.6 (0.4)

1.2 (0.7)

2.0 (1.2)

Ultimate pressure

mbar (Torr)

≤ 8 (≤ 6)

Max. exhaust back pressure (absolute)

mbar (Torr)

2000 (1500)

Pump heads

2

Connections
Inlet (suction side)
Exhaust (delivery side)
Thread

DN
DN
G

Noise level acc. to DIN 45 635 Part 13, approx.

dB(A)

G 1/8"

Hose nozzle ID 10
Hose nozzle ID 10
G 1/4"

G 1/4"

47

50

52

Permissible gas admission temperature, approx. °C (°F)

+ 5 bis + 40 (+41 to +104)

Permissible ambient temperature, approx.

°C (°F)

+ 5 bis + 40 (+41 to +104)

Voltage / nominal frequency (1 ph. motor)
Earthed plug
NEMA plug
NEMA plug

V/Hz
V/Hz
V/Hz

C04

230 ± 10% / 50
115 ± 10% / 60
100 ± 10% / 50/60

Protective class

IP

Motor power *)

W

90

120

245

Current consumption *)

A

0.6

0.7

1.8

Motor speed
50 Hz
60 Hz
Dimensions (W *) x H *) x D), approx.
Weight, approx.

44

min-1
min-1

1500
1800

mm (in.)

281 x 140 x 187 (11.06 x 5.51 x 7.36)

312 x 154 x 207 (12.28 x 6.06 x 8.15)

341 x 166 x 226 (13.43 x 6.54 x 8.9)

kg (lbs)

6.9 (15.2)

9.3 (20.5)

12.6 (27.8)

Material
Pump head
Structured diaphragm
Valves
Nozzles

Ordering Information

PTFE (Teflon)
PTFE coated
FFPM (Kalrez)
PVDF (Solef)

DIVAC 0.6 L

DIVAC 1.2 L

DIVAC 2.2 L

Diaphragm vacuum pump, 230 V, 50 Hz,
with 2.3 m (8 ft) power cord and earthed plug

Part No. 135 00

Part No. 135 06

Part No. 135 12

Diaphragm vacuum pump, 100 V, 50/60 Hz,
with 2.3 m (8 ft) power cord and NEMA plug

Part No. 135 02

Part No. 135 08

Part No. 135 14

Diaphragm vacuum pump, 115 V, 60 Hz,
with 2.3 m (8 ft) power cord and NEMA plug

Part No. 135 03

Part No. 135 09

Part No. 135 15

Spare parts set comprising
2 diaphragms, 4 gasket rings, 4 valve plates

Part No. 135 23

Part No. 135 24

Part No. 135 25

Hose nozzle kit consisting of
2 hose nippel, piping
*)

Part No. 200 650 05

Part No. 200 650 06

Part No. 200 650 0

for 230 V / 50 Hz version

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.09

Diaphragm Vacuum Pumps

Modular Diaphragm Pump System for the Chemical Laboratory

Dual-Stage Diaphragm Vacuum Pumps DIVAC 1.2 L AD, 2.2 L AD
The automatic drying system of this dual-stage
diaphragm pump enables problem-free pumping
of very damp and wet vapors.
With the automatic function, resulting liquid is
blown out of the pump head using individually
adjustable parameters, restoring the maximum
suction capacity. The vacuum in the recipient is
maintained during drying.

Typ
DIVAC 1.2 L AD
DIVAC 2.2 L AD

Dimensional drawing for the DIVAC 1.2 L AD und 2.2 L AD

mm
in.
mm
in.

b

b1

b2

b3

ld

(Turned out)

110
4.33
122
4.80

154
6.06
165
6.5

177
6.97
189
7.44

42
1.65
42
1.65

10
0.39
10
0.39

G 1/4“
G 1/4“
G 1/4“
G 1/4“

h

l

l1

l2

220 304 312 59
8.666 11.97 12.28 2.32
239 334 341 59
9.41 13.15 13.43 2.32

100

Pressure

mbar

Pumping speed

1013
DIVAC 2.2 L AD
DIVAC 1.2 L AD

600
400
200
0

0

4

min

8

l / min
10

1

0,1

Time

DIVAC 1.2 L AD
DIVAC 2.2 L AD
1

2

4

6 8

10

100

mbar

1000

Pressure
Curves of pump-down time of a 10 l vessel

C04.10

Curves of pumping capacity

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Modular Diaphragm Pump System for the Chemical Laboratory

Technical Data
Pumping speed, max. (Atm.)

m3 · h-1 (cfm)

Diaphragm Vacuum Pumps

DIVAC 1.2 L AD

DIVAC 2.2 L AD

1.2 (0.7)

2.0 (1.2)

Ultimate pressure

mbar (Torr)

≤ 10 (≤ 7.5)

Max. exhaust back pressure (absolute)

mbar (Torr)

2000 (1500)
2

Pump heads
Connections
Inlet (suction side)
Exhaust (delivery side)
Thread

hose nozzle ID 10
hose nozzle ID 10
G 1/4"

DN
DN
G

Noise level acc. to DIN 45 635 Part 13, ca.

dB(A)

50

52

Permissible gas admission temperature, max.

°C (°F)

+ 5 bis + 40 (+41 to +104)

Permissible ambient temperature, max.

°C (°F)

+ 5 bis + 40 (+41 to +104)

Voltage / nominal frequency (1 ph. motor)
Earthed plug
NEMA plug
NEMA plug

C04

230 ± 10% / 50
115 ± 10% / 60
100 ± 10% / 50/60

V/Hz
V/Hz
V/Hz

44

Protective class

IP

Motor power *)

W

120

245

Current consumption *)

A

0.7

1.8

Motor speed
50 Hz
60 Hz
Dimensions (W *) x H *) x D), approx.
Weight, approx.

min-1
min-1

1500
1800

mm (in.)

312 x 177 x 220 (12.28 x 6.97 x 8.66)

341 x 189 x 239 (13.43 x 7.44 x 9.41)

kg (lbs)

9.6 (21.2)

12.9 (28.48)

Material
Pump head
Structured diaphragm
Valves
Nozzles

PTFE (Teflon)
PTFE coated
FFPM (Kalrez)
PVDF (Solef)

DIVAC 1.2 L AD

DIVAC 2.2 L AD

Diaphragm vacuum pump 230 V, 50 Hz,
with 2.3 m power cord and earthed plug

Part No. 500 750

Part No. 500 755

Diaphragm vacuum pump 100 V, 50/60 Hz,
with 2.3 m power cord and NEMA plug

Part No. 500 751

Part No. 500 756

Diaphragm vacuum pump 115 V, 60 Hz,
with 2.3 m power cord and NEMA plug

Part No. 500 752

Part No. 500 757

Part No. 135 24

Part No. 135 25

Hose nozzle kit consisting of
2 hose nippel, piping

Part No. 200 650 06

Part No. 200 650 07

Accessories
Separating vessel on the delivery side
Neoprene hose, 10 mm ID
Base panel

Part No. 135 20
Part No. 200 650 02
Part No. 135 18

Part No. 135 20
Part No. 200 650 02
Part No. 135 19

Ordering Information

Spare parts kit consisting of
2 diaphragms, 4 gasket rings, 4 valve plates

*)

for 230 V / 50 Hz version

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.11

Diaphragm Vacuum Pumps

Modular Diaphragm Pump System for the Chemical Laboratory

Modular Laboratory Pump Concept
6

5

7

1

8
3

4

2

DIVAC system SCC 1.2 L (consisting of DIVAC module SC and DIVAC pump 1.2 L)

Advantages to the User

1

DIVAC 0.6 L, 1.2 L, 2.2 L

♦ Modular

2

Base plate

♦ Quiet-running

3

Separator intake side

♦ Compact

4

Separator exhaust side (only included with module SR)

♦ Environmentally friendly

5

High-performance condenser

♦ Resistant to chemicals

6

Vacuum controller NC 800

♦ Good ultimate vacuum

7

Gas ballast unit (optional)

♦ Reliable

8

Control unit

♦ Versions for different supply voltages
are available

C04.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Modular Diaphragm Pump System for the Chemical Laboratory

DIVAC SC System

Electrical Data
Power drawn
Vacuum controller NC 800
Fuses (2 each, slow-blow)
Control unit fuses (2 each, slow-blow)

Diaphragm Vacuum Pumps

W
A
A

100 V

115 V

230 V

14
6.3
6.3

14
6.3
6.3

14
3.15
3.15

C04

h
l
h

b

l

b1

Type
SR

b

b1

h

l

mm

199

227

260

312

in.

7.83

8.94

10.24

12.28

b2

l1

Type

____ SH
- - - - SC

Dimensional drawing for the DIVAC SR system

b
b1

b3

SH

mm

SC

mm

b

b1

b2

b3

h

l

l1

199

227

–

–

506

312

397

–

–

19.92 12.28 15.63

19

19

506

in. 7.83 8.94

Dimensional drawing for the DIVAC SH, SC systems

199

227

312

397

in. 7.83 8.94 0.75 0.75 19.92 12.28 15.63

Components for the modular DIVAC system
Or dering Information

DIVAC 0.6 L

DIVAC 1.2 L

DIVAC 2.2 L

Base plate for system mounting

Part No. 135 18

Part No. 135 18

Part No. 135 19

Separator (intake or exhaust side)

Part No. 135 20

Part No. 135 20

Part No. 135 20

High-performance condenser

Part No. 135 21

Part No. 135 21

Part No. 135 21

–

Part No. 135 27

Part No. 135 27

Part No. 500 760

Part No. 500 760

Part No. 500 760

Part No. 200 65 002

Part No. 200 65 002

Part No. 200 65 002

Gas ballast valve
Vacuum controller
90 - 260 V, 50/60 Hz
Neoprene hose, inside dia. 10 mm (0.39 in.)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.13

Diaphragm Vacuum Pumps

Modular Diaphragm Pump System for the Chemical Laboratory

Assemble your own pump system, selecting from the variety of modules available

Additional Ordering Information
When placing your order please also indicate the catalog number for the required pump (see section “Modular Laboratory
Pump Concept”)
Example: The DIVAC SH 0.6 L system comprises the DIVAC SH module (Part No. 135 50) and the DIVAC 0.6 L pump (Part No. 135 00)

Part No.
Module Item

SR

SH

SC

European
version

Comprises

1

Base plate and system mount

2

Separator, intake side

3

Separator, exhaust side

4

Hose connectors

1

Base plate and system mount

2

Separator, intake side

4

Hose connectors

5

High-performance condenser

1

Base plate and system mount

2

Separator, intake side

4

Hose connectors

5

High-performance condenser

6

Vacuum controller

7

Pump relief valve

8

Control unit (incl. cable)

USA/Japan
version

230 V, 50 Hz
Euro-plug

115 V, 60 Hz
100 V, 50/60 Hz
USA/Japan plug

135 40

135 40

135 50

135 50

135 60

upon request

5

4

7

6
4

8

AC

1

SR module

2

1

3

SH module

DIV

1

2

2

4

5

SC module

Note: The SR to SC sub-assemblies do not include the pump!

C04.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Modular Diaphragm Pump System for the Chemical Laboratory

Diaphragm Vacuum Pumps

N otes

C04

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.15

Diaphragm Vacuum Pumps

Dry Compressing Backing Pumps for Turbomolecular Pumps

DIVAC 0.8 T to 4.8 VT
Vacuum pumps for pure pumping and evacuation
of air and gases owing to oil-free operation.
The requirements regarding technology are ever
increasing. In the area of vacuum technology the
demand for a dry vacuum, i.e. a vacuum which is
free of oil and thus free of hydrocarbons, is
increasing more and more.
We are able to meet this requirement through our
dry compressing backing pumps for turbomolecular pumps.
These are ideally suited for all applications in the
rough and medium vacuum range where clean
media need to be pumped. But also for corrosive
media we have solutions for you.

C04.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Dry Compressing Backing Pumps for Turbomolecular Pumps

Diaphragm Vacuum Pumps

The structured diaphragm with its sealed surface
provides the basis for a long service life and a
low base pressure.

Structured diaphragm,
bottom side

Closed surface

C04

Structured diaphragm,
sectional view

Sealing rim

Diaphragm pump with structured diaphragm

Advantages to the User

Typical Applications

♦ Dry compressing, free of oil and hydrocarbons

♦ Low vibration levels through dynamic mass
balancing (in VT pumps)

♦ Backing pump for wide pressure range
turbomolecular pumps

♦ Matched to the turbomolecular pumps from
LEYBOLD (TW 70 to TW 1600)

♦ Lower maintenance costs and long
maintenance intervals through the use of
high-quality and well-proven components

♦ Masspectrometers

♦ Simple maintenance by staff of the customer

♦ Analyzes

♦ Favourable price-to-performance ratio

♦ For laboratory applications also with corrosive
media (DIVAC 3.6 TC only)

♦ Low ultimate pressure
♦ KF flange at the intake port
♦ Fully equipped with cable, switch (ON/OFF)
and plug
♦ Better performance and smaller size through
the use of structured diaphragms

♦ Uniform appearance
♦ Can be operated in any position

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

♦ Medical equipment

♦ General use for rough and fine vacuum
applications

C04.17

Diaphragm Vacuum Pumps

Dry Compressing Backing Pumps for Turbomolecular Pumps

DIVAC 0.8 T and 0.8 LT

DIVAC 0.8 T

DIVAC 0.8 LT

Direction of rotation
Direction of rotation

Dimensional drawing for the DIVAC 0.8 T

Dimensional drawing for the DIVAC 0.8 LT

Dimensional drawings are also available by way of .DXF files (sales@leyboldvakuum.com)

1
[m3 · h-1]

1
[m3 · h-1]
0,5

Pumping speed

Pumping speed

0,5

0,1
0,05

0,01

0,1
0,05

0,01
0,1

0,5

1

5

10

50

100

500

1000

0,1

0,5

1

5

10

[mbar abs.]

Pumping speed curve of the DIVAC 0.8 T

C04.18

Pressure

50

100

500

1000

[mbar abs.]

Pumping speed curve of the DIVAC 0.8 LT

Pressure

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Dry Compressing Backing Pumps for Turbomolecular Pumps

DIVAC 0.8 T

Technical Data
Pumping speed, max. (Atm.)

m3/h (cfm)

Ultimate pressure (absolute)

mbar (Torr)

Max. exhaust back pressure (absolute)

mbar (Torr)

DIVAC 0.8 LT
0.77 (0.45)

≤ 3 (≤ 2.25)

≤ 0.5 (≤ 0.38)
2000 (1500)

2

Pump heads
Connections
Inlet (suction side)
Exhaust (delivery side)
Thread
Noise level acc. to DIN 45 635 Part 13, ca.

Diaphragm Vacuum Pumps

16 KF
Silencer
G 1/8"

DN
DN
G
dB(A)

4

49

53

Permissible gas admission temperature, max.

°C (°F)

+ 5 to + 40 (+ 41 to +104)

Permissible ambient temperature, max.

°C (°F)

+ 5 to + 40 (+ 41 to +104)

Voltage / nominal frequency (1 ph. motor)
Earthed plug
NEMA plug

V/Hz
V/Hz

198-264 / 50/60
90-127 / 50/60

C04
230/50 ± 10%
115/60 ± 10%

44

Protective class

IP

Motor power

W

50

80

A

0.4

0.5

Current consumption

min-1

Nominal speed, approx. (50/60 Hz)
Dimensions (W x H x D), approx.
Weight, approx.

1500/1800

mm (in.)

285 x 150 x 150 (11.22 x 5.9 x 5.9)

332 x 150 x 150 (13.07 x 5.9 x 5.9)

kg (lbs)

5.9 (13.02)

7.5 (3.4)

Material
Diaphragm
Valves
Pump head

Ordering information
Diaphragm, vacuum backing pumps
for turbomolecular pumps
including 1 m long mains cord, country-specific plug,
silencer 1), rubber feet, as well as ON/OFF switch
198-264 V / 50/60 Hz
090-127 V / 50/60 Hz
230 V / 50 Hz ± 10%
115 V / 60 Hz ± 10%

Neoprene
EPDM
Aluminum

DIVAC 0.8 T

DIVAC 0.8 LT

Part No. 127 80
Part No. 127 81

–
–

–
–

Part No. 127 83
Part No. 127 84

Spare parts kit consisting of
2 diaphragms, 4 valves, 4 valve gaskets,
4 gaskets

Part No. 127 95

Part No. 127 95 (2x)

Exhaust silencer

Part No. 127 98

Part No. 127 98

T = For use in connection with Turbomolecular pumps
L = Very low ultimate pressure (Low pressure)
V = Low vibration levels (Vibration less)
C = Chemical (Corrosive)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.19

Diaphragm Vacuum Pumps

Dry Compressing Backing Pumps for Turbomolecular Pumps

DIVAC 2.5 T and 2.5 VT

DIVAC 2.5 T

DIVAC 2.5 VT

Direction of rotation

Direction of rotation

Dimensional drawing for the DIVAC 2.5 VT

Dimensional drawing for the DIVAC 2.5 T

Dimensional drawings are also available by way of .DXF files (sales@leyboldvakuum.com)

1

1

Pumping speed

3
[m3 · h-1]

Pumping speed

3
[m3 · h-1]

0,5

0,1
0,05

0,5

0,1
0,05

0,01

0,01
1

2

5

10

50

100

500

1000

1

2

5

10

50

[mbar abs.]

Pumping speed curve of the DIVAC 2.5 T

C04.20

Pressure

100

500

1000

[mbar abs.]

Pumping speed curve of the DIVAC 2.5 VT

Pressure

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Dry Compressing Backing Pumps for Turbomolecular Pumps

DIVAC 2.5 T

Technical Data

DIVAC 2.5 VT

Pumping speed, max. (Atm.)

m3/h (cfm)

2.57 (1.51)

Ultimate pressure (absolute)

mbar (Torr)

≤ 3 (≤ 2.25)

Max. exhaust back pressure (absolute)

mbar (Torr)

2000 (1500)
2

Pump heads
Connections
Inlet (suction side)
Exhaust (delivery side)
Thread
Noise level acc. to DIN 45 635 Part 13, ca.

Diaphragm Vacuum Pumps

16 KF
Silencer
G 1/4"

DN
G
dB(A)

49

53

Permissible gas admission temperature, max.

°C (°F)

+ 5 to + 40 (+ 41 to +104)

Permissible ambient temperature, max.

°C (°F)

+ 5 to + 40 (+ 41 to +104)

Voltage / nominal frequency (1 ph. motor)
Earthed plug
NEMA plug

230/50 ± 10%
115/60 ± 10%

V/Hz
V/Hz

Protective class

IP

54

Motor power

W

300

A

1.4

Current consumption

min-1

Nominal speed, approx. (50/60 Hz)
Dimensions (W x H x D), approx.
Weight, approx.

1500/1800
336 x 262 x 172 (13.23 x 10.31 x 6.77)

mm (in.)
kg (lbs)

C04

12.9 (5.84)

Material
Diaphragm
Valves
Pump head

13.1 (5.93)
EPDM
Neoprene
Aluminum

DIVAC 2.5 T

DIVAC 2.5 VT

Part No. 127 86
Part No. 127 87

Part No. 127 89
Part No. 127 90

Spare parts kit consisting of
2 diaphragms, 4 valves, 4 valve gaskets,
4 gaskets

Part No. 127 96

Part No. 127 96

Exhaust silencer

Part No. 127 99

Part No. 127 99

Ordering information
Diaphragm, vacuum backing pumps
for turbomolecular pumps
including 1 m long mains cord, country-specific plug,
silencer 1), rubber feet, as well as ON/OFF switch
230 V / 50 Hz ± 10%
115 V / 60 Hz ± 10%

T = For use in connection with Turbomolecular pumps
L = Very low ultimate pressure (Low pressure)
V = Low vibration levels (Vibration less)
C = Chemical (Corrosive)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.21

Diaphragm Vacuum Pumps

Dry Compressing Backing Pumps for Turbomolecular Pumps

DIVAC 3.6 TC and 4.8 VT

DIVAC 3.6 TC

DIVAC 4.8 VT

Direction of rotation
Direction of rotation

Dimensional drawing for the DIVAC 3.6 TC

Dimensional drawing for the DIVAC 4.8 VT

Dimensional drawings are also available by way of .DXF files (sales@leyboldvakuum.com)

[m3 · h-1]

[m3 · h-1]

1

1

Pumping speed

5

Pumping speed

5

0,5

0,1
0,05

0,1
0,05

0,01
1

2

5

10

50

100

500
[mbar abs.]

Pumping speed curve of the DIVAC 3.6 TC

C04.22

0,5

Pressure

1000

0,01
1

2

5

10

50

100

500

1000

[mbar abs.]

Pumping speed curve of the DIVAC 4.8 VT

Pressure

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Dry Compressing Backing Pumps for Turbomolecular Pumps

Technical Data

Diaphragm Vacuum Pumps

DIVAC 3.6 TC

DIVAC 4.8 VT

3.6 (2.12)

4.8 (2.83)

Pumping speed, max. (Atm.)

m3/h (cfm)

Ultimate pressure (absolute)

mbar (Torr)

≤ 2 (≤ 1.5)

Max. exhaust back pressure (absolute)

mbar (Torr)

2000 (1500)
2

Pump heads
Connections
Inlet (suction side)

DN

Exhaust (delivery side)
Thread

G

hose nozzle DN 10 +
1m long chemical hose
Hose nozzle DN 10
G 3/8"

16 KF
Silencer
G 3/8"

50

55

Noise level acc. to DIN 45 635 Part 13, approx.

dB(A)

Permissible gas admission temperature, max.

°C (°F)

+ 5 to + 40 (+ 41 to +104)

Permissible ambient temperature, max.

°C (°F)

+ 5 to + 40 (+ 41 to +104)

Voltage / nominal frequency (1 ph. motor)
earthed plug
NEMA plug

230/50 ± 10%
115/60 ± 10%

V/Hz
V/Hz

54

Protective class

IP

Motor power

W

220

350

Current consumption

A

1.6

2.6

min-1

Nominal speed, approx. (50/60 Hz)
Dimensions (W x H x D), approx.
Weight, approx.

329 x 277 x 205 (12.95 x 10.91 x 8.07)

324 x 273 x 220 (12.76 x 10.75 x 8.66)

kg (lbs)

14.3 (6.48)

18.0 (8.15)

PTFE (Teflon)
PTFE coated
FFPM (Kalrez)

EPDM
Viton
Aluminum

DIVAC 3.6 TC

DIVAC 4.8 VT

Part No. 500 210
Part No. 500 211
Part No. 500 212

Part No. 127 92
Part No. 127 93

Part No. 500 215

Part No. 127 97

–

Part No. 127 94

Part No. 500 214

–

Ordering information
Diaphragm, vacuum backing pumps
for turbomolecular pumps
including 1 m long mains cord, country-specific plug,
silencer 1), rubber feet, as well as ON/OFF switch
as well as ON/OFF switch
230 V / 50 Hz ± 10%
115 V / 60 Hz ± 10%
100 V / 50/60 Hz
Spare parts kit consisting of
2 diaphragms, 4 valves, 4 valve gaskets,
4 gaskets 2)
Exhaust silencer
Hose nippel 3/8" PVDF
2)

1500/1800

mm (in.)

Material
Diaphragm
Valves
Pump head

1)

C04

–

For the DIVAC 3.6 TC hose nozzle instead of silencer
Not required for DIVAC 3.6 TC

T = For use in connection with Turbomolecular pumps
L = Very low ultimate pressure (Low pressure)
V = Low vibration levels (Vibration less)
C = Chemical (Corrosive)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C04.23

Diaphragm Vacuum Pumps

C04.24

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

S CREW Line

C05

Dry Compressing Screw Vacuum Pump
for Industrial Applications

SCREWLine SP630

Contents

Dry Compressing Screw Vacuum Pump
General

SCREWLine SP630 Dry Compressing Screw Vacuum Pump . . . . . . . . . . . . . . . . . . . . . . . . . C05.03

Products
SCREWLine SP630 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C05.04

Accesories
Vacuum Pump Oils . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C05.07

C05.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Dry Compressing Screw Vacuum Pump

Dry Compressing Screw Vacuum Pump S CREWLine
Principle of Operation
The ScrewLine is a dry compressing vacuum
pump, the operation of which is based on the
screw principle.
The pump chamber is formed by two synchronised displacing rotors and the housing in which
the rotors are accommodated. Owing to the
opposing direction of rotation of the rotors, the
chambers “move” continuously from the inlet to
the exhaust side (see figure below) so that a lowpulsation gas flow is produced. The ScrewLine
uses a minimum of parts since only one pair of
rotors is needed to compress the gas in several
stages. This considerably simplifies any maintenance and servicing work.
Pump chamber housing

A further advantage of the cantilevered arrangement is that the pump chamber is easily accessible without having to disassemble any bearings.
This is important in the case of applications
which are likely to contaminate the pump.
The figure below shows the ScrewLine SP630
with covers removed and equipped with the
optionally available silencer.
Pump chamber housing

Motor and gear housing

Intake flange

This is achieved by the cantilevered rotors and
also that all parts of the pump which need to be
accessed when making connections and for running maintenance are accessible from one side,
resulting in a high degree of flexibility as to positioning the pump. Maintenance will in most applications, be limited to a regular check on the
pump (visual inspection) and an annual change
of the gear oil and the oil filter. The filter is readily
accessible and can be replaced when changing
the oil. Also the air/oil heat exchanger may be
easily cleaned by blowing out the radiator with
compressed air.
The ScrewLine offers to the user a high degree of
flexibility. The standard universal flanges ensure
easy integration into the system, and with the
accessories available for the ScrewLine, the
pump may be optimally adapted to the specific
requirements of differing applications.

Direction of rotation

Radiator housing
Radiator
Exhaust flange

Air/oil heat exchanger

Silencer

SCREWLine SP630 without covers

Rotors

Direction of pumping action

Operating principle of the ScrewLine SP630 screw vacuum pump

The ScrewLine is relatively insensitive to foreign
materials, since the gas flow does not have to be
deflected several times from stage to stage as is
the case in other types of dry compressing
pumps.
This ensures a high uptime of the pump on industrial processes.
In dry compressing vacuum pumps it needs to be
observed that shaft sealing rings and bearings on
the vacuum side of a pump can always cause
problems. On the one hand lubricants may enter
into the vacuum process from the bearings and
on the other hand aggressive process media
endanger the bearings and the gaskets.
In the ScrewLine the two shaft seals are noncontacting and almost free of wear. In standard
applications no seal gas is required. However, a
seal gas supply may optionally be connected to
the seals if the process application should require
this. Owing to the cantilevered rotors of the
ScrewLine, a potential source which might cause
a breakdown of the bearings on the intake side
has been completely eliminated.

The ScrewLine SP630 is driven by an integrated
three-phase asynchronous motor driving one of
three shafts. This shaft also drives an oil supply
pump, a fan and via a gear the two rotor shafts.
The oil pump pumps the oil from the oil sump
through a filter and the oil/air heat exchanger into
the rotors and back into the oil sump.
Besides the integrated oil cooling arrangement
for the rotors, the entire machine is air cooled.
The fan sucks in the cooling air through the
oil/air heat exchanger and injects the pre-warmed
air via the motor’s housing into the pump chamber housing.

Oil filter

Covers of the cooler removed for access to the oil filter and the heat exchanger
of the SCREWLine SP630

This cooling arrangement ensures a close correlation of all components temperatures so that
these may adapt themselves automatically to the
prevailing operating condition.
During the development of the ScrewLine pump
special emphasis was placed on a maintenancefriendly servicing concept.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C05.03

C05

Produkte

Dry Compressing Screw Vacuum Pump

The New Dry Compressing Screw Vacuum Pump for Industrial Applications
The dry compressing screw vacuum pump
ScrewLine SP630 was developed for the special
requirements of industrial applications.
The innovative design allows this pump to be
used where a reliable, compact and low-maintenance vacuum solution is required.

SCREWLine SP630

h1

l

l6

a

a1

l5

h3

h

h2
h4
h5

l4

l3
l2

a

l1
mm
in.

a
b2
b

b1

b4

mm
in.

b3
l7

mm
in.

a1

> 500 > 300
> 19.69 > 11.81

b

b1

b2

b3

b4

555
21.85

360
14.17

276
10.87

380
14.96

439
17.28

h

h1

h2

h3

h4

h5

l

806
31.73

636
25.04

698
27.48

450
17.72

248
9.76

68
2.68

1220
48.03

l1

l2

l3

l4

l5

l6

l7

1626
64.02

703
27.68

880
34.65

157
6.18

514
20.24

189
7.44

250
9.84

Dimensional drawing for the SCREWLine SP630

C05.04

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Dry Compressing Screw Vacuum Pump
Advantages to the User

Typical Applications
♦ Good compatibility with particles and vapours
(gas ballast is optional)

♦ Low cost of ownership
- No purge gas and no cooling water is
required in standard applications
- Low power consumption
♦ Cost-wise optimized product
- Basic model and accessories allows the
pump to be equipped according to
requirements
♦ Minimized downtimes, maximum availability
- Highly rugged due to the application
oriented design
♦ Low waste disposal costs
- No contaminated waste oil is produced
♦ Rugged and reliable
- No bearings on the intake side

♦ Long maintenance intervals and easy
servicing
- Only an annual change of the gear oil is
necessary
- Simple and quick access to all parts
which need to be serviced
- Cleaning of the rotors is possible on-site

♦ Industrial furnaces
(hardening, annealing, sintering,
carburizing, melting and many more)
♦ Coating technology
♦ Metallurgical systems
♦ Packaging technology
♦ Drying processes

♦ Highly flexible
- The modular concept allows this pump to
adapt the pumping speed up to 2000 m3/h
in combination with RUVAC Roots pumps
- The universal flanges on the pump permit
simple integration and flexible adaptation
to your system
♦ High pumping speed at low base pressure

10-3

103

10-2

10-1

1

10

C05

Torr

750

1000

750

m3/h

mbar

500
800

Torr

102

1

100

10-1
0.0

10-1
0.2

0.4

0.6

0.8

1.0

min

1.2

Pump Down Time
Vessel volume: 1.0 m3

Pumping Speed

Pressure

700

10

101

600

cfm

500
400
300
200

100

100

50

0
10-3

10

-2

10

-1

10

0

Pressure

Pump down curve for the SCREWLine SP630

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

10

1

10

2

mbar

103

Pumping speed diagram for nitrogen for the SP630

C05.05

Dry Compressing Screw Vacuum Pump
SCREWLine SP630

Technical Data

50 Hz

60 Hz

m3 x h-1 (cfm)

630 (371)

Ultimate total pressure
without gas ballast

mbar (Torr)

≤ 0.01 (≤ 0.0075)

Intake pressure limits
Continouos operation

mbar (Torr)

1030 (773)

Pumping speed, max.

Air

Cooling
Power supply

Motor
Nominal power
Nominal voltage (∆∆ / ∆ / ± 10%)
Max. ambient temperature

∆∆
∆

52 A at 190 V - 210 V ± 5%
26 A at 380 V - 420 V ± 5%

kW (hp)
V

15 (20)
200 / 400

°C (°F)

+40 (+104)

Type of protection
Lubricant filling (gear chamber)
Noise level 1)

IP

55

l

12 – 15

dB(A)

≤ 75

Connections
Intake and Exhaust

Weight, approx.
Dimensions (W x D x H)

upon request

DN 100 / PN 6 (EN 1092-2)
DN 100 / PN 10 (EN 1092-2)
NPS 4 Class 150 (in accordance with ASME B 16.5-1996)
DN 100 ISO-K (in accordance with ISO 1609-1986 (E))
kg (lbs)

530 (1166)

mm (in.)

1630 x 660 x 880 (64 x 26 x 35)

Ordering Information
SCREWLine 630

52 A at 190 V - 240 V ± 5%
26 A at 380 V - 480 V ± 5%

SCREWLine SP630
50 Hz

60 Hz

Part No. 117 001 *)

Part No. 117 002 *)

Exhaust silencer

Part No. 119 001 *)

Roots pump adapter
for RUVAC 2001
Dust filter 2)
1)
2)

*)

Part No. 119 021 *)
Part No. 951 72

With closed exhaust line or exhaust silencer
For information on the dust filter please refer to Product Section C02, Chapter “Accessories”
Available from July 2003

C05.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Dry Compressing Screw Vacuum Pump

Vacuum Pump Oils
Lubricating oils for vacuum pumps must meet
tough requirements. They need to have excellent
lubricating properties and resist cracking when
subjected to mechanical loads.
The vacuum pump oil ANDEROL® 555 listed in
the following has undergone extensive testing
under application conditions in our own laboratories and has been fully qualified for use in the
ScrewLine pumps.
If other types of oil shall be used please get in
touch with LEYBOLD first.
We therefore recommend the exclusive use of
vacuum pump oils fully qualified by Leybold so
as to ensure optimum performance of the Leybold vacuum pumps and also to ensure optimum
oil change intervals.
Under vacuum conditions lubricating oils, especially those with additives may behave quite differently than expected. Additives may adversely
affect the attainable ultimate pressure and may
react with the media being pumped.

The oils given in the following belong to the
group of synthetic oils:

For these reasons please understand that we
must make our warranty commitment dependent
on the use of oils which have been qualified by
us. Damages caused by the use of not suitably
qualified lubricating oils are not covered by our
warranty.

Ester oils

Lubricant Types
Synthetic Oils
Synthetic oils are produced by a chemical reaction. The group of synthetic oils includes liquids
differing widely as to their chemical structure and
composition. Correspondingly their physical and
chemical properties differ considerably. Synthetic
oils are used in those cases where special properties of the oil are required which can not be
fulfiled by mineral oils.

Ester oils are organic compounds which excel
especially through their high thermal resistance
to cracking compared to mineral oils. Chemical
resistance is generally quite good, but will
depend on the type of ester oil. Elastomer compatibility and resistance against hydrolysis are
not so good compared to mineral oils.

Polyalphaolefin (PAO) Oils
Polyalphaolefin oils are synthetic hydrocarbons
which are paraffin like, but have a uniform structure. Thermal and chemical resistance is better
compared to mineral oils. Elastomer compatibility
and resistance against hydrolysis are comparable
to mineral oils.

For all lubricants in our line of products you may obtain Safety Data Sheets from the Dept. Technical
Support in Cologne.

Application Data

ANDEROL® 555
Diester oil

Type of oil
Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Suited
Conditionally suited
Not suited

Technical Data
Viscosity
at 040 °C (104 °F)
at 100 °C (212 °F)
Flash point
Vapor pressure
at 020 °C (68 °F)
at 100 °C (212 °F)

ANDEROL® 555

mm2/s (= cSt)
mm2/s (= cSt)

250 (482)

°C (°F)

7 x 10-5 (5.25 x 10-5)
1.5 x 10-3 (1.1 x 10-5)

mbar (Torr)
mbar (Torr)

Density at 15 °C (59 °F)
Pour point

94
9

0,96

g/ml
°C (°F)

-42 (-44)

g/mol

530

Middle molecular weight

Or dering Information

Maintenance Kit for changing the Gear Oil

Maintenance kit Stage 1, SP630 for changing the gear oil
15 l ANDEROL® 555, oil filter cartridge and gasket

Part No. EK110000792

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
ANDEROL® is a trademark of ANDEROL BV

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C05.07

C05

Dry Compressing Screw Vacuum Pump

C05.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

E and DK

C06

Rotary Piston Vacuum Pumps
Single- and two-stage, oil-sealed,
200 - 250 m3 x h-1 (117.8 - 147 cfm)

Rotary Piston Vacuum Pumps

Contents
General
Applications and Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.03
Application and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.03

Products
Single-Stage Rotary Piston Vacuum Pump E 250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.04
Two-Stage Rotary Piston Vacuum Pump DK 200. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.06

Accessories
Global Versions
Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.08
Exhaust Filter Box AFK 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.09
Oil Filter Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.10
Oil Control Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.10
Condensate Separator AK 100-250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.11
Exhaust Filter AF 100-250 A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.11
Dust Filter FS 100-250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.12
Dust Separator AS 100-250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.13
Versions for the North and South American Continents
Oil Filtering System OF1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.14
Oil Filtering System OF3000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.16
Vibration Absorber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.17
Condensate Separator AK 100-250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.18
Exhaust Filter AF 100-250 A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.18

Miscellaneous
Vacuum Pump Oils . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.19
60 Hz Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.22

C06.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Rotary Piston Vacuum Pumps

Applications and Operation
Exhaust box
Gas ballast
actuator
Oil level glass

Dirt trap

Exhaust valve

Intake port

Oil channel
Shaft
Eccentric
Rotary piston

Sliding vane
Hinge bar
Cooling fins
Housing

Functional diagram of a rotary piston vacuum pump

Advantages to the User
♦ Gas ballast facility
♦ Easy maintenance

♦ Air cooling makes the pump environmentallyfriendly and economic
♦ Clear design and service-friendly due to the
modular design

C06

Technical Note
♦ By installing a filter, the oil may be cleaned
simultaneously

♦ Good ultimate pressure with and without gas
ballast
♦ High pumping speed at low intake pressures

50

DK

♦ Very smooth operation due to dynamically
balanced masses

E2

♦ Tolerant and rugged, due to non-contact
rotary piston within the pump chamber

Manufacture of semiconductors

♦

♦

Coating

♦

♦

Chemistry

♦

♦

Pu

♦ Reliable continuous operation

20

s
mp

♦ High water vapor tolerance

0

♦ Compact design with flange mounted motor

Application

Metallurgy

♦

♦

♦ Separate oil filling for the gear protects the
gear against contaminated pump oil

Electrical engineering

♦

♦

Mechanical engineering

♦

♦

♦ Oil is used for sealing, lubrication and cooling

Backing pump for a Roots vacuum pump
in diffusion pump systems

♦

♦

♦ A built-in anti-reverse lock prevents incorrect
rotation of the piston and also stops it being
pulled back when the pump is switched off
while under vacuum

Accessories

Page

AFK Exhaust Filter Box

C06.09

♦

♦

Oil Filter Unit

C06.10

♦

♦

Oil Control Unit

C06.10

♦

♦

AK Condensate Separator

C06.11/18

♦

♦

AF Exhaust Filter

C06.11/18

♦

♦

FS Dust Filter

C06.12

♦

♦

AS Dust Separator

C06.13

♦

♦

Oil Filtering System OF1000

C06.14

♦

♦

Oil Filtering System OF3000

C06.16

♦

♦

Vibration Absorber

C06.17

♦

♦

Balancing the masses within a rotary piston vacuum pump:
Eccentric shaft, 2 pistons and toothed wheel

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C06.03

250 m 3 x h -1 (147.3 cfm)

Rotary Piston Vacuum Pumps

Single-Stage Rotary Piston Vacuum Pump E 250

Typical Applications

Supplied Equipment

♦ Chemical, metallurgical and electronic vacuum
processes

♦ With DN 65 DIN flanges on the intake and
exhaust sides for direct connection of
DN 63 ISO-K flange components

♦ Impregnating, degassing and drying processes in experimentation systems, in drying
cabinets, extrusion etc.
♦ Pressure range down to 4 x 10-2 mbar
(2.4 x 10-2 Torr) without gas ballast or to
5 x 10-1 mbar (3 x 10-1 Torr) with gas ballast

♦ Ready for operation, complete with oil filling
♦ Special models for different motor voltages,
motor frequencies and other protection class
ratings are available.
Details on these upon request.

♦ Backing pump for Roots vacuum pumps at
intake pressure down to 10-3 mbar
(0.75 x 10-3 Torr)

10

3

750
Torr

mbar

Pressure

10

10

e

102

2

k

10

1

b2

f
l

1

DN1

g

10

DN

100

0
10 8
6
4

h

E 250

2
-1

10-1

0

1

2

3

Without gas ballast

4

5

6

7

h2

8 min 10

h1

Time

h3

With gas ballast

Pumpdown characteristic of a 1000 l vessel for the E 250 rotary piston
vacuum pump (60 Hz curves at the end of the section)

10-2 10-1
103

100

101

102

Pumping speed

m3 x h-1
10

b3

2

a2

103 Torr 75000
500
E 250
cfm
100
50

mm
in.

d

a1

DN

DN1

63 ISO-K
63 ISO-K

63 ISO-K
63 ISO-K

a

a 1)

a1

b1

b

a2

b

b1

b2

b3

ld

e

f

g

h

h1

h2

30

h3

k

l

1190 780 30 340 140 202 52 14 777 750 65 740 475 636 295 337 290
4.17 2.73 1.05 1.19 0.49 0.71 0.18 0.05 2.72 2.63 0.23 2.59 1.66 2.23 1.03 1.78 1.02

10
5

1018
6
4
2

100 2 4 6 8
10-2 10-1

1
100

without gas ballast
with gas ballast

101 102
Pressure

103 mbar 105

Pumping speed characteristic of the E 250 rotary piston vacuum pump
(60 Hz curves at the end of the section)

C06.04

Pump flanges to DIN 2501 with sealing disc and collar flange for the connection of ISO-K (KF) components
1)

Only for the motor which is supplied as standard

Dimensional drawing for the single-stage rotary piston vacuum pump E 250

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

250 m 3 x h -1 (147.3 cfm)

E 250

Technical Data

50 Hz

60 Hz

Nominal pumping speed 1)

m3 x h-1 (cfm)

290 (170.8)

Pumping speed 1)

m3 x h-1 (cfm)

250 (147.3)

Ultimate partial pressure without gas ballast 1) mbar (Torr)
Water vapour tolerance 1)

< 4x 10-2 (< 2.4 x 10-2)

mbar (Torr)

Average noise level to DIN 45 635 2)

60 (45)

dB(A)

Mains voltage 3-ph.
Motor power at
220 / 380 V, 50 Hz
220-230 / 460 V, 50 Hz
200-230 V / 460 V, 60 Hz

V

< 76
230/400

kW (hp)
kW (hp)
kW (hp)

208-230/460

5.5 (7.5)
5.5 (7.5)
5.5 (7.5)

Nominal motor speed

rpm

Speed of the pump

rpm

540

IP

54

Motor protection
Oil filling

1500

1800

l (qt)

8.4 (8.9)

kg (lbs)

375 (827)

Intake port

DN

63 ISO-K

Exhaust port

DN

63 ISO-K

Weight

Rotary Piston Vacuum Pumps

Ordering Information
Single-stage rotary piston vacuum pump
E 250, with 50 Hz-motor 3)
(220 / 380 V +/- 10%)
E 250, with 460 V/50 Hz motor 3)
(220-230 V / 460 V +/- 10%)
E 250, with 460 V/60 Hz motor 3), *)
(200-230 V / 460 V +/- 10%) USA version
E 250, without motor, with 50 Hz gear 3) 4)

E 250

Part No. 105 36
Part No. 895 08
Part No. 895 09
Part No. 166 37

Sealing kit, pump

Part No. 192 63

Vibration absorbing metal feet

Part No. 101 55

SECUVAC valve
200-230 V, 50/60 Hz
115 V, 50/60 Hz

Part No. 215 207
Part No. 215 206

ANSI adaptor
1)
2)
3)
4)

*)

C06

upon request

To DIN 28 400 and following numbers
Operated at ultimate pressure without gas ballast, free field measurement at a distance of 1 m (3.5 ft). When fitting accessories, for example AFK2, the noise level may change by 2 to 3 dB(A)
For operation at a different frequency, the gear will have to be exchanged. Please state the main frequency and connection (star or delta) in your order
The maximum speed must not exceed 1,500 rpm at 50 Hz. The motor rating must be at least 5 kW (6.8 hp)
Continuous operation from 60 mbar (45 Torr)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C06.05

200 m 3 x h -1 (117.8 cfm)

Rotary Piston Vacuum Pumps

Two-stage Rotary Piston Vacuum Pump DK 200

Typical Applications

Supplied Equipment

♦ For particularly low ultimate pressures

♦ With DN 65 DIN flanges on the intake and
exhaust sides for direct connection of
DN 63 ISO-K flange components

♦ High vacuum stage with degassed oil from a
separate oil reservoir
♦ For all chemical, metallurgical and electronic
vacuum processes in the pressure range down
to 5 x 10-4 mbar (3 x 10-4 Torr) without gas
ballast and 4 x 10-3 mbar (2.4 x 10-3 Torr) with
gas ballast

♦ Ready for operation, complete with oil filling
♦ Special models for different motor voltages,
motor frequencies and other protection class
ratings available

♦ Backing pump for Roots vacuum pumps
♦ Use as backing pump in pump systems in
connection with diffusion, booster-type
diffusion and vapor pumps

10

3

750

e
Torr

Pressure

mbar
1

101

0

100

-1

10-1

10
10
10

DK 200
10

b2

f

DN1

g

1

2

3

Without gas ballast

4

5

6

7

h2
h1

8 min 10

Time

h3

With gas ballast

Pumpdown characteritics of a 1000 l vessel for the DK type rotary piston
vacuum pump (60 Hz curves at the end of the section)

10-4 10-3 10-2 10-1
103
3

100

-1

m xh
Pumping speed

DN

h

10-3
0

b3

l

10-2

-2
8
6
4
2
-3

10

k

102

a2

Torr 750
500
cfm
DK 200
100
50

101

10
5

1018
6
4

DN
mm
in.

1

63 ISO-K
63 ISO-K

DN1

a 1)

63 ISO-K 1190
63 ISO-K 4.17

b

a
a1

b
a2

b

b1

b2

b3

ld

e

f

g

h

h1

h2

30
1

h3

k

l

780 30 340 140 202 52 14 777 750 65 740 475 636 295 337 290
2.73 1.05 1.19 0.49 0.71 0.18 0.05 2.72 2.63 0.23 2.59 1.66 2.23 1.03 1.78 1.02

Pump flanges to DIN 2501 with sealing disc and collar flange for the connection of ISO-K (KF) components
1)

2

100 2 4 6 8
10-4 10-3 10-2 10-1 100
without gas ballast Pressure

d

a1

Only for the motor which is supplied as standard

101 mbar 103

with gas ballast

Pumping speed characteristic of the DK rotary piston vacuum pump
(60 Hz curves at the end of the section)

C06.06

Dimensional drawing for the DK 200 two-stage rotary piston vacuum pump

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

200 m 3 x h -1 (117.8 cfm)

DK 200

Technical Data

50 Hz

60 Hz

Nominal pumping speed 1)

m3 x h-1 (cfm)

225 (132.5)

Pumping speed 1)

m3 x h-1 (cfm)

200 (117.8)
< 5 x 10-4 (< 3 x 10-4)

Ultimate partial pressure without gas ballast 1) mbar (Torr)
Water vapour tolerance 1)

26 (19.5)

mbar (Torr)

Average noise level to DIN 45 635 2)

< 76

dB(A)

Main voltage
Motor power at
220 / 380 V, 50 Hz
200-230 V / 380 V, 60 Hz

V

230/400/3/50

208-230/460/3/60

5.5 (7.5)
5.5 (7.5)

kW (hp)
kW (hp)
1500

1800

Nominal motor speed

rpm

Speed of the pump

rpm

540

IP

54

Motor protection

l (qt)

4.4 (4.6)

kg (lbs)

375 (827)

Intake port

DN

63 ISO-K

Exhaust port

DN

63 ISO-K

Oil filling
Weight

Rotary Piston Vacuum Pumps

Ordering Information
Two-stage rotary piston vacuum pump
DK 200, with 50 Hz motor 3)
(220 / 380 V +/- 10%)
DK 200, with 60 Hz motor 3), *)
(200-230 V / 460 V +/- 10%) USA version
DK 200, without motor, 50 Hz gear 3) 4)

DK 200

Part No. 111 16
Part No. 895 10
Part No. 166 17

Sealing kit, pump

Part No. 192 63

Vibration absorbing metal feet

Part No. 101 55

SECUVAC valve

Part No. 105 62

ANSI adaptor
1)
2)
3)
4)

*)

C06

upon request

To DIN 28 400 and following numbers
Operated at ultimate pressure without gas ballast, free field measurement at a distance of 1 m (3.5 ft). When fitting accessories, for example AFK2, the noise level may change by 2 to 3 dB(A)
For operation at a different frequency, the gear will have to be exchanged. Please state the main frequency in your order
The maximum speed must not exceed 1,500 rpm at 50 Hz. The motor rating must be at least 5 kW (6.8 hp)
Continuous operation from 30 mbar (22.5 Torr)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C06.07

Accessories

Rotary Piston Vacuum Pumps

Valves
The flange components which are required for installation of the accessories to the pump must be ordered separately.
For flange components and valves please refer to the corresponding Product Sections C13 and C14.

Advantages to the User
DN
A
B
C
D
E

mm
in.
mm
in.
mm
in.
mm
in.
mm
in.

63 ISO-K
266
1.05
124
0.49
150
0.59
88
0.35
20
0.08

♦ The pump may warm up while the intake line
is isolated
♦ Energy-conserving and environmentallyfriendly operation at ultimate pressure
♦ The pump may continue to operate while the
vacuum chamber is vented for brief periods
♦ After completion of a process the pump may
continue to operate so as to regenerate the oil

Dimensional drawing for the right-angle valve, bellows-sealed, manually operated

Ordering Information

Right Angle Valve
Part No. 107 80

Right angle valve DN 63 ISO-K, Al, manually operated

Advantages to the User
Two valve functions in one:

b

DN
a
b
h2

D

D

h

h

h1

h1

h2
a

mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.

63 ISO-K
88
0.35
150
0.59
124
0.49
220.5
0.87
150
0.59
18.2
0.07

♦ Fast-closing high vacuum isolation valve for
separating the vacuum chamber or a vapor jet
pump (a diffusion pump, for example) from
the backing pump
♦ Venting valve for venting of the valve’s chamber and thus the pump (backing pump)
♦ Immediate closing action upon power failure
♦ Opening action only after the intake line has
been evacuated
♦ Delayed isolation of the vacuum chamber and
venting the vacuum pump (negligible “gulp”)

a

Dimensional drawing for the SECUVAC valves with ISO-K clamp flanges

Ordering Information
SECUVAC valve DN 63 ISO-K
024 V DC
100 - 115 V AC
200 - 230 V AC

C06.08

SECUVAC Valve
Part No. 215 205
Part No. 215 206
Part No. 215 207

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Piston Vacuum Pumps

Exhaust Filter Box AFK 2
The oil mists entrained in the exhaust gas from
the pump are cleaned in the exhaust filter box.
The exhaust filter box is installed instead of the
standard filter box on the rotary piston vacuum
pump.

Advantages to the User
b1

c

♦ At intake pressures below 100 mbar (75 Torr)
this is a space saving alternative to the separate exhaust filter
♦ Almost oil-free exhaust gas, over 99 %
effective
♦ Exchangeable filter elements
♦ Built-in overpressure valves

a

Type

DN 65 DIN

AFK 2

a

337 (1.18)

b1

170 (0.60)

b2

52 (0.18)

c

593 (2.08)

h

665 (2.33)

h1

761 (2.66)

b2

DN 63 ISO-K

h1
h

♦ Low oil consumption due to the integrated oil
return line
Dimensional drawing for the AFK 2 exhaust filter box; dimensions in brackets ( ) are in inch

Technical Notes
In case of toxic or hazardous gases and vapors
the exhaust lines must comply with the safety
regulations.

Tec hnic al Data
Weight

AFK 2
kg (lbs)

10 (22.1)

DN

63 ISO-K

Connection for collar flange

Or der ing Information
AFK 2 exhaust filter box,
for E 250, DK 200
Replacement filter element (FE) (2 are required)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

AFK 2
Part No. 189 47
Part No. 189 85

C06.09

C06

Rotary Piston Vacuum Pumps

Accessories

Oil Filter Unit

Oil Control Unit

Mechanical oil filters are required when a severe
contamination of the pump’s oil can be expected
due to solid particles like dust, for example.

Adding the oil can be automated through the oil
control unit without having to interrupt operation.
For this purpose, an additional oil reservoir holding 7 liters (7.4 qt) is connected to the pump.

Advantages to the User
♦ Protection of the pump against contamination
of its oil
♦ Longer service life for the oil
♦ Easy to fit without having to disassemble the
pump

Mechanical Oil Filter Unit
♦ Automatic oil circulation from the oil reservoir
on the exhaust side via the filter to the intake
chamber
♦ Filter insert which is easy to exchange
(bypass filter)
♦ Particulate retention to 3 microns

Technical Notes
Increases the required quantity of oil by about
1.3 liters (1.34 qt).

a
ød1

ød

Advantages to the User

l
l1

♦ Optimum oil level over long periods of operation

l2

♦ Reduction of oil losses
♦ Visual function check (transparent connecting
hose)
♦ Simple installation of the unit without the
need to disassemble the pump
♦ Closed circuit by connection of oil reservoir,
vessel and pump

mm
in.

Mechanical oil filter unit with special filter insert,
complete with adaptor screw and mount
for attachment to the pump
Replacement filter

Ordering Information
Oil control unit
Replacement filter

C06.10

ld

l d1

l

l1

l2

115
0.40

127
0.44

290
1.02

465
1.63

270
0.95

Dimensional drawing for the oil filter unit

♦ Built-in filter insert separates mechanical contamination

a

ød1

Technical Notes
ød

You must under all circumstances use a
SECUVAC valve, otherwise the oil reservoir
will be emptied by the pump as soon as it is
switched off.

Oil Filter Unit

l
l1

l2

When using the oil filter, the pump must be vented when shut down in order to prevent the oil from
rising into the intake line; for this we suggest you
install a SECUVAC valve.

Ordering Information

a
230
0.81

mm
in.

a

ld

l d1

l

l1

l2

310
1.09

204
0.71

235
0.82

390
1.37

490
1.72

270
0.95

Dimensional drawing for the oil control unit

Part No. 101 31
Part No. 101 32

Oil Control Unit
Part No. 101 37
Part No. 101 32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Piston Vacuum Pumps

AK 100-250 Condensate Separator AF 100-250 A Exhaust Filter
DN
h2

h1
a
h
ød

Welded condensate collecting vessels.

To remove oil mists entrained in the exhaust gas.

Advantages to the User

Advantages to the User

♦ May be used either on the intake or the
exhaust side

♦ Over 99% effective

♦ Corrosion-protected

♦ Optimally matched to our rotary piston vacuum
pumps

♦ Condensate level glass

♦ Exchangeable filter insert

♦ Protects the pump against condensate which
collects in the exhaust line and the intake line

♦ Built-in overpressure valves

♦ Effect independent of the direction of flow

DN
63 ISO-K mm
63 ISO-K in.

a

a1

ld

h

h1

h2

182,5
0.64

333
1.17

280
0.98

342
1.20

162
0.57

108
0.38

Dimensional drawing for the AK 100-250 condensate separator

DN
a

h12)

C06

h1

♦ Sight glass for checking the amount of separated oil

h

♦ Solvent-resistant, helium-tight

Technical Notes

♦ Cast aluminium housing

When used on the intake side the drain cock
must provide a vacuum-tight seal.

♦ Oil return (optional)

Half of the quantity of required clamping screws
is provided.

Technical Notes

h3
DN
63 ISO-K mm
63 ISO-K in.

In case of toxic or hazardous gases and vapors
the exhaust lines must comply with the safety
regulations.

Technical Data

AK 100-250

Capacity for condensate
Weight

a1

10 (9.46)

Weight

kg (lbs)

12 (26.5)

Connection

DN

63 ISO-K

Ordering Information
AK 100-250 condensate separator
Drain cock, vacuum-tight
Connection components
Connection to the intake side of the E 250, DK 200
Elbow
Centering ring

AK 100-250
Part No. 188 45

2)

a

ld

h

h1

h2

380
1.33

200
0.7

650 - 690
2.28 - 2.42

47,5
0.17

450
1.58

3 feet around the circumference
Clearance required for exchanging the filter elements

Dimensional drawing for the AF 100-250 A exhaust filter

Tec hnic a l D a ta

l (qt)

Connection

1)

ød1)

AF 100-250 A
kg (lbs)

12 (26.5)

DN

63 ISO-K

Or der ing Info rma tio n
AF 100-250 A exhaust filter

AF 100-250 A
Part No. 189 45

Replacement filter element (2 are required)

Part No. 189 85

Part No. 190 90

Drain cock, vacuum-tight

Part No. 190 90

Part No. 887 25
Part No. 268 07

Connection components
Connection to the E 250, DK 200
Bellows
Centering ring ISO-K

Part No. 887 70
Part No. 268 07

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C06.11

Rotary Piston Vacuum Pumps

Accessories

FS 100-250 Dust Filter
Dust filters protect the pumps against the intake
of dust.

Advantages to the User

b

♦ Easy to disassemble
h1

♦ Vacuum-tight cast housing

DN

♦ Replacement filters
♦ Separates dust from a grain size of 1 µm

h2
h

Technical Notes
Install horizontally so that the filter insert may be
removed from below.

a

ød

In case of very large quantities of dust use a dust
separator.
Only throttles the pumping speed significantly at
very low intake pressures.

Dimensional drawing for the FS 100-250 dust filter

Tec hnic al Data

Supplied Equipment
Half of the quantity of required clamping screws
is provided.

mm
in.

b

ld

h

h1

h2

175
0.61

170
0.60

≈ 340
≈ 1.19

85
0.30

≈ 265
≈ 0.93

FS 100-250

Connection to pump

E 250, DK 200

Throttling of pumping speed
at an intake pressure of 13 mbar (9.8 Torr) approx. %
at an intake pressure of 1.3 mbar (0.98 Torr) approx. %
Weight

28
38

kg (lbs)

11 (24.3)

DN

63 ISO-K

Connection

Order ing Information

FS 100-250
Part No. 278 17

FS 100-250 dust filter
Filter insert

Part No. 178 37

Replacement cotton wadding cartridges (1 set = 10 pieces)

Part No. 178 27

Connection components
Connection to the E 250, DK 200
Elbow
Centering ring

Part No. 887 25
Part No. 268 07

ANSI adaptor

C06.12

a
255
0.89

upon request

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Piston Vacuum Pumps

AS 100-250 Dust Separator
Dust separators protect the pumps against being
contaminated by dust.

Advantages to the user

a1

♦ Dust separator for large quantities of dust
♦ Dual-stage, thus low throttling effect

ød1

a

DN 40 KF

l

mm
in.

DN 63 ISO-K

♦ Cyclone and wet filter
♦ Replacement inserts for both filters

a2

♦ Dust of a grain size of 2 µm and more are
separated in a cyclone

mm
in.

ød

h1

a

a1

a2

ld

220
8.66

385
15.16

115
4.53

285
11.22

l d1

h

h1

h2

330
12.99

530
20.87

685
26.97

240
9.45

h
h2

DN 40 KF

♦ Finer dust is separated in an insert moistened
with oil

DN 63 ISO-K

Dimensional drawing for the AS 100-250 dust separator

Technical Notes
Tec hnic al Data

Dust separator filters throttle the pumping speed
only at low intake pressures.

AS 100-250

Connection to pump

Supplied Equipment
Half of the quantity of required clamping screws
is provided.

E 250, DK 200

Throttling of pumping speed
at an intake pressure of 13 mbar (9.8 Torr) approx. %
at an intake pressure of 1.3 (0.98 Torr) mbar approx. %

3.5
7

Capacity for dust

4.0

Weight

l
kg (lbs)

27 (59.5)

DN

63 ISO-K

Connection

Or der ing Information
AS 100-250 dust separator
Filter insert

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

AS 100-250
Part No. 178 02
Part No. 178 06

C06.13

C06

Accessories

Rotary Piston Vacuum Pumps

Version for the North and South American Continents

OF1000 Oil Filtering System
OF 1000 Oil Filtering Systems are designed to
remove acids and particulates from the lubricating fluid used in Leybold mechanical vacuum
pumps. The systems are located externally from
the vacuum pump, and utilize their own integral
gear pump in conjunction with a bypass to continuously recycle fluid through a filtering medium;
the medium is housed in an element/canister
assembly which additionally serves to absorb
heat, and thus reduce the operating temperature
of the vacuum pump.
OF1000 Systems are available in both single- and
dual-canister designs. Both types are highly compact and reliable, and can be supplied in models
for standard or chemically severe applications.

OF1000 Oil Filtering System

Advantages to the User

Applications

♦ Choice of Single- and Dual-Canister Models
for Standard or Chemically Severe
Applications

Standard series models are widely used in silicon
production processes, including LPCVD, lowpressure epitaxy, ion implantation, reactive ion
etching and several plasma processes. Such processes employ a variety of gases which can react
with pump fluid, resulting in the formation of
sludge, particulates and acids. The standard
OF1000 model has proven effective at extending
maintenance intervals in such applications.

♦ Compact Design
♦ Reliable Operation
♦ Choice of Four Filtering Elements
♦ Dripless Quick Disconnects for Easy Removal
and Replacement of Filter Elements
♦ Recessed Lid and Oil Level – No Oil Spillage
♦ Conductive Teflon Hoses for Static Charge
Dissipation – No Oil Leakage Due to Static
Burning
♦ Integral Gear Pump with Built-In Bypass
♦ Fluid Sight Glass and Flow Monitor
♦ Pressure Gauge
♦ Small Precharge Fluid Volume
♦ Single Phase 50/60 Hz Motors Standard

Similarly, chemically resistant OF1000C models
have proven successful in aluminum etching and
other processes where boron trichloride and
other highly toxic gases are employed. The canister, gear pump, fittings and quick disconnects of
the corrosive-service model have been specially
treated with a fluorocarbon material that substantially increases the life of these components.

Single-canister OF1000 models are distinguished
by their smaller footprint while dual-canister configurations afford the advantages of multi-media
filtration and increased oil capacity. Dual-canister
models are designed for series flow through two
side-by-side mounted canisters, and thus can be
used to filter oil through two different media on
the same pass or for double filtration through
elements containing the same medium. The
models also enable the vacuum pump to operate
at somewhat lower temperatures, while providing
it with a larger supply of clean, filtered oil.
All OF1000 models are supplied with a choice of
four filtering elements. The Fullers Earth element
provides high capacity for standard acids and can
be used to trap particulates down to 10 micron in
size. Hydrophilic, activated alumina and fiberglass
particulate elements are also available. The
hydrophilic element is particularly effective for
hydrolized acids, and can also be used to trap
particles as small as 1 micron. The activated
alumina element provides 10 micron particulate
retention and is extremely effective for Lewis
acids and polar compounds. The fiberglass element is suitable for particulate removal down to
10 micron.
The element/canister assembly of OF1000
systems is easy to install, extremely easy to
remove and replace. The recessed lid and oil level
of the assembly safeguards against the possibility
of spillage. Dripless quick disconnects are also
provided for easy canister removal and safer disposal of the filtering element and oil.
OF1000 Systems also come equipped with flexible Teflon hoses designed to resist dielectric
breakdown. The systems thus ward against the
possibility of oil leaks due to pinholing or static
burning of the hose.

C06.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Piston Vacuum Pumps

Version for the North and South American Continents
Single-Canister
Systems

Technical Data
Gear Pump Motor

Dual-Canister
Systems
1/6 HP, 115/208/220V, single phase, 50/60Hz,
wired for 115V, with on/off switch 1)

Gear Pump

0.7 gpm @ 1800 RPM

Pressure Gauge

0 to 100 psig (0 to 70 kPa)

Pump Fluid Capacity

15 lb perfluorinated polyether
or 3.75 qt hydrocarbon oil

Flexible Hoses
Dimensions

29 lb perfluorinated polyether
or 7.25 qt hydrocarbon oil

3/8 in. l.D. teflon/carbon black with stainless steel braid – 4 ft lengths 2)
in. (mm)

16 x 14 x 11 (406 x 356 x 279)

23 x 14 x 11 (585 x 356 x 279)

–

series 3)

45

60

Single-Canister
Systems

Dual-Canister
Systems

Part No. 898 550

Part No. 898 552

Part No. 898 551

Part No. 898 553

Part No. 898 561

Part No. 898 554

Part No. 898 555
Part No. 898 556
Part No. 898 566

Part No. 898 557 (front), Part No. 898 555 (rear)
Part No. 898 558 (front), Part No. 898 556 (rear)
Part No. 898 559 (front), Part No. 898 566 (rear)

Aluminum Oxide — High Capacity for Reagent Grade
HCI; Removes Lewis Acids and PolarCompounds;
10 Micron Particulate Retention

Part No. 898 504

Part No. 898 504

Fullers Earth — Acid and Particulate Filter with
Capacity of 34 ml Reagent Grade HCI;
10 Micron Particulate Retention

Part No. 898 505

Part No. 898 505

Hydrophilic — Water and HCI Acid Absorbing
Capabilities; 1 Micron Particulate Retention

Part No. 898 506

Part No. 898 506

Particulate — Fiberglass Element with 10 Micron
Particulate Retention

Part No. 898 507

Part No. 898 507

Flow Arrangement
Weight (Dry)

lbs

Ordering Information
Oil Filtering System
OF1000 Less Filtering Element and Oil
OF1000 Prepared for PFPE,
Less Filtering Element and Oil
OF1000C Chemically Severe Service,
Prepared for PFPE Fluid

C06

Accessories
Spare Filter Canister Assembly
With Quick Disconnect
Prepared for PFPE, With Quick Disconnect
Chemically Severe Service

Filtering Elements

1)

Hazardous duty models and special voltages also available
Optional 6, 10 and 15 feet hoses available
3) 0ptional parallel flow arrangement also available
2)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C06.15

Accessories

Rotary Piston Vacuum Pumps

Version for the North and South American Continents

OF3000 Oil Filtering System
The OF3000 is a compact, highly mobile filtering
system designed for use with mechanical pumps
in applications generating large volumes of heavy
particulate filtration.
A positive feed gear pump and check valve
assembly protect against excessive backpressure
in the canister should the filter element become
clogged. Flexible hoses and matched dripless
connectors ensure easy maneuverability of the
OF3000’s rollaround cart, while also eliminating
the possibility of oil spills.

OF3000

Operation

Advantages to the User

Filtering Elements

Contaminated oil is removed from the drain location on the vacuum pump and is cycled to the
element assembly. Clean oil is subsequently circulated back to the oil fill port of the vacuum
pump.

◆ Compact, mobile design

Fullers Earth - Provides high capacity for standard acids and can be used to trap particulates
down to 10 micron size.

The tangential flow inlet port to the oil filter canister allows full oil flow while utilizing the entire
filter capability of the element. This translates
into longer filter life, fewer element changes, and
less oil loss.

◆ No spillage - recessed lid and oil level

Similarly, chemically severe OF3000 models have
proven successful in aluminum etching and other
processes where boron tricloride and other highly
toxic gases are employed. the canister, gear
pump, fittings and quick disconnects of the corrosive-service model have been specially treated
with a fluorocarbon material that subtantially
increases the life of these components.

C06.16

◆ Choice of five filter elements
◆ Dripless quick disconnects for easy removal
and replacement of filter elements
◆ Conductive teflon hoses for static charge dissipation
◆ Integral gear pump with built-in bypass
◆ Pressure gauge
◆ Oil sight glass
◆ Single phase 50/60 Hz motor standard

Hydrophylic - Effective for hydrolized acids and
particulates as low as one micron.
Activated Alumina - Effective on Lewis acids and
polar compounds. Can be used to trap particulates down to 10 microns.
Particulate (Paper) - Suitable for particulate
removal down to 10 microns.
Particulate (Fiberglass) - Suitable for particulate
removal down to 10 microns.

◆ Tangential flow inlets - improves oil flow
◆ Canister drain valve

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Piston Vacuum Pumps

Version for the North and South American Continents
Technical D ata

OF3000

Gear pump motor

Order ing Inform a tio n

1/6 HP, 115/208/220 V,single phase, 50/60 Hz,
wired for 115 V, with on/off switch

Gear pump

0.7 gpm @ 1800 rpm

Pressure gauge

0 to 100 psig (0 to 70 kPa)

Fluid capacity (approx.)

gal

Flexible hoses

in. I.D. 78 teflon/carbon black with stainless steel braid
- 6 ft lenghts
in. (mm)

18 x 14 x 26 (457 x 355 x 661)

Weight (dry)

lbs (kg)

65 (29.4)

OF3000, less element and oil (standard)

Part No. 898 625

OF3000C, coated, prepared for PFPE

Part No. 898 450

OF3000, prepared for PFPE

Part No. 898 455

Accessories

3

Dimensions

OF3000

Aluminum oxide

Part No. 898 523

Hydrophilic

Part No. 898 525

Fullers earth

Part No. 99 171 159

Particulate (paper)
Particulate (fiberglass)

Part No. 898 599
Part No. 99 171 158

C06

Vibration Absorber
E and DK series rotary piston mechanical pumps
are dynamically balanced for vibration-free performance in normal. In applications where pumps
must be installed on light frames or wooden
flooring, however, excess vibration can result
from the lack of solid support.
h
h1
ød1
ød

mm
in.

ld

l d1

h

h1

1/2" 13NC
1/2" 13NC

Advantages to the User

337
2.95

665
1.57

761
0.43

♦ Reduce transmitted vibration by 60%
♦ Rubber vibration-absorbent varies in hardness
for pumps of different weights

Dimensional drawing for the vibration absorber

Ordering Information
Vibration absorber (set of 4)
(for E 250, DK 200)

Vibration Absorber
Part No. 101 55-1

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

♦ Tapped holes provided in absorbers for attaching to frame or floor
♦ Shipped complete with all necessary mounting hardware

C06.17

Accessories

Rotary Piston Vacuum Pumps

Version for the North and South American Continents

AK 100-250 Condensate Separator AF 100-250 A Exhaust Filter
DN
h2

h1
a
h
ød

Welded condensate collecting vessels.

To remove oil mists entrained in the exhaust gas.

Advantages to the User

Advantages to the User

♦ May be used either on the intake or the
exhaust side

♦ Over 99% effective

♦ Corrosion-protected

♦ Optimally matched to our rotary piston vacuum
pumps

♦ Condensate level glass

♦ Exchangeable filter insert

♦ Protects the pump against condensate which
collects in the exhaust line and the intake line

♦ Built-in overpressure valves

♦ Effect independent of the direction of flow

Half of the quantity of required clamping screws
is provided.

Technical Notes

ld

h

h1

h2

280
0.98

342
1.20

162
0.57

108
0.38

Dimensional drawing for the AK 100-250 condensate separator

DN
a

h1

h

63 ISO-K mm
63 ISO-K in.

AK 100-250

Capacity for condensate

10 (9.46)

Weight

kg (lbs)

12 (26.5)

Connection

DN

63 ISO-K

Ordering Information

AK 100-250
Part No. 188 45

AK 100-250 condensate separator, ASA

Part No. 188 45-M

Vacuum-tight draining tap (pump inlet)

Part No. 190 90
Part No. 98-278-0347
Part No. 98-278-0700
Part No. 910-181-605
Part No. 910-181-605

1)
2)

a

ld

h

h1

h2

380
1.33

200
0.7

650 - 690
2.28 - 2.42

47,5
0.17

450
1.58

3 feet around the circumference
Clearance required for exchanging the filter elements

Dimensional drawing for the AF 100-250 A exhaust filter

Tec hnica l D a ta

l (qt)

Connection

ød1)

h3
DN

Technical Data

C06.18

3" ANSI / 63 ISO-K mm 182,5 333
3" ANSI / 63 ISO-K in. 0.64 1.17

h12)

In case of toxic or hazardous gases and vapors
the exhaust lines must comply with the safety
regulations.

Exhaust position (E 250, DK 200)
3" ANSI seal disc (2 are required)

a1

♦ Cast aluminium housing
♦ Oil return (optional)

Inlet position (E 150, E 250, DK 100, DK 200)
3" elbow (1 is required)
3" ANSI rotatable flanges (2 are required)
3" ANSI seal disc (2 are required)

a

♦ Sight glass for checking the amount of separated oil

When used on the intake side the drain cock
must provide a vacuum-tight seal.

AK 100-250 condensate separator, DN 63 ISO-K

DN

♦ Solvent-resistant, helium-tight

Technical Notes

Weight

a1

AF 100-250 A
kg (lbs)

12 (26.5)

DN

63 ISO-K

Or der ing In fo rma tio n
AF 100-250 A exhaust filter, DN 63 ISO-K
AF 100-250 A exhaust filter, ASA
Kit includes
Exhaust filter
ANSI bellows
ANSI sealing disc (2 are required)
ANSI rotatable flange
Spare filter elements for E 250, DK 200 (2 are required)
Drain tap

AF 100-250 A
Part No. 189 45
Part No. 189 45-M
Part No. 189 45
Part No. 991-051-013
Part No. 910-181-605
Part No. 982-780-700
Part No. 390-261-44
Part No. 188 90

Note: Fittings will adapt filter only to exhaust port of pump.
Kit does not include fittings to adapt exit port of filter.
Please refer to section C13 “Vacuum Fittings” for aditional options

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Piston Vacuum Pumps

Vacuum Pump Oils
Lubricating oils for rotary vacuum pumps need to
fulfil demanding requirements. Their vapor pressure must be low also at high temperatures,
water content and water uptake must be minimal.
Their viscosity characteristics need to be flat,
lubricating properties need to be excellent and
they must resist cracking upon being mechanically stressed.
All the vacuum pump oils listed in the following
have been subjected in our factory laboratories to
very comprehensive tests closely resembling the
conditions encountered in practice by the pumps
from the E + DK series.
We therefore recommend the exclusive use of
vacuum pump oils fully qualified by Leybold so
as to ensure optimum performance of the
Leybold vacuum pumps and also to ensure optimum oil change intervals.
Under vacuum conditions lubricating oils, especially those with additives may behave quite differently than expected. Additives may adversely
affect the attainable ultimate pressure and may
react with the media being pumped.
When using not suitably qualified third party oils,
the oil change intervals and the performance of
the vacuum pump may be reduced. Also unwanted deposits may occur which may even cause
severe damage to the vacuum pump.
For these reasons please understand that we
must make our warranty commitment dependent
on the use of oils which have been qualified by
us. Damages caused by the use of not suitably
qualified lubricating oils are not covered by our
warranty.
In order to adapt the pumps to the different applications of our customers, different types of oil
are used in the E + DK pumps.

Lubricant Types
Mineral Oils
Mineral oils are products distilled and refined
from crude oil. These do not consist of precisely
defined compounds but rather consist of a complex mixture. The way in which the mineral oil is
pre-treated and its composition are decisive as to
the applications it will be suited for. Depending
on the distribution of the hydrocarbons and the
dominance of certain properties, mineral oils are
grouped according to paraffin-base, naphthenic
and aromatic. For the purpose of attaining especially low ultimate pressures, mineral oils must
be selected on the basis of a core fraction.
The thermal and chemical resistance of mineral
oils has been found to be adequate in the majority of applications. They offer a high degree of
compatibility with elastomers and resistance to
hydrolysis.

Perfluorinated polyether
(PFPE)
These are oils which are only composed of carbon (C), fluorine (F) and oxygen atoms (O). The
existing C-O and C-F bonds are highly stable. For
this reason PFPE oils are practically inert against
all chemical and oxidising influences.
Perfluorinated polyether will not polymerise
under the influence of high energy
radiation.

PFPE is non-flammable. Leybold NC1/14 has the
approval of BAM (Federal Institute for Materials
Research and Testing) for pumping of pure oxygen.
Perfluorinated polyether are used when pumping
strongly reactive substances like oxygen (O2),
fluorine F2 and uranium hexafluoride UF6.
Regarding Lewis acids (for example, boron
trifluoride BF3, aluminum trichloride AlCl3) they
are not completely inert. Here reactions may take
place at temperatures over 100 °C (212 °F).
Perfluorinated polyether are thermally highly
stable. Thermal decomposition may only take
place at temperatures of over 290 °C (554 °F).
Caution: Perfluorinated polyether will – when
decomposed – release toxic and corrosive gases:
hydrogen fluoride HF, carbonyl difluoride COF2.
For this reason open fires must be avoided in the
workspace where PFPE is being used. Do not
smoke in the workspace where PFPE is being
used.
Only suitably prepared pumps must be used in
connection with perfluorinated polyether, since it
is essential that the pumps be free of
hydrocarbons.
Changing from one basic type of oil to PFPE
must be left exclusively to authorised Service
Centers. The pump will have to be fully disassembled and carefully cleaned. Gaskets and filters will
have to be exchanged and suitable greases will
have to be used.

For all lubricants from our line of products you may obtain Safety Data Sheets from the Dept. Technical
Support in Cologne.

Please note that owing to differing properties not
all types of oil may be used in all pumps of the
E + DK series. If you can not find the combination of pump and oil you require please ask us for
a quotation.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C06.19

C06

Accessories

Rotary Piston Vacuum Pumps

Application Data
Type of oil
Examples of areas of application and process media

Special Oil
N62

NC 1/14

Paraffin-base mineral oil, core faction, free of additives

Perfluorinated polyether PFPE

Standard oil

For pumping strong oxidants like oxygen, O2,
ozone O3, nitrogen oxides NOx and sulphur oxides
(SO2, SO3) as well as reactive substances like
halogens (for example fluorine F2, chlorine Cl2),
hydrogen halides (for example hydrogen
chloride HCl, hydrogen bromide HBr), uranium
hexafluoride UF6, and conditionally Lewis acids
(for example boron trichloride BCl3)

For pumping air, chemically inert permanent gases
(noble gases, for example), water vapor,
solvent vapors in the case of laboratory
pumps operated with cold traps

Use only in pumps modified for PTFE
Remarks

Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Technical Data

The ultimate pressures stated in our catalogs
are based on operation of the pump with N62
(except for the PFPE pumps)

Avoid pumping water vapour, in particular in connection
with corrosive media (see above)
In ingress of water vapor must be avoided

Service life may be extended through the use of an oil filter

The use of an oil filter is strongly recommended

Suited
Conditionally suited
Not suited

Suited
Suited
Suited

Special Oil
N62

NC 1/14

Viscosity
at 040 °C (104 °F)
at 100 °C (212 °F)

mm2/s
mm2/s

90
10

47
5

Flash point

°C (°F)

> 255 (> 491)

– 2)

< 1 x 10-5 (< 0.75 x 10-5)
< 3 x 10-3 (< 2.25 x 10-3)

3 x 10-7 (2.25 x 10-7)
6 x 10-4 (4.5 x 10-4)

0.88

1.89

°C (°F)

< -9 (< -16)

-40 (40)

g/mol

550

2500

Special Oil
N62

NC 1/14

01 litre (1.06 qt)

Part No. 177 01

Part No. 177 38

05 litres (5.29 qt)

Part No. 177 02

–

20 litres (21.14 qt)

Part No. 177 03

–

180 kg (397.4 lbs)

Part No. 177 05

–

Vapor pressure
at 020 °C (68 °F)
at 100 °C (212 °F)

mbar (Torr)
mbar (Torr)

Density at 20 °C (68 °F)

g/ml

Pour point
Middle molecular weight

Ordering Information

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
2) Caution: Perfluorinated polyether will, when being decomposed at temperatures over 290 °C (554 °F), release toxic and corrosive gases
For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used

C06.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Rotary Piston Vacuum Pumps

Version for the North and South American Continents
Application Data
Type of oil
Examples of areas of application
and process media

HE-200
Paraffin-base mineral oil, core faction, free of additives

Perfluorinated polyether PFPE

Standard oil for Leybold USA

For pumping strong oxidants like oxygen,
O2, ozone O3, nitrogen oxides NOx and
sulphur oxides (SO2, SO3)
as well as reactive substances like
halogens (for example fluorine F2,
chlorine Cl2), hydrogen halides
(for example hydrogen chloride HCl,
hydrogen bromide HBr),
uranium hexafluoride UF6,
and conditionally Lewis acids
(for example, boron trichloride BCl3)

For pumping air, chemically inert permanent gases
(noble gases, for example),
water vapor, solvent vapors
in the case of laboratory pumps operated with cold traps

Remarks

HE-2700

The ultimate pressures stated in our catalogs are based on operation
of the pump with HE-200
(except for the DOT and PFPE pumps)

Use only correspondingly modified pumps

C06

Mixing with other types of oil must be
absolutely avoided

Service life may be extended through the use of an oil filter.
The uptake of water vapor must be avoided
The use of an oil filter is strongly recommended
Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Suited
Conditionally suited
Not suited

Technical Data
Viscosity
at 020 °C (068 °F)
at 040 °C (104 °F)
at 100 °C (212 °F)

mm2/s (= cSt)
mm2/s (= cSt)
mm2/s (= cSt)

Flash point
Vapor pressure
at 020 °C (068 °F)
at 025 °C (077 °F)
at 100 °C (212 °F)

°C (°F)
mbar (Torr)
mbar (Torr)
mbar (Torr)

Density at 20 °C (68 °F)
Pour point
Molecular weight

g/ml
°C (°F)

Ordering
Infor m ation

01 qt (1 l)
01 gal (3.8 l)
05 gal (18.9 l)
55 gal (208 l)
Bottle 02 lb (0.91 kg)
Bottle 04 lb (1.81 kg)
Bottle 16 lb (7.25 kg)

HE-200

Suited
Suited
Suited

HE-2700

–
58
9.1

250
–
10

224 (435)

Not known 2)

–

6.7 x 10-7 (5 x 10-7)
–
6.7 x 10-5 (5 x 10-5)

4.7 x 10-6 (3.5 x 10-6)
3.9 x 10-4 (2.9 x 10-4)
0.88

1.89

- 10 (14)

- 34 (- 30)

480

4600

HE-200
Part No. 98 198 006
Part No. 98 198 007
Part No. 98 198 008
Part No. 98 198 010
–
–
–

HE-2700
–
–
–
–
Part No. 898 565-1
Part No. 898 565-2
Part No. 898 565-4

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
2) Caution: Perfluorinated polyether will, when being decomposed at temperatures over 290 °C (554 °F), release toxic and corrosive gases
For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C06.21

Accessories

Rotary Piston Vacuum Pumps

Version for the North and South American Continents

103
10,000
Torr
1000

cfm
E 250

Pumping speed

Pressure

ATM
100
10
E250
1

102

1018
6
4

0.186

2

4
2

0.01
0

4

8

12

16

20

24

28

32

min

100
10-2

40

2

4

6 8

10-1

100

Time

101

102

Torr

103

Inlet Pressure
without gas ballast
with gas ballast

Pumpdown characteristic of a 1000 l vessel for the E type rotary piston vacuum pump (60 Hz)

Pumping speed characteristic of the E type rotary piston vacuum pump (60 Hz)

103
10,000
Torr

cfm

Pumping speed

ATM
100

Pressure

10
1
0.1
0.01

DK200

1018
6
4

0.00186

2

4
2

0.0001
0

DK200

102

10

20

30

40

50

60

70

80

min

100

100 2
10-5

4 68

10-4

10-3

Time

10-2

10-1

100

101

Torr

103

Inlet Pressure
without gas ballast
with gas ballast

Pumpdown characteristic of a 1000 l vessel for the DK type rotary piston vacuum pump (60 Hz)

C06.22

Pumping speed characteristic of the DK type rotary piston vacuum pump (60 Hz)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

RUVAC

C07

Roots Vacuum Pumps
Single-Stage
250 - 13 000 m3 x h-1 (147.3 - 7657 cfm)

Contents

Roots Vacuum Pumps

General
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.02
General Information on Roots Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.03

Products
RUVAC WA/WAU Roots Vacuum Pumps with Flange-Mounted Motors . . . . . . . . . . . . . . . . C07.06
RUVAC WS/WSU/PFPE Roots Vacuum Pumps with Canned Motors . . . . . . . . . . . . . . . . . . C07.08
RUVAC WSLF Roots Vacuum Pumps for Laser Gas Systems . . . . . . . . . . . . . . . . . . . . . . . C07.10
RUVAC RA Roots Vacuum Pumps with Flange-Mounted Motors (50 Hz) . . . . . . . . . . . . . . . C07.12
RUVAC RA Roots Vacuum Pumps with Direct-Coupled Motors (60 Hz) . . . . . . . . . . . . . . . . C07.14

Accessories
Pressure Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.16

Miscellaneous
Vacuum Pump Oils . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.17

RA

W
SL
F

W
S/
PF
PE

W
S/
W
SU

Ro

ots

WA
/W
AU

Va
c

uu

m

Pu

mp

s

Applications and Accessories

Applications
Semiconductor production

◆

Vacuum coating

◆

Large scale research

◆
◆

Chemistry/Pharmaceutical

◆

Metallurgy/Furnaces

◆

Lamps and tubes manufacture

◆
◆

◆

◆

◆

Laser engineering

◆

Packaging

◆

Central vacuum supplies

◆

◆

Freeze drying

◆

◆

Leak testing systems

◆

Electrical engineering

◆

High purity gases/closed refrigerant cycles

◆

◆

◆

◆

Mechanical engineering

◆

◆

◆

◆

◆

Automotive industry

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Accessories

Page

Pressure switches

C07.16

C07.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Roots Vacuum Pumps

General Information on Roots Vacuum Pumps
Applications

Shifting the Operating Pressure
into the High Vacuum Range
As a rule of the thumb one may say that Roots
vacuum pumps are capable of improving the
attainable ultimate pressure of a pump system by
a factor of 10. With two Roots vacuum pump
stages and a corresponding backing pump it is
possible to attain pressures in the range down to
10-5 mbar (0.75 x 10-5 Torr). Under certain
circumstances this will make the use of additional
high vacuum pumps (turbomolecular pumps or
diffusion pumps) unnecessary.

Multiplied Pumping Speed
Due to the non-contact rotation of the impellers,
Roots vacuum pumps are able to run at higher
speeds. Thus a high pumping speed is obtained
with a relatively small size pump. Pumping speeds
in excess of 1000 m3/h (589 cfm) can only be
attained with Roots vacuum pumps.
When selecting the right kind of backing pump
(sizing) it will be possible to pump large quantities
of gas in connection with smaller backing pumps.
Energy consumption of such a pump system is
much less compared to a single backing pump
offering the same pumping speed.
The use of Roots vacuum pumps in the area of
vacuum technology has resulted in further
specializations and improvements:

10 -2

10 -1

1000
m 3 x h-1
600
Pumping speed

For many years now Roots vacuum pumps have
been well established in the area of vacuum technology. In combination with backing pumps,
which compress against the atmosphere, these
pumps offer the following advantages:

10 -3

10 0

10 1

10 2

750
500

2,3

cfm

3

400

2
4

200

100
2
10 -3

100

1

4 68

10 -2

10 -1

10 0
10 1
Pressure

10 2 mbar 10 3

1 Pumping speed of the backing
pump
2 Pumping speed of the Roots pump
system without pressure
equalization line
3 Pumping speed of the Roots pump
system with pressure equalization
line
4 Pumping speed gained by the
pressure equalization line

Comparison of pumping speed characteristics with and without pressure equalization line

♦ Through an integrated bypass (pressure equalization line) it is also possible to utilize the pumping speed of the Roots vacuum pump at high
pressures and large quantities of gas at an early
stage.This reduces the pumpdown time especially for cyclic operation (see figure).
♦ High-purity gases or hazardous gases impose
strict requirements on the leak-tightness of the
system. Canned motors are hermetically sealed.
There are no seals in contact with the atmosphere which might be subject to wear. This prevents leaks and failures due to oil leaks. A service life of over 20 000 hours without maintenance
is quite common.
♦ Tolerances and the quality of the balancing combined with force-fed lubricated bearings and
toothed gears permit high speeds and the use of
frequency converters. Thus it is possible to
attain a high pumping speed while the process
is in progress and to reduce the speed when the
process has been stopped or while changing the
batch. This results in a lower consumption of
energy and a longer service life with uncompromised reliability.

Pump system with RA Roots vacuum pumps

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

♦ Conversion from vertical to horizontal flow is
easily implemented and can be performed at the
place where the pump has been installed. Thus
the pump can be adapted more closely to the
operating conditions of your system.
Lately, a further characteristic is gaining prominence: Roots vacuum pumps are capable of compressing the media in the pump chamber without
the presence of any further media. This mostly
avoids interaction between different media in the
pump itself and also in the connected vacuum
chamber. Therefore
♦ the medium which is pumped is not contaminated with lubricants or sealants; complex accessories (exhaust filters, separators, etc.) are not
needed;
♦ the lubricant in the side chambers is hardly
affected, so that service life is not reduced;
♦ backstreaming of oil from the backing pump into
the connected vacuum chamber is prevented.
The effective air cooling arrangement reduces
operating costs to a minimum. Cooling water is
not required. These characteristics make the
Roots vacuum pump attractive for almost all
rough and medium vacuum applications.

Pump system with RA Roots vacuum pump and SOGEVAC rotary vane vacuum pump

C07.03

C07

Roots Vacuum Pumps

General

Semiconductor Technology
In the area of semiconductor technology, Roots
vacuum pumps are found in etching processes
among others, and in use with dry compressing
vacuum pumps.
The pumping speed of the combination of
backing pumps amounts to 200 to 500 m3/h (118
to 295 cfm) and it ensures a cut-in pressure of
10-1 mbar (0.75 x 10-1 Torr) for the turbomolecular pump. In the case of dry compression, corrosive gases which also have a high particulate
content must be pumped.
Canned motors and PFPE fluids provide a good
seal against the outside and allow long periods
between servicing, high reliability and thus very
low operating costs (WS-PFPE-types).

Central Vacuum Supply Systems
Large Roots vacuum pumps, usually in connection with single-stage rotary vane vacuum pumps
serve several consumers of vacuum (packaging
machines, for example) at the same time.
Due to the uncontrolled influx of gas, a high of
pumping speed must be attained quickly, in order
to keep the vacuum (1 to 30 mbar (0.75 to
22.5 Torr)) permanently available to all consumers.
This in particular, is implemented by Roots vacuum
pumps having a pressure equalization line (WAUtypes).

Chemistry
Replacement of vapor jet or gas jet pumps on
liquid ring pumps in drying and distillation plants
is necessary for attaining the required operating
pressure of about 1 mbar (0.75 Torr). Reduction
of operating costs by entirely eliminating vapor or
gas quantities includes separation of these on the
pressure side (WA and RA-types).

Laser Systems
Continuous circulation of the gas in order to
remove heat from a closed cycle in which pressure differentials of up to 100 mbar (75 Torr)
must be maintained. The tough requirements
regarding purity necessitate a total absence of
contamination by oil and dust. This is ensured by
reducing the pressure level in the oil chambers as
well as by coating the pump chamber. The pumps
are assembled and tested under clean room
conditions.
The canned motor ensures a high degree of leaktightness to the outside and permits operation in
connection with a frequency converter (WSLFtypes).

C07.04

Operational diagram of a single-stage Roots vacuum pump (with vertical pumping action)

Operating Principle

Design

Roots vacuum pumps, which are also called
Roots blowers, are rotary plunger type pumps
where two symmetrically shaped impellors rotate
in opposite directions inside the pump housing.

The pump chamber of Roots vacuum pumps is
free of any sealing agents or lubricants. Only the
toothed wheels of the synchronous gear are
lubricated with oil. Toothed gear wheels and bearings of the RUVAC are placed in two side chambers which also contain the oil reservoir. These
two side chambers are separated from the pump
chamber by piston ring seals.

The figure-of-eight rotors are synchronized by a
gear which ensures that the impellors are
counter-rotating in such a way, that they are near
to one another and to the housing without actual
contacting.
In rotor positions I and II (see figure) the volume
of the intake is increased. As the rotors turn further to position III a part of the volume is cut off
from the intake side.
In position IV this volume is opened to the
exhaust side and gas under fore-vacuum pressure
(higher than the intake pressure) flows in. This
gas compresses the gas coming from the intake.
As the rotors turn further the compressed gas is
ejected through the exhaust flange.
This process repeats itself twice for each rotor
per full turn.

Suitably designed oil supply systems in both
chambers ensure that a sufficient quantity of oil
is supplied to the gear wheels and bearings at all
permissible speeds.
Almost all RUVAC Roots vacuum pumps are designed for a horizontal and vertical pumping
action.

Types
Various types of Roots vacuum pumps have been
developed to ensure optimum adaptation to the
widely varying applications for this type of pump.

As the rotors do not come into contact with the
pump’s housing Roots vacuum pumps may be
operated at high speeds. Thus a high pumping
speed is obtained from comparably small pumps.
The pressure difference and the compression
ratio between intake and exhaust is limited in
Roots vacuum pumps.
In practice the maximum attainable pressure
difference is of significance only in the rough
vacuum range (p > 10 mbar (p > 7.5 Torr)) whereas in the medium vacuum range (p < 1 mbar
(p < 0.75 Torr)) the attainable compression ratio
is of importance.
Roots vacuum pumps from LEYBOLD have been
designed to specially meet the requirements of
the fine vacuum range. They are normally used in
connection with backing pumps (exception RAV)
or in closed gas cycles (WSLF series).

Pump system consisting of RUVAC WAU 1001 and SOGEVAC SV 200

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Roots Vacuum Pumps

Schematic section through a RUVAC WA/WS (left) and a RUVAC WAU/WSU (rights)

♦ Flange mounted motor
The drive shaft of the pump is directly
connected to an electric motor via a flexible
coupling. The required seal of the drive shaft
against atmospheric pressure is obtained by
oiled shaft seals.
♦ Canned motor
In the canned motor, rotor and stator pack are
separated by a vacuum-tight can made of a
non-magnetic material. The rotor operates on
the drive shaft of the pump in the vacuum, so
that a shaft seal which would be subject to
wear is not required.
♦ Pressure equalization line
The integrated pressure equalization line
connects the exhaust flange to the intake flange
through a differential pressure valve.
This valve opens at a high pressure differential between the flanges. Part of the gas then
flows through this line back to the intake
flange. This is why the Roots vacuum pump
may be switched on at atmospheric pressure
together with the backing pump. This also
increases the pumping speed of the pump
combination at high intake pressures.
♦ Special ACE vibration absorber
These pumps are best used in applications
involving frequent pumpdown cycles. The
vibration absorber is of an oil sealed or filled
design where minute amounts of oil may
enter the vacuum system via the piston of the
vibration attenuator.

The WS/WSU series pumps are driven by canned
motors.
Roots vacuum pumps of the series WAU/WSU
are provided with an additional integrated pressure equalization line and a differential pressure
valve.
Pumps from these series are supplied with
a vertical pumping action as standard.

RUVAC WSLF
The pumps of these series are especially adapted
Roots vacuum pumps from the RUVAC WS
series which are intended for operation with gas
lasers.
They are driven by a canned motor so that a shaft
seal for sealing against atmospheric pressure is
not required.
Air-cooled series with nominal pumping speeds
of 1000 m3 x h-1 (589 cfm) are available.
The RUVAC WSLF series with increased motor
ratings is intended for operation in connection
with frequency converters.
These pumps are available with nickel-plated or
plasma-nitrated surface as standard.

Backing Pumps
The backing pumps from LEYBOLD listed in the
following are recommended for connection to the
RUVAC Roots vacuum pumps:
♦ Rotary vane vacuum pumps
- TRIVAC B with pumping speeds between
16 and 65 m3 x h-1 (9.4 and 38.3 cfm)
- SOGEVAC with pumping speeds between
16 and 1200 m3 x h-1 (9.4 and 707 cfm)
♦ Dry compressing piston vacuum pumps
- EcoDry L with pumping speeds between
38 and 48 m3 x h-1 (22 and 28 cfm)
♦ Dry compressing screw vacuum pump for PI
- SCREWLine SP630 with pumping speed
of 630 m3 x h-1 (371 cfm)
♦ Rotary piston vacuum pumps
- E and DK with pumping speeds between
200 and 250 m3 x h-1 (117.8 and 147.3 cfm)
♦ Roots vacuum pumps with pre-inlet cooling
- RUVAC RAV G with pumping speeds
between 250 and 8100 m3 x h-1 (147.3 and
4770.9 cfm)
♦ Liquid ring vacuum pumps upon request

All pumps of these series are supplied with a
horizontal pumping action.
Vertical pumping action is available upon request.

RUVAC RA
RUVAC WA/WAU, WS/WSU
The series WA/WAU Roots vacuum pumps are
provided with directly flange-mounted standard
three-phase motors. The oiled radial sealing rings
of the RUVAC WA/WAU for sealing the shaft
against the atmosphere are made of FPM (fluor
caoutchouc).

RA series Roots vacuum pumps are equipped
with a directly flange-mounted three-phase motor
(RA 13 000 via V-belt drive).

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C07.05

C07

RUVAC WA/WAU

Roots Vacuum Pumps

RUVAC WA/WAU Roots Vacuum Pumps with Flange-Mounted Motors

RUVAC WAU 2001 single-stage Roots vacuum pump shown with ISO-K 160 collar flanges

Advantages to the User

tection against overloading at high pressures
on WAU models

♦ Two air-cooled series, each with four models

Supplied Equipment

♦ Reliable and trouble-free

♦ Pumping direction may be changed as
required

♦ RUVAC WA/WAU are supplied as standard for
a vertical pumping action, horizontal pumping
action upon request

♦ Sealing rings with their housing can be readily
replaced

♦ Ex T3 and T4 motor possible

♦ Gasket in the intake flange with dirt sieve
♦ The required oil filling is included in separate
bottles

♦ Shaft seals and elastomer seals made of
FPM/Viton

Typical Applications

♦ Standard motors in accordance with IEC
dimensions

♦ For oil-free compression of gases and vapors
in combination with a backing pump

♦ Easy to exchange with custom motors

♦ Short cycle pumping processes also in the
presence of large quantities of gas and vapor

♦ Integrated pressure equalization line for pro-

8

a4

a6
DN 1

DN

DN
DN
h2

h6

h4

a2

a1

1DN/DN
1

WA/WAU 251
WA/WAU 501
WA/WAU 501H
WA/WAU 1001
WA/WAU 1001H
WA/WAU 2001
WA/WAU 2001H

1)
2)

mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.

63 ISO-K
63 ISO-K
63 ISO-K
63 ISO-K
63 ISO-K
63 ISO-K
100 ISO-K
100 ISO-K
100 ISO-K
100 ISO-K
160 ISO-K
160 ISO-K
160 ISO-K
160 ISO-K

b6

b2

b1

50
a 1)

b7

a 1)

a1

a2

732
28.82
835
32.87
835
32.87
1050
41.34
1050
41.34
1275
50.20
1275
50.20

405
15.94
486
19.13
486
19.13
560
22.05
560
22.05
800
31.50
800
31.50

365
14.37
450
17.72
450
17.72
520
20.47
520
20.47
740
29.13
740
29.13

a3

a4

a5

a6

14
212 120 194
0.55 8.35 4.72 7.64
14
239 155 218
0.55 9.41 6.10 8.58
14
239 155 218
0.55 9.41 6.10 8.58
16.5 300 180 262
0.65 9.41 6.10 10.31
16.5 300 180 262
0.65 9.41 6.10 10.31
18
369 220 310
0.71 14.53 8.66 12.20
18
369 220 310
0.71 14.53 8.66 12.20

Dimension a refers to the standard type of motor supplied by us
RUVAC WAU only

DN 1

DN 1

DN
a3

h5
h3

h1

a5

2)

h

h7

2)

b6

DN1

b5

b

b3

b4

b

b1

b2

b3

b4

b5

b6

b7 2)

b8

h

h1

h2

h3

h4

h5 2)

h6

h7

250
9.84
307
12.09
307
12.09
372
14.65
372
14.65
457
17.99
457
17.99

270
10.63
299
11 77
299
11 77
352
13 86
352
13.86
518
20.39
518
20.39

210
8.27
229
9.02
229
9.02
278
10.94
278
10.94
388
15.28
388
15.28

280
11.02
320
12.60
320
12.60
370
14.57
370
14.57
460
18.11
460
18.11

230
9.06
271
10.67
271
10.67
320
12.60
320
12.60
422
16.61
422
16.61

170
6.69
201
7.91
201
7.91
246
7.91
246
7.91
292
11.50
292
11.50

24
0.94
24
0.94
24
0.94
24
0.94
24
0.94
23
0.91
23
0.91

305
12.01
390
15.35
414
16.30
490
19.29
524
20.63
635
25.0
642
25.28

285
11.22
313
12 32
330
12 99
366
14.41
398
15.67
456
17.95
460
18.11

300
11.81
340
13.39
340
13.39
396
15.59
396
15.59
530
20.87
530
20.87

160
6.30
180
7.09
180
7.09
211
8.31
211
8.31
300
11.81
300
11.81

280
11.02
320
12.60
320
12.60
370
14.57
370
14.57
460
18.11
460
18.11

180
7.09
194
7.48
194
7.48
227
8.94
227
8.94
351
13.82
351
13.82

306
12.05
348
13.70
348
13.70
414
16.30
414
16.30
578
22.76
578
22.76

360
14.17
430
16.93
450
17.72
532
20.94
564
22.20
753
29.65
760
29.92

330
12.99
370
14.57
370
14.57
425
425
425
425
541
21.3
541
21.3

307
12.09
332
13.07
350
13.78
392
15.43
424
16.69
523
20.59
530
20.87

DN1 = ND 6 pump flange in accordance with DIN 2501
DN1 = Collar flange with gasket for connecting ISO-K standard components

Dimensional drawing for the RUVAC WA/WAU pumps

C07.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

RUVAC WA/WAU

WA/WAU
251

WA/WAU(H)
501

WA/WAU(H)
1001

WA/WAU(H)
2001

m3 x h-1 (cfm)

253 (149)

505 (297.4)

1000 (589)

2050 (1207.5)

m3 x h-1 (cfm)

210 (123.7)
65 (38.3)

450 (265.1)
160 (94.2)

890 (524.2)
250 (147.3)

1850 (1089.7)
630 (371.3)

Technical Data
Nominal pumping speed 1)

Roots Vacuum Pumps

Max. pumping speed
at a pumping speed for the backing pump of m3 x h-1 (cfm)
Ultimate partial pressure 2)

mbar (Torr)

< 2 x 10-3 (1.5 x 10-3)

< 3 x 10-3 (2.25 x 10-3)

< 3 x 10-3 (2.25 x 10-3)

< 3 x 10-3 (2.25 x 10-3)

Ultimate total pressure 2)

mbar (Torr)

< 4 x 10-2 (3 x 10-2)

< 4 x 10-2 (3 x 10-2)

< 4 x 10-2 (3 x 10-2)

< 4 x 10-2 (3 x 10-2)

31 (23.3)
65 (38.3)

37 (27.8)
160 (94.2)

27 (20.3)
250 (147.3)

22 (16.5)
630 (371.3)

Permissible cut-in pressure RUVAC WA
mbar (Torr)
at a pumping speed for the backing pump of m3 x h-1 (cfm)
Max. permissible pressure difference
during continuous operation 3)

mbar (Torr)

Main supply, 50 Hz
∆/Y
60 Hz
∆/Y
60 Hz 3 phase

V
V
V

80 (60)

80 (60)

80 (60)

50 (37.5)

220-240/380-420
250-277/440-480
200-230/460

220-240/380-420
250-277/440-480
200-230/460

220-240/380-420
250-277/440-480
200-230/460

380-420
380-480/655-725
460

1.1 (1.5)

2.2 (3.0)

4.0 (5.4)

7.5 (10.2)

Insulation class
Motor power

F
kW (hp)

Nominal speed, approx. (50/60 Hz)

rpm

3000/3600

Max. permissible speed

rpm

3600

Type of protection

Oil filling of the shaft sealing ring housing

IP
l (qt)
l (qt)

1. Filling 5) / 2. Filling
0.9 (0.95) / 0.8 (0.85)
0.75 (0.79) / 0.7 (0.74)

1. Filling 5) / 2. Filling
2.0 (2.11) / 1.8 (1.90)
1.2 (1.27) / 1.1 (1.16)

1. Filling 5) / 2. Filling
3.85 (4.07) / 3.6 (3.81)
2.6 (2.75) / 2.4 (2.54)

l (qt)

0.6 (0.63)

1.0 (1.06)

1.3 (1.37)

1.6 (1.69)

Connection flanges *)
Weight WA/WAU
Noise level 6)

DN
kg (lbs)
dB(A)

Or dering Information
Roots vacuum pump
RUVAC WA
RUVAC WA (60 Hz, 3 phase) 7)
RUVAC WAU
RUVAC WAU (60 Hz, 3 phase) 7)
RUVAC WA, without motor
RUVAC WAU(H), with special ACE vibration absorber
RUVAC WA/WAU(H) seal kit
Flange adapter set, consisting of
Flange adapter with screws, bolts,
washers and nuts for ANSI flange
WA/WS pump
WAU/WSU pump
1)
2)
3)
4)
5)
6)
7)
*)

To DIN 28 400 and subsequent numbers
With single-stage rotary vane vacuum pump
TRIVAC, SOGEVAC
Applicable for ratio up to 1 : 10 between backing pump
and Roots vacuum pump
Authoriative, however, is the oil level at the oil-level glass
After a complete disassembly
At an operating pressure below < 10-1 mbar
(< 0.75 x 10-1 Torr)
60 Hz pumps supplied with ANSI adapter flanges
US models ASA flanges

54
1. Filling 5) / 2. Filling
0.65 (0.69) / 0.6 (0.63)
0.5 (0.53) / 0.45 (0.48)

63 ISO-K

63 ISO-K

100 ISO-K

160 ISO-K

85/89 (187.4/196.2)

128/133 (282.2/293.3)

220/225 (485.1/496.1)

400/406 (882/895.2)

< 64

< 67

< 75

< 80

WA/WAU
251

WA/WAU(H)
501

WA/WAU(H)
1001

WA/WAU(H)
2001

Part No. 117 20
Part No. 917 20
Part No. 117 21
Part No. 917 21
Part No. 117 24
–

Part No. 117 30
Part No. 917 30
Part No. 117 31
Part No. 917 31
Part No. 117 34
Part No. 118 31

Part No. 117 40
Part No. 917 40
Part No. 117 41
Part No. 917 41
Part No. 117 44
Part No. 118 41

Part No. 117 50
Part No. 917 50
Part No. 117 51
Part No. 917 51
–
Part No. 118 51

Part No. 194 60

Part No. 194 64

Part No. 194 68

Part No. 194 72

(3" ANSI)
Part No. 200 03 179
Part No. 200 03 179

(3" ANSI)
Part No. 200 03 179
Part No. 200 03 179

(4" ANSI)
Part No. 200 03 180
Part No. 200 03 180

(6" ANSI)
Part No. 200 03 181
Part No. 200 03 182

10

-3

10

-2

10

-1

1

Torr

7.5

10 4
3

m xh

5000
cfm

-1

1000
Pumping speed

Oil filling for the bearing chamber 4)
vertical pumping action, approx.
horizontal pumping action, approx.

10 3

500

10 28

50

100
WA/WAU 2001 + SV 630
WA/WAU 1001 + SV 300
WA/WAU 501 + SV 200
WA/WAU 251 + D 65 B

6
4
2

10 1
10 -3

2

4

6 8

10

-2

-1

10
Pressure

10

0

mbar

10
10

1

Total pressure
Patial pressure

Pumping speed of the RUVAC WA/WAU, 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C07.07

C07

RUVAC WS/WSU PFPE

Roots Vacuum Pumps

RUVAC WS/WSU PFPE Roots Vacuum Pumps with Canned Motors

Single stage Roots vacuum pump RUVAC WSU 1001 shown with ISO-K 160 rotatable flanges

Advantages to the User

♦ All elastomer seals made of FPM/Viton

♦ Two series, each with four models

♦ Integrated pressure equalization line with
differential pressure valve prevents overloading on WSU model

♦ Used where the possibility of contamination
due air ingress or pumped media leakage
must be avoided

♦ RUVAC WS 251 to 2001 for use with a frequency converter for a wide frequency range

♦ Suction or pumping of high-purity or radioactive gases

♦ No shaft feedthrough to the atmosphere, thus
particularly leaktight

Supplied Equipment

♦ Pumping direction may be changed as
required

♦ The required oil or PFPE filling is included in
separate bottle

♦ Highly leak-tight air-cooled pumps driven by a
canned motor
♦ Lubricated with mineral oil. RUVAC WS/WSU
PFPE with perfluoropolyether (PFPE)
♦ WS and WS PFPE pumps are identical except
for the lubricant and the shipping package
♦ No thermal problems due to the speed independent cooling arrangement using a separately connected fan, thus no thermal problems
at low speeds

(0.75 x 10-2 and 0.75 x 10-4 Torr)

♦ Purged with nitrogen for corrosion protection

Typical Applications
♦ For applications which require a high pumping
speed at pressures between 10-2 and 10-4 mbar

♦ Over-temperature switch in the stator coil of
the motor

♦ Gasket in the intake flange with integrated dirt
sieve

b8
a4
DN 1

DN

DN
DN
h2

h4
h

h6
h1

a5

a2

a1

mm
in.
WS/WSU 501
mm
in.
WS/WSU 501H mm
in.
WS/WSU 1001 mm
in.
WS/WSU 1001H mm
in.
WS/WSU 2001 mm
in.
WS/WSU 2001H mm
in.

b2

b1

50
b7
1)

WS/WSU 251

b6

a

DN1

a

a1

a2

65
65
65
65
65
65
100
100
100
100
150
150
150
150

63 ISO-K
63 ISO-K
63 ISO-K
63 ISO-K
63 ISO-K
63 ISO-K
100 ISO-K
160 ISO-K
160 ISO-K
160 ISO-K
160 ISO-K
160 ISO-K
160 ISO-K
160 ISO-K

732
28.82
835
32.87
835
32.87
1050
41.34
1050
41.34
1275
50.20
1275
50.20

405
15.94
486
19.13
486
19.13
560
22.05
560
22.05
800
31.50
800
31.50

365
14.37
450
17.72
450
17.72
520
20.47
520
20.47
740
29.13
740
29.13

a3

a4

a5

a6

14
212 120 194
0.55 8.35 4.72 7.64
14
239 155 218
0.55 9.41 6.10 8.58
14
239 155 218
0.55 9.41 6.10 8.58
16.5 300 180 262
0.65 9.41 6.10 10.31
16.5 300 180 262
0.65 9.41 6.10 10.31
18
369 220 310
0.71 14.53 8.66 12.20
18
369 220 310
0.71 14.53 8.66 12.20

h3

b6

DN 1

b5

b

b3

1)

DN = ND 6 pump flange in accordance with DIN 2501

RUVAC WSU only

DN
DIN 2501

DN 1

DN 1

DN
a3

h 51)

b4

DN1 = Collar flange with gasket for connecting ISO-K standard components

b

b1

b2

b3

b4

b5

b6

b7 1)

b8

h

h1

h2

h3

h4

h5 1)

h6

h7

250
9.84
307
12.09
307
12.09
372
14.65
372
14.65
457
17.99
457
17.99

270
10.63
299
11 77
299
11 77
352
13 86
352
13.86
518
20.39
518
20.39

210
8.27
229
9.02
229
9.02
278
10.94
278
10.94
388
15.28
388
15.28

280
11.02
320
12.60
320
12.60
370
14.57
370
14.57
460
18.11
460
18.11

230
9.06
271
10.67
271
10.67
320
12.60
320
12.60
422
16.61
422
16.61

170
6.69
201
7.91
201
7.91
246
7.91
246
7.91
292
11.50
292
11.50

24
0.94
24
0.94
24
0.94
24
0.94
24
0.94
23
0.91
23
0.91

305
12.01
390
15.35
414
16.30
490
19.29
524
20.63
635
25.0
642
25.28

285
11.22
313
12 32
330
12 99
366
14.41
398
15.67
456
17.95
460
18.11

300
11.81
340
13.39
340
13.39
396
15.59
396
15.59
530
20.87
530
20.87

160
6.30
180
7.09
180
7.09
211
8.31
211
8.31
300
11.81
300
11.81

280
11.02
320
12.60
320
12.60
370
14.57
370
14.57
460
18.11
460
18.11

180
7.09
194
7.48
194
7.48
227
8.94
227
8.94
351
13.82
351
13.82

306
12.05
348
13.70
348
13.70
414
16.30
414
16.30
578
22.76
578
22.76

–
–
360
14.17
450
17.72
360
14.17
564
22.20
430
16.93
760
29.92

330
12.99
330
12.99
330
12.99
330
12.99
330
12.99
370
14.57
370
14.57

307
12.09
332
13.07
350
13.78
392
15.43
424
16.69
523
20.59
530
20.87

Dimensional drawing for the RUVAC WS/WSU pumps

C07.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

RUVAC WS/WSU PFPE

Technical Data

WS/WSU
251

WS/WSU(H)
501

Roots Vacuum Pumps
WS/WSU(H)
1001

WS/WSU(H)
2001

Nominal pumping speed 1)

m3 x h-1 (cfm)

253 (149)

505 (297.4)

1000 (589)

2050 (1207.5)

Max. pumping speed
at a pumping speed for the backing pump of

m3 x h-1 (cfm)
m3 x h-1 (cfm)

210 (123.7)
65 (38.3)

450 (265.1)
160 (94.2)

890 (524.2)
250 (147.3)

1850 (1089.7)
630 (371.3)

Ultimate partial pressure 2)

mbar (Torr)

< 2 x 10-5 (1.5 x 10-5)

< 3 x 10-5 (2.3 x 10-5)

< 3 x 10-5 (2.3 x 10-5)

< 3 x 10-5 (2.3 x 10-5)

Ultimate total pressure 2)

mbar (Torr)

< 8 x 10-4 (6 x 10-4)

< 8 x 10-4 (6 x 10-4)

< 8 x 10-4 (6 x 10-4)

< 8 x 10-4 (6 x 10-4)

31 (23.3)
65 (38.3)

37 (27.8)
100 (58.9)

27 (20.3)
250 (147.3)

22 (16.5)
250 (147.3)

80 (60)

80 (60)

80 (60)

50 (37.5)

4.0 (5.4) / 4.4 (6.0)

7.5 (10.2) / 8.5 (11.6)

6000

4200 4)

1. Filling 6) / 2. Filling
1.95 (2.06) / 1.75 (1.85)
1.2 (1.27) / 1.1 (1.16)
2.0 (2.11) / 1.8 (1.90)
1.2 (1.27) / 1.1 (1.16)

1. Filling 6) / 2. Filling
3.8 (4.02) / 3.5 (3.7)
2.6 (2.75) / 2.4 (2.54)
3.85 (4.07) / 3.6 (3.81)
2.6 (2.75) / 2.4 (2.54)

Permissible cut-in pressure RUVAC WS at
mbar (Torr)
a pumping speed for the backing pump of
m3 x h-1 (cfm)
Max. permissible pressure difference
during continuous operation 3)
Main supply, 50 Hz
60 Hz

mbar (Torr)
V
V

∆/Y
∆/Y

200/230/400
208/230/265/460

Insulation class
kW (hp)

Nominal speed, approx. (50/60 Hz)

rpm

Max. permissible speed

rpm

Type of protection

l (qt)
l (qt)
l (qt)
l (qt)

Connection flanges

DN
kg (lbs)

Noise level 7)

dB(A)

Ordering Information
Roots vacuum pump
RUVAC WS
RUVAC WSU
RUVAC WS PFPE
RUVAC WSU PFPE
RUVAC WSU(H), with special ACE vibration absorber
RUVAC WS/WSU(H) seal kit
Flange adapter set, consisting of
Flange adapter with screws, bolts,
washers and nuts for ANSI flange
WA/WS pump
WAU/WSU pump
1)
2)
3)
4)
5)
6)
7)
*)

2.2 (3.0) / 2.4 (3.3)
3000/3600

6000

6000

1. Filling 6) / 2. Filling
0.6 (0.63) / 0.55 (0.58)
0.5 (0.53) / 0.45 (0.48)
0.65 (0.69) / 0.6 (0.63)
0.5 (0.53) / 0.45 (0.48)

1. Filling 6) / 2. Filling
0.85 (0.9) / 0.75 (0.79)
0.75 (0.79) / 0.7 (0.74)
0.9 (0.95) / 0.8 (0.85)
0.75 (0.79) / 0.7 (0.74)

IP

Oil filling for the bearing chamber 5)
PFPE,
vertical pumping action, approx.
horizontal pumping action, approx.
other oils, vertical pumping action, approx.
horizontal pumping action, approx.
Weight WS/WSU

1.1 (1.5) / 1.4 (1.9)

To DIN 28 400 and subsequent numbers
With single-stage rotary vane vacuum pumps TRIVAC
Applicable for ratio up to 1 : 10 between backing pump
and Roots vacuum pump
Also 6 000 rpm upon order
Authoriative, however, is the oil level at the oil-level glass
After a complete disassembly
At an operating pressure < 10-1 mbar (< 0.75 x 10-1 Torr)
60 Hz pumps supplied with ANSI adapter flanges

20

63 ISO-K

63 ISO-K

100 ISO-K

160 ISO-K

90/95 (198.5/209.5)

130/135 (286.7/297.7)

228/233 (502.7/513.8)

458/465 (1009.9/1025.3)

< 63

< 63

< 68

< 72

WS/WSU
251

WS/WSU(H)
501

WS/WSU(H)
1001

WS/WSU(H)
2001

Part No. 117 22
Part No. 117 23
Part No. 117 27
Part No. 117 28
–

Part No. 117 32
Part No. 117 33
Part No. 117 37
Part No. 117 38
Part No. 118 33

Part No. 117 42
Part No. 117 43
Part No. 117 47
Part No. 917 48 *)
Part No. 118 43

Part No. 117 52
Part No. 117 53
Part No. 117 57
–
Part No. 118 53

Part No. 194 62

Part No. 194 66

Part No. 194 70

Part No. 194 74

(3" ANSI)
Part No. 200 03 179
Part No. 200 03 179

(3" ANSI)
Part No. 200 03 179
Part No. 200 03 179

(4" ANSI)
Part No. 200 03 180
Part No. 200 03 180

(6" ANSI)
Part No. 200 03 181
Part No. 200 03 182

10

-5

10

-4

10

-3

10

-2

10

-1

1

Torr 7.5

10 4
3

m xh

5000
cfm

-1

1000

Pumping speed

Motor power, 50/60 Hz

F

10 3

500

100

10 2

8
6

2

10 1
2
10 -5

4 68

10

-4

10

-3

10

-2

Pressure

Pumping speed of the RUVAC WS/WSU, 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

50

WS/WSU 2001 + SV 630
WS/WSU 1001 + SV 300
WS/WSU 501 + SV 200
WS/WSU 251 + D 65 B

4

10

-1

10

10

0

mbar 10

1

Total pressure
Patial pressure

C07.09

C07

RUVAC WSLF

Roots Vacuum Pumps

RUVAC WSLF Roots Vacuum Pumps for Laser Gas Systems
Roots vacuum pumps driven by canned motors
are available for gas laser systems.

RUVACDWSLF
TRIVAC
8 B 1001 LF Roots vacuum pump

Advantages to the User

Supplied Equipment

♦ A gas mixture of helium, nitrogen and carbon
monoxide is continuously circulated at a reduced system pressure
♦ High pumping speed from a small, quiet running pump

♦ Water-cooled oil separating system

♦ Horizontal pumping action as standard

♦ Integrated oil separating system for extended
maintenance intervals

♦ With oil pressure switch and oil drain facility
♦ The required oil filling is included separately
(special oil ANDEROL® 2100 HTCL)

Typical Applications

♦ Operation with a frequency converter is
possible

♦ Purged with nitrogen for corrosion protection

♦ Processing of ferrous and non-ferrous materials like welding, cutting and surface refinement

♦ Nickel-plated pump chamber surfaces
♦ Through an additional vacuum pump the bearing chambers may be evacuated to a pressure
lower than the pressure within the pumping
chamber of the RUVAC

Technical Note
♦ The gas circulation system must be very clean
and entirely free of hydrocarbons

DN

a4

1)

2)

DN

h1

h

a5
a1

b3

a3

a2

b2
b1

a

b

1)

WSLF 1001

mm
in.

DN

a

a1

a2

a3

a4

a5

b

b1

b2

b3

h

h1

100
100

990
39.0

560
22.05

520
20.47

16.5
0.65

360
14.17

180
7.09

370
14.57

320
12.60

246
9.69

24
0.94

227
8.94

414
16.302

Connection for a vacuum pump
4 mm water connection for the oil separator
DN = ND 6 *) pump flange to DIN 2501

2)

*) ND = nominal pressure

Dimensional drawing for the RUVAC WSLF pumps

C07.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

RUVAC WSLF

Technical Data
Nominal pumping speed 1)

Main supply, 50 Hz
60 Hz

WSLF 1001

m3 x h-1 (cfm)

Max. permissible pressure difference
during continuous operation

mbar (Torr)
V
V

∆/Y
∆/Y

Motor power, 50/60 Hz

kW (hp)

1000 (589)

80 (60)
200-230/400
200-265/460
7.5 (10.2) / 8.5 (11.6)

Nominal speed, 50/60 Hz

rpm

3000/3600

Max. permissible speed

rpm

6000

Type of protection
Oil filling of the bearing chambers

IP
l (qt)

Connection flange DIN 2501
Weight
Cooling water pressure
Cooling water throughput

Roots Vacuum Pumps

DN

20
1.2 (1.27)
100

kg (lbs)

275 (606.4)

bar (psi)

1 - 5 (14.5 - 72.5)

l x h-1 (cfm)

Hose connection for hose

Ordering Information

C07

200 (0.9)
6x1

WSLF 1001

RUVAC WSLF Roots vacuum pump
RUVAC WSLF 1001
RUVAC WSLF seal kit
1)

Part No. 117 94
Part No. 194 70

To DIN 28 400 and subsequent numbers

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C07.11

RUVAC RA

Roots Vacuum Pumps

RUVAC RA Roots Vacuum Pumps with Flange-Mounted Motors (50 Hz)
Roots vacuum pumps offering a high pumping
speed.

RUVAC RA 5001 single-stage Roots vacuum pump

Advantages to the User

Custom Pumps

♦ Oil immersed radial shaft seals made of FPM
for sealing against the atmosphere
♦ If required with external pressure equalisation
line and differential pressure valve so that the
pump may be switched on jointly with the
backing pump at atmospheric pressure
♦ Motors can easily be exchanged for special
voltage motors. Explosion protected motors
and motors for special main frequencies upon
request
♦ Over-temperature switch in the stator coil of
the motor

a5

♦ Rugged dry compressing vacuum pump
♦ Most reliable even under rough operating
conditions

Typical Applications

♦ Pumps made of special materials may be
specified as well as pressure burst resistant
pumps

♦ Large vacuum systems like sintering and
annealing furnaces which require multi-stage
pumpsets

♦ Custom designed pumps for pumping speeds
of 250 m3/h to 2000 m3/h (147.3 to
1178 cfm)

♦ In large vacuum rectification systems Roots
vacuum pumps with postcondensers for compressing of vapors

Technical Note
♦ For operation ordering of oil is necessary
(see section “Accessories”)

DN

a6

*

b
b1

a

a1

♦ If required the RA pumps are also available as
C versions (chemical versions)

a2

2110*
l
l2
782
DN
DN300
300
DIN
DIN2532
2532

l1
685

h
d

930
h

h1

h2

420
h1
d1

a3
a4

h2
220
b2

DN

RUVAC
000
RUVAC
RA
13
000
RUVAC
RARA
1313
000
**Breite
==1000
Breite
1000
* Width
= 1000
DN

DN1 = PN 10 pump flange to DIN-EN 1092-2

RA 13 000 300
300
DN
RA 3001
RA 5001
RA 7000
RA 9001

200
200
200
200
250
250
300
300

mm
in.
mm
in.
mm
in.
mm
in.

a

a1

a2

a3

a4

a5

a6

b

b1

b2

ø dk6

ø d1

h

980
38.58
1013
39.88
1143
45.0
1467
57.76

470
18.50
468
18.43
533
20.98
685
26.97

510
20.08
545
21.46
610
24.02
782
30.79

290
11.42
280
11.02
410
16.14
655
25.79

350
13.78
360
14.17
490
19.29
800
31.50

1101
43.35
1136
44.72
1266
49.84
1594
62.76

1570
61.81
1610
63.39
1740
68.50
2220
87.40

652
25.67
800
31.50
800
31.50
910
35.83

538
21.18
652
25.67
652
25.67
810
31.89

600
23.62
720
28.35
720
28.35
830
32.68

35
1.38
42
1.65
42
1.65
55
2.17

23
0.91
23
0.91
23
0.91
27
1.06

500
19.69
630
24.80
630
24.80
710
27.95

h1

l
mm
in.

l1

l2

h

h1

h2

2110 685 782 930 420 220
83.07 26.97 30.79 36.61 16.54 8.66

h2

35
250
1.38 9.84
50
315
1.97 12.40
50
315
1.97 12.40
30
355
1.18 13.98

Dimensional drawing for the RUVAC RA pumps

C07.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

RUVAC RA

RA
3001

RA
5001

RA
7001

RA
9001

RA
13000

m3 x h-1 (cfm)

3900 (2297)

5550 (3269)

7470 (4400)

9720 (5725)

13 000 (7657)

m3 x h-1 (cfm)

2900 (1708)
630 (371)

4100 (2415)
800 (471)

5600 (3298)
1260 (742)

7500 (4418)
1890 (1113)

10 000 (5890)
2500 (1473)

66 (49.5)
133 (99.8)

93 (69.8)
93 (69.8)

Technical Data
Nominal pumping speed 1)

Roots Vacuum Pumps

Max. pumping speed
at a pumping speed for the backing pump of m3 x h-1 (cfm)
Ultimate partial pressure 2)

mbar (Torr)

< 2 x 10-3 (< 1.5 x 10-3)

Ultimate total pressure 2)

mbar (Torr)

< 3 x 10-2 (< 2.3 x 10-2)

Max. permissible pressure difference
during continuous operation 3)
for < 3min.

mbar (Torr)
mbar (Torr)

Main supply, 50 Hz
Motor power

53 (39.8)
93 (69.8)

53 (39.8)
93 (69.8)

53 (39.8)
93 (69.8)
400 D

V
kW (hp)

11 (15)

15 (20.4)

18.5 (25.2)

22 (30)

30 (40.8)

Nominal speed, 50 Hz

rpm

3000

3000

3000

1500

2000

Max. permissible speed

rpm

3600

3600

3600

1800

2000

Type of protection
Oil filling, approx.
vertical pumping action
horizontal pumping action

54

IP
l (qt)
l (qt)

7.0 (7.4)
3.5 (3.7)

12.0 (12.7)
5.4 (5.7)

12.0 (12.7)
5.4 (5.7)

11.0 (11.6)
7.6 (8.0)

11.0 (11.6)
7.6 (8.0)

Connection flange, suction side 4, 5)
pressure side 4, 5)

DN
DN

200
200

200
200

250
250

300
300

300
300

Adapter flange package, suction side
pressure side

DN
DN

250 ISO-K
160 ISO-K

250 ISO-K
160 ISO-K

250 ISO-K
250 ISO-K

320 ISO-K
250 ISO-K

320 ISO-K
250 ISO-K

620 (1367.1)

770 (1697.9)

870 (1918.4)

1500 (3307.5)

upon request

RA
3001

RA
5001

RA
7001

RA
9001

RA
13000

Part No. 119 50

Part No. 119 53

Part No. 119 60

Part No. 119 63

upon request

–

–

Weight complete, approx.

kg (lbs)

Ordering Information
RUVAC RA Roots vacuum pump
with motor 400 V, 50 Hz, coupling and lantern 6)
RUVAC RA seal kit
Adapter flange package for suction and pressure side,
including centering ring with integrated
dirt sieve in the intake flange
1)
2)
3)
4)
5)

Part No. 200 14 472

To DIN 28 400 and subsequent numbers
With single-stage rotary vane vacuum pumps SOGEVAC
Valid for a ratio of 1 : 5 between backing pump
and Roots vacuum pump
According to DIN 2532
Without adapter flange to ISO-K flange
Without oil filling

Part No. 200 14 472

10

10

3

m xh

Pumping speed

6)

upon request

-3

10

–

-2

10

-1

1

Torr 7.5

4

5000
cfm

-1

1000

RA 13000 + 4 x SV 630
RA 9001 + 3 x SV 630
RA 7001 + 2 x SV 630
RA 5001 + 2 x SV 630
RA 3001 + 1 x SV 630

10 3
8
6
4

500

2

10

100

2

10 -3

2

4

6 8

10 -2

10 -1

Pressure

Pumping speed curves for the RUVAC RA, 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

10 0

mbar

10 1

Total pressure
Partial pressure

C07.13

C07

RUVAC RA

Roots Vacuum Pumps

Version for the North and South American Continents

RUVAC RA Roots Vacuum Pumps with Frame Mounted Motors (60 Hz)
Roots vacuum pumps offering a high pumping
speed.

RUVAC RA 3001 single-stage Roots vacuum pump with frame mounted motor

Advantages to the User

Custom Pumps
♦ Rugged dry compressing vacuum pump

♦ Oil immersed radial shaft seals made of
FPM/Viton for sealing against the atmosphere

♦ If required the RA pumps are also available as
C versions (chemical versions)

♦ Most reliable even under rough operating
conditions

♦ External pressure equalization line and differential pressure valve so that the pump may be
switched on simultaneously with the backing
pump at atmospheric pressure
♦ Motors can easily be exchanged for special
voltage motors. Explosion protected motors
and motors for special main frequencies upon
request
♦ Over-temperature switch in the stator coil of
the motor

Typical Applications

♦ Pumps made of special materials may be
specified as well as pressure burst resistant
pumps

♦ Large vacuum systems like sintering and
annealing furnaces which require multi-stage
pumpsets

♦ Custom designed pumps for pumping speeds
of 250 m3/h to 2000 m3/h (147.3 to
1178 cfm)

♦ In large vacuum rectification systems Roots
vacuum pumps with postcondensers for compressing of vapors

Technical Note

Optional ANSI Sealing Disc

♦ For operation ordering of oil is necessary
(see section “Accessories”)

B

C

Pressure Switch

K

Oiler

G
E
F
D
K
L

L

J

J

M

A

H

RA 3001
RA 5000
RA 7001
RA 9001

mm
in.
mm
in.
mm
in.
mm
in.

ANSI Inlet

ANSI Outlet

A

B

C

D

E

F

G

H

J

K

8“
8
8“
8
10“
10
12“
12

4“
4
4“
4
6“
6
8“
8

1448
57
1727
68
1778
70
2108
83

470
18 1/2
468
18 7/16
533
21
686
27

1092
43
1184
46 5/8
1276
50 1/4
1481
58 8/16

470
18 1/2
484
19 1/16
518
20 3/8
686
27

693
27 9/32
823
32 13/32
874
34 13/32
954
37 9/16

403
15 7/8
468
18 7/16
519
20 7/16
559
22

582
22 29/32
712
28 1/32
712
28 1/32
792
31 3/16

652
25 21/32
797
31 3/8
797
31 3/8
906
35 11/16

572
22 1/2
711
28
737
29
902
35 1/2

3
1/8
3
1/8
3
1/8
3
1/8

DN1 = PN 10 pump flange to DIN-EN 1092-2

Dimensional drawing for the RUVAC RA pumps

C07.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

RUVAC RA

Roots Vacuum Pumps

Version for the North and South American Continents
Technical Data

RA
3001

RA
5001

RA
7001

RA
9001

Displacement at 60 Hz

m3 x h-1 (cfm)

4555 (2681)

6475 (3814)

8723 (5134)

11 356 (6684)

Backing pump speed

m3 x h-1 (cfm)

773 (455)

1546 (910)

1546 (910)

2319 (1365)

3600

3600

3600

1800

15 (20.4)

20 (27.2)

25 (34)

30 (40.8)

l (qt)

8 (8.5)

9 (9.5)

9 (9.5)

13 (14)

Normal starting pressure for continuous
operation with recommended forepump
(standard motor)

mbar (Torr)

13 (10)

20 (15)

13 (10)

27 (20)

Maximum differential pressure during
continuous operation (standard motor)

mbar (Torr)

53 (40)

53 (40)

53 (40)

67 (50)

Starting pressure for intermittent operation
(≤ 3 min) with recommended forepump
(standard motor)
mbar (Torr)

27 (20)

33 (25)

20 (15)

53 (40)

Maximum differential pressure during intermittent
operation (≤ 3 min - standard motor)
mbar (Torr)

93 (70)

93 (70)

93 (70)

133 (100)

634 (1400)

815 (1800)

906 (2000)

1540 (2400)

RA
3001

RA
5001

RA
7001

RA
9001

Part No.
98-236-3001

Part No.
98-236-5001

Part No.
98-236-7001

Part No.
98-236-9001

Sealing disc, inlet

Part No.
910-181-608

Part No.
910-181-608

Part No.
910-181-609

Part No.
910-181-610

Sealing disc, outlet

Part No.
910-181-606

Part No.
910-181-606

Part No.
910-181-607

Part No.
910-181-608

Rotation speed (nominal)
Motor power (standard motor)
Oil filling, approx.

Weight, approx.

rpm
kW (hp)

kg (lbs)

Or dering Information
RUVAC RA Roots vacuum pump
with 3-phase, T.E.F.C. motor (standard), 230/460 V, 60 Hz,
base,flexible coupling, coupling guard, screen,
ANSI flanges, PS 115 pressure switch and lubricant

Pressure switch amplifier SV 110

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C07

Part No. 160 78-1

C07.15

Roots Vacuum Pumps
Pressure Switches
The RUVAC vacuum pumps may be switched on
and off automatically through a pressure switch
driven by a SV 110 switching amplifier and a
contactor.
The pressure switch may be installed in the intake of the RUVAC using a screw-in adaptor, an
elbow and two centering and two clamping rings.
Upon request the pressure switch may be set by
LEYBOLD to a fixed value. Please state this
pressure value in your order.

C07.16

Accessories

Or der ing Information
Pressure switch
PS 115, adjustable setting
Pressure switch setting

Pressure Switches
Part No. 160 04
Part No. 160 05

Accessories for fitting the PS pressure switch
Screw-in adaptor DN 16 KF, M 16 x 1.5 mm (0.06 in.)
Elbow DN 16 KF
Centering ring DN 16 KF (2 are required)
Clamping ring DN 16 KF (2 are required)

Part No. 168 40
Part No. 184 36
Part No. 183 26
Part No. 183 41

SV 110 switching amplifier (for PS 114/115)

Part No. 160 78

Oil pressure switch for RUVAC WSLF 1001 and WS-PFPE

Part No. 194 82

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Miscellaneous

Roots Vacuum Pumps

Vacuum Pump Oils
Lubricating oils for rotary vacuum pumps need to
fulfil demanding requirements. Their vapor pressure must be low also at high temperatures,
water content and water uptake must be minimal.
Their viscosity characteristics needs to be flat,
lubricating properties need to be excellent and
they must resist cracking upon being mechanically stressed.
All the vacuum pump oils listed in the following
have been subjected in our factory laboratories to
very comprehensive tests closely resembling the
conditions encountered in practice by the pumps
from the RUVAC series.
We therefore recommend the exclusive use of
vacuum pump oils fully qualified by Leybold so
as to ensure optimum performance of the
Leybold vacuum pumps and also to ensure optimum oil change intervals.
Under vacuum conditions lubricating oils, especially those with additives may behave quite differently than expected. Additives may adversely
affect the attainable ultimate pressure and may
react with the media being pumped.
When using not suitably qualified third party oils,
the oil change intervals and the performance of
the vacuum pump may be reduced. Also unwanted deposits may occur which may even cause
severe damage to the vacuum pump.
For these reasons please understand that we
must make our warranty commitment dependent
on the use of oils which have been qualified by
us. Damages caused by the use of not suitably
qualified lubricating oils are not covered by our
warranty.
In order to adapt the pumps to the different applications of our customers, different types of oil
are used in the RUVAC pumps.
Please note that owing to differing properties not
all types of oil may be used in all pumps of the
RUVAC series. If you can not find the combination of pump and oil you require please ask us for
a quotation.

Lubricant Types
Mineral Oils
Mineral oils are products distilled and refined
from crude oil. These do not consist of precisely
defined compounds but rather consist of a complex mixture. The way in which the mineral oil is
pre-treated and its composition are decisive as to
the applications it will be suited for. Depending
on the distribution of the hydrocarbons and the
dominance of certain properties, mineral oils are
grouped according to paraffin-base, naphthenic
and aromatic. For the purpose of attaining especially low ultimate pressures, mineral oils must
be selected on the basis of a core fraction.
The thermal and chemical resistance of mineral
oils has been found to be adequate in the majority of applications. They offer a high degree of
compatibility with elastomers and resistance to
hydrolysis.

Synthetic Oils
Synthetic oils are produced by a chemical reaction. The group of synthetic oils includes liquids
differing widely as to their chemical structure and
composition. Correspondingly their physical and
chemical properties differ considerably. Synthetic
oils are used in those cases where special properties of the oil are required which can not be
fulfilled by mineral oils.
The oils given in the following belong to the
group of synthetic oils:

Ester Oils
Ester oils are organic compounds which excel
especially through their high thermal resistance
to cracking compared to mineral oils. Chemical
resistance is generally quite good, but will
depend on the type of ester oil. Elastomer compatibility and resistance against hydrolysis are
not so good compared to mineral oils.

Perfluorinated polyether
(PFPE)
These are oils which are only composed of carbon (C), fluorine (F) and oxygen atoms (O). The
existing C-O and C-F bonds are highly stable. For
this reason PFPE oils are practically inert against
all chemical and oxidising influences.
Perfluorinated polyether will not polymerise
under the influence of high energy radiation.
PFPE is non-flammable. Leybold NC1/14 has the
approval of BAM (Federal Institute for Materials
Research and Testing) for pumping of pure oxygen.
Perfluorinated polyether are used when pumping
strongly reactive substances like oxygen (O2),
fluorine F2 and uranium hexafluoride UF6.
Regarding Lewis acids (for example, boron
trifluoride BF3, aluminum trichloride AlCl3) they
are not completely inert. Here reactions may take
place at temperatures over 100 °C (212 °F).
Perfluorinated polyether are thermally highly
stable. Thermal decomposition may only take
place at temperatures of over 290 °C (554 °F).
Caution: Perfluorinated polyether will – when
decomposed – release toxic and corrosive gases:
hydrogen fluoride HF, carbonyl difluoride COF2.
For this reason open fires must be avoided in the
workspace where PFPE is being used. Do not
smoke in the workspace where PFPE is being
used.
Only suitably prepared pumps must be used in
connection with perfluorinated polyether, since it
is essential that the pumps be free of hydrocarbons.
Changing from one basic type of oil to PFPE
must be left exclusively to authorised Service
Centers. The pump will have to be fully disassembled and carefully cleaned. Gaskets and filters will
have to be exchanged and suitable greases will
have to be used.

For all lubricants from our line of products you may obtain Safety Data Sheets from the Dept. Technical
Support in Cologne.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C07.17

C07

Miscellaneous

Roots Vacuum Pumps
Overview Oils
Application Data
Type of oil

Examples of areas of application and process media

Special Oil N62

ANDEROL® 555

ANDEROL® 2100 HTCL

NC 1/14

Paraffin-base mineral oil,
core faction, free of
additives

Diester oil

Polyolester

Perfluorinated polyether PFPE

Standard oil

Used at elevated temperatures.
Pumping of air,
chemically inert
permanent gases (noble
gases, for example),
carbon dioxide CO2,
carbon monoxide CO,
aliphatic compounds
(for example, methane CH4,
propane C3H8,
ethylene C2H4),
organic solvent vapors

Used in the RUVAC WSLF
for operation in connection
with gas lasers

For pumping strong oxidants
like oxygen, O2, ozone O3,
nitrogen oxides NOx and
sulphur oxides (SO2, SO3)
as well as reactive substances
like halogens (for example
fluorine F2, chlorine Cl2),
hydrogen halides (for
example hydrogen
chloride HCl, hydrogen
bromide HBr), uranium
hexafluoride UF6 and
conditionally Lewis acids
(for example, boron
trichloride BCl3)

For pumping air,
chemically inert
permanent gases
(noble gases, for example),
water vapor

Remarks

The ultimate pressures
stated in our catalogs are
based on operation of the
pump with N62 (except
for the PFPE pumps)

Use only PFPE
modified pumps. For
operation with PFPE we
recommend the exclusive
use of such pump types
which are equipped with a
split-pole motor
Mixing with other types of
oil must be absolutely
avoided

Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Technical Data

Suited
Conditionally suited
Not suited

Suited
Conditionally suited
Not suited

Suited
Conditionally suited
Not suited

Suited
Suited
Suited

Special Oil N62

ANDEROL® 555

ANDEROL® 2100 HTCL

NC 1/14

Viscosity
at 040 °C (104 °F)
at 100 °C (212 °F)

mm2/s
mm2/s

90
10

94
9

94
13

47
5

Flash point

°C (°F)

> 255 (491)

250 (482)

265 (509)

– 2)

< 1 x 10-5 (< 0.75 x 10-5)
< 3 x 10-3 (< 2.3 x 10-3)

7 x 10-5 (5.3 x 10-5)
1.5 x 10-3 (1.1 x 10-3)

5 x 10-5 (3.8 x 10-5)
8.5 x 10-4 (6.4 x 10-4)

3 x 10-7 (2.3 x 10-7)
6 x 10-4 (4.5 x 10-4)

0.88 3)

0.96

0.92

1.89 3)

°C (°F)

< -9 (< -16)

-42 (-44)

-35 (-31)

-40 (-40)

g/mol

550

530

No known

2500

Special Oil N62

ANDEROL 555

ANDEROL 2100 HTCL

NC 1/14

Part No. 177 01
Part No. 177 02
Part No. 177 03
Part No. 177 05

Part No. 200 10 272
Part No. 200 10 891
Part No. 200 00 193
–

Part No. 200 14 333
–
–
–

Part No. 177 38
–
–
–

Vapor pressure
at 020 °C (68 °F)
at 100 °C (212 °F)

mbar (Torr)
mbar (Torr)

Density at 15 °C (59 °F)
Pour point

g/ml

Middle molecular weight

Or dering Information
01 litre (1.06 qt)
05 litres (5.29 qt)
20 litres (21.14 qt)
180 kg (397.35 lbs)

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
2) Caution: Perfluorinated polyether will, when being decomposed at temperatures over 290 °C (554 °F), release toxic and corrosive gases
For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used
3) at 20 °C (68 °F)
ANDEROL® is a trademark of ANDEROL BV

C07.18

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Miscellaneous

Roots Vacuum Pumps

Version for the North and South American Continents
HE-200

HE-1600

Type of oil

Paraffin-base mineral oil,
core faction, free of additives

Perfluorinated polyether PFPE

Examples of areas of application
and process media

Standard oil for Leybold USA

For pumping strong oxidants like
oxygen, O2, ozone O3, nitrogen
oxides NOx and sulphur oxides
(SO2, SO3) as well as reactive
substances like halogens (for
example fluorine F2, chlorine Cl2),
hydrogen halides (for example
hydrogen chloride HCl, hydrogen
bromide HBr), uranium hexafluoride
UF6 and conditionally Lewis acids
(for example, boron trichloride BCl3)

Application Data

Remarks

For pumping air, chemically inert
permanent gases (noble gases, for
example), water vapor, solvent
vaporsin the case of laboratory
pumps operated with cold traps

The ultimate pressures stated in
operation of the pump with HE-200
(except for the PFPE pumps)
Service life may be extended
through the use of an oil filter

Use only correspondingly modified
pumps. For operation with PFPE we
recommend the exclusive use of
such pump types which are
equipped with a split-pole motor

C07

Mixing with other types of oil must
be absolutely avoided
Elastomer compatibility
FPM (Viton)
NBR (Perbunan) 1)
EPDM

Technical Data

Suited
Conditionally suited
Not suited

Suited
Suited
Suited

HE-200

HE-1600

Viscosity at 40 °C (104 °F)

mm2/s

58

–

Viscosity at 20 °C (68 °F)

mm2/s

–

140

Viscosity at 100 °C (212 °F)

mm2/s

9

Viscosity at 99 °C (210 °F)

mm2/s

–

7

Flash point

°C (°F)

224 (435)

Not known 2)

3.9 x 10-4 (2.9 x 10-4)

2.7 x 10-4 (2.0 x 10-4)

°C (°F)

-10 (14)

-40 (-40)

g/mol

480

3000

Vapor pressure
at 100 °C (212 °F)
Pour point
Middle molecular weight

mbar (Torr)

Or dering
Information

HE-200

HE-1600

01.0 litre (1 qt)

Part No. 98-198-006

–

03.8 litres (1 gal)

Part No. 98-198-007

–

18.9 litres (5 gal)

Part No. 98-198-008

–

208 litres (55gal)

Part No. 98-198-010

–

0.9 kg (2 lbs)

–

Part No. 898 564-1

1.8 kg (4 lbs)

–

Part No. 898 564-2

7.2 kg (16 lbs)

–

Part No. 898 564-4

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data stated here can not be taken as assured properties
1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR
2) Caution: Perfluorinated polyether compounds will, when being decomposed at temperatures over 290 °C (554 °F), release toxic and corrosive gases.
For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C07.19

Roots Vacuum Pumps

C07.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

RUTA

C08
Vacuum Pump Systems
250 - 13 000 m3 x h-1
(147.3 - 7657 cfm)

Vacuum Pump Systems

Overview
A continually increasing number of applications
in industry and research are relying on vacuum
technology. Thus widely differing requirements
result regarding the vacuum generating
systems.
The comprehensive range of vacuum pumps
from LEYBOLD offers, in combination with the
matching accessories, all options of selecting
the optimum pump system for your application
in each case.
Based on the long-standing experience in the
design and manufacture of vacuum pump
systems, LEYBOLD offers standardized pump
systems which will match most applications –
the RUTA pump systems.
RUTA pump systems excel by being compact,
reliable and service-friendly.
The pump systems are equipped as standard
with 400 V, 50 Hz three-phase motors.
Motors for special supply voltages, special
mains frequencies or explosion protected
pumps are available.

Contents

General
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.03
Overview on the Types of Pumps Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.03

Products
Pump Systems (Global Versions)
Three-Stage RUTA Pump Systems with Two-Stage TRIVAC Backing Pumps . . . . . . . . . . . C08.06
Two-Stage RUTA Pump Systems with Single-Stage SOGEVAC Backing Pumps,
Adaptor Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.08
Two-Stage RUTA Pump Systems with Single-Stage SOGEVAC Backing Pumps,
Frame Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.10
Two- and Three-Stage RUTA Pump Systems with Single- and Two-Stage
Rotary Piston Vacuum Pumps as Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.12
Dry Compressing RUTA Pump System with EcoDry L Backing Pump. . . . . . . . . . . . . . . . C08.14
Dry Compressing RUTA Pump Systems with SCREWLine SP630 Backing Pump . . . . . . . . C08.16
RUVAC RAV Roots Vacuum Pumps with Pre-Admission Cooling . . . . . . . . . . . . . . . . . . . C08.18
Two- and Three-Stage RUTA RAV Pump Systems with RUVAC RAV Roots Vacuum Pumps . . C08.20
TVD Pump Systems for Drying, Evaporation and Distillation Applications. . . . . . . . . . . . . C08.22
Pump Systems (Versions for the North and South American Continents)
RBS - B/BCS Roots Pump Systems with Two-Stage TRIVAC Backing Pumps . . . . . . . . . . C08.24
HTS Close-Coupled Pump Systems with Single-Stage SOGEVAC Backing Pumps. . . . . . . C08.28
HTS Frame Mounted Pump Systems with Single-Stage SOGEVAC Backing Pumps . . . . . . C08.32
RM - Roots / Mechanical Pump Systems
with Single- and Two-Stage Rotary Piston Vacuum Pumps as Backing Pumps . . . . . . . . . C08.34
Dry Compressing Vacuum Pump Systems with EcoDry L Backing Pump . . . . . . . . . . . . . C08.36

Miscellaneous
Checklist for Inquiries (Fax Form) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.38

Standards
LEYBOLD vacuum pump systems are rated
according to CE, ISO, DIN and VDE regulations.
Compliance with other standards is possible
upon request.
The technical data of the vacuum pump systems
given in this product section are based on the
PNEUROP Acceptance Specifications for Vacuum
Pumps, Part 1, and comply with DIN 28 426. The
characteristic curves in our pumping speed diagrams are plotted in accordance with DIN 28 426.
The curves represent the mean of several measurements. Our warranty refers to the values indicated in the technical data table.

Designation of Roots Vacuum Pump Systems
LEYBOLD pump combinations of Roots vacuum
pumps with backing pumps are called “RUTA”.
In order to identify the standard pump systems
the name “RUTA” is followed by the brief
designations of the pumps which make up a
particular pump system.

The pump system designation is arranged as follows:
RUTA WAU 2001 / WAU 501 / K / S 65 B / A

Brief designation of the largest Roots vacuum pump
(Pumping speed of the pump system)
Brief designation of the smaller Roots vacuum pump
Cooler or condenser (if present)
Brief designation of the backing pump
Type of pump system (adaptor (A) or frame (G))

C08.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Applications and Accessories
Typical areas of application for RUTA pump
systems are industry, research and chemistry.
Here the focus is on processes for metal production and processing, drying and degassing, thermal treatment, coating in the area of semiconductor manufacture as well as surface refinement. RUTA pump systems are also used as
backing pump sets for high vacuum systems in
combination with diffusion pumps, turbomolecular pumps and cryo pumps.

Standard RUTA Pump
Systems

Dry-Compressing RUTA
Vacuum Pump Systems

Our Roots vacuum pumps WA, WS and RA or
WAU and WSU with integrated bypass line or RA
with external bypass line (RAU) are combined
with oil-sealed backing pumps for conventional
generation of the vacuum. Single stage arrangements are capable of delivering pumping speeds
of 250 to 16 000 m3/h (147.3 to 9424 cfm).
Higher pumping speeds can be attained by paralleling several pumps. The attainable operating
pressures depend on the number of pumping stages.

Increasing environmental awareness, pumping of
condensable vapors or high requirements regarding cleanness when pumping high-quality media
which must not be contaminated by other media
for recycling, often requires the use of universal
pumps where the pump chamber is free of operating agents (dry pumps).

For higher pumping speeds or lower ultimate
pressures, three or multi-stage pump systems
equipped with single or two-stage backing pumps
are available (see figure).

RUTA Pump Systems with
Condensers

RUTA RA 3001/WAU1001/SV300

Overview on the Types of
Pump Systems
The RUTA pump systems described here have
been designed for rough and medium vacuum
operation, i. e. for the pressure range from atmospheric pressure down to 10-4 mbar (0.75 Torr).
RUTA pump systems consist of a combination of
individual pumps whereby Roots vacuum pumps
are employed on the intake side. Further compression to atmospheric pressure may be performed either by oil-sealed or dry-compressing
vacuum pumps, liquid ring pumps or Roots
vacuum pumps with pre-inlet cooling. All combinations may be equipped at suitable places with
condensers. The selection criteria for a RUTA
pump system are as follows:
♦ Pumping speed
♦ Operating pressure
♦ Process conditions
♦ Characteristics of the media
♦ Standards and regulations which depend on
the area of application and the produced products.

Vacuum Pump Systems

If vacuum systems must pump larger quantities
of vapor or vapor-gas mixtures, it is economical
to insert condensers which are cooled with water
or a different coolant at a suitable place within
the pump system. Cooled condensers are themselves effective partial pumps which condense
most of the vapors from the pumped media. The
downstream mechanical pumps will then only
need to pump those gases which have not already condensed.

Here LEYBOLD offers three solutions:
1. Composite pumping systems combining an
EcoDry pump with one or more Roots blower
pumps.
2. Pump systems consisting of the SCREWLine
screw vacuum pump developed specifically for
the process industry in combination with one or
several Roots vacuum pumps.
3. Single or multi-stage RUTA RAV vacuum pump
systems, consisting of Roots vacuum pumps
with pre-admission cooling.
The operating pressure ranges of the pump
systems depend on the number of Roots vacuum
pumps, but will extend in any case without interruptions to atmospheric pressure.
Combinations of EcoDry and Roots blower
achieve an ultimate pressure of 2 x 10-3 mbar
(1.5 x 10-3 Torr).
Already in connection with one Roots pump,
pump systems with a SCREWLine pump are capable of attaining base pressures of < 1 x 10-3 mbar
(7.5 x 10-4 Torr).

The quantity of vapor present in each case determines the size of the condenser and the temperature at which it is operated. The size of the downstream pump is determined by the quantity of
non-condensable gases, the required pressure
and the required pump-down time for the
system.

Single-stage RAV combinations attain an ultimate
pressure of 150 mbar (112.5 Torr) and two-stage
combinations 50 mbar (37.5 Torr).

All pump systems of the WA/WAU and RA/RAU
series may be equipped with one or several condensers. These are often used in the chemical
industry. Here RUTA vacuum pump systems with
condensers are not only used to generate a
vacuum, but they are also often employed in the
recovery of solvents. When installing one or
several Roots pumps upstream of a condenser,
low operating pressures and high condensation
pressures can be attained. Thus the condenser
may in many cases be operated with cooling
water instead of brine. The vapor components
pumped together with inert gases may be separated once more in an emission condenser on the
exhaust side so that the quality of the exhaust
gas can be maintained within close tolerance
regarding its cleanness.

RUTA Custom Pump Systems

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Multi-stage combinations with Roots vacuum
pumps of all three systems are capable of attaining pressures below 10-4 mbar (7.5 x 10-5 Torr).

Most users will be able to select the right pump
system for their application from our range of
standard pump systems. In special cases a
custom design may be required for special processes and high pumping speeds.
We are prepared to design and manufacture
custom pump systems according to customers
specifications. If required we will use - besides
oil-sealed and dry-compressing backing pumps liquid ring and ejector pumps.

C08.03

C08

Vacuum Pump Systems

General

RUTA Pump Systems for the
Metal Producing and
Processing Industry

Pump Systems for Drying,
Evaporation and Distillation
Applications (TVD)

In common vacuum furnace processes such as
hardening, annealing, brazing, melting and
casting, preferably oil-sealed or dry compressing
standard vacuum pump systems are usually
used. The oil-sealed systems consist of a combination of Roots vacuum pumps with a single or
two-stage rotary vane or rotary piston pump.
In the dry compressing systems our screw vacuum pump SCREWLine is used as the backing
pump.

More and more vacuum applications are finding
their way into the areas of environmental protection, recycling and waste disposal. “Waste disposal of used oil and aromatic compounds” and
“Cleaning processes in metal-processing factories” demonstrate that the combination of vacuum
know-how, innovative engineering and applications know-how is indispensable for the successful
application of vacuum technology in most widely
differing applications.

The vacuum pumps are mounted in a rugged
frame. The design of the pump systems is
service-friendly, modular and can be easily
upgraded with additional equipment.

The product is no longer in the foreground, solutions to problems are demanded instead.

On smaller furnaces RUVAC WAU Roots vacuum
pumps are the most suitable because these may
be cut-in at a higher operating pressure, while on
larger furnaces and particularly where short
pump-down cycles are required, the use of
RUVAC RA Roots vacuum pumps with suitably
sized backing pumps is advisable. For special
processes, e.g. fusion or degassing of molten
masses, due to the high dust contents, the additional use of a dust separator is required as well
as equipping the backing pumps with oil filtering
units.

♦ Temperature sensors to monitor the gas temperatures between the pump stages and the
pump body temperature,
♦ Water flow monitors for the cooling water
supply to pumps and condensers,
♦ Differential pressure indicator with control setpoint to monitor the exhaust filters of the
rotary vane vacuum pump.

C08.04

Ventilation is performed by means of an electric
fan, the fresh air and exhaust ducts are located
within the sound proofing box. Further optional
extras which may be fitted include closed air circulation with integrated, water-cooled heat
exchanger and a connection port for a central
exhaust system.

RUTA RA 3001/S630F/G with sound proofing box

Isolation against Vibrations
RUTA vacuum pump systems produce only slight
vibrations. To reduce these vibrations even
further, vibration absorbers can be fitted under
the pump system.

Chemical Industry

To ensure dependable monitoring of the system,
the following monitoring devices, among others,
may be installed:

The maintenance side is designed as a door component. A window insert may be provided in the
door or in the side walls to facilitate checking of
the oil levels.

LEYBOLD Vacuum has developed some continuously operating vacuum pump systems for
these applications. These systems basically consist of a rotary vane pump with a condenser unit.
Upon request the condenser arrangement may
also be equipped with a cold water set. This version will then be independent of any cooling
water connections and – being a mobile system –
it is well-suited for operation at varying locations.

RUTA Pump Systems for the
In chemical processes it is often necessary to
remove corrosive, condensable and reactive
gases and vapors. LEYBOLD designs and manufactures custom-built pump systems for specific
process applications. Depending on the application, the backing pump used in such systems
may be a rotary vane vacuum pump, a liquid ring
vacuum pump or a combination of an ejector
pump and a liquid ring pump.

Custom designs of the sound proofing box allow
the noise level to be reduced by up to 35 dB(A).

Dust Separators

TVD pump system, mobile with control cabinet

Accessories
Sound Proofing
A sound proofing box is available as an optional
extra so as to reduce the noise down to the permissible level.
Depending on the size of the pumping system,
noise reductions between 15 and 20 dB(A) are
obtained using our standard sound-proofing
arrangements.

Vacuum processes where large amounts of particles or dusts are contributed by the process
require special devices to protect the vacuum
pumps.
LEYBOLD has developed – even for high flow rate
applications – special dust separators, which can
be installed ahead of the intake of the RUTA
vacuum pump systems. The dust separators have
two stages. The first stage is a cyclone that
collects dust particles of coarse and medium
size, the fine dust are trapped in filter elements.
Dust separators are custom-designed for the specific process and the required pumping speed.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Filtering surface
m2
suitable for pumping speeds
min.
m3 x h-1 (cfm)
max.
m3 x h-1 (cfm)
Reduction of pumping speed at
< 01 mbar (< 0.75 Torr)
< 06 mbar (< 4.5 Torr)
< 20 mbar (< 15 Torr)
without dust load

Diagrammatic section through a dust separator

0.2

Vacuum Pump Systems
0.5

1.0

2.0

3.0

5.0

100 (58.9) 300 (176.7) 600 (353.4) 1 000 (589) 1 500 (883.5) 3 000 (1767)
300 (176.7) 800 (471.2) 1 500 (883.5) 3 000 (1767) 4 000 (2356) 8 000 (4712)

%
%
%

11
9
5

11
9
5

11
9
5

11
9
5

11
9
5

11
9
5

Control panel on RUTA WAU1001/SV200/G

Electric Control Facilities

♦ Time-dependant control

In order to drive all electrical appliances within
the pump systems, the pump systems may be
equipped with standard control cabinets which
contain:

♦ Program control

♦ Motor protection switch (rated for the pumps
used in each case)

♦ Control for explosion hazard areas

The second method is the Bypass Control
System. Here the pressure is maintained at a
constant level by admitting an additional quantity
of gas.

♦ Combinations of the aforementioned versions

The advantages offered by this arrangement are:

♦ Programmable control (PC)

♦ Simple design

♦ Vacuum gauge with pressure read-out in the
control cabinet.

♦ Much smaller valve

♦ Contactors
♦ Main switch interlocked in accordance with
VDE 0113

Pressure Control

♦ Relays for necessary control/sub-systems
♦ ON/OFF push-button for each pump
♦ Power supply for the installed monitoring
facilities
♦ Fault indicators arranged on a lamp panel
♦ Switch-over (through an external contact) from
local to remote operation.
The control cabinet may be fitted either to the
frame of the pump system or it may be wallmounted.
Beside the standard systems, we manufacture
control systems for much more complex
systems:
♦ Remote control module as a 19" rack module
(1/4 width, 3 HU). The start/stop push-buttons
and the related indicators for operation and
fault are located on the front panel
♦ Pre- and post-operation control
♦ Pressure dependant control

Basically there are several ways in which to control the pressure.
The equipment which is supplied as standard for
the DOWNSTREAM or BYPASS control systems
selected by LEYBOLD consists of:

♦ No reduction of the intermediate pressure
within the pump.
In order to design a pressure control system we
need the following information:
♦ Amount of gas
♦ Type of gas
♦ Pressure

♦ Pressure measurement

♦ Length of the piping

♦ Controller with control unit

♦ Type of auxiliary energy (electric/pneumatic)

♦ Control valve with position indicator

♦ Explosion protection required yes/no

♦ Engineering.

Additional complex control arrangements are
available, for example with:

The Downstream Control System throttles the
pumping speed of the vacuum pump by
changing the conductance of the valve.
The advantages offered by this arrangement are:
♦ No supply of other gases

♦ Adjustable pressure characteristic
♦ Adjustable timing
♦ Speed control
♦ Combination with other control facilities.

♦ Closed system
♦ The intake pressure of the pump system is
lower than its operating pressure (thus saving
energy, among other things).

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.05

C08

Vacuum Pump Systems

Three-Stage RUTA Pump Systems with Two-Stage TRIVAC Backing Pumps

RUTA WAU 501/D65B/A

Standard Equipment

Options

♦ Exhaust filter

♦ Frequency converter for controlling the speed
of the Roots pump

♦ Oil collecting pan

♦ Oil drain valve on each pump

♦ Oil filter

♦ Manually operated gas ballast

♦ Exhaust filter with oil return line

♦ 24 V DC gas ballast valve

♦ Crane eyes on the frame

♦ Special motors

♦ Sound proofing box

♦ Floor mounting

♦ Electric control systems

♦ Vibration absorbers

♦ CE approval

♦ Castors

♦ The oil is supplied with the pump
l1
l2

♦ Different types of floor mounts

l1

b1
l1

l2

b2

l

b1 b 2

DN 1

b1
l1

b2

DN 1

DN1

l2
DN 2

DN 2

DN 2
h
l2

h
h2

h1

h1

DN2

h

h

b2
h1

h1

c

c
c
l

RUVAC WA/WAU/WS/WSU
TRIVAC backing pump

b1

DN 1

b

b

l

l

c

b

b

RUTA

251/D40B/A

251/D65B/A

501/D65B/A

251/D40B/G

251/D65B/G

501/D65B/G

1001/D65B/G

P2
P1

251
D 40 B

251
D 65 B

501
D 65 B

251
D 40 B

251
D 65 B

501
D 65 B

1001
D 65 B

DN1
DN2
l
l1
l2
b
b1
b2
h
h1
h2
c

63 ISO-K
40 KF
1000 (39.37)
375 (14.76)
234 (9.21)
600 (23.62)
350 (13.78)
40 (1.57)
854 (33.62)
488 (19.21)
–
100 (3.94)

63 ISO-K
40 KF
1000 (39.37)
375 (14.76)
234 (9.21)
600 (23.62)
350 (13.78)
40 (1.57)
854 (33.62)
488 (19.21)
–
100 (3.94)

63 ISO-K
40 KF
1000 (39.37)
375 (14.76)
234 (9.21)
600 (23.62)
350 (13.78)
40 (1.57)
894 (35.20)
488 (19.21)
–
100 (3.94)

63 ISO-K
40 KF
1000 (39.37)
400 (15.75)
234 (9.21)
560 (22.05)
280 (11.02)
59 (2.32)
977 (38.46)
488 (19.21)
677 (26.65)
100 (3.94)

63 ISO-K
40 KF
1100 (43.31)
480 (18.90)
314 (12.36)
560 (22.05)
280 (11.02)
59 (2.32)
977 (38.46)
488 (19.21)
677 (26.65)
100 (3.94)

63 ISO-K
40 KF
1150 (45.28)
480 (18.90)
314 (12.36)
560 (22.05)
280 (11.02)
59 (2.32)
1017 (40.04)
488 (19.21)
677 (26.65)
100 (3.94)

100 ISO-K
40 KF
1300 (51.18)
480 (18.90)
314 (12.36)
600 (23.62)
280 (11.02)
59 (2.32)
1067 (42.01)
488 (19.21)
671 (26.42)
100 (3.94)

Dimensional drawing for the pump systems with TRIVAC D40/65 B backing pumps on pallet [left] and in a frame [right]; dimensions in brackets ( ) are in inch

C08.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems
RUTA WAU

Technical D ata , 50 Hz

251/D40B/A

251/D65B/A

501/D65B/A

251/D40B/G

251/D65B/G

501/D65B/G

1001/D65B/G

RUVAC (WA/WAU/WS/WSU possible)

P2

251

251

501

251

251

501

1001

TRIVAC backing pump

P1

D 40 B

D 65 B

D 65 B

D 40 B

D 65 B

D 65 B

D 65 B

m3 x h-1 (cfm)

200 (117.8)

210 (123.7)

380 (223.8)

185 (109)

205 (120.7)

340 (200.3)

620 (365.2)

Ultimate partial pressure

mbar
(Torr)

< 2 x 10-5
(< 1.5 x 10-5)

< 2 x 10-5
(< 1.5 x 10-5)

< 2 x 10-5
(< 1.5 x 10-5)

< 2 x 10-5
(< 1.5 x 10-5)

< 2 x 10-5
(< 1.5 x 10-5)

< 2 x 10-5
(< 1.5 x 10-5)

< 2 x 10-5
(< 1.5 x 10-5)

Ultimate total pressure with gas ballast

mbar
(Torr)

< 8 x 10-4
(< 6 x 10-4)

< 8 x 10-4
(< 6 x 10-4)

< 8 x 10-4
(< 6 x 10-4)

< 8 x 10-4
(< 6 x 10-4)

< 8 x 10-4
(< 6 x 10-4)

< 8 x 10-4
(< 6 x 10-4)

< 8 x 10-4
(< 6 x 10-4)

Pumping speed, 50 Hz
at 10-1 mbar (0.75 x 10-1 Torr)

Installed motor power

kW (hp)

2.6 (3.5)

3.3 (4.5)

4.4 (6.0)

2.6 (3.5)

3.3 (4.5)

4.4 (6.0)

6.2 (8.4)

Power consumption
at 10-1 mbar (0.75 x 10-1 Torr)

kW (hp)

2.0 (2.7)

2.5 (3.4)

2.7 (3.7)

2.0 (2.7)

2.5 (3.4)

2.7 (3.7)

3.0 (4.1)

Noise level to DIN 45 635
max.
without gas ballast at 1 mbar (0.75 x 1 Torr)

dB(A)
dB(A)

64
62

65
63

67
63

64
62

65
63

67
63

77
70

Oil filling, total, approx.

l (qt)

3.3 (3.49)

4 (4.23)

4.3 (4.55)

3.3 (3.49)

4 (4.23)

4.3 (4.55)

5.3 (5.60)

245 (540.2)

260 (573.3)

305 (627.5)

280 (617.4)

310 (683.6)

350 (771.8)

460 (1014.3)

63 ISO-K
40 KF

63 ISO-K
40 KF

63 ISO-K
40 KF

63 ISO-K
40 KF

63 ISO-K
40 KF

63 ISO-K
40 KF

100 ISO-K
40 KF

Weight, total, approx.

kg (lbs)

Connecting flanges
Inlet port
Outlet port

DN1
DN2

RUTA WAU

Ordering Information

15251/D40B/A

251/D65B/A

501/D65B/A

251/D40B/G

251/D65B/G

501/D65B/G

1001/D65B/G

RUVAC (WA/WAU/WS/WSU possible)

P2

WAU 251

WAU 251

WAU 501

WAU 251

WAU 251

WAU 501

WAU 1001

TRIVAC backing pump

P1

D 40 B

D 65 B

D 65 B

D 40 B

D 65 B

D 65 B

D 65 B

Part No.
023 06

Part No.
023 07

Part No.
023 08

–

–

–

–

–

–

–

Part No.
023 16

Part No.
023 17

Part No.
023 18

Part No.
023 19

Pump system, complete (adaptor version),
pallet mounted,
with RUVAC WAU Roots vacuum pump
Pump system, complete (frame version),
frame mounted,
with RUVAC WAU Roots vacuum pump

WAU 251 +D40B
WAU 251 +D65B
WAU 1001+D65B
WAU 501 +D65B

mbar

Pressure

10 2

10 3

2

m 3 x h-1

10

Torr
10 1

10 1

10 0

10 0

10 -1

10 -18
6
4
10

750

10 -4

10 -3

10 -2

10 -1

10 -2
2

4

6

8

10
min

Pump-down time
Pump-down time diagram for a 1000 l tank at 50 Hz

10 0

10 1

Torr

750
500
cfm

100
10 2

50

10
WAU 251 +D 40 B
WAU 1001+D 65 B

10 1

8
6

10 0 2
10 -5

5

WAU 501 +D 65 B
WAU 251 +D 65 B

4
2

2
-2

0

Pumping speed

10

10 -5

3

4 68

10 -4

Total pressure
Partial pressure

10 -3

10 -2

10 -1

10 0

10 1

1

mbar

10 3

Pressure

Pumping speed diagram at 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.07

C08

Vacuum Pump Systems

Two-Stage RUTA Pump Systems with Single-Stage SOGEVAC Backing Pumps, Adaptor Version

RUTA WAU1001/SV200/A

Standard Equipment

Options

♦ Exhaust filter with oil return line

♦ Frequency converter for controlling the speed
of the Roots pump

♦ Oil filter

♦ Different types of floor mounts
♦ Oil drain valve on each pump

♦ 24 V DC gas ballast valve

♦ Oil collecting pan

♦ Special motors

♦ Sound proofing box

♦ Manually operated gas ballast

♦ Electric control systems

♦ Vibration absorbers

♦ Floor mounting

♦ Castors

♦ CE approval
♦ The oil is supplied with the pump

b2

l

l1

b1

l1

b1

DN 1

DN1

l2
DN 2

DN 2

h
l2

h1

h1
c

c
b

RUVAC WA/WAU/WS/WSU
SOGEVAC backing pump

b2

h

l

RUTA

501/SV 200/A

1001/SV 200/A

1001/SV 300/A

2001/SV 630/A

P2
P1

501
SV 200

1001
SV 200

1001
SV 300

2001
SV 630

DN1
DN2
l
l1
l2
b
b1
b2
h
h1
c

63 ISO-K
2"
962 (37.87)
242 (9.53)
70 (2.76)
700 (27.56)
230 (9.06)
499 (19.65)
873 (34.37)
468 (18.43)
100 (3.94)

100 ISO-K
2"
1050 (41.34)
303 (11.93)
77 (3.03)
700 (27.56)
230 (9.06)
499 (19.65)
923 (36.34)
468 (18.43)
100 (3.94)

100 ISO-K
2"
1082 (42.60)
303 (11.93)
77 (3.03)
700 (27.56)
230 (9.06)
499 (19.65)
923 (36.34)
468 (18.43)
100 (3.94)

160 ISO-K
100 ISO-K
1800 (70.87)
820 (32.28)
35 (1.38)
1000 (39.37)
450 (17.72)
764 (30.08)
1402 (55.20)
805 (31.69)
100 (3.94)

b

Dimensional drawing for the pump systems with SOGEVAC SV 200 and 300 backing pumps [left], SOGEVAC SV 630 [right]; dimensions in brackets ( ) are in inch

C08.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Technical Data, 50 Hz

RUTA WAU
1001/SV200/A
1001/SV300/A

501/SV200/A

2001/SV630F/A

RUVAC (WA/WAU/WS/WSU possible)

P2

501

1001

1001

2001

SOGEVAC backing pump

P1

SV 200

SV 200

SV 300

SV 630 F

365 (215)

715 (421)

730 (430)

1690 (995.4)

mbar (Torr)

< 8 x 10-3 (< 6 x 10-3)

< 8 x 10-3 (< 6 x 10-3)

< 8 x 10-3 (< 6 x 10-3)

< 8 x 10-3 (< 6 x 10-3)

Ultimate total pressure with gas ballast
mbar (Torr)

< 4 x 10-2 (< 3 x 10-2)

< 4 x 10-2 (< 3 x 10-2)

< 4 x 10-2 (< 3 x 10-2)

< 4 x 10-2 (< 3 x 10-2)

Pumping speed, 50 Hz
at 10-1 mbar (0.75 x 10-1 Torr) m3 x h-1 (cfm)
Ultimate partial pressure

Installed motor power

kW (hp)

6.2 (8.4)

8 (10.9)

9.5 (12.9)

22.5 (30.6)

Power consumption at
10-1 mbar (0.75 x 10-1 Torr)

kW (hp)

3 (4.1)

3.5 (4.8)

4 (5.4)

16.5 (22.4)

Noise level to DIN 45 635
without gas ballast
at 10-1 mbar (0.75 x 10-1 Torr)

dB(A)

70

75

76

80

Oil filling, total, approx.

l (qt)

6 (6.34)

7 (7.4)

11 (11.63)

39 (41.23)

335 (738.7)

430 (948.2)

480 (1058.4)

1 140 (2513.7)

63 ISO-K
2"

100 ISO-K
2"

100 ISO-K
2"

160 ISO-K
100 ISO-K

Weight, total approx.

kg (lbs)

Connecting flanges
Inlet port
Outlet port

DN1
DN2

Ordering Information

RUTA WAU
1001/SV200/A
1001/SV300/A

501/SV200/A

C08

2001/SV630F/A

RUVAC (WA/WAU/WS/WSU possible)

P2

WAU 501

WAU 1001

WAU 1001

WAU 2001

SOGEVAC backing pump

P1

SV 200

SV 200

SV 300

SV 630 F

Part No. 022 06

Part No. 022 08

Part No. 022 09

Part No. 022 11

Pump system, complete (adaptor version),
pallet mounted,
with RUVAC WAU Roots vacuum pump

10 -3

10 3

750

WAU 501 + SV200
WAU 2001 + SV630F
WAU 1001 + SV200
WAU 1001 + SV300

2

10 2

10 0

10 1

Torr

750

4

5000

10

10 1

10

10 08

1

cfm
3
m x h -1

Pumping speed

Pressure

10 -1

Torr

mbar
10

10

10 -2

WAU 2001+SV 630F
WAU 1001+SV 200
WAU 1001+SV 300
WAU 501 +SV 200

8
6
4

0

10
-1

10
4

8

12

16

min

20

Pump-down time
Pump-down time diagram for a 10 m3 tank at 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

1

100
50

10

2

2

0

500

10 2

6
4

10 -1

1000

10 3

2 4 68

10 -3

10 -2

10 -1

10 0

10 1

10 2
10 3
mbar

Pressure
Total pressure
Partial pressure

Pumping speed diagram at 50 Hz

C08.09

Vacuum Pump Systems

Two-Stage RUTA Pump Systems with Single-Stage SOGEVAC Backing Pumps, Frame Version

RUTA WAU2001/SV300/G

Standard Equipment

Options

♦ Exhaust filter with oil return line

♦ Frequency converter for controlling the speed
of the Roots pump

♦ Oil filter

♦ Special motors
♦ Electric control systems

♦ 24 V DC gas ballast valve

♦ Oil collecting pan

♦ Sound proofing box

♦ Manually operated gas ballast

♦ Vibration absorbers

♦ Crane eyes on the frame

♦ Castors

♦ Floor mounting

♦ Different types of floor mounts

♦ CE approval

♦ Oil drain valve on each pump

♦ The oil is supplied with the pump

b1

l1

b1

l1

DN1

DN 1

b2

l2

DN 2

h
h2
h1

l2
c

l

RUVAC RA
RUVAC WA/WAU/WS/WSU
SOGEVAC backing pump

DN 2

h
h2

b2
h1

c

b

l

RUTA

1001/SV300/G

2001/SV300/G

3001/SV630/G

5001/SV630/G

7001/SV1200/G

P2
P2
P1

–
1001
SV 300

–
2001
SV 300

3001
–
SV 630

5001
–
SV 630

7001
–
SV 1200

DN1
DN2
l
l1
l2
b
b1
b2
h
h1
h2
c

100 ISO-K
2"
1340 (52.76)
380 (14.96)
110 (4.33)
710 (27.95)
250 (9.84)
191 (7.52)
1176 (46.30)
518 (20.39)
780 (30.71)
100 (3.94)

160 ISO-K
2"
1340 (52.76)
380 (14.96)
110 (4.33)
780 (30.71)
320 (12.60)
191 (7.52)
1259 (49.57)
518 (20.39)
729 (28.70)
100 (3.94)

250 ISO-K
100 ISO-K
2150 (84.65)
950 (37.40)
165 (6.5)
1100 (43.31)
500 (19.69)
285 (11.22)
1792 (70.55)
745 (29.33)
1177 (46.34)
100 (3.94)

250 ISO-K
100 ISO-K
2150 (84.65)
950 (37.40)
165 (6.5)
1100 (43.31)
500 (19.69)
285 (11.22)
1896 (74.65)
745 (29.33)
1151 (45.31)
100 (3.94)

250 ISO-K
160 ISO-K
2325 (91.54)
975 (38.39)
405 (15.94)
1360 (53.54)
580 (22.83)
158 (6.22)
2580 (101.58)
1020 (40.16)
1835 (72.24)
100 (3.94)

b

Dimensional drawing for the pump systems with SOGEVAC SV 300 and 630 backing pumps [left], SOGEVAC SV 1200 [right]; dimensions in brackets ( ) are in inch

C08.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Technical Data, 50 Hz

1001/SV300/G

RUTA
2001/SV300/G 3001/SV630F/G 5001/SV630F/G 7001/SV1200/G

RUVAC RA

P2

–

–

3001

5001

7001

RUVAC (WA/WAU/WS/WSU possible)

P2

1001

2001

–

–

–

SOGEVAC backing pump

P1

SV 300

SV 300

SV 630 F

SV 630 F

SV 1200

730 (430)

1445 (850)

3090 (1818)

4210 (2478)

5520 (3250)

Pumping speed, 50 Hz
at 10-1 mbar (0.75 x 10-1 Torr) m3 x h-1 (cfm)
Ultimate partial pressure

mbar (Torr)

< 8 x 10-3 (< 6 x 10-3)

< 8 x 10-3 (< 6 x 10-3)

< 8 x 10-3 (< 6 x 10-3)

< 8 x 10-3 (< 6 x 10-3)

< 9 x 10-3 (< 6.75 x 10-3)

Ultimate total pressure
with gas ballast

mbar (Torr)

< 4 x 10-2 (< 3 x 10-2)

< 4 x 10-2 (< 3 x 10-2)

< 4 x 10-2 (< 3 x 10-2)

< 4 x 10-2 (< 3 x 10-2)

< 4 x 10-2 (< 3 x 10-2)

Installed motor power

kW (hp)

9.5 (12.9)

13 (17.7)

26 (35.4)

30 (40.8)

33.5 (45.6)

Power consumption
at 10-1 mbar (0.75 x 10-1 Torr)

kW (hp)

4 (5.4)

4.5 (6.1)

17 (23.1)

17.5 (23.8)

18 (24.5)

Noise level to DIN 45 635
without gas ballast
at 10-1 mbar (0.75 x 10-1 Torr)

dB(A)

75

79

82

80

82

Oil filling, total, approx.

l (qt)

11 (11.63)

13 (13.74)

42 (44.4)

47 (49.68)

62 (65.54)

560 (1234.8)

740 (1631.7)

1750 (3858.8)

1900 (4189.5)

3000 (6615)

100 ISO-K
2"

160 ISO-K
2"

250 ISO-K
100 ISO-K

250 ISO-K
100 ISO-K

250 ISO-K
160 ISO-K

Weight, total, approx.

kg (lbs)

Connecting flanges
Inlet port
Outlet port

DN1
DN2

Ordering Information

1001/SV300/G

RUTA
2001/SV300/G 3001/SV630F/G 5001/SV630F/G 7001/SV1200/G

RUVAC

P2

–

–

RA 3001

RA 5001

RA 7001

RUVAC (WA/WAU/WS/WSU possible)

P2

WAU 1001

WAU 2001

–

–

–

SOGEVAC backing pump

P1

SV 300

SV 300

SV 630 F

SV 630 F

SV 1200

–
Part No. 022 31

–
Part No. 022 33

Part No. 022 35
–

Part No. 022 37
–

Part No. 022 39
–

Pumping system, complete (frame version)
frame mounted,
with Roots vacuum pump
RUVAC RA
RUVAC WAU

10 3

Pressure

Torr

WAU1001 + SV300
WAU2001 + SV300
RA3001 + SV630F
RA5001 + SV630F
RA7001 + SV1200

10 2

10

10 2

10 -2

10 -1

10 0

10 1

Torr

750

4

5000
cfm

m 3 x h -1

1000

10

10 1

10

10 08

1

0

6
4

Pumping speed

mbar

10 3

500

100

WAU 1001+SV 300
WAU 2001+SV 300
RA 3001 +SV 630F
RA 5001 +SV 630F
RA 7001 +SV 1200

10 2

8
6
4

50

10

2

2

10 -1
0

10 -3

750

-1

10
2

4

6

8

10

min

14

Pump-down time
Pump-down time diagram for a 10 m3 tank at 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

10 1 2
10 -3

4 68

10 -2

Total pressure

10 -1

10 0

10 1

10 2
10 3
mbar

Pressure

Partial pressure

Pumping speed diagram at 50 Hz

C08.11

C08

Vacuum Pump Systems

Two and Three-Stage RUTA Pump Systems with
Single- and Two-Stage Rotary Piston Vacuum Pumps as Backing Pumps

RUTA WAU 2001/E250/G

Standard Equipment
♦ Exhaust filter attached

♦ The oil is supplied with the pump

♦ Oil collecting pan

♦ Vibration absorbers

Options

♦ SECUVAC valve 24 V DC

♦ Different types of floor mount

♦ Frequency converter for controlling the speed
of the Roots pump

♦ Backing pump removable by a fork lifter
♦ Crane eyes on the frame

♦ Oil drain valve on each pump
♦ Exhaust filter box with oil return

♦ Oil filter

♦ Floor mounting

♦ Sound proofing box

♦ 24 V DC gas ballast valve

♦ Special motors
♦ Electric control systems

♦ CE approval
b1
DN 1

b2
DN 2

h1

l1

h

h2

b
l2
l

RUVAC WA/WAU/WS/WSU
Rotary piston vacuum pump

RUTA

1001/E250/G

2001/E250/G

1001/DK200/G

P2
P1

1001
E 250*

2001
E 250*

1001
DK 200*

DN1
DN2
l
l1
l2
b
b1
b2
h
h1
h2

100 ISO-K
63 ISO-K
1650 (64.96)
680 (26.77)
1398 (55.04)
850 (33.46)
260 (10.24)
238 (9.37)
1523 (59.96)
872 (34.33)
1127 (44.37)

160 ISO-K
63 ISO-K
1650 (64.96)
680 (26.77)
1395 (54.92)
910 (35.83)
335 (13.19)
223 (8.78)
1705 (67.13)
894 (35.20)
1175 (46.26)

100 ISO-K
63 ISO-K
1650 (64.96)
680 (26.77)
1398 (55.04)
850 (33.46)
260 (10.24)
238 (9.37)
1523 (59.96)
872 (34.33)
1127 (44.37)

* Alternatively with AFK exhaust filter box instead of the exhaust filter; then dimensions l1 and b2 will change

Dimensional drawing for the pump systems with E and DK backing pumps; dimensions in brackets ( ) are in inch

C08.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Technical D ata , 50 Hz

1001/E250/G

RUTA WAU

2001/E250/G

RUTA WSU
1001/DK200/G

RUVAC (WA/WAU/WS/WSU possible)

P2

1001

2001

1001

Rotary piston vacuum pump

P1

E 250

E 250

DK 200

800 (471.2)
–

1350 (795.2)
–

–
815 (480)

Pumping speed, 50 Hz
at 1 mbar (0.75 Torr)
at 10-1 mbar (0.75 x 10-1 Torr)

m3 x h-1 (cfm)
m3 x h-1 (cfm)

Ultimate partial pressure

mbar (Torr)

2 x 10-3 (1.5 x 10-3)

2 x 10-3 (1.5 x 10-3)

3 x 10-5 (2.3 x 10-5)

Ultimate total pressure with gas ballast

mbar (Torr)

2 x 10-2 (1.5 x 10-2)

2 x 10-2 (1.5 x 10-2)

3 x 10-4 (2.3 x 10-4)

Installed motor power

kW (hp)

9.5 (12.9)

13 (17.7)

9.5 (12.9)

Power consumption
at 1 mbar (0.75 Torr)
at 10-1 mbar (0.75 x 10-1 Torr)

kW (hp)
kW (hp)

4.0 (5.4)
–

4.7 (6.4)
–

–
4.4 (6.0)

Noise level to DIN 45 635
max.
without gas ballast at 1 mbar (0.75 Torr)
without gas ballast
at 10-1 mbar (0.75 x 10-1 Torr)

dB(A)
dB(A)

80
75

83
80

80
–

dB(A)

–

–

75

Oil filling, total, approx.

l (qt)

11 (11.63)

12 (12.68)

6 (6.34)

895 (1973.5)

1080 (2381.4)

930 (2050.7)

100 ISO-K
63 ISO-K

160 ISO-K
63 ISO-K

100 ISO-K
63 ISO-K

2001/E250/G

RUTA WSU
1001/DK200/G

Weight, total, approx.

kg (lbs)

Connecting flanges
Inlet port
Outlet port

DN1
DN2

Or dering Information

1001/E250/G

RUTA WAU

C08

RUVAC (WA/WAU/WS/WSU possible)

P2

WAU 1001

WAU 2001

WSU 1001

Rotary piston vacuum pump

P1

E 250

E 250

DK 200

Part No. 023 36
–

Part No. 023 45
–

–
Part No. 025 36

Pumping system, complete (frame version)
frame mounted,
with Roots vacuum pumps
RUVAC WAU
RUVAC WSU

10

3

10

10

10 2

2

10 -4

10 -3

10 -2

10 -1

10 0

10 1

Torr

750

4

5000
cfm

m 3 x h -1

1000

10 1

1

10 0

0
8
6
4

WAU 1001+E 250

2

WAU 2001+E 250

10

WAU 1001+DK 200

-1

0

10

min

20

Pump-down time

-1

Pumping speed

10

Pressure

10

Torr

mbar

10

10 -5

750

10 3

500

100

10 2

WAU 2001+E 250

8
6

50

4

WAU 1001+E 250

2

WSU 1001+DK 200

10 1 2
10 -5

4 68

10 -4

Total pressure

10 -3

10 -2

10 -1

10 0

10 1

10

mbar

10 3

Pressure

Partial pressure

Pump-down time diagram for a 10 m3 tank at 50 Hz

Pumping speed diagram at 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.13

Vacuum Pump Systems

Dry-Compressing Vacuum Pump System RUTA with EcoDry L Backing Pump

RUTA WSU 251/EcoDry L/A

Advantages to the User

Typical Applications

Standard Equipment

♦ Maintenance-free, oil-free and
hydrocarbon-free

♦ Applications in physics

♦ Pallet with vibration absorbers

♦ Loadlock applications
♦ Vacuum locks

♦ 100 mm (3.94 in.) floor clearance for easy
moving

♦ Lamps manufacture

♦ Connection for horizontal exhaust line

♦ Coating systems

♦ Roots pump with mineral oil filling (required
oil is supplied with the system upon delivery)

♦ No particle generation
♦ Low power consumption
♦ Requires no cooling water
♦ High pumping speed at low pressure
♦ Tolerates liquids, particles and water vapor

♦ Sterilizers

♦ No grease-lubricated bearing in the vacuum
section

♦ Generation of the forevacuum in dry high
vacuum pump systems

♦ Frequency converter for controlling the speed
of the Roots pump

♦ Low noise and low vibration
♦ Compact size

♦ EcoDry L with 2.2 kW (3 hp) motor for
sustained operation at high intake pressures

♦ CE approval

mm
in.

Options

b

b1

b2

h

h1

h2

l

l1

l2

l3

l4

360
14.17

170
6.69

70
2.76

944
37.17

696
27.40

100
3.94

795
31.30

650
25.59

40
1.57

172
6.77

210
8.27

♦ Soft start valve on the EcoDry L
♦ Gas ballast
♦ Different types of floor mount

l3

b2

l4

♦ Castors

DN 63 ISO-K

♦ DN 10/16 KF measurement flange between the
pumps
♦ PFPE Roots pump model
♦ Custom motors (voltage/frequency/protection)
♦ Electrical control system

h1

h

h2

l1

l2

l

b1
b

Dimensional drawing for the dry-compressing vacuum pump system RUTA WSU 251/EcoDry L/A

C08.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Technical D ata

50 Hz

RUTA WSU 251/EcoDry L/A

60 Hz

RUVAC (WA/WAU/WS/WSU possible)

P2

WSU 251

WSU 251

Backing pump

P1

EcoDry L

EcoDry L

Pumping speed
at 10-1 mbar (0.75 x 10-1 Torr) m3 x h-1 (cfm)

185 (109)

230 (135.5)

2 x 10-3 (1.5 x 10-3)

2 x 10-3 (1.5 x 10-3)

Ultimate total pressure without gas ballast
mbar (Torr)
Installed motor power
WSU 251
EcoDry L
Standard / Option
Total

kW (hp)

1.1 (1.5)

1.4 (1.9)

kW (hp)
kW (hp)

1.5 / 2.2 (2.0 / 3.0)
2.6 / 3.3 (3.5 / 4.5)

1.8 / 2.6 (2.4 / 3.5)
3.2 / 4.0 (4.4 / 5.4)

Power consumption at
10-1 mbar (0.75 x 10-1 Torr)

kW (hp)

0.9 (1.2)

1.0 (1.4)

67

69

210 (463.1)

210 (463.1)

63 ISO-K
25 KF

63 ISO-K
25 KF

Noise level to DIN 45 635 without
gas ballast at 1 mbar (0.75 Torr)
Weight total, approx.

dB(A)
kg (lbs)

Connecting flanges
Inlet port
Outlet port

DN1
DN2

Or dering Inform a tion

RUTA WSU 251/EcoDry L/A

RUVAC (WA/WAU/WS/WSU possible)

P2

WSU 251

Backing pump

P1

EcoDry L

Pumping system, complete (adaptor version),
pallet mounted
400 V / 50 Hz and 460 V / 60 Hz

10

Part No. 127 41

3

10

3

10

Torr

mbar
10

C08

10

2

10

-3

10

-2

10

-1

10

0

10

1

Torr

10

2

750

3

500

2
3

cfm

-1

10

100

1

10

10

10

10

1

10

0

10

-1

0

-1

2

50

Pumping speed

Pressure

m xh

10
10

1

5

8
6
4

10

10

-2

0

10

20

30
40
Pump-down time

50

s

-2

60

(50Hz) WSU 251 + ECODRY L

2
10

1

0

10

-3

2

4 68
-2
10

10

-1

(60Hz) WSU 251 + ECODRY L

0

10
Pressure

10

1

10

2

mbar 10

3

(60Hz) E CO D RY L+WSU 251
(50Hz) ECO D RY L+WSU 251

Pump-down time diagram for a 100l tank

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Pumping speed diagram for 50 and 60 Hz

C08.15

Vacuum Pump Systems

Dry Compressing RUTA Pump Systems with S CREWLine SP630 Backing Pump

RUTA WAU 2001/SP630/G

Standard Equipment

Options

♦ Silencer

♦ Frequency converter for controlling the speed
of the Roots pump

♦ SECUVAC valve (not for adapter version)

♦ Condensate drain valve at the silencer

♦ Gear oil collecting pan

♦ Different types of floor mounts
♦ Gear oil drain valve on each pump

♦ Sound proofing box

♦ Crane eyes on the frame

♦ Castors

♦ Electric control systems

♦ Vibration absorbers

♦ Floor mounting
♦ Gear oil is supplied with the pump

b
b1

l1
b
b1

l1

b2

DN1
b2

DN1

DN2

DN2

h
h
h1

l2

h2

l2

b3
b4*

l

RUVAC RA
RUVAC WA/WAU/WS/WSU
SCREWLine backing pump

RUTA
P2
P2
P1
DN1
DN2
l
l1
l2
b
b1
b2
b3
b4
h
h1
h2

b3
b4*

l

2001/SP630/A
–
2001
SP630
160 ISO-K
100 ISO-K
1850 (72.84)
380 (14.96)
892 (35.12)
1064 (41.89)
400 (15.75)
554 (21.81)
800 (31.50)
70 (2.76)
1518 (59.76)
1380 (54.33)
–

2001/SP630/G
–
2001
SP630
160 ISO-K
100 ISO-K
2200 (86.62)
600 (23.62)
892 (35.12)
1064 (41.89)
400 (15.75)
554 (21.81)
800 (31.50)
70 (2.76)
1789 (70.43)
1380 (54.33)
1259 (49.57)

3001/SP630/G
3001
–
SP630
250 ISO-K
100 ISO-K
2200 (86.62)
600 (23.62)
892 (35.12)
1064 (41.89)
400 (15.75)
554 (21.81)
800 (31.50)
70 (2.76)
2030 (79.92)
1380 (54.33)
1415 (55.71)

5001/SP630/G
5001
–
SP630
250 ISO-K
100 ISO-K
2400 (94.49)
720 (28.35)
1012 (39.84)
1129 (44.45)
465 (18.31)
554 (21.81)
930 (36.61)
–
2220 (87.40)
1440 (56.69)
1475 (58.07)

h1

7001/SP630/G 9001/SP630/G
7001
9001
–
–
SP630
SP630
250 ISO-K
320 ISO-K
100 ISO-K
100 ISO-K
2400 (94.49) 2400 (94.49)
720 (28.35)
720 (28.35)
1012 (39.84) 1012 (39.84)
1129 (44.45) 1129 (44.45)
465 (18.31)
465 (18.31)
554 (21.81)
554 (21.81)
930 (36.61)
930 (36.61)
–
–
2220 (87.40) 2300 (90.55)
1440 (56.69) 1440 (56.69)
1475 (58.07) 1475 (58.07)
* Clearance for maintenance

Dimensional drawing of the pump systems with dry compressing SCREWLine SP630 backing pump; adapter version (left) frame version (right).; dimensions in brackets ( ) are in inch

C08.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems
RUTA WAU

Technical D ata, 50 Hz

R U TA R A

2001/SP630/A 2001/SP630/G

3001/SP630/G

5001/SP630/G 7001/SP630/G 9001/SP630/G

RUVAC RA

P2

–

–

3001

5001

7001

9001

RUVAC (WA/WAU/WS/WSU possible)

P2

2001

2001

–

–

–

–

SCREWLine backing pump

P1

SP630

SP630

SP630

SP630

SP630

SP630

m3 x h-1 (cfm)

1780 (1050)

1780 (1050)

3280 (1930)

4510 (2660)

5940 (3500)

6920 (4070)

mbar
(Torr)

< 1 x 10-3
(< 7.5 x 10-4)

< 1 x 10-3
(< 7.5 x 10-4)

< 1 x 10-3
(< 7.5 x 10-4)

< 1 x 10-3
(< 7.5 x 10-4)

< 1 x 10-3
(< 7.5 x 10-4)

< 1 x 10-3
(< 7.5 x 10-4)

Pumping speed, 50 Hz
at 10-1 mbar (7.5 x 10-2 Torr)
Ultimate total pressure without gas ballast

Installed motor power

kW (hp)

22.5 (30)

22.5 (30)

26 (35)

30 (40)

33.5 (45)

37 (50)

Electrical power consumption at 10-1 mbar

kW (hp)

11.7 (15.7)

11.7 (15.7)

12.2 (16.4)

12.6 (16.9)

13.0 (17.4)

13.5 (18.1)

Noise level in accordance with DIN 45 635
with silencer at 10-1 mbar (7.5 x 10-2 Torr)

dB(A)

79

79

81

79

82

80

1100 (2430)

1300 (2870)

1550 (3420)

1900 (4190)

2000 (4410)

2630 (5800)

160 ISO-K
100 ISO-K

160 ISO-K
100 ISO-K

250 ISO-K
100 ISO-K

250 ISO-K
100 ISO-K

250 ISO-K
100 ISO-K

320 ISO-K
100 ISO-K

Weight, total, approx.

kg (lbs)

Connecting flanges
Inlet port
Outlet port

DN1
DN2

RUTA WAU

Ordering Information

R U TA R A

2001/SP630/A 2001/SP630/G

3001/SP630/G

5001/SP630/G 7001/SP630/G 9001/SP630/G

RUVAC

P2

–

RUVAC (WA/WAU/WS/WSU possible

P2

WAU 2001

WAU 2001

–

–

–

–

SCREWLine backing pump

P1

SP630

SP630

SP630

SP630

SP630

SP630

Part No. 500 740

–

–

–

–

–

–
–

Part No. 500 741
–

–
Part No. 500 742

Complete pump system (adapter version)
fitted on to a p a l l e t,
with Roots vacuum pump
RUVAC WAU
Complete pump system (frame version),
mounted in a f r a m e,
with Roots vacuum pump
RUVAC WAU
RUVAC RA

–

RA 3001

RA 5001

RA 7001

RA 9001

10 3

10 4

mbar

m3 . h-1

10 2

10 3
Pumping speed

Presure

–
–
–
Part No. 500 743 Part No. 500 744 Part No. 500 745

10 1

10 08
6
4

10

WAU2001 + SP630
RA3001 + SP630
RA5001 + SP630
RA7001 + SP630
RA9001 + SP630

10 2

8
6

4

2

2

-1

1

0

4

2

WAU2001 + SP630
RA3001 + SP630
RA5001 + SP630
RA7001 + SP630
RA9001 + SP630

6

min

8

10

2

10 -3

4 68

10 -2

Pump-down time
Pump-down time diagram for a 10 m3 tank at 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Pumping speed diagram at 50 Hz

10 -1

10 0

10 1

10 2mbar 10 3

Pressure

C08.17

C08

Vacuum Pump Systems

RUVAC RAV Roots Vacuum Pumps with Pre-Admission Cooling

Advantages to the User

Typical Applications

– two-stages to 25 mbar (18.75 Torr)
– multiple stage to 10-3 mbar (0.75 x 10-3 Torr)

♦ RUVAC RAV G:
Operating pressure range of 150 mbar
(112.5 Torr) against atmospheric pressure;
Total leak rate < 10-1 mbar x l x s-1
(0.75 x 10-2 Torr x l x s-1)

♦ Short pump-down cycles on large volumes

♦ Motors for special supply voltages and frequencies or protected types are available

♦ Oil-free compression of high volume flows of
gases and vapors against atmospheric pressure

♦ Pre-admission silencer and filter for the
cooling gas inlet as well as silencers for the
exhaust side (option/single-stage)

♦ RUVAC RAV F:
In combination with backing pumps the
attainable operating pressures extend down
into the medium vacuum range; leak rate
< 10-2 mbar x l x s-1 (0.75 x 10-2 Torr x l x s-1)

♦ Single-stage (G) or in combination with RAV F
as backing pump

♦ Downstream gas cooler (option/multistage)

♦ When series-connected the operating pressures
extend down into the medium vacuum range:

♦ C version (chemical version/option)

♦ Operating pressures in the rough vacuum
range

♦ Special materials (option)

♦ CE approval

♦ Pressure burst resistant version (option)

l
l1

b

l5
l2

DN1

b2

l6

l3
DN

h
d
h1

10

RUVAC RAV
0250 F/G

DN
DIN 2533

DN1
DIN 2533

mm
80
50
in.
80
50
0500 F/G
mm
100
50
in.
100
50
1000 F/G
mm
100
80
in.
100
80
2000 F/G
mm
150
100
in.
150
100
150
4000 F/G
mm
250*)
150
in.
250*)
200*)
8000 F/G
mm
300*)
200*)
in.
300*)
Dimensional drawing for the RUVAC RAV pumps

C08.18

l4
DN
b1
b3

Cooling water connection for
RAV 4000 F, RAV 8000 F

l

l1

l2

l3

l4

529
20.83
604
23.78
705
27.76
806
31.73
1143
45.0
1337
52.64

283
11.14
324
12.76
380
14.96
423
16.65
610
24.02
717
28.23

90
3.54
120
4.72
125
4.92
160
6.30
250
9.84
300
11.81
*) DIN 2532

100
3.94
100
3.94
115
4.53
130
5.12
200
7.87
230
9.06

125
4.92
150
5.91
210
8.27
270
10.63
410
16.14
525
20.67

l5

l6

50
5
1.97
0.20
70
5
2.76
0.20
90
5
3.54
0.20
80
5
3.15
0.20
95
5
3.74
0.20
100
8
3.94
0.31
DN1 = Pre-inlet

b

b1

b2

b3

321
12.64
321
12.64
427
16.81
476
18.74
682
26.85
954
37.56

332
13.07
390
15.35
440
17.32
570
22.44
800
31.50
910
35.83

34
1.34
42.6
1.68
53.3
2.10
67.6
2.66
106
4.17
135
5.31

300
11.81
350
13.78
400
15.75
510
20.08
720
28.35
830
32.68

Type F
d

Type G
d

25 k6
28 k6
0.98 k6 1.10 k6
25 k6
38 k6
0.98 k6 1.50 k6
42 k6
45 k6
1.65 k6 1.77 k6
42 k6
55 k6
1.65 k6 2.17 k6
55 k6
70 m6
2.17 k6 2.76 m6
70 k6
90 m6
2.76 k6 3.54 m6

h

h1

313
12.32
370
14.57
410
16.14
450
17.72
680
26.77
760
29.92

132
5.20
160
6.30
180
7.09
200
7.87
315
12.40
355
13.98

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Technical D ata, 50 Hz
Pumping speed 1)

m3 x h-1 (cfm)
min-1

Nominal speed
Max. permissible pressure difference 2)

mbar (Torr)

Connecting flange

DN

250 G

500 G

RUVAC RAV
1000 G
2000 G

250 (147.3)

500 (294.5)

1 000 (589)

3 000

3 000

850 (637)

4000 G

8000 G

2 000 (1178)

3 700 (2179.3)

8 100 (4770.9)

3 000

3 000

1 500

1 500

850 (637)

850 (637)

850 (637)

850 (637)

850 (637)

80

100

100

150

250

300

Max. permissible motor power
for direct drive
for belt drive

kW (hp)
kW (hp)

11 (15)
11 (15)

18.5 (25.2)
18.5 (25.2)

30 (40.8)
30 (40.8)

55 (74.8)
55 (74.8)

95 (129.3)
95 (129.3)

200 (272.1)
200 (272.1)

Weight

kg (lbs)

95 (210)

160 (353)

225 (496)

310 (684)

720 (1588)

1 230 (2712)

250 G

500 G

4000 G

8000 G

upon request

upon request

upon request

upon request

Or dering Information
RUVAC RAV G Roots vacuum pump

Technical D ata, 50 Hz
Pumping speed 1)

m3 x h-1 (cfm)
min-1

Nominal speed
Max. permissible pressure difference 2)

mbar (Torr)

Connecting flange

DN

RUVAC R AV
1000 G
2000 G
upon request

upon request

RUVAC RAV
1000 F
2000 F

250 F

500 F

4000 F

8000 F

250 (147.3)

500 (294.5)

1 000 (589)

2 000(1178)

3 700 (2179.3)

8 100 (4770.9)

3 000

3 000

3 000

3 000

1 500

1 500

850 (637)

850 (637)

850 (637)

850 (637)

850 (637)

850 (637)

80

100

100

150

250

300

Max. permissible motor power
for direct drive
for belt drive

kW (hp)
kW (hp)

11 (15)
4 (5.4)

18.5 (25.2)
4 (5.4)

30 (40.8)
7.5 (10.2)

55 (74.8)
15 (20.4)

95 (129.3)
37 (50.3)

200 (272.1)
75 (102.0)

Weight, approx.

kg (lbs)

95 (210)

160 (353)

225 (496)

310 (684)

720 (1588)

1 230 (2712)

–

–

–

–

10 x 1

10 x 1

–

–

–

–

60

60

4000 F

8000 F

upon request

upon request

Cooling water connection, fitting for tube
l x h-1

Cooling water requirement, approx.

Or dering Information
RUVAC RAV F Roots vacuum pump
1)

To DIN 28 400 and following numbers

2)

RUVAC RAV G and RAV F with direct drive

250 F

500 F

upon request

upon request

Torr

10 2

RUVAC R AV
1000 F
2000 F
upon request

750

10 4

5000
cfm

RAV 8000 G
RAV 4000 G

m 3 x h -1
Pumping speed

upon request

1000
RAV 2000 G
RAV 1000 G

10 3

8

500

6
4

RAV 500 G
RAV 250 G

2

10 2
10 2

2

4

6

8

mbar
Pressure

Pumping speed diagram of RUVAC RAV at 50 Hz

–––– Total pressure

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

100

10 3

Operating diagram of RUVAC RAV vacuum pumps
with pre-admission cooling

C08.19

C08

Vacuum Pump Systems

Two- and Three-Stage RUTA RAV Pump Systems with RUVAC RAV Roots Vacuum Pumps
3

750

10
mbar

Torr

Pressure

6
4

2

1

10

2

43

2

5 RAV 8000 F + RAV 4000 G
4 RAV 4000 F + RAV 2000 G
5 RAV
8000
F +FRAV
4000
G G
3 RAV
2000
+ RAV
1000
4 RAV
4000
F +FRAV
2000
GG
2 RAV
1000
+ RAV
500
3 RAV
2000
F
+
RAV
1000
1 RAV 500 F + RAV 250G
G
2 RAV 1000 F + RAV 500 G
Pump-down time diagram for a 50 m3 1tank
RAV
50GHz
RAVfor
500
F + F+G
RAV at
250

10

5

2

0

10 min 20
Time

10 3

Standard Equipment

750

♦ Roots vacuum pumps with pre-admission
cooling

Pressure

mbar

♦ Ultimate pressures below 10 mbar (7.5 Torr)
can be attained

♦ One or two RAV F pumps are connected
upstream of the RUVAC RAV G pump
operating as a backing pump

♦ Gas cooler, pre-admission silencer and filter

10

10 2

8
6

1

4

2

2

10 1

♦ Non-return flap

4

0

♦ Exhaust silencer

♦ CE approval

Torr

3

10 min 20
Time

4 RAV 8000 F + RAV 4000 F +
RAV 2000 G
3 RAV 4000 F + RAV 2000 F +
RAV 1000 G
1
10 2 RAV 2000 F + RAV 1000 F +
G F + RAV 4000 F +
4 RAV
RAV500
8000
1 RAV
RAV 1000
2000FG+ RAV 500 F +
RAV 250 G

3 RAV 4000 F + RAV 2000 F +
RAV 1000 G

Pump-down time diagram for a 50 m3 tank2for
RAV
F, FF ++ RAV
G at 1000
50 HzF +
RAV
2000
RAV 500 G

b1

b1
DN1

DN1

h4
DN2

h3

h4
h

DN 2

h3

h1
h2
b2
l1

RUTA
P3
P2
P1
DN1
DN2
l
l1
l2
b
b1
b2
h
h1
h2
h3
h4

500 F/250 G
–
500 F
250 G
100 (3.94)
80 (3.15)
1290 (50.79)
420 (16.54)
1050 (41.34)
1300 (51.18)
1050 (41.34)
400 (15.75)
1550 (61.02)
720 (28.35)
500 (19.69)
1180 (46.46)
1370 (53.94)

1000 F/500 G
–
1000 F
500 G
100 (3.94)
100 (3.94)
1560 (61.42)
480 (18.90)
1100 (43.31)
1500 (59.06)
1180 (46.46)
400 (15.75)
1700 (66.93)
820 (32.28)
570 (22.44)
1340 (52.76)
1520 (59.84)

2000 F/1000 G
–
2000 F
1000 G
150 (5.91)
100 (3.94)
1830 (72.03)
570 (22.44)
1300 (51.18)
1680 (66.14)
1300 (51.18)
450 (17.72)
1930 (75.98)
1000 (39.37)
750 (29.53)
1540 (60.63)
1750 (68.90)

l2
b2

l1

b

l

h

h1
h2

l2

RUVAC RAV
RUVAC RAV
RUVAC RAV

2

b

l

4000 F/2000 G
–
4000 F
2000 G
250 (9.84)
150 (5.91)
2400 (94.49)
800 (31.50)
1650 (64.96)
2050 (80.71)
1550 (61.02)
500 (19.69)
2550 (100.39)
1100 (43.31)
700 (27.56)
1750 (68.90)
2210 (87.01)

8000 F/4000 G
–
8000 F
4000 G
300 (11.81)
250 (9.84)
2790 (109.84)
950 (37.40)
2150 (84.65)
2600 (102.36)
2100 (82.68)
700 (27.56)
3100 (122.05)
1200 (47.24)
700 (27.56)
2100 (82.68)
2500 (98.43)

1000 F/500 F/250 G
1000 F
500 F
250 G
100 (3.94)
80 (3.15)
1560 (61.42)
480 (18.90)
1050 (41.34)
2170 (85.43)
1850 (72.83)
400 (15.75)
1720 (67.72)
800 (31.5)
600 (23.62)
1280 (50.39)
1520 (59.84)

2000 F/1000 F/500 G 4000 F/2000 F/1000 G 8000 F/4000 F/2000 G
2000 F
4000 F
8000 F
1000 F
2000 F
4000 F
500 G
1000 G
2000 G
150 (5.91)
250 (9.84)
300 (11.81)
100 (3.94)
100 (3.94)
150 (5.91)
1830 (72.05)
2400 (94.49)
2790 (109.84)
570 (22.44)
800 (31.50)
950 (37.40)
1100 (43.31)
1350 (53.15)
1650 (64.96)
2400 (94.49)
2850 (112.20)
3400 (133.86)
2000 (78.74)
2400 (94.49)
2950 (116.14)
400 (15.75)
450 (17.72)
500 (19.69)
1950 (76.77)
2550 (100.39)
3000 (118.11)
1000 (39.37)
1150 (45.28)
1200 (47.24)
750 (29.53)
850 (33.46)
850 (33.46)
1500 (59.06)
1700 (66.93)
1830 (72.05)
1750 (68.90)
2210 (87.01)
2500 (98.43)

Dimensional drawing for two-stage RUTA RAV pump systems [left] and three-stage RUTA RAV pump systems [right]; dimensions in brackets ( ) are in inch

C08.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems
RUTA RAV

250 G

1000 F/
500 G

2000 F/
1000 G

4000 F/
2000 G

8000 F/
4000 G

1000 F/
500 F/
250 G

2000 F/
1000 F/
500 G

4000 F/
2000 F/
1000 G

8000 F/
4000 F/
2000 G

–
500 F
250 G

–
1 000 F
500 G

–
2 000 F
1 000 G

–
4 000 F
2 000 G

–
8 000 F
4 000 G

1 000 F
500 F
250 G

2 000 F
1 000 F
500 G

4 000 F
2 000 F
1 000 G

8 000 F
4 000 F
2 000 G

m3 x h-1 (cfm)
m3 x h-1 (cfm)

322 (189.7)
–

708 (417)
–

mbar (Torr)

< 50 (< 37.5)

mbar (Torr)
mbar (Torr)
mbar (Torr)

Technical Data, 50 Hz 500 F/
RUVAC RAV
RUVAC RAV
RUVAC RAV

P3
P2
P1

Pumping speed, 50 Hz
at 200 mbar (150 Torr)
at 100 mbar (75 Torr)
Ultimate total pressure
(other motors are required)
Cut-in pressure
P3 *)
P2 *)
P1

1 518 (894.1) 2 685 (1581.5) 5 821 (3428.6)
–
–
–

–
741 (436.4)

–
–
–
1 573 (926.5) 2 862 (1685.7) 6 243 (3677.1)

< 50 (< 37.5)

< 50 (< 37.5)

< 50 (< 37.5)

< 50 (< 37.5)

< 10 (< 7.5)

< 10 (< 7.5)

< 10 (< 7.5)

< 10 (< 7.5)

–
576 (432)
1 013 (760)

–
538 (403.5)
1 013 (760)

–
548 (411)
1 013 (760)

–
630 (472.5)
1 013 (760)

–
502 (376.5)
1 013 (760)

278 (208.5)
576 (432)
1 013 (760)

265 (198.8)
538 (403.5)
1 013 (760)

312 (234)
548 (411)
1 013 (760)

289 (216.8)
630 (472.5)
1 013 (760)

Installed motor power

kW (hp)

15 (20.4)

22 (29.9)

44 (59.9)

82 (111.6)

165 (224.5)

22.5 (30.6)

37 (50.3)

62.5 (85.0)

157 (213.6)

Power consumption
at 200 mbar (150 Torr)
at 100 mbar (75 Torr)

kW (hp)
kW (hp)

7.8 (10.6)
–

15.8 (21.5)
–

31.5 (42.9)
–

56.4 (76.7)
–

122 (166.0)
–

–
12 (16.3)

–
24.4 (33.2)

–
42.3 (57.6)

–
90.6 (123.3)

Cooling water consumption (T< 30°, DT < 10 K),
max. (gas coolers and pumps) m3 x h-1 (cfm)

0.5 (0.3)

1 (0.6)

2 (1.2)

3 (1.8)

7 (4.1)

1 (0.6)

2 (1.2)

4 (2.4)

8 (4.7)

86

88

93

104

106

88

95

106

108

72

74

80

84

86

75

77

86

88

2 (2.11)

2.5 (2.64)

4 (4.23)

14.5 (15.33)

23 (24.31)

3.5 (3.70)

5 (5.29)

16 (16.91)

25 (26.43)

Total weight, incl. silencers for preadmission and exhaust, approx.
kg (lbs)

1 000 (2205)

1 600 (3528)

2 200 (4851)

Connecting flanges (pipe connection) 1)
Inlet port
DN1
Outlet port
DN2
Gas admission port without filter
DN

100
80
50

100
100
50

150
100
80

Noise level to DIN 45 635
with pre-inlet and pulsation
silencers and pump exhaust
leading outside
dB(A)
plus additional
sound proofing box
dB(A)
(a further reduction is possible)
Oil filling, total, approx.

l (qt)

1000 F/
500 G

250 G

*) With exhaust flap and bypass line 1013 mbar (760 Torr)
10 1

10 2

2000 F/
1000 G

4000 F/
2000 G

100
80
50

150
100
50

250
100
80

300
150
100

8000 F/
4000 G

1000 F/
500 F/
250 G

2000 F/
1000 F/
500 G

4000 F/
2000 F/
1000 G

8000 F/
4000 F/
2000 G

Torr

to DIN 25 33
10 1

750

4
3

1000
500

2

4
2

100

1

2
1

2

4 68

2

10
Pressure

mbar

10

3

4
3

3

2

8
6
4

1

RAV 8000 F + RAV 4000 G
RAV 4000 F + RAV 2000 G
RAV 2000 F + RAV 1000 G
RAV 1000 F + RAV 500 G
RAV 500 F + RAV 250 G

Pumping speed diagram of RAV F+G at 50 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

750

cfm
1000
500

2

10

100

2

10
5
4
3
2
1

Torr

5000

3
m x h-1

10

10 2

4

Pumping speed

cfm

5

3
8
6

10

10

5000

3

Pumping speed

1)

4

-1
m xh

10

300
250
150

3 000 (6615) 5 000 (11025) 8 500 (18743)

upon request upon request upon request upon request upon request upon request upon request upon request upon request

Pump system

10

250
150
100

RUTA RAV

Ordering Inform a tion 500 F/

10

4 000 (8820) 7 500 (16538) 2 000 (4410)

1

2

4

6

8

10

2

Pressure

mbar

10

3

4 RAV 8000 F + RAV 4000 F +
RAV 2000 G
3 RAV 4000 F + RAV 2000 F +
RAV 1000 G
2 RAV 2000 F + RAV 1000 F +
RAV 500 G
1 RAV 1000 F + RAV 500 F +
RAV 250 G

Pumping speed diagram of RAV F, F + G at 50 Hz

C08.21

C08

Vacuum Pump Systems

TVD Pump Systems for Drying, Evaporation and Distillation Applications

TVD 200

Advantages to the User

Typical Applications

Standard Equipment

♦ Operating agent may be re-used, for example
by returning cleaned water to the process

♦ Drying of powders and solids, for example

♦ Condenser at the intake side

♦ Cleaning of waste water

♦ Receiver with condensate level indicator

♦ Vacuum distillation

♦ Manually operated valves on the receiver

♦ Reduction of the quantities which need to be
disposed of by 80 %

♦ SOGEVAC rotary vane pump with integrated
exhaust filters, anti-suckback valve and gas
ballast valve

♦ Low temperature distillation/drying
♦ Condensate may be drained during vacuum
operation

Options

♦ CE approval

♦ Valve between condenser and rotary vane
pump

b2

l1

b1

Handventil
Hand valve
DN 63 ISO-K

♦ Pressure gauge for checking the condensate
pressure

DN1

DN 3

♦ Solenoid valves at the receiver

DN 3
DN 2

h

♦ Receiver with proximity switch for monitoring
the condensate level

h1

DN 3

h2
c

♦ Mobile pallet with castors
b

l

TVD 040
TVD 065
TVD 100
TVD 200

mm
in.
mm
in.
mm
in.
mm
in.

♦ Electric control for automatic operation of the
pump system

DN1

DN2

DN3

l

l1

b

b1

b2

h

h1

h2

c

63 ISO-K
63 ISO-K
63 ISO-K
63 ISO-K
100 ISO-K
100 ISO-K
100 ISO-K
100 ISO-K

1 1/4"
1 1/4"
1 1/4"
1 1/4"
2"
2"
2"
2"

1"
1"
1"
1"
1"
1"
1"
1"

1000
39.37
1280
50.39
1400
55.12
1800
70.87

590
23.23
755
29.72
755
29.72
765
30.12

700
27.56
700
27.56
940
37.01
940
37.01

160
6.30
160
6.30
160
6.30
150
6.30

445
17.52
445
17.52
561
22.09
501
19.72

1000
39.37
1165
45.87
1165
45.87
1175
46.25

785
30.91
950
33.46
950
33.46
960
37.80

341
13.43
341
13.43
345
13.58
473
18.62

100
3.94
100
3.94
100
3.94
100
3.94

♦ Cold water replacement for mobile applications

Dimensional drawing for the TVD pump systems

C08.22

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Technical D ata, 50 Hz
m2

Condenser, effective surface area, approx.
Receiver, usable volume
Rotary vane vacuum pump

l (qt)
SOGEVAC

TVD 40

TVD 65

TVD 100

TVD 200

1

2

3

5

30 (31.71)

50 (52.85)

50 (52.85)

50 (52.85)

SV 40

SV 65

SV 100

SV 200

Nominal pumping speed

m3 x h-1 (cfm)

46 (27.1)

65 (38.3)

100 (58.9)

180 (106)

Pumping speed at 50 Hz
for air
for water vapor at 50 mbar (37.5 Torr)

m3 x h-1 (cfm)
m3 x h-1 (cfm)

46 (27.1)
280 (165)

53 (31.2)
560 (330)

94 (55.4)
840 (495)

170 (100.1)
1400 (825)

mbar (Torr)

< 1.5 (< 1.1)

< 1.5 (< 1.1)

< 1.5 (< 1.1)

< 0.7 (< 0.53)

Ultimate total pressure
with standard gas ballast
Noise level to DIN 45635 *)

dB(A)

63

64

70

69

Condensing capacity for water

l x h-1

10

20

30

50

1.1 (1.5)

1.5 (2.0)

2.2 (3.0)

4.0 (4.2)

SV 40

SV 65

SV 100

SV 200

kg (lbs)

125 (276)

150 (331)

200 (441)

300 (662)

l (qt)

2.0 (2.11)

2.0 (2.11)

3.5 (3.70)

5.0 (5.29)

DN1
DN2

63 ISO-K
1 1/4"

63 ISO-K
1 1/4"

100 ISO-K
2"

100 ISO-K
2"

TVD 40

TVD 65

TVD 100

TVD 200

Part No. 021 01

Part No. 021 02

Part No. 021 03

Part No. 021 04

Installed motor power

kW (hp)

Technical D ata, 50 Hz
Weight (with oil filling), approx.
Oil filling
Connecting flanges
Inlet port
Outlet port

Or dering Information
Pump system
*)

Operating at ultimate pressure with gas ballast

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.23

C08

Vacuum Pump Systems

Version for the North and South American Continents

RBS - B/BCS Roots Pump Systems with Two-Stage TRIVAC Backing Pumps

RBS - B/BCS Roots Pumping Systems

Standard Equipment
♦ System consists of TRIVAC dual stage B or
BCS direct drive vane pump and RUVAC
blower
♦ Complete air cooled system
♦ Frame equipped with caster wheels and
leveling pads
♦ Compact construction with quiet operation
♦ Available with either 18 inch or 26 inch wide
frame
♦ Manual operation of gas ballast
♦ Frame mounted or close-coupled RUVAC blower

C08.24

Options
♦ All TRIVAC accessories, Exhaust filter,
24 V DC gas ballast valve, chemical oil filter,
and electrical limit switch system
♦ Full frame drip pan
♦ Oil drain valves
♦ Special motor voltages and frequencies
♦ Special oil for unique applications
♦ Full NEMA 12 electrical controls for control
start/stop and monitoring of system from
remote and local locations – PSS/LOS/ROS
system

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Version for the North and South American Continents
l

l1

b

l
b

l1
b2

h
h

h1

h1

b1
l2

l2

System

b

D 40 B/BCS
WA/WAU 251
WS/WSU 251
WA/WAU 501
WS/WSU 501
D 65 B/BCS
WA/WAU 251
WS/WSU 251
WA/WAU 501
WS/WSU 501

b1

b2

18 (457)
18 (457)
18 (457)
18 (457)

8 (203)
8 (203)
8 (203)
8 (203)

18 (457)
18 (457)
18 (457)
18 (457)

8 (203)
8 (203)
8 (203)
8 (203)

h

h1

l

l1

l2

33 3/16 (853)
33 3/16 (853)
34 3/4 (883)
34 3/4 (883)

17 15/16 (456)
17 15/16 (456)
17 15/16 (456)
17 15/16 (456)

34 29/32 (887)
32 3/4 (832)
40 13/32 (1026)
33 13/16 (859)

14 (356)
14 (356)
14 (356)
14 (356)

34 (864)
34 (864)
34 (864)
34 (864)

33 3/16 (853)
33 3/16 (853)
34 3/4 (883)
34 3/4 (883)

17 15/16 (456)
17 15/16 (456)
17 15/16 (456)
17 15/16 (456)

36 29/32 (937)
34 3/4 (883)
42 13/32 (1007)
35 13/16 (910)

16 (406)
16 (406)
16 (406)
16 (406)

34 (864)
34 (864)
34 (864)
34 (864)

Frame

Close-coupled

7 (178)
7 (178)
7 (178)
7 (178)

38 3/16 (967)
38 3/16 (967)
39 5/16 (999)
39 5/16 (999)

7 (178)
7 (178)
7 (178)
7 (178)

38 3/16 (967)
38 3/16 (967)
39 5/8 (1007)
39 5/8 (1007)

Dimensional drawing for the RBS - B/BCS Roots pumping pystems 18“ with TRIVAC D40/65 B backing pumps, frame mounted package [left] and close-coupled package [right]; dimensions in brackets ( ) are in mm

l

l1

b2

b

l
b1

l1

h

h

h1
h1

l2
l2

b

System
D 40 B/BCS
WA/WAU 251
WS/WSU 251
WA/WAU 501
WS/WSU 501
D 65 B/BCS
WA/WAU 251
WS/WSU 251
WA/WAU 501
WS/WSU 501
WA/WAU 1001
WS/WSU 1001

b

b1

b2

26 (660)
26 (660)
26 (660)
26 (660)

15 1/2 (394)
15 1/2 (394)
15 1/2 (394)
15 1/2 (394)

26 (660)
26 (660)
26 (660)
26 (660)
26 (660)
26 (660)

15 1/2 (394)
15 1/2 (394)
15 1/2 (394)
15 1/2 (394)
15 1/2 (394)
15 1/2 (394)

h
Frame

Close-coupled

10 15/16 (278)
10 15/16 (278)
10 15/16 (278)
10 15/16 (278)

41 3/16 (1046)
41 3/16 (1046)
42 3/4 (1086)
42 3/4 (1086)

33 3/16 (853)
33 3/16 (853)
34 3/4 (883)
34 3/4 (883)

10 15/16 (278)
10 15/16 (278)
10 15/16 (278)
10 15/16 (278)
10 15/16 (278)
10 15/16 (278)

41 3/16 (1046) 33 3/16 (853)
41 3/16 (1046) 33 3/16 (853)
42 3/4 (1086)
34 3/4 (883)
42 3/4 (1086)
34 3/4 (883)
44 31/32 (1142)
–
44 31/32 (1142)
–

h1

Frame

l
Close-coupled

Frame

l1
Close-coupled

l2

17 15/16 (456)
17 15/16 (456)
17 15/16 (456)
17 15/16 (456)

35 29/32 (912)
33 3/4 (857)
41 13/32 (1052)
34 13/16 (884)

34 29/32 (887)
32 3/4 (832)
40 13/32 (1026)
33 13/16 (859)

15 (381)
15 (381)
15 (381)
15 (381)

14 (356)
14 (356)
14 (356)
14 (356)

34 (864)
34 (864)
34 (864)
34 (864)

17 15/16 (456)
17 15/16 (456)
17 15/16 (456)
17 15/16 (456)
17 15/16 (456)
17 15/16 (456)

37 29/32 (963)
35 3/4 (908)
43 13/32 (1103)
36 13/16 (935)
48 7/8 (1241)
39 29/32 (1014)

36 29/32 (937)
34 3/4 (883)
42 13/32 (1077)
35 13/16 (910)
–
–

17 (432)
17 (432)
17 (432)
17 (432)
17 (432)
17 (432)

16 (406)
16 (406)
16 (406)
16 (406)
–
–

34 (864)
34 (864)
34 (864)
34 (864)
34 (864)
34 (864)

Dimensional drawing for the RBS - B/BCS Roots Pumping Systems 26“ with TRIVAC D40/65 B backing pumps, frame mounted package [left] and close-coupled package [right]; dimensions in brackets ( ) are in mm

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.25

C08

Vacuum Pump Systems
Version for the North and South American Continents
RBS - B/BCS Root s Pu mp Sy s te ms

Technical Data

251/D40B

cfm (m3 x h-1)

Pumping speed @ 0.1 Torr

501/D40B

501/D65B

1001/D65B

251

251

501

501

1001

D 40 B/BCS

D 65 B/BCS

D 40 B/BCS

D 65 B/BCS

D 65 B/BCS

140 (1237)

150 (1254)

232 (394)

267 (453)

427 (725)

2 x 10-4

2 x 10-4

2 x 10-4

2 x 10-4

RUVAC (WA/WAU/WS/WSU possible)
TRIVAC backing pump

251/D65B

(< 4 x 10-4)

(< 4 x 10-4)

(< 4 x 10-4)

(< 4 x 10-4)

2 x 10-4
(< 4 x 10-4)

Connecting flanges
Inlet port
WA/WAU
WS/WSU
Outlet port

3" ANSI
63 ISO-K
40 KF

3" ANSI
63 ISO-K
40 KF

3" ANSI
63 ISO-K
40 KF

3" ANSI
63 ISO-K
40 KF

4" ANSI
100 ISO-K
40 KF

Operating voltage

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

4.6/4.2/2.1
5.5/5.5/3.2
9.0/8.8/4.5

4.6/4.2/2.1
5.5/5.5/3.2
9.0/8.8/4.5

9.4/8.2/4.1
9.0/9.0/5.2
9.0/8.8/4.5

9.4/8.2/4.1
9.0/9.0/5.2
9.0/8.8/4.5

15.2/13.2/6.1
15.7/15.7/9.1
9.0/8.8/4.5

Ultimate total pressure

Phase /

Torr
(mbar)

Frequency 1)

Hz

Full load amps 2)
RUVAC
WA/WAU
WS/WSU
TRIVAC
Displacement
RUVAC
TRIVAC

cfm
cfm

179
32

179
53

357
32

357
53

707
53

Maximum differential pressure

Torr

60

60

60

60

60

Normal starting pressure 3)

Torr

20

30

12

16

8

1.49 / 0.75
2.70

1.49 / 0.75
3.40

1.40 / 1.10
2.70

1.40 / 1.10
3.40

4.00 / 2.10
3.40

rpm
rpm

3600
1800

3600
1800

3600
1800

3600
1800

3600
1800

hp
hp

1.5 / 1.7
3.0

1.5 / 1.7
3.0

3.0 / 3.4
3.0

3.0 / 3.4
3.0

5.0 / 6.1
3.0

Oil capacity
RUVAC WA/WAU/WS/WSU
TRIVAC

qt
qt

Nominal rotation speed
RUVAC
TRIVAC
Motor power
RUVAC WA/WAU/WS/WSU
TRIVAC

RBS - B/BCS Roots Pu mp Sy s te ms

Ordering Information
RBS - B/BCS Roots pump system
(supplied with hydrocarbon oil)

See Price List for the “North American Continent” for Ordering Information

1)

2)

3)

For 50 Hz systems, consult the factory
Determined by operating voltage
For more detailed gauge specifications see Product Section C16 “Total Pressure Gauges”

WAU/WSU pumps start at atmospheric pressure (760 Torr)

500

500
cfm

cfm
1001/D65B

400

1001/D65B

400

501/D65B
Pumping Speed

Pumping Speed

501/D65B
300
501/D40B
251/D65B
200

251/D40B

2

4 6 8

10-3

10-2

10-1

100

101

102

Total Pressure

Pumping speed diagram for the RBS systems with WA/WS series Roots blowers at 60 Hz

C08.26

501/D40B
251/D65B
200

251/D40B

100

100

0
10-4

300

Torr

103

0
10-4

2

4 6 8

10-3

10-2

10-1

100

101

102

Total Pressure

Torr

103

Pumping speed diagram for the RBS systems with WAU/WSU series Roots blowers at 60 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems
N otes

C08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.27

Vacuum Pump Systems

Version for the North and South American Continents

HTS Close-Coupled Systems with Single-Stage SOGEVAC Backing Pumps

HTS close coupled System

Standard Equipment

Options

♦ System consists of single stage SOGEVAC
vane pump

♦ SOGEVAC accessories: oil level monitoring,
exhaust case gauge, 24 V DC gas ballast
purge, water-cooling

♦ Complete air cooled system
♦ Frame mounted or close-coupled RUVAC
blower
♦ Compact construction with quiet operation

♦ Special motor voltages and frequencies
♦ Special oil for unique applications

♦ Full frame drip pan for frame mounted
systems

♦ Full NEMA12 electrical controls for stand/stop
operation and monitoring of system from
remote and local locations

♦ Frame mounted caster wheels

♦ 24 V DC gas ballast valve

♦ Frame mounted leveling pads

♦ Manual operation of gas ballast

♦ Oil drain valves

♦ Spin-on type oil filter

1400

1400

2001/SV1200

2001/SV1200
cfm

2001/SV630

cfm

2001/SV630

2001/SV500

2001/SV500
1000
2001/SV300

Pumping Speed

Pumping Speed

1000
800
1001/SV630
600
1001/SV500

800
1001/SV630
600
1001/SV500

400

400

200

200

0
10-3

2

4

6 8

10-2

10-1

100
Total Pressure

101

102

Torr

103

Pumping speed diagram for the HTS close-coupled systems with WA/WS series Roots blowers at 60 Hz

C08.28

2001/SV300

0
10-3

2

4

6 8

10-2

10-1

100
Total Pressure

101

102

Torr

103

Pumping speed diagram for the HTS close-coupled systems with WAU/WSU series Roots blowers at 60 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Version for the North and South American Continents
Dimensions for SV 200 and SV 300 only
l1

l1

l2

w2

w3

l2

h1

h2

w1
RIGHT SIDE VIEW

FRONT VIEW

Dimensions for SV 500 and 630 only
l1
l2
W2

l3

W3

C08
l4

h1

h2
l6
W1

l5

Dimensions for SV 1200 only
l1
w2

l3

l2

08.03.M.019-E (WAU/WSU+SV)

h1

h2

l5

w1

Roots Pump
WAU/WSU 501
WAU/WSU 501
WAU/WSU 1001
WAU/WSU 1001
WAU/WSU 2001
WAU/WSU 2001
WAU/WSU 2001

Vane Pump

h1

h2

SV 200
SV 300
SV 200
SV 300
SV 500
SV 630
SV 1200

29 7/16 (748)
29 7/16 (748)
31 7/16 (799)
31 7/16 (799)
48 5/16 (1227)
48 5/16 (1227)
61 9/16 (1564)

12 17/32 (318)
12 17/32 (318)
12 17/32 (318)
12 17/32 (318)
23 13/16 (605)
23 13/16 (605)
27 9/16 (700)

l1
40 7/32 (1029)
43 7/8 (1114)
42 25/32 (1087)
45 7/16 (1154)
50 3/16 (1275)
50 3/16 (1275)
73 5/32 (1858)

l2

l3

9 17/32 (242)
9 17/32 (242)
11 15/16 (303)
11 15/16 (303)
39 9/16 (1005)
39 9/16 (1005)
21 1/4 (540)

–
–
–
–
14 9/16 (370)
14 9/16 (370)
36 1/32 (915)

l4

l5

l6

–
–
–
–
–
–
–
–
–
–
–
–
3 5/16 (84) 60 3/4 (1543) 2 1/2 (64)
3 5/16 (84) 60 3/4 (1543) 2 1/2 (64)
–
64 9/16 (1640)
–

w1

w2

21 11/16 (551) 6 1/8 (156)
21 11/16 (551) 6 1/8 (156)
21 1/16 (535) 5 1/2 (140)
22 13/16 (579) 7 1/4 (184)
34 15/16 (887) 13 7/8 (352)
34 15/16 (887) 13 7/8 (352)
39 9/16 (1005) 15 5/32 (385)

w3
10 19/32 (269)
10 19/32 (269)
10 19/32 (269)
10 19/32 (269)
12 13/32 (315)
12 13/32 (315)
–

Dimensional drawing for the HTS close-coupled system with single-stage SOGEVAC backing pumps; dimensions in brackets ( ) are in mm

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.29

Vacuum Pump Systems

Version for the North and South American Continents
HTS Clos e- Couple d Sy s te ms

Technical D a ta
RUVAC (WA/WAU/WS/WSU possible)
SOGEVAC

501/SV200

501/SV300

1001/SV200

1001/SV300

2001/SV500

2001/SV630

2001/SV1200

501

501

1001

1001

2001

2001

2001

SV 200

SV 300

SV 200

SV 300

SV 500

SV 630

SV 1200

cfm (m3 x h-1)

277 (470)

285 (483)

504 (855)

545 (925)

1123 (1906)

1186 (2031)

1250 (2122)

Torr
(mbar)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

Connecting flanges
Inlet port
WA/WAU
WS/WSU
Outlet port

3" ANSI
63 ISO-K
2" NPT

3" ANSI
63 ISO-K
2" NPT

4" ANSI
100 ISO-K
2" NPT

4" ANSI
100 ISO-K
2" NPT

6" ANSI
160 ISO-K
4" ANSI

6" ANSI
160 ISO-K
4" ANSI

6" ANSI
160 ISO-K
6" ANSI

Operating voltage

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

9.4/8.2/4.1
7.8/10.0/5.8
21.0/18.0/9.0

9.4/8.2/4.1
7.8/10.0/5.8
29.0/25.0/12.5

15.2/13.2/6.1
13.0/14.7/8.5
21.0/18.0/9.0

15.2/13.2/6.1
13.0/14.7/8.5
29.0/25.0/12.5

28.0/24.8/12.4
21.0/26.0/15.0
41.1/35.7/17.9

28.0/24.8/12.4
21.0/26.0/15.0
65.0/58.0/29.5

28.0/24.8/12.4
21.0/26.0/15.0
78.0/70.0/35.0

cfm
cfm

357
130

357
200

707
130

707
200

1449
335

1449
495

1449
677

qt
qt
qt

1.40
1.10
5.30

1.40
1.10
9.00

4.00
2.10
5.30

4.00
2.10
9.00

6.10
4.20
37.00

6.10
4.20
37.00

6.10
4.20
42.00

Nominal rotation speed
RUVAC WAU/WSU
SOGEVAC

rpm
rpm

3600
1800

3600
1800

3600
1800

3600
1800

3600
880

3600
1170

3600
700

Motor power
RUVAC WAU/WSU
SOGEVAC

hp
hp

3.0 / 3.4
7.5

3.0 / 3.4
10.0

5.0 / 6.1
7.5

5.0 / 6.1
10.0

5.0 / 6.1
15.0

10.0 / 11.4
25.0

10.0 / 11.4
30.0

Pumping speed @ 0.1 Torr
Ultimate total pressure

Phase /

Frequency 1)

– / Hz

Full load amps 2)
RUVAC
WA/WAU
WS/WSU
SOGEVAC
Displacement
RUVAC
SOGEVAC
Oil capacity
RUVAC
WA/WAU
WS/WSU
SOGEVAC

Or dering Information
HTS - close-coupled systems
1)
2)

HTS Clos e- Couple d Sy s te ms
See Price List for the “North American Continent” for Ordering Information

For 50 Hz systems, consult the factory
Determined by operating voltage

C08.30

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

N otes

C08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.31

Vacuum Pump Systems

Version for the North and South American Continents

HTS Frame Mounted Systems with Single-Stage SOGEVAC Backing Pumps

HTS frame mounted System

Standard Equipment

Options

♦ System consists of single stage SOGEVAC
direct drive vane pump

♦ SOGEVAC accessories: oil level monitoring,
exhaust case gauge, 24 V DC gas ballast
purge, supplemental water-cooling.

♦ Complete air cooled system

♦ Compact construction with quiet operation

♦ Special oil for unique applications
♦ Full NEMA12 electrical controls for stand/stop
operation and monitoring of system from
remote and local locations

♦ Full frame drip pan for frame mounted
systems

♦ Frame mounted RUVAC blower

♦ Special motor voltages and frequencies

♦ Frame mounted caster wheels

♦ Manual operation of Gas Ballast

♦ Frame mounted leveling pads

♦ Spin-on type oil filter

♦ Oil drain valves

w1

w3

l1

clearance
required for
electrical box

h1
h2

w2
Roots Pump
WAU/WSU 251
WAU/WSU 501
WAU/WSU 501
WAU/WSU 501
WAU/WSU 1001
WAU/WSU 2001

l2

Vane Pump

h1

h2

l1

l2

w1

w2

w3

SV 100
SV 100
SV 200
SV 300
SV 300
SV 300

58 1/2 (1486)
58 1/2 (1486)
58 1/2 (1486)
58 1/2 (1486)
58 1/2 (1486)
58 1/2 (1486)

41 1/2 (1054)
43 (1092)
43 (1092)
43 (1092)
45 1/2 (1156)
50 3/4 (1290)

10 11/16 (272)
10 11/16 (272)
10 11/16 (272)
10 11/16 (272)
11 15/16 (278)
14 11/16 (373)

34 3/4 (883)
34 3/4 (883)
40 5/8 (1032)
44 1/8 (1121)
44 1/8 (1121)
53(1346)

23 (584)
23 (584)
23 (584)
23 (584)
23 (584)
23 (584)

30 (762)
30 (762)
30 (762)
30 (762)
32 (813)
32 (813)

24 (610)
24 (610)
24 (610)
24 (610)
24 (610)
24 (610)

Note: Dimension h for systems supplied with electrical controls

Dimensional drawing for the HTS frame mounted system with single-stage SOGEVAC backing pumps; dimensions in brackets ( ) are in mm

C08.32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Version for the North and South American Continents
HTS Fr ame Mounted Sy s te ms

Technical D ata

251/SV100

501/SV100

501/SV200

501/SV300

1001/SV300

1001/SV500

2001/SV300

251

501

501

501

1001

1001

2001

SV 100

SV 100

SV 200

SV 300

SV 300

SV 500

SV 300

cfm (m3 x h-1)

138 (234)

232 (393)

277 (470)

285 (483)

545 (925)

614 (1042)

912 (1548)

Torr
(mbar)

2 x 10-2
(3 x 10-2)

2 x 10-2
(3 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

< 8 x 10-3
(< 1 x 10-2)

Connecting flanges
Inlet port
WA/WAU
WS/WSU
Outlet port

3" ANSI
63 ISO-K
2" NPT

3" ANSI
63 ISO-K
2" NPT

3" ANSI
63 ISO-K
2" NPT

3" ANSI
63 ISO-K
2" NPT

4" ANSI
100 ISO-K
2" NPT

4" ANSI
100 ISO-K
4" ANSI

6" ANSI
160 ISO-K
2" NPT

Operating voltage

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

4.6/4.2/4.1
4.8/5.5/3.2
14.2/13.0/6.5

9.4/8.2/4.1
7.8/10.0/5.8
14.2/13.0/6.5

9.4/8.2/4.1
7.8/10.0/5.8
21.0/18.0/9.0

9.4/8.2/4.1
7.8/10.0/5.8
29.0/25.0/12.5

15.2/13.2/6.1
13.0/14.7/8.5
29.0/25.0/12.5

15.2/13.2/6.1
13.0/14.7/8.5
41.1/35.7/17.9

28.0/24.8/12.4
21.0/26.0/15.0
29.0/25.0/12.5

cfm
cfm

179
71

357
71

357
130

357
200

707
200

707
335

1449
200

qt
qt
qt

1.50
0.80
3.70

1.40
1.10
3.70

1.40
1.10
5.30

1.40
1.10
9.00

4.00
2.10
9.00

4.00
2.10
37.00

6.10
4.20
9.00

Nominal rotation speed
RUVAC WAU/WSU
SOGEVAC

rpm
rpm

3600
1800

3600
1800

3600
1800

3600
1800

3600
1800

3600
880

3600
1800

Motor power
RUVAC WAU/WSU
SOGEVAC

hp
hp

1.5 / 1.7
5.0

3.0 / 3.4
5.0

3.0 / 3.4
7.5

3.0 / 3.4
10.0

5.0 / 6.1
10.0

5.0 / 6.1
15.0

10.0 / 11.4
10.0

RUVAC (WA/WAU/WS/WSU possible)
SOGEVAC
Pumping speed @ 0.1 Torr
Ultimate total pressure

Phase /

Frequency 1)

– / Hz

Full load amps 2)
RUVAC
WA/WAU
WS/WSU
SOGEVAC
Displacement
RUVAC
SOGEVAC
Oil capacity
RUVAC
WA/WAU
WS/WSU
SOGEVAC

HTS Fr ame Mounted Sy s te ms

Or dering Inform a tion

See Price List for the “North American Continent” for Ordering Information

HTS - frame mounted systems
1)

For 50 Hz systems, consult the factory

2)

Determined by operating voltage

600

600

cfm

cfm

500

400

1001/SV200
501/SV300

300
501/SV200
200

501/SV100

100

0
10-3

500

1001/SV300

4

6 8

10-2

10-1

100
Total Pressure

1001/SV300

400

1001/SV200
501/SV300

300
501/SV200
200

501/SV100

100

251/SV100

2

Pumping Speed

Pumping Speed

C08

101

102

Torr

103

Pumping speed diagram for the HTS frame mounted systems
with WA/WS series Roots blowers at 60 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

0
10-3

251/SV100

2

4

6 8

10-2

10-1

100
Total Pressure

101

102

Torr

103

Pumping speed diagram for the HTS frame mounted systems
with WAU/WSU series Roots blowers at 60 Hz

C08.33

Vacuum Pump Systems

Version for the North and South American Continents

RM - Roots / Mechanical Pump Systems
with Single- and Two-Stage Rotary Piston Vacuum Pumps as Backing Pumps

Options
♦ Piston pump oil regulator
♦ Remote gear drive oil filtration system OF1000/3000
♦ Full frame drip pan
♦ Oil drain valve

RM - Roots / Mechanical Pump System

♦ Frame caster wheels

Standard Equipment

♦ Frame leveling pads

♦ System consist of Single stage or Dual stage
rotary piston pump

♦ Frame mounted pumps

♦ Special motor voltages and frequencies

♦ Interconnecting bellows and spool adapter

♦ Special oil for unique applications

♦ Proven rugged Piston pump design

♦ Manual operation of Gas Ballast

♦ Air cooled pumps

♦ Vertical or horizontal mounting of RUVAC
blower

♦ Full NEMA12 electrical controls for control
start/stop of system from remote and local
locations

♦ Mechanical pump mounted on vibration
absorbers

l1

♦ SECUVAC, Foreline

l3

b1

l3

l1

b2

b

h

h1
l
System
1001/E250/DK200
WA/WAU 1001
WS/WSU 1001
2001/E250/DK200
WA/WAU 2001
WS/WSU 2001

l
l2

l2

b

b1

b2

h

h1

l

l1

l2

l3

24 (609.6)
24 (609.6)

9 1/16 (230.5)
9 1/16 (230.5)

24 (609.6)
24 (609.6)

55 13/16 (1418)
55 13/16 (1418)

6 1/2 (165)
6 1/2 (165)

37 (940)
37 (940)

30 1/16 (764)
20 9/16 (522)

48 3/8 (1229) 42 11/16 (1084)
48 3/8 (1229)
–

24 (609.6)
24 (609.6)

9 1/16 (230.5)
9 1/16 (230.5)

24 (609.6)
24 (609.6)

60 3/8 (1534)
60 3/8 (1534)

6 1/2 (165)
6 1/2 (165)

40 (1016)
40 (1016)

37 1/32 (941)
26 7/32 (674)

48 5/16 (1227) 47 19/32 (1209)
48 5/16 (1227)
–

Dimensional drawing for the RM - Roots / mechanical pump system; dimensions in brackets ( ) are in mm

C08.34

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Version for the North and South American Continents
RM - Roots / Mec hanic a l Pu mp in g Sy s te m

Technical Data

501/E250

RUVAC (WA/WAU/WS/WSU possible)
Rotary piston vacuum pump
cfm (m3 x h-1)

Pumping speed @ 0.1 Torr

501/DK200

1001/E250

1001/DK200

2001/E250

2001/DK200

501

501

1001

1001

2001

2001

E 250

DK 200

E 250

DK 200

E 250

DK 200

312 (529)

313 (531)

574 (974)

570 (967)

1031 (1750)

985 (1672)

4 x 10-3

2 x 10-4

4 x 10-3

2 x 10-4

4 x 10-3

(< 6 x 10-3)

(< 3 x 10-4)

(< 6 x 10-3)

(< 3 x 10-4)

(< 6 x 10-3)

2 x 10-4
(< 3 x 10-4)

Connecting flanges
Inlet port
WA/WAU
WS/WSU
Outlet port

3" ANSI
63 ISO-K
3" ANSI

3" ANSI
63 ISO-K
3" ANSI

4" ANSI
100 ISO-K
3" ANSI

4" ANSI
100 ISO-K
3" ANSI

6" ANSI
160 ISO-K
3" ANSI

6" ANSI
160 ISO-K
3" ANSI

Operating voltage

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

208/230/460

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

3 / 60

9.2/8.5/4.8
9.0/9.0/5.2
24/21/10.5

9.2/8.5/4.8
9.0/9.0/5.2
24/21/10.5

15.2/13.2/6.1
15.7/15.7/9.1
24/21/10.5

15.2/13.2/6.1
15.7/15.7/9.1
24/21/10.5

28/24.8/12.4
26/26/15
24/21/10.5

28/24.8/12.4
26/26/15
24/21/10.5

Ultimate total pressure with gas ballast

Phase /

Torr
(mbar)

Frequency 1)

– / Hz

Full load amps 2)
RUVAC
WA/WAU
WS/WSU
Rotary piston vacuum pump
Displacement
RUVAC
Rotary piston vacuum pump

cfm
cfm

357
171

357
132

707
171

707
132

1449
171

1449
132

Maximum differential pressure

Torr

60

60

60

60

38

38

Normal starting pressure 3)

Torr

53

38

18

14

7

6

C08

Oil capacity
RUVAC
WA/WAU
WS/WSU
Rotary piston vacuum pump

qt
qt
qt

1.40
1.10
8.90

1.40
1.10
4.60

4.00
2.10
8.90

4.00
2.10
4.60

6.10
4.20
8.90

6.10
4.20
4.60

Nominal rotation speed of pump
RUVAC
Rotary piston vacuum pump

rpm
rpm

3600
540

3600
540

3600
540

3600
540

3600
1800

3600
1800

Motor power
RUVAC WA/WAU/WS/WSU
Rotary piston vacuum pump

hp
hp

1.5 / 1.7
7.5

1.5 / 1.7
7.5

5.0 / 6.1
7.5

5.0 / 6.1
7.5

10.0 / 11.4
7.5

10.0 / 11.4
7.5

RM - Roots / Mec hanic a l Pu mp in g Sy s te m

Ordering Information

See Price List for the “North American Continent” for Ordering Information

RM - Roots / mechanical pumping system
1)

2)

For 50 Hz systems, consult the factory

3)

Determined by operating voltage

1200

WAU/WSU pumps start at atmospheric pressure (760 Torr)

1200

cfm

cfm

2001/E250

1000

2001/E250

1000

800

1001/E250
1001/DK200

600

501/E250
400

501/DK200

200

0
10-4

2001/DK200
Pumping Speed

Pumping Speed

2001/DK200
800

1001/E250
1001/DK200

600

501/E250
400

501/DK200

200

2

4 6 8

10-3

10-2

10-1

100

101

Total Pressure

102

Torr

103

Pumping speed diagram for the RM - Roots/mechanical pumping systems
with WA/WS series Roots blowers at 60 Hz

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

0
10-4

2

4 6 8

10-3

10-2

10-1

100

101

Total Pressure

102

Torr

103

Pumping speed diagram for the RM - Roots/mechanical pumping systems
with WAU/WSU series Roots blowers at 60 Hz

C08.35

Vacuum Pump Systems

Version for the North and South American Continents

Dry-Compressing Vacuum Pump System with EcoDry L Backing Pump

Dry-compressing system with EcoDry L

Advantages to the User

Options

♦ Maintenance-free, oil-free and hydrocarbonfree

♦ Special motor voltages and frequencies

♦ Air cooled pumps

♦ Full NEMA 12 electrical controls for control
start/stop of system

♦ Simple operation, high reliability, easy
maintenance

♦ Special design controls
♦ Gas ballast valve on EcoDry L

♦ Compact frame base
♦ Frame base equipped with caster wheels and
leveling pads
♦ Close-coupled RUVAC blower

mm
in.

b

b1

b2

b3

h

h1

l

l1

457.2
18.00

128.6
5 1/16

228.6
9.00

69.85
2 3/4

985.0
38 25/32

3.96
5/32

927.9
36 17/32

355.6
14.00

b2

b2

b3

b3

h1

l1

h

b1

b

l

b1

b

Dimensional drawing for the dry-compressing vacuum pump system with EcoDry L

C08.36

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Pump Systems

Version for the North and South American Continents
EcoDry L Dry-Compressing Pump System with EcoDry L
50 Hz
60 Hz

Technical D ata
RUVAC (WS/WSU possible)

WS/WSU 251

WS/WSU 251

EcoDry L

EcoDry L

195 (115)

236 (139)

2 x 10-3 (1.5 x 10-3)

2 x 10-3 (1.5 x 10-3)

Backing pump
m3 x h-1 (cfm)

Pumping speed at 0.1 Torr

Ultimate total pressure without gas ballast
mbar (Torr)
Installed motor power
WSU 251
EcoDry L
Standard / Option
Total

kW (hp)

1.1 (1.5)

1.4 (1.9)

kW (hp)
kW (hp)

1.5 / 2.2 (2.0 / 3.0)
2.6 / 3.3 (3.5 / 4.5)

1.8 / 2.6 (2.4 / 3.5)
3.2 / 4.0 (4.4 / 5.4)

Power consumption at
10-1 mbar (0.75 x 10-1 Torr)

kW (hp)

0.9 (1.2)

1.0 (1.4)

Noise level to DIN 45 635 without
gas ballast at 1 mbar (0.75 Torr)

dB(A)

67

69

Total oil filling, approx.

l (qt)

0.7 (0.74)

0.7 (0.74)

210 (463.1)

210 (463.1)

63 ISO-K
25 KF

63 ISO-K
25 KF

Weight total, approx.

kg (lbs)

Connecting flanges
Inlet port
Outlet port

DN1
DN2

Ordering Inform a tion

WS/WSU 251/EcoDry L

Pumping system, complete (adaptor version),
base frame mounted

See Price List for the “North American Continent” for Ordering Information

10
10

3

-3

10

-2

10

-1

10

0

10

1

Torr

10

2

C08

750

3

500
cfm

-1

m xh

100
2

50

Pumping speed

10

10
10

1

8
6

5

WSU251
WS251

4
2
10

1

0

10

-3

2

4 68
-2
10

10

-1

0

10
Pressure

10

1

10

2

mbar 10

3

Pumping speed diagram at 60 Hz (EcoDry L + RUVAC WS/WSU 251)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C08.37

CHECKLIST FOR VACUUM PUMP SYSTEMS

FAX
To LEYBOLD VAKUUM GmbH

From company: __________________________

Date: __________________________________

Dept. Pump Systems and Systems

Name/Department:________________________

First page of: ____________________________

Fax: +49 (0)221/347 - 1277

Phone: _________________________________
Fax: ___________________________________

MAKE USE OF OUR KNOW-HOW !
Simply fax the completed checklist to us. Our engineers will design a pump system which exactly matches your requirements.
You will receive an offer shortly.

1.

In what kind of application will the pump
system be used (e.g. drying, distillation)?
______________________________________
______________________________________
______________________________________

2.

Is the process run

❑ continuously

❑ in batches:

______________________________________
______________________________________
______________________________________

3.

What is the volume of the vacuum

___________________________________ m3
______________________________________

_________________________________ min/h
______________________________________

d) Viscosity _____________________________

min. ________ °C (°F) / max. ________ °C (°F)

e) Melting point __________________________

- when installed out in the open

f) Special characteristics ___________________

min. ________ °C (°F) / max. ________ °C (°F)

11.

7.

How high is the intake temperature?

_________________________________ °C (°F)

8.

What is the composition of the gas which

is to be pumped? Designation:

c) ________________ d) __________________
e)_________________ f) __________________

9.

_____________________________ mbar (Torr)
______________________________________

C08.38

Must explosion hazard regulations be

observed?

❑ yes

❑ no

if yes, which? ___________________________

Quantity(kg/h or Nm3/h), traces (%):

______________________________________
______________________________________

12.

What kind of electrical supplies are

available?
a) Voltage ______________________________
b) Frequency ____________________________

13.

What kind of mechanical connection

c) ________________ d) __________________

specifications are planned?

e)_________________ f) __________________

a) Length of the intake line _________________

10.

b) Diameter of the intake line _______________
In the case of materials which are not

commonly listed in the tables please state:
What operating pressures are planned?

c) Vapor pressure _________________________

- when installed in the building:

a) ________________ b) __________________
What pump-down times are required/

desired?

5.

How high is the ambient temperature?

a) ________________ b) __________________

chamber?

4.

6.

a) Molecular weight _______________________
b) Thermal capacity _______________________

14.

Which cooling media are available

(water, brine etc.)? Which temperature?
______________________ min. ______°C (°F)
______________________ max. ______°C (°F)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09

Turbomolecular Pumps

35 - 3 200 l x s-1

Turbomolecular Pumps

Contents
General
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.03
Application and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.07

Products and Accessories
Turbomolecular Pumps with Mechanical Rotor Suspension
without Compound Stage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.08
with Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.16
Electronic Frequency Converters
for Turbomolecular Pumps with Mechanical Rotor Suspension . . . . . . . . . . . . . . . . . . . . C09.32
Turbomolecular Pumps with Magnetic Rotor Suspension
without Compound Stage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.38
with Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.46
Electronic Frequency Converters
for Turbomolecular Pumps with Magnetic Rotor Suspension . . . . . . . . . . . . . . . . . . . . . C09.56

Other Accessories
Vibration Absorber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Air Cooling Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Flange Heater for CF High Vacuum Flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Fine Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Purge Gas and Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Power Failure Venting Valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Solenoid Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Accessories for Serial Interfaces RS 232 C and RS 485 C. . . . . . . . . . . . . . . . . . . . . . . . . .

C09.02

C09.61
C09.61
C09.61
C09.61
C09.62
C09.62
C09.62
C09.63

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pumps

Turbomolecular Pumps

General Information

Characteristic Quantities

The turbomolecular pumps from Leybold generate a clean high and ultra-high vacuum, are easy
to operate and are exceptionally reliable. In
connection with a well rated backing pump, pressures below 10-10 mbar (0.75 x 10-10 Torr) can
be attained.

Pumping speed (volume flow rate), S, [l x s-1]
The pumping speed for a given type of gas
depends on the diameter of the high-vacuum
flange, the rotor/stator design, the speed at which
the rotor revolves and the molecular weight of
the gas.
The pumping speed S is a non-linear function of
the inlet pressure p1: S = S(p1)

LEYBOLD offers two product lines:
1. TURBOVAC line
Turbomolecular pumps with mechanical
rotor suspension
2. TURBOVAC MAG line
Turbomolecular pumps with magnetic rotor
suspension
Each of the two product lines contains “classic”
turbomolecular pumps as well as turbomolecular pumps with a compound stage.

TURBOVAC TW 70 H turbomolecular pump
with mechanical rotor suspension and dual compound stage

Compression, K
For a given type of gas, compression K is defined
as the ratio between fore-vacuum pressure pVV
(= pressure on the fore-vacuum side of the turbomolecular pump) and the high-vacuum pressure
pHV (= pressure on the high-vacuum side of the
turbomolecular pump):
K = K(pVV) = pVV / pHV = pVV / pHV(pVV).

LEYBOLD is one of the world’s leading manufacturer of turbomolecular pumps. Consequently, the
TURBOVAC and the TURBOVAC MAG pumps are
successfully used in many applications. A list of
the most important ones is given in the section
“Applications and Accessories”.

Principle of Operation
The turbomolecular pump is a turbine with blades. By the momentum transfer from the rapidly
rotating rotor blades to the gas molecules their
initially non-directed thermal motion is changed
to a directed motion.
Hence, the pumping process in a turbomolecular
pump results from the directed motion of the gas
molecules from the inlet flange to the forevacuum port.
In the molecular flow range - i.e. at pressures below
10-3 mbar (0.75 x 10-3 Torr) - the mean free path
of the gas molecules is larger than the spacing
between rotor and stator blades (typically some
tenths of a millimeter). Consequently, the molecules collide primarily with the rotor blades with the
result that the pumping process is highly efficient.
In the range of laminar flow, i.e. at pressures
over 10-1 mbar the situation is completely different. The effect of the rotor is impaired by the
frequent collisions between the molecules.
Therefore, a turbomolecular pump is not capable
of pumping gases at atmospheric pressure thus
necessitating the use of a suitably rated forevacuum pump.
To create the directed motion of the gas molecules, the tips of the rotor blades have to move at
high speeds. Hence, a high rotational speed of
the rotor is required. In the case of LEYBOLD
turbomolecular pumps the rotor speeds vary
from about 36,000 rpm for the larger rotor diameters (e.g. TURBOVAC 1000 about 20 cm
(7.87 in.)) to 72,000 rpm. for small rotor diameters (e.g. TURBOVAC 50 about 6 cm (2.36 in.))

Gas throughput, Q, [mbar x l x s-1]
Gas throughput Q is linked to the pumping speed
S and the inlet pressure p1 through the relationship Q = Q(p1) = p1 . S(p1).
The maximum permissible gas throughput Qmax
is attained at the maximum permissible inlet
pressure p1, max: Qmax = Q(p1, max).

Compression depends very much on the gas
throughput: at a given fore-vacuum pressure,
compression increases when the gas throughput
is reduced.

TURBOVAC TW 701 turbomolecular pump
with mechanical rotor suspension and compound stage

MAG W 1500 CT turbomolecular pump
with magnetic rotor suspension and compound stage

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Idle compression, K0
Idle compression K0 of a turbomolecular pump
is defined as the amount of compression of this
pump at “Zero” gas throughput. What is problematic about this definition is the fact that the demanded “Zero” throughput can never be implemented in practice (finite leak rate, degassing of
sealing components, desorption from wall surfaces). Data on idle compression need therefore
to be gained from measurements run at extremely low throughputs.
Idle compression of a pump equipped with metal
seals is significantly higher compared to the
same pump sealed with O-rings.
Ultimate pressure (base pressure), pult, [mbar]
The ultimate pressure of a turbomolecular pump
is defined as that pressure which is attained in
the test chamber 48 hours after a 24 hour degassing period of the measurement system.
The ultimate pressure will chiefly depend on the
foreline pump used and the type of seal used at
the high-vacuum flange.

C09.03

C09

Turbomolecular Pumps
TURBOVAC Product Line
The TURBOVAC pumps are turbomolecular
pumps with mechanical rotor suspension which
are used in the pressure range from 10-1 mbar
(0.75 x 10-1 Torr) to 10-10 mbar (0.75 x
10-10 Torr). Pumping speeds for air vary from
35 l x s-1 (inlet flange diameter = 40 mm (1.57 in.))
to 1,600 l x s-1 (inlet flange diameter = 250 mm
(9.84 in.)).
Through the compact design, the most reliable
ceramics ball bearings and the simplicity of
operation, this line of pumps is used in all
high-vacuum and ultrahigh vacuum areas of
application.
In particular the TURBOVAC pumps are very
successfully operated in mass spectroscopy
applications, gas and liquid chromatographic
analysis, CD, DVD and hard disk production,
manufacturing of large-surface optical layers,
and non-corrosive semiconductor fabrication
processes.

Turbomolecular Pumps
Components supplied with
the Turbomolecular Pumps

TURBOVAC MAG
Product Line

High-vacuum Flange:

The TURBOVAC MAG pumps are turbomolecular
pumps with magnetic rotor suspension which
are used in the pressure range from 10-1 mbar
(0.75 x 10-1 Torr) to 10-10 mbar (0.75 x
10-10 Torr). Pumping speeds for air vary from
300 l x s-1 (inlet flange diameter = 100 mm
(3.94 in.)) to 2,000 l x s-1 (inlet flange diameter =
250 mm (9.84 in.)).
The TURBOVAC MAG pumps are mostly installed
on semiconductor processing lines like etching,
CVD, PVD and ion implantation, i.e. in applications where corrosive gases need to be pumped.
Also electron beam microscopy is an important
area of application for these pumps.

KF and ISO models
◆ Centering ring with FPM O-ring
ANSI Models:
◆ FPM O-ring for the groove in the flange
CF Models:
◆ Without gaskets *)
Fore-vacuum Port:
◆ Centering rings, O-rings and clamps for all
KF type fore-vacuum flanges are included.
Purge / vent ports are blanked-off
*) For CF gaskets, see Product Section C15

The most important advantages of the
TURBOVAC product line are
◆ Oil-free pumps for the generation of clean
high-and ultra-high-vacuum conditions
◆ Highly performance in any orientation
◆ Highly degree of operating reliability
◆ Easy to operate
◆ Compact design

Ceramic Ball Bearings
Technology
All TURBOVAC pumps are fitted with ceramic
ball bearings, i.e. ceramic balls are running in
steel races. The bearings are lubricated for life
by grease.
Ceramic balls are lighter, harder and smoother
than balls made of steel. Therefore, with ceramic
balls the wear on the races is significantly reduced. Consequently, the lifetime of the bearings,
and hence the lifetime of the pump, is increased.
The TURBOVAC pumps fitted with grease-lubricated ceramic ball bearings can be mounted in any
orientation. As the ball bearing is encapsulated,
the grease cannot enter the high-vacuum space,
even if the pump is mounted up-side-down.

Flange Designations used in this
Product Section
A
B
C
D

High vacuum flange
Forevacuum flange
Venting flange
Purge gas flange

E Water cooling
connection
F Electrical
connection

The most important advantages of the
TURBOVAC MAG product line are
◆ Hydrocarbon-free pumps for the generation
of clean high- and ultra-high-vacuum
conditions
◆ High performance in any orientation
◆ High degree of operating reliability
◆ Extremely low vibration
◆ Designed for pumping of corrosive gases

Magnetic Bearings
Technology
The world-wide success of the TURBOVAC MAG
product line results from more than 25 years of
experience in developing and manufacturing turbomolecular pumps with magnetic rotor suspension.
In 1976 LEYBOLD started the market introduction
of the famous TURBOVAC 560 M. This pump
was the first magnetically levitated turbomolecular pump which became commercially available.
Nowadays LEYBOLD uses two design principles
for the magnetic rotor suspension:
1. One axis with active bearing
The rotor is suspended by permanent
magnets. In addition, the axial position of
the rotor is controlled electromagnetically.
The TURBOVAC 340 M and MAG 400 pumps
are fitted with such a type of rotor suspension.
2. Five axes with active bearings
The position of the rotor is actively controlled
by the precision magnetic bearing in all five
degrees of freedom. The TURBOVAC
MAG 830/1300, MAG 1500, MAG 2000,
MAG 2200 and MAG 2800/3200 are equipped
with such a bearing system.

C09.04

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pumps

Turbomolecular Pumps

Pump / Converter Configurations for TURBOVAC Product Line
P

Connecting cable,
20 m max.

FC
Mains cable

PS
TURBOVAC 50,
TURBOVAC 1100 C

NT 10
NT 20

P

DC cable,
20 m max.

Connecting cable,
5 m max.

FC
TW 70 H,
TW 300, TW 300 H

TDS

P
FC
TW 70 H,
TW 300, TW 300 H,
TW 701

PS

Mains cable

24 V DC

C09
DC cable,
20 m max.

PS

Mains cable

24 V DC
59 V DC

P
FC
PS

Mains cable

T 1600,
TW 1600
P = Pump
FC = Frequency Converter
PS = Power Supply

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.05

Turbomolecular Pumps

Applications

Use of Turbomolecular
Pumps in Analytical
Instruments

Use of Turbomolecular
Pumps in the Area of
Coating Systems

All modern analytical methods for gas, liquid and
plasma analysis – like for example GC-MS, LCMS and ICP-MS – rely on mass spectrometers
and for this reason require adequate highvacuum conditions. Also in electron microscopes
and many surface analysis instruments the production of a high-vacuum is essential.

Coating of optical and magnetic storage media,
optical components as well as architectural glass
requires high-vacuum conditions. This is the only
way to ensure that the formed layers will be uniform and adhere to the substrate.
The way in which the vacuum is generated has a
significant impact on the quality of the coating.
By pumping the vacuum chamber down to pressures in the range of 10-6 mbar (0.75 x 10-6 Torr),
interfering gas and water molecules are removed
from the processing chamber. In the case of
sputtering the coating process is run in the
pressure range between 10-3 and 10-2 mbar
(0.75 x 10-3 and 0.75 x 10-2 Torr), and in the
case of evaporation coating, pressures below
10-4 mbar (0.75 x 10-4 Torr) are utilised.

In over 90 % of all high-vacuum applications, the
turbomolecular pump has been found to be ideal.
Thanks to the hydrocarbon-free vacuum, most
simple operation, compact design and almost
maintenance-free operation it has in many cases
displaced above all the diffusion pump.
On the basis of decades of experience and in cooperation with research facilities and the manufacturers of analytical instruments, LEYBOLD
Vacuum has continually optimised its products.
The new TURBOVAC wide range series is a further innovative step forward making available products which are most flexible and reliable.
Owing to the modular concept the user may
◆ adapt his vacuum system precisely to his
requirements
◆ perfectly integrate the components within his
system and
◆ find the most cost-effective system configuration for his needs.
In combination with backing pumps like the
TRIVAC or EcoDry, LEYBOLD Vacuum is able to
offer the best vacuum system optimised for all
major applications in the area of analytical instrumentation.

High performance glass coating plant

Use of Turbomolecular
Pumps in the Area of
Semiconductor Processes
In the semiconductor industry turbomolecular
pumps are used on the following processes,
among others:
◆ Etching
◆ Sputtering
◆ Ion implantation

The turbomolecular pump meets all requirements
of the customers as to a hydrocarbon-free vacuum, very simple operation, compact design and
almost maintenance-free operation in an almost
ideal manner. The range of pumps from LEYBOLD
includes pumps with flange diameters ranging
from 40 mm to 250 mm (1.57 in. to 9.84 in.)
nominal width. Thus the right pump is available
for each application, be it coating of data memories (CD, DVD, hard discs), coating of tools and
coating of precision lenses in the area of optical
components, displays or architectural glass.

◆ Lithography.
In these applications pumping of aggressive
gases is often required.
This may necessitate the use of pumps equipped
with a purge gas facility or a magnetic suspension in order to avoid damaged bearings.
Especially during metal etching, deposits may
occur in the fore-vacuum space of the turbomolecular pump. In order to prevent this the pumps
must be heated to a certain temperature. Such
temperature controlled variants are optionally
available for the MAG 1500 C and MAG 2000 C.
In contrast to turbomolecular pumps with mechanical bearings, magnetically levitated pumps provide the advantage that they prevent overheating
of the bearings at high gas flows and effectively
exclude any damage to the magnetic bearings by
aggressive media.

Research and Development
In the area of research, all types of turbomolecular pumps from LEYBOLD are being used.
In the case of particularly stringent requirements
as such low vibration levels, a TURBOVAC with
magnetic bearings should be selected; the same
applies to those applications in which entirely
hydrocarbon-free pump systems are required.

Similar to electron microscopes, lithographic
equipment requires very low vibration levels. For
this reason, magnetically levitated turbomolecular
pumps are also useful for these applications.

Mass spectrometer

C09.06

The recommended backing pumps are either
dry compressing EcoDry pumps or rotary vane
pumps from the TRIVAC range, possibly fitted
with the BCS system.

Nuclear fusion technology

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

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CT
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00
20
MA
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G

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00

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MA

G

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83

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G
MA

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T

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00

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G
MA

MA

G

40

00
16

0M

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34

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TW

TW

70

1

0H

0

30

TW

30

70

TW

0

TW

60
T1

00

36

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11

50

1

C

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ps
Pu
m

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C/
CT

Turbomolecular Pumps

Applications and Accessories

Applications
Analytical Instruments
Leak detectors
Mass spectrometers
Gas chromatography (GC-MS)
Liquid chromatography (LC-MS)
Quadrupol time of flight (Q-TOF)
Matrix assisted laser desorption time of flight (MALDI-TOF)
Inductively coupled plasma mass spectrometry (ICP-MS)
Electron beam microscopy
Coating
Data storage / optical
Data storage / magnetic
Flat panel displays
Optical coating
Large area coating
Decorative coating
Metallization
Wear protection
Metallurgy
TV tube manufacturing
R & D (Research and Development)
Surface analysis
UHV / XHV systems
Particle accelerators
Fusion experiments
Space simulation
Semiconductor Processes
Load locks and transfer chambers
Etch
CVD
PVD
Ion implantation

Accessories
Frequency converters
NT 10
NT 20
NT 361
TURBO.DRIVE S
Power supply PS 700
Power supplies for TURBO.DRIVE S
NT 340 M
NT 340 MA
MAG.DRIVEdigital
MAG.DRIVE 2000
Vibration absorber
Air cooling unit
Flange heaters for CF flanges
Fine filter
Venting valves
Purge gas and venting valve
Power fallure venting valve
Water cooling
Accessories for serial interfaces
RS 232 C and RS 485 C

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C09.32
C09.32
C09.34
C09.35
C09.36
C09.37
C09.56
C09.57
C09.58
C09.60
C09.61
C09.61
C09.61
C09.61
C09.62
C09.62
C09.62
–
C09.63

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C09.07

Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage

TURBOVAC 50
Typical Applications
◆ Leak detectors
◆ Mass spectrometers
◆ Electron beam microscopy
◆ TV tube manufacturing
◆ Load locks and transfer chambers

Technical Features

Top view

DN

A

◆ Compact design

C

DN 10 KF *

◆ Operation in any orientation

a

◆ Cooling by convection is sufficient for most
applications

C
B

◆ Air and water cooling can be added easily

h

B

◆ Oil-free pump for generating clean high- and
ultrahigh-vacuum conditions

b

h2
h1
DN
40 KF

mm
in.
63 ISO-K mm
in.
63 CF
mm
in.

Ød

DN 16 KF

* drawn offset by 90°
Flange DN 10 KF, for 63 CF version only

a
54.5
2.15
54.5
2.15
54.5
2.15

b
55
2.17
55
2.17
55
2.17

d
93
3.66
93
3.66
93
3.66

h
166
6.54
157.5
6.20
178
7.01

h1
71.5
2.81
71.5
2.81
71.5
2.81

h2
119
4.69
119
4.69
119
4.69

Dimensional drawing for the TURBOVAC 50 with DN 63 CF flange

Advantages to the User

10 3

Pumping Speed

lxs

-1

10

◆ Space-saving

N2
He
H2

◆ Easy to integrate into complex vacuum
systems

2

◆ Low operating costs
◆ Highly reliable operation also in processes
loaded with particles

10 1

10

0

10

-5

2

4

6 8

10

-4

10

-3

10

-2

Inlet Pressure

10

-1

10

0

mbar

10

1

Pumping speed as a function of the inlet pressure (TURBOVAC 50 with DN 63 ISO-K flange)

C09.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

without Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data

TURBOVAC 50
O-ring sealed

Inlet flange

DN

40 KF

Metal sealed
63 CF

63 ISO-K
Aluminum

Pump housing

Stainless steel

Pumping speed at 10-3 mbar
I x s-1
I x s-1
I x s-1

N2
He
H2
Max. gas throughput *) at 10-2 mbar
N2
He
H2

mbar x I x s-1
mbar x I x s-1
mbar x I x s-1

33
36
28

55
48
30

55
48
30

0.30
0.25
0.20

0.40
0.35
0.25

0.40
0.35
0.25

Max. compression when idle
N2
Ultimate pressure with TRIVAC D 2,5 E

mbar (Torr)

Max. fore-line pressure for N2

mbar (Torr)

2 x 106

2 x 108

< 5 x 10-8 (< 3.75 x 10-8)

< 2 x 10-10 (< 1.5 x 10-10)
1 x 10-1 (< 0.75 x 10-1)
TRIVAC D 2,5 E

Recommended fore-vacuum pump
Run-up time to 95% of nominal speed

2

min

Cooling water connection (hose nozzles)
(for Part No. 854 08)
Weight, approx.

mm (in.)

10 (0.39)

kg (lbs)

2 (4.4)

W

45 / 15

Max. power consumption / ultimate presure

TURBOVAC 50

Or der ing Information
Inlet flange
DN 40 KF
DN 63 ISO-K
DN 63 CF

Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF

Cooling method
Convection
Convection
Convection

C09

Interface
–
–
–

Part No.
854 00
854 01
854 02

Accessories, necessary for all pumps
Electronic frequency converter NT 10
090 - 140 V
180 - 260 V

859 01
859 00

Connecting cable NT 10-Pumpe
3 m (10.5 ft)
5 m (17.5 ft)

121 08
121 09

Accessories, optional
Air cooling unit
230 V AC
110 V AC

854 05
854 06

Water cooling kit

854 08

Flange heater 63 CF, 230 V, 50 Hz

854 04

Vibration absorber
DN 63 ISO-K
DN 63 CF
*)

800131V0063
500 070

for continuous operation when water-cooled

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.09

Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage

TURBOVAC 361, 361 C
Typical Applications
◆ Leak detectors
◆ Mass spectrometers
◆ Data storage
◆ Optical coating
◆ R & D, e.g.
- UHV systems
- Particle accelerators
◆ Load locks and transfer chambers

DN
DN

C

h3

h4

h

ød

D

E
E

B

h4

D

h1

10

-5

254
10
268
10.55
227
8.94
226

10

ø d1

20°
361

361 C

DN
b
d1

100 ISO-K mm
in.
100 CF
mm
in.
160 ISO-K mm
in.
160 CF
mm
Dimensional drawing for the TURBOVAC 361 and 361 C

E

h1

a

254
10
–
–
227
8.94
–

88
3.46
–
–
88
3.46
–

-4

10

-3

h
l

h

h1

h2

h3

h4

a

47
1.85
47
1.85
47
1.85
47

135
5.31
135
5.31
135
5.31
135

84
3.31
84
3.31
84
3.31
84

98
3.86
98
3.86
98
3.86
98

94
3.70
94
3.70
94
3.70
94

10
0.39
10
0.39
10
0.39
10

166
6.54
166
6.54
166
6.54
166

10

-2

Torr

Advantages to the User

750

1000

500
cfm

500

Pumping speed

Ixs

◆ Operation in any orientation
◆ Oil-free pump for generating clean high- and
ultrahigh-vacuum conditions

B

h2

a

-6

b

h

D
h2

10

◆ Compact design

30°

a

a
ød

l

F
C

a

C
B

h3

60°

A

a

Technical Features

Top view

A

-1

◆ Space-saving
◆ Easy to integrate into complex vacuum
systems

200

100

◆ Low operating costs

100

50

◆ Highly reliable operation also in processes
loaded with particles

10

10
-6
10

2

4 6

N2
Ar
He
H2

8

10

-5

10

-4

10

Intake Pressure

-3

10

-2

mbar

10

-1

Pumping speed as a function of the intake pressure (TURBOVAC 361 with DN 100 flange)

C09.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

without Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data

TURBOVAC 361

Inlet flange

DN

100 ISO-K • 100 CF

160 ISO-K • 160 CF

I x s-1
I x s-1
I x s-1
I x s-1

345
350
340
340

400
–
380
370

mbar x I x s-1
mbar x I x s-1

7.5
7.5

–
–

Pumping speed
N2
Ar
He
H2
Max. gas throughput
N2
Ar
Compression ratio
N2
He
H2

1 x 109
6 x 104
3 x 103

Ultimate pressure

mbar (Torr)

< 1 x 10-10 (< 0.75 x 10-10)

Max. continuous inlet pressure *)

mbar (Torr)

5 x 10-2 (3.75 x 10-2)

Max. foreline pressure for N2

mbar (Torr)

5 x 10-1 (3.75 x 10-1)

Recommended fore-vacuum pump

From TRIVAC D 16 B to D 25 B

Run-up time to 95% speed

min

≈2

Purge / vent port

DN

10 KF

Cooling water connections, hose nozzle
Weight, approx.

mm (in.)

10 (0.39)

kg (lbs)

12 (26)

Max. power consumption / at ultimate pressure

VA

Or der ing Information
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 ISO-K
DN 160 CF

Foreline flange
DN 25 KF
DN 25 KF
DN 25 KF
DN 25 KF
DN 25 KF
DN 25 KF

C09

680 / 480

Cooling method
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Water-cooled

TURBOVAC 361
Item
TURBOVAC 361
TURBOVAC 361 C
TURBOVAC 361
TURBOVAC 361
TURBOVAC 361 C
TURBOVAC 361

Part No.
856 70
856 75 1)
856 71
856 72
856 77 1)
856 73

Accessories, optional
Air cooling unit
230 V AC
110 V AC
Flange heater 100 CF
230 V AC
110 V AC
Flange heater 160 CF
230 V AC
110 V AC

855 31
894 08
854 27
854 28
854 37
854 38

Accessories, for all pumps
Electronic frequency converter NT 20
230 V AC
120 V AC
100 V AC
Connecting cable NT 20-pump
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
*)

water-cooled

857 20
857 21
857 22
857 65
857 66
857 67
857 68
1)

with purge port

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.11

Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage

TURBOVAC 1100 C
Typical Applications
◆ Data storage
◆ Flat panel displays
◆ Optical coating
◆ Large area coating
◆ R & D, e.g.
- Fusion experiments
- Space simulation
◆ Load locks and transfer chambers

Technical Features

Top view

DN

A

◆ Robust rotor design
b

E

h1

a
ød

h

(C)

h6

D

F

h5

B

E

B

E

h3

h2

C

h4

◆ Operation in any orientation
◆ Highest pumping speed and throughput

45°

◆ Integrated control system for monitoring the
temperature of the bearings
45° 45°

◆ Oil-free pump for generating clean high- and
ultrahigh-vacuum conditions

D

F
a1
DN
200 ISO-K mm
in.
250 ISO-K mm
in.

h

h1

h2

h3

h4

h5

h6

a

a1

b

d

325
12.80
310
12.20

214
8.43
200
7.87

231
9.09
217
8.54

111
4.37
111
4.37

94
3.70
94
3.70

63
2.48
63
2.48

28.5
1.12
28.5
1.12

133
5.24
133
5.24

153
6.02
153
6.02

141
5.55
141
5.55

258
10.16
258
10.16

Dimensional drawing for the TURBOVAC 1100 C

10
10

Pumping Speed

Ixs

-5

10

-4

10

-3

10

-2

10

-1

Torr

Advantages to the User
750

◆ Space-saving

4

◆ Easy to integrate into complex vacuum
systems

-1

10

3

10

2

◆ High productivity
◆ Low operating costs
◆ Highly reliable operation also in processes
loaded with particles
1

10 8
6
4
2

10

0

10

-5

2

4

6 8 -4

10

N2
Ar
H2

10

-3

10

-2

10

-1

mbar

10

Inlet Pressure

Pumping speed as a function of the inlet pressure (TURBOVAC 1100 C with DN 250 flange)

C09.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

without Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data

TURBOVAC 1100 C

Inlet flange

DN

Pumping speed
N2
Ar
He
H2

200 ISO-K

250 ISO-K

830
760
750
600

1050
980
850
630

I x s-1
I x s-1
I x s-1
I x s-1

Max. gas throughput
N2
Ar
He
H2

mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1

25
15
25
30

Compression ratio
N2
Ar
H2

1 x 105
1 x 105
1 x 104

Ultimate pressure

mbar (Torr)

< 3 x 10-10 (< 2.2 x 10-10)

Max. foreline pressure for N2

mbar (Torr)

0.1 (0.075)

Recommended fore-vacuum pump

TRIVAC D 65 B / EcoDry M15/20

Run-up time to 95% speed

min

9

Purge / vent port

DN

10 KF

Cooling water connections,hose nipple
Weight, approx.
Supply voltage

mm (in.)

10 (0.39)

kg (lbs)

22 (48)

V AC

42

VA

400

Max. power consumption

Or der ing Information
Inlet flange
DN 200 ISO-K
DN 250 ISO-K

Foreline flange
DN 63 ISO-K
DN 63 ISO-K

Cooling method
Water-cooled
Water-cooled

C09
TURBOVAC 1100 C

Interface
–
–

Part No.
894 83
894 80

Accessories, for all pumps
Electronic frequency converter NT 20
230 V AC
120 V AC
Connecting cable NT 20-pump
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Purge / vent valve
24 V DC, 0.6 mbar x I x s-1 = 36 sccm

857 20
857 21
857 65
857 66
857 67
857 68
121 33

Note for the North and South American Continents:
For special application we recommend the TURBOVAC 1000 C. Please contact your sale office

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.13

Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage

TURBOVAC T 1600
Typical Applications
◆ Data storage
◆ Flat panel displays
◆ Optical coating
◆ Large area coating
◆ R & D, e.g.
- Fusion experiments
- Space simulation

Technical Features

Top view

◆ Frequency converter and power supply
integrated

ød

ød

◆ Robust rotor design
h2

h2

h3

h3

◆ Operation in any orientation

h1

h1

◆ Highest pumping speed and throughput

h

h

◆ Oil-free pump for generating clean high and
ultrahigh-vacuum conditions

a

62°

ød1

ød1

DN
200 ISO-F
250 ISO-F
250 CF

Dimensional drawing for the TURBOVAC T 1600

10
10

Pumping Speed

Ixs

-5

10

-4

10

-3

10

mm
in.
mm
in.
mm
in.

-2

15°

5°

5.62

◆ Purge gas and venting valve integrated

0°

3.5

12

a

d

d1

h

h1

h2

h3

176
6.93
176
6.93
176
6.93

285
11.22
335
13.19
304
11.97

308
12.13
308
12.13
308
12.13

393
15.47
425
16.73
413
16.26

342
13.86
369
14.53
357
14.06

277
10.91
304
11.97
292
11.50

255
10.04
228
8.98
243
9.57

10

-1

1

Torr

10

◆ Space-saving

4

◆ Easy to integrate into complex vacuum
systems

-1

10

Advantages to the User

◆ High productivity

3

◆ Low operating costs
10

◆ Highly reliable operation also in processes
loaded with particles

2
8
6
4
2

10

1

10

-5

2

4

6 8 -4

10

N2
Ar
He
H2

10

-3

10

-2

10

-1

1

mbar

10

Inlet Pressure

Pumping speed as a function of the inlet pressure (TURBOVAC T 1600 with DN 250 flange)

C09.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

without Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data

TURBOVAC T 1600

Inlet flange

DN

Pumping speed
N2
Ar
He
H2

200 ISO-F

250 ISO-F / 250 CF

1100
960
1150
690

1550
1410
1300
720

I x s-1
I x s-1
I x s-1
I x s-1

Max. gas throughput
N2
Ar
He
H2

mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1

30
20
30
20

Compression ratio
N2
Ar
He
H2

5 x 105
1 x 106
1 x 104
2 x 102

Ultimate pressure

mbar (Torr)

< 3 x 10-10 (< 2.2 x 10-10)

Max. foreline pressure for N2

mbar (Torr)

0.5 (0.375)

Recommended fore-vacuum pump (alternatively)

TRIVAC D 65 B + RUVAC WA 501
TRIVAC D 65 B
EcoDry M

Run-up time to 95% speed

min

< 10

Purge / vent port (valve integrated)

DN

G 1/4"

Cooling water connections

DN

G 3/8"

kg (lbs)

40 (88)

Weight, approx.
Supply voltage
Max. power consumption (while running up)

V

100 - 240

VA

700

Or der ing Information
Inlet flange
DN 200 ISO-F
DN 200 ISO-F
DN 250 ISO-F
DN 250 ISO-F
DN 250 ISO-F
DN 250 CF

Foreline flange
DN 40 KF
DN 40 KF
DN 40 KF
DN 40 KF
DN 63 ISO-K
DN 40 KF

C09

Cooling method
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Water-cooled
Water-cooled

Accessories for RS 232 C and RS 485 C interfaces

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TURBOVAC T 1600
Interface
–
ProfiBus
–
ProfiBus
–
–

Part No.
800040V1144
800040V2144
800040V1444
800040V2444
800040V1544
800040V1844
see chapter “Turbomolecular Pumps”, para. “Accessories”

C09.15

Turbomolecular Pumps with Mechanical Rotor Suspension with Compound Stage

TURBOVAC TW 70 H
Typical Applications
◆ Mass spectrometers
◆ Electron beam microskopy
◆ Leak detectors
◆ R & D, e.g.
- UHV systems
◆ Load locks and transfer chambers

Technical Features
ød

◆ Integrated or external frequency converter

26°

◆ Compact design
◆ Operation in any orientation

26°

h

◆ High foreline tolerance
◆ Oil-free pump for generating clean high and
ultrahigh-vacuum conditions

111
22

Top view
ø95

Heights for different inlet flanges
Inlet flange
DN
63 ISO-K
63 CF

a

h

h1

d

d1

mm

111

145

22

95

95

in.

4.37

5.71

0.87

3.74

3.74

mm

111

169

22

113.5

95

in.

4.37

6.65

0.87

4.47

3.74

Dimensional drawing for the TURBOVAC TW 70 H

10
10

-5

10

-4

10

-3

10

-2

10

-1

10

0

Advantages to the User

Torr

◆ Space-saving

3

◆ Easy to integrate into complex vacuum
systems

N2

Ar

Pumping speed

Ixs

-1

10

He
H2

2

◆ Allows the use of down-sized
fore-vacuum pumps
◆ Low operating costs

10

1

10

0

10

◆ Highly reliable operation

-5

2

4

6 8

10

-4

10

-3

10

-2

10

-1

10

0

mbar

10

1

Inlet Pressure
Pumping speed as a function of the inlet pressure

C09.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data
Inlet flange

TURBOVAC TW 70 H
DN

Pump housing
Pumping speed at 10-5 / 10-3 mbar

Metal sealed
63 CF

Aluminum

Stainless stel

I x s-1
I x s-1
I x s-1
I x s-1

N2
Ar
H2
He
Max. gas throughput *) at 10-1 mbar
N2
Ar
H2
He

O-ring sealed
63 ISO-K

60 / 56
56 / 54
40 / 38
52 / 50

mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1

1.9
2.4
1.3
1.9

Max. compression when idle
N2
Ar
H2
He
Ultimate pressure
with two-stage oil-sealed
rotary vane vacuum pump TRIVAC D 2,5 E
with dry compressing
piston vacuum pump EcoDry M15
with diaphragm pump DIVAC 0,8 T
Max. fore-line pressure for N2

mbar

1 x 108 at 14 mbar
1 x 107 at 14 mbar
4 x 103 at 0.2 mbar
2 x 105 at 2 mbar

1 x 1010 at 10 mbar

< 5 x 10-8 (< 3.75 x 10-8 Torr)

< 2 x 10-10 (< 1.5 x 10-10 Torr)
< 4 x 10-10 (< 3 x 10-10 Torr)
< 5 x 10-9 (< 3.75 x 10-9 Torr)

mbar
mbar
mbar

20 (15 Torr)

Recommended fore-vacuum pump
two-stage oil-sealed rotary vane vacuum pump
dry compressing piston vacuum pump
diaphragm pump
Run-up time to 95% of nominal speed

min

1.5
2 x G 1/8"

Cooling water connection (option)
Weight, approx.
with / without frequency converter

3.0 / 2.3 (6.62 / 5.08)

kg (lbs)

Operating voltage

V DC

Max. power consumption
Run up / ultimate presure
*)

C09

TRIVAC D 2,5 E
EcoDry M15
DIVAC 0,8 T

24
150 / 30

W

for continuous operation when water-cooled

The modular concept
TW 70 H with integrated frequency converter TURBO.DRIVE S
Power supply unit
Mains
Power supply unit, e.g.
TURBO.POWER 300
TURBO.CONTROL 300

24 V DC cable
with shield,
20 m max.

TW 70 H and external frequency converter TURBO.DRIVE S
Mains
Power supply unit, e.g.
TURBO.POWER 300
TURBO.CONTROL 300

24 V DC cable
with shield,
20 m max.

Frequency converter TURBO.DRIVE S with heat sink
Connecting cable, 5 m max.

The modular concept

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.17

Turbomolecular Pumps with Mechanical Rotor Suspension with Compound Stage

Order ing Information

TURBOVAC TW 70 H

TW 70 H with integrated frequency converter TURBO.DRIVE S
Inlet flange
DN 63 ISO-K
DN 63 ISO-K
DN 63 ISO-K
DN 63 ISO-K
DN 63 ISO-K
DN 63 CF
DN 63 CF

Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
Camozzi coupling *)
Camozzi coupling *)
DN 16 KF
DN 16 KF

Cooling method
Air-cooled
Air-cooled
Water-cooled
Air-cooled
Water-cooled
Air-cooled
Water-cooled

Part No.

Interface
RS 485 C
RS 232 C
RS 485 C
RS 485 C
RS 485 C
RS 232 C
RS 485 C

800002V1235
800002V1236
800002V1435
800002V1215
800002V1415
800002V2236
800002V2435

Interface
–
–
–

800002V1934
800002V1914
800002V2934

TW 70 H without frequency converter TURBO.DRIVE S
Inlet flange
DN 63 ISO-K
DN 63 ISO-K
DN 63 CF

Foreline flange
DN 16 KF
Camozzi coupling
DN 16 KF

Cooling method
Convection
Convection
Convection

For operation, one frequency converter TURBO.DRIVE S is necessary
Electronic frequency converter TURBO.DRIVE S with heat sink, RS 485 C interface
Electronic frequency converter TURBO.DRIVE S with heat sink, RS 232 C interface

800070V0006
800070V0005

Connecting cable (TURBO.DRIVE S - pump)
1 m (3.5 ft)
3 m (10.5 ft)
5 m (17.5 ft)

152 47
864 40
864 50

Accessories, necessary for all pumps
152 48

START/STOP switch for manual opertion of the turbomolecular pump
Power supplies
TURBO.POWER 300
TURBO.CONTROL 300

800100V0002
800100V0001

Accessories, optional
Water cooling unit with 2 x G 1/8" connection
including 2 hose nozzles G 1/8", OD 8 mm for water hose,
2 gaskets (copper) 10 x 14 x 1

800135V0001

Air cooling unit

800136V0001
854 04

Flange heater 63 CF, 230 V, 50 Hz
Splinter guard
DN 63 ISO-K
DN 63 CF

200 17 170
200 17 171

Vibration absorber
DN 63 ISO-K
DN 63 CF

800131V0063
500 070

Accessories for serial interfaces RS 232 C and RS 485 C
*)

see chapter “Turbomolecular Pumps”, para. “Accessories”

Quick coupling for plastic vacuum hoses with an OD of 10 mm. We recommend polyamide hoses

C09.18

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Ø 95

Turbomolecular Pumps with Mechanical Rotor Suspension

Ø 95

DN 63 ISO-K

ø95

63

123

150

123

148

123

101

155

cable
lenght
400 mm

155.5
50.5

26°

2°

71

26°

64

TURBO.DRIVE S

64

71

105
48°

2°

48°

106

111
2°

Part No. 800002V1234
TW 70 H with DN 63 ISO-K flange,
air-cooled,
foreline connection DN 16 KF,
without frequency converter

100
26°

Part No. 800002V1235
TW 70 H with DN 63 ISO-K flange,
air-cooled,
foreline connection DN 16 KF,
with frequency converter

Selected dimensional drawings for the TURBOVAC TW 70 H versions

106

26°
26°

Part No. 800002V1231
TW 70 H with DN 63 ISO-K flange,
water-cooled,
foreline connection DN 16 KF,
with frequency converter

N otes

C09

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.19

Turbomolecular Pumps with Mechanical Rotor Suspension with Compound Stage

TURBOVAC TW 300
Typical Applications
◆ Mass spectrometers
◆ Production of thin films
◆ CD and DVD coating
◆ R & D, e.g.
- UHV systems
- Particle accelerators
◆ Load locks and transfer chambers

Technical Features

Ø a2
Ø a1
DN

Top view

◆ Integrated or external frequency converter

Top view

◆ Compact design
◆ Operation in any orientation
h1

◆ Highest pumping speed for Nitrogen and
Argon

h
h2

TYP X
Ser.Nr. XXXXXXXXXXX
XXX XX
XXX Hz

◆ Highly effective air-cooling unit

LEYBOLD VAKUUM GMBH BONNER STR.498
MADE IN GERMANY
50968 K@RLN

◆ Oil-free pump for generating clean high and
ultrahigh-vacuum conditions

h3
a

a

b1
b
l

DN

a

100 ISO-K

Dimensional drawing for the TURBOVAC TW 300

10
10

Pumping Speed

Ixs

-5

10

-4

mm
160
in.
6.30
160 ISO-K mm
160
in.
6.30
05.01.M.037-E(TW300)
100 CF
mm
160
in.
6.30

10

-3

a1

a2

h

h1

h2

h3

b

b1

l

130
5.12
180
7.09
151.5
5.96

171
6.73
202
7.95
–
–

217
8.54
221
8.70
219.4
8.64

243
9.57
247.5
9.74
–
–

50
1.97
50
1.97
50
1.97

55
2.17
55
2.17
55
2.17

154
6.06
154
6.06
154
6.06

77
3.03
77
3.03
77
3.03

186
7.32
186
7.32
186
7.32

10

-2

10

-1

10

0

Torr 750

Advantages to the User
◆ Space-saving

2

-1

◆ Easy to integrate into complex vacuum
systems

N2
Ar

◆ High foreline tolerance allows the use of
downsized fore-vacuum pumps

He
H2

◆ High productivity

1

10 8

◆ Low operating costs

6
4

2

10

0

10

-5

2

4

6 8

10

-4

10

-3

10

-2

10

-1

10

0

mbar

10

1

Inlet Pressure
Pumping speed as a function of the inlet pressure

C09.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data

TURBOVAC TW 300
O-ring sealed

Inlet flange

DN

Pump housing

Metal sealed
100 CF

160 ISO-K
Aluminum

Pumping speed at 10-5 / 10-3 mbar

I x s-1
I x s-1
I x s-1
I x s-1

N2
Ar
H2
He
Max. gas throughput *) at 10-1 mbar
N2 at 2 x 10-2 mbar
Ar at 1 x 10-2 mbar
H2 at 1 x 10-1 mbar
He at 1 x 10-1 mbar

100 ISO-K

240 / 240
230 / 230
140 / 125
230 / 220

mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1

Max. compression when idle
N2
Ar
H2
He
Ultimate pressure (for CF pumps)
with two-stage oil-sealed
rotary vane vacuum pump TRIVAC D 2,5 E
with dry compressing
piston vacuum pump EcoDry M15
with diaphragm pump DIVAC 2,5 VT
Max. fore-line pressure for N2

mbar

3.7
2.0
2.3
4.5
3,5 x 108 at 7 mbar
1 x 108 at 10 mbar
4 x 103 at 0.,4 mbar
1 x 105 at 2 mbar

6 x 109 at 4 mbar

< 2 x 10-8 (< 1.5 x 10-8 Torr)

< 2 x 10-10 (< 1.5 x 10-10 Torr)

mbar

min

Purge / vent port

DN

C09

4
16 KF
2x G 1/8"

Cooling water connection (option)

Max. power consumption
Run up / ultimate presure

10 (15 Torr)
TRIVAC D 2,5 E
EcoDry M 15
DIVAC 2,5 VT

Run-up time to 95% of nominal speed

Operating voltage

< 8 x 10-10 (< 6 x 10-10 Torr)
< 4 x 10-9 (< 3 x 10-9 Torr)

mbar
mbar

Recommended fore-vacuum pump
two-stage oil-sealed rotary vane vacuum pump
dry compressing piston vacuum pump
diaphragm pump

Weight, approx.
with / without frequency converter

Stainless stel

kg (lbs)
V DC
W

6.8 / 6.0 (15 / 13.2)
24
150 / 30

*) for continuous operation when water-cooled

Note: TURBOVAC TW 250 S available for specific applications. Please consult factory

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.21

Turbomolecular Pumps with Mechanical Rotor Suspension with Compound Stage

Order ing Information

TURBOVAC TW 300

TW 300 with integrated frequency converter TURBO.DRIVE S
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 160 ISO-K
DN 160 ISO-K
DN 100 CF
DN 100 CF
DN 100 CF
DN 100 CF

Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF

Cooling method
Convection
Air-cooled
Air-cooled
Water-cooled
Air-cooled
Water-cooled
Convection
Air-cooled
Air-cooled
Water-cooled

Part No.

Interface
RS 485 C
RS 485 C
RS 232 C
RS 485 C
RS 485 C
RS 485 C
RS 485 C
RS 485 C
RS 232 C
RS 485 C

800011V0007
800011V0009
800011V0018
800011V0011
800011V0016
800011V0013
800011V0008
800011V0010
800011V0019
800011V0012

Interface
–
–
–
–
–
–

800011V0001
800011V0003
800011V0005
800011V0002
800011V0004
800011V0006

TW 300 without frequency converter TURBO.DRIVE S
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 100 CF
DN 100 CF
DN 100 CF

Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF

Cooling method
Convection
Air-cooled
Water-cooled
Convection
Air-cooled
Water-cooled

For operation, one frequency converter TURBO.DRIVE S is necessary
Electronic frequency converter TURBO.DRIVE S with heat sink, RS 485 C interface
Electronic frequency converter TURBO.DRIVE S with heat sink, RS 232 C interface
Connecting cable (TURBO.DRIVE S - pump)
1 m (03.5 ft)
3 m (10.5 ft)
5 m (17.5 ft)

800070V0006
800070V0005
152 47
864 40
864 50

Accessories, necessary for all pumps
START/STOP switch for manual opertion of the turbomolecular pump
Power supplies
TURBO.POWER 300
TURBO.CONTROL 300

152 48
800100V0002
800100V0001

Accessories, optional
Water cooling unit with 2x G 1/8" connection
including 2 hose nozzles G 1/8", OD 10 mm for water hose,
4 gaskets, 2 blank-off plugs

800135V0002

Air cooling unit

800 000 249

Flange heater
100 CF, 230 V, 50 Hz
100 CF, 110 V, 60 Hz
Splinter guard
DN 100 ISO-K/CF
coarse (3.2 x 3.2 mm (0.13 x 0.13 in.))
fine (1.6 x 1.6 mm (0.06 x 0.06 in.))
DN 160 ISO-K
Vibration absorber
DN 100 ISO-K
DN 100 CF
Accessories for serial interfaces RS 232 C and RS 485 C

C09.22

854 27
854 28
200 18 692
200 18 340
200 00 307
800131V0100
500 071
see chapter “Turbomolecular Pumps”, para. “Accessories”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

The modular concept
TW 300 (cooled by convection)
without integrated frequency converter

TW 300 (cooled by convection)
with integrated frequency converter

TURBO.DRIVE S

TURBO.DRIVE S
TURBO.DRIVE S with heat sink
Power supply unit

Power supply unit

Mains
Dr

24 V DC
cable,
20 m max.

e.g.
TURBO.POWER 300
TURBO.CONTROL 300

ive

Connecting
cable,
5 m max.

(X

Mains

3)

HE

DC
(X 24 V
4)
AT

SIN

K

24 V DC
cable,
20 m max.

e.g.
TURBO.POWER 300
TURBO.CONTROL 300

TW 300 (with air cooling)
without integrated frequency converter

TW 300 (with air cooling)
with integrated frequency converter

TURBO.DRIVE S

TURBO.DRIVE S

TURBO.DRIVE S with heat sink
Power supply unit
24 V DC
cable,
20 m max.

Mains

Power supply unit
Dr

e.g.
TURBO.POWER 300
TURBO.CONTROL 300

Connecting
cable,
5 m max.

ive

(X
3)

HE
AT

DC
(X 24 V
4)
SIN

K

24 V DC
cable,
20 m max.

Mains

e.g.
TURBO.POWER 300
TURBO.CONTROL 300

C09
N otes

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.23

Turbomolecular Pumps with Mechanical Rotor Suspension with Compound Stage

TURBOVAC TW 300 H
Typical Applications
◆ Mass spectrometers
◆ R & D, e.g.
- UHV systems
- Particle accelerators
◆ Load locks and transfer chambers

Technical Features

Ø a2
Ø a1
DN

Top view

◆ Integrated or external frequency converter

Top view

◆ Compact design
◆ Operation in any orientation
h1

◆ High pumping speed and compression for
light gases

h
h2

TYP X
Ser.Nr. XXXXXXXXXXX
XXX XX
XXX Hz

◆ Highly effective air-cooling unit

LEYBOLD VAKUUM GMBH BONNER STR.498
MADE IN GERMANY
50968 K@RLN

◆ Oil-free pump for generating clean high and
ultrahigh-vacuum conditions

h3
a

a

b1
b
l
DN

a

100 ISO-K

mm
160
in.
6.30
100 CF05.01.M.037-E(TW300)
mm
160
in.
6.30

a1

a2

h

h1

h2

h3

b

b1

l

130
5.12
151.5
5.96

171
6.73
–
–

217
8.54
219.4
8.64

243
9.57
–
–

50
1.97
50
1.97

55
2.17
55
2.17

154
6.06
154
6.06

77
3.03
77
3.03

186
7.32
186
7.32

Dimensional drawing for the TURBOVAC TW 300 H

10
10

Pumping Speed

Ixs

-5

10

-4

10

-3

10

-2

10

-1

10

0

Advantages to the User

Torr

◆ Space-saving

3

-1

◆ Easy to integrate into complex vacuum
systems

N2
Ar

◆ High foreline tolerance allows the use of
downsized fore-vacuum pumps

He
H2
10

2

10

1

10

◆ Low operating costs

-5

2

4

6 8

10

-4

10

-3

10

-2

10

-1

10

0

mbar

10

1

Inlet Pressure
Pumping speed as a function of the inlet pressure

C09.24

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data
Inlet flange

TURBOVAC TW 300 H
DN

Pump housing
Pumping speed at 10-5 / 10-3 mbar

Metal sealed
100 CF

Aluminum

Stainless stel

I x s-1
I x s-1
I x s-1
I x s-1

N2
Ar
H2
He
Max. gas throughput *) at 10-1 mbar
N2 at 2 x 10-2 mbar
Ar at 1 x 10-2 mbar
H2 at 1 x 10-1 mbar
He at 1 x 10-1 mbar

O-ring sealed
100 ISO-K

240 / 240
240 / 240
160 / 140
240 / 230

mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1

Max. compression when idle
N2
Ar
H2
He
Ultimate pressure (for CF pumps)
with two-stage oil-sealed
rotary vane vacuum pump TRIVAC D 2,5 E
with dry compressing
piston vacuum pump EcoDry M15
with diaphragm pump DIVAC 2,5 VT
Max. fore-line pressure for N2

mbar

3.7
2.1
2.6
4.5
5,5 x 108 at 8 mbar
1,5 x 108 at 10 mbar
1,5 x 104 at 0.4 mbar
4 x 105 at 2 mbar

1 x 1010 at 6 mbar

< 1 x 10-8 (< 0.75 x 10-8 Torr)

< 1 x 10-10 (< 0.75 x 10-10 Torr)

mbar

Recommended fore-vacuum pump
two-stage oil-sealed rotary vane vacuum pump
dry compressing piston vacuum pump
diaphragm pump
min

Purge / vent port

DN

Max. power consumption
Run up / ultimate presure

C09

4
16 KF
2x G 1/8"

Cooling water connection (option)

Operating voltage

12 (9 Torr)
TRIVAC D 2,5 E
EcoDry M15
DIVAC 2,5 VT

Run-up time to 95% of nominal speed

Weight, approx.
with / without frequency converter

< 2 x 10-10 (< 1.5 x 10-10 Torr)
< 1 x 10-9 (< 0.75 x 10-9 Torr)

mbar
mbar

kg (lbs)
V DC
W

6.8 / 6.0 (15 / 13.2)
24
150 / 30

*) for continuous operation when water-cooled

Note: TURBOVAC TW 250 S available for specific applications. Please consult factory

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.25

Turbomolecular Pumps with Mechanical Rotor Suspension with Compound Stage

Order ing Information

TURBOVAC TW 300 H

TW 300 H with integrated frequency converter TURBO.DRIVE S
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 100 CF
DN 100 CF
DN 100 CF
DN 100 CF

Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF

Cooling method
Convection
Air-cooled
Air-cooled
Water-cooled
Convection
Air-cooled
Air-cooled
Water-cooled

Part No.

Interface
RS 485 C
RS 485 C
RS 232 C
RS 485 C
RS 485 C
RS 485 C
RS 232 C
RS 485 C

800012V0007
800012V0009
800012V0013
800012V0011
800012V0008
800012V0010
800012V0014
800012V0012

Interface
–
–
–
–
–
–

800012V0001
800012V0003
800012V0005
800012V0002
800012V0004
800012V0006

TW 300 H without frequency converter TURBO.DRIVE S
Inlet flange
DN 100 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 100 CF
DN 100 CF
DN 100 CF

Foreline flange
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF
DN 16 KF

Cooling method
Convection
Air-cooled
Water-cooled
Convection
Air-cooled
Water-cooled

For operation, one frequency converter TURBO.DRIVE S is necessary
Electronic frequency converter TURBO.DRIVE S with heat sink, RS 485 C interface
Electronic frequency converter TURBO.DRIVE S with heat sink, RS 232 C interface
Connecting cable (TURBO.DRIVE S - pump)
1 m (3.5 ft)
3 m (10.5 ft)
5 m (17.5 ft)

800070V0006
800070V0005
152 47
864 40
864 50

Accessories, necessary for all pumps
START/STOP switch for manual opertion of the turbomolecular pump
Power supplies
TURBO.POWER 300
TURBO.CONTROL 300

152 48
800100V0002
800100V0001

Accessories, optional
Water cooling unit with G 1/8" connection
including 2 hose nozzles G 1/8", OD 10 mm for water hose,
4 gaskets, 2 blank-off plugs

800135V0002

Air cooling unit

800 000 249

Flange heater
100 CF, 230 V, 50 Hz
100 CF, 110 V, 60 Hz
Splinter guard DN 100 ISO-K/CF
coarse (3,2 x 3,2 mm)
fine (1,6 x 1,6 mm)
Vibration absorber
DN 100 ISO-K
DN 100 CF
Accessories for serial interfaces RS 232 C and RS 485 C

C09.26

854 27
854 28
200 18 692
200 18 340
800131V0100
500 071
see chapter “Turbomolecular Pumps”, para. “Accessories”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

The modular concept
TW 300 H (without forced cooling)
with integrated frequency converter
TURBO.DRIVE S

TW 300 H (without forced cooling)
without integrated frequency converter
TURBO.DRIVE S
Connecting cable, 5 m max.

24 V DC cable
with shield, 20 m max.

TURBO.DRIVE S with heat sink
Power supply unit

Mains
Dr

ive

HE
AT

Power supply unit, e.g.
TURBO.POWER 300
TURBO.CONTROL 300

TW 300 H (with air cooling)
with integrated frequency converter
TURBO.DRIVE S
24 V DC cable with shield, 20 m max.

DC
(X 24 V
4)
SIN

K

24 V DC cable with shield, 20 m max.

Power supply unit, e.g.
TURBO.POWER 300
TURBO.CONTROL 300

TW 300 H (with air cooling)
without integrated frequency converter
TURBO.DRIVE S
Connecting cable, 5 m max.

TURBO.DRIVE S
with heat sink

Mains
Dr

Power supply unit, e.g.
TURBO.POWER 300
TURBO.CONTROL 300

Mains

(X
3)

ive

(X

Mains

3)

HE

DC
(X 24 V
4)
AT

SIN

K

24 V DC cable with shield, 20 m max.

Power supply unit, e.g.
TURBO.POWER 300
TURBO.CONTROL 300

C09

N otes

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.27

Turbomolecular Pumps with Mechanical Rotor Suspension with Compound Stage

TURBOVAC TW 701
Typical Applications
◆ Mass spectrometers
◆ Data storage
◆ Flat panel displays
◆ R & D, e.g.
- UHV systems
- Particle accelerators
◆ Load locks and transfer chambers

ød1

Technical Features

l
ød

l1

◆ Integrated frequency converter
◆ Operation in any orientation

h1

◆ Highest pumping speed and throughput for
Nitrogen and Argon
b

h

h2

h3

◆ High foreline tolerance allows the use of
downsized fore-vacuum pumps
◆ Highly effective air-cooling unit

ød2

◆ Oil-free pump for generating clean high- and
ultrahigh-vacuum conditions

Top view
b1
b

Dimensional drawing for the TURBOVAC TW 700

10
10

Pumping Speed

Ixs

-5

10

-4

DN160 ISO-K mm
in.
DN 160 CF mm
in.

10

-3

228
8.98
228
8.98

10

b1

d

d1

d2

h

h1

219 180 150 180 –
8.82 7.09 5.91 7.09 –
219 – 150 180 295
8.82 – 5.91 7.09 11.61

-2

10

-1

h2

h3

l

10

0

Torr

750

3

10

2

10

1

10

0

10

Advantages to the User
◆ Space-saving

4

◆ Easy to integrate into complex vacuum
systems

-1

10

l1

– 285 115 264 223
– 11.22 4.53 10.39 8.78
12 – 115 264 223
0.47 – 4.53 10.39 8.78

N2
Ar
He
H2

◆ High productivity
◆ Low operating costs
◆ Highly reliable operation

-5

10

-4

10

-3

10

-2

10

-1

1

mbar

10

Inlet Pressure
Pumping speed as a function of the inlet pressure

C09.28

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data
Inlet flange
Pumping speed
N2
Ar
He
H2
Max. gas throughput
N2
Ar
He
H2
Compression ratio
N2
Ar
He
H2
Ultimate pressure
Max. foreline pressure for N2
Recommended fore-vacuum pump
Run-up time to 95% speed
Purge port
Cooling water connections
Weight, approx.
Supply voltage, nominal
Max. power consumption

TURBOVAC TW 701
DN

160 ISO-K

160 CF

I x s-1
I x s-1
I x s-1
I x s-1

680
600
530
330

mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1

12
5 (water cooled)
7
2.5
8 x 108
1 x 108
1 x 106
2 x 104

mbar (Torr)
mbar (Torr)

< 5.0 x 10-9 (< 3.75 x 10-9)

< 1.5 x 10-10 (< 1.1 x 10-10)

14 (10.5)
TRIVAC D 65 B, EcoDry M15, DIVAC 4.8 VT
≈5
16 KF
2x G 1/8" (internal threads)
19 (42)
59
500

min
DN
kg (lbs)
V DC
W

Or der ing Information
Inlet flange
Foreline flange
DN 160 ISO-K
DN 25 KF
DN 160 ISO-K
DN 25 KF
DN 160 ISO-K
DN 25 KF
DN 160 ISO-K
DN 25 KF
DN 160 CF
DN 25 KF
DN 160 CF
DN 25 KF
DN 200 CF (incl. splinter guard) DN 25 KF
Power supply TURBO.CONTROL 700

Cooling method
Air-cooled
Water-cooled
Air-cooled
Water-cooled
Air-cooled
Water-cooled
Water-cooled

TURBOVAC TW 701
Interface
RS 232 C
RS 232 C
RS 485 C
RS 485 C
RS 485 C
RS 485 C
RS 232 C

Accessories, optional
Inlet screen
DN 160 ISO-K
DN 160 CF
Flange heater 160 CF
230 V AC
110 V AC
Vibration absorber
DN 160 ISO-K
DN 160 CF
OEM power supply, 59 V DC
59 V DC cable
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35 ft)
20 m (70 ft)
Plug with integrated START/STOP switch
Purge gas and venting valve, 24 V DC, 0.6 mbar x I x s-1 = 36 sccm (purge gas pressure, abs.; 1.5 to 6 bar)
Accessories for RS 232 C and RS 485 C interfaces

Accessories, for the water connection

Part No.
800051V0021
800051V0025
800051V0024
800051V0023
800051V0027
800051V0026
800051V0022
see chapter “Turbomolecular Pumps
with Mechanical Rotor Suspension”
para. “Electronic Frequency Converter”
200 00 307
200 17 247
854 37
854 38
500 073
500 072
864 45
200 12 729
200 12 730
200 12 731
200 15 064
152 48
121 33
see chapter “Turbomolecular Pumps”, para. “Accessories”

Adaptor G (BPS) 1/8" – G (BPS) 1/4" pipe (Swagelok *))
200 91 671 (2x required)
Gasket
224 01 207 (2x required)
Adaptor G (BPS) 1/8" – 10 mm (0.39 in.) hose nozzle
200 18 366 (2x required)
Gasket
230 02 106 (2x required)
Adaptor G (BPS) 1/8" – NPT 1/8"
200 12 742 (2x required)
Gasket
238 20 110 (2x required)
*)
Adapts German threads of water cooling to a more common Englisch thread. The Part Number is for one each, but two are used for almost all installations
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.29

C09

Turbomolecular Pumps with Mechanical Rotor Suspension with Compound Stage

TURBOVAC TW 1600
Typical Applications
◆ Data storage
◆ Flat panel displays
◆ Optical coating
◆ Large area coating
◆ R & D, e.g.
- Fusion experiments
- Space simulation
- UHV applications

Technical Features

ød

b

h1

h2

◆ Frequency converter and power supply
integrated

b1

h4

h3

◆ Robust rotor design

Top view

◆ Operation in any orientation

h

◆ Highest pumping speed and high throughput

a

◆ Oil-free pump for generating clean high and
ultrahigh-vacuum conditions

57°
61,5°

◆ Purge gas and venting valve integrated

ø d1

DN
200 ISO-F
250 ISO-F
250 CF

mm
inch
mm
inch
mm
inch

a

a

b

b1

d

d1

h

h1

h2

h3

h4

15°
15°
15°
15°
5.6°
5.6°

178
7.01
178
7.01
178
7.01

190
7.48
190
7.48
190
7.48

156
6.14
156
6.14
156
6.14

285
11.22
335
13.19
304
11.97

308
12.13
308
12.13
308
12.13

425
16.73
398
15.67
413
16.26

349
13.74
322
12.68
337
13.27

315
12.40
288
11.34
303
11.93

277
10.91
249
9.80
264
10.39

256
10.08
228
8.98
243
9.57

◆ High fore-vacuum tolerance

Dimensional drawing for the TURBOVAC TW 1600

Advantages to the User
10
10

Pumping Speed

Ixs

-5

10

-4

10

-3

10

-2

10

1

Torr

10

4

-1

10

-1

◆ Space-saving
◆ Easy to integrate into complex vacuum
systems

N2
Ar

◆ High productivity

3

◆ Low operating costs
◆ Operation with dry backing pumps

2
10 8
6
4
2

10

1

10

-5

2

4

6 8 -4

10

10

-3

10

-2

10

-1

1

mbar

10

Inlet Pressure

Pumping speed as a function of inlet pressure

C09.30

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Turbomolecular Pumps with Mechanical Rotor Suspension

Technical Data

TURBOVAC TW 1600

Inlet flange

DN

Pumping speed
N2
Ar
Max. gas throughput
N2
Ar

200 ISO-F

250 ISO-F / 250 CF

1000
820

1420
1200

I x s-1
I x s-11
mbar x I x s-1
mbar x I x s-1

7.4
6.8

Compression ratio kO for O-ring sealed pumps
N2
Ar

1 x 107
1 x 108

Ultimate pressure

mbar (Torr)

Max. foreline pressure for N2

mbar (Torr)

< 3 x 10-10 (< 2.25 x 10-10)
8 (6)

Recommended fore-vacuum pump (alternatively)

TRIVAC D 65 B + RUVAC WA 501
DIVAC 4.8 VT
EcoDry M
SOGEVAC SV 25

Run-up time to 95% speed

min

< 10

Purge / Vent port

DN

G 1/4"

Cooling water connections

G 3/8"

Weight, approx.
Supply voltage

kg (lbs)

40 (88.3)

V AC

100 - 240

Max. power consumption

W

700

Or der ing Information
Inlet flange
DN 200 ISO-F
DN 250 ISO-F
DN 250 CF

Foreline flange
DN 40 KF
DN 40 KF
DN 40 KF

Cooling method
Water cooled
Water cooled
Water cooled

Accessories for RS 232 C and RS 485 C interfaces

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09

TURBOVAC TW 1600
Interface
ProfiBus
ProfiBus
ProfiBus

Part No.
800041V2144
800041V2444
800041V2844
see chapter “Turbomolecular Pumps”, para. “Accessories”

C09.31

Turbomolecular Pumps with Mechanical Rotor Suspension Electronic Frequency Converters

TURBOTRONIK NT 10

TURBOTRONIK NT 20

Technical Features

Technical Features

◆ For operating the TURBOVAC 50
turbomolecular pump

◆ For operating the TURBOVAC 361 (C) and
1100 C turbomolecular pump

◆ Bench top unit

◆ Front panel with membrane keypad and LCD

◆ Also for rack mounting (1/4 19 ", 3 HU)
◆ Controls and indicators on the front panel
◆ Inputs fpr remote control and process
controller
◆ Freely assignable relays (e.g. to control the
backing pumps)

Advantages to the User
◆ Remote control and process control via
analog and programmable control inputs and
outputs
◆ Connection for backing pump, venting valve,
flange heater and air cooler
◆ Operation direct at the unit or via interface
◆ Floating connection of external monitoring
devices via a terminal strip on the rear

C09.32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Electronic Frequency Converters

Technical Data

Turbomolecular Pumps with Mechanical Rotor Suspension

NT 10

NT 20

Main connection, 50 to 60 Hz

V

90-140/180-260

–

Main, 50 to 60 Hz, selectable

V

–

85 to 265

Max. output voltage

V

3 x 150

3 x 42

Overload current limit

A

0.22

5

°C (°F)

0 to +40 (32 to +104)

0 to +45 (32 to +113)

mm
(in.)

106 x 128 x 233
(4.17 x 5.04 x 9.17)

213 x 129 x 320 (1/2 19", 3 HU)
(8.39 x 5.08 x 12.60 (1/2 19", 3 HU))

1.5 (3.3)

7 (15.4)

NT 10

NT 20 1)

Part No. 859 01

–

100 V (with US plug)

–

Part No. 857 22 2)

120 V (with US plug)

–

Part No. 857 21

Part No. 859 00

–

–

Part No. 857 20

Part No. 121 08
Part No. 121 09
–
–

Part No. 857 65 1)
Part No. 857 66 1)
Part No. 857 67 1)
Part No. 857 68 1)

Permissible ambient temperature
Dimensions (W x H x D)

Weight, approx.

kg (lbs)

Ordering Information
090 - 140 V (with US plug)

180 - 260 V (with EURO plug)
230 V (with EURO plug)
Pump/converter connecting line
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
1)

2)

C09

If NT 20 is beeing ordered to replace NT 150/360, NT 151/361, then an NT 20 cable must also be ordered.
(NT 20 has round connector on back, the other controller had a rectangular connector back.)
Not suitable for driving the TURBOVAC 1100 C

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.33

Turbomolecular Pumps with Mechanical Rotor Suspension Electronic Frequency Converters

Version for the North and South American Continents

TURBOTRONIK NT 361

Advantages to the User
◆ For operating the TURBOVAC 361 turbomolecular pumps
◆ Sensing of the pump model via a resistance
code
◆ Operation via pushbuttons
◆ Terminal strip for remote control and display
functions

Technical Data

NT 361

Main connection, 60 Hz

V

120

VA

750

Power consumption during normal operation, approx. VA

130

Max. power consumption during run-up

Max. output voltage / run-up current

V/A

Overload current limit
Nominal frequency
Permissible ambient temperature
Dimensions (W x H x D)
Weight, approx.

3 x 45 / 5.5

A

3.5

Hz

833/750

°C (°F)

0 to +40 (32 to +104)

mm (in.)

210 x 129 x 288 (8.27 x 5.08 x 11.34)

kg (lbs)

8.5 (18.7)

Ordering Information

NT 361

120 V (Main cord with US plug)

Part No. 854 72-6

Pump/converter connecting line
3 m (10.5 ft)
5 m (17.5 ft)

Part No. 857 60
Part No. 857 61

C09.34

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pumps with Mechanical Rotor Suspension

Electronic Frequency Converters

TURBO.DRIVE S (TDS) for TW 70, TW 300 and TW 300 H Turbomolecular Pumps
mm
in.

b

b1

b2

h

h1

l

100
3.94

18.1
0.71

63.8
2.51

50
1.97

40
1.57

100
100

b1
b
b2

l

h

Driv
e (X

3)

h1

TURBO.DRIVE S with heat sink

DC
(X4)24 V

HE

AT

SIN

K

Dimensional drawing for the TURBO.DRIVE S

Technical Features
◆ Remote control via remote control interface

◆ Configurations
- as a separate frequency converter
- integrated within turbomolecular pump

◆ Compact size
◆ RS 232 C or RS 485 C interface

◆ Flexible mounting
◆ Cost-effective supply of 24 V DC power

Technical Data

TURBO.DRIVE S

Input
Voltage
Max. continuos current
Max. continuos power consumption
Ambient temperature
Dimensions (W x H x D), including heat sink

+10 to +45 (+50 to +113)

°C (°F)

100 x 90 x 100 (3.94 x 3.54 x 3.94)

mm (in.)

Weight

1.4 (3.1)

kg (lbs)

RS 232 C or RS 485 C

Serial Interface

Ordering Information

TURBO.DRIVE S
Part No. 800070V0005
Part No. 800070V0006
upon request

TURBO.DRIVE S with RS 232 C interface and heat sink
TURBO.DRIVE S with RS 485 C interface and heat sink
with Profibus
Connecting cable TDS–pump
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)

Part No. 152 47
Part No. 864 40
Part No. 864 50

START/STOP switch (for manual operation)

Part No. 152 48

Hat rail adaptor as mounting aid
Accessories for RS 232 C and RS 485 C interfaces

C09

24 ± 5%
7
170

V DC
A
W

Part No. 800110V0003
see chapter "Accessories for Turbomolecular Pumps”, para. “Accessories”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.35

Turbomolecular Pumps with Mechanical Rotor Suspension Electronic Frequency Converters

Power Supply PS 700 for TW 701 Turbomolecular Pumps
b
mm
in.

b1

b2

h

h1

l

l1

l2

63
15
30 105 11 227 197 18
2.48 0.59 1.18 4.13 0.43 8.94 7.76 0.71
h1

3 x M4

AIRFLOW

l1

h
h1
b1

l2

b

b2

4 x M4
l
Dimensional drawing for the power supply PS 700

Technical Features
◆ 59 V DC OEM power supply for screw fixing
in electrical cabinets

Power Supply PS 700

Technical Data
Input
Mains voltage
Max. continuos power consumption

V
W

Output
Voltage, nominal
Max. continuos current
Max. power output
Ambient temperature
Dimensions (W x H x D)
Weight

V DC
A
W
°C (°F)

85-265
850
59
13
750
0 to +70 (32 to +158)

mm (in.)

227 x 63 x 127 (8.94 x 2.48 x 5.0)

kg (lbs)

2 (4.4)

Ordering Information

Power Supply PS 700

OEM power supply 59 V DC

Part No. 864 45

59 V DC cable TW 700–power supply
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)

Part No. 200 12 729
Part No. 200 12 730
Part No. 200 12 731
Part No. 200 15 064

Mains cable for OEM power supply, 2 m (7 ft)
with EURO plug
with US plug
START/STOP switch for TURBO.DRIVE S/L
(for manual operation)

Part No. 800102V0001
Part No. 800102V1001
Part No. 152 48

Note: See the TPC and TPS controllers in the Product Section C10 “Turbomolecular Pump Systems” for additinal controllers for the TURBOVAC TW 300 and TW 700

C09.36

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pumps with Mechanical Rotor Suspension

Electronic Frequency Converters

Power Supply Units for TURBO.DRIVE S and TW 700/701

246

211

211

Front View

53
266

315

5
Ø4

213

263

START

NORMAL

111

116
70

4

POWER

Front View
315

198,1
START

128,4

1
0

111

122,4

START

128,4

1
0
STOP

POWER

122,4

ERROR

TURBO.CONTROL 300/700

TURBO.CONTROL 300/700

Ø

Dimensional drawing for the power supply TURBO.POWER 300

198,1

START

NORMAL

STOP

ERROR

213

263

3,2

Dimensional drawing for the power supply TURBO.CONTROL 300

Ø

3,2

Dimensional drawing for the power supply TURBO.CONTROL 700

Technical Features

Technical Features

Technical Features

◆ Cost-effective supply of 24 V DC power for
TURBO.DRIVE S
◆ Plug & play
◆ Bench top unit or for cabinet mounting

◆ For supplying 24 V DC power to the
TURBO.DRIVE S
◆ Plug & play
◆ Bench top unit or for cabinet mounting
◆ Mains switch
◆ START/STOP switch for the turbomolecular pump
◆ Remote control via remote interface
◆ Status indicating LEDs and status relays

◆ For supplying 56 V DC power to the
TW 700/701
◆ Plug & play
◆ Bench top unit or for cabinet mounting
◆ Mains switch
◆ START/STOP switch for the turbomolecular pump
◆ Remote control via remote interface
◆ Status indicating LEDs and status relays

Technical Data

TURBO.POWER 300

Input

Mains voltage
Max. power consumption
Output
Voltage, nominal
Max. continuos current
Ambient temperature
Dimensions (W x H x D)
Weight

VA
V DC
A
°C (°F)
mm (in.)
kg (lbs)

Ordering Information
Power supply
TURBO.POWER 300
TURBO.CONTROL 300
TURBO.CONTROL 700
DC cable frequency converter – power supply unit
01 m (03.5 ft)
03 m (10.5 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Mains cable, 3 m (10.5 ft)
with EURO plug
with US plug 6-15 P
Hat rail adaptor as mounting aid

Power Supplies
TURBO.CONTROL 300 TURBO.CONTROL 700

85-264 V / 50/60 Hz
300

85-264 V / 50/60 Hz
300

85-264 V / 50/60 Hz
805

24
8,4
0 to +40 (32 to +104)
116 x 53 x 260 (4.57 x 2.09 x 10.24)
1.5 (3.31)

24
8,4
0 to +40 (32 to +104)
213 x 129 x 320 (8.39 x 5.08 x 12.6)
1.5 (3.31)

56
8,5
0 to +40 (32 to +104)
213 x 129 x 320 (8.39 x 5.08 x 12.6)
2.5 (5.52)

TURBO.POWER 300

Power Supplies
TURBO.CONTROL 300 TURBO.CONTROL 700

Part. No. 800100V0002
–
–

–
Part. No. 800100V0001
–

–
–
Part. No. 800101V0001

24 V DC power cable
Part. No. 800094V0100
Part. No. 800094V0300
Part. No. 800094V0500
Part. No. 800094V1000
Part. No. 800094V2000

24 V DC control cable
Part. No. 800091V0100
Part. No. 800091V0300
Part. No. 800091V0500
Part. No. 800091V1000
Part. No. 800091V2000

56 V DC control cable
Part. No. 800093V0100
Part. No. 800093V0300
Part. No. 800093V0500
Part. No. 800093V1000
Part. No. 800093V2000

Part. No. 800102V0002

Part. No. 800102V0002
Part. No. 800102V1002
–

–

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.37

C09

Turbomolecular Pumps with Magnetic Rotor Suspension

without Compound Stage

TURBOVAC 340 M
Typical Applications
◆ Gas analysis systems
◆ Particle accelerators
◆ Electron beam microscopy
◆ Research instruments and systems

Technical Features

ød
DN 100

C

A

◆ Magnetic suspension

b1

60°

F

◆ Absolutely free of any lubricants

B

◆ Low noise and vibration levels

ød1
a1

C
h

B

E

F1

h6

F2
E

◆ Convection cooling

b

D

◆ Purge gas design

a

h2
h4 h5

◆ Operation in any orientation

60°

h3

Top view

F3
h1

DN
100 ISO-K mm
in.
100 CF
mm
in.
160 ISO-K mm
in.
160 CF
mm
in.
Dimensional drawing for the TURBOVAC 340 M

10
10

Pumping Speed

Ixs

-6

10

-5

a
99
3.90
99
3.90
99
3.90
99
3.90

a1
101
3.98
101
3.98
101
3.98
101
3.98

b
101
3.98
101
3.98
101
3.98
101
3.98

10

-4

b1
50
1.97
50
1.97
50
1.97
50
1.97

d
178
7.01
178
7.01
178
7.01
178
7.01

d1
28
1.10
28
1.10
28
1.10
28
1.10

10

-3

h
311
12.24
322
12.24
311
12.24
308
12.13

h1
12
0.47
12
0.47
12
0.47
12
0.47

h2
162
6.38
162
6.38
162
6.38
162
6.38

h3
109
4.29
109
4.29
109
4.29
109
4.29

h4
123
4.84
123
4.84
123
4.84
123
4.84

-2

Torr

10

h5
114
4.49
114
4.49
114
4.49
114
4.49

h6
80
3.15
80
3.15
80
3.15
80
3.15

0.075

Advantages to the User
◆ Maintenance-free

3

◆ Convection cooling

-1

◆ No batteries are required because of integrated generator mode in case of power failures

2

108
6
4

2

10

1

10

-6

2

4

6 8

-5

-4

10
10
10
N2
Inlet Pressure
He
H2
Pumping speed of the TURBOVAC 340 M as a function of the inlet pressure

C09.38

-3

10

-2

mbar

10

-1

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

without Compound Stage

Turbomolecular Pumps with Magnetic Rotor Suspension

Technical Data

TURBOVAC 340 M

Inlet flange
Pumping speed
N2
He
H2

DN
I x s-1
I x s-1
I x s-1

Speed

100 ISO-K • 100 CF

160 ISO-K • 160 CF

250
370
340

400
400
370

rpm

Compression ratio
N2
He
H2

51,600
> 109
6.4 x 104
2.5 x 103

Ultimate pressure

mbar (Torr)

< 10-10 (< 0.75 x 10-10)

Max. foreline pressure for N2

mbar (Torr)

5 x 10-1 (3.75 x 10-1)

Recommended fore-vacuum pump

TRIVAC D 16 B
EcoDry L

Run-up time

min

3.5

Fore-vacuum flange

DN

25 KF

Purge / vent port

DN

10 KF

Cooling water connections, hose nipple
Weight, approx.

not required
kg (lbs)

Ordering Information
TURBOVAC turbomolecular pump
with high-vacuum connection flange
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF

16 (35)

TURBOVAC 340 M

C09

Part No. 855 80
Part No. 855 81
Part No. 855 82
Part No. 855 83

Accessories for all pumps
Flange heater
DN 100 CF, 230 V
DN 160 CF, 230 V
DN 160 CF, 110 V

Part No. 854 27
Part No. 854 37
Part No. 854 38

Electronic frequency converter TURBOTRONIK NT 340 M
100 V
120 V
230 V

Part No. 857 31
Part No. 857 30
Part No. 857 29

Connection line

see TURBOTRONIK

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.39

Turbomolecular Pumps with Magnetic Rotor Suspension

without Compound Stage

MAG 400 C/CT
Typical Applications
◆ All major semiconductor processes such as
Etch, CVD and Ion Implantation
◆ Gas analysis systems
◆ Particle accelerators
◆ Electron beam microscopy
◆ Research instruments and systems
◆ Load locks and transfer chambers

Technical Features

ød
DN 100

E

A

◆ Magnetic suspension

b1

60˚

b

F
h

B

a1

F1

D

◆ Low noise and vibration levels
◆ Operation in any orientation

B

C

◆ Optimized corrosion-resistant advanced rotor
design

60˚

h1
h3

F2
h4 h5

◆ High temperature and high stress tolerance
material

a2

D

h2

a

E

◆ Temperature management system (TMS) for
etch application

F3
Top view
a
mm
in.

Dimensional drawing for the MAG 400 CT

a1

b

b1

d

◆ Patented KEPLA-COAT® for rotor and stator
to prevent corrosion

h

h1

h2

h3

h3

h4

h5

100 114 111 186 178 50 300 162 109 123 114 80
3.94 4.49 4.37 7.32 7.01 1.97 11.81 6.38 4.29 4.84 4.49 3.15

Advantages to the User

1000

◆ Maintenance-free

Pumping Speed

Ixs

-1

◆ Optimized vacuum performance
◆ Resistant against corrosive gases and process
by-products

100

◆ Robust against shock-venting
◆ Temperature control for metal etch
10

◆ No deposition of etch by products due to TMS

8
6

N2

4

H2

2

1
10

-4

2

4

6

8

10

-3

10

-2

10

-1

mbar

10

Inlet Pressure

Pumping speed of the MAG 400 as a function of the inlet pressure

C09.40

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

without Compound Stage

Technical Data

400 C

Inlet flange
Pumping speed
N2
H2

DN

MAG

235
174

rpm

51,600 / 43,860

Compression ratio
N2
H2

> 109
2.5 x 103

Ultimate pressure

mbar (Torr)

< 10-10 (< 0.75 x 10-10)

Max. foreline pressure for N2

mbar (Torr)

5 x 10-1 (3.75 x 10-1)

Recommended fore-vacuum pump

TRIVAC D 65 BCS

Run-up time

min

3.5

Fore-vacuum flange

DN

25 KF

Purge / vent port

DN

10 KF

Cooling water connections,hose nipple
Weight, approx.

mm (in.)

7.5 (0.30)

kg (lbs)

16 (35)

Ordering Information
MAG turbomolecular pump

400 C

MAG

Part No. 894 62
Part No. 857 32

Connection line motor

Part No. 859 10

Connection line bearing

Part No. 859 11
–

Purge gas and venting valve
110 V, 50/60 Hz
230 V, 50/60 Hz
024 V DC, 5 W
Seal kit
Seal kit and Operating Instructions

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

400 CT
Part No. 894 63

Frequency converter TURBOTRONIK NT 340 MA (120 V)

Accessories for the temperature control

400 CT

100 ISO-K

I x s-1
I x s-1

Speed (high / low)

Turbomolecular Pumps with Magnetic Rotor Suspension

C09
see TURBOTRONIK

Part No. 855 48
Part No. 855 49
Part No. 174 17
Part No. 200 91 240
Part No. 200 91 437

C09.41

Turbomolecular Pumps with Magnetic Rotor Suspension

without Compound Stage

MAG 1500 C/CT
Typical Applications
◆ All major semiconductor processes such as
Etch, CVD, PVD and Ion Implantation
◆ Load locks and transfer chambers

Technical Features

26°

Top view

ød

◆ Active 5-axis magnetic bearing system

a2

h7

◆ Patented KEPLA-COAT® for rotor and stator
to prevent corrosion

°
70

ød1
ød2
a1

°
60

b

h4

h2

◆ Low noise and vibration levels

b1
ød6

◆ Operation in any orientation

ød5

b2

◆ Advanced rotor design for high throughput

30°

h

ød3

h3

Heatband

h1

DN 40 KF
a3
h7

◆ Integrated purge gas system
60
°

a5

h6

a4

a
ød4

200 ISO-F mm
in.
250 ISO-F mm
in.

105°

a

a1

a2

a3

a4

a5

b

b1

b2

d

164.5
6.48
164.5
6.48

159
6.26
159
6.26

116.5
4.59
116.5
4.59

M8 x 15
M8 x 0.6
M8 x 15
M8 x 0.6

32
1.26
32
1.26

9
0.35
9
0.35

182
7.17
182
7.17

3
0.12
3
0.12

150
5.91
150
5.91

285
11.22
335
11.22

d1

d2

260 213
10.24 8.39
310 213
12.20 10.28

d3

d4

d5

d6

262
10.31
262
10.31

175
6.89
175
6.89

285
11.22
285
11.22

243
9.57
243
9.57

h

h1

h2

307 296 279
12.0911.65 10.98
307 296 279
12.0911.65 10.98

h3
231
9.09
231
9.09

h4

h5

200 118
7.87 4.65
200 118
7.87 4.65

h6

h7

84
3.31
84
3.31

16
0.63
16
0.63

Dimensional drawing for the MAG 1500 CT

◆ Bearing and temperature system are controlled digitally
◆ Intelligent power control system

Advantages to the User

10000
Ixs

◆ CT versions: Integrated temperature
management system

◆ Maintenance-free

-1

◆ High throughput for all process gases
Pumping Speed

1000

◆ High pumping speed at low pressure
◆ High foreline pressure tolerance:
up to 1.7 mbar (1.13 Torr)

100

◆ High resistance against corrosive gases
◆ Robust against particles and deposits
◆ Temperature control up to 90 °C (194 °F) to
avoid condensation

N2
He
H2

10

8
6
4

◆ Lowest weight and size in its class

2

1
-4
10

2

4

6

8

10

-3

Pumping speed of the MAG 1500 as a function of the inlet pressure

C09.42

10

-2

10

-1

mbar

10

◆ Application specific design

Inlet Pressure

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

without Compound Stage

Technical Data

MAG

1500 C

Inlet flange
Pumping speed
N2
He
H2

Turbomolecular Pumps with Magnetic Rotor Suspension

DN
I x s-1
I x s-1
I x s-1

Speed

200 ISO-F

250 ISO-F

200 ISO-F

250 ISO-F

1100
1150
920

1220
1220
1020

1100
1150
920

1220
1220
1020

rpm

36,000

Compression ratio
N2

> 108

Ultimate pressure

mbar (Torr)

< 10-8 (< 0.75 x 10-8)

Max. foreline pressure for N2

mbar (Torr)

1.7 (1.2)

Recommended fore-vacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h

TRIVAC D 65 BCS

Run-up time

min

<6

Fore-vacuum flange

DN

40 KF

Purge / vent port

VCR Nut

1/4"

Cooling water connections,hose nipple

mm (in.)

6.4 (0.25)

kg (lbs)

32 (70)

Weight, approx.

Ordering Information
MAG turbomolecular pump

1500 CT

1500 C
Part No. 400020V0001

MAG.DRIVEdigital converter
Plug-in control
MAG.DRIVEdigital
with DeviceNet
with Echolon
Connecting cables converter–pump
1.5 m (5.25 ft) DRIVE/BEARING
1.5 m (5.25 ft) TMS
05 m (17.5 ft) DRIVE/BEARING
05 m (17.5 ft) TMS
10 m (35 ft) DRIVE/BEARING
10 m (35 ft) TMS
20 m (70 ft) DRIVE/BEARING
20 m (70 ft) TMS
Seal kit
DN 200 standard
DN 250 standard
DN 250 metal

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

MAG

Part No. 400021V0001

1500 CT

Part No. 400020V0002

Part No. 400021V0002

Part No. 400035V0001
Part No. 121 36
upon request
upon request
Part No. 400036V0001
Part No. 400037V0001
Part No. 400036V0004
Part No. 400037V0004
Part No. 400036V0002
Part No. 400037V0002
Part No. 400036V0003
Part No. 400037V0003

upon request
upon request
Part No. 200 07 901

C09.43

C09

Turbomolecular Pumps with Magnetic Rotor Suspension

without Compound Stage

MAG 2000 C/CT
Typical Applications
◆ All major semiconductor processes such as
Etch, CVD, PVD and Ion Implantation
◆ Load locks and transfer chambers

Technical Features
Only CT

h5

ød

ød1

◆ Active 5-axis magnetic bearing system
◆ Patented KEPLA-COAT® for rotor and stator
to prevent corrosion

Only CT
ød4

h

h1

◆ Low noise and vibration levels

h2
30°

ød5

DN 40

h3

◆ Operation in any orientation
◆ Advanced rotor design for high throughput

h4

◆ Integrated purge gas system
Top view

ød3

◆ CT versions: Integrated temperature
management system

Only CT
Only CT
d
mm
in.

d1

d2

d3

d4

d5

h

h1

h2

h3

h4

h5

335 310 335 199 284 11 303 272 318 386 40
16
13.19 12.20 13.19 7.83 11.18 0.43 11.93 10.71 12.52 15.20 1.57 0.63

Dimensional drawing for the MAG 2000 C/CT

Advantages to the User

10000

◆ Maintenance-free
Ixs

-1

◆ High throughput for all etch gases

Pumping Speed

1000

◆ High pumping speed at low pressure
◆ High foreline pressure tolerance: up to 2 mbar
(1.5 Torr)

100

◆ High resistance against corrosive gases
◆ Robust against particles and deposits
◆ Temperature management system to avoid
condensation

N2
He
H2

10

8
6
4

◆ Application specific design

2

1
-4
10

2

4

6

8

10

-3

10

-2

10

-1

10

Pumping speed of the MAG 2000 CT (DN 250) as a function of the inlet pressure Inlet Pressure

C09.44

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

without Compound Stage

Technical Data

2000 C

Inlet flange
Pumping speed
N2
He
H2

Turbomolecular Pumps with Magnetic Rotor Suspension

DN

250 ISO-F

I x s-1
I x s-1
I x s-1

Speed

MAG

250 ISO-F
1550
1780
1390

rpm

28,800

Compression ratio
N2

> 108

Ultimate pressure

mbar (Torr)

< 10-8 (< 0.75 x 10-8)

Max. foreline pressure for N2

mbar (Torr)

1.6 (1.2)

Recommended fore-vacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h

TRIVAC D 65 BCS

Run-up time

min

<8

Fore-vacuum flange

DN

40 KF

Purge / vent port

VCR nut

1/4"

Cooling water connections,hose nipple

mm (in.)

6.4 (0.25)

kg (lbs)

68 (150)

Weight, approx.

Ordering Information
MAG turbomolecular pump

2000 CT

2000 C

MAG

Part No. 894 16
Part No. 121 35

Plug-in control

Part No. 121 36

Seal kit
DN 200
DN 250

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09

Part No. 894 30

MAG.DRIVE 2000 converter

Connecting cables converter–pump
1.5 m (5.25 ft) BEARING
1.5 m (5.25 ft) DRIVE/TMS
03 m (10.5 ft) BEARING
03 m (10.5 ft) DRIVE/TMS
05 m (17.5 ft) BEARING
05 m (17.5 ft) DRIVE/TMS
10 m (35 ft) BEARING
10 m (35 ft) DRIVE/TMS
20 m (70 ft) BEARING
20 m (70 ft) DRIVE/TMS

2000 CT

Part No. 121 29
Part No. 121 30
Part No. 121 17
Part No. 121 18
Part No. 121 19
Part No. 121 20
Part No. 121 21
Part No. 121 22
Part No. 121 25
Part No. 121 26

Part No. 200 91 684
Part No. 200 91 641

C09.45

Turbomolecular Pumps with Magnetic Rotor Suspension

with Compound Stage

MAG W 830/1300 C
Typical Applications
◆ Semiconductor processes, like PVD and ion
implantation
◆ Transfer chambers
◆ Particle accelerators
◆ Research
◆ Coaters

A

Upper View

20°

30°

Technical Features

40°

◆ Active 5-axis magnetic bearing system

E

◆ Digital monitoring of the bearing system

ØN

O

ØB
F

Forevacuum
connection

ØC

R

P

◆ Low noise and vibration levelssystem
◆ Operation in any orientationlevelssystem

Q
M8

◆ Advanced rotor design for high throughput

°
50

G

L
H

K
ØD

J

MAG W 830 C

DN 40 KF
DN 40 KF
MAG W 1300 C DN 40 KF/
DN 25 KF
DN 40 KF/
DN 25 KF
MAG W 1300 C DN 40 KF
DN 40 KF

A

30°

S

B

C

D

E

F

G

H

J

K

L

M

N

◆ Intelligent power control system

30°

O

P

Q

R

S

225 262 260 175 16 353 72 50 113 35 109.5 163 243 103 114.7 98 8.3 85
8.86 10.3110.24 6.89 0.63 13.9 2.83 1.97 4.45 1.38 4.31 6.42 9.57 4.06 4.52 3.86 0.33 3.35
285 262 260 175 16 306 72 50 113 35 109.5 163 243 103 114.7 98 8.3 85

160 ISO-F mm
160 ISO-F in.
200 ISO-F mm
250 ISO-F

30°

M

Fore vacuum Inlet
flange
flange

◆ Purge gas system

31

in. 11.2210.3110.24 6.89 0.63 12.05 2.83 1.97 4.45 1.38 4.31 6.42 9.57 4.06 4.52 3.86 0.33 3.35

250 ISO-F mm 335 262 260 175 16 306 72 50 113 35 109.5 163 243 103 114.7 98 8.3 85
250 ISO-F in. 13.1910.3110.24 6.89 0.63 12.05 2.83 1.97 4.45 1.38 4.31 6.42 9.57 4.06 4.52 3.86 0.33 3.35

Dimensional drawing for the MAG W 830/1300 C

Advantages to the User

10000
Ixs

◆ Maintenance-free

-1

◆ High throughput for all process gases
Pumping Speed

1000

◆ High pumping speed at low pressure
◆ High foreline pressure tolerance: up to 2 mbar
(1.5 Torr)

100

◆ Lowest weight and size in its class
◆ Application specific design
N2
He
H2

10

8
6
4
2

1
-4
10

2

4

6

8

10

-3

Pumping speed of the MAG W 1300 C (DN 250) as a function of the inlet pressure

C09.46

10

-2

10

-1

mbar

10

Inlet Pressure

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Technical Data

Turbomolecular Pumps with Magnetic Rotor Suspension

W 830 C

Inlet flange

DN

MAG

W 1300 C

160 ISO-F

200 ISO-F

250 ISO-F

1100
1050
920

1220
1180
1020

Pumping speed
N2
He
H2

I x s-1
I x s-1
I x s-1

700
650
300

Speed

min-1

24 000

36 000

> 5 x 107

> 108

Compression
N2
Ultimate pressure

mbar (Torr)

< 10-8 (< 0.75 x 10-8)

Max. fore-line pressure for N2

mbar (Torr)

2 (1.5)

Recommended fore-vacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h

TRIVAC D 65 BCS

Run-up time

min

Fore vacuum flange

DN

Purge / vent port
Cooling water connection (tube AD)
Weight, approx.

<6
40 KF
10/16 KF

DN
mm (in.)

1/4"

6 (0.24)
32 (70.6)

kg (lbs)

Ordering information
MAG turbomolecular pump

<4

W 830 C
Part No. 400100V0005

MAG.DRIVEdigital converter

MAG

Part No. 400110V0011

Part No. 121 36

Purge gas valve

Part No. 121 33

Connecting cable converter–pump
1.5 m (5.25 ft) DRIVE/BEARING
03 m (10.5 ft) DRIVE/BEARING
05 m (17.5 ft) DRIVE/BEARING
10 m (35 ft) DRIVE/BEARING
20 m (70 ft) DRIVE/BEARING

Part No. 400036V0001
Part No. 400036V0006
Part No. 400036V0004
Part No. 400036V0002
Part No. 400036V0003

Connecting cable for purge gas valve
1.5 m (5.25 ft) pump/converter
03 m (10.5 ft) pump/converter
10 m (35 ft) pump/converter

Part No. 400038V0001
Part No. 400038V0006
Part No. 400038V0002

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Part No. 400110V0021

Part No. 400035V0001

Plug-in control

Sealing kit
DN 200 standard
DN 250 standard
DN 250 metal

W 1300 C

upon request
upon request
Part No. 200 07 901

C09.47

C09

Turbomolecular Pumps with Magnetic Rotor Suspension

with Compound Stage

MAG W 1500 C/CT
Typical Applications
◆ All major semiconductor processes such as
Etch, CVD, PVD and Ion Implantation

Technical Features

26°

Top view

ød

◆ Active 5-axis magnetic bearing system

a2

h7

◆ Bearing and temperature system are controlled digitally

°
70

ød1
ød2
a1

°
60

b

h4

h2

◆ Corrosion resistant

b1
ød6

◆ Low noise and vibration levels

ød5

b2

◆ Operation in any orientation

30°

h

ød3

h3

Heatband

h1

DN 40 KF
a3
h7

◆ Compound rotor design for high pumping
speed and foreline pressure

60
°

a5

h6

a4

a
ød4

a

a1

a2

a3

200 ISO-F mm 164.5 159 116.5 M8 x 15
in. 6.48 6.26 4.59 M8 x 0.6
250 ISO-F mm 164.5 159 116.5 M8 x 15
in. 6.48 6.26 4.59 M8 x 0.6

105°

a4

a5

b

b1

b2

32
1.26
32
1.26

9
0.35
9
0.35

182
7.17
182
7.17

3
0.12
3
0.12

150
5.91
150
5.91

d

d1

d2

d3

285 260 213 262
11.22 10.24 8.39 10.31
335 310 213 262
11.22 12.20 10.28 10.31

d4

d5

d6

175
6.89
175
6.89

285
11.22
285
11.22

243
9.57
243
9.57

h

h1

h2

307 296 279
12.09 11.65 10.98
307 296 279
12.09 11.65 10.98

h3

h4

231
9.09
231
9.09

200
7.87
200
7.87

Dimensional drawing for the MAC W 1500 CT

h5

118 84
4.65 3.31
118 84
4.65 3.31

◆ Integrated purge gas system
◆ CT versions: Integrated temperature
management system
◆ Intelligent power control system

Advantages to the User

10000
Ixs

h5

◆ Maintenance-free

-1

◆ High throughput for all process gases
Pumping Speed

1000

◆ High pumping speed at low pressure
◆ High foreline pressure tolerance:
up to 2.6 mbar (1.95 Torr)

100

◆ High resistance against corrosive gases
◆ Robust against particles and deposits
N2
He
H2

10

8
6
4

◆ Temperature control up to 90 °C (194 °F) to
avoid condensation

2

1
10

◆ Lowest weight and size in its class
-4

2

4

6

8

10

-3

10

-2

Inlet Pressure

10

-1

mbar

10

◆ Application specific design

Pumping speed of the MAG W 15000 CT (DN 250) as a function of the inlet pressure

C09.48

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Technical Data

MAG

W 1500 C

Inlet flange
Pumping speed
N2
He
H2

Turbomolecular Pumps with Magnetic Rotor Suspension

DN
I x s-1
I x s-1
I x s-1

Speed

200 ISO-F

250 ISO-F

200 ISO-F

250 ISO-F

200 CF

1100
1150
920

1220
1220
1020

1100
1150
920

1220
1220
1020

1100
1150
920

< 10-8
(< 0.7 x 10-8)

< 10-8
(< 0.7 x 10-8)

< 10-9
(< 0.7 x 10-9)

rpm

36 000

Compression ratio
N2
Ultimate pressure
Max. foreline pressure for N2

> 108
< 10-8
(< 0.7 x 10-8)

mbar
(Torr)
mbar (Torr)

2.6 (1.95)

Recommended fore-vacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h

TRIVAC D 65 BCS

Run-up time

min

<6

Fore-vacuum flange

DN

40 KF
1/4"

Purge / vent port

VCR Nut

Cooling water connections, hose nipple

mm (in.)

6.4 (0.25)

kg (lbs)

32 (70.64)

Weight, approx.

Ordering Information
MAG turbomolecular pump

W 1500 CT

MAG

W 1500 C
Part No.
400026V0001

MAG.DRIVEdigital converter
Plug-in control
Connecting cables converter–pump
1.5 m (5.25 ft) DRIVE/BEARING
1.5 m (5.25 ft) TMS
05 m (17.5 ft) DRIVE/BEARING
05 m (17.5 ft) TMS
10 m (35 ft) DRIVE/BEARING
10 m (35 ft) TMS
20 m (70 ft) DRIVE/BEARING
20 m (70 ft) TMS
Seal kit
DN 200 standard
DN 250 standard
DN 250 metal

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Part No.
400027V0001

Part No.
400026V0002

W 1500 CT
Part No.
400027V0002

Part No.
400030V0002

400035V0001
Part No. 121 36
Part No. 400036V0001
Part No. 400037V0001
Part No. 400036V0004
Part No. 400037V0004
Part No. 400036V0002
Part No. 400037V0002
Part No. 400036V0003
Part No. 400037V0003

upon request
upon request
Part No. 200 07 901

C09.49

C09

Turbomolecular Pumps with Magnetic Rotor Suspension

with Compound Stage

MAG W 2000 C/CT
Typical Applications
◆ All major semiconductor processes such as
Etch, CVD, PVD and Ion Implantation

Technical Features
Only CT

h5

ød

ød1

◆ Active 5-axis magnetic bearing system
◆ Patented KEPLA-COAT® for rotor and stator
to prevent corrosion

Only CT
ød4

h

h1

◆ Low noise and vibration levels

h2
30°

ød5

DN 40

h3

◆ Compound rotor design for high pumping
speed and foreline pressure

h4

Top view

ød3

◆ Integrated purge gas system

Only CT

◆ CT versions: Integrated temperature
management system

Only CT
d
mm
in.

◆ Operation in any orientation

d1

d2

d3

d4

d5

h

h1

h2

h3

h4

h5

335 310 335 199 284 11 303 272 318 386 40
16
13.19 12.20 13.19 7.83 11.18 0.43 11.93 10.71 12.52 15.20 1.57 0.63

Dimensional drawing for the MAG W 2000 C/CT

Advantages to the User

10000
Ixs

◆ Maintenance-free

-1

Pumping Speed

◆ High throughput for all etch gases
1000

◆ High pumping speed at low pressure
◆ High foreline pressure tolerance: up to
5.3 mbar (4 Torr)

100

◆ High resistance against corrosive gases
◆ Robust against particles and deposits
N2
He
H2

10

8
6
4

◆ Temperature management system to avoid
condensation
◆ Application specific design

2

1

10

-4

2

4

6

8

10

-3

10

-2

10

-1

mbar

10

Inlet Pressure

Pumping speed of the MAG W 2000 CT (DN 250) as a function of the inlet pressure

C09.50

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Technical Data

W 2000 C

Inlet flange
Pumping speed
N2
He
H2

Turbomolecular Pumps with Magnetic Rotor Suspension

DN

250 ISO-F

I x s-1
I x s-1
I x s-1

Speed

MAG

250 ISO-F
1650
1800
1720

rpm

28,800

Compression ratio
N2

> 108

Ultimate pressure

mbar (Torr)

< 10-8 (< 0.75 x 10-8)

Max. foreline pressure for N2

mbar (Torr)

3.5 (2.625)

Recommended fore-vacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h

TRIVAC D 65 BCS

Run-up time

min

<8

Fore-vacuum flange

DN

40 KF

Purge / vent port

VCR nut

1/4"

Cooling water connections, hose nipple

mm (in.)

6.4 (0.25)

Weight, approx.

kg (lbs)

Ordering Information
MAG turbomolecular pump

W 2000 CT

62 (137)

W 2000 C

MAG

Part No. 894 17
Part No. 121 35

Plug-in control

Part No. 121 36

Seal kit
DN 200
DN 250

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09

Part No. 894 31

MAG.DRIVE 2000 converter

Connecting cables converter–pump
1.5 m (5.25 ft) BEARING
1.5 m (5.25 ft) DRIVE/TMS
03 m (10.5 ft) BEARING
03 m (10.5 ft) DRIVE/TMS
05 m (17.5 ft) BEARING
05 m (17.5 ft) DRIVE/TMS
10 m (35 ft) BEARING
10 m (35 ft) DRIVE/TMS
20 m (70 ft) BEARING
20 m (70 ft) DRIVE/TMS

W 2000 CT

Part No. 121 29
Part No. 121 30
Part No. 121 17
Part No. 121 18
Part No. 121 19
Part No. 121 20
Part No. 121 21
Part No. 121 22
Part No. 121 25
Part No. 121 26

Part No. 200 91 684
Part No. 200 91 641

C09.51

Turbomolecular Pumps with Magnetic Rotor Suspension

with Compound Stage

MAG W 2200 C
Typical Applications
◆ All major semiconductor processes such as
Etch, CVD, PVD and Ion Implantation
◆ Coaters

ØA

36.5

Technical Features
°

◆ Active 5-axis magnetic bearing system

39

◆ Bearing and temperature system are controlled digitally

J
D

◆ Corrosion resistant

L
K

◆ Low noise and vibration levels

45°

DN 40 KF

36°

ØB

◆ Operation in any orientation
8°

E

◆ Compound rotor design for high pumping
speed and foreline pressure

H
G

Upper View

F
ØC

200 ISO-F

mm
in.

250 ISO-F

mm
in.

Dimensional drawing for the MAG W 2200 C

A

B

C

D

285

317

199

396

E

317

199

371

G

85.5 164.6

11.22 12.48 7.83 15.59 3.37
335

F

6.48

85.5 164.6

13.19 12.48 7.83 14.61 3.37

6.48

H

J

K

23

78

117

120

155

0.91

3.07

4.61

4.72

6.10

23

78

117

120

155

0.91

3.07

4.61

4.72

6.10

◆ CT versions: Integrated temperature
management system
◆ Intelligent power control system

◆ Maintenance-free

-1

◆ High throughput for all process gases

1000
Pumping Speed

◆ Integrated purge gas system

Advantages to the User

10000
I·s

L

◆ High pumping speed at low pressure
◆ High foreline pressure tolerance: up to 2 mbar
(1.5 Torr)

100

◆ High resistance against corrosive gases
◆ Robust against particles and deposits
N2
He
H2

10

8
6
4

◆ Temperature control up to 90 °C (194 °F) to
avoid condensation

2

1
-4
10

◆ Lowest weight and size in its class
2

4

6

8

10

-3

10

-2

10

-1

mbar

10

◆ Application specific design

Inlet Pressure

Pumping speed of the MAG W 2200 C (DN 250) as a function of the inlet pressure

C09.52

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

with Compound Stage

Turbomolecular Pumps with Magnetic Rotor Suspension

Technical Data

MAG W 2200 C

Inlet flange

DN

Pumping speed
N2
Ar
H2

I x s-1
I x s-1
I x s-1

Speed

min-1

200 ISO-F

250 ISO-F

1600
1450
1650

2000
1900
1800
29 400

Compression
N2

> 108
mbar

< 10-8

mbar (Torr)

2 (1.5)

Ultimate pressure
Max. fore-line pressure for N2
Recommended fore-vacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h

TRIVAC D 65 BCS

Run-up time to 95% speed

min

<8

Fore vacuum flange

DN

40 KF

VCR

1/4"

mm (in.)

1/2"

kg (lbs)

48 (106)

Purge / vent port
Cooling water connection (tube AD)
Weight, approx.

Ordering information
MAG turbomolecular pump

MAG W 2200 C
Part No. 400081V0011

MAG.DRIVEdigital converter
Plug-in control
Connecting cable converter–pump
1.5 m (5.25 ft) DRIVE/BEARING
1.5 m (5.25 ft) TMS
03 m (10.5 ft) DRIVE/BEARING
03 m (10.5 ft) TMS
05 m (17.5 ft) DRIVE/BEARING
05 m (17.5 ft) TMS
10 m (35 ft) DRIVE/BEARING
10 m (35 ft) TMS
20 m (70 ft) DRIVE/BEARING
20 m (70 ft) TMS
Sealing kit
DN 200 standard
DN 250 standard
DN 250 metal

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09

Part No. 400081V0021
Part No. 400035V0001
Part No. 121 36
Part No. 400036V0001
Part No. 400037V0001
Part No. 400036V0008
Part No. 400037V0008
Part No. 400036V0004
Part No. 400037V0004
Part No. 400036V0002
Part No. 400037V0002
Part No. 400036V0003
Part No. 400037V0003

upon request
upon request
Part No. 200 07 901

C09.53

Turbomolecular Pumps with Magnetic Rotor Suspension

with Compound Stage

MAG W 2800/3200 C/CT
Typical Applications
◆ All major semiconductor processes such as
Etch, CVD, PVD and Ion Implantation

MAG W 2800 CT (left) and MAG W 3200 CT (right)

Technical Features

Top View

øA

O

øB
øC

◆ Active 5-axis magnetic bearing system

50,5 °

◆ Bearing and temperature system are controlled digitally

30 °
øM

øN

◆ Corrosion resistant

M 8, 14 depth

H
E

øD
J

F

DN 40 KF

◆ Low noise and vibration levelssystem

42 °

◆ Operation in any orientationlevelssystem
◆ Compound rotor design for high pumping
speed and foreline pressure

102 °

137 °

◆ Integrated purge gas system

G
L
K

Inlet flange

A

250 ISO-F
250 ISO-F
320 ISO-F
320 ISO-F
350 JIS
350 JIS

B

C

D

E

mm 335 310 261 369 408
in. 13.19 12.2 10.28 14.53 16.06
mm 425 395 318 369 363
in. 16.73 15.55 12.52 14.53 14.29
mm 450 420 318 369 363
in. 17.72 16.54 12.52 14.53 14.29

F

G

H

J

K

L

176 84 361 293 199 196.5
6.93 3.31 14.21 11.54 7.83 7.74
176 84 361 248 199 196.5
6.93 3.31 14.21 9.76 7.83 7.74
176 84 361 248 199 196.5
6.93 3.31 14.21 9.76 7.83 7.74

Dimensional drawing for the MAG W 2800/3200 C/CT

M

N

O

353
13.9
353
13.9
353
13.9

415
16.34
415
16.34
415
16.34

32
1.26
32
1.26
32
1.26

◆ CT versions: Integrated temperature
management system
◆ Intelligent power control systemt

Advantages to the User
◆ Maintenance-free

10000
I·s

◆ High throughput for all process gases

-1

◆ High pumping speed at low pressure
◆ High foreline pressure tolerance: up to 2 mbar
(1.5 Torr)

Pumping Speed

1000

◆ High resistance against corrosive gases

100

◆ Robust against particles and deposits
◆ Temperature control up to 90 °C (194 °F) to
avoid condensation

N2
He
H2

10

8
6
4

◆ Lowest weight and size in its class

2

1
-4
10

2

4

6

8

10

-3

10

-2

10

-1

mbar

10

◆ Application specific design

Inlet Pressure

Pumping speed of the MAG W 3200 C (DN 250) as a function of the inlet pressure

C09.54

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pumps with Magnetic Rotor Suspension

with Compound Stage

Technical Data
Inlet flange

DN

Pumping speed
N2
Ar
H2

I x s-1
I x s-1
I x s-1

Speed

min-1

W 2800 C

W 2800 CT

250 ISO-F

250 ISO-F

MAG
320 ISO-F

2650
2450
2100
28 800
> 108

Ultimate pressure

mbar (Torr)

< 10-8 (< 0.75 x 10-8)

Max. fore-line pressure for N2

mbar (Torr)

2 (1.5)

Recommended fore-vacuum pump
Rotary vane pump
or dry compressing pump offering
a pumping speed of 100 m3/h

TRIVAC D 65 BCS

Run-up time

min

< 10

Fore vacuum flange

DN

40 KF

VCR

1/4"

Swagelok tube

1/4"

Purge / vent port

Weight, approx.

64 (141.3)

kg (lbs)

Ordering information
MAG turbomolecular pump

350 JIS
3200
3000
2250

Compression ratio
N2

Cooling water connection

W 3200 CT

65 (143.5)

W 2800 C

W 2800 CT

Part No. 400000V0001

Part No. 400000V0002

MAG.DRIVEdigital converter
Plug-in control
Connecting cable converter–pump
1,5 m (5.25 ft) DRIVE/BEARING
1,5 m (5.25 ft) TMS
03 m (10.5 ft) DRIVE/BEARING
03 m (10.5 ft) TMS
05 m (17.5 ft) DRIVE/BEARING
05 m (17.5 ft) TMS
10 m DRIVE/BEARING
10 m TMS
20 m (70 ft) DRIVE/BEARING
20 m (70 ft) TMS
Sealing kit
DN 200 standard
DN 250 standard
DN 250 metal

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

MAG

66 (145.7)

W 3200 CT

Part No. 400003V0002

Part No. 400004V0002

Part No. 400035V0001
Part No. 121 36
Part No. 400036V0001
Part No. 400037V0001
Part No. 400036V0008
Part No. 400037V0008
Part No. 400036V0004
Part No. 400037V0004
Part No. 400036V0002
Part No. 400037V0002
Part No. 400036V0003
Part No. 400037V0003

upon request
upon request
Part No. 200 07 901

C09.55

C09

Turbomolecular Pumps with Magnetic Rotor Suspension

Electronic Frequency Converters

TURBOTRONIK NT 340 M
Tec hnic al Data
Mains connection, 50 to 60 Hz; selectable

V

100/120/220/240, +10%/-15 %

Max. output voltage

V

860/733

Overload current limit

A

7

Permissible ambient temperature
Dimensions (W x H x D)

Technical Features

NT 340 M

Weight, approx.

°C (°F)
mm (in.)

213 x 129 x 340 (8.39 x 5.08 x 13.39)

kg (lbs)

7 (15.4)

Order ing Information

◆ For operating the TURBOVAC 340 M
turbomolecular pump
◆ Compact control unit 1/2 19", 3 HU
◆ No batteries are required because of integrated generator mode in case of power failures
◆ Front panel with membrane keypad and LCD

Advantages to the User
◆ Convenient control and monitoring facilities

0 to +45 (32 to +113)

NT 340 M

100 V (Main cord with US plug)

Part No. 857 31

120 V (Main cord with US plug)

Part No. 857 30

230 V (Main cord with EURO plug)

Part No. 857 29

Connecting line leading to the connection
of the TURBOVAC
3 m (10.5 ft)
5 m (17.5 ft)

Part No. 857 70
Part No. 857 71

◆ Remote control and process control via
analog and programmable control inputs and
outputs
◆ Connection for backing pump, venting valve
and flange heater
◆ V.24/RS 232 C interface
b

b1

h

h1

h2

l

l1

l2

l3

mm 213 211 129 4.5 111 316 4.5 130 326
in. 8.39 8.31 5.08 0.18 4.37 12.44 0.18 5.12 12.83
b
b1

h

h1

l3

h2

l2

l

l1

Dimensional drawing for the TURBOTRONIK NT 340 M

C09.56

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pumps with Magnetic Rotor Suspension

Electronic Frequency Converters

TURBOTRONIK NT 340 MA
Tec hnic al Data

NT 340 MA

Main connection, 50-60 Hz
Power consumption TURBOVAC
including connected consumers
Max. output voltage
Motor / current limiting
Magnetic suspension / current limiting

Technical Features

Nominal frequency

◆ For operating the TURBOVAC 400 C/CT
turbomolecular pump

Overload current limit

◆ Compact control unit 1/2 19", 3 HU

Dimensions (W x H x D)

◆ No batteries are required because of integrated generator mode in case of power failures

Weight, approx.

Permissible ambient temperature

◆ Front panel with membrane keypad and LCD

Advantages to the User
◆ Convenient control and monitoring facilities
◆ Remote control and process control via
analog and programmable control inputs and
outputs
◆ Connection for backing pump, venting valve
and flange heater
◆ V.24/RS 232 C interface
◆ Temperature control for Aluminum etching
processes

V

120, +10%/-15 %

VA
VA

< 400
< 1 000

V/A
V/A

50 / 7
± 16 / ± 7

Hz

860/733

A

7

°C (°F)

0 to +45 (32 to +113)

mm (in.)

213 x 129 x 340 (8.39 x 5.08 x 13.39)

kg (lbs)

7 (15.4)

Or der ing Information

NT 340 MA

120 V (Main cord with US plug)

Part No. 857 32

Connecting line leading to the
motor of the TURBOVAC
3 m (10.5 ft)
bearing of the TURBOVAC
3 m (10.5 ft)

Part No. 859 10

C09

Part No. 859 11

Connection lines
to the heater (HEATER)
to the cooling water magnet valve (COOLER)
to the valve
to the temperature controll unit (I/O)

Part No. 859 31
Part No. 859 32
Part No. 859 33
Part No. 859 34
Part No. 859 39

to the Pt 100
Accessories for temperature control
Temperature control unit (TCU)
Temperature sensor Pt 100

Part No. 859 20
Part No. 859 22

b
b1

b
b1

h1
h1
h3

h

h3

h

d
d

b2
b3
b4

h2

b2
b3
b4

h2

d1

d1

l4
l3

l4

l3

h4
h4

b
l2

l

Dimensional drawing for the TURBOTRONIK NT 340 MA

l1

b1

b2

b3

b4

h

h1

h2

mm 219 211 109.5 198 202 132.5 122.5 5
99
in. 8.62 8.31 4.31 7.80 7.95 5.22 4.82 0.20 3.90
h4
l
l1
l2
l3
l4
l5 l6
l7

h3
l7
l8

mm 111 316 4.5 130 326 3
12 55 38 105
in. 4.37 12.44 0.18 5.12 12.83 0.12 0.47 0.17 1.50 4.13

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

l8

l5
l6

l

l1

l2
Dimensional drawing for the TURBOTRONIK NT 340 MA with
TCU temperature controll unit attached

C09.57

Turbomolecular Pumps with Magnetic Rotor Suspension

Electronic Frequency Converters

MAG.DRIVE digital

MAG.DRIVEdigital without plug-in control

MAG.DRIVEdigital with plug-in control

Advantages to the User
◆ Operation of turbomolecular pumps with
magnetically levitad rotors:
MAG W 830/1300 C, MAG W 1500 C/CT,
MAG W 2200 C und MAG W 2800/3200 C/CT
◆ Easy operation through the controls or the
use of plug-in control unit
◆ Communication to host computer of the
customer via serial interface and conventional
interface possible
◆ Setting of speed, temperature of the basic
flange and other functions
◆ Warning in case the pump is runnung out of
specification
◆ Storing of all parameters in the pump’s
memory
◆ Plug-in control
◆ Small size and low weight
◆ Integrated fan
◆ Integrated temperature management system
magnetic bearing control system
b

b1

d

h

h1

h2

h3

l

l1

l2

mm 213 198 3.3 113 135 128 122.4 455 27 100
in. 8.39 7.80 0.13 4.45 5.31 5.04 4.82 17.91 1.06 3.94
40°

l1

b

h1

h2

Dimensional drawing for the MAG.DRIVEdigital

C09.58

l

l3
70
2.76
l2

ød

b1

h3

h

l3

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Electronic Frequency Converters

Turbomolecular Pumps with Magnetic Rotor Suspension

MAG.DRIVEdigital

Tec hnic al Data
Main connection, 50/60 Hz

V

200 - 240, +10%/-15%

Current for connected consumers, max.

A

20

Max. motor voltage

V

60

Nominal frequency

Hz

50/60

Permissible ambient temperature

°C (°F)

Dimensions (W x H x D)
Weight, approx.

0 to +45 (32 to +113)

mm (in.)

483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")

kg (lbs)

10 (22)

MAG.DRIVEdigital

Or der ing Information

Part No. 400035V0001

MAG.DRIVEdigital

Part No. 121 36

Plug-in control
Connection line leading to the
DRIVE/Bearing of the MAG

01.5 m (5.25 ft)
01.5 m (5.25 ft)
03.0 m (10.5 ft)
03.0 m (10.5 ft)
03.0 m (10.5 ft)
05.0 m (17.5 ft)
05.0 m (17.5 ft)
08.0 m (28 ft)
10.0 m (35 ft)
20.0 m (70 ft)
23.0 m (80.5 ft)
30.0 m (105 ft)
MAG (only for CT versions)

Converter cable outlet
DRIVE/BEARING X20
bended 225°
straight
straight
bended 225°
straight
bended 225°
straight
bended 225°
bended 225°
bended 225°
bended 225°
bended 225°

Converter cable outlet
TMS X21
01.5 m (5.25 ft)
bended 225°
01.5 m (5.25 ft)
straight
03.0 m (10.5 ft)
bended 225°
05.0 m (17.5 ft)
bended 225°
08.0 m (28 ft)
bended 225°
10.0 m (35 ft)
bended 225°
20.0 m (70 ft)
bended 225°
Purge / Vent (only for optional purge vent valve Part No. 121 33)
Converter cable outlet
TMS X21
03.0 m (10.5 ft)
bended 225°
10.0 m (35 ft)
bended 225°

Pump cable outlet
DRIVE/BEARING X23
straight
straight
bended 180°
straight
bended 270°
straight
straight
straight
straight
straight
straight
straight

PK X24
straight
straight
straight
straight
straight
straight
straight
straight
straight
straight
straight
straight

Part No. 400036V0001
Part No. 400036V0007
Part No. 400036V0006
Part No. 400036V0008
Part No. 400036V0009
Part No. 400036V0004
Part No. 400036V0010
Part No. 400036V0005
Part No. 400036V0002
Part No. 400036V0003
Part No. 400036V0012
Part No. 400036V0012

Heater X31
bended 180°
bended 180°
bended 180°
bended 180°
bended 180°
bended 180°
bended 180°

Part No. 400037V0001
Part No. 400037V0007
Part No. 400037V0008
Part No. 400037V0004
Part No. 400037V0005
Part No. 400037V0002
Part No. 400037V0003

C09

Pump cable outlet
TMS X30
straight
straight
straight
straight
straight
straight
straight

Pump cable outlet
Purge
bended
bended

Connector for hardware interface
19" installation frame

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vent
bended
bended

Part No. 400038V0006
Part No. 400038V0002
upon request
Part No. 161 00

C09.59

Turbomolecular Pumps with Magnetic Rotor Suspension

Electronic Frequency Converters

MAG.DRIVE 2000

MAG.DRIVE 2000 without plug-in control

MAG.DRIVE 2000 with plug-in control

Advantages to the User
◆ Designed to operate the MAG 2000 C/CT and
MAG W 2000 C/CT turbomolecular pumps
◆ Easy operation through the controls or the
use of plug-in control unit
◆ Communication to host computer of the
customer via serial interface and conventional
interface possible, bus adapter optional
◆ Setting of speed, temperature of the basic
flange and other functions
◆ Warning in case the pump is runnung out of
specification
◆ Storing of all parameters in the pump’s
memory
◆ Plug-in control
◆ Small size and low weight
◆ Integrated fan
◆ Integrated temperature management system

Tec hnic al Data

MAG.DRIVE 2000

Main connection, 50/60 Hz

V

200 - 240, +10%/-15%

Current for connected consumers, max.

A

20

Max. output voltage

V

60

Nominal frequency

Hz

50/60

Permissible ambient temperature

°C (°F)

Dimensions (W x H x D)

0 to +45 (32 to +113)

mm (in.)

483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")

kg (lbs)

10 (22)

Weight, approx.

MAG.DRIVE 2000

Order ing Information
MAG.DRIVE 2000

Part No. 121 35

Plug-in control

Part No. 121 36

Connection line leading to the
bearing of the TURBOVAC
1.5 m (5.25 ft)
10 m (35 ft)
20 m (70 ft)
motor of the TURBOVAC
1.5 m (5.25 ft)
10 m (35 ft)
20 m (70 ft)

Part No. 121 29
Part No. 121 21
Part No. 121 25
Part No. 121 30
Part No. 121 22
Part No. 121 26

Connector for hardware interface

upon request

19" installation frame

b

b1

d

Part No. 161 00

h

h1

h2

h3

l

l1

l2

mm 213 198 3.3 113 135 128 122.4 455 27 100
in. 8.39 7.80 0.13 4.45 5.31 5.04 4.82 17.91 1.06 3.94
40°

l1

b

h1

h2

Dimensional drawing for the MAG.DRIVE 2000

C09.60

l

l3
70
2.76
l2

ød

b1

h3

h

l3

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Vibration Absorber

Air Cooling Unit

Vibration absorbers are used to inhibit the propagation of vibrations from the turbomolecular
pump to highly sensitive instruments like electron
beam microscopes, micro-balances or analytical
instruments.

Also an air cooling unit is available as a retrofit
kit for convection cooling of the TURBOVAC 50
pump with air. This kit can be easily fitted to the
pump in each case using the mounting components contained in the kit.

Turbomolecular Pumps

Flange Heaters for CF HighVacuum Flanges
Most TURBOVAC pumps can be baked out in
order to improve the ultimate pressure attained in
the UHV range. Degassing of the turbomolecular
pump will only be useful when simultaneously
baking out the vacuum chamber.

Technical Data and Ordering Information
Vibration absorber
DN 63 ISO-K
DN 63 CF
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF

Part No.
854 25
500 070
800131V0100
500 071
500 073
500 072

Rated power consumption of the air cooling unit
when connected to
TURBOVAC 50, 151/361
10.5 W
TURBOVAC 1100 C
21.0 W
Part No.
Air cooling unit for
230 V
110 V
TURBOVAC 50
854 05
854 06
TURBOVAC 151/361
855 31
894 08

Rated power consumption of the flange heater
DN 40 CF
17 W
DN 63 CF, DN 100 CF
100 W
DN 160 CF
150 W
Part No.
Flange heater
230 V
110 V
DN 40 CF
853 97
–
DN 63 CF
854 04
854 07
DN 100 CF
854 27
–
DN 160 CF
854 37
854 38

Fine Filter
A fine filter integrated in the centering ring protects the pump against particles and dust on the
high-vacuum side.

Technical Data and Ordering Information
Connection
flange
DN 40 KF 63 ISO-K 100 ISO-K 160 ISO-K
Fine
filter Part No. 883 98 887 20
887 21
887 22

The following accessories are also available:
Vacuum gauge COMBIVAC 2T
Part No. 230 000
(see Product Section C16)

Delayed venting unit
Part No. 500 441
(see Product Section C10)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C09.61

C09

Turbomolecular Pumps

Accessories

Solenoid Venting Valve

Power Failure Venting Valve

Technical Data and Ordering Information
Solenoid venting valve,
normally closed
Drive voltage
Power consumption
Weight, approx.

24 V DC
4W
0.3 kg (0.66 lbs)
Part No.
800120V0011

Solenoid venting valve

Power failure venting valve,
normally open
Drive voltage
Power consumption
Weight, approx.
Solenoid venting valve

24 V DC
4W
0.3 kg (0.66 lbs)
Part No.
800120V0021

Further valves are described in
Product Section C14.

Purge Gas and Venting Valve

Purge Gas and Venting Valve

Technical Data and Ordering Information
Connecting flange
Weight, approx.
Purge gas
and venting valve
0.2 mbar x l x s-1
(12 sccm)
0.4 mbar x l x s-1
(24 sccm)

DN 10 KF
0.7 kg (1.55 lbs)
230 V

110 V

Part No. 855 19

Part No. 855 18

Part No. 855 29

Part No. 855 28

Connecting flanges
Inlet
Outlet
Weight, approx.
Purge gas and venting valve
Purge gas pressure, abs.
0.6 mbar x l x s-1 (36 sccm)

1/4" pipe
pump specifc or DN 16 KF
0.5 kg (1.1 lbs)
24 V DC
1.5 to 6.0 bar
Part No. 121 33

Further 0.6 mbar x l x s-1 valves upon request

C09.62

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Turbomolecular Pumps

Accessories for Serial Interfaces RS 232 C and RS 485 C
Through these accessories many control,
monitoring and information capabilities can be
implemented in connection with the electronic
frequency converters and turbomolecular pumps.
The following turbomolecular pumps or

electronic frequency converters are supported:
TW 70 H / TURBO.DRIVE S
TW 300, TW 300 H / TURBO.DRIVE S
TW 701
T 1600, TW 1600

Display Unit
Display unit for displaying parameters, for
starting and stopping the turbomolecular pump
and for changing the rotor’s speed.

C09.60

Ordering Information
Portable Display Unit
Software “Turbo.Drive Panel”, 3.5 in. floppy

Display Unit
Upon request

C09

Part No. 800110V0104

PC Software
PC software for Windows 95 or higher

Technical Features
◆ Convenient graphical user interface
◆ Several turbomolecular pumps can be
operated in parallel
◆ Display, modify, save and compare the
parameter lists of the turbomolecular pumps
◆ Integration of customer’s software
◆ Recording parameter data over time (for
example, temperatures, rotor frequency)

Ordering Information
PC software “Turbo.Drive Server”, CD-ROM

PC Software
Part No. 800110V0102

Adaptor RS 232 C / RS 485 C for Frequency Converters with RS 485 C Interface
Ordering Information
Mains connection 220 V, 50 Hz, EURO plug
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Adapter RS 232 C/RS 485 C
Part No. 800110V0101

C09.63

Turbomolecular Pumps

C09.64

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

PT, CS

C10
Turbomolecular Pump Systems
30 - 400 l x s-1
Calibration Systems

Turbomolecular Pump Systems

Contents
General
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.03
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.03

Products
Turbomolecular Pump Systems (Global Versions)
PT 50 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.04
PT 151/PT 361 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.06
PT 50 KIT, . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.08
PT 151 KIT, PT 361 KIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.08
PT 300 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.10
PT 301 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.12
Calibration Systems
CS3, CS5, CS7 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.14
Adsorption Traps with Aluminium Oxide Insert . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.16
Delayed Venting Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.17
Turbomolecular Pump Systems (Versions for the North and South American Continents)
TOSS 50. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MINI-TOPS 50 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TOPS 151/361 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TURBOVAC TMV 40 000. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TOPiX. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TiPS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
BMH70 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C10.18
C10.20
C10.22
C10.24
C10.25
C10.26
C10.28

TSC TurboSystem Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.30
TPC TurboPump Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.31

Miscellaneous
60 Hz Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.32

C10.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

General

tests and leak tests. By adding components from
our standard range of accessories they may be
easily adapted to meet specific requirements.

Sometimes it is just this flexibility which causes
difficulties when having to decide between the
various configurations of a particular pump
system. Based on our experience and by listening
to our customers´ demands, we have therefore
compiled a range of turn-key vacuum systems
based on standard components. Before leaving
the factory they are subjected to both functional

The requirements of production or research
engineers concerning the vacuum technology
they have to employ are usually widely different.
In most cases pumping speed and operating
pressure must be accurately matched to suit a
particular process. The wide range of vacuum
pumps and standard accessories available offers
many options.

00

MI

TO

TU

TO

BM
H

TO

TIP
S

PT

Pi
X

70

TM

Dr

y

V4

1
/36

PT

RB

OV
AC

51

PS
5

PT

PS
1

-T
O

0

PT

NI

PT

SS
5

PT

30

1D

ry

ry
0D

30

36

1K
IT

1K
IT
15

KI
T

PT

36

50

1

1
15

PT

Pu

50

mp

s

0

00

Application and Accessories

Microbalances

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Sputtering

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Spectroscopy

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Production of TV and monitor picture tubes

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Surface refining

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Evaporation coating systems

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Beam guidance systems

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Laboratory pump systems

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Applications

Accessories

Page

Air cooling unit

–

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Flange heater

–

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

C10.17

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Venting valve

–

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Power failure venting valve

–

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Purge gas and venting valve

–

Delayed venting unit

◆

◆

◆

◆

Adsorption traps with aluminium oxide insert C10.16

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Exhaust filter

–

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Water flow monitor

–

◆

◆

◆

◆

◆

◆

◆

Water cooling unit

–

◆

◆

◆

◆

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10

◆

C10.03

Turbomolecular Pump Systems

PT 50 Turbomolecular Pump System
This turbomolecular pump system is a fully
assembled and ready-to-operate ultra high
vacuum system as a table top unit which
requires a hydrocarbon-free high and ultra high
vacuum.

Advantages to the User
◆ High effective pumping speed
◆ Low ultimate pressure (< 10-8 mbar
(< 0.75 x 10-8 Torr))
◆ High pumping speed of the backing pump
◆ Compact, small, rugged unit
◆ Simple to operate
◆ High level of reliability
◆ Maintenance-friendly design
◆ For use world-wide
◆ Installation of standard vacuum components
in an open frame
◆ Components such as the backing pump,
frequency converter, vacuum gauge and
power failure venting valve are controlled via
a rotary switch
◆ Service friendly assembly for maintenance
without the need to disassemble backing or
high vacuum pump
◆ The high vacuum pump can be removed from
the pump system

◆ Mains connection 230 V, 50 Hz with EURO
plug
◆ Rugged table top unit which may also carry
heavy assemblies
◆ All required connecting and sealing components are located within the pump system
assembly
The pump system is prepared for installation of
further components:

Typical Applications
◆ Spectroscopy
◆ Tube manufacturing
◆ Beam guidance systems
◆ Micro balances
◆ Sputtering and evaporation systems
◆ Surface physics
◆ Laboratory pump systems
◆ Production of gas Lasers

◆ Vacuum gauge
◆ Power failure venting valve
◆ Air cooling unit
◆ Assembly on the intake side with manifold,
valves, gauge heads etc.
◆ Adsorption trap
◆ Exhaust filter
◆ Rotatable castors
◆ Mains cable with connection plug for UK,
USA, Switzerland, Japan

◆ CE approval
Vacuum gauge (option)

b1

mm
in.

Turbomolecular pump

h

b

b1

l

456
17.95

430
16.93

117.5
4.63

420
16.54

The turbomolecular pump system consists of the
following principal components:
◆ Grease lubricated turbomolecular pump
TURBOVAC 50 with ceramic ball bearings,
convection cooling and splinter guard

h

◆ Electronic frequency converter NT 10
◆ Dual-stage, oil sealed rotary vane vacuum
pump TRIVAC D 2,5 E as backing pump
◆ Switchbox with rotary switch for driving the
backing pump, the turbomolecular pump, a
vacuum gauge (optional) and a power failure
venting valve (optional)

C10.04

Frequency converter
b

l
TRIVAC E backing pump

Dimensional drawing for the turbomolecular pump system PT 50 / DN 63 ISO-K

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Technical Data
Turbomolecular pump
High vacuum connection
Pumping speed for N2
Compression for N2/H2
Speed of the TURBOVAC

PT 50
DN
l x s-1

40 KF
33

rpm

Dual-stage rotary vane vacuum pump
Nominal pumping speed acc. to PNEUROP
m3 x h-1 (cfm)
Ultimate total pressure
mbar (Torr)
Attainable ultimate pressure
with FPM gasket
with aluminum or Cu gasket 1)

mbar (Torr)
mbar (Torr)

Main supply, 50/60 Hz
Rated power consumption, approx.
Dimensions (W x H x D)
Weight, approx.

2.7 (1.6)
10-3 (0.75 x 10-3)
< 10-6 (< 0.75 x 10-6)
–

< 10-6 (< 0.75 x 10-6)
–

V

100-120 / 200-240 ± 5%

VA

500

mm (in.)

430 x 456 x 420 (16.93 x 17.95 x 16.54)

kg (lbs)

27 (59.4)

Part No. 128 80
–
–

–
Part No. 128 81
–
Part No. 854 06
Part No. 854 05

Flange heater
DN 63 CF, 115 V
DN 63 CF, 230 V

Part No. 854 07
Part No. 854 04

Delayed venting unit 2)

Part. No. 500 441

Venting valve, DN 10 KF
manually operated

Part. No. 173 24

Power failure venting valve, DN 10 KF
024 V DC
115 V, 60 Hz
230 V, 50/60 Hz

Part No. 854 14
Part No. 854 10

AF 8 exhaust filter

Part No. 190 50
115 V, 50/60 Hz
230 V, 50/60 Hz
230 V, 50/60 Hz
230 V, 50/60 Hz

Connecting cable for operating the TURBOVAC
outside the pump system
03 m (10.0 ft)
05 m (17.5 ft)
10 m (35.0 ft)
2)

–
–
Part No. 128 83

C10

Part No. 174 46
Part No. 200 06 420
Part No. 173 26

Adsorption trap, DN 16 KF
Adsorbent

1)

< 10-6 (< 0.75 x 10-6)
< 10-8 (< 0.75 x 10-8)

PT 50

Air cooling unit
115 V
230 V

Mains cord
USA/JAP
USA/JAP
CH
UK

63 CF
55

TRIVAC D 2,5 E

Ordering Information
PT 50 turbomolecular pump system
DN 40 KF
DN 63 ISO-K
DN 63 CF

TURBOVAC 50
63 ISO-K
55
2 x 107 / 102
72 000

Part No. 200 81 090
Part No. 200 81 141
Part No. 200 81 099
Part. No. 200 81 097

Part No. 121 08
Part No. 121 09
Part No. 119 90

use only for CF flanges
for 24 V DC valves

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.05

Turbomolecular Pump Systems

PT 151/PT 361 Turbomolecular Pump Systems
These turbomolecular pump systems are readyto-operate vacuum units for generating a vacuum
in the high and ultra high vacuum range which is
free of hydrocarbons.
When pumping aggressive or abrasive process
gases, a purge gas facility must be used for the
pumps.

Advantages to the User
◆ Low ultimate pressure (< 10-7 mbar (Torr)),
free of hydrocarbons

The pump systems are prepared for installation
of further components:
◆ Vacuum gauges (up to two)

◆ High effective pumping speed

◆ Adsorption trap

◆ Compact, mobile unit

◆ Exhaust filter

◆ Simple to operate

◆ Air cooling unit

◆ High level of reliability

◆ Flange heater

◆ Purge gas and venting ports

◆ Venting valve

◆ Components such as backing pump,
frequency converter and TURBOVAC, as well
as venting or degassing are controlled via a
single multi function switch

Typical Applications
♦ Spectroscopy
♦ Tube manufacturing
♦ Beam guidance systems
♦ Micro balances
♦ Sputtering and evaporation systems
♦ Surface physics

Standard system

Systems with accessories

◆ Service friendly assembly for maintenance
without the need to disassemble backing or
high vacuum pump
◆ Pump systems prepared for installation of larger backing pumps (for barrier gas operation,
for example)
◆ Additional mains sockets for accessories
◆ CE approval

The turbomolecular pump systems consists of
the following principal components:
◆ Grease lubricated turbomolecular pump
TURBOVAC 151 or 361 with splinter guard
◆ Electronic frequency converter NT 20

1
2
3
4
5
6

TURBOTRONIK
Vacuum gauge (optional)
Forevacuum gauge (optional)
High vacuum gauge (optional)
Flange heater (optional)
Venting valve (optional)

7 TURBOVAC
8 Corrugated tube
9 Adsorption trap (optional)
10 TRIVAC backing pump
11 Exhaust filter (optional)

Vacuum diagram of the PT 151/ PT 361 turbomolecular pump systems

◆ Dual-stage, oil sealed TRIVAC D 4 B or D 16 B
rotary vane vacuum pump as backing pump
◆ Switch box with mains power outlet and
rotary switch to operate the connected units

C10.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

mm
in.

h
800
31.50

h1
890
35.04

l
484
19.06

wide
500
19.69

Tec hnic al Data
Turbomolecular pump
High vacuum connection
Pumping speed for N2
Compression for N2/H2
Speed of the TURBOVAC
Dual-stage rotary vane vacuum pump
Nominal pumping speed (DIN 28 400)
Exhaust connection

800

800
h875
890
h1

DN
l x s-1
rpm
m3 x h-1 (cfm)
DN

Attainable ultimate pressure
with FPM seal
with Cu seal

mbar (Torr)
mbar
(Torr)

Cooling water consumption

l/h

Cooling water connection, hose nozzle, outside dia.
mm (in.)

484
500 wide

Power consumption

484
l
500 wide
breit
500

kVA

Mains supply
EURO version
USA version

V
V

Dimensions (W x H x D)
4

Weight, approx.

mm
(in.)
kg (lbs)

Or der ing Information

3

PT 151

PT 361

TURBOVAC 151
100 ISO-K
100 CF
145
145
> 109
8.5 x 102
50 000

TURBOVAC 361
100 ISO-K
100 CF
345
345
> 109
3.5 x 103
50 000

TRIVAC D 4 B
4.8 (2.83)
16 KF

TRIVAC D 16 B
18.9 (11.13)
25 KF

10-8 (0.75 x 10-8)
–
10-10
–
(0.75 x 10-10)

10-8 (0.75 x 10-8)
–
10-10
–
(0.75 x 10-10)

20

20

11 (0.43)

11 (0.43)

0.7

1.5

230 V, 50 Hz
115 V, 60 Hz

230 V, 50 Hz
115 V, 60 Hz

500 x 890 x 484
(19.69 x 35.04 x 19.06)

500 x 890 x 484
(19.69 x 35.04 x 19.06)

45 (99.2)

62 (136.7)

PT 151

PT 361

Part No.128 84
Part No.128 85

Part No.128 86
Part No.128 88

Part No.152 57
Part No.152 58

Part No.152 59
Part No.152 60

5
2

PT 151 / PT 361 turbomolecular pump system
EURO version, 230 V / 50 Hz, Schuko plug
DN 100 ISO-K
DN 100 CF
USA version, 115 V / 60 Hz, USA plug
DN 100 ISO-K
DN 100 CF

1

1 TRIVAC backing pump
2 Switch box
3 TURBOTRONIK

4 Vacuum gauge (optional)
5 TURBOVAC

PT 151 Turbomolecular pump system

Air cooling unit
115 V
230 V

Part No. 894 08
Part No. 855 31

Flange heater, DN 100 CF
115 V
230 V

Part No. 854 28
Part No. 854 27

Delayed venting unit *)

Part. No. 500 441

Venting valve, DN 10 KF
manually operated

Part. No. 173 24

Power failure venting valve, DN 10 KF
024 V DC
115 V, 60 Hz
230 V, 50/60 Hz
Adsorption trap
DN 16 KF
DN 25 KF
Adsorbent
Exhaust filter
AF 4-8
AF 16-25
Purge gas and venting valve, 230 V
*)

Part No. 174 46
Part No. 200 06 420
Part No. 173 26
Part No. 854 14
–

–
Part No. 854 15
Part No. 854 10

Part No. 189 06
–

–
Part No. 189 11
Part No. 855 19

for 24 V DC valves

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.07

C10

Turbomolecular Pump Systems

PT 50 KIT, PT 151 KIT, PT 361 KIT Turbomolecular Pump Systems
Under the motto “Do-it-yourself and save money”
you may assemble the turbomolecular pump
systems PT 50 KIT, PT 151 KIT and PT 361 KIT
yourself.

PT 50 KIT

PT 1 5 1 KIT / PT 3 6 1 KIT

The turbomolecular pump systems PT 50 KIT,
PT 151 KIT and PT 361 KIT are made of the
same components as used for the turn-key
systems:
◆ Base panel with column
◆ TURBOVAC 50 turbomolecular pump
(PT 50 KIT) or 151 or 361 (PT 151 KIT or
PT 361 KIT)
◆ Rotary vane vacuum pump
TRIVAC D 2,5 E (PT 50 KIT) or D 4 B or
D 16 B (PT 151 KIT or PT 361 KIT)

Unpacking, 15 minutes, approx.

Unpacking, 15 minutes, approx.

After further 20 minutes

After further 30 minutes

After further 20 minutes

After further 30 minutes

After further 30 minutes

After further 50 minutes

◆ TURBOTRONIK NT 10 electronic frequency
converter (PT 50 KIT) or NT 20 (PT 151 KIT
and PT 361 KIT)
◆ All necessary mounting parts, connection
parts and gaskets are supplied
◆ Simple and accurate assembly instructions
◆ Detailed exploded view
◆ Description which is easy to understand
◆ Additional detailed knowledge is gained about
the product by assembling it yourself
◆ CE approval
The technical data, the areas of application and
the design characteristics correspond to the
turbomolecular pump systems PT 50, PT 151
and PT 361 described on the preceding pages.

Typical Applications
◆ Spectroscopy
◆ Tube manufacturing
◆ Beam guidance systemse
◆ Micro balances
◆ Sputtering and evaporation systems
◆ Surface physics
◆ Laboratory pump systems
◆ Production of gas Lasers

C10.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Ordering Information
PT 50 KIT turbomolecular pump system
DN 40 KF
DN 63 ISO-K
DN 63 CF

PT 50 KIT

PT 151 KIT

PT 361 KIT

Part No. 128 70
Part No. 128 71
Part No. 128 73

–
–
–

–
–
–

PT 151 KIT turbomolecular pump system, water-cooled
DN 100 ISO-K
DN 100 CF

–
–

Part No. 128 74
Part No. 128 75

–
–

PT 361 KIT turbomolecular pump system, water-cooled
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF

–
–
–
–

–
–
–
–

Part No. 128 76
Part No. 128 78
upon request
upon request

Air cooling unit,
230 V
115 V

Part No. 854 05
Part No. 854 06

Part No. 855 31
Part No. 894 08

Part No. 855 31
Part No. 894 08

Flange heater
DN 63 CF, 230 V
DN 63 CF, 115 V
DN 100 CF, 230 V
DN 100 CF, 115 V

Part No. 854 04
Part No. 854 07
–
–

–
–
Part No. 854 27
–

–
–
Part No. 854 27
Part No. 854 28

Adsorption trap
DN 16 KF
DN 25 KF
Adsorbent

Part No. 854 14
–
Part No. 854 10

Part No. 854 14
–
Part No. 854 10

–
Part No. 854 15
Part No. 854 10

Exhaust filter
AF 4-8
AF 8
AF 16-25

–
Part No. 190 05
–

Part No. 189 06
–
–

–
–
Part No. 189 11

Delayed venting unit *)

Part No. 500 441

Part No. 500 441

Part No. 500 441

Venting valve, DN 10 KF
manually operated

Part No. 173 24

Part No. 173 24

Part No. 173 24

–

Part No. 855 19

Part No. 855 19

Power failure venting valve, DN 10 KF
024 V DC
115 V, 60 Hz
230 V, 50/60 Hz

Part No. 174 46
Part No. 174 26
Part No. 200 06 420

Part No. 174 46
Part No. 174 26
–

Part No. 174 46
Part No. 174 26
–

Water cooling unit for the TURBOVAC

Part No. 854 08

–

–

115 V, 50/60 Hz
230 V, 50/60 Hz
230 V, 50/60 Hz
230 V, 50/60 Hz

Part No. 200 81 090
Part No. 200 81 141
Part No. 200 81 099
Part No. 200 81 097

–
Part No. 200 81 141
Part No. 200 81 099
Part No. 200 81 097

–
Part No. 200 81 141
Part No. 200 81 099
Part No. 200 81 097

Connecting cable for operating the TURBOVAC
outside the pump system
03 m (10.0 ft)
05 m (17.5 ft)
10 m (35.0 ft)

Part No. 121 08
Part No. 121 09
–

–
Part No. 857 66
Part No. 857 67

–
Part No. 857 66
Part No. 857 67

Purge gas and venting valve, 230 V

Mains cord
USA/JAP,
USA/JAP,
CH,
UK,

*)

C10

for 24 V DC valves

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.09

Turbomolecular Pump Systems

PT 300 Dry Turbomolecular Pump System
The PT 300 Dry turbomolecular pump system
is a fully assembled, ready-to-operate and
mobile high vacuum pump system which is
based on a column design.

Advantages to the User
◆ Absolutely oil-free
◆ Low ultimate pressure free of hydrocarbons (10-8 mbar)
◆ High effective pumping speed
◆ Compact and mobile unit

The turbomolecular pump system consists of the
following principal componentes:
◆ TW 300 hybrid turbomolecular pump
◆ Dual-stage, absolutely oil-free
DIVAC 2,5 VT diaphragm vacuum pump
used as the backing pump

◆ Simple operation

◆ Switchbox for driving and interlocking of
the two vacuum pumps.

◆ High level of reliability

◆ Mobile base plate with column

◆ Maintenance-friendly design

◆ All required connection and sealing components are located within the pump system
assembly

◆ Installation in any orientation for TW 300

Typical Applications
◆ Spectroscopy
◆ Valve manufacturing
◆ Beam guidance systems
◆ Micro balances
◆ Sputtering and evaporation systems
◆ Surface physics
◆ Laboratory pump systems

◆ Air cooling
◆ Installation of standard vacuum components in an open frame with installation
column and castors
◆ Components such as the diaphragm
backing pump and turbomolecular pump as
well as venting or degassing are controlled
via a single rotary switch

The pump systems are prepared for installation
of further components.
◆ Vacuum gauges
◆ Flange heater
◆ Venting valve

◆ Service-friendly assembly for maintenance
without the need to disassemble backing or
high vacuum pump
◆ Pump systems prepared for installation of
larger backing pumps
◆ Additional mains sockets for accessories
◆ The pump systems are subjected to a full
functional test and a leak test before delivery

PT300DRY

887

500

425

Dimensional drawing for the PT 300 Dry

C10.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Technical Data

PT 300 Dry

Hybrid turbomolecular pump
High vacuum connection
Pumping speed for nitrogen
Diaphragm pump
Pumping speed, approx.
Ultimate pressure, approx.

TW 300
DN
l x s-1

100 ISO-K

100 CF
240

m3 x h-1 (cfm)
mbar (Torr)

DIVAC 2,5 VT
2.5 (1.5)
3 (2.25)

mbar (Torr)
mbar (Torr)

10-9 (0.75 x 10-9)
10-8 (0.75 x 10-8)

Attainable ultimate pressure
with rotary vane pump
with diaphragm pump
Mains connection, 50/60 Hz

V

230 / 115

Power consumption, approx.

W

600

Dimensions (W x H x D)
Weight, approx.

mm (in.)

500 x 887 x 425 (19.68 x 34.92 x 16.73)

kg (lbs)

44 (97.13)

PT 300 Dry

Ordering Information
PT 300 Dry turbomolecular pump system
DN 100 ISO-K, 230 V, 50 Hz
DN 100 ISO-K, 115 V, 60 Hz
DN 100 CF,
230 V, 50 Hz
DN 100 CF,
115 V, 60 Hz

Part No. 500 687
Part No. 500 693
–
–

–
–
Part No. 500 688
Part No. 500 694

Mains adapter Schuko/US

Part No. 200 11 119

Mains cable for junction box
EURO,
230 V, 50 Hz
CH,
230 V, 50/60 Hz
UK,
230 V, 50/60 Hz
USA/Japan, 230 V, 50/60 Hz
USA/Japan, 115 V, 60 Hz

Part No. 200 81 091
Part No. 200 81 099
Part No. 200 81 097
Part No. 200 81 141
Part No. 200 81 090

Power failure airing valve, 230 V, 50/60 Hz

Part No. 174 26

Flange heater for flange DN 100 CF, 230 V

Part No. 854 27

24 V DC mains cable
3m
5m
10 m
20 m

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10

Part No. 800094V0300
Part No. 800094V0500
Part No. 800094V1000
Part No. 800094V2000

C10.11

Turbomolecular Pump Systems

PT 301 Dry Turbomolecular Pump System
The PT 301 Dry turbomolecular pump system
is a fully assembled and ready-to-operate high
vacuum system designed as a table top unit.

Advantages to the User
◆ Absolutely oil-free
◆ Low ultimate pressure free of hydrocarbons (10-8 mbar)
◆ High effective pumping speed
◆ Compact and small unit
◆ Simple operation
◆ High level of reliability
◆ Maintenance-friendly design

The turbomolecular pump system consists of the
following principal componentes:
◆ TW 300 hybrid turbomolecular pump
system

Typical Applications
◆ Spectroscopy
◆ Valve manufacturing

◆ TURBO.POWER 300 power supply

◆ Beam guidance systems

◆ Dual-stage, absolutely oil-free
DIVAC 2,5 VT diaphragm vacuum pump
used as the backing pump

◆ Micro balances

◆ All required connection and sealing components are located within the pump system
assembly

◆ Sputtering and evaporation systems
◆ Surface physics
◆ Laboratory pump systems

◆ Installation in any orientation for TW 300
◆ Air cooling
◆ Installation of standard vacuum
components in an open frame
◆ Components such as the diaphragm
backing pump and turbomolecular pump
are controlled via switches
◆ Service-friendly assembly for maintenance
without the need to disassemble backing or
high vacuum pump

The pump systems are prepared for installation
of further components.
◆ Vacuum gauges
◆ Venting valve /
Power failure venting valve
◆ Junction box

◆ The high vacuum pump can be removed
93

313

◆ The pump systems are subjected to a full
functional test and a leak test before delivery

440

PT301Dry

16

430

420

Dimensional drawing for the PT 301 Dry

C10.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Technical Data

PT 301 Dry

Hybrid turbomolecular pump
High vacuum connection
Pumping speed for nitrogen
Diaphragm pump
Pumping speed, approx.
Ultimate pressure, approx.
Attainable ultimate pressure

TW 300
DN
l x s-1

100 ISO-K

100 CF
240

m3 x h-1 (cfm)
mbar (Torr)

DIVAC 2,5 VT
2.5 (1.5)
3 (2.25)

mbar (Torr)

10-8 (0.75 x 10-8)

Mains connection, 50/60 Hz

V

230 / 115

Power consumption, approx.

W

600

Dimensions (W x H x D)

mm (in.)

430 x 456 x 420 (16.93 x 17.95 x 16.54)

kg (lbs)

31 (68.43)

Weight, approx.

Ordering Information
PT 300 Dry turbomolecular pump system
DN 100 ISO-K, 230 V, 50 Hz
DN 100 ISO-K, 115 V, 60 Hz
DN 100 CF,
230 V, 50 Hz
DN 100 CF,
115 V, 60 Hz

PT 301 Dry
Part No. 500 685
Part No. 500 691
–
–

–
–
Part No. 500 686
Part No. 500 692

Junction box

Part No. 200 06 393

Mains adapter Schuko/US

Part No. 200 11 119

Mains cable for junction box
EURO,
230 V, 50 Hz
CH,
230 V, 50/60 Hz
UK,
230 V, 50/60 Hz
USA/Japan, 230 V, 50/60 Hz
USA/Japan, 115 V, 60 Hz

Part No. 200 81 091
Part No. 200 81 099
Part No. 200 81 097
Part No. 200 81 141
Part No. 200 81 090

Power failure venting valve, 230 V, 50/60 Hz
24 V DC mains cable
3m
5m
10 m
20 m

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10

Part No. 174 26
Part No. 800094V0300
Part No. 800094V0500
Part No. 800094V1000
Part No. 800094V2000

C10.13

Turbomolecular Pump Systems

CS Calibration Systems
The requirements imposed on vacuum engineering with regard to accuracy of the measurements, reproducibility and unambiguity of the
determined vacuum pressures have increased
significantly over the last years.
Routine calibrations of vacuum gauges are an
important component of quality assurance schemes. The calibration systems from LEYBOLD put
the customer in a position to check and recalibrate
on his own the specified and necessary accuracy
of his vacuum gauges.
Calibration systems are available for this purpose
which cover a calibration range from 1000 mbar
to 3 x 10-7 mbar (750 to 2.3 x 10-7 Torr).

h

Each system is equipped with several certified
reference pressure sensors (transmitter
standards), which each cover a part of the
specified range of calibration pressures. In the
pump system, turbomolecular pumps with
TRIVAC rotary vane or DIVAC diaphragm pumps
are used. A variable leak valve is used to admit
the gas into the calibration chamber. Moreover, in
calibration systems CS5 and CS7 the gas inlet
line is equipped with its own pump system.

b
Calibration system CS3

h1

Calibration systems CS5 and CS7 are equipped with heating collars for the calibration
chamber so that low chamber pressures may
be attained within a shorter time. The temperature of the heating collars can be controlled
whereby the maximum degassing temperature
will depend on the components installed
(flanges, pressure sensors, valves).

Advantages to the User
◆ Vacuum gauges and measurement systems of
any make may be calibrated
◆ Designed in accordance with DIN 28 418/
ISO/DIS 3567
◆ Transfer standards with PTB-, DKD- or factory
certificate
◆ Easier DIN/ISO 9000 approval
b1
Calibration system CS7

h

h1

b

b1

mm

1200

1700

600

2000

in.

47.24

66.93

23.62

78.74

◆ Reliable and reproducible measurements
◆ Quick start-up
◆ Measurement system free of hydrocarbons
when using dry compressing vacuum
pumps
◆ Simple operation
◆ CE approval

C10.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Technical Data

CS3

CS5

CS7

Calibration range

mbar (Torr)

1000 to 1 x 10-3 (750 to 0.75 x 10-3)

1000 to1 x 10-5 (750 to0.75 x 10-5)

1000 to 1 x 10-7 (750 to 0.75 x 10-7)

Pressure measurement range

mbar (Torr)

1000 to 2 x 10-6 (750 to 1.5 x 10-6)

1000 to 2 x 10-7 (750 to 1.5 x 10-7)

1000 to 2 x 10-9 (750 to 1.5 x 10-9)

5 (3) x DN 16 KF
1 (0) x DN 25 KF
1 (1) x DN 40 KF

5 (3) x DN 16 KF
1 (0) x DN 25 KF
3 (2) x DN 40 KF

6 (3) x DN 16 CF
6 (4) x DN 40 CF

via variable leak valve

via variable leak valve

via variable leak valve

Extra pump system for admitting gas

no

yes

yes

Heater for the vacuum chamber

no

yes

yes

Vacuum chamber connections
(in brackets:
qty. available on the side of the customer’s system)
Admitting gas

Ordering Information and options upon request

Application examples: Which pressure sensors may be calibrated with which system?
Typ of S ens or

CS3

CS5

CS7

Diaphragm sensors
BOURDONVAC

X

X

X

Capsule vacuum gauges

X

X

X

DIAVAC DV 1000

X

X

X

DI 200, DI 2000

X

X

X

CTR90 and CTR91 (1000 - 1 Torr full scale)

X

X

X

CTR91 (0.1 Torr full scale)

–

X

X

TR 301, TR 306

X

X

X

TR 211, TR 216, TTR 211, TTR 216, TTR 90

X

X

X

–

X

X

–

–

X

ITR 90, ITR 100

–

–

X

IE 414, IE 514

–

–

X

C10

THERMOVAC sensors

VISCOVAC sensor (spinning rotor viscosity gauge)
VK 201
PENNINGVAC sensors
PR 25, PR 26, PR 27, PR 35, PR 36, PR 37, PTR 225
IONIVAC sensors

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.15

Turbomolecular Pump Systems

Accessories

Adsorption Traps with Aluminium Oxide Insert
Adsorption traps are installed in all those cases
where an oil-free vacuum is to be produced with
oil-sealed vacuum pumps.

Adsorption trap (left) and insert (right)

Advantages to the User

d

◆ Backstreaming of oil is reduced by 99 %
◆ Longer service life
DN

◆ High conductance
◆ Filling can be easily exchanged

h

◆ Improvement in the ultimate pressure attained
by backing pumps by one order of magnitude

a1

◆ Stainless steel housing and insert

h1

◆ NBR seal

a

DN

Typical Applications

Mass number

◆ Product of an oil-free vacuum

Supplied Equipment
◆ Complete with insert
◆ Without adsorbent

Residual gas spectrum; top ahead of a rotary vacuum pump,
bottom ahead of a rotary vacuum pump with adsorption trap

Tec hnic al Data
Conductance at 10-2 mbar (Torr)
mbar x l x s-1 (Torr x l x sec)
Service live with Al oxide

a1

ld

h

h1

16 KF
mm

82

82

135

147

32

in.

3.23

3.23

5.31

5.79

1.25

102
4.02

102
4.02

175
6.89

155
6.10

33
1.26

132
5.19

65
2.56

235
9.25

160
6.3

20
0.79

25 KF
mm
in.
40 KF
mm
in.

Dimensional drawing for the adsorption traps

16 KF

25 KF

40 KF

4

6

12

3

Months

Al oxide filling

l (qts)

0.5 (0.53)

1.0 (1.06)

2.0 (2.1)

Weight, approx.

kg (lbs)

1.3 (2.9)

1.3 (2.9)

4 (8.8)

16 KF

25 KF

40 KF

Order ing Information

Part No. 854 14 Part No. 854 15 Part No. 854 16

Adsorption trap
Activated aluminum oxide, 2 l (approx. 1.3 kg (2.8 lbs))

C10.16

a

DN

Part No. 854 10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Delayed Venting Unit
The delayed venting unit serves the purpose of
venting vacuum systems with a delay in that it
bridges power failures.
The unit is equipped with rechargeable
batteries. Any unwanted venting of the
turbomolecular pump can thus be reliably
prevented in the event of short power
blackouts.
Both normally open valves (power failure
venting valves) and normally closed valves
(venting valves) may be connected.
The unit is equally suited for benchtop use and
rack mounting.
The present operating condition is showed by
different displays and controls:
◆ “Delay Time”
Displays the entered delay time
(when mains powered) and the delay time
counting to 0 (in case of power failure).
◆ “Venting Time”
Delayed venting unit

Technical Data

Delayed Venting Unit

Mains connection
Power supply
Output

Mains socket
V AC / Hz

100 - 240 / 50/60

V DC / mA

24 - 26.4 / 400 max.

Rechargeable lead battery

V / Ah

2 x 12 / 1.3

Rated battery service life, approx.

years

5 (depending on utilization)

Max. number of venting cycles with fully charged battery

4 times after each other

Controls

Foil key pad

Display

numerical, 2 x 3 digits, 4x LED

Delay time

s

0 - 999, adjustable

Venting time

s

0 - 999, adjustable

Dimensions (W x H x D)

mm (in.)

Housing
Weight, approx.

1/4 19", for rack mounting or as benchtop unit
kg (lbs)

Ordering Information
Delayed venting unit
Power failure venting valve, DN 10 KF, 24 V DC
Mains cord
with German style mains plug (Schuko)

106.5 x 128.5 x 220 (4.19 x 5.06 x 8.66)

2.5 (5.58)

Delayed Venting Unit
Part No. 500 441
Part No. 174 46

Displays the entered venting time
(when mains powered and during delay
time in case of power failure) and, after
elapsed delay time, the venting time
counting to 0.
◆ “Battery status”
- LED “loading” battery charges
- LED “empty” battery is flat or defective
- LED “ok”
battery has been recharged sufficiently
◆ LED “POWER”
the unit is mains powered

Advantages to the User
◆ Adjustable venting time for power failure
venting valve: 0 to 999 seconds
◆ Adjustable venting time for venting valve:
0 to 999 seconds
◆ Automatic driving of failure venting valve
and venting valve in case of short power
failures
◆ Manual venting
◆ Remote controlled venting

Part No. 200 27 549

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.17

C10

Turbomolecular Pump Systems

Version for the North and South American Continents

Turbomolecular Pump System TOSS 50

Standard Equipment
♦ TURBOVAC 50 ceramic bearing standard
proven turbomolecular vacuum pump

Options
♦ Adjustable inlet height of the TURBOVAC 50

♦ Base caster wheels

♦ Complete package with backing pump and
frequency converter

♦ Foreline trap

♦ High effective pumping speed
♦ Compact portable tabletop construction base
with support rail

♦ Wired for 115 V, single phase, 60 Hz
operation

♦ Simple operation, high reliability, easy
maintenance

♦ TRIVAC pump accessories
♦ Complete line of vacuum gauges for
monitoring of pressure
♦ Air cooling option
♦ Vent valve kits

1 TRIVAC D 2.5 E-stage
rotary vane vacuum pump
2 TURBOVAC 50
turbomolecular pump
3 Flange heater (accessory)
4 Adsorption trap (accessory)
3
2
h

4

1

Schematic diagram of the TOSS 50 turbomolecular pump system

C10.18

b

Dimensional drawing for the TOSS 50 turbomolecular pump system

b1

mm
in.

b

b1

h

457
18.00

286
11.25

495
19.50

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Version for the North and South American Continents
Technical Data
Turbomolecular pump
High vacuum connection
Pumping speed for N2
Pumping speed for H2
Compression for N2
Compression for H2
Speed of the TURBOVAC

TOSS 50
TURBOVAC 50
DN
l x s-1
l x s-1

rpm

Dual-stage rotary vane vacuum pump
Nominal pumping speed acc. to PNEUROP
m3 x h-1 (cfm)
Exhaust connection
DN
Attainable ultimate pressure
mbar (Torr)
Attainable ultimate pressure
with FPM gasket
with aluminum or Cu gasket

mbar (Torr)
mbar (Torr)

Mains supply, 50/60 Hz
Rated power consumption, approx.
Dimensions (W x H x D)
Weight, approx.

40 KF
33
28

63 ISO-K/63 CF
55
30
2 x 107
102
72 000
TRIVAC D 2.5 E
3.3 (1.9)
16 KF
≤ 2 x 10-3 (≤ 1.5 x 10-3)
< 10-6 (< 0.75 x 10-6)
< 10-8 (< 0.75 x 10-8)

V

115

VA

400

mm (in.)

286 x 495 x 451 (11.25 x 19.5 x 18)

kg (lbs)

22.1 (56)

Ordering Information
TOSS 50
(includes TURBOVAC 50 / NT 10 solid state converter /
D 2.5 E rotary vane vacuum pump / pump stand / fittings)
DN 40 KF
DN 63 ISO-K
DN 63 CF

TOSS 50

Part No. 899 213
Part No. 899 214
Part No. 899 215

Air cooling unit, 115 V

Part No. 854 06-1

Flange heater
DN 63 CF, 115 V

Part No. 854 07

Vent kits
CF flanges
Normally open
Normally closed
KF 40 flange
Normally open
Normally closed
KF 63 flange
Normally open
Normally closed

Part No. 899 838
Part No. 720-53-191
Part No. 720-53-186
Part No. 720-53-187
Part No. 720-53-188
Part No. 720-53-189

AK condensate trap kit

Part No. 720-53-105

AF exhaust filter kit

Part No. 720-53-104

Adsorption trap, Al2O3
Activated Al2O3 media, 2 litres (2.11 qt)
Other accessories such as valves and gauges

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10

Part No. 854 14
Part No. 854 10
See appropriate catalog section

C10.19

Turbomolecular Pump Systems

Version for the North and South American Continents

Turbomolecular Pump System MINI-TOPS 50

Standard Equipment

Options

♦ TURBOVAC 50 ceramic bearing standard
proven turbomolecular vacuum pump

♦ Frame caster wheels

♦ High effective pumping speed
♦ Compact portable tabletop construction frame
♦ Vibration-absorbing mounting plate for stress
free mounting of the TURBOVAC 50
♦ Simple operation, high reliability, easy
maintenance
♦ Complete package with backing pump and
frequency converter

♦ Foreline trap
♦ TRIVAC pump accessories
♦ Complete line of vacuum gauges for
monitoring of pressure
♦ Air cooling option
♦ Vent valve kits
♦ Conflat® flange heater

♦ Integration with Gauge controller
♦ Wired for 115 V, single phase, 60 Hz
operation
1 TRIVAC D 2.5 E-stage
rotary vane vacuum pump
2 TURBOVAC 50
turbomolecular pump
3 Flange heater (accessory)
4 Adsorption trap (accessory)
3

MINI-TOPS

2
h

4

1

b

b1

mm
in.

Schematic diagram of the MINI-TOPS 50 turbomolecular pump system

C10.20

b

b1

h

457
18

432
17

508
20

Dimensional drawing for the MINI-TOPS 50 turbomolecular pump system

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Version for the North and South American Continents
Technical Data

MINI-TOPS 50

Turbomolecular pump
High vacuum connection
Pumping speed for N2
Pumping speed for H2
Compression for N2
Compression for H2
Speed of the TURBOVAC

TURBOVAC 50
DN
l x s-1
l x s-1

40 KF
33
28
2 x 107
102
72 000

rpm

Dual-stage rotary vane vacuum pump
Nominal pumping speed acc. to PNEUROP
m3 x h-1 (cfm)
Exhaust connection
DN
Attainable ultimate pressure
mbar (Torr)
Attainable ultimate pressure
with FPM gasket
with aluminum or Cu gasket

TRIVAC D 2.5 E
3.3 (1.9)
16 KF
≤ 2 x 10-3 (≤ 1.5 x 10-3)
< 10-6 (< 0.75 x 10-6)
< 10-8 (< 0.75 x 10-8)

mbar (Torr)
mbar (Torr)

Mains supply, 50/60 Hz
Rated power consumption, approx.
Dimensions (W x H x D)

63 ISO-K/63 CF
55
30

V

115

VA

400

mm (in.)

406 x 483 x 432 (16 x 19 x 17)

kg (lbs)

30.0 (66)

Weight, approx.
NT 10 frequency converter (TMP power supply)
Voltage (two ranges)
Input power
Maximum
Continuous
Relay I/O
Input
Output
Available sensors and controllers
THERMOVAC TM 22, dual station
CAPACITRON DM 22, dual station
COMBIVAC CM 31
Dual station pirani
Single station PENNINGVAC cold cathode
COMBIVAC IT23, ionization
Smart sensor controller

V AC

90-140 or 180-265, single phase

W
W

Remote Start/Stop
System status relay NO/NC contacts (contacts 4 amp/250 V AC)
Sensor type
PIRANI
Capacitance diaphragm

Pressure range
760 to 5 x 10-4 Torr
1000 to 1 x 10-4 Torr

PIRANI
760 to 5 x 10-4 Torr
PENNINGVAC cold cathode
2 x 10-2 to 1 x 10-8 Torr
PENNINGVAC or PIRANI
1500 to 1 x 10-10 Torr
Absolute pressure transducer and one channel hot ionization

MINI-TOPS 50

Ordering Information
MINI-TOPS 50 turbomolecular vacuum pump system
(includes TURBOVAC 50 / NT 10 / D 2.5 E /
appropriate frame / foreline bellows)

C10

45
18

See Price List for the “North American Continent” for Ordering Information

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.21

Turbomolecular Pump Systems

Version for the North and South American Continents

Turbomolecular Pump System TOPS 151/361

Standard Equipment

Options

♦ TURBOVAC 151 or 361 ceramic bearing
standard proven turbomolecular vacuum
pump

♦ Air and water cooling options

♦ Conflat® flange heaters

♦ Frame caster wheels

♦ Larger backing pumps

♦ Foreline trap

♦ Purge valve for corrosive applications.

♦ TRIVAC pump accessories

♦ Inlet accessories – Gate valves, bell jar
assemblies, special spools

♦ High effective pumping speed
♦ Compact tabletop construction frame
♦ Vibration-absorbing mounting plate for stress
free mounting of turbomolecular pump
♦ Simple operation, high reliability, easy
maintenance

♦ Complete line of vacuum gauges for
monitoring of pressure

♦ Special design controls

♦ Vent valve kits

♦ Complete package with backing pump,
frequency converter and Start/Stop controls
♦ Integration with Gauge controller
b

mm
in.

b

h

l

610
24.0

508
20.0

610
24.0

l

h

Dimensional drawing for the TOPS 151/361 turbomolecular pump system

C10.22

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Version for the North and South American Continents
Technical Data
Turbomolecular pump
High vacuum connection
Backing pumps
Standard
for use with purge option

TOPS 151/361
DN

Model m3/hr (cfm)
Model m3/hr (cfm)

Cooling

TURBOVAC 151
100 ISO-K / 100 CF

TURBOVAC 361
100 ISO-K / 160 ISO-K / 100 CF / 160 CF

TRIVAC D 4 B (5.1 / 3.0)
TRIVAC D 8 B (10.2 / 6.0)
TRIVAC D 16 B (19.7 / 11.6)

TRIVAC D 16 B (19.7 / 11.6)

Water (air optional)

Water (air optional)

Max. power requirements
(Backing pump determines actual requirements)

110 V AC, 1 phase, 50/60 Hz, 30 Amps
220 V AC, 1 phase, 50/60 Hz, 20 Amps

Electrical panel controls
Vane pump
TMP control panel
Gate valve
Flange heater

Start/Stop
Start/Stop / Gauge On/Off
Open/Close
On/Off

NT 20 frequency converter (TMP power supply)
Relay I/O
Input
Output

Remote Start/Stop
System status relay NO/NC contacts

Gauge controller (optional)
Available sensors and controllers
THERMOVAC TM 22, dual station
CAPACITRON DM 22, dual station
COMBIVAC CM 31
Dual station pirani
Single station PENNINGVAC cold cathode
COMBIVAC IT23, ionization
Smart sensor controller

Integrated into system
Sensor type
PIRANI
Capacitance diaphragm

Pressure range
760 to 5 x 10-4 Torr
1000 to 1 x 10-4 Torr

PIRANI
PENNINGVAC cold cathode
PENNINGVAC or PIRANI
Absolute pressure transducer and one channel hot ionization

760 to 5 x 10-4 Torr
2 x 10-2 to 1 x 10-8 Torr
1500 to 1 x 10-10 Torr

C10

TOPS 151/361

Ordering Information
TOPS 151/361 turbomolecular vacuum pump system
(supplied with hydrocarbon oil)

TRIVAC D 25 B (35.7 / 21.0)

See Price List for the “North American Continent” for Ordering Information

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.23

Turbomolecular Pump Systems

Version for the North and South American Continents

Turbomolecular Pump System TURBOVAC TMV 40 000
b

l

h

Dimensional drawing for a typical TURBOVAC TMV 40 000 turbomolecular pump system

Standard Equipment

Options

♦ Open frame construction for use with larger
pumps

♦ Air cooling options

♦ Flexible configuration

♦ Frame caster wheels

Model m3/hr (cfm)

TMV 40 000 turbomolecular pump system
(supplied with hydrocarbon oil)

C10.24

TURBOVAC TMV 40 000
DN

Ordering Information

♦ Levellers

♦ Purge valve for corrosive applications

Technical Data

Cooling

♦ Special design controls

♦ TRIVAC pump accessories

♦ Larger backing pumps

♦ Integration with Gauge controller

Backing pumps

l
1016
40.0

♦ Vent valve kits

♦ Complete package with backing pump frequency converter, and Start/Stop controls

Turbomolecular pump
High vacuum connection

h
965
38.0

♦ Removable enclosure panels

♦ Complete line of vacuum gauges for
monitoring of pressure

♦ Simple operation, high reliability, easy
maintenance

b
686
27.0

♦ Inlet accessories – Gate valves, bell jar
assemblies, special spools

♦ Foreline trap

♦ Vibration-absorbing mounting plate for stress
free mounting of Turbomolecular pump

mm
in.

TURBOVAC TW 700
160 ISO-K
160 CF

TURBOVAC 1000C
160 ISO-K
250 ISO-K
160 CF
200 CF
6" ANSI

TURBOVAC T 1600
250 ISO-F
250 ISO-K

TRIVAC D 16 B (19.7 / 11.6)
TRIVAC D 25 B (30.9 / 18.2)

TRIVAC D 40 B (48.1 / 28.3.)
TRIVAC D 65 B (78.0 / 45.9)

TRIVAC D 65 B (78.0 / 45.9)

Water (air optional)

Water (air optional)

Water

TURBOVAC TMV 40 000
See Price List for the “North American Continent” for Ordering Information

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Version for the North and South American Continents

Turbomolecular Pump System TOPiX

Standard Equipment

Options

♦ Compact free-standing mobile system

♦ Air and water cooling options

♦ Larger backing pumps

♦ Flexible platform for customer process
vacuum systems

♦ Electrically controlled height adjustment

♦ Inlet accessories – Gate valves, bell jar
assemblies, special spools

♦ Frame base caster wheels and levelers
♦ Flexible configuration accepting any
Turbomolecular pump
♦ Vibration-absorbing mounting plate

♦ Foreline trap
♦ TRIVAC pump accessories

♦ Special design controls for automation into
custom processes

♦ Complete line of vacuum gauges for
monitoring of pressure

♦ “One-button” operation controls

C10

♦ Vent valve kits

♦ Simple operation, high reliability, easy
maintenance
♦ Manually adjustable inlet height for precise
connections
♦ Complete package with backing pump,
frequency converter, and Start/Stop controls
♦ Integration with Gauge controller

Technical Data

TOPiX
Contact Factory‚ for Complete Product Offering

TOPiX turbomolecular pump system

Ordering Information
TOPiX turbomolecular pump system

TOPiX
See Price List for the “North American Continent” for Ordering Information

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.25

Turbomolecular Pump Systems

Version for the North and South American Continents

Turbomolecular Pump System TiPS

Standard Equipment

Options

♦ All new LEYBOLD Wide-Range and Classic
turbomolecular pumps

♦ Water cooling options

♦ High effective pumping speed

♦ Conflat® flange heaters

♦ Compact tabletop construction frame
♦ Vibration-absorbing mounting plate for stress
free mounting of turbomolecular pumps
♦ Simple operation, high reliability, easy
maintenance
♦ Complete universal integrated package with
supply, controls and display for backing
pump, valves and gauging

♦ Frame caster wheels

♦ Complete line of vacuum sensors for
monitoring of pressure
♦ Vent valve or purge valve for corrosive
applications
♦ TRIVAC backing pumps for higher gas loads
Including all standard TRIVAC pump
accessories:
foreline traps; inlet, exhaust and oil filtration
♦ Inlet accessories - gate valves, bell jar assemblies, special spools

◆ TSC integrated Turbomolecular System
Controller provides “All-in-one” vacuum
system control and information

♦ Special design controls

mm
in.

h

h

a

b

445
17.5

432
17.0

432
17.0

a

b
Dimensional drawing for the turbomolecular pump system TiPS (TW 300/diaphragm pump)

C10.26

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Version for the North and South American Continents
Technical Data
Turbomolecular pump
High vacuum connection

TiPS
DN
DN

TURBOVAC TW 70
63 ISO-K
63 CF

Backing pumps
Air

Max. power requirements
(Backing pump determines actual requirements)

Air (water optional)

Start/Stop
On/Off
Start/Stop
Open/Close
Open/Close or Vent/Purge flow
Displays pressure readings
On/Off
On/Off
Plus
Backing pump cumulative operating hours
Current turbomolecular pump status (Start, Accel, Norm. Op., Decel, Stop)
Current valve status
Pressure readings for all sensors (Torr, mbar or Pa)
Flange heater status
Current operating mode
Last failure reason (due to improper operation)

C10

760 to 3.8 x 10-10 Torr
7.5 x 10-3 to 7.5 x 10-10 Torr
760 to x 10-4 Torr
1, 10, 100, 1000 Torr full-range (each covers 4 decades)
Upon request

Ordering Information
TiPS integrated turbomolecular pump system

Air (water optional)
110 V AC, 1 phase, 50/60 Hz, 15 Amps
220 V AC, 1 phase, 50/60 Hz, 7.5 Amps

TSC Turbomolecular System Controller provides
One-button automatic pumpdown
or manually controls
Diaphragm/vane pump
Turbomolecular pump
Inlet, foreline and roughing valve
Vent/purge valve
Inlet, foreline and roughing vacuum sensors
Flange heater
Ion sensor degas

Available sensors
ITR 90 combination hot cathode Ion/Pirani
PTR 225 cold cathode Ion
TTR 90 /Pirani
CTR90 ceramic diaphragm
Others

TURBOVAC TW 700
160 ISO-K
160 CF

Diaphragm, EcoDry or
TRIVAC (up to D 16 B)

Cooling

Turbomolecular System Controller provides Operating Info
Turbomolecular rotational speed (rpm & Hz)
Turbomolecular bearing temperature
Turbomolecular motor current
Turbomolecular heatsink temperature
Turbomolecular supply voltage
Turbomolecular cumulative operating hours
Operating mode (Auto or Manual)

TURBOVAC TW 300
100 ISO-K
100 CF

TiPS
See Price List for the “North American Continent” for Ordering Information

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.27

Turbomolecular Pump Systems

Version for the North and South American Continents

Dry Oil Free HV Pump System BMH70 Dry

Standard Equipment
♦ Portable HV station for TW 70 H and
DIVAC 0.8 T

-

♦ 60 l/s, pumping speed for N2, ultimate of
< 5 x 10-9 Torr
♦ Automated one-button operation for full featured model
♦ Power supply for operation of pumps, gauges
and valves
♦ Display of TW 70 H Turbo operation parameters include:
- Rotation frequency (Hz)
- Rotation speed (rpm)

Bearing temperature (deg C)
Motor current (amps)
Motor temperature (deg C)
Supply voltage (V)
Head sink temperature (deg C)
Cumulative operating time (hours)

♦ Standard air cooling
◆ Small footprint of 14" x 10" x 14" (W x H x D)
◆ 32 lbs
◆ Full-featured and basic versions available
◆ Optional 230/1/50/60 operation

mm
in.

b

a

b

h *)

254.0
10

355.6
14

330.2 to 355.6
13 to 14

a

h

h *) The overall height depends on which TW 70 H is used
Dimensional drawing for the dry oil free HV pump system BMH70 Dry)

C10.28

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turbomolecular Pump Systems

Version for the North and South American Continents
Technical Data

BMH70 Dry
Basic Version

Full-featured Version

No

Yes

Standard inlet sensor

(optional, see below)

Power ITR 90 inlet sensor (atm - 10-10 Torr)
with display on system controller

Optional inlet sensor

Power ITR 90 inlet sensor (atm - 10-10 Torr)
with integral LCD display

NA

N/A

Power TTR 90 sensor (atm - 5 x 10-4 Torr)
with display on system controller

Manual

Automatic control (one button) or manual

Vent valve control 1)

Vent valve control 1)

Start, Accel., Norm. Op., Decel., Stop

Start, Accel., Norm. Op., Decel., Stop

Speed, Temps, Current Draw, etc.

Speed, Temps, Current Draw, etc.

Integrated gauge display

Optional foreline sensor
System control
Vent valve control
TW main status display
TW operating parameters display

Ordering Information
BMH70 Dry
with inlet flange DN 63 CF
with inlet flange DN 63 ISO-K
1)
2)
3)
4)

Basic Version 2), 3)
Part No. 180000V2000
Part No. 180000V1000

BMH70 Dry

Full-featured Version 2), 4)
Part No. 180000V2400
Part No. 180000V1200

The vent valve is optional on a basic and a full-featured system
An ITR 90 sensor shipped with a BMH70 Dry system will have a flange compatible with the turbomolecular pumps flange type unless otherwise requested.
(i.e., DN 63 CF turbomolecular pump = CF 40-flanged ITR 90; DN 63 ISO-K turbomolecular pump = KF 25-flanged ITR 90)
An optional ITR 90 sensor when ordered with a basic BMH70 Dry system will include an integrated display on the sensor for the pressure readout
The standard ITR 90 sensor shipped with the full-featured BMH70 Dry system does not include an integrated display on the sensor for the pressure readout.
(It is available as an option)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10

C10.29

Turbomolecular Pump Systems

Accessories

Version for the North and South American Continents

TSC - TurboSystem Controller

The TSC controler will:
♦ Display all relevant turbo information:
– Connected pump model
– Rotation frequency (Hz)
– Rotation speed (rpm)
– Bearing temperature (°C)
– Motor current (Amps)
– Motor temperature (°C)
– Supply voltage (V)
– Heatsink temperature (°C)
– Cumulative operating time (hours)

♦ Power the turbomolecular pump
♦ Power the fore/rough pump (up to TRIVAC
D 16 B or EcoDry M15, 115 V single phase)
♦ Power and display up to three of any manufacturer’s smart gauges (must have 0 - 10 V
or 4 - 20 mA output capability)
♦ Provide degas capability for a hot-cathode ion
gauge sensor

Technical Data
For operating turbomolecular pump
TSC-S TurboSystem Controller
TSC-L TurboSystem Controller

Venting valve
24 V DC, normally open
24 V DC, normally closed

♦ Power a turbomolecular pump vent or
purge/vent valve
♦ Power an inlet flange heater (CF flanged
pumps only)
♦ Control the turbomolecular pump, fore/rough
pump and all valves

TSC - TurboSystem Controller
TURBOVAC TW 300 / TW 70 H
–

Ordering Information
TSC - TurboSystem Controller
110 V, RS 485 C
TSC-S
TSC-L
110 V, RS 232 C
TSC-S
TSC-L

♦ Power up to three system valves (electro
pneumatic with 24 V DC coils) – typically an
inlet valve, foreline valve and roughing valve

–
TURBOVAC TW 700

TSC - TurboSystem Controller

Part No. 899 287
–

–
Part No. 899 288

Part No. 899 289
–

–
Part No. 899 290

Part No. 899 813
Part No. 899 814

Part No. 899 813
Part No. 899 814

Note:
All controllers include:
15 ft. (5 m) long cables between TSC controller and turbomolecular pump (power & communication)
06 ft. (2 m) power cord
Mating connectors for all accessoring outlets
Operating manual ~ / electrical schematic and spare parts list

C10.30

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Turbomolecular Pump Systems

Version for the North and South American Continents

TPC - TurboPump Controller

The TPC controler will:
♦ Display all relevant turbo information:
– Connected pump model
– Rotation frequency (Hz)
– Rotation speed (rpm)
– Bearing temperature (°C)
– Motor current (Amps)
– Motor temperature (°C)
– Supply voltage (V)
– Heatsink temperature (°C)
– Cumulative operating time (hours)

♦ Power the turbomolecular pump
♦ Power a turbomolecular pump vent or
purge/vent valve
♦ Power an inlet flange heater (CF flanged
pumps only)
♦ Control the turbomolecular pump, flange
heater and purge/vent valve

C10

Technical Data
For operating turbomolecular pump
TPC-S TurboPump Controller
TPC-L TurboPump Controller

TPC - TurboPump Controller
TURBOVAC TW 300 / TW 70 H
–

Ordering Information
TPC - TurboPump Controller
110 V, RS 485 C
TPC-S
TPC-L
110 V, RS 232 C
TPC-S
TPC-L
Venting valve
24 V DC, normally open
24 V DC, normally closed

–
TURBOVAC TW 700

TPC - TurboPump Controller

Part No. 899 281
–

–
Part No. 899 282

Part No. 899 283
–

–
Part No. 899 284

Part No. 899 813
Part No. 899 814

Part No. 899 813
Part No. 899 814

Note:
All controllers include:
15 ft. (5 m) long cables between TSC controller and turbomolecular pump (power & communication)
06 ft. (2 m) power cord
Mating connectors for all accessoring outlets
Operating manual ~ / electrical schematic and spare parts list

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C10.31

Turbomolecular Pump Systems

Miscellaneous

Version for the North and South American Continents
103

103
TMP151 with TRIVAC® Backing Pumps:
a) D16B
b) D8B
c) D4B

Torr

101

101
100

100

c
b
a

10-1

Pressure

Pressure

TMP361with TRIVAC® Backing Pump
D16B

Torr

10-1

10-2

10-2

10-3

10-3

10-48

10-48

10

10

6
4
2
-5

6
4
2
-5

0 1 2 3 4 5 6 7 8 9 10 11 min 13
Time

0 1 2 3 4 5 6 7 8 9 10 11 min 13
Time

Pumpdown curves for the TOPS 361 system at 60 Hz (25 l volume)

Pumpdown curves for the TOPS 151 system at 60 Hz (25 l volume)

103
Torr

Pressure

101

Backing/Roughing Pump: D65B

0

10

10-1
10-2
10

T1600

-3

TMP1000

TW700
10-48
6
4
2
-5
10

0

1

2

min

3

Time

Pumpdown curves for the TMV 40 000 system at 60 Hz (25 l volume)

C10.32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

DIP

C11
DIP Oil Diffusion Pumps
3 000 - 50 000 l x s-1
Oils, Baffles, Accessories,
Adsorption Traps

Contents

Oil Diffusion Pumps

General
Operating Principle of Fluid Entrainment Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . C11.02
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.02
Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.03
Operating Oil Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.03
Program Range of Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.04
Pump Fluids for Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.05

Products
DIP Pumps, Water-Cooled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.06

Accessories
Astrotorus Baffles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.09
Monitoring Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.10
Adsorption Traps with Aluminium Oxide Insert . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.12

Operating Principle of Fluid Entrainment Vacuum Pumps
The main components of diffusion pumps, the
operation of which relies on vapor-phase pump
fluids are:
♦ Cooled pump body with intake and exhaust
ports
♦ System of nozzles
♦ Pump boiler

In the case of diffusion pumps a pump fluid contained in a boiler is heated to such an extent that
it is vaporized. The vapor is then forced through
nozzles within the pump. The nozzles are generally designed in such a way, that they accelerate
the vapor to a speed exceeding the speed of
sound (Laval nozzles), thus creating a high
speed vapor jet. The vapor is then deflected by
the nozzles at a specific angle onto the pump
body. The pump body is cooled, so that the

vaporized pump fluid condenses and is returned
back to the boiler as a liquid. The pumping
action of diffusion pumps and fluid entrainment
pumps in general is based on the transporting
capacity of the vapor jet.
The gas which is to be pumped is compressed
sufficiently at the forevacuum port so that it can
be pumped out by a backing pump.

DI
P5
00

00

00
00
DI
P3

DI

P2

00

20
DI
P1

DI
P8

P3
DI

00

0
00

0
00

s
mp
Pu

00

Applications and Accessories

Application
Vacuum coating

♦

♦

♦

♦

♦

♦

Research and development

♦

♦

♦

♦

♦

♦

Metallurgy/furnaces

♦

♦

♦

♦

♦

♦

Mechanical engineering

♦

♦

♦

♦

♦

♦

Accessories

Page

Pump fluids

C11.05

♦

♦

♦

♦

♦

♦

Astrotorus baffle

C11.09

♦

♦

♦

♦

♦

♦

Water flow monitor

C11.10

♦

♦

♦

♦

♦

♦

Overtemperature protection switch

C11.11

♦

♦

♦

♦

♦

♦

Contact thermometer

C11.11

♦

♦

♦

♦

♦

♦

Adsorption trap

C11.12

C11.02

For generating an oil-free vacuum with oil-sealed backing pumps

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Oil Diffusion Pumps

General
Diffusion Pumps
Compared to other fluid entrainment pumps the
density of the vapor in the boiler and in the vapor
jet is fairly low so that the gas molecules may
almost completely diffuse into the vapor jet. Thus
most of the molecules which enter the vapor jet
are also pumped out.
For this reason, the pumping speed of diffusion
pumps is extremely high with respect to the intake area and constant – starting at a pressure of
approximately 10-3 mbar (0.75 x 10-3 Torr) down
to very low pressures – as within the pressure
range the vapor jet is not influenced in any way
by the pressure within the vacuum vessel.

HM
VM 2
BV

4
5

3

6
VM 1

1. Continuous operation at operating pressures
above 10-4 mbar (0.75 x 10-4 Torr) – large
quantities of gas.
2. Continuous operation at operating pressures
below 10-4 mbar (0.75 x 10-4 Torr) – smaller
quantities of gas.
In applications which rely on diffusion pumps,
the vacuum chamber must be connected via a
valve (3) and a roughing line directly to the
backing pump. This is done so that the vacuum
chamber may be pre-evacuated by the backing
pump down to a pressure where the diffusion
pump can take over. Until the high vacuum valve
(4) opens, both diffusion pump and pump fluid
are preserved. Before venting the vacuum chamber the forevacuum valve (2) and the high vacuum valve (4) must be closed, whereby the diffusion pump remains in the ready status.

Pumping Speed
The pumping speed of any pump is equivalent to
the volume throughput through the intake opening of a pump. In the case of diffusion pumps
the pumping speed for lighter gases is higher
compared to heavier gases.

2
7

1

1
2
3
4
5
6
7
HM
VM1
VM2
BV

Two-stage rotary vane vacuum pump
Forevacuum valve
Rough vacuum valve
High vacuum valve
Baffle
Oil diffusion pump
Adsorption trap
High vacuum gauge
Forevacuum gauge/diffusion pump
Forevacuum gauge/roughing line
Venting valve

Diagram of a pump system with diffusion pump

Operating
Oil Diffusion Pumps
Forevacuum
In all cases diffusion pumps require a sufficiently
sized backing pump (see Technical Data). The
size and type of forevacuum pump depends on
the operating conditions and the quantities of gas
which are to be pumped.

Backstreaming of the Pump
Fluid

The values stated were measured at the ultimate
pressure and apply to DIFFELEN normal. When
using DC 705 the values may improve on average
by one order of magnitude.

Attainable Ultimate Pressure
The attainable ultimate pressure for a particular
vacuum system depends not only on the type and
pumping speed rating of the diffusion pump, but
also on the vapor pressure of the pump fluid,
shape and temperature of the baffle, leaks at
connecting flanges or welded joints and the condition of the surfaces within the vacuum chamber. When excluding all effects which contribute
to an increase in pressure within the vacuum
chamber due to leaks and contamination of the
vacuum chamber walls, it will be possible to
attain the ultimate pressures stated in the table
“Attainable Ultimate Presures with Oil Diffusion
Pumps (DIP)” given in section “General”.
In practice the following combination has been
found to work very well when needing a low
vacuum free of oil vapors.
♦ Water-cooled cold cap baffle as a integral part
of the diffusion pump together with a watercooled Astrotorus baffle which may be installed
as an additional component on the high vacuum flange of the diffusion pump.

Undesirable backstreaming of molecules from the
pump fluid is caused by the effect that some
molecules are able to leave the vapor jet and thus
do not arrive at the cooled pump body. Because
of collisions between each other and due to
reflection at the pump body, these molecules are
then able to move in the direction of the vacuum
chamber.
For DIP pumps the backstreaming effect amounts
only to a few µg per cm2 of intake area per minute.
Backstreaming may be almost completely suppressed by including a cold cap baffle or an additional Astrotorus baffle.

Backstreaming of Oil in the
Case of Diffusion Pumps
♦ Pump without baffle
approx. 1 x 10-2 mg x cm-2 x min-1
♦ Pump with cold cap baffle
approx. 1 x 10-3 mg x cm-2 x min-1
♦ Pump with Astrotorus baffle
(T = 10 °C (50 °F))
approx. 1 x 10-5 mg x cm-2 x min-1

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C11.03

C11

General

Oil Diffusion Pumps

Cooling

Sealing Methods
For ultimate pressures down to 10-8 mbar (0.75 x
10-8 Torr) bakeout temperatures of up to 150 °C
(302 °F) are sufficient. FPM (FPM = Fluor caoutchouc, temperature resistant up to 150 °C
(302 °F) sealing rings or ultra sealing rings made
of aluminum must be used.

400 °C (752 °F). However, it is only necessary to
bake out the vacuum chamber to 400 °C (752 °F)
and to maintain a temperature gradient across
the baffle or the cold trap so that a temperature
of 150 °C (302 °F) is not exceeded at the intake
flange of the pump.

In order to prevent pressure variations, ultra sealing rings must be used in the connections,
between diffusion pump and baffle.

In this way, it is still acceptable to use FPM sealing rings or ultra sealing rings made of aluminium.

Ultimate pressures below 10-8 mbar (0.75 x
10-8 Torr) require bakeout temperatures up to

The cooling water temperature should not exceed
25 °C (77 °F) at the intake and 30 °C (86 °F) at
the discharge, otherwise sufficient condensation
of the pump fluid cannot be ensured. When
connecting the cooling pipes of the pump and the
baffle in series, the cooling water must be made
to flow through the baffle first and then through
the diffusion pump, because the attainable ultimate pressure in the vacuum chamber depends
strongly on the condensation temperature of the
pump fluid in the baffle.

Attainable Ultimate Pressures with Oil Diffusion Pumps (DIP)
A ttainable Ultimate
Pr essure 1)

DIFFELEN
light

DIFFELEN
normal

DIFFELEN
ultra or DC 704

DC 705

Without baffle

mbar (Torr)

1.5 x 10-5 (1.1 x 10-5)

1.5 x 10-6 (1.1 x 10-6)

6.0 x 10-7 (4.5 x 10-7)

4.0 x 10-7 (3.0 x 10-7)

With cold cap baffle

mbar (Torr)

6 x 10-6 (4.5 x 10-6)

6 x 10-7 (4.5 x 10-7)

3.0 x 10-7 (2.3 x 10-7)

1.5 x 10-7 (1.1 x 10-7)

With Astrotorus baffle

mbar (Torr)

1.5 x 10-6 (1.1 x 10-6)

1.5 x 10-7 (1.1 x 10-7)

3.0 x 10-8 (2.3 x 10-8)

1.5 x 10-8 (1.1 x 10-8)

1)

Attained in consideration of the notes given under “Sealing Methods” in the section “General” and after degassing the connected vacuum chamber for several hours at 200 °C (392 °F)

Program Range of Diffusion Pumps
DIP 3 000

Technical Data
Pumping speed for air (in range < 10-4 mbar)

l x s-1

3 000

DIP 8 000 DIP 12 000 DIP 20 000 DIP 30 000 DIP 50 000
8 000

12 000

20 000

mbar (Torr)

< 10-2 (0.75 x < 10-2)

Ult. total press. with DC 705 and baffle, approx.
mbar (Torr)

< 10-8 (0.75 x < 10-8)

Operating range

Max. permissible forevacuum pressure

mbar (Torr)

30 000

50 000

0.6 (0.45)

0.6 (0.45)

0.6 (0.45)

0.6 (0.45)

0.6 (0.45)

0.6 (0.45)

Heating power

kW

2.4

4.8

7.2

12

18

24

Heating up time

min

< 25

< 25

< 25

< 25

< 30

< 30

160 (10)
20 (1.3)

290 (18.3)
40 (2.5)

500 (31.5)
50 (3.2)

600 (37.8)
80 (5.0)

900 (56.7)
80 (5.0)

1500 (94.5)
150 (9.5)

29 (64.0)

70 (154.5)

102 (225.2)

172 (379.7)

296 (653.4)

560 (1236.2)

DK 200 + W 251

DK 200 + W 501

SV 200 + W 501

SV 300 + W 1001

SV 630 + W 2001

at operating pressures < 10-4 mbar(< 0.75 x 10-4 Torr)

TRIVAC D 65 B +
W 251
TRIVAC D 25 B

TRIVAC D 65 B +
W 251

TRIVAC D 65 B +
W 251

TRIVAC D 65 B +
W 251

DK 200 + W 251

DK 200 + W 501

Or dering Information

DIP 3 000

Cooling water (minimum throughput)
Pump
l x h-1 (gal/min)
Cold cap baffle
l x h-1 (gal/min)
Weight, approx.

kg (lbs)

Recommended backing pump 2)
at operating pressures > 10-4 mbar (> 0.75 x 10-4 Torr)

Diffusion pump
2)

DIP 8 000 DIP 12 000 DIP 20 000 DIP 30 000 DIP 50 000

Part No. 222 10 Part No. 222 20 Part No. 222 25 Part No. 222 30 Part No. 222 35 Part No. 222 40

Singe- or two-stage rotary vane (TRIVAC; SV) or rotary piston vacuum pumps (E/DK) from our range of backing pumps jointly with Roots vacuum pumps (RUVAC) in pump systems

C11.04

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Pump Fluids for
Diffusion Pumps
Pump fluids for oil diffusion pumps must exhibit
a low vapor pressure at room temperature and
must be able to resist thermal decomposition and
oxidization to a large extent. Surface tension of
the pump fluids must be high to reduce creep of
oil films. They must be chemically inert, exhibit
high flash point and evaporation heat must be
low. Moreover, the pump fluids should permit
high pumping speeds over a wide range of pressures and be cost-effective.
One type of pump fluid alone cannot meet these
comprehensive requirements. It is therefore
required to select a pump fluid according to the
operating pressure and the requirements of the
application in each case.
The pump fluids given below are subjected to an
extensive series of tests in our factory laboratories under conditions commonly encountered in
practice by diffusion pumps.
We recommend the use of the pump fluids specifically qualified by Leybold, since only this will
ensure that the specifications will be met by our

Oil Diffusion Pumps

diffusion pumps in practice. Equally we recommend the use of qualified pump fluids to attain
the optimum oil change intervals and prevent the
accumulation of unwanted deposits.

♦ DIFFELEN ultra is used in connection with
ultrahigh vacuum pump systems. With a
water-cooled baffle the attainable ultimate
pressure is about 10-8 mbar (0.75 x 10-8 Torr).

Mineral Oil Pump Fluid
DIFFELEN

Silicone Oil

The various types of this kind of pump fluid are
closely toleranced fractions of a high quality base
product distilled with particular care. During the
distillation process the pressure and temperature
conditions are maintained continuously within
close limits, so that individual fractions are obtained which are of consistent quality.
♦ DIFFELEN light is the lightest fraction. It even
provides full pumping speed at high pressures. It is the ideal pump fluid for pressures
down to 10-5 mbar. The attainable ultimate
pressure is 10-7 mbar.
♦ DIFFELEN normal is the most frequently used
pump fluid. It is the ideal pump fluid for high
vacuum applications. The attainable ultimate
pressure is below 10-7 mbar (0.75 x 10-7 Torr).

Silicone oil differs from DIFFELEN oil in that silicone oil is a defined chemical compound which is
extremely resistant to decomposition. Because of
the extremely low vapor pressure, silicone oil is
especially well suited as a pump fluid in diffusion
pumps. Even after a great number of air inrushes,
silicone oil will remain unaffected by aging even
when subjected to mass spectrometric analysis.
DC 704 is a pump fluid for high vacuum and ultra
high vacuum applications with stringent requirements concerning resistance against oxidization
and decomposition.
DC 705 is a special pump fluid (an organic silicon
compound) for ultrahigh vacuum applications
which require an extremely low vapor pressure
together with stringent requirements concerning
resistance against oxidization and decomposition.

Overview Pump Fluids
light

Mineral Oil/DIFFELEN
normal

ultra

2 x 10-8 (1.5 x 10-8)
–

4 x 10-9 (3 x 10-9)
–

4 x 10-11 (3 x 10-11)
–

3 x 10-8 (2.3 x 10-8)
–

4 x 10-10 (3 x 10-10)
–

g/mol

500

510

600

485

545

°C (°F)

> 240 (> 464)

> 258 (> 496)

> 270 (> 518)

221 (430)

243 (469)

Dyn. viscosity at 25 °C (77 °F)

mPas

115

200

220

47

190

Kin. viscosity at 40 °C (104 °F)

mm2/s

60

100

110

24

66

0.86

0.87

0.87

1.07 1)

1.09 1)

light

Mineral Oil/DIFFELEN
normal

ultra

Part No. 176 69
Part No. 176 68
–
–

Part No. 176 73
Part No. 176 72
–
–

Part No. 176 71
–
–
–

Technical Data
Vapor pressure
at 20 °C (68 °F)

mbar (Torr)

at 25 °C (77 °F)

mbar (Torr)

Middle molecular weight
Flash point

Density at 20 °C (68 °F)

g/ml

Ordering Information * )
0.5 l (0.47 qts)
5.0 l (4.7 qts)
1.0 gal (DC 704 CA)
5.0 gal (DC 704 CP)
1)
2)

Silicone Oil
DC 704
DC 705

Silicone Oil
DC 704
DC 705
Part No. 176 94
Part No. 500 600 2)
Part No. 981 98 069
Part No. 981 98 070

Part No. 176 96
–
–
–

At 25 °C (77 °F)
5 kg (11.04 lbs)

*) Oil must be puchased separately
Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected.
The technical data given here can not be taken as assured data
For all lubricants in our line of products you may obtain Safety Data Sheets from the Dept. Technical Support in Cologne.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C11.05

C11

Oil Diffusion Pumps

3 000 - 50 000 l x s-1

DIP Pumps, Water-Cooled
The DIP range of pumps was developed for operation in industrial systems. Excellent vacuum
performance data combined with the inherent
ruggedness of this kind of pump, make our DIP
pumps a reliable component in high and medium
vacuum applications.

DIP 12 000

Advantages to the User
♦ High pumping speeds in the fine and high
vacuum ranges
♦ Low attainable ultimate pressure
♦ Integrated, water-cooled cold cap baffle guarantees low oil backstreaming rates into the
vacuum chamber
♦ Low oil losses – even at high gas throughputs
– by integrated, water-cooled forevacuum baffle
♦ High forevacuum resistance even at reduced
heating power
♦ The heating cartridges are accessible from the
outside via heating inserts which are built into
the boiler. This ensures a quick exchange of
single heating cartridges – even when the
pump is hot

♦ A temperature monitor which is built-in as
standard acts as a thermal overload switch
and ensures that the heating cartridges can
not overheat
♦ All pumps are prepared for installation with an
over-temperature switch (optional) for
checking the cooling water circuit, and a
contact thermometer (optional) to monitor the
operating temperature of the diffusion pump
♦ Indication of the oil level by sight-glass permits simple checking of the current oil level
♦ All DIP pumps are delivered with their inside
chamber cleaned in such a manner that it is
free of oil. The inside is evacuated. In the
condition as delivered, the pumps may be also
operated with silicone oil

Typical Applications
The diffusion pumps from the DIP range are used
in coating systems, vacuum melting and drying
systems as well as in vacuum furnaces in the
area of metallurgy.

Supplied Equipment
The DIP pumps are supplied ready for connection
but without the filling of pump fluid.
The inside of the pump is cleaned before delivery
to such an extent that it is free of oil. The inside
is evacuated. High and forevacuum flanges are
equipped with gaskets and centering rings having
shipping flanges and complete with clamping
components.

♦ A separate automatic circuit breaker for each
heating cartridge ensures a high level of electrical safety

C11.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

3 000 - 50 000 l x s-1

Technical D ata
High vacuum/forevacuum connection
Pumping speed for air 1)
below 1 x 10-4 mbar

DN
l x s-1

Oil Diffusion Pumps

DIP 3 000

DIP 8 000

DIP 12 000

DIP 20 000

DIP 30 000

DIP 50 000

250 ISO-K/63 ISO-K

400 ISO-K/63 ISO-K

500 ISO-K/100 ISO-K

630 ISO-F/100 ISO-K

800 ISO-F/160 ISO-K

1000 ISO-F/160 ISO-K

3 000

8 000

12 000

20 000

30 000

50 000

Operating range

mbar (Torr)

< 10-2 to 10-7 (0.75 x 10-2 to 0.75 x 10-7)

Ultimate total pressure 2)

mbar (Torr)

< 5 x 10-7 (6.7 x 10-7)

Max. permissible forevacuum pressure
mbar (Torr)
Pump fluid filling, min./max.

l (qts)

Main connection
Standard, 50/60 Hz
Special, 50/60 Hz

V
V

Heating power

kW

Number of heating cartridges
Heating up time

min

Cooling water (minimum)
l x h-1 (gal/min)
for pump 3)
for cold cap baffle
l x h-1 (gal/min)
Max. supply pressure
bar (psig)
Number of cooling circuits
(including cold cap baffle)

6 x 10-1 (4.5 x 10-1)
1.0 / 1.4 (1.1 / 1.5)

2.0 / 3.4 (2.1 / 3.6)

3.0 / 5.5 (3.2 / 5.8)

6.0 / 9.0 (6.3 / 9.5)

10 / 15 (10.6 / 15.9)

15 / 25 (15.9 / 26.4)

230 ~ 1 Ph

230/400 ~ 3 Ph D/Y
460 ~ 3 PhD

400 ~ 3 Ph Y

230/400 ~ 3 Ph D/Y
460 ~ 3 Ph D

230/400 ~ 3 Ph D/Y
460 ~ 3 Ph D

230/400 ~ 3 Ph D/Y
460 ~ 3 Ph D

2.4

4.8

7.2

12

18

24

2

6

9

12

18

24

< 25

< 25

< 25

< 25

< 30

< 30

160 (10)
20 (1.3)
6 (87)

290 (18.3)
40 (2.5)
6 (87)

500 (31.5)
50 (3.2)
6 (87)

600 (37.8)
80 (5.0)
6 (87)

900 (56.7)
80 (5.0)
6 (87)

1500 (94.5)
150 (9.5)
6 (87)

2

2

2

2

3

3

Cooling water connection
for pump
for cold cap baffle

G (BPS)
G (BPS)

3/8"
1/4"

1/2"
3/8"

1/2"
3/8"

1/2"
3/8"

1/2"
3/8"

1/2"
3/8"

Weight, approx.

kg (lbs)

29 (64)

70 (154)

102 (225)

172 (379)

296 (653)

560 (1235)

TRIVAC D 65 B +
W 251

DK 200 + W 251

DK 200 + W 501

SV 200 + W 501

SV 300 + W 1001

SV 630 + W 2001

TRIVAC D 25 B

TRIVAC D 65 B +
W 251

TRIVAC D 65 B +
W 251

TRIVAC D 65 B +
W 251

DK 200 + W 251

DK 200 + W 501

Or dering Inform a tion DIP 3 000

DIP 8 000

DIP 12 000

DIP 20 000

DIP 30 000

DIP 50 000

Oil diffusion pump

Part No. 222 10

Part No. 222 20

Part No. 222 25

Part No. 222 30

Part No. 222 35

Part No. 222 40

Astrotorus baffle

Part No. 227 50

Part No. 227 60

Part No. 227 65

Part No. 227 70

Part No. 227 75

Part No. 227 80

Water flow monitor
LR 10
LR 20

Part No. 122 82
–

Part No. 122 82
–

–
Part No. 122 83

–
Part No. 122 83

–
Part No. 122 83

–
Part No. 122 83

Recommended backing pump 4)
at operating pressures
> 10-4 mbar (> 0.75 x 10-4 Torr)
at operating pressures
< 10-4 mbar (< 0.75 x 10-4 Torr)

Over-temperature protection switch

Part No. 122 84

Contact thermometer

Part No. 218 81

Resistance thermometer PT 100 sensor

Part No. 200 02 958

Pump fluid 5)

see “Pump Fluids for Diffusion Pumps” in section “General”

Version for the North and South American Continents
Oil diffusion pump

–

Part No. 222 20-460 V

Special connection flange

Part No. 222 25-460 V

Part No. 222 30-460 V

Part No. 222 35-460 V

Part No. 222 40-460 V

upon request

1)
2)

Measured to DIN 28 427 with DIFFELEN normal as the pump fluid
Measured to DIN 28 427 with DIFFELEN normal as the pump fluid. With pump fluids DC 705 and FPM gaskets the DIP pumps - when equipped with water-cooled baffles and after running a suitable
degassing processes - are capable of attaining pressures below 1 x 10-8 mbar (0.75 x 10-8 Torr)
3) The required quantity of cooling water refers to DT = 10 °C (50 °F). The discharge temperature should not exceed 30 °C (86 °F)
4) Single- or two-stage rotary vane (TRIVAC; SV) or rotary piston vacuum pumps (E/DK) from our range of forevacuum pumps jointly with Roots vacuum pumps (RUVAC) in pump systems
5) Oil must be puchased separately

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C11.07

C11

3 000 - 50 000 l x s-1

Oil Diffusion Pumps

d
d1

d
d1

DN

d
d1

DN

h2 h3

h2 h3
h1

h1

DN1
h

h

DN

h2 h 3
h1
h

DN1

DN 1

h4
h4

h4

d3

L EY B O L D

G1/4"

d3

G3/8"

G3/8"

d2

d3
d5

d4

a

a

1

b

d4

d5

G3/8"
b

1

a1

G1/2"

b1

d2

3

b

2

b1

1

a1

b1

G1/2"
a
DIP
DN
DN1
a
a1
b
b1
d
d1
d2
d3
d4
d5
Quantity of holes
h
h1
h3
h2
h4
α
α1
α2
α3

3 000
250 ISO-K
63 ISO-K
240 (9.45)
250.5 (9.86)
443 (17.44)
276 (10.87)
290 (11.42)
261 (10.28)
–
278 (10.94)
–
–
–
560 (22.05)
250 (9.84)
68 (2.68)
75 (2.95)
45 (1.77)
45 °
20 °
–
–

8 000
400 ISO-K
63 ISO-K
350 (13.78)
375.5 (14.78)
643 (25.41)
373 (14.69)
450 (17.72)
400 (15.75)
405 (15.94)
530 (20.87)
–
–
–
785 (30.91)
400 (15.75)
88 (3.46)
102 (4.02)
68 (2.68)
30 °
30 °
–
–

12 000
500 ISO-K
100 ISO-K
420 (16.54)
432 (17)
775 (30.51)
460 (18.11)
550 (21.65)
50119.72)
506 (19.92)
630 (24.80)
–
–
–
940 (37)
470 18.5)
92 (3.62)
106 (4.17)
68 (2.68)
30 °
30 °
–
–

20 000
630 ISO-F
100 ISO-K
540 (21.26)
496 (19.53)
920 (36.22)
540 (21.26)
750 (29.53)
651 (25.63
636 (25.04)
760 (29.92)
720 (28.35)
14 (0.55)
20
1130 (44.49)
620 (24.41)
97 (3.82)
110 (4.33)
74 (2.91)
30 °
30 °
–
–

30 000
800 ISO-F
160 ISO-K
600 (23.62)
536 (21.10)
1090 (42.91)
630 (24.8)
920 (36.22)
800 (31.5)
716 (28.19)
840 (33.07)
890 (35.04)
14 (0.55)
24
1450 (57.09)
870 (34.25)
102 (4.02)
116 (4.57)
70 (2.76)
20 °
30 °
–
–

50 000
1000 ISO-F
160 ISO-K
800 (31.5)
636 (25.04)
1290 (50.79)
730 (28.74)
1120 (44.09)
1000 (39.37)
916 (36.06)
1040 (40.94)
1090 (42.91)
14 (0.55)
32
1880 (74.02)
1275 (50.2)
102 (4.02)
116 (4.57)
70 (2.76)
25 °
45 °
25 °
15 °

Dimensional drawing for the DIP 3000 [left], DIP 8000 to DIP 30 000 [middle] and DIP 50 000 [right]; dimensions in brackets ( ) are in inch

10 5
DIP 50000
DIP 30000
DIP 20000

Pumping speed

l x s-1

DIP 12000
DIP 8000

10 4

DIP 3000

10 3

8
6
4
2

10 2
10 -6

2

4

6 8

10 -5

10 -4

10 -3

mbar

10 -2

Intake pressure

Pumping speed characteristics of the DIP pumps as a function of intake pressure

C11.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Oil Diffusion Pumps

Astrotorus Baffles
The cooling inserts of the astrotorus baffles are
made of copper, whereas the housing and the
connection flange are made of standard steel.

Section through an Astrotorus baffle

DN
d
d1
DN

d
d1
DN

d2
24

h

140

h1
a
Hose nozzle, 14 mm dia.

57
d2

24

b

a
Hose nozzle, 14 mm dia.

30°

1

Dimensional drawing for the Astrotorus baffle ISO-K (left) and ISO-F (right)

Technical Data

a

b

ld

l d1

250 ISO-K
mm
in.

l d2 Quantity

h

h1

α

α1

265
10.4

30
0.18

416
16.4

290
11.4

–
–

–
–

195
7.68

97
3.82

–
–

–
–

400 ISO-K
mm
in.

362
14.25

120
4.72

512
20.2

450
17.7

–
–

–
–

193
7.6

96
3.78

–
–

–
–

500 ISO-K
mm
in.

412
16.22

120
4.72

612
24.1

550
21.7

–
–

–
–

193
7.6

96
3.78

–
–

–
–

630 ISO-F
mm
in.

440
17.32

–
–

750
720
29.53 28.35

14
0.55

20
20

–
–

–
–

18 °
18 °

9°
9°

800 ISO-F
mm
in.

546
21.5

–
–

920
890
36.22 35.04

14
0.55

24
24

–
–

–
–

15 °
15 °

7.5 °
7.5 °

1000 ISO-F
mm
in.

599
23.58

–
–

1120 1090
44.09 42.91

14
0.55

32
32

–
–

–
–

11.25 °
11.25 °

5.625 °
5.625 °

Astrotorus Baffles

Connection to pump

DIP

3 000

8 000

12 000

20 000

30 000

50 000

HV connection flanges

DN

250 ISO-K

400 ISO-K

500 ISO-K

630 ISO-F

800 ISO-F

1000 ISO-F

Throttling of the pumping speed, approx.
Conductance
Weight

%
l x s-1
kg (lbs)

30
3000

9000

12 000

18 000

28 000

50 000

25 (55.2)

30 (66.2)

65 (143.5)

120 (264.9)

170 (375.3)

190 (419.4)

–
–
–
–
Part No. 227 75
–

–
–
–
–
–
Part No. 227 80

Astrotorus Baffles

Ordering Information
Astrotorus baffle
0250 ISO-K
0400 ISO-K
0500 ISO-K
0630 ISO-F
0800 ISO-F
1000 ISO-F

Part No. 227 50
–
–
–
–
–

–
Part No. 227 60
–
–
–
–

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

–
–
Part No. 227 65
–
–
–

–
–
–
Part No. 227 70
–
–

C11.09

C11

Oil Diffusion Pumps

Accessories

Monitoring Instruments
Protection against
Overheating
Water flow monitors are installed in the cooling
water return section of the diffusion pump. When
the cooling water throughput drops below a certain level, either the heater in the diffusion pump
is switched off or a warning light or signal is triggered, depending of the type of circuit.

a
LR 10
LR 20

Water flow monitors may be installed in any
orientation.
Max. switching capacity:
100 VA (230 V, 50/60 Hz).

Protection against
Power Failure

c1
c
l2

l1

a

M6 x 8
l3

*
a b

Type LR 10 for 060 to 0600 l x h-1
(3.78 to 37.8 gal/min)
Type LR 20 for 600 to 2400 l x h-1
(37.8 to 151.2 gal/min)
The water throughput may be set within the limits
stated with a high degree of reproducibility.

M 12 x 1.5
G 3/4 "

l
mm
in.

≈l

l1

l2

l3

b

c

c1

230

102 - 112

72

46

62

20

15

9.06 4.02 - 4.41 2.83

1.81

2.44

0.79

0.59

* Only LR 10

Dimensional drawing for the water flow monitors LR 10 and LR 20

Order ing Information
Water flow monitor
LR 10
LR 20

Monitoring Instruments
Part No. 122 82
Part No. 122 83

A SECUVAC valve (see Product Section C14
“Vacuum Valves”) must be installed in the forevacuum line in order to prevent damage to the
diffusion pump or the pump fluid in the event of
a power failure affecting backing pumps which
are not equipped with an automatic isolation
valve. Rotary vane vacuum pumps from the
TRIVAC B Series are equipped with an automatic
safety valve (intake isolation valve) as standard.

Protection against Pressure
Increases in the Forevacuum
Line
For protection against a pressure increase in the
forevacuum line which is not caused by a power
failure you may use our vacuum gauges which
offer an adjustable switching threshold (see
Product Section C16 “Total Pressure Gauges”).

C11.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Temperature dependant
Switching Components for
Automatic Pump System Control

b

150

The upper threshold indicates that the diffusion
pump is ready for operation and thus actuates
certain devices, for example opening of the high
vacuum valve ahead of the diffusion pump.

Max. switching current: 5 A (230 V, 50/60 Hz)
Contact thermometer with a range from 0 to
400 °C (752 °F). Through a trailing pointer two
switching thresholds may be set up independently. The current oil temperature and the thresholds
which have been set up can be read off at the
location of the diffusion pump. The contacting
thermometer is not suited for remote signalling
of temperatures.

a1

200
250
300

50

350
0

400

a2

c

a3

30°

d2 d3
d1
d
l1

l
a
mm
in.

Dimensional drawing for the contact thermometer

95

a1

a2

a3

119.5 17.5

b

c

l d l d1 l d2 l d3

62 101.5 92

14

12

9

l

G 1/2 170

l1
33

3.74 4.70 0.69 2.44 4.00 3.62 0.55 0.47 0.35 G 1/2 6.70 1.30

l3
d2
d

d3

The lower threshold indicates that the diffusion
pump has cooled down to such an extent that the
backing pump and the cooling water supply may
be switched off.
Over-temperature protection switches are used
to monitor the temperature of the cooling water
in the cooling water circuit of the diffusion
pumps. When the temperature rises to unacceptably high levels – for example when the cooling
water supply fails – the heater in the diffusion
pump is switched off (correct electrical connection to the main supply is required). The use of
over-temperature protection switches avoids
unnecessary alarms that may be triggered by
contaminated water when only a water flow
monitor is used. The over-temperature protection
switch is screwed on to a contact plate which is
soldered to the cooling pipe on the pump’s body.

a

100

The operational status of the diffusion pump
depends on the temperature of the pump fluid in
the pump boiler. Through temperature dependent
switching components which are inserted into the
pump boiler it is possible to monitor the operational status of the diffusion pump and signal its
status to a process controller.
For this, the diffusion pump requires two thresholds.
Depending on the type of pump, the upper threshold should be between 180 and 200 °C (356 and
392 °F) and the lower threshold between 90 and
100 °C (194 and 212 °F).

Oil Diffusion Pumps

d1
l1
l4

l2
l

l d l d1 l d2 l d3
mm
in.

12

6 G 1/2 22

l

l1

l2

230 115 170

l3

l4

25

30

C11

0.47 0.24 G 1/2 0.87 9.06 4.53 6.69 0.98 1.18

Dimensional drawing for the resistance thermometer PT 100 sensor

Or der ing Information

Monitoring Instruments

Over-temperature protection switch

Part No. 122 84

Contact thermometer
(Measurement range 0 to 400 °C (32 to 752 °F),
Rating at 220 V AC: 250 mA [resistive load],
Weight: 1.7 kg (3.7 lbs))

Part No. 218 81

Resistance thermometer PT 100 sensor

Part No. 200 02 958

Resistance thermometer PT 100 sensor. The
measurement range of this sensor depends on
the temperature display unit used by the customer where also the required thresholds are set
up. The PT 100 sensor is ideal for remote signalling of temperatures.
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C11.11

Oil Diffusion Pumps

Accessories

Adsorption Traps with Aluminum Oxide Insert
Adsorption traps are used in all those cases
where a vacuum free of oil is to be produced with
the aid of oil-sealed vacuum pumps.

Adsorption trap (left) and inserts (right)

Advantages to the User

d

♦ Backstreaming of oil is reduced by 99 %
♦ Long service life
DN

♦ High conductance
♦ Filling can be easily exchanged

h

♦ Improvement in the ultimate pressure attained
by backing pumps by one order of magnitude

a1
h1

♦ Stainless steel housing and insert

a

♦ NBR gasket

Typical Applications

DN

♦ Product of an oil-free vacuum

Mass number

♦ Complete with insert
♦ Without adsorbent
Residual gas spectrum; top ahead of a rotary vacuum pump,
bottom ahead of a rotary vacuum pump with adsorption trap

Tec hnic al Data
Conductance at 10-2 mbar (Torr)
mbar x l x s-1 (Torr x l x sec)
Service live with Al oxide

a1

ld

h

h1

16 KF
mm

82

82

135

147

32

in.

3.23

3.23

5.31

5.79

1.25

102
4.02

102
4.02

175
6.89

155
6.10

33
1.26

132
5.19

65
2.56

235
9.25

160
6.3

20
0.79

25 KF
mm
in.
40 KF
mm
in.

Supplied Equipment

Dimensional drawing for the adsorption traps

16 KF

25 KF

40 KF

4

6

12

3

Months

Al oxide filling

l (qts)

0.5 (0.53)

1.0 (1.06)

2.0 (2.1)

Weight, approx.

kg (lbs)

1.3 (2.9)

1.3 (2.9)

4 (8.8)

16 KF

25 KF

40 KF

Order ing Information

Part No. 854 14 Part No. 854 15 Part No. 854 16

Adsorption trap
Activated aluminum oxide, 2 l (approx. 1.3 kg (2.8 lbs))

C11.12

a

DN

Part No. 854 10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12

Cryopumps, Cryogenics

Cryopumps, Cryogenics

Contents

General
Applications and Accessories
Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
General
Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Multiple-Operation of Refrigerator Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Regenerating Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Refrigerating Capacity of Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Compressor Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C12.03
C12.04
C12.05
C12.06
C12.06
C12.07
C12.07
C12.09

Products
Cryopumps
Standard Cryopumps
COOLVAC 800 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cryopumps with Fully Automatic Control
ClassicLine
COOLVAC 1.500 CL, 2.000 CL, 3.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLVAC 5.000 CL, 10.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLVAC 18.000 CL, 30.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SemiLine
COOLVAC 1500 SL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
System Controller SC / Power Supply PS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Conversion of Units
Celsius, Fahrenheit, Kelvin
Kelvin (abbreviated as K) is the unit of
temperature.
Temperatures on the Kelvin scale are converted
into temperatures on the Celsius scale as follows:
n °C ; (n + 273.15) K.
Since the following equation applies between
Celsius scale and Fahrenheit scale

C12.10

C12.12
C12.18
C12.22
C12.24
C12.25

Cryogenics
Cold Heads
Single Stage Cold Head COOLPOWER 120 T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.28
Dual Stage Cold Heads
COOLPOWER 7/25, 5/100 and 5/100 T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.30
Compressor Units COOLPAK 4000/4200, COOLPAK 6000/6200. . . . . . . . . . . . . . . . . . . . . . C12.32
General Accessories for Compressor Units COOLPAK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.34
Refrigerator Cryostats
Based on RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.35
Optical, based on RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.36

n °F ; 5/9 (n – 32) °C
it follows that
n °F ; 5/9 (n + 459.67) K.
The inverse equations are as follows:
m K ; (m – 273.15) °C
m °C ; (1.8 m + 32) °F
m K ; (1.8 m – 459.67) °F.
The following applies in particular to absolute
Zero:
0 K ; -273.15 °C ; -459.67 °F.

Accessories
Cryopumps / Cryogenics
Controllers and Monitoring Units for Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLVAC ClassicLine, System Configuration
Single Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dual Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dual and Mutiple Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Modell 9700 Low Temperature Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MODEL 1901 Low Temperature Measuring Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Temperature Sensors (Silicon Diode) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Safety Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Precision Manometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C12.38
C12.39
C12.40
C12.41
C12.42
C12.43
C12.44
C12.45
C12.45

1 bar = 14.5 psi
1 MPa = 10 bar

C12.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Applications and Accessories, Cryopumps and Stirling Cooler

0S

L

CL
CO

OL
VA
C

1.

.0

50

00

CL
30

.0
CO

OL
VA
C

18

OL
VA
C
CO

CO

OL
VA
C

10

.0

00

00

CL

L
00

0C

L

5.

OL
VA
C
CO

CO

OL
VA
C

3.

00

0C

L
00

0C

L

2.

0C
50
1.

OL
VA
C

0
80

OL
VA
C
CO

OL
VA
C
CO

CO

ps
m
pu
yo
Cr

Cryopumps, Cryogenics

Application
UHV systems

◆

Beam tubes in particle accelerators

◆

Transfer chambers / Loadlock
General research

◆

◆

◆

◆

◆

(◆)

◆

◆

◆

◆

◆

◆

◆

◆

◆

Evaporation coating systems

◆

◆

◆

◆

◆

◆

◆

◆

Sputtering systems

◆

◆

◆

Ion implanters

◆

◆

◆

(◆)

Metallization systems

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

◆

Space simulation chambers

◆

Electron beam welding systems

Accessories

◆

◆
◆
◆
◆

Page

COOLPAK 4000/4200 compressor unit

C12.32

COOLPAK 6000/6200 compressor unit

C12.32

MODEL 1901 low temperature measuring instrument

C12.43

◆

Temperature sensors (silicon diode)

C12.44

◆

GD 2 gas manifold

C12.34

◆

◆

◆

GD 4 gas manifold

C12.34

◆

◆

◆

◆

◆

◆

◆

◆

[◆]

◆

◆

◆

◆

◆

◆

◆
◆

( ◆ ) = Only conditionally suited
[ ◆ ] = For dual operation only

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12

C12.03

Applications and Accessories, Cold Heads

00
5/1

00

ER

5/1
CO

CO

OL

OL

PO

PO

W

W

ER

ER
PO
CO

Co

CO

ld

OL

OL

PO

He

W

W

ER

ad

s

12

7/2

5

0T

T

Cryopumps, Cryogenics

Application
Cooling of samples and detectors

◆

Cooling of superconductors

◆

◆

◆

◆

◆

◆

Cooling of cryopanels

◆

◆

◆

◆

Cleaning of gases

◆

◆

◆

◆

Calibration of sensors

◆

Optical spectroscopy

◆

◆

◆

Infrared spectroscopy

◆

◆

◆

Matrix spectroscopy

◆

Testing of superconductors

◆

Cooling of superconducting magnets, coils and components HTC + LTC

Accessories

◆

◆

◆

◆

◆

◆

◆

◆

Page

COOLPAK 4000/4200 compressor unit

C12.32

COOLPAK 6000/6200 compressor unit

C12.32

Modell 9700 low temperature controller

C12.42

MODEL 1901 low temperature measuring instrument

C12.43

◆

◆

◆

◆

Temperature sensors (silicon diode)

C12.44

◆

◆

◆

◆

C12.04

◆
◆

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Cryopumps, Cryogenics

Cryopumps
Cryopumps are gas entrapment vacuum pumps
for the pressure range from 10-3 to < 10-11 mbar
(0.75 x 10-3 to ≤ 0.75 x 10-11 Torr). The principle
of operation is that gaseous substances are
bound to the cold surfaces within the pump by
means of cryocondensation, cryosorption or
cryotrapping.
In order to be able to produce a high or ultra high
vacuum the cold surfaces (cryopanels) must be
cooled to a sufficiently low temperature. Depending on the type of cooling system used a difference
is made between refrigerator cryopumps, bath
cryopumps and evaporator cryopumps.
LEYBOLD manufactures only cryopumps which
are cooled by means of a refrigerator.

Advantages to the User
Advantages offered by the Pumping Principle
♦ High effective pumping speed for all gases
♦ Extremely high pumping speed for water
vapor
For a given diameter of the high vacuum flange,
the cryopump offers the highest pumping speed
of all high vacuum pumps.

♦ Easy process control and pump control via
computer
♦ Favorable price-to-performance ratio and low
running costs especially at higher pumping
speeds
The cryopumps are cooled by the well-proven
two-stage cold heads from LEYBOLD’s
COOLPOWER line (Gifford/McMahon principle).
The design of a refrigerator cryopump from the
COOLVAC range is shown schematically in the
figure below.
The first stage of the cold head (9) cools the
thermal radiation shield (5) and the baffle (6) of
the pump. Depending on the type of pump and
the operating conditions operating temperatures
of 45 to 80 K are attained.
Correspondingly water vapor condenses at this
temperature.
The thermal shield and baffle are made of copper
which conducts heat very well so as to optimally
utilize the refrigerating capacity which is available.
Moreover, the thermal shield is metallized so that
reflective losses will be minimal.

Advantages offered by Design
In contrast to gas transfer high vacuum pumps
(mechanically suspended turbomolecular pumps,
for example), cryopumps do not have any
mechanically moving, oil, or grease lubricated
parts on the vacuum side.

♦ Insensitivity to mechanical disturbances from
particles coming from the process or external
vibrations.
Further Advantages
♦ Much more compact than comparable pump
systems offering a pumping speed of over
1500 l x s-1

Here the process of cryocondensation of N2, O2
and argon will take place.
The active pumping surfaces are made of copper
of high thermal conductivity and they are tightly
linked thermally to the second stage of the cold
head. H2, Ne and He are also adsorbed on to
these surfaces which are partly covered with
activated charcoal.
All cryopumps from the COOLVAC range are
equipped with a safety valve which is set in the
factory so that it will open at an overpressure of
150 mbar (113 Torr). In order to be able to safely
remove any gases which may present a health
hazard when the safety valve responds, the valve
is equipped with an additional DN 40 KF flange
where an exhaust line is connected.
The pump’s body, all flanges and the safety valve
are made of high-quality stainless steel.
Upon request we will be pleased to mail you
our special publication SO 182.04.02 “Benefits
of modern refrigerator cryopumps in industrial
processes and research”.

6

The following advantages are a direct result of
this design characteristic:
♦ Hydrocarbon-free vacuum in the pressure
range from 10-3 to < 10-11 mbar (0.75 x 10-3
to ≤ 0.75 x 10-11 Torr).

The second stage of the cold head (7) is used to
cool the cryopanels (8). Depending on the operating conditions, operating temperatures of 10 to
20 K are attained.

1

2
1
2
3
4
5
6
7
8
9
10
11

High vacuum flange
Pump body
Foreline flange
Safety valve with flange connection
for connection of an exhaust line
Thermal radiation shield
Baffle
Second stage of the cold head
Cryopanels
First stage of the cold head
Helium gas connections
Cold head motor with housing and
electrical connections

3

10

11

7

5

4

8

9

♦ Backing pump is only required during start-up
and during regeneration

COOLVAC refrigerator cryopump

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.05

C12

Cryopumps, Cryogenics

Multiple Operation of
Refrigerator Cryopumps
The powerful LEYBOLD compressor units
COOLPAK 4000 D and 6000 D open up the possibility of operating two cold heads or refrigerator
cryopumps simultaneously.

General

Advantages to the User
♦ Significantly reduced investment and operating costs
♦ Small footprint

Multiple operation means operation of several
cryopumps with one compressor unit.

Regenerating Cryopumps

Cryopumps with Fully Automatic Electric
Regeneration System from LEYBOLD

An important aspect in the operation of cryopumps is that of regeneration. Since a cryopump
is a gas entrapment pump, the gasses which
have accumulated in the pump during the
“pumping” mode must from time to time be
removed from the pump. This is done by switching the compressor unit off and by warming up
the cryopanels to room temperature or sightly
higher so that the released substances can be
pumped out by a forevacuum pump.

The cryopump is warmed up to room temperature by heating the 1st and 2nd stages of the cold
head with electric heaters. In this case, a defined
and controlled temperature distribution within the
cryopump can be set up. This controlled warming
process ensures that the pumped gases are
removed sequentially, i.e. the pumped gases are
released one after the other in the following
sequence:

Cryopumps without Electric Regeneration
System

♦ Gases adsorbed at the cryopanels
(e.g. hydrogen, helium, neon),

The cryopump is warmed up to room temperature by purging the inside of the pump with a dry,
pre-warmed inert gas (such as nitrogen). In this
case it is not possible to set up defined and controlled temperatures within the cryopump. Thus
the simultaneous presence of gases such as
hydrogen and oxygen in the pump can not be
entirely excluded. The formation of ignitable gas
mixtures is only prevented by the diluting effect
of the dry inert gas.

♦ Gases condensed at the cryopanels
(e.g. nitrogen, oxygen, argon),

COOLVAC V
High-vacuum flange at the top,
cold head at the bottom

♦ Gases and vapors which have condensed on
to the baffle and thermal radiation shield (e.g.
water vapor).
The electric method of regeneration from
LEYBOLD prevents gases such as hydrogen and
oxygen from being present in the pump at the
same time. This excludes the formation of ignitable gas mixtures right from the start.

The warming up process is fully automatic.
Pressure and temperature distribution within the
pump are set up and controlled by the control
system at all times. The sequential regeneration of
pumped gases prevents the formation of ignitable
gases right from the start. This ensures the
utmost safety during the regeneration of cryopumps from LEYBOLD.
In the case of cryogenic pumps with fully automatic control there exist two cryo pump lines.
1. The COOLVAC ClassicLine (COOLVAC CL)
offering the following pumping speed
classes for nitrogen in l/s: 1500, 2000, 3000,
5000, 10.000, 18.0000 and 30.000;
COOLVAC 1500 CL, for example.
2. The COOLVAC SemiLine (COOLVAC SL)
offering a pumping speed for nitrogen of
1500 l/s: COOLVAC 1500 SL.
The pumps of the ClassicLine offer total regeneration as standard and the COOLVAC 1500 SL
offers in addition the possibility of fast regeneration.
In the price list the designators “V” and “H” appear
in connection with the pump designations.
“H”:
The high-vacuum flange is located at the side
and the cold head below, as is the case for the
COOLVAC 1500 SL-H, DN 200 CF.
“V”:
The high-vacuum flange is located at the top
and the cold head below, as is the case for the
COOLVAC 1500 CL-V, DN 200 CF.

COOLVAC H
High-vacuum flange at the side,
cold head at the bottom

Installation orientations for the COOLVAC

C12.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Cryopumps, Cryogenics

Refrigerating Capacity of Cryogenic Cold Heads
150

35

W

10W

2nd Stage Temperature

Cooling Capacity

125

100

75

50

25

0

10

20

30

40

50

60

70

80

90

100

Temperature

K

Stage

10W

25 Refriga20 ration

8W

Capacity

15

6W
4W
2W

10

0W

5
0

2 nd Stage Temperature

2 nd Stage Temperature

12W

30 2nd

40W

80W

100W

120W

140W

1st Stage Refrigaration Capacity

0

20

40

60

8W

7W

15

5W
4W
3W
2W
1W
0W
10W

10
5
0

20

40

35W
25W

1st Stage
Refrigeration Capacity
100
60
80
1st Stage Temperature

120

K

140

Typical refrigerating capacity of the cold head COOLPOWER 7/25

40
35

9W

6W

110

Typical refrigerating capacity of the cold head COOLPOWER 120 T

2nd Stage
Refrigeration
Capacity

20

0

0

K

30
K
25

80

100

120

K

30
K
25

10W

2nd
Stage
20 Refrigeration
15 Capacity

10

6W

4W
2W
0W
0W 20W

5

140

8W

40W 60W

80W

100W

120W

140W

1st Stage Refrigeration Capacity

0

1st Stage Temperature

0

20

40

60

80

100

120

K

140

1st Stage Temperature

Typical refrigerating capacity of the cold head COOLPOWER 5/100 T

Typical refrigerating capacity of the cold head COOLPOWER 5/100

The refrigerating capacities stated apply to vertical operation with the cold end at the bottom.

C12

Cold Heads
A refrigerator (cold head) is a gas cooling
machine which operates on the basis of a
thermodynamic cycle to produce cryogenic
temperatures (T < 120 K).
Refrigerators operating according to the Gifford/
McMahon principle have succeeded over other
methods of cooling cryopumps and cryostats.
It is thus employed exclusively by LEYBOLD.
In order to account for individual requirements
from customers, LEYBOLD offers customized
cryostats as well.

Gifford/McMahonRefrigerators
Advantages to the User

Advantages by Design
♦ No space problems since cold head and compressor unit can be installed and operated
apart

♦ Low temperatures on a single key press

♦ Installation of the cold head basically in any
orientation

♦ No liquid helium and no liquid nitrogen are
required

♦ High reliability

♦ Very simple to operate

♦ Long periods of operation without
maintenance

♦ High refrigerating capacity from a small
volume
♦ Easy process control and temperature control
via a computer

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.07

Cryopumps, Cryogenics
Typical Applications
♦ Cooling of cryopanels in cryopumps thereby
producing high or ultra high vacuum
♦ Cooling of superconducting magnets; in
magnetic resonance tomographs, for example
♦ Cooling of samples and detectors; especially
for cooling of
– samples for spectroscopic analysis in the
areas of solid state and surface physics
– high temperature superconductors
– superconductors and semiconductors
– infrared and gamma detectors
♦ Calibration of sensors

Cold Heads from the
COOLPOWER Range
The standard range of single-stage and two-stage
cold heads matches a wide range of applications.
LEYBOLD is offering refrigerators with usable
refrigerating powers of 120 W at 80 K
(COOLPOWER 120, single-stage) and down to
3.5 W at 10 K (COOLPOWER 5/100 T; dualstage).
The cold heads basically consist of three subassemblies:
♦ Drive and control unit for the displacer
♦ Displacer
♦ First stage of the cold head (and second stage
in the case of two-stage cold heads).

General

Pneumatically driven
Cold Heads

W
200

Advantages

.

5/100

150

Q1

♦ Simple Design
The pneumatic drive system for the displacer
of these cold heads from LEYBOLD consists
of only two mechanically moving components: the rotating control valve and the
synchronous motor driving the control valve.

100

7/25

50
0
0

♦ Easy and quick maintenance
All LEYBOLD cryopumps from the COOLVAC
range are equipped with pneumatically driven
LEYBOLD cold heads. Owing to the simple
design of the built-in cold heads, maintenance
is easy. Maintenance can be performed in
place without detaching the cryopump from
the vacuum chamber.

50 100 150 200 250 300 K
T1

Refrigerating capacity as a function of temperature; operation in connection
with the recommended compressor unit at 50 Hz; measured under standard
acceptance conditions: .
Refrigerating capacity Q 1 of the. first stage as a function of temperature T1
of the first stage (2nd stage: Q 2 = 0)

W
30

Advantages Through High
Reliability

.
Q

7/25

25
2

20
5/100

15

As to reliability, LEYBOLD cold heads are top performers.

10
5

Especially high reliability is required for medical
instrumentation, specifically in connection with
nuclear spin tomographs. In this application cold
heads are used to cool superconducting magnets
and they are thus exposed to strong magnetic
fields.

0

0

50 100 150 200 250 300 K
T2

.
Refrigerating capacity Q 2 of the second stage as a function of temperature T2,
of the second stage (1st stage: T1 = 80 K = constant)
Standard acceptance conditions:
Cold head in a vacuum, 2nd cold stage thermally shielded by a radiation
shield (high-gloss. nickel-plated) attached to the 1st stage,
thermal loading Q simulated by electrical heating.

The leading manufacturers of nuclear spin tomographs have therefore decided to use LEYBOLD
cold heads to cool the superconducting magnets.

13
12
1 Electrical connection and current lead-through for
cold head motor
2 Helium high pressure connection
3 Helium low pressure connection
4 Cylinder, 1st stage
5 Displacement piston, 1st stage
6 Regenerator, 1st stage
7 Expansion volume, 1st stage
8 1st (refrigerator) stage (copper flange)
9 Cylinder, 2nd stage
10 Displacement piston, 2nd stage
11 Refrigerator, 2nd stage
12 Expansion volume, 2nd stage
13 2nd (refrigerator) stage (copper flange)
14 Vapor pressure measurement chamber
15 Control piston
16 Control volume
17 Control disc
18 Control valve
19 Cold head motor

11
10
9
8
7
6
5
4
3
2
1

14
15
16
17
18
19

Dual-stage Gifford/McMahon cold head (schematic diagram)

C12.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Refrigerator Cryostats
(Basic Units)
Advantages to the User
♦ Can be installed basically in any orientation
thereby offering a high degree of flexibility in
experimental arrangements
♦ Can be set to any temperature within 10 and
320 K

♦ Very simple to operate
♦ Temperature control without problems
through standardized control- and connecting
components

Cryopumps, Cryogenics
♦ Measurement of electric and thermal transport
quantities, as a function of the temperature,
such as
– electric and thermal conductance
– electromotive force

♦ Possible high throughput of samples due to
short cooldown and warming-up periods

Especially in connection with:

Typical Applications

♦ Spectroscopic investigations in the infrared,
visible and ultraviolet spectral ranges

♦ Cooling of

♦ Matrix spectroscopy

– high temperature superconductors
– superconductors and semiconductors
– infrared and gamma detectors

♦ High refrigerating capacity, constant temperatures
♦ No liquid refrigerants are required

♦ Moessbauer spectroscopy
♦ Magneto-optic experiments

Compressor Units
COOLPAK 4000 to 6000 compressors are available for single operation of the remaining cold
heads from the COOLPOWER line as well as for
multiple operation of cryopumps and cryostats.
The period during which no maintenance will be
required on the LEYBOLD compressor units
depends on the service life of the adsorber. If the

values for the ambient temperature and the cooling water entry temperature remain within the
specified range, LEYBOLD guarantees a service
life for the adsorber – and thus a period during
which no maintenance will be required – of
18 000 operating hours.

The possibilities for multiple operation of refrigerator cryo pumps are given in the following table:
For the operation of
Compressor unit

Cryopumps

COOLPAK 4000 D

2 x COOLPOWER 7/25

2 x COOLVAC 800/1500/2000

COOLPAK 4000/4200

–

2 x COOLVAC 1500/2000

COOLPAK 6000 D
COOLPAK 6000/6200
1)

Cold heads

2 x COOLPOWER 7/25
up to 2 x COOLPOWER 5/100 1)
–
–

up to 3 x COOLVAC 1500/2000
2 x COOLVAC 3000

at reduced power

UL Approval
The LEYBOLD refrigerators in this catalog (consisting of compressor unit COOLPAK (4000/4200,
6000/6200, flex lines FL and the cold head
COOLPOWER 2) meet – as complete systems –
the requirements of the Underwriter Laboratories
(UL) as Recognised Components (Urus) as well
as the approval cUR performed through the
Underwriter Laboratories for the Canadian Standards Association.
LEYBOLD refrigerators are listed under the UL/cUL
reference number SA 8676. The marks as shown
on the right for the entire system can only be
found on the name plate of the compressor unit.
2)

C12

2 x COOLVAC 1500/2000
2 x COOLVAC 3000

CE Approval

®

C

US

The LEYBOLD compressor units RW and
COOLPAK meet the basic requirements regarding safety and health of the relevant EC directives. They carry on the name plates of the
compressor units the following mark.

resp. formerly RGD

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.09

Standard Cryopumps

Cryopumps

COOLVAC 800

COOLVAC 800 (160 ISO-K)

COOLVAC 800 (160 CF)

Advantages to the User

Advantages to the User

♦ Hydrocarbon-free high vacuum

♦ Hydrocarbon-free ultrahigh vacuum

♦ High capacity for argon and hydrogen

♦ High pumping speed for water vapor,
nitrogen and hydrogen

♦ High pumping speed for water vapor, argon
and hydrogen
♦ Fast, safe and efficient regeneration with an
electric regeneration system

Typical Applications

Typical Applications

♦ Lamps and tubes manufacture

♦ Beam tubes in particle accelerators

♦ Transfer chambers / Loadlock

♦ UHV systems

♦ General research

DN

DN

59

78

152

158

533

130

211

Dimensional drawing for the COOLVAC 800 (160 ISO-K)

C12.10

540

ø130

222

Dimensional for the COOLVAC 800 (160 CF)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Standard Cryopumps

Technical Data

Cryopumps

COOLVAC 800 (ISO-K)

COOLVAC 800 (CF)

High vacuum flange

DN

160 ISO-K

160 CF

Fore vacuum flange

DN

40 KF

40 CF

Flange for other purposes

DN

16 KF (1x), 25 KF (1x), 40 KF (1x)

40 CF (2x)

welded-in

burst disk
mounted on DN 16 CF

Safety valve with DN 40 FK flange connection
for gas exhaust line
Pumping speed
H2O
Ar/N2
H2/He

l x s-1
l x s-1
l x s-1

Capacity
Ar/N2
H2 at 10-6 mbar
He

2600
640/800
1000/300

bar x l (Torr x l)
bar x l (Torr x l)
bar x l (Torr x l)

Built-in cold head

270 (270 000)
4.3 (3225)
0.5 (375)

COOLPOWER

7/25

Max. throughput
Ar/N2
H2

mbar x l x s-1 (Torr x l x s-1)
mbar x l x s-1 (Torr x l x s-1)

4 (3)
2 (1.5)

Crossover value

mbar x l (Torr x l)

60 (45)

Cool down time to 20 K

min

Overall height

mm

Weight

kg (lbs)

Silicon diode for temperature measurements
at second stage of the cold head

Ordering Information
COOLVAC 800
Accessories
compressor unit
COOLPAK 4000
COOLPAK 4200

70
503

508

12 (26.5)

14 (30.9)

built-in to a DN 25 KF with two-way
HV current feedthrough

built-in to a DN 16 CF with
UHV feedthrough

COOLVAC 800 (ISO-K)

COOLVAC 800 (CF)

Part No. 844160V1006

Part No. 844160V1002

Part No. 892 31
Part No. 892 33

Part No. 892 31
Part No. 892 33

Power supply cable
Connecting cable
Compressor – cold head, 4,5 m

C12

see Ordering Information for the Compressor Units COOLPAK

Part No. 400 000 323

Part No. 400 000 323

Flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)

Part No. 892 87
Part No. 892 88
Part No. 893 74

Part No. 892 87
Part No. 892 88
Part No. 893 74

MODEL 1901 low temperature measuring instrument

Part No. 136 45

Part No. 136 45

Cable for the silicon diode, 10 m long

Part No. 500 085

Part No. 500 201

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.11

Cryopumps with Fully Automatic Control ClassicLine

Cryopumps

COOLVAC 1.500 CL

COOLVAC 2.000 CL

COOLVAC 1.500 CL

COOLVAC 3.000 CL

COOLVAC 3.000 CL similar

COOLVAC 2.000 CL similar

Advantages to the User

Advantages to the User

Advantages to the User

♦ Hydrocarbon-free high vacuum

♦ Hydrocarbon-free high vacuum

♦ Hydrocarbon-free high vacuum

♦ High capacity for argon and hydrogen

♦ High capacity for argon and hydrogen

♦ High capacity for argon and hydrogen

♦ High crossover value

♦ High crossover value

♦ High crossover value

♦ Simple operation

♦ Simple operation

♦ Simple operation

♦ Trouble-free integration into complex systems

♦ Trouble-free integration into complex systems

♦ Trouble-free integration into complex systems

♦ Fully automatic regeneration through Cryo
Compact Control

♦ Fully automatic regeneration through Cryo
Compact Control

♦ Fully automatic regeneration through Cryo
Compact Control

♦ Easy servicing

♦ Easy servicing

♦ Easy servicing

Typical Applications

Typical Applications

Typical Applications

♦ Evaporators

♦ Evaporators

♦ Evaporators

♦ Sputtering systems

♦ Sputtering systems

♦ Sputtering systems

♦ Ion implanters

♦ Ion implanters

♦ Ion implanters

♦ Optical coating systems

♦ Optical coating systems

♦ Optical coating systems

♦ Metallization systems

♦ Metallization systems

♦ Metallization systems

Ø 370

Ø 304

Ø 240

143

300

320

345

559

604

549

Dimensional drawing for the COOLVAC 1.500 CL (DN 200 ISO-K)

C12.12

Dimensional drawing for the COOLVAC 2.000 CL (DN 250 CF)

Dimensional drawing for the COOLVAC 3.000 CL (DN 320 ISO-K)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cryopumps with Fully Automatic Control ClassicLine

Technical Data

COOLVAC 1.500 CL

COOLVAC 2.000 CL

COOLVAC 3.000 CL

200 ISO-K / 200 CF / 6" ANSI

250 ISO-K / 250 CF / 8" ANSI

320 ISO-K / 10" ANSI

High vacuum (HV) flange

DN

Fore vacuum flange

DN

25 KF

Flange for connection a gauge head

DN

16 KF

Flange for the electrical connection

DN

40 KF

Safety valve with flange connection
for gas exhaust line

DN

40 KF

4-way current feedthrough for
Si diode on a flange

DN

16 KF

Heaters
1st stage
2nd stage

W
V AC
W
V AC

160
35
90
35

Temperature sensor
1st stage
2nd stage
Built-in cold head
Weight
Cooldown time to T2 = 20 K

Cryopumps

160
35
90
35

160
35
90
35

Pt 100
Si diode
COOLPOWER
kg (lbs)
min

7/25
25 (55.2)

25 (55.2)

35 (77.3)

90

60

80

180 (135)

250 (187)

250 (187)

Crossover value

mbar x l (Torr x l)

Pumping speed
H2O
Ar / N2
H2

l x s-1
l x s-1
l x s-1

4600
1000 / 1300
2300

7000
1600 / 2100
3200

10 500
2400 / 2800
4500

Capacity
Ar/N2
H2 at 10-6 mbar
H2O

bar x l
bar x l
bar x l

1600
12
not applicable

1400
12
190

2500
12
460

14 (10.5)
8 (6)

12 (9)
6.5 (4.8)

15 (11.2)
10 (7.5)

1/2"

1/2"

1/2"

Max. throughput
Ar/N2
H2O

mbar x l x s-1 (Torr x l x s-1)
mbar x l x s-1 (Torr x l x s-1)

Helium connections
DN
(Self-sealing couplings: outside thread, type 5400-S2-8)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12

C12.13

Cryopumps

Ordering Information

Cryopumps with Fully Automatic Control ClassicLine

Single Operation
Europe

USA/Japan

COOLVAC 1.500 CL
Europe

Dual Operation
Europe

USA/Japan

Multiple Operation
Europe

USA/Japan

Part No.
844200V0002
844200V0004
844200V0006

Part No.
844200V0002 (2x)
844200V0004 (2x)
844200V0006 (2x)

Part No.
844200V0002 (3x)
844200V0004 (3x)
844200V0006 (3x)

System Controller SC

844 230

844 230

844 230

Power Supply PS
230 V, 1 ph.
200 V, 3 ph.

844 135
–

Network communication cable – System Controller
to the pump(s)
10 m
20 m

844 261
844 262

844 261
844 262

844 261
844 262

Network PM cable for the link between
the pumps
03 m
10 m

–
–

844 256
844 258

844 256 (2x)
844 258 (2x)

Power supply cable from power supply to pump
10 m
20 m

–
–

–
–

844 251 (2x)
844 252 (2x)

844 251 (2x)
844 252 (2x)

844 251 (3x)
844 252 (3x)

Remote control cable CP, 1 m

–

–

844 265

844 265

844 265

Cable compressor – Power Supply
10 m
20 m

844 129
844 139

844 129
844 139

–
–

–
–

–
–

Cable System Controller – Power Supply, 1 m

844 141

844 141

–

–

–

Cable pump module PM – Power Supply
10 m
20 m

844 128
844 138

844 128 (2x)
844 138 (2x)

–
–

–
–

–
–

400 000 323

400 000 323 (2x)

–

–

–

892 3000
–
–

–
–
892 33

–
–
–

–
–

–
892 31
–
–
–

840 000 133

840 000 133

COOLVAC 1.500 CL
DN 200 CF
DN 6" ANSI
DN 200 ISO-K
Electronics and cables

Connecting cable compressor – pump, 4.5 m

844 135
–

–
844 235

–
844 235

–
844 235

Compressors and flexlines
Compressor
CP 4000 D
CP 4000
CP 4200
CP 6000
CP 6200
Accessories
Water cooling discharge throttle

–
892 31
–

–
892 33

Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Gas manifold
GD 2
GD 4

892 36
–

892 37

840 000 133

see Ordering Information for the Compressor Units COOLPAK
892 87
892 88
893 74

892 87 (2x)
892 88 (2x)
893 74 (2x)

892 87 (2x)
892 88 (2x)
–

892 87 (2x)
892 88 (2x)
–

892 87 (3x)
892 88 (3x)
–

–
–

891 02
–

891 02
–

891 02
–

–
891 03

The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”

C12.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cryopumps with Fully Automatic Control ClassicLine

Ordering Information

Single Operation
Europe

USA/Japan

Cryopumps

COOLVAC 2000 CL
Europe

Dual Operation
Europe

USA/Japan

Multiple Operation
Europe

USA/Japan

Part No.
844250V0002
844250V0004
844250V0006

Part No.
844250V0002 (2x)
844250V0004 (2x)
844250V0006 (2x)

Part No.
844250V0002 (3x)
844250V0004 (3x)
844250V0006 (3x)

System Controller SC

844 230

844 230

844 230

Power Supply PS
230 V, 1 ph.
200 V, 3 ph.

844 135
–

Network communication cable – System Controller
to the pump(s)
10 m
20 m

844 261
844 262

844 261
844 262

844 261
844 262

Network PM cable for the link between
the pumps
03 m
10 m

–
–

844 256
844 258

844 256 (2x)
844 258 (2x)

Power supply cable from power supply to pump
10 m
20 m

–
–

–
–

844 251 (2x)
844 252 (2x)

844 251 (2x)
844 252 (2x)

844 251 (3x)
844 252 (3x)

Remote control cable CP, 1 m

–

–

844 265

844 265

844 265

Cable compressor – Power Supply
10 m
20 m

844 129
844 139

844 129
844 139

–
–

–
–

–
–

Cable System Controller – Power Supply, 1 m

844 141

844 141

–

–

–

Cable pump module PM – Power Supply
10 m
20 m

844 128
844 138

844 128 (2x)
844 138 (2x)

–
–

–
–

–
–

400 000 323

400 000 323 (2x)

–

–

–

–

892 3000
–
–

–
–
892 33

–
–
–

–
–

–
892 31
–
–
–

840 000 133

840 000 133

COOLVAC 2000 CL
DN 250 CF
DN 8" ANSI
DN 250 ISO-K
Electronics and cables

Connecting cable compressor – pump, 4.5 m

844 135
–

–
844 235

–
844 235

–
844 235

C12

Compressors and flexlines
Compressor
CP 4000 D
CP 4000
CP 4200
CP 6000
CP 6200
Accessories
Water cooling discharge throttle

892 31
–

–
892 33

Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Gas manifold
GD 2
GD 4

892 36
–

892 37

840 000 133

see Ordering Information for the Compressor Units COOLPAK
892 87
892 88
893 74

892 87 (2x)
892 88 (2x)
893 74 (2x)

892 87 (2x)
892 88 (2x)
–

892 87 (2x)
892 88 (2x)
–

892 87 (3x)
892 88 (3x)
–

–
–

891 02
–

891 02
–

891 02
–

–
891 03

The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.15

Cryopumps

Ordering Information

Cryopumps with Fully Automatic Control ClassicLine

Single Operation

Europe

COOLVAC 3000 CL

USA/Japan

Europe

Dual Operation
Europe

USA/Japan

Part No.
844320V0004
844320V0006

Part No.
844320V0004 (2x)
844320V0006 (2x)

System Controller SC

844 230

844 230

Power Supply PS
230 V, 1 ph.
200 V, 3 ph.

844 135
–

Network communication cable – System Controller
to the pump(s)
10 m
20 m

844 261
844 262

844 261
844 262

Network PM cable for the link between
the pumps
03 m
10 m

–
–

844 256
844 258

Power supply cable from power supply to pump
10 m
20 m

–
–

–
–

844 251 (2x)
844 252 (2x)

844 251 (2x)
844 252 (2x)

Remote control cable CP, 1 m

COOLVAC 3000 CL
DN 10" ANSI
DN 320 ISO-K
Electronics and cables

844 135
–

–
844 235

–
844 235

–

–

844 265

844 265

Cable compressor – Power Supply
10 m
20 m

844 129
844 139

844 129
844 139

–
–

–
–

Cable System Controller – Power Supply, 1 m

844 141

844 141

–

–

Cable pump module PM – Power Supply
10 m
20 m

844 128
844 138

844 128 (2x)
844 138 (2x)

–
–

–
–

400 000 323

400 000 323 (2x)

–

–

–
–
892 46
–
–

–
–
–
892 36
–

–
–
–
–
892 37

Connecting cable compressor – pump, 4.5 m
Compressors and flexlines
Compressor
CP 4000
CP 4200
CP 6000 D
CP 6000
CP 6200
Accessories
Water cooling discharge throttle

892 31
–

–
892 33
–
–
–
840 000 133

Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Gas manifold
GD 2

840 000 133

see Ordering Information for the Compressor Units COOLPAK
892 87
892 88
893 74

892 87 (2x)
892 88 (2x)
893 74 (2x)

892 87 (2x)
892 88 (2x)
–

892 87 (2x)
892 88 (2x)
–

–

891 02

891 02

891 02

The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”

C12.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cryopumps with Fully Automatic Control ClassicLine

Cryopumps

N otes

C12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.17

Cryopumps with Fully Automatic Control ClassicLine

Cryopumps

COOLVAC 5.000 CL

COOLVAC 5.000 CL

COOLVAC 10.000 CL

COOLVAC 10.000 CL

Advantages to the User

Advantages to the User

♦ Hydrocarbon-free high vacuum

♦ Hydrocarbon-free high vacuum

♦ High capacity for argon and hydrogen

♦ High capacity for argon and hydrogen

♦ High crossover value

♦ High crossover value

♦ Simple operation

♦ Simple operation

♦ Trouble-free integration into complex systems

♦ Trouble-free integration into complex systems

♦ Fully automatic regeneration through Cryo
Compact Control

♦ Fully automatic regeneration through Cryo
Compact Control

♦ Easy servicing

♦ Easy servicing

Typical Applications

Typical Applications

♦ Evaporators

♦ Evaporators

♦ Ion implanters

♦ Space simulation chambers

♦ Electron beam welding systems

♦ Electron beam welding systems

♦ Optical coating systems

♦ Optical coating systems

♦ Metallization systems

♦ Metallization systems

DN 500 ISO-K
DN 400 ISO-K

640

704
COOLVAC
5.000

Ø 105

Dimensional drawing for the COOLVAC 5.000 CL

C12.18

Ø 550

Ø 450

COOLVAC
10.000

Ø 105

Dimensional drawing for the COOLVAC 10.000 CL

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cryopumps with Fully Automatic Control ClassicLine

Technical Data

COOLVAC 5.000 CL

COOLVAC 10.000 CL

400 ISO-K

500 ISO-K

High vacuum (HV) flange

DN

Fore vacuum flange

DN

40 KF

Flange for connection of a gauge head

DN

16 KF

Flange for the electrical connection

DN

40 KF

Safety valve with flange connection
for gas exhaust line

DN

40 KF

4-way current feedthrough for
Si diode on a flange

DN

16 KF

Heaters
1st stage
2nd stage

W
V AC
W
V AC

160
35
90
35

Temperature sensor
1st stage
2nd stage
Built-in cold head
Weight
Cooldown time to T2 = 20 K

Cryopumps

Pt 100
Si diode
COOLPOWER
kg (lbs)
min

5/100
42 (92.7)

50 (110.4)

120

160

700 (525)

800 (600)

Crossover value

mbar x l (Torr x l)

Pumping speed
H2O
Ar / N2
H2

l x s-1
l x s-1
l x s-1

18 000
3 700 / 5 000
5 200

30 000
8 400 / 10 000
12 000

Capacity
Ar/N2
H2 at 10-6 mbar
H2O

bar x l
bar x l
bar x l

3 000
32
790

5 000
40
not applicable

Max. throughput
Ar/N2
H2

mbar x l x s-1 (Torr x l x s-1)
mbar x l x s-1 (Torr x l x s-1)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12

10 (7.5)
7 (5.3)

C12.19

Cryopumps

Ordering Information

Cryopumps with Fully Automatic Control ClassicLine

COOLVAC 5.000 CL
Europe

USA/Japan

COOLVAC
05.000 CL, DN 400 ISO-K
10.000 CL, DN 500 ISO-K

COOLVAC 10.000 CL
Europe

USA/Japan

Part No. 844 410
–

–
Part No. 844 610

System Controller SC

Part No. 844 230

Part No. 844 230

Power Supply PS
230 V, 1 ph.

Part No. 844 135

Part No. 844 135

Part No. 844 261
Part No. 844 262

Part No. 844 261
Part No. 844 262

Cable compressor – Power Supply PS
10 m
20 m

Part No. 844 129
Part No. 844 139

Part No. 844 129
Part No. 844 139

Cable System Controller – Power Supply, 1 m

Part No. 844 141

Part No. 844 141

Cable pump module PM – Power Supply
10 m
20 m

Part No. 844 128
Part No. 844 138

Part No. 844 128
Part No. 844 138

Electronics and cables

Network communication cable – System Controller
to the pump(s)
10 m
20 m

Compressors and flexlines
Compressor
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)

Part No. 892 36
–

–
Part No. 892 37

Part No. 892 36
–

Part No. 840 000 133

–
Part No. 892 37

Part No. 840 000 133

see Ordering Information for the Compressor Units COOLPAK
Part No. 892 87
Part No. 892 88
Part No. 893 74

Part No. 892 87
Part No. 892 88
Part No. 893 74

The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”

C12.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cryopumps with Fully Automatic Control ClassicLine

Cryopumps

N otes

C12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.21

Cryopumps with Fully Automatic Control ClassicLine

Cryopumps

COOLVAC 18.000 CL

COOLVAC 30.000 CL

COOLVAC 30.000 CL

COOLVAC 18.000 CL with special flanges

Advantages to the User

Advantages to the User

♦ Hydrocarbon-free high vacuum

♦ Hydrocarbon-free high vacuum

♦ High pumping speed for water vapor and
nitrogen

♦ High pumping speed for water vapor and
nitrogen

♦ Fast, safe and efficient regeneration with the
electric regeneration system

♦ Fast, safe and efficient regeneration with the
electric regeneration system

♦ Simple operation

♦ Simple operation

Typical Applications

Typical Applications

♦ Space simulation chambers

♦ Space simulation chambers

♦ Evaporators

♦ Evaporators

♦ Electron beam welding systems

♦ General research

♦ Optical coating systems

♦ Optical coating systems

♦ Metallization systems

30°
30 °

DN

DN

ø658

658

608
608

ø130
130

Dimensional drawing for the COOLVAC 18.000 CL

C12.22

Dimensional drawing for the COOLVAC 30.000 CL

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cryopumps with Fully Automatic Control ClassicLine

Technical Data

Cryopumps

COOLVAC 18.000 CL

COOLVAC 30.000 CL

High vacuum flange

DN

630 ISO-F

35“ ANSI (892 mm)

Fore vacuum flange

DN

63 ISO-K

63 ISO-K

Flange with current feedthrough *) for silicon diode DN

25 KF (2x)

25 KF (2x), *) 2 way

40 KF

40 KF

welded-in

welded-in (2x)

Flange for other purposes

DN

Safety valve with DN 40 KF flange connection
for gas exhaust line
Pumping speed
H2O
Ar/N2
H2/He

l x s-1
l x s-1
l x s-1

46 000
13 500/18 000
14 000/4 000

93 000
25 000/30 000
30 000/7 000

Capacity
Ar/N2
H2 at 10-6 mbar
H2O

bar x l
bar x l
bar x l

5 000
65
945

6 500
120
–

COOLPOWER

5/100 (2x)

5/100 (2x) + 120

Max. throughput
Ar/N2
H2

mbar x l x s-1 (Torr x l x s-1)
mbar x l x s-1 (Torr x l x s-1)

14 (10.5)
7 (5.25)

14 (10.5)
7 (5.25)

Crossover value

mbar x l (Torr x l)

850 (638)

1200 (900)

Built-in cold head

Cool down time to 20 K

min

180

260

Overall height

min

606

711

65 (143)

245 (540)

Silicon diode for temperature measurements
at the second stage of the cold head

built-in (2x)

built-in (2x)

Regeneration heaters at the first
and second stage of the cold head

built-in (2x)

built-in (2x)

COOLVAC 18.000 CL

COOLVAC 30.000 CL

upon request
–

–
upon request

upon request (2x)
upon request (2x)

upon request (3x)
upon request (3x)

Weight

kg (lbs)

Ordering Information
Cryopump
COOLVAC 18.000 CL, 630 ISO-F
COOLVAC 30.000 CL, 35" ANSI
Accessories
Compressor unit
COOLPAK 6000
COOLPAK 6200
Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)

C12

see Ordering Information for the Compressor Units COOLPAK

Part No. 892 87 (2x)
Part No. 892 88 (2x)
Part No. 893 74 (2x)

Compact Controller and cable kit

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Part No. 892 87 (3x)
Part No. 893 74 (3x)
Part No. 893 74 (3x)
upon request

C12.23

Cryopumps with Fully Automatic Control SemiLine

Cryopumps

COOLVAC 1500 SemiLine
LEYBOLD, world-wide leader in vacuum and
cryo technology has added a new cryopump
system to meet the needs for current and
future demands in state-of-the-art cryopump
applications: COOLVAC 1500 SemiLine.
This system is the unique cryopump technology that cuts “cold to cold” regeneration from
several hours to 45 minutes or less.
This significant reduction of regeneration
time has been achieved by combining the
COOLVAC 1500 SL cryopumps with a
compact and intelligent control system that
allows control and monitoring of up to
30 cryopumps by only a single control unit.
COOLVAC 1500 SemiLine system is designed
for a high level of tool integration. The cryopumps can easily be adapted to the process
chambers because of their proven drop-in
compatibility.

COOLVAC 1500 SL

For remote control the cryopump system can
be fully integrated to the equipment’s host
computer via the standard RS 232 C interface
of the System Controller SC.
Existing tools can be upgraded fast and without any modifications because the system has
proven their “plug and play” compatibility to
other cryopump systems.
COOLVAC 1500 SemiLine system is uniquely
designed for a simple and fast entire service
and maintenance procedure direct on the
process chamber.
A complete displacer change is done within
20 minutes without breaking the vacuum
connection. After cryopump maintenance no
leak check and no vacuum or process requalification is required.

Advantages to the User

Typical Applications

Design Features

♦ Qualified at all major OEM’s

COOLVAC 1500 SemiLine system should be
used wherever production time, optimized
quality, higher tool availability and improved
CoO are important issues.

♦ “Fast Regeneration” capability from
“cold to cold” in 45 minutes or less.
During the fast regeneration of the
COOLVAC 1500 SL only the second stage
of the pump is regenerated.
Consequently, “Fast Regeneration” is
synonymous with the regeneration of all
gases pumped by the cryo’s second stage,
e. g. H2, Ar, N2, O2.

♦ Drop-in compatible to all major
equipments
♦ Higher flexibility and availability of the
process system
♦ Increased productivity and improved yield
♦ No extra tool downtime caused by
regeneration

In particular, the overall equipment performances of
♦ Sputtering (PVD) Systems
♦ Ion Implanters

♦ Lowest Cost of Ownership

♦ “Total Regeneration” capability from
“cold to cold” in about 2.5 hours.
During the total regeneration of the
COOLVAC 1500 SL the second stage as
well as the first stage of the pump are
regenerated and all gases are released,
e. g. H2, Ar, N2, O2 as well as H2O and
other easily condensable gases.

♦ Vacuum Coating Systems
♦ Transfer Chambers
♦ Load Lock Chambers
can be increased significantly.

♦ The fast as well as the total regeneration
cycle is optimized with respect to
- time
- safety
- cleanness of the pump.
Only with clean pumping surfaces can a
low base pressure, maximum pumping
speeds and capacities be attained.

220
220

597

597
470

470

♦ Easy to operate
- only one compact control unit for up to
30 pumps
- simple push button operation
- fully automatic regeneration
- complete monitoring of pump operation

149

149

294

294

Dimensional drawing for the COOLVAC 1500 SL

C12.24

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cryopumps with Fully Automatic Control SemiLine

♦ Easy to integrate
- compatible pump sizes and connectors to
replace other cryopumps
- drop-in tool compatibility at all major
equipments
- designed to be fully integrated to the
equipment’s host computer via the
standard RS 232 C interface
- optional network and 24 V DC interface
capabilities
♦ Electrical heaters for regeneration only
- no expensive and complex purge gas
system
- sequential regeneration of all pumped
gases

- better control of the regeneration cycles
- highest safety standards during
regeneration
♦ Suitable for multiple operation
- up to 30 COOLVAC 1500 SL cryopumps
can be operated by one compact
System Controller SC.
- up to 3 COOLVAC 1500 SL cryopumps
can be supported by one multiple
Power Supply PS.
- up to 3 COOLVAC 1500 SL cryopumps
can be supported by one Compressor
Unit CP.

Cryopumps

♦ Easy to service
- displacer exchange is possible without
removing the COOLVAC from the
production system.
- back-up pool needs just displacer rather
than expensive pumps
- Extended service and maintenance
intervals
- data collection for service and trend
analysis
♦ All known features of cryopumps are
maintained:
- high pumping speeds and capacity for
H2O, H2, Ar, N2
- high crossover values
- hydrocarbon-free vacuum

System Controller SC
Design Features
♦ 1/4 19" rack module
♦ 3 height units
♦ Dimensions (W x H x W)
106 x 129 x 178 mm

The intelligent COOLVAC System Controller SC
automatically controls and monitors up to
30 COOLVAC pumps.
Online monitoring, help functions and a
service interface for easy diagnostic are just a
few user friendly features.
It can be installed as a “stand alone system”
or remote controlled via an interface.

System Controller SC for COOLVAC 1500 SL

Power Supply PS
Design Features
♦ 19" rack module
♦ 4 height units
♦ Dimensions (W x H x W)
435 x 190 x 440 mm

The COOLVAC Power Supply PS provides the
power for the cold head motor, the electrical
heaters and the supplies voltage to the electronics for up to 3 COOLVAC pumps.
Controlled via the System Controller SC the
PS turns the compressor unit on and off if
required by the connected pumps.

Power Supply PS for COOLVAC 1500 SL

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.25

C12

Cryopumps with Fully Automatic Control SemiLine

Cryopumps

Technical Data

COOLVAC 1500 SL

High vacuum (HV) flange

DN

DN 200 CF

Fore vacuum flange

DN 25 KF

Regeneration valve

DN 40 KF

Pumping speed
H2O / Ar / H2

O2
Ultimate pressure
Capacity for
Ar
H2 at 10-6 mbar

H2

Crossover value

4600 / 1300 / 2500
1600
≤ 5 x 10-10

bar x l

1800
16
190

bar x l
bar x l

H2O

Max. pumping speed for
Ar / N2

l x s-1
l x s-1
mbar

mbar x l x s-1 (sccm)
mbar x l x s-1 (sccm)

14 (840)
6 (360)

mbar x l (Torr x )

210 (160)

Recovery time from 10 mTorr to ≤ 5 x 10-7 Torr

s

<4

Regeneration times
min
min
min
min

< 50
< 170
< 30
< 80
> 50

dB(A)

< 70

W
V AC
W
V AC

160
35
90
35

Fast regeneration (cold to cold, 2nd stage at 20 K)
Total regeneration (cold to cold, 2nd stage at 20 K)
Warm-up from operating temperature to 300 K
Cool-down from 300 K up to operating temperature
Fast regeneration cycles between total regeneration
Noise, measured at 1 m (3 ft.) radius from the pump
Heaters
1. stage
2. stage
Temperature measurement
1. stage

Pt 100
Si diode

2. stage
Built-in coldhead
Weight

C12.26

COOLPOWER
kg (lbs)

7/25
25 (55.2)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cryopumps with Fully Automatic Control SemiLine

Ordering Information

Single Operation
Europe

USA/Japan

Cryopumps

COOLVAC 1.500 SL
Europe

Dual Operation
Europe

USA/Japan

Multiple Operation
Europe

USA/Japan

Part No.
844 212
upon request

Part No.
844 212 (2x)
upon request (2x)

Part No.
844 212 (3x)
upon request (3x)

287 46

287 46 (2x)

287 46 (3x)

System Controller SC

844 230

844 230

844 230

Power Supply PS
230 V, 1 ph.
200 V, 3 ph.

844 135
–

Network communication cable – System Controller
to the pump(s)
10 m
20 m

844 261
844 262

844 261
844 262

844 261
844 262

Network-PM cable between the pumps
03 m
10 m

–
–

844 256
844 258

844 256 (2x)
844 258 (2x)

Power supply cable for the pump
10 m
20 m

–
–

–
–

844 251 (2x)
844 252 (2x)

844 251 (2x)
844 252 (2x)

844 251 (3x)
844 252 (3x)

Remote control cable CP, 1 m

–

–

844 265

844 265

844 265

Cable compressor – Power Supply
10 m
20 m

844 129
844 139

844 129
844 139

–
–

–
–

–
–

Cable System Controller – Power Supply, 1 m

844 141

844 141

–

–

–

Cable pump module PM – Power Supply
10 m
20 m

844 128
844 138

844 128 (2x)
844 138 (2x)

–
–

–
–

–
–

400 000 323

400 000 323 (2x)

–

–

–

892 3000
–
–

–
–
892 33

–
–
–

–
–

–
892 31
–
–
–

840 000 133

840 000 133

COOLVAC 1.500 SL
DN 200 CF
other flanges
Solenoid fore-vacuum valve, DN 25 KF
with electric valve position indicator and
for 24 V DC supplies
Electronics and cables

Connecting cable compressor – pump, 4.5 m

844 135
–

–
844 235

–
844 235

–
844 235

C12

Compressors and flexlines
Compressor
CP 4000 D
CP 4000
CP 4200
CP 6000
CP 6200
Accessories
Water cooling discharge throttle

–
892 31
–

–
892 33

Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Gas manifold
GD 2
GD 4

892 36
–

892 37

840 000 133

see Ordering Information for the Compressor Units COOLPAK
892 87
892 88
893 74

892 87 (2x)
892 88 (2x)
893 74 (2x)

892 87 (2x)
892 88 (2x)
–

892 87 (2x)
892 88 (2x)
–

892 87 (3x)
892 88 (3x)
–

–
–

891 02
–

891 02
–

891 02
–

–
891 03

The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.27

Cold Heads

Cryogenics

COOLPOWER 120 T Single Stage Cold Heads

COOLPOWER 120 T single stage cold head

Advantages to the User

Typical Applications

♦ For installation mostly in any orientation

♦ Cooling of cryopanels in cryopumps and thus
generation of high vacuum and ultra high
vacuum pressures

♦ High refrigerating capacity
♦ No liquid refrigerants are required

♦ Cooling of samples and detectors;
especially for cooling of

♦ Very simple to operate
♦ Short cooldown time

- samples for spectroscopic investigations
in solid state and surface physics
- high temperature superconductor and
semiconductor conditions
- infrared and gamma detectors
♦ Calibration of sensors

250

12,7

129
ø105
M4
ø6,2

ø105
ø115
ø165
ø178

Dimensional drawing for the COOLPOWER 120 T

12 01 M 071 CP120T

C12.28

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cold Heads

Technical Data

COOLPOWER 120 T

Refrigeration capacity at 50/60 Hz 1)
1st stage at 80 K, approx.
2st stage at 20 K, approx.

W
W

120
25

Lowest attainable temperature 1)

K

≤ 15

min

≤ 55

°C

10 to 40

bar

16

Cooldown time down to 20 K
Permissible ambient temperature
He filling pressure at room temperature
He connections
Self-sealing screwed connections
High pressure connection
Low pressure connection
Weight

1/2" (#8 2))
1/2" (#8)
13 (29)

kg (lbs)

Length of the electrical connection line
to the compressor unit

15

m

COOLPOWER 120 T

Or dering Information

Part No. 103 59

Cold head COOLPOWER 120 T
Accessories
Compressor unit (for operation of one cold head)
COOLPAK 6000, 400 V/50 Hz; 470 V/60 Hz
COOLPAK 6200, 200 V/50 Hz; 200 V, 230 V/60 Hz

Part No. 892 36
Part No. 892 37
see Ordering Information for the Compressor Units COOLPAK

Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
Options
Temperature measurement
Silicon diode
MODEL 1901 low temperature measuring instrument
Measuring cable
1)
2)

Cryogenics

Part No. 892 87
Part No. 892 88

C12

Part No. 890 89
Part No. 136 45
see Ordering Information for the MODEL 1901 low temperature measuring instrument

The refrigerating capacities and temperatures stated apply to vertical operation with the cold end at the bottom
Series 8 from Aeroquip

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.29

Cold Heads

Cryogenics

COOLPOWER 7/25, 5/100 and 5/100 T Dual Stage Cold Heads

COOLPOWER 7/25 dual stage cold head

COOLPOWER 5/100 dual stage cold head, COOLPOWER 5/100 T similar

Advantages to the User

Typical Applications

♦ For installation in any orientation

♦ Cooling of cryopanels in cryopumps and thus
generation of high vacuum and ultra high
vacuum pressures

♦ Calibration of sensors

♦ Cooling of samples and detectors;
especially for cooling of

♦ Cooling of superconducting magnets; in
nuclear magnetic resonance tomographs,
for example (only COOLPOWER 5/100 and
5/100 T)

♦ High refrigerating capacity
♦ No liquid refrigerants are required
♦ Very simple to operate
♦ Short cooldown time

- samples for spectroscopic investigations
in solid state and surface physics

♦ Cooling of accelerator components in the area
of high energy physics

- high temperature superconductors
- superconductors and semiconductors
- infrared and gamma detectors

View A

ø 47,5

Ansicht A

A

M4

47,5

6

32,2

40
30°
6x

60

6

125,5

°

82,1

View B
Ansicht
B

129

27

ø 69

B
18

M4 x 7

92,2
115

3

60

47,5
110

°

8

45

80

x

6

°

45

474,5
ø 87
ID 75.5
innen
ø 75,5

130

490

129

108,5

19

149
117,5

105
135

13,5°
40

135

60

105

13,5°

127
128,7

ca. 12

0
20

ca. 1

Dimensional drawing for the COOLPOWER 7/24

C12.30

M4

ca. = approx.

Dimensional drawing for the COOLPOWER 5/100 and COOLPOWER 5/100 T

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Cold Heads

Cryogenics

7/25

COOLPOWER
5/100

5/100 T

W
W
W
W

25
7
–
–

100
5
–
–

100
7.5
3.5
35

Lowest attainable temperature 1)
1st stage, approx.
2nd stage, approx.

K
K

≤ 35
≤ 10

≤ 35
≤ 10

28
6

Cooldown time of the
2nd stage to 20 K, approx.
1st stage to 80 K, approx.
2nd stage to 10 K,, approx.
1st stage to 40 K, approx.
2nd stage to 6 K,, approx.
1st stage to 30 K,, approx.

min
min
min
min
min
min

20
20
–
–
–
–

20
20
–
–
–
–

20
20
35
30
45
40

Technical Data
Refrigeration capacity at 50/60 Hz 1)
1st stage at 80 K, approx.
2st stage at 20 K, approx.
1st stage at 10 K, approx.
2st stage at 40 K, approx.

Permissible ambient temperature
He filling pressure at room temperature

°C

5 to 40

bar

16

He connections
Self-sealing screwed connections
High pressure connection
Low pressure connection
Weight

1/2" (#8 2))
1/2" (#8)
11 (24.3)

kg (lbs)

Length of the electrical connection line
to the compressor unit (included with cold head)

4.5

m

7/25

COOLPOWER
5/100

5/100 T

Cold head
COOLPOWER 7/25
COOLPOWER 5/100
COOLPOWER 5/100 T

Part No. 842 040
–
–

–
Part No. 893 05
–

–
–
Part No. 129 78

Accessories
Connecting cable
Compressor – cold head, 4.5 m

Part No. 400 000 323

included with the cold head

Part No. 892 31
Part No. 892 33
–
–

–
–
Part No. 892 36
Part No. 892 37

Ordering Information

Compressor unit (for operation of one cold head)
COOLPAK 4000
COOLPAK 4200
COOLPAK 6000
COOLPAK 6200

–
–
Part No. 892 36
Part No. 892 37

see Ordering Information for the Compressor Units COOLPAK

Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Options
Temperature measurement / control
Silicon diode
MODEL 1901 low temperature measuring instrument
Measuring cable
Electrical heaters
Modell 9700 low temperature controller
Measuring cable, 3 m long

included with the cold head

Part No. 892 87
Part No. 892 88
Part No. 893 74

Part No. 890 89
Part No. 136 45
see Ordering Information for the MODEL 1901 low temperature measuring instrument
upon request
Part No. 842 400
Part No. 842 401

1)

The refrigerating capacities and temperatures stated apply to vertical operation with the cold end at the bottom

2)

Series 8 from Aeroquip

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.31

C12

Compressor Units

Cryogenics

COOLPAK 4000/4200, COOLPAK 6000/6200

Compressor units COOLPAK 4000/4200/(COOLPAK 6000/6200, COOLPAK 6000 MD/6200 MD similar)

Advantages to the User
♦ Highly effective and even more powerful when
connected with LEYBOLD cryopumps and
refrigerators
♦ Excellent long-term reliability owing to the
modular design and the longlife components
♦ Silent and low vibration operation through
scroll compressors
♦ Easy to install and operate
♦ Global power supply compatibility
♦ Easy integration in complex systems due to
24 V DC or RS 232 C interfaces
♦ Almost maintenance-free
♦ Small footprint
♦ Low cost of ownership

36

528

230
152

61

51

448
511
70
146
199

407
440

Dimensional drawing for the COOLPAK 4000/4200 and COOLPAK 6000/6200

C12.32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Compressor Units

Technical Data

COOLPAK 4000

COOLPAK 4200

COOLPAK 6000

COOLPAK 6200

50 Hz

50 Hz

50 Hz

50 Hz

60 Hz

Number of electrical connections for cold heads

60 Hz

1

Helium system filling pressure at room temperature bar
Ambient temperature

13

l/min

Cooling-water entry temperature

°C

Main voltage (3 phase)
upon delivery

V

alternative setting

V

400
± 10%
–

Operating currents
with the cold head cool
with the cold head warm

A
A

Electrical power consumption
with the cold head cool
with the cold head warm

kW
kW

60 Hz

1

14

°C

Cooling-water consumption 1)

Cryogenics

60 Hz

1

14

13

1

15

14

14

13

5 to 40

5 to 40

5 to 40

5 to 40

3.5

3.5

5.0

5.0

5 to 25

5 to 25

5 to 25

5 to 25

470
± 10%

200
± 10%
230 3)
- 10%

200 2)
+ 10% - 5%
230
± 10%

400
± 10%
–

6.4 to 7.4
8.5

6,2 to 7,3
8.1

14.6 to 16.5
18.3

13.8 to 17.0
19.5

3.8 to 4.5
5.3

4.2 to 5.3
5.8

4.0 to 4.6
5.3

4.4 to 5.3
5.9

–

470
± 10%

230 3)
- 10%
200
± 10%

230
± 10 %
200
± 10%

9.5 to 10.5
13.7

9.0 to 10.0
12.0

15.5 to 22.0
25.0

16.0 to 23.0
25.0

6.0 to 6.5
8.2

6.5 to 6.9
8.7

5.5 to 6.2
7.6

5.9 to 6.7
7.8

–

Remote control via interface

24 V DC or RS 232 C

24 V DC or RS 232 C

24 V DC or RS 232 C

24 V DC or RS 232 C

Helium connections
Self-sealing couplings
High pressure side
Low pressure side

1/2"
1/2"

1/2"
1/2"

1/2"
1/2"

1/2"
1/2"

Water connections
Sound level (at 1 m distance)

Hose nozzle DN 12 / G 1/2" outside thread
dB(A)

Dimensions (W x H x D)
Weight

mm

Compressor unit without power supply cable
Single cold head operation
Dual cold head operation
Power supply cable
3.5 m, CEE plug, 32 A/6h, 3 pole + N + PE
3.5 m, NEMA plug, L 16-20 P,
20 A/480 V, 3 pole + PE (AWG 12)
3.5 m, NEMA plug, L 15-20 P,
20 A/250 V, 4 pole - PE (AWG 12)
10 m, with end splice (AWG 10)
Spare part
Adsorber CACP 4000 / 6000
1)
2)
3)
4)
5)

53

53

53

53

440 x 589 x 511

440 x 589 x 511

440 x 589 x 511

440 x 589 x 511

93 (205)

93 (205)

94 (207)

94 (207)

COOLPAK 4000

COOLPAK 4200

COOLPAK 6000

COOLPAK 6200

kg (lbs)

Or dering Information

Hose nozzle DN 12 / G 1/2" outside thread

Europe

USA/Japan

Part No. 892 31
Part No. 892 3000 4)

USA/Japan

Part No. 892 33
–

Europe

USA/Japan

Part No. 892 36
Part No. 892 46 5)

USA/Japan

Part No. 892 37
–

Part No. 893 95

–

–

Part No. 893 95

–

–

–

Part No. 893 96

–

–

Part No. 893 96

–

–

Part No. 840 110

–

–

–

Part No. 840 111

–

Part No. 840 111

Part No. 893 52

Part No. 893 52

Part No. 893 52

Part No. 893 52

At a cooling water entry temperature of 25 °C
± 10% at 12 bar filling pressure
At 13 bar filling pressure
COOLPAK 4000 D
COOLPAK 6000 D

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.33

C12

Cryogenics

Compressor Units

General Accessories for Compressor Units COOLPAK
Technical Data
Flexlines 1), 2)
FL 4.5 (1/2", 1/2")
FL 9.0 (1/2", 1/2")

Length

4.5 m
9.0 m

Connections on both sides (inside thread)
High pressure line
Low pressure line
1/2"
1/2"

1/2"
1/2"

Adaptor
Accessories for Flexlines
Adapter for flexlines
AD (1/2" m, 3/4" f)
AD (1/2" f, 3/4" m)

Outside thread (m)

Inside thread (f)

1/2"
3/4"

3/4"
1/2"

Connections
Elbow 1/2" for flexlines
Isolating piece 1/2" for flexlines

Outside thread (m)

Inside thread (f)

1/2"
1/2"

1/2"
1/2"

Connections on both sides
Outside thread (m)
1/2"

Coupling 1/2" for interconnecting two 1/2" flexlines

Gas manifold for dual operation 2)
(consisting of two Tees)
GD 2 (for dual operation)
GD 4 (for up to quad operation)

Number of
gas distributors

Gas manifold - Connections
At the compressor (inside thread)

At the cold head (outside thread)

2
4

1/2"
1/2"

2 x 1/2"
4 x 1/2"

Length
EL 4.5 extension cable for linking cold head
and compressor unit

4.5 m

Ordering Information
Flexlines 1), 2)
FL 4.5 (1/2", 1/2")
FL 9.0 (1/2", 1/2")
Adaptor
AD (1/2" m, 3/4" f)
AD (1/2" f, 3/4" m)

Part No. 892 87
Part No. 892 88
Part No. 892 89
Part No. 892 90

Elbow 1/2"

Part No. 891 73

Coupling 1/2"

Part No. 891 71

Gas manifold
GD 2 (for dual operation) 2)
GD 4 (for dual operation) 2)
EL 4.5 extension cable for linking cold head
and compressor unit 2)

Part No. 891 02
Part No. 891 03
Part No. 893 74

All flexible pressure lines, adaptor pieces, bends, isolating pieces, line couplings and gas manifolds are equipped with self-sealing Aeroquip fittings and filled in the factory with high-purity helium gas (purity: 99.999 %).
The filling pressure is 16 bar
1)
2)

Minimum bending radius: 30 cm
Only suited for pneumatically driven cold heads and cryopumps

C12.34

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Refrigerator Cryostats

Cryogenics

Refrigerator Cryostats based on the RDK 6-320
1

232
274,5

233
124

ø130
42,5

The RDK 6-320 basic unit includes the
COOLPOWER 5/100 T two-stage cold head. Its
high refrigerating capacity at low temperatures
permits experiments which previously could not
be performed by relying on refrigerators and
which required the use of liquid helium.
The RDK 6-320 basic unit is a complete system
for measurements in the temperature range
between 6 and 320 K.
The COOLPOWER 5/100 cold head is augmented
by:

ø30,2

♦ Silicon diode for measuring the temperatures
at the second stage of the cold head
30°

Advantages to the User
♦ Compact
♦ Very reliable
♦ Comprehensive range of accessories from one
source
♦ For installation in any orientation
♦ Simple to operate
♦ Short cooldown time
♦ Cost-effective in long-term experiments since
no liquid helium is required

♦ Heater at the second stage of the cold head
provided with overheating protection

♦ Simple and rapid servicing through the use of
the standard COOLPOWER 5/100 cold head
with pneumatic drive system for the displacer

♦ 11-way current feedthrough with matching
external connector

Typical Applications

♦ DN 25 KF pumpdown port

♦ Cooling of samples and detectors

♦ DN 160 ISO-K vacuum flange

♦ Material research and testing

RDK 6-320 basic unit

♦ Spectroscopic applications
♦ Matrix isolation spectroscopy with neon and
argon

C12
General Remarks on Refrigerator Cryostats
Isolating Vacuum

Temperature Measurement

Temperature Control

A two-stage rotary vacuum pump will normally
be adequate to produce an isolating vacuum.
However, this pump should be equipped on the
suction side with an adsorption trap and a isolation valve.

In order to avoid measurement errors due to
thermal resistances, the temperature at the sample should preferably be measured by a second
optional silicon diode which is installed as close
to the sample as possible. If possible it should be
maintained at the same temperature level as that
of the probe.

The temperature at the second stage of the cold
head (or that of the probe) is controlled by heating against the cooling effect produced by the
refrigerator (while the cold head is running).

If the application requires that the cold surfaces
remain free of hydrocarbons, we recommend the
use of our small turbomolecular pump system
PT 50 (see Product Section C10).

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.35

Refrigerator Cryostats

Cryogenics

Optical Refrigerator Cryostat based on the RDK 6-320
Upgraded as an optical cryostat (option) the
RDK 6-320 is tailor-made for experiments
involving temperatures down to about 7 K.

ø26

Supplied Equipment
♦ Basic unit RDK 6-320
♦ Temperature attenuation disk out of Pb Sn
♦ Sample holder out of Al 99.5

ø80
269

317

ø60

♦ Thermal radiation shield out of E-Cu
145

ø130

♦ Vacuum jacket out of aluminum / stainless
steel
♦ Five exchangeable windows (four windows on
the sides, one window in the longitudinal axis
of the cryostat);
two windows on the sides and the window in
the longitudinal axis are made of SUPRASIL I,
the two other windows are blanked off and
are made of brass

4

86
37,8°
ø15

BlindBlank
platte
panel

86

ø26
Suprasil
SuprasilI IScheibe
window

Dimensional drawing for the optical refrigeration cryostat

C12.36

Section through the window area

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Refrigerator Cryostats

RDK 6-320

Technical Data
Temperature range
2nd stage of the cold head
1st stage of the cold head

K
K

Silicon diode for temperature measurements
at the 2nd stage of the cold head

6 to 320
28 to 320
built-in

Heater
at the 2nd stage of the cold head

built-in

Heating power

W

50

Heating current

A

1

Heating voltage

V DC

50

Permissible ambient temperature
He filling pressure at room temperature

°C

5 to 40

bar

16

He connections
Self-sealing screwed connections
High pressure connection (outside thread)
Low pressure connection (outside thread)

1/2"
1/2"

Length of the connection cable
to the compressor unit
Weight

Cryogenics

m
kg (lbs)

Or dering Information

4.5 (included)
13 (28.7)

RDK 6-320

Basic unit RDK 6-320

Part No. 842 403

Optical cryostat consisting of
RDK 6-320 and Expansion Kit ROK

Part No. 842 404

Accessories
Compressor unit
COOLPAK 6000, 400 V/50 Hz; 470 V/60 Hz
COOLPAK 6200, 200 V/50 Hz; 200 V, 230 V/60 Hz
Power supply cable
Flexlines
FL 4.5 (1/2", 1/2")
Temperature measurement at 2nd stage with
Modell 9700 low temperature controller
Measuring cable, 3 m long

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12

Part No. 892 36
Part No. 892 37
see Ordering Information for the Compressor Units COOLPAK
Part No. 892 87
Part No. 842 400
Part No. 842 401

C12.37

Cryopumps, Cryogenics

Accessories for Cryopumps

Controllers and Monitoring Units for Cryopumps
System Controller COOLVAC SC

Design Features
♦ 1/4 19" rack module
♦ 3 height units
♦ Dimensions (W x H x D)
106 x 129 x 178 mm
♦ Operation through pushbuttons

The intelligent COOLVAC System Controller SC
automatically controls and monitors up to
30 COOLVAC pumps.
Online monitoring, help functions and a
service interface for easy diagnostic are just a
few user friendly features.
It can be installed as a “stand alone system”
or remote controlled via an interface.

System Controller COOLVAC SC

Power Supply PS for up to Two Cryopumps
Design Features
♦ 19" rack module
♦ 3 height units
♦ Dimensions (W x H x D)
485 x 135 x 320 mm

Power supply PS

The COOLVAC Power Supply PS provides the
power for the cold head motor, the electrical
heaters and the supplies voltage to the electronics for up to 2 COOLVAC pumps.
Controlled via the System Controller SC the
PS turns the compressor unit on and off if
required by the connected pumps.

The System Controller COOLVAC SC (not
included) will fit into the empty space.

Power Supply PS for up to Three Cryopumps
Design Features
♦ 19" rack module
♦ 4 height units
♦ Dimensions (W x H x D)
435 x 190 x 440 mm
♦ Single LED indicates correct direction of
rotation for the rotating field

The COOLVAC Power Supply PS provides the
power for the cold head motor, the electrical
heaters and the supplies voltage to the electronics for up to 3 COOLVAC pumps.
Controlled via the System Controller SC the
PS turns the compressor unit on and off if
required by the connected pumps.

Power supply PS

Advantages to the User
♦ Interface to external system controller
♦ For easy integration with external system
controllers
♦ For safe pumping of hydrogen

Order ing Information
System Controller

Part No. 844 230

Power Supply PS
for up to 2 Cryo pumps
for up to 3 Cryo pumps

Part No. 844 135
Part No. 844 235

Typical Applications
♦ For automated operation of the COOLVAC
cryopums of the ClassicLine and the SemiLine

C12.38

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for Cryopumps

Cryopumps, Cryogenics

COOLVAC ClassicLine, Single System Configuration
COOLVAC
#1

PM

1
4
5

SC

3

PS

2

COMPRESSOR

6
RS 232 C
External PC

C12

Key to the diagram “Single System Configuration”
PM =
SC =
PS =
1=
2=
3=
4=
5=
6=

Pump Module (included with the pump)
System Controller
Power Supply
e. g. Part No. 844 262
e. g. Part No. 844 139
e. g. Part No. 844 138
Part No. 400 000 323
Part No. 844 141
to be provided by the customer

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.39

Accessories for Cryopumps

Cryopumps, Cryogenics

COOLVAC ClassicLine, Dual System Configuration
Only for European mains voltages and for compressors suited for dual operation

7

COOLVAC
#1

COOLVAC
#2

PM

PM

1
3

3
4

5

SC

PS

2

4

COMPRESSOR
for dual operation

6
RS 232 C
External PC

Key to the diagram “Dual System Configuration”
PM =
SC =
PS =
1=
2=
3=
4=
5=
6=
7=

Pump Module (included with the pump)
System Controller
Power Supply
e. g. Part No. 844 262
e. g. Part No. 844 139
e. g. Part No. 844 138
Part No. 400 000 323
Part No. 844 141
to be provided by the customer
e. g. Part No. 844 256

C12.40

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for Cryopumps

Cryopumps, Cryogenics

COOLVAC ClassicLine, Dual and Mutiple System Configuration
7

7

COOLVAC
#1

7

COOLVAC
#2

PM

PM

COOLVAC
#3

PM

8

1

8

8
PS

SC

RS 232 C

9

6
External PC

COMPRESSOR

Key to the diagram “Dual and Mutiple System Configuration”
PM =
SC =
PS =
1=
6=
7=
8=
9=

Pump Module (included with the pump)
System Controller
Power Supply
e. g. Part No. 844 262
to be provided by the customer
e. g. Part No. 844 256
e. g. Part No. 844 252
Part No. 844 265

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12

C12.41

Cryopumps, Cryogenics

Accessories

Modell 9700 Low Temperature Controller
Modell 9700

Tec hnic al Data
Mains connection, 50/60 Hz

V AC

Power consumption, max.

W

3 x 4 membrane key pad

Data memory

EPROM
Two line, 20 digit LED digital display

Temperature measurement
Sensors

Advantages to the User
♦ Microprocessor controlled PID controller
♦ Digital temperature readout in Kelvin
♦ Control by means of counter heating
♦ High control accuracy over the entire temperatur range (1.5 to 450 K)
♦ Electric heating power up to 50 W
♦ Programmable heater power limit
♦ Generation of linear temperature ramps
♦ Up to 50 program steps are programmable

Measurement current

µA

Measurement range

K

2 x silicon diodes type D or 2 x silicon diodes
with standard temperature resistance characteristics
10
1.5 to 450

K

1.4 to 325 K

Measurement range of the silicon diode type D
Number of channels

2

Resolution

Simultaneous display of both channels

A/D converter resolution

bit

Switching outputs
Temperature resolution

K

Temperature control
Heating power, max.

W

50

Heating current, max.

A

1

Heating voltage, max.

V DC

Computer interface
Permissible ambient temperature

♦ Analogue temperature outputs for both
channels

Mechanical design/cabinet

♦ Temperature control at refrigerator cryostats

0 to 50
RS 232 C and IEEE-488

°C

+ 10 to + 30
Table-top unit (8.5" x 3.5" x 12")

Dimensions (W x H x D) [high H without feet]
Weight

mm
kg (lbs)

Dimensions of the packaging (W x H x D)
Weight (including packaging, approx.)

mm
kg (lbs)

Length of mains cord

m

Or der ing Information
Modell 9700 low temperature controller

C12.42

0.1
PID controller

♦ Data from two sensors can be displayed

Typical Applications

24
2 relays (n.o. and n.c. contacts)

♦ Standard interface RS 232 C and IEEE-488

♦ Can be used in three operating modes
– Manual
– Program
– External computer control

150

Entry of data

Display

Modell 9700 low temperature controller

85-240

215.9 x 88 x 304.8
2.3 (5)
360 x 230 x 450
4.2 (9.3)
2.5

Modell 9700
Part No. 842 400

Sensor cable, 3 m long

Part No. 842 401

Silicon diode type D
with connection cable and miniature plugs

Part No. 890 89

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Cryopumps, Cryogenics

MODEL 1901 Low Temperature Measuring Instrument

MODEL 1901 low temperature measuring instrument

Dimensions and panel cut-out for the MODEL 1901

Advantages to the User

Tec hnic al Data

♦ Supports one silicon diode

MODEL 1901
µA

10

♦ 3-digit LED display

Measurement current

♦ Temperature readout between 1 and
450 Kelvin

Display

♦ Two trigger thresholds

Resolution

0.1 K from 1.5 to 99.9 K
1.0 K from 100 to 450 K

Accuracy

±0.1 K from 1.5 to 99.9 K
±1.0 K from 100 to 450 K

LED, 3-digits

Temperature range

K

♦ RS 232 C interface

Typical Applications
♦ Temperature measurements on cryostats
♦ Temperature measurements on cryopumps
for monitoring their operation and to control
pump systems

1.5 to 450

9 V DC @ 500 mA
through the supplied 220 V AC / 9 V DC power adaptor

Power supply voltage

2

Trigger thresholds

2 relays (n.c. and n.o.)

Switched output

a) Temperature output
b) External adjustment of switching thresholds

RS 232 C interface

Admissible ambient temperature

°C

+10 to +35
Benchtop unit

Mechanical design/housing
Dimensions (W x H x D)

mm

95.3 x 47.8 x 134.1

Packaging dimensions (W x H x D)

mm

320 x 180 x 120

Weight (including packaging)

kg (lbs)

Or der ing Information
MODEL 1901 low temperature measurement instrument
HV cable with plug, 10 m long *)
UHV cable with plug, 10 m long *)
Silicon diode, type D,
with connecting cable and micro plugs
- without current feedthrough
HV current feedthrough on a flange DN 25 KF, 2 way
UHV current feedthrough on a flange DN 16 KF, 2 way

1.5 (3.3)

MODEL 1901
Part No. 136 45
Part No. 500 085
Part No. 500 201

Part No. 890 89
Part No. 200 19 256
Part No. 500 217

*) for COOLPOWER and COOLVAC pumps

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.43

C12

Accessories

Cryopumps, Cryogenics

Temperature Sensors
0,76
600 mm long
2,9
3,8

In contrast to vapor pressure thermometers,
electric temperature sensors can be used for
continuous measurements within a wide range of
temperatures.
Silicon diodes offer a negative temperature
coefficient of resistance, i.e. their resistance
drops as the temperature increases. The slope of
the temperature/resistance characteristic and the
absolute resistance are decisive regarding the
suitability of these diodes. The slope determines
the sensitivity of the sensor and a high electrical
resistance permits accurate measurements while
keeping the thermal load small (microwatts).

8
Dimensional drawing for the silicon diode, type D

In systems which are degassed at high temperatures, silicon diodes can only be fitted after
degassing has been completed.
The type D silicon diode is compatible to the
MODEL 1901 low temperature display unit.

Standard characteristic of the silicon diode

Technical Data

Type D Silicon Diode

Temperature range
Temperature coefficient (dR/dT)
qualitative
quantitative

K

1.4 to 325

Ω/K

Negative in the entire temperature range
Non-linear characteristic

Measurement current

µA

10

Bakeable to

°C

60

Ordering Info rmation
Temperature Sensors

C12.44

Type D Silicon Diode
Part No. 890 89

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Cryopumps, Cryogenics

Safety Valve / Precision Manometer
50

32

160

2000

0

28

226

133
DN 16 KF

DN 10 KF

Dimensional drawing for the safety valve

Dimensional drawing for the precision manometer

Typical Applications

Typical Applications

Technical Information

♦ Protecting sealed vacuum systems like cryopumps, cryostats, lifting devices, for example
against internal overpressures

♦ Pressure readout for vapor pressure thermometers

For operation and measurements at pressures
exceeding 1013 mbar the small flange seal
must be equipped with an outer centering ring
Part No. 183 53.

♦ Mandatory for systems which are separated
when cold, as a means of protection against
overpressures

Technical Data

Safety Valve

Precision Manometer

Responding pressure

mbar

120 to 160, over-pressure

–

Flow at 140 mbar

l x h-1

500

–

Spring loaded, with O-ring seal

–

< 1 x 10-8 (< 0.75 x 10-8)

–

16 KF

10 KF

–

0 to 2000 (0 to 1500)

–

1 % of full scale

Valve disk

C12

Leak rate in the closed state
mbar x l x s-1 (Torr x l x s-1)
Connection
Measurement range

DN
mbar (Torr)

Accuracy
Diameter

mm

32

160

Length of the dial

mm

–

320

Internal volume, approx.

cm3

–

20

Overall height

mm

28

226

0.3 (0.7)

1.4 (3.1)

Safety Valve

Precision Manometer

Part No. 890 39

–

–

Part No. 890 50

Weight

kg (lbs)

Ordering Information
Safety valve on DN 16 KF flange
Precision manometer

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C12.45

Cryopumps, Cryogenics

C12.46

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Fittings
and Feedthroughs

C13

Vacuum Fittings and Feedthroughs

Contents

General
Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.03
The Right Connection from LEYBOLD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.04
Flange Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.05

Products
Global Versions
ISO-KF Flange Fittings and Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.06
Adaptors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.16
(ISO-K) Clamp Flange Fittings and Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.18
ISO-F and DIN 2501 Fixed Flange Fittings, ND6. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.26
ISO-F Fixed Flange Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.27
DIN 2501 Fixed Flange Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.28
Vacuum Greases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.29
Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.30
Electrical Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.32
High Current Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.35
Rotary Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.36
Rotary / Linear Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.37
Liquid Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.38
Versions for the North and South American Continents
ISO-KF Flange Fittings and Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.39
Adaptors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.41
(ISO-K) Clamp Flange Fittings and Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.42
ISO-F and DIN 2501 Fixed Flange Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.43
ANSI Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.44

Thes e ar guments s hould c o n v in c e y o u in fa v o r o f
flange c omponents from LE YBO L D :
♦ Availability of all components at short notice

♦ Controlled material quality

♦ World-wide advice at any time to answer
your questions relating to vacuum systems

♦ Compatible to your existing flanges of the
same system

♦ Utilization of most advanced manufacturing
methods

♦ Highly leak-tight down to leak rates of
1 x 10-9 mbar x l x s-1; all components are
subjected to a helium leak test

♦ Environment-friendly cleaning baths with
complete waste disposal and recycling facilities
♦ Environment-friendly and secure packaging
♦ Total Quality Management methods during
all processing stages

C13.02

♦ Low outgassing rates of the materials
through
- choice of the right material quality,
especially for vacuum apparatus
- excellent cleaning methods
♦ Documentation available for all components

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

G eneral
Vacuum systems (i.e. systems for pressures ranging from 2.5 bar to 10-9 mbar (1.9 x 10-3 Torr to
0.75 x 10-9 Torr)) are quickly and easily assembled owing to the modular construction principle
which is based on interchangeable standard components by means of vacuum-tight, demountable
flange connections. Individual components may
be exchanged easily at any time. Depending on
the intended use and size of the connection, flanges of different types have been developed. The
KF flange connection was developed by
LEYBOLD many years ago and has been widely
accepted by all users of vacuum equipment. This
product section lists all flange connections and
fittings including adaptors for ultra high vacuum
components.
Components marked with [< 1000 mbar
(< 750 Torr)] are not allowed for use at pressures
exceeding 1000 mbar abs.

Mater ials
Stainles s Steel
AISI/
SAE

DIN Designation

German
Material No.

AISI

DIN Designation

1.4301

304

X5 CrNi 18 10

1.0037

–

St 37-2

1.4305

303

X10 CrNi S 18 9

1.0308.07

–

St 35

1.4306

304 L

X2 CrNi 19 11

1.1141

–

CK 15

1.4310

301

X12 CrNi 17 7

1.1181

–

CK 35

1.4401

316

X5 CrNiMo 17 12 2

1.4404

316 L

X2 CrNiMo 17 12 2

1.4435

316 L

X2 CrNiMo 18 14 3

1.4541

321

X10 CrNiTi 18 9

1.4571

316 Ti

X6 CrNiMoTi 17 12 2

1.4552

–

X5 CrNiNb 18 9

AISI

3.0255.10

AA 150 1-0

Al 99.5w

3.0615.71

AA 6012-T6

AlMgSiPb

Ultra High Vacuum Components are described in
Product Section C15.

3.1655.53

AA 2011-T352

AlCuBiPb

3.2162.05

380.0 (AA)

GD-AlSi8Cu8

3.2315.08

6082-F (AA)

AlMgSi1

3.2315.71

6082-T6

AlMgSi1

3.2315.72

6063 (AA)

Al Mg Si1

3.2381.02

520.0 (AA)

GK AlSi 10 Mg

3.2381.62

520.0 (AA)

GK AlSi 10 Mgwa

3.2582.05

160 X

GD-AlSi 12

1)

G a s k e ts
Code
Chemical
Designation Designation

Typical
Trade Name

CR

Chloroprenecaoutchouc

Neoprene

FPM

Fluorcaoutchouc

Viton®

NBR

Acrylonitrilebutadienrubber

Perbunan®

PTFE

Polytetrafluorethylene

Teflon®

EPDM

Ethylene propylene
dien rubber

–

Aluminum
German
Material No.

The designations used by LEYBOLD for clamp
flanges, fixed flanges (bolted) and collar flanges
with retaining rings correspond both to the international standards 1) and to the usual nomenclature in vacuum technology.

Ste e l

German
Material No.

The components and flange connections are
intended for use in connection with vacuum
systems. They have not been designed to support
mechanical loads. All loads must be supported
separately at the connection components.

Flange Designations

Vacuum Fittings and Feedthroughs

DIN Designation

H o s e s a n d Tu b e s
Code
Chemical
Designation Designation

Typical
Trade Name

NR

Natural rubber

–

PVC

Polyvinylchloride

–

C13

The nominal width DN corresponds only approximately to the inner
diameter, i.e. is is not necessarily identical to the inner diameter.
Differences in the actual inner diameter are quite normal in practice
and do not contravene standards.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.03

Vacuum Fittings and Feedthroughs

General

11

THE RIGHT
CONNECTION
FROM LEYBOLD

9

10
8
7

ISO-

12

F

7

6
3
1 KF
1
fla
2
2 Cen nges
3 Cla tering ring
with O
mping
-ring
ring
gasket
KF clam
p flang
e conn
ection

5
4

4

KF

1 Flan
2 Vac ge
uum
center sealing di
ing ring
sk cons
with
is
an
3 ISO outer supp d O-ring ga ting of
-K
sket
4 Bol flange ort ring
t with
5 Col
nu
lar fla t
nge w
ith reta
ining
ring

3

1

2. A
da
3. C ptor reduc
er
en
4. F tering ring ISO-K – K
F
lexible
with O
5. C
-r
v
lampin acuum tub ing gaske
t
ing
6. T
g quic
ee
k-rele
ase ri
7. C
ng
lamp
8. E
lb
9. P ow
VC co
iled v
10. C
acuum
ross
tubing
11. B
lank fl
ange
12. S
mall fl
ange
with h
ose n
ozzle

7
2

1

1 ISO
2 Cen -K flange
teri
and ng ring w
3 Cla outer supp ith O-ring
mp
gasket
ort ring

ISO-K

4

clamp

flange

connec

ISO-

2
3

tion

K

6
5

7

3

4
6

CF

10

nge co

nnectio

n

2. R
ed
3. Ad ucer / ISO-K
a
-C
4. D ptor CF-ISO F
ouble
-K/KF
cro
5. Ad
justm ss
ent pie
6. Elb
ce
o
7. Ce w
ramic
8. Te
interm
e
ediate
9. U
piece
HV
10. Bla observati
o
n win
nk fla
dow
nge

C13.04

8

9
9

7

CF fla

11

5

8

12

10

1. ISO-K flange
2. Centering ring with O-ring gasket and outer support ring
3. Clamp
4. Tee
5. Cross with lateral DN 10/40 KF flanges
6. Elbow
7. Flexible vacuum tubing
8. Cross
9. Intermediate flange with gauge port
10. Clamp flange with tubulation
11. Blank flange
12. Flexible compensation element

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Vacuum Fittings and Feedthroughs

Flange Connections
ISO-KF Connection
The ISO-KF connection (to DIN 28 403 and
ISO 2861) permits rapid fitting and replacement of
components in vacuum systems. It consists of
two symmetrical KF flanges (1), a centering ring
with O-ring gasket (2) and a clamping ring (3).
High vacuum tight KF connections can be made
without the use of tools simply by turning the
wing nut of the clamping ring.

ISO-K Clamp
Flange Connection

2

1
2
3
4

Small flange
Centering ring with O-ring
Clamping ring
Outer centering ring with O-ring

3

1

4

1

KF flange connection

The clamp flange connection (to DIN 28 404 and
ISO 1609) allows components from DN 63 to
DN 630 to be connected in any position regardless of the bolt hole arrangement on any fixed
flanges.
It consists of two clamp flange components (1),
a centering ring (2) with an outer ring enclosing
the O-ring gasket, and several clamps (3) which
the connection is assembled and tightened with.
Since the centering ring can be firmly inserted
into the centering groove of the flange, even horizontal connections are quickly and easily fitted.

ISO-F / DIN
Fixed Bolted Flange Fittings

1 Clamp flange
2 Centering ring and O-ring
with outer supporting ring
3 Clamp

ISO-K clamp flange connection

With the appropriate collar flanges, the clamp
flange can be connected to various fixed bolted
flange systems (ISO-F, DN 2501, etc.) see figures
in section “ISO-F and DIN 2501 Fixed Flange
Fittings”.

Bake Out Temperatures
for the Gaskets
CR and FPM gaskets can be inserted in all listed
flange types, while aluminum gaskets may be
used for higher vacuum requirements.

C13

1 ISO-K flanges
2 Vacuum sealing disk consisting
of centering ring and O-ring
with outer support ring
3 Retaining rings
4 ISO-F collar flanges
5 Bolt with nut

Clamped flange connection with collar flanges

CR gaskets can be used in the temperature range
from -40 °C to +100 °C [-40 °F to +212 °F] (max.
bakeout temperature), FPM gaskets from -15 °C
to +150 °C [+5 °F to +302 °F] (max. bakeout
temperature). Aluminum gaskets from -196 °C to
+200 °C [-321 °F to +392 °F] (max. bakeout
temperature gradient; ∆T max. 2.5 °/min).
1 Flange to DIN 2501 ND6
2 Sealing disk consisting of
centering ring and O-ring with outer support ring
3 ISO-K flange
4 Bolt with nut
5 Collar flange with retaining ring to DIN 2501 ND6

Connection between a DIN 2501 ND 6 flange and an ISO-K flange with DIN 2501 collar flange

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.05

Vacuum Fittings and Feedthroughs

ISO-KF Flange Fittings and Components

DN 16 KF to DN 50 KF
Aluminum Design
(to DIN 28 403)
[Tubes similar DIN 28 403]

DN 16 KF to 50 KF
Stainless Steel Design
(to DIN 28 403)
[Tubes similar DIN 28 403]

The small flange connection developed by
LEYBOLD has become the basis of the international standard for vacuum technology.

Advantages to the User

Advantages to the User

◆ Can be baked out up to 200 °C (392 °F) when
using metal seals

◆ Quick, safe and reliable

◆ Quick, safe and reliable

◆ No tools are need to provide a vacuum-tight
seal

◆ Can be degassed up to 150 °C (302 °F) with
FPM
gaskets

◆ Suitable down to pressures of 10-7 mbar
(0.75 x 10-7 Torr)

◆ With metal seals suitable for pressures down
to 10-9 mbar (0.75 x 10-9 Torr)

◆ Easy to disassemble and clean

◆ Corrosion resistant

◆ In the case of special requirements as to
degassing for the purpose of reducing the
outgassing rate and in case of special requirements as to corrosion resistance, we recommend the use of stainless steel components.

◆ Low degassing rate

Quick Clamping Ring
Advantages to the User
◆ Quick and effective fitting and disassembly
◆ Can be fitted with one hand
◆ Closing action via lever with clamping spring
◆ Corrosion resistant

◆ For standard applications involving pressures
up to 2.5 bar (1.9 x 10+3 Torr) abs.
◆ Can be degassed up to 200 °C (392 °F) with
UHV aluminum rings or disks

Flexible Compensation
Elements
Vacuum systems and pump systems often require components which are capable of protecting sensitive instruments against impacts or
excessive vibrations while linking tubes at the
same time.

Advantages to the User
◆ Easy and quick to install
◆ Safe and reliable
◆ Tubes may be turned in any direction
◆ No centering and sealing ring required
◆ Capable of withstanding temperatures up to
80 °C (176 °F)
◆ Suitable for pressures down to 10-5 mbar
(0.75 x 10-5 Torr)

C13.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

ISO-KF Flange Fittings and Components

Fitting a centering ring to a KF component

Quick clamping ring

Fitting an elbow

Clamping ring for ultra sealing disk

Vacuum Fittings and Feedthroughs

Small flange connection with ultra sealing ring

C13
Small flange connection with clamping ring

1
2
3
4

Small flange port
Housing wall with threaded tap
Claw
Centering ring

Small flange components made of stainless steel

Nominal diameter
DN 10 ISO-KF
DN 16 ISO-KF
DN 25 ISO-KF
DN 40 ISO-KF
DN 50 ISO-KF

A
30
30
40
55
75

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

B
12.2
17.2
26.2
41.2
52.4

C
12.2
17.2
26.2
41.2
52.4

D
45
45
55
71
91

Number of claws
4
4
4
4
4

C13.07

Vacuum Fittings and Feedthroughs

ISO-KF Flange Fittings and Components

Centering Rings (Aluminum 3.1655.53/Stainless Steel 1.4305) with O-Ring (CR/FPM)
DN
d

h

h1
ød1

ød

Dimensional drawing for the centering rings with O-ring

KF
mm
in.
d1
mm
in.
h
mm
in.
h1
mm
in.
Aluminum/CR
Part No.
Aluminum/FPM Part No.
Stainless steel/FPM
Part No.

10
12
0.47
10
0.40
8
0.31
3.9
0.15
183 21
182 01

16
17
0.67
16
0.63
8
0.31
3.9
0.15
183 26
182 06

20
22
0.87
20
0.79
8
0.31
3.9
0.15
183 22
182 02

25
26
1.02
25
0.98
8
0.31
3.9
0.15
183 27
182 07

32
34
1.34
32
1.26
8
0.31
3.9
0.15
183 23
182 03

40
41
1.61
40
1.57
8
0.31
3.9
0.15
183 28
182 08

50
52
2.05
50
1.97
8
0.31
3.9
0.15
183 25
182 05

883 21

883 46

883 22

883 47

883 23

883 48

883 25

Centering Ring Adaptors (Aluminum 3.1655.53/Stainless Steel 1.4301) with O-ring (CR/FPM)
DN
d

ød2
h1

h
ød1
ød

d1
d2

Dimensional drawing for the centering ring adaptors with O-ring

h
h1
Aluminum/FPM
Aluminum/CR
Stainless steel/FPM

KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.
Part No.
Part No.

10/16
12
0.47
10
0.40
17
0.67
8
0.31
3.9
0.15
182 56
183 56
883 56

20/25
22
0.87
20
0.79
26
1.02
8
0.31
3.9
0.15
182 57
183 57
883 57

32/40
34
1.34
32
1.26
41
1.61
8
0.31
3.9
0.15
182 58
183 58
883 58

Centering Rings (Stainless Steel) with Sintered Metal Filter (Stainless Steel 1.4404 and O-Ring (FPM)
DN
d

ød1
h1

h

d1

ød

Dimensional drawing for the centering rings with sintered metal filter
and O-ring

h
h1
Stainless steel

KF
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

10
12
0.47
8
0.31
8
0.31
3.9
0.15
883 50

16
17
0.67
14
0.55
8
0.31
3.9
0.15
883 51

25
26
1.02
23
0.91
8
0.31
3.9
0.15
883 52

40
41
1.61
38
1.50
8
0.31
3.9
0.15
883 53

50
52
2.05
48
1.89
8
0.31
3.9
0.15
883 54

40
41
1.61
41
1.61
35.5
1.4
8
0.31
3.9
0.15
883 98

50
52
2.05
52
2.05
46
1.81
8
0.31
3.9
0.15
883 99

Air throughput at 20 °C and 200 mbar differential pressure approx. 1m3 x h-1 x cm2; pore size: 20 µm

Centering Rings with Fine Filter (Stainless Steel 1.4305), O-Ring (FPM)
DN
d

ød1
ød2
h1

h
ød

Dimensional drawing for the centering rings with fine filter

d1
d2
h
h1
Stainless Steel

KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

10
12
0.47
12
0.47
9
0.35
8
0.31
3.9
0.15
883 95

16
17
0.67
17
0.67
13.5
0.53
8
0.31
3.9
0.15
883 96

25
26
1.02
26
1.02
22
0.87
8
0.31
3.9
0.15
883 97

Filter material: Stainless steel mesh 1.4404, size of pore: 4 µm, separation grade: 1 µm particles to 98 %

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

ISO-KF Flange Fittings and Components

Vacuum Fittings and Feedthroughs

Outer Centering Rings (Aluminum 3.1655.53) with O-Ring (CR/FPM)
DN
d
h

h1

d1

ød1
ød

h

Dimensional drawing for the outer centering rings with O-ring

h1
Aluminum/CR
Aluminum/FPM

KF
mm
in.
mm
in.
mm
in.
mm
in.
Part No.
Part No.

10/16
32
1.26
30.2
1.19
7
0.28
3.9
0.15
183 50
183 53

20/25
42
1.65
40.2
1.58
7
0.28
3.9
0.15
183 51
183 54

32/40
57
2.24
55.2
2.17
7
0.28
3.9
0.15
183 52
183 55

50
77
3.03
75.2
2.96
7
0.28
3.9
0.15
183 59
183 60

KF
mm
in.
mm
in.
mm
in.
mm
in.

10/16
25.6
1.01
22.6
0.89
19.6
0.77
4.5
0.18

20/25
35.6
1.40
32.6
1.38
29.6
1.17
4.5
0.18

32/40
50.6
1.99
47.6
1.87
44.6
1.76
4.5
0.18

50
65.6
2.58
62.6
2.46
59.6
2.35
4.5
0.18

Part No.

883 73

883 75

883 77

883 79

32/40
3
0.12
57
2.24
50
1.97
7
0.28
883 78

50
3
0.12
77
3.03
65
2.56
7
0.28
883 69

Ultra Sealing Rings (Aluminum 3.2315.71)
ød1

DN
d

ød2
h

ød

d1
d2

Dimensional drawing for the ultra sealing rings

h
Aluminum
(set of 3 pieces)

Outer Support Rings (Stainless Steel 1.4310) for Ultra Sealing Rings
DN
a

a

h

D
øD

ød

d
h
Dimensional drawing for the outer support rings

Stainless steel

KF
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

10/16
3
0.12
32
1.26
25
0.98
7
0.28
883 74

20/25
3
0.12
42
1.65
35
1.38
7
0.28
883 76

Spare O-Ring Gaskets for KF Flange Connections
DN
d

s
d

Dimensional drawing for the spare O-ring gaskets for KF flange connections

KF
mm
in.
s
mm
in.
FPM (set of 10 pieces)
Part No.

10
15
0.59
5
0.20

16 1)
18
0.71
5
0.20

20
25
0.98
5
0.20

25 1)
28
1.10
5
0.20

32
40
1.57
5
0.20

40 1)
42
1.65
5
0.20

50
55
2.17
5
0.20

210 600

210 605

210 610

210 615

210 620

210 625

210 630

1) Also for adaptor/centering rings

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.09

C13

Vacuum Fittings and Feedthroughs

ISO-KF Flange Fittings and Components

Clamping Rings (Aluminum 3.2582.05)
DN
A
B
C
Aluminum

Dimensional drawing for the clamping rings

KF
mm
in.
mm
in.
mm
in.
Part No.

10/16
45
1.77
61
2.40
16
0.63
183 41

20/25
55
2.17
72
2.83
16
0.63
183 42

32/40
70
2.76
90
3.54
18
0.71
183 43

50
95
3.74
123
4.84
25
0.98
183 45

Max. torque at the wing nut: 2 Nm

Quick Clamping Rings (Aluminum 3.2582.05)
DN
b

r
x1

KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

b1

b
x

r

b1

Dimensional drawing for the quick clamping rings

x
x1
Aluminum

10/16
45
1.77
61
2.40
48
1.89
22
0.87
30
1.18
183 46

20/25
55
2.17
72
2.83
56
2.20
27
1.06
34
1.34
183 47

32/40
70
2.76
90
3.54
74
2.91
35
1.38
44
1.73
183 48

Clamping Collars (Aluminum 3.2162.05) for Ultra Sealing Rings
h

DN
D

D

h

Dimensional drawing for the clamping collars for ultra sealing rings

Hexagon socket screw to DIN 912
Aluminum

KF
mm
in.
mm
in.
mm
in.
Part No.

10/16
52
2.05
18
0.71
M 4 x 30
M 4 x 1.18
882 75

20/25
75
2.95
20
0.79
M 6 x 30
M 6 x 1.18
882 77

32/40
90
3.54
23
0.90
M 8 x 35
M 8 x 1.38
882 78

50
115
4.52
28
1.10
M 8 x 50
M 8 x 1.97
882 79

Claw, complete (Aluminum 3.2315.08)
h1

h

DN
a

a1
b1

h2

a1
a

M6

Top View

b1

Dimensional drawing for the claw, complete

h
h1
h2
Aluminum (1 set = 4 claws)

KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

10 - 50
19.5
0.77
11.5
0.45
14.0
0.55
12.5
0.49
1.6
0.06
20.0
0.79
885 00

Blank Flanges (Aluminum 3.2315.71 / Stainless Steel 1.4301)
DN
d

d

h
Dimensional drawing for the blank flanges

h
Aluminum
Stainless steel

KF
mm
in.
mm
in.
Part No.
Part No.

10
30
1.18
5
0.20
184 41
884 41

16
30
1.18
5
0.20
184 46
884 36

25
40
1.57
5
0.20
184 47
884 37

40
55
2.17
5
0.20
184 48
884 38

50
75
2.95
6
0.24
184 45
884 45

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

ISO-KF Flange Fittings and Components

Vacuum Fittings and Feedthroughs

KF Flanges with Short / Long Tubulation (Steel 1.0037 / Stainless Steel 1.4301)
DN (short tubulation)
d1

ød 1
ød 2

d2

l

l
DN

Steel
d1

ød 1
ød 2

d2
l

l

Stainless steel
DN (long tubulation)
d1

DN

Dimensional drawing for the KF flanges with short and long tubulation

d2
l
Steel
d1
d2
l
Stainless steel

KF
mm
in.
mm
in.
mm
in.
Part No.
mm
in.
mm
in.
mm
in.
Part No.

10
16
0.63
12
0.47
20
0.79
182 31
16
0.63
12
0.47
20
0.79
866 31
10 KF
16
0.63
12
0.47
70
2.76
182 81
16
0.63
12
0.47
70
2.76
866 81

mm
in.
mm
in.
mm
in.
Part No.
mm
in.
mm
in.
mm
in.
Part No.

16
20
0.79
16
0.63
20
0.79
182 32
20
0.79
16
0.63
20
0.79
866 32
16 KF
20
0.79
16
0.63
70
2.76
182 82
20
0.79
16
0.63
70
2.76
866 82

25
30
1.18
26
1.02
20
0.79
182 33
30
1.18
26
1.02
20
0.79
866 33
25 KF
30
1.18
26
1.02
70
2.76
182 83
30
1.18
26
1.02
70
2.76
866 83

40
45
1.77
41
1.61
20
0.79
182 34
45
1.77
41
1.61
20
0.79
866 34
40 KF
45
1.77
41
1.61
70
2.76
182 84
45
1.77
41
1.61
70
2.76
866 84

50
55
2.17
51
2.01
20
0.79
182 35
54
2.13
50
1.97
20
0.79
866 35
50 KF
55
2.17
51
2.01
70
2.76
182 85
54
2.13
50
1.97
70
2.76
866 85

Elbows 90° (Aluminum 3.2315.08 / Stainless Steel 1.4301)
d1

DN
a

d1
a

a

d1

a

Dimensional drawing for the elbows 90°;
stainless steel (left) and aluminum (right)

a

Conductance
Aluminum
Stainless steel

KF
mm
in.
mm
in.
l/s
Part No.
Part No.

16
40
1.57
16
15
0.63 0.59
6.5
–
184 36 –
– 884 61

25
50
1.97
25
0.98
18.9 –
184 37 –
– 884 62

40
65
2.56
39 40.5
1.34 1.59
56.5 –
184 38 –
– 884 64

50
70
2.76
49
1.93
–
–
884 65

Tees (Aluminum 3.2315.08 / Stainless steel 1.4301)
a

DN
a

b

d1
a

Dimensional drawing for the tees

b
d1 (Aluminum)
d1 (Stainless steel)
Conductance
Aluminum
Stainless steel

KF
mm
in.
mm
in.
mm
in.
mm
in.
l/s
Part No.
Part No.

16
40
1.57
80
3.15
16
0.63
16
0.63

25
40
50
65
1.97
2.56
100
130
3.94
5.12
25
39
0.98
1.54
25
40.5
0.98
1.59
6.5
–
18.9
–
56.5
–
184 06 –
184 07 –
184 08 –
– 884 71
– 884 72
–
884 74

50
70
2.76
140
5.51
–
–
53
2.09
–
–
884 75

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.11

C13

Vacuum Fittings and Feedthroughs

ISO-KF Flange Fittings and Components

4-Way Crosses (Aluminum 3.2315.08 / Stainless 1.4301)
a

DN
a

a

a
DN

Conductance
Aluminum
Stainless steel

a

KF
mm
in.
l/s
Part No.
Part No.

16
40
1.57

25
40
50
65
1.97
2.56
6.5
–
18.9
–
56.5
–
184 71
–
184 74 –
184 75 –
–
884 85
– 884 86
– 884 87

50
70
2.67
–
–
884 88

Dimensional drawing for the 4-way crosses

4-Way Reducer Crosses with DN 10 Flanges (Aluminum 3.2315.08 / Stainless steel 1.4301)
a

DN/DN1
a

a

a1
DN

a1

a1
DN 1

Dimensional drawing for the 4-way reducer crosses with lateral DN 10 flanges

Aluminum
Stainless steel

KF
mm
in.
mm
in.
Part No.
Part No.

25/16
35
1.38
35
1.38
184 57
884 96

40/16
40
1.57
45
1.77
184 58
884 97

50/16
50
1.97
50
1.97
–
884 98

Reducers (Aluminum 3.2315.72 / Stainless Steel 1.4305)
DN

DN/DN1
Aluminum
Stainless steel

DN1

KF
Part No.
Part No.

25/16
183 86
885 04

40/16
183 89
885 07

40/25
183 87
885 05

50/40
183 88
885 06

40

Dimensional drawing for the reducers

Intermediate Pieces (Aluminum 3.2315.72 / Stainless Steel 1.4301)
DN

DN

DN
l
Aluminum
Stainless steel

KF
mm
in.
Part No.
Part No.

16
80
3.15
184 80
884 17

25
100
3.94
184 81
884 18

40
130
5.12
184 82
884 19

l

Dimensional drawing for the intermediate pieces

Bellows (Stainless Steel 1.4571) with Flanges (Stainless Steel 1.4301)
DN
l

l

DN

Wall thickness
Max. extension, axial

Dimensional drawing for the bellows with flanges

Compression
Tension
Max. angle
Lateral motion
Stainless steel

KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
degress 1)
mm
in.
Part No.

16
70
2.76
0.13
0.005
10.5
0.41
6.5
0.26
4
0.16
± 21
±4
± 0.16
872 41

25
80
3.15
0.13
0.005
13
0.51
8
0.31
5
0.20
± 17
± 3.5
± 0.14
872 43

40
100
3.94
0.15
0.006
18
0.71
11
0.43
7
0.28
± 15
±7
± 0.28
872 45

50
100
3.94
0.2
0.008
16
0.63
10
0.39
6
0.24
± 15
±8
± 0.31
872 46

1) When utilizing the maximum bending angle, no extension along the axial axis will be possible !

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

ISO-KF Flange Fittings and Components

Vacuum Fittings and Feedthroughs

Vacuum Hoses 1) with Flanges (Stainless Steel 1.4571)
DN
Max. bending radius (inside)
with multiple bending

l

DN

with single bend
Wall thickness

Dimensional drawing for the vacuum hoses with flanges

l = 250 mm
l = 500 mm
l = 750 mm
l = 1000 mm

(9.84 in.)
(19.69 in.)
(29.53 in.)
(39.37 in.)

KF
mm
in.
mm
in.
mm
in.
Part No.
Part No.
Part No.
Part No.

16

25

40

50

68.5
2.70
50
1.97
0.2
0.008
867 81
867 91
867 41
868 01

103
4.06
63
2.48
0.2
0.008
867 83
867 93
867 43
868 03

129
5.08
100
3.94
0.2
0.008
867 85
867 95
867 45
868 05

198
7.80
130
5.12
0.3
0.01
867 86
867 96
867 46
868 06

1) Flexible vacuum hoses must be linked to an external mechanical assembly

PVC Coiled Vacuum Hoses without Flanges
DN
d
d

d1

d1
Length
PVC coiled vacuum hose

Dimensional drawing for the PVC vacuum hoses

KF
mm
in.
mm
in.
m
Part No.

16
23
0.91
16
0.63
172 41

25
33
1.30
25
0.98
by the metre
172 42

40
53
2.09
40
1.57
172 43

KF
mm
in.
mm
in.
mm
in.
Part No.

16
17
0.67
40
1.57
13
0.51
182 45

25
26
1.02
40
1.57
22
0.87
182 46

40
41
1.61
40
1.57
37
1.46
182 47

KF
mm
in.
Part No.

16
13/32
0.51/1.26
866 21

25
19/44
0.75/1.73
866 22

40
29/76
1.14/2.99
866 23

16
17
0.67
40
1.57
16
0.63
182 15

25
26
1.02
50
1.97
25
0.98
182 16

40
41
1.61
65
2.56
39
1.54
182 17

KF Flanges with Hose Nozzle (Aluminum 3.0615.71)
DN
DN1 (tube)

l

ød1

DN1

DN

l
d1

Dimensional drawing for the KF flanges with hose nozzle

Aluminum

Hose Clamps (Stainless Steel 1.4301)
DN
d (min/max.)

d

Stainless steel

Dimensional drawing for the hose clamps

Elbows 90° with Hose Nozzle (Aluminum 3.2381.02)
a
DN

DN1

DN
DN1 (tube)
a

a

ød1

d1

Dimensional drawing for the elbows 90° with hose nozzle

Aluminum

KF
mm
in.
mm
in.
mm
in.
Part No.

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.13

C13

Vacuum Fittings and Feedthroughs

ISO-KF Flange Fittings and Components

CR Compensation Elements with Integrated Support Ring
DN
D
d1

D

d

d – tube tolerance
d1

l

Dimensional drawing for the compensation elements with integrated
support ring

l
Leak rate
Stainless Steel/CR
1)

KF
mm
in.
mm
in.
mm
in.
mm
in.
mbar x l x s-1
Part No.

16
44
1.73
16
0.63
24
0.94
58
2.28
182 78 1)

25
50
1.97
25
0.98
33
1.30
60
2.36
≤ 1 x 10-5
182 79 1)

40
68
2.68
40
1.57
48
1.89
64
2.52
182 80 1)

Is supplied complete with stainless steel hose clamps

Rubber Vacuum Hoses (NR) for Hose Nozzles
DN
d
d

d1

d1
Length
Hardness – Shore A –
Temperature range
Rubber vacuum hose

Dimensional drawing for rubber vacuum hoses

KF
mm
in.
mm
in.
m
°C (°F)
Part No.

10
17
0.66
7
0.28

172 02

16
25
0.98
10
0.39
by the metre
55 ± 5
-30 to +85 (-22 to +176)
172 03

20
32
1.26
16
0.63

172 04

KF Flanges with Hose Nozzles (Aluminum 3.0615.71 and Stainless Steel 1.4305)
ød1

DN
d

ød1

d1 1)
l

l
Aluminum
DN

DN

Dimensional drawing for the KF flanges with hose nozzle

d
d1 1)
l
Stainless steel

KF
mm
in.
mm
in.
mm
in.
Part No.
KF
in.
mm
in.
mm
in.
mm
in.
Part No.

16
12
0.47
7
0.26
40
1.57
182 90
16
0.63
12
0.47
7
0.26
40
1.57
885 14

25
12
0.47
7
0.26
40
1.57
182 91
25
0.98
12
0.47
7
0.26
40
1.57
885 08

40
12
0.47
7
0.26
40
1.57
182 92
40
1.57
12
0.47
7
0.26
40
1.57
885 09

1) Also recommended inside diameter for the hose

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

ISO-KF Flange Fittings and Components

Vacuum Fittings and Feedthroughs

KF Flanges with Compression Fitting for Glass/Metal/Plastic Tubes (Aluminum 3.0615 /
DN
b

ømax. Di bore

ød

d (glass)

b

l

l1
l

l1

Dimensional drawing for the KF flanges with compression fitting

DiBore-max.
Compression Fitting
Sealing set (FPM) for high temperatures
(150 °C (302 °F)), set = 10 pieces

KF
mm
in.
mm
in.
mm
in.
mm
in.
± 0.2 mm
± 0.008 in.
Part No.

10
1.5
0.06
10
0.39
30
1.18
50
1.97
11
0.43
184 61

40
1.5
0.06
26
1.02
45
1.77
65
2.56
27
1.06
184 66

Part No.

105 94

210 610

Only for pressure ≤ 1000 mbar ( ≤ 750 Torr)

Screw-in Flanges (Stainless Steel 1.4305 / FPM)
DN
l

SW

d

l

l1

d1

G

l2

KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.

l1
l2
d

Dimensional drawing for the screw-in flanges

d1
G
G
SW (width across flats)
Stainless steel
Stainless steel 1.4571
Nickel-plated steel

10
35
1.34
25
0.98
15
0.59
12
0.47
22
0.87
3/8"
3/8"
19
0.75
886 30
–
–

inch
mm
in.
Part No.
Part No.
Part No.

16
35
1.34
25
0.98
15
0.59
16
0.63
26
1.02
1/2"
1/2"
22
0.87
886 31
–
–

16
42
1.65
–
–
11,5
0.45
5
0.20
–
–
M 16 x 1.5
M 16 x 0.06
17
0.67
–
–
168 40

25
45
1.77
35
1.34
25
0.98
25
0.98
39
1.54
1"
1"
36
1.42
886 32
–
–

16
26
1.02
–
–
8
0.31
5
0.20
–
–
1/8"
1/8"
13
0.51
–
160 26
–

40
50
1.97
40
1.57
30
1.18
41
1.61
54
2.13
1 1/2"
1 1/2"
50
1.97
886 33
–
–

Screw-on Flanges (Stainless Steel 1.4305 / FPM)
SW
d

l

l1

l2

Dimensional drawing for the screw-on flanges

G
d1

DN
l
l1
l2
d
d1
G
SW (width across flats)
Stainless steel

KF
mm
mm
mm
mm
mm
inch
mm
Part No.

10
35
25
15
10
20
3/8"
17
884 25

16
35
25
15
15
25
1/2"
21
884 26

25
45
35
25
24
39
1"
36
884 27

40
50
40
30
38
54
1 1/2"
50
884 28

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.15

C13

Vacuum Fittings and Feedthroughs

Adaptors

KF Flanges with Ground Cone (Stainless Steel 1.4301)
DN
KNS - d / l

KF
mm
in.
mm
in.

l1
Taper
Stainless steel

16
19 / 26
0.75 / 1.02
40
1.57
1 : 10
184 87

Part No.

25
29 / 32
1.14 / 1.26
45
1.77
1 : 10
184 85

40
45 / 40
1.77 / 1.57
55
2.17
1 : 10
184 86

Dimensional drawing for the KF flanges with ground cone

Adaptors/Reducers KF – ISO-K
d1

DN
DN1
d1

d
s

DN1

t

l

DN

Dimensional drawing for the adaptor reducers KF – ISO-K;
left: aluminum; right: stainless steel

l
s
t
Weight
Stainless steel 1.4301
Aluminum 3.2315.71

KF
ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
kg
lbs
Part No.
Part No.

40
63
70
2.76
40
1.57
5
0.2
4.5
0.18
0.5
1.10
887 40
269 40

50
63
70
2.76
45
1.77
5
0.2
4.5
0.18
0.6
1.32
887 41
269 41

40
100
102
4.02
40
1.57
5
0.2
4.5
0.18
0.8
1.77
887 42
–

Adaptors KF – CF (Stainless Steel 1.4301)
DN

l

DN
DN1
or
l

DN 1

Dimensional drawing for the adaptors CF – ISO-KF

Stainless steel 1.4301

KF
CF
inch
mm
in.
Part No.

16
16
1 5/16"
35
1.38
837 81

16
40
2 3/4"
30
1.18
837 82

25
16
1 5/16"
35
1.38
837 83

25
40
2 3/4"
30
1.18
837 84

40
40
2 3/4"
50
2.17
837 36

160
x
–
152.6
6.0
839 46

200
x
–
203.4
8.0
839 47

250
–
x
254
10
839 48

Copper Gaskets for CF-Flanges (OFHC-Copper - Oxygen-Free)
DN
Set of 10
Set of 5
Inside diameter

CF

mm
in.
OFHC-Copper Part No.

16
x
–
16.2
0.64
839 41

40
x
–
39
1.54
839 43

63
x
–
63.6
2.5
839 44

100
x
–
101.8
4.0
839 45

16
x

40
x

63
–

100
–

160
–

200
–

–
–
160
320
839 23

x
–
160
320
839 34

x
–
160
320
839 35

x
–
160
320
839 36

x
–
160
320
839 37

FPM Gaskets for CF-Flanges
DN
Set of 5

CF

Profile seal, set of 2
–
Gasket with support ring
–
Degassing temperature °C 160
°F 320
FPM
Part No. 839 21

250
1 FPM O-ring
with Support Ring
–
x
160
320
839 03

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Adaptors

Vacuum Fittings and Feedthroughs

Bolts, Nuts and Washers for CF-Flanges
DN
Dimensions (d x l)
Torque
Quantity per set

Set

CF
mm
in.
Nm
Bolts
Nuts
Bolts
Washers
Part No.

16
M 4 x 20
M 4 x 0.79
4

40
M 6 x 35
M 6 x 1.38
10

63/100
M 8 x 50
M 8 x 1.97
20

160
M 8 x 55
M 8 x 2.17
20

200/250
M 8 x 60
M 8 x 2.36
20

25
25
–
25
839 00

25
25
–
25
839 01

25
25
–
25
839 04

25
25
–
25
839 05

25
25
–
25
839 07

For details on UHV seals and further components, see Product Section C15.

C13

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.17

Vacuum Fittings and Feedthroughs

(ISO-K) Clamp Flange Fittings and Components

Flange Components
DN 63 to DN 630 ISO-K
(to DIN 28 404 in line with
ISO 1609/3669)
The clamp flange connection was introduced to
the vacuum industry by LEYBOLD. Since the
fitting of clamp flanges does not depend on any
bolt holes in the flange, these components may
be installed in any orientation.

Attaching a clamp flange component and fitting of the clamp

Advantages to the User
◆ Quick to fit

Flexible Compensation
Elements (CR)
Vacuum systems and pump systems often require components which are capable of protecting sensitive instruments against impacts or
excessive vibrations while linking tubes at the
same time.

Advantages to the User
◆ Easy and quick to install
◆ Safe and reliable
◆ Tubes may be turned in any direction

◆ Safe and reliable
◆ Can be turned in any direction
◆ Easy to disassemble, thus easy to clean
◆ Suitable for pressures down to 10-7 mbar
(0.75 x 10-7 Torr) when using O-rings and
down to 10-9 mbar (0.75 x 10-9 Torr) when
using metal gaskets

◆ No centering ring and sealing ring is needed
since the seal is provided by the smooth tube
surface
◆ Capable of withstanding temperatures up to
100 °C (212 °F)
◆ Suitable for pressures down to 10-5 mbar
(0.75 x 10-5 Torr)

◆ Easily adaptable to other flange systems
◆ Mounted by means of clamps (ISO-K) or
collar flange with retaining ring (ISO-F,
DIN 2501)

Tightening the clamping bolt

◆ Clamp flange components are used with CR
or FPM gaskets or with ultra sealing disks
made of aluminum
◆ Degassing temperatures
for CR, max.
100 °C (212 °F)
for FPM, max.
150 °C (302 °F)
for the ultra sealing disk, max.
200 °C (392 °F)
The pressure range for the application depends in
each case on the sealing method which is used
and is thus limited for ultra sealing disks to
10-9 mbar (0.75 x 10-9 Torr), for FPM gaskets to
10-8 mbar (0.75 x 10-8 Torr) and for CR sealed
components to 10-7 mbar (0.75 x 10-7 Torr).

ISO-K clamp flange connection

Nominal diameter
DN 63 ISO-K
DN 100 ISO-K
DN 160 ISO-K
DN 200 ISO-K
DN 250 ISO-K
DN 320 ISO-K
DN 400 ISO-K
DN 500 ISO-K
DN 630 ISO-K

C13.18

A
95
130
180
240
290
370
450
550
690

B
70
102
153
213
261
318
400
501
651

C
12
12
12
12
12
17
17
17
22

Number of clamps
4
4
4
6
6
8
8
12
12

D
110
145
200
260
310
395
480
580
720

Screws for claws
M 8 x 35
M 8 x 35
M 10 x 35
M 10 x 35
M 10 x 35
M 12 x 50
M 12 x 50
M 12 x 50
M 12 x 55

Number of claws
4
8
8
12
12
12
16
16
20

1
2
3
4

Clamp flange
Claw
Base plate
Claw

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

(ISO-K) Clamp Flange Fittings and Components

Vacuum Fittings and Feedthroughs

Centering Rings (Aluminum / Stainless Steel) with O-Ring (NBR)
DN
d

ISO-K
mm
in.
d1
mm
in.
d2
mm
in.
h
mm
in.
s
mm
in.
Aluminum/FPM
Part No.
Aluminum/CR
Part No.
Stainless Steel/FPM Part No.

d

d2

s

h
d1

Dimensional drawing for the centering rings with O-ring

63
96
3.78
70
2.76
67
2.64
8
0.31
3.9
0.15

100
128
5.04
102
4.02
99
3.9
8
0.31
3.9
0.15

160
179
6.93
153
6.02
150
5.91
8
0.31
3.9
0.15

200 250 320 400 500
239 287 358 440 541
9.41 11.30 14.09 17.32 21.9
213 261 318 400 501
8.39 10.28 12.52 15.75 19.72
210 258 313 395 496
8.27 10.16 12.32 15.55 19.53
8
8
14
14
14
0.31 0.31 0.55 0.55 0.55
3.9 3.9
5.6
5.6
5.6
0.15 0.15 0.22 0.22 0.22

630
691
27.2
651
25.65
643
25.43
14
0.55
5.6
0.22

800
840
33.07
800
31.5
795
31.18
14
0.55
5.6
0.22

1000
1040
40.94
1000
39.37
995
39.17
14
0.55
5.6
0.22

268 41 268 42 268 43 268 44 268 45 268 46 268 47 268 48 268 49 268 50 268 51
268 05 268 06 268 09 268 19 268 17 268 18 268 14 268 15 268 16

–

–

887 03 887 04 887 07 887 02 887 08

–

–

–

–

–

–

Centering Rings with Fine Filter (Stainless Steel 1.4301), O-Ring (FPM)
ød

ød2

b1

b

DN
b

ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

b1
ød1

d

Dimensional drawing for the centering rings with fine filter

d1
d2
Stainless steel

63
8
0.31
4
0.16
96
3.78
70
2.76
62
2.44
887 20

100
8
0.31
4
0.16
128
5.04
102
4.02
94
3.7
887 21

Filter material: Stainless steel 1.4404, size of pores: 4 µm, separation grade: 1 µm particles to 98 %

Ultra Sealing Disks (Aluminum 3.2315.70)
DN
b
d1

d

b1
b

Dimensional drawing for the ultra sealing disks

b1

d
d1
Aluminum

ISO-K / ISO-F
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

63
4.5
0.18
2.6
0.10
69.8
2.75
85.6
3.37
886 24

100
4.5
0.18
2.6
0.10
101.8
4.01
116.6
4.59
886 25

160
4.5
0.18
2.6
0.10
152.8
6.02
166.6
6.56
886 26

250
4.5
0.18
2.6
0.10
260.8
10.27
276.6
10.89
886 27

Centering Ring Adaptors (Aluminum) with O-Ring (FPM), ISO-K to LF Standard
b

d1
d3

d2
d

Dimensional drawing for the centering ring adaptors with O-ring

DN
b
d
d1
d2
d3
Aluminum/FPM

ISO-K / LF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

100 / 100
4
0.16
126
4.96
100
3.94
102
4.02
95
3.74
105 25

160 / 150
4
0.16
177
6.97
150
5.91
153
6.02
145
5.71
105 35

250 / 250
4
0.16
285
11.22
250
9.84
261
10.28
244
9.61
105 45

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.19

C13

Vacuum Fittings and Feedthroughs

(ISO-K) Clamp Flange Fittings and Components

Clamps for ISO-K
M

DN
Number of required clamps
per connection
d
l

M

l

l
l1

l1

l1
1 set = 4 clamps
Galvanized steel 1.1181
Stainless steel 1.4401

Dimensional drawing for the clamps, right Part No. 210 061

ISO-K

63 / 250

63 / 250

320 / 400

630

320 / 630

thread
mm
in.
mm
in.

4/6
M 10
60
2.36
17 to 27
0.67 to 1.06

4/6
M 10
68
2.68
25 to 35
0.98 to 1.38

8 / 12
M 12
78
3.07
27 to 39
1.06 to 1.54

12
M 12
88
3.46
31 to 49
1.22 to 1.93

8 / 12
M 12
82.5
3.25
29 to 47
1.14 to 1.85

267 01
887 99

267 02
–

267 10
–

267 11
–

–
210 061

Part No.
Part No.

Exact numbers of clamps see first page of the section “(ISO-K) Clamp Flange Fittings and Components”

Claws
Claws (Galvanized Steel 1.1181) for ISO-K
DN
Number of required clamps
per connection
d
l

l2
l1
l3

l

l1
l2
ød

Dimensional drawing for the claws

l3
1 set = 4 claws

ISO-K

63 / 100

160 / 250

320 / 500

630

thread
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

4/8
M8
35
1.38
22.5
0.89
8.6
0.34
2.5
0.10
268 25

8 / 12
M 10
35
1.38
23
0.91
9.1
0.36
2.5
0.10
268 26

12 / 16
M 12
50
1.97
36.5
1.44
15.9
0.63
2.5
0.10
268 27

20
M 12
55
2.17
41.5
1.63
16
0.63
2.5
0.10
268 28

Exact numbers of claws see first page of the section “(ISO-K) Clamp Flange Fittings and Components”

Claws for Sealing Groove in Base Plate (Galvanized Steel 1.1181) for ISO-K
DN
d
l
l1
l2
l3
1 set = 4 claws

ISO-K
thread
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

63/100
M8
30
1.18
18.6
0.73
8.6
0.34
2.5
0.10
268 76

160/250
M 10
35
1.38
19
0.75
9.0
0.35
2.5
0.10
268 77

320/500
M 12
45
1.77
31
1.22
16.0
0.63
2.5
0.10
268 78

630
M 12
50
1.97
36.5
1.44
15.9
0.63
2.5
0.10
268 27

Exact numbers of claws see first page of the section “(ISO-K) Clamp Flange Fittings and Components”

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

(ISO-K) Clamp Flange Fittings and Components

Vacuum Fittings and Feedthroughs

Blank Flanges (Nickel-Plated Steel 1.0037 / Stainless Steel 1.4301)
t1

t

DN
a

ød2
b
b1

b
a

d1
d

b1

Dimensional drawing for the blank flanges

d
d1
d2
t
t1
Nickel-plated steel
Stainless steel

ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
thread
mm
in.
mm
in.
Part No.
Part No.

63
100
160
200
250
320
400
500
630
5
5
5
5
5
5
5
5
5
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
12
12
12
12
12
17
17
17
22
0.47
0.47
0.47
0.47
0.47
0.67
0.67
0.67
0.87
4.5
4.5
4.5
4.5
4.5
6.5
6.5
6.5
6.5
0.18
0.18
0.18
0.18
0.18
0.26
0.26
0.26
0.26
95
130
180
240
290
370
450
550
690
3.74
5.12
7.09
9.45 11.42 14.57 17.72 21.65 27.17
70
102
153
213
261
318
400
501
651
2.76
4.02
6.02
8.39 10.28 12.52 15.75 19.72 25.63
M8
M8
M8
M8
M8
M8
M8
M8
M8
8
8
8
8
8
8
8
8
8
0.31
0.31
0.31
0.31
0.31
0.31
0.31
0.31
0.31
12
12
12
12
12
12
12
12
12
0.47
0.47
0.47
0.47
0.47
0.47
0.47
0.47
0.47
269 47 269 48 269 49
–
269 56
–
–
–
–
887 55 887 56 887 57 887 54 887 58 887 59 887 60 887 61 887 62

M 8 threaded bore from nominal size DN 500

Clamp Flanges with Tubulation (Steel 1.0831, 1.0308 / Stainless Steel 1.4301)
DN
d

ød2
s

d1

h
b
ød1

d2

ød

h

Dimensional drawing for the clamp flanges with tubulation

s (steel)
s (stainless steel)
b
Steel
Stainless steel

ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.
Part No.

63
100
160
200
250
320
400
500
630
95
130
180
240
290
370
450
550
690
3.74
5.12
7.09
9.45 11.42 14.57 17.72 21.65 27.17
70
102
153
213
261
318
400
501
651
2.76
4.02
6.02
8.39 10.28 12.52 15.75 19.72 25.63
76.1
108
159
219.1
267
324
406
508
660
3.00
4.25
6.26
8.63 10.51 12.76 15.98 20.00 25.98
100
100
100
100
100
100
100
100
100
3.94
3.94
3.94
3.94
3.94
3.94
3.94
3.94
3.94
2.9
2.9
2.9
–
3
3
3
4
5
0.11
0.11
0.11
–
0.12
0.12
0.12
0.16
0.20
2.3
2
2
3
3
3
3
4
5
0.09
0.08
0.08
0.12
0.12
0.12
0.12
0.16
0.20
12
12
12
12
12
17
17
17
22
0.47
0.47
0.47
0.47
0.47
0.67
0.67
0.67
0.87
269 04 269 05 269 06
–
269 17
–
–
–
–
886 40 886 41 886 42 886 43 887 18 887 19 886 46 886 47 886 48

Welding Flanges
DN
b

d
d1
b

b1
d2

b1
d

Dimensional drawing for the welding flanges

d1
d2
Steel 1.0831
Stainless steel 1.4301

ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.
Part No.

63
12
0.47
6
0.24
95
3.74
70
2.76
76.6
3.02
269 61
886 61

100
12
0.47
6
0.24
130
5.12
102
4.02
108.7
4.28
269 62
886 62

160
12
0.47
6
0.24
180
7.09
153
6.02
159.8
6.29
269 63
886 63

200
12
0.47
6
0.24
240
9.45
213
8.39
219.8
8.65
–
886 64

250
12
0.47
6
0.24
290
11.42
261
10.28
267.8
10.54
269 65
886 65

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.21

C13

Vacuum Fittings and Feedthroughs

(ISO-K) Clamp Flange Fittings and Components

Adaptors ISO-K – CF
DN 1

DN
Outside diameter
DN1
DN2

DN 2

h

h
DN

Stainless steel DIN 1.4301

Dimensional drawing for the adaptors ISO-K – CF

CF
in.
ISO-K
mm
in.
mm
in.
Part No.

63
4 1/2"
63
63
2.48
90
3.54
837 01

100
6"
100
100
3.94
90
3.54
837 02

160
8"
160
150
5.91
90
3.54
837 03

Adaptors-Reducers ISO-K – KF
DN
d

d

d1

s

DN1

t

d1

l

l

DN

Dimensional drawing for the adaptors-reducer ISO-K – KF;
left: aluminum; right: stainless steel

s
t
Weight
Stainless steel 1.4305
Aluminum 3.2315.71

ISO-K / KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
kg
lbs
Part No.
Part No.

63 / 40
95
3.74
70
2.76
40
1.57
5
0.2
4.5
0.16
0.5
1.1
887 40
269 40

63 / 50
95
3.74
70
2.76
45
1.77
5
0.2
4.5
0.16
0.6
1.32
887 41
269 41

100 / 40
130
5.12
102
4.02
40
1.57
5
0.2
4.5
0.16
0.8
1.77
887 42
–

Reducing Flanges (Stainless Steel 1.4301)
DN
b

ød1
ød2
b1

b
ød

b1

øk
ød3

d
d1

Dimensional drawing for the reducing flanges

d2
d3
k
Stainless steel

ISO-K
mm
in.
mm
in.
thread
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

160/63
22
0.87
12
0.47
M8
180
7.09
130
5.12
70
2.76
110
4.33
886 14

160/100
25
0.98
12
0.47
M8
180
7.09
165
6.50
102
4.02
145
5.71
886 15

200/100
20
0.79
12
0.47
M8
240
9.49
165
6.50
102
4.02
145
5.71
886 17

200/160
25
0.98
12
0.47
M 10
240
9.49
225
8.86
153
6.02
200
7.87
886 16

250/160
22
0.87
12
0.47
M 10
290
11.42
225
8.86
153
6.02
200
7.87
886 50

Reducers (Stainless Steel 1.4305)
DN
d

ød1

h

ød

Dimensional drawing for the reducers

d1
h
Stainless steel

ISO-K
mm
in.
mm
in.
mm
in.
Part No.

100/63
70
2.76
102
4.02
50
1.97
887 89

250/200
213
8.39
261
10.28
50
1.97
887 93

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.22

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

(ISO-K) Clamp Flange Fittings and Components

Vacuum Fittings and Feedthroughs

Elbows (Stainless Steel 1.4301); from DN 160 ISO-K Mitred Elbow
d1

DN
a

d1
a

a
a

a

d1
Weight

Dimensional drawing for the elbows (left) and mitred elbow (right)

Conductance
Stainless steel

ISO-K
mm
in.
mm
in.
kg
lbs
l/s
Part No.

63
88
3.46
70
2.76
1.1
2.43
208
887 25

100
108
4.25
102
4.02
2.2
4.8
470
887 26

160
138
5.43
153
6.02
5.9
13.02
1200
887 27

250
208
8.19
261
10.28
9.9
21.85
3700
887 28

ISO-K
mm
in.
mm
in.
mm
in.
kg
lbs
Part No.

63
88
3.46
176
6.93
70
2.76
1.6
3.53
887 35

100
108
4.25
216
8.50
102
4.02
3.2
7.06
887 36

160
138
5.43
276
10.87
153
6.02
7.6
16.78
887 37

250
208
8.19
416
16.38
261
10.28
17.0
37.53
887 38

ISO-K
mm
in.
mm
in.
mm
in.
Part No.

63
88
3.46
176
6.93
70
2.76
887 45

100
108
4.25
216
8.50
102
4.02
887 46

160
138
5.43
276
10.87
153
6.02
887 47

250
208
8.19
416
16.38
261
10.28
887 48

Tees (Stainless Steel 1.4301)
DN
a

b
d1

b

a

d1

a
Dimensional drawing for the tees

Weight
Stainless steel

4-Way Crosses (Stainless Steel 1.4301)
DN
a

b

b

d1

b

a
a

d1

Dimensional drawing for the 4-way crosses

Stainless steel

Branching Pieces with Lateral DN 16/25/40 KF Flanges (Stainless Steel 1.4301)
A

DN
a

View: A
Ansicht:
c1

c2

h
a

c
DN 40

Dimensional drawing for the branching pieces
with lateral DN 16/25/40 flanges

DN 25
DN 16

h
c
c1
c2
Stainless steel

ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

63
44
1.73
88
3.46
66
2.60
59
2.32
64
2.52
886 71

100
50
1.97
100
3.94
82
3.23
77
3.03
80
3.15
886 72

160
50
1.97
100
3.94
107
4.21
105
4.13
107
4.21
886 73

Can not be used with collar flanges ISO-F and DIN 2501

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.23

C13

Vacuum Fittings and Feedthroughs

(ISO-K) Clamp Flange Fittings and Components

Measurement Flanges
30

DN
a

d2

DN 16

ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
thread

b
ød

d1

d
d1
a

Dimensional drawing for the measurement flanges

63
52.3
2.06
30
1.18
130
5.12
70
2.76
M8
4
286 60
–
2 x 887 03
2 kits
–

d2
Number of threaded holes
Stainless steel 1.4301
Part No.
Aluminum 3.2315.62
Part No.
Recommended centering ring
Part No.
Required claws kits
Part No. 268 25
Required claws kits
Part No. 268 26

100
71.3
2.81
30
1.18
165
6.50
102
4.02
M8
8
286 61
272 61
2 x 887 04
4 kits
–

160
102.3
4.03
30
1.18
225
8.86
153
6.02
M 10
8
286 62
272 62
2 x 887 07
–
4 kits

Claws, complete for DN 16 KF are included

Bellows (Stainless Steel 1.4571) with Flanges (Stainless Steel 1.4391)
DN
d1
l

l
Weight

d1
Dimensional drawing for the bellows

Max. extension, axial
Compression
Tension
Max. bending angle
Laterial displacement
Stainless steel
1)

ISO-K
mm
in.
mm
in.
kg
lbs
mm
in.
mm
in.
mm
in.
Degress 1)
mm
in.
Part No.

63
70
2.76
132
5.20
1.0
2.21
40
1.57
20
0.79
20
0,79
± 30°
7
0.28
887 70

100
102
4.02
132
5.20
3.9
8.61
56
2.20
28
1.10
28
1.10
± 30°
9
0.35
887 71

160
153
6.02
150
5.91
6.2
13.69
44
1.73
22
0.87
22
0.87
± 14°
3.5
0.14
887 72

250
261
10.78
200
7.87
9.3
20.53
60
2.36
30
1.18
30
1.18
± 13°
4.5
0.18
887 68

When utilizing the maximum bend, no extension along the axial axis will be possible !

Flexible Vacuum Hoses (Stainless Steel 1.4571) with Flanges (Stainless Steel 1.4301)
DN
d1
l

d1

Dimensional drawing for the flexible vacuum hoses

ISO-K
mm
in.
mm
in.

l
Max. bending radius
with multiple bending
with single bend
Stainless steel

mm
in.
mm
in.
Part No.

63
70
2.76
250
9.84

63
70
2.76
500
19.69

63
70
2.76
750
29.53

63
70
2.76
1000
39.37

100
102
2.76
250
9.84

100
102
4.02
500
19.69

100
102
4.02
750
29.53

100
102
4.02
1000
39.37

250
250
250
250
370
370
370
370
9.84
9.84
9.84
9.84 14.57 14.57 14.57 14.57
160
160
160
160
240
240
240
240
8.30
8.30
8.30
8.30
9.45
9.45
9.45
9.45
868 37 867 97 868 34 868 07 868 38 867 98 868 35 868 08

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.24

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

(ISO-K) Clamp Flange Fittings and Components

Vacuum Fittings and Feedthroughs

Flexible Compensation Elements (CR)
DN
D
d1

D

d

ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

d
d1

b
Dimensional drawing for the flexible compensation elements

b
CR
1)

63
120
4.72
75
2.95
85
3.35
70
2.76
272 23 1)

100
150
5.91
106
4.17
116
4.57
72
2.83
272 24 1)

160
200
7.87
155
6.10
165
6.50
72
2.83
272 25 1)

100
102
4.02
107
4.21
130
5.12
56
2.20
272 36

160
150
5.91
156
6.14
180
7.09
56
2.20
272 37

Is supplied complete with stainless steel hose clamps

Connections for Flexible Compensation Elements (Aluminum 3.2315.71)
DN
d

l

d2

d

ISO-K
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

d1

d1

d2
Dimensional drawing for the connections for flexible compensation elements

l
Aluminum

63
70
2.76
76
2.99
95
3.74
51
2.01
272 35

Spare O-Ring Gaskets for Clamp Flange Fittings
DN
d
s
d

Dimensional drawing for the spare O-ring for clamp flange fittings

ISO-K
63
100
160
200
250
320
400
500
630
800
1000
mm
75
107
158
208
253
329
405
506
658
808
1006
in.
2.95
4.21
6.22
8.19
9.96 12.95 15.94 19.92 25.90 31.80 39.61
s
mm
5
5
5
5
5
7
7
7
7
7
7
in.
0.20
0.20
0.20
0.20
0.20
0.28
0.28
0.28
0.28
0.28
0.28
Quantity per set
5
5
5
5
5
1
1
1
1
1
1
FPM Part No. 210 635 210 645 210 650 210 655 210 660 210 665 210 670 210 675 210 680 210 685 210 690

Bolts for Clamp Flange Fittings (Steel 8.8, zinc coated)
l

d
Dimensional drawing for the bolts for clamp flange fittings

DN
Dimensions
d
l
Quantity per set
Bolts
Nuts
Washers
Set

ISO-K

63 - 100

160 - 250

320 - 500

630

thread
mm
in.

M8
40
1.57

M 10
50
1.97

M 12
70
2.76

M 12
80
3.15

8
8
8
887 81

12
12
12
887 82

16
16
16
887 83

20
20
20
887 84

Part No.

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.25

C13

Vacuum Fittings and Feedthroughs

ISO-F and DIN 2501 Fixed Flange Fittings

ISO-F and DIN 2501 Fixed Flange Fittings, ND 6
Note: ND 6 states a dimension and does not refer to an operating pressure of 6 bar!
In addition to clamp flange connections, fixed
welded flanges (ISO-F or to DIN 2501) are used
in the area of vacuum engineering to interconnect
valves, pumps and other components.

Mating clamp flanges with tubulation
using collar rings and sealing disk

Advantages to the User
ISO-K

◆ A high vacuum seal is maintained also at large
nominal width and high mechanical loads

DIN 2501

ISO-K

◆ Evenly distributed sealing force through a
large number of bolts
ISO-F

◆ Can be easily adapted to other flange systems
◆ Vacuum sealing disks consist of a CR O-ring
seal with inner and outer aluminum ring
ISO-K

◆ Fixed flanges and collar flanges may also be
constructed as all-metal seals by using ultra
sealing disks

DIN 28 404 (ISO-F)
ISO-K

Mating clamp flanges using bolted collar rings and
ultra sealing disk

C ollar Flange

Steel

Stainless Steel

Bolts and nuts

Galvanized 8.8 steel

1.4401

Retaining ring

Steel

1.4310

Comparison: Clamp flange with collar flange to DIN 2501
and clamp flange with collar flange to DIN 28 404; ISO-F

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.26

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

ISO-F Fixed Flange Fittings

Vacuum Fittings and Feedthroughs

ISO-F Collar Flanges with Retaining Ring for use with Clamp Flange Fittings (Steel 1.0037)
DN
d1

k
d2

d2

b
d1

k
Dimensional drawing for collar flanges with retaining ring

b

ISO-F
mm
in.
mm
in.
mm
in.
mm
in.

Nickel-plated steel
Part No.

63
130
5.12
95.6
3.76
110
4.93
12
0.47

100
165
6.50
130.6
5.14
145
5.71
12
0.47

160
225
8.86
180.9
7.12
200
7.87
16
0.63

200
285
11.22
240.9
9.48
260
10.24
16
0.63

250
335
13.19
290.9
11.45
310
12.20
16
0.63

320
425
16.73
370.8
14.60
395
15.51
20
0.79

400
510
20.08
451
17.76
480
18.90
20
0.79

500
610
24.02
551
21.69
580
22.83
20
0.79

630
750
29.53
691
27.2
720
28.35
24
0.79

267 67

267 70

267 71

267 68

267 72

267 76

267 74

267 75

267 77

Vacuum Sealing Disks for ISO-F Flanges (Aluminum/CR)
DN
d

d
b

d1

d1
b

Dimensional drawing for vacuum sealing disks

AI/CR

ISO-F
mm
in.
mm
in.
mm
in.
Part No.

63
98
3.86
73
2.87
4
0.16
171 09

100
132
5.20
107
4.21
4
0.16
171 10

160
185
7.28
160
6.3
4
0.16
171 11

250
295
11.61
270
10.63
4
0.16
171 12

320
375
14.76
330
12.99
6
0.24
171 19

400
460
18.11
415
16.34
6
0.24
171 14

500
560
22.05
515
20.28
6
0.24
171 15

630
701
27.60
656
25.83
6
0.24
171 16

800
870
34.25
825
32.48
6
0.24
171 17

1000
1070
42.13
1025
40.35
6
0.24
171 18

800
820
32.28
8
0.31
1

1000
1023
40.28
8
0.31
1

Spare O-Ring Gaskets ISO-F Flange Connection
DN
d

ISO-F
63
mm
80
in.
3.15
s
mm
5
in.
0.20
Quantity per set
5
CR Part No. 210 701

s
d
Dimensional drawing for O-rings

100
110
4.33
5
0.20
5

160
165
6.50
5
0.20
5

250
265
10.43
5
0.20
5

320
325
12.75
8
0.31
1

400
412
16.22
8
0.31
1

500
510
20.08
8
0.31
1

630
640
25.20
8
0.31
1

210 711

210 716

210721

210 726

210 731

210 736

210 741

210 746 210 751

Ultra Sealing Disks (Aluminum 3.2315.71) for ISO-F Flanges
DN
b
b1

d1

d

b

b1

d
d1

Dimensional drawing for the ultra sealing disks for ISO-F flanges

Aluminum

ISO-K / ISO-F
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

63
4.5
0.18
2.6
0.10
69.8
2.75
85.6
3.37
886 24

100
4.5
0.18
2.6
0.10
101.8
4.01
116.6
4.59
886 25

160
4.5
0.18
2.6
0.10
152.8
6.02
166.6
6.56
886 26

250
4.5
0.18
2.6
0.10
260.8
10.27
276.6
10.89
886 27

Bolts for ISO-F Flange Connection (Steel 8.8, zinc coated)
l

d
Dimensional drawing for the bolts for ISO-F flange fconnections

DN
Dimensions
d
l
Quantity per set
Bolts
Nuts
Washers
Set

ISO-K

63 - 100

160 - 250

320 - 500

630

thread
mm
in.

M8
40
1.57

M 10
50
1.97

M 12
70
2.76

M 12
80
3.15

8
8
8
887 81

12
12
12
887 82

16
16
16
887 83

20
20
20
887 84

Part No.

Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.27

C13

DIN 2501 Fixed Flange Fittings

Vacuum Fittings and Feedthroughs

Bolts, Nuts and Washers for Joints with VAT Gate Valves

s

DN
Dimensions (d x l)
s
Quantity per set
Set screws
Nuts
Washers
Set

l

d

mm (in.)
mm (in.)

40 CF
M 6 x 35 (1.38)
3 (0.12)

63-100 ISO-F / 63-200 CF
M 8 x 45 (1.77)
4 (0.16)

160-250 ISO-F
M 10 x 55 (2.17)
6 (0.24)

Part No.

6
6
6
839 11

16
16
16
839 13

12
12
12
210 071

Dimensional drawing for the set screws, nuts and washers

DIN 2501 Fixed Flange Fittings; Dimensions to DIN 2501, ND 6
Note: ND 6 states a dimension and does not refer to an operating pressure of 6 bar!
Collar Flanges with Retaining Ring (Steel 1.0037)
DN
d1

k
d2
b

d2

d1

k
Dimensional drawing for collar flanges with retaining ring

b

DIN
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

63
160
6.30
95.6
3.76
130
5.12
12
0.47
267 47

100
210
8.27
130.6
5.14
170
6.69
15
0.59
267 50

160
265
10.43
180.9
7.12
225
8.86
15
0.59
267 51

250
375
14.76
290.9
11.45
335
13.19
15
0.59
267 52

Spare O-Ring Gaskets for Vacuum Sealing Disks DIN 2501
DN
d
s

s
d

Dimensional drawing for O-ring gaskets

Quantity per set
CR

DIN
mm
in.
mm
in.

63
80
3.15
5
0.20
5
210 701

Part No.

100
110
4.23
5
0.20
5
210 711

160
165
6.50
5
0.20
5
210 716

Bolts and Nuts for DIN Collar Flange
DN
Dimensions
d
l

Dimensional drawing for bolts and nuts

DIN
thread
mm
in.

Number of bolts/nuts required
1 bolt (galvanized 8.8 steel) Part No.
1 nut (galvanized 8.8 steel) Part No.

63

100

160

250

M 12
40
1.57
4
201 02 381
211 01 115

M 16
50
1.97
8
201 02 434
211 01 117

M 16
50
1.97
8
201 02 434
211 01 117

M 15
50
3.15
12
201 02 434
211 01 117

For sealing ISO-K flanges see the centering rings described in the section “(ISO-K) Clamp
Flange Fittings and Components”.
Important: In the table of Section “General” the German designation for the type of steel is also stated in accordance with AISI.

C13.28

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Greases

Vacuum Fittings and Feedthroughs

Vacuum Greases
Ramsay greases for lubricating ground joints
and drain valve in fore-vacuum lines consist of
special grades of paraffin jelly to which caoutchouc is added for attaining the specific consistence.
Ramsay grease, thick is used to lubricate
ground joints. Usable down to 10-2 mbar
(0.75 x 10-2 Torr).
Ramsay grease, soft is used to lubricate drain
valves. Usable down to 10-2 mbar (0.75 x
10-2 Torr).

Gleitlen is a special grease used to lubricate
stirrer shafts (KPG stirrers, among others) of all
sizes in the laboratory. Usable down to 10-2 mbar
(0.75 x 10-2 Torr).

Silicone high-vacuum grease Dow Corning contains compounds of a high molecular weight
together with chain elements containing silicon
and oxygen.
At temperatures over 220 °C (428 °F) the silicone
grease will polymerise giving off gas. It may be
used within a wide temperature range (from
-40 °C to 200 °C (-40 °F to 392 °F)) and in all
applications from atmospheric pressure down to
10-6 mbar (0.75 x 10-6 Torr).

Lithelen contains lithium compounds, and all
components contributing to higher vapor pressures have been removed through high-vacuum
pre-processing. It may be used within a wide
temperature range (from 0 °C to 150 °C (32 °F to
302 °F)) and in all applications from atmospheric
pressure down to 10-8 mbar (0.75 x 10-8 Torr).

DYNAFAT is used to lubricate gaskets.

For all lubricants in our line of products you may obtain Safety Data Sheets from the Dept. Technical Support in Cologne.

Overview Sealing Greases
Ramsay
Application Data grease,
thick
Purpose

Technical Data
Vapor pressure at 20 °C (68 °F) mbar

Ramsay
grease, soft

Gleitlen

LITHELEN

Greasing of ground joints
and drain valves, usable
down to pressures of
10-2 mbar
(0.75 x 10-2 Torr)

Greasing of ground joints
and drain valves, usable
down to pressures of
10-2 mbar
(0.75 x 10-2 Torr)

Lubrication of
stirrer shafts
(KPG stirrers)

Greasing of ground
joints and drain valves at low pressures
and high working
temperatures

Ramsay
grease, thick

Ramsay
grease, soft

Gleitlen

LITHELEN

10-4 (0.75 x 10-4 Torr)

10-4 (0.75 x 10-4 Torr)

10-4 (0.75 x 10-4 Torr) 10-10 (0.75 x 10-10 Torr)

Silicone high- DYNAFAT
vacuum grease
Greasing of ground
joints and drain valves at low pressures
and high working
temperatures

Lubrication of
gaskets

Silicone high- DYNAFAT
vacuum grease
10-7 (0.75 x 10-7 Torr)

10-3 (0.75 x 10-3 Torr)

Dripping point

°C (°F)

> 56 (> 133)

> 56 (> 133)

> 50 (> 122)

> 210 (> 410)

1)

148 (298)

Max. working temperature

°C (°F)

30 (86)

30 (86)

30 (86)

150 (302)

200 (392)

110 (230)

Ramsay
grease, thick

Ramsay
grease, soft

Part No. 177 32

Part No. 177 42

Part No. 176 38

–

–

–

Tube 050 g (0.11 lbs)

–

–

–

Part No. 176 44

Part No. 210 502

–

Tube 100 g (0.22 lbs)

–

–

–

–

–

Part No. 210 500

Ordering
Information
Tin 50 g (0.11 lbs)

1)

Gleitlen

LITHELEN

Silicone high- DYNAFAT
vacuum grease

over 220 °C (428 °F) polymerisation

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.29

C13

Vacuum Fittings and Feedthroughs

Observation Windows

Observation Windows for Vacuum Systems

Observation of the phenomena in the vacuum
chamber is very important for many vacuum processes. Measurements and monitoring can often
be accomplished only by means of external
instruments used under normal atmospheric
pressure conditions.

DN 40
112°

DN 50
123°

DN 63

This calls for highly transparent, rugged observation windows featuring a wide angle view.

66°

Advantages to the User

DN 100

◆ Flat design
86°

◆ Easy to fit and remove
◆ Easy to clean
◆ Wide viewing angle

DN 160

◆ Can be baked out up to 150 °C (302 °F)
◆ May be combined with KF and ISO-K
components

108°

◆ No special mounting components are required
◆ The FPM O-ring seals against the atmosphere
(integrated centering ring)
◆ Each observation window is subjected to a
leak test (thereby ensuring safe operation!)

C13.30

Mounting: Place the window in the flange and evenly press the O-ring into
its groove.
Dismounting: Hold the observation window with the window showing to
the bottom. Use both thumbs to press the window out of the flange ring.

Viewing angle into vacuum chamber through observation window
DN 40 KF - DN 160 ISO-K (mounting on matching flanges with tubulation)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Observation Windows

Vacuum Fittings and Feedthroughs

160 ISO-K
100 ISO-K
63 ISO-K

1

50 KF
40 KF

2
ød

ød

ød

ød

ød

3
b

b
b

1 O-ring
2 Glass
3 Flange

b

KF and ISO-K observation windows, fully installed

b

Window dimensions for the observation windows

100
(%)

Transmission

80

DN 40-100

70

DN 160

60
50
40
30
20
10
0

100

300

500

700

900

1100

1300

(nm)

1700

Wavelength
Wellenlänge

Transmittance as a function of the wavelength for LEYBOLD viewports DN 40 KF to DN 160 ISO-K for different window thicknesses

Technical D ata
DN
Thickness of glass window

40 KF
mm
4
in.
0.16
Diameter of glass window
mm
44
in.
1.73
b
mm
10
in.
0.39
d
mm
40
in.
1.57
Viewing angle
°
112
The glass used is a borosilicate glass (BOROFLOAT® 33) with a refractive index of n = 1.472
Dielectric number (at 25 °C (77 °F))
4.8 at 1 MHz
Flange material
Stainless steel 1.4301
Glass material
Borosilicate
O-ring material
FPM

50 KF
4
0.16
54
2.13
10
0.39
50
1.97
123

63 ISO-K
4
0.16
75
2.95
13.5
0.53
70
2.76
66

100 ISO-K
5
0.20
109
4.29
13
0.51
102
4.02
86

160 ISO-K
9
0.35
160
6.30
17
0.67
153
6.02
108

50 KF
210 132

63 ISO-K
210 133

100 ISO-K
210 134

160 ISO-K
210 135

C13

Ordering Information
DN
Part No.

40 KF
210 131

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.31

Vacuum Fittings and Feedthroughs

Feedthroughs

Electrical Feedthroughs
General

Important

Electrical feedthroughs for vacuum applications,
as well as their corresponding connectors, comply with the German VDE Regulations 0100, 0660
and 0110, Section 1. The latter refers to air gaps
and leakage paths.

The special regional safety regulations must be
observed! These may differ from the regulations
which apply in Germany! The voltages stated on
the following pages apply to atmospheric pressure and the right connector from LEYBOLD. The
voltage specifications apply also to that part of
the feedthrough which is exposed to the vacuum,
provided the pressure in these areas is less than
10-1 mbar (0.75 x 10-1 Torr).

◆ All current feedthroughs are tested according
to VDE Regulations

At pressures over 10-1 mbar (0.75 x 10-1 Torr)
voltage breakdowns may occur depending on the
distance between the electrodes, the type of
rarefied gas, the type of contamination, the distribution of the electric field, etc.

Abbreviations used in connection with feedthroughs:
F Feedthrough
E Electric
L Liquid
N Normal
P Precision
F Frequency
HC Current
HV Voltage
L Linear
R Rotary

Operators are advised to check each application
individually or to get in touch with LEYBOLD for
advice.
In applications where VDE regulations need not
be applied, higher operating voltages are permissible. Please contact us for further information
regarding your particular application.
The test and operating voltages refer to a vacuum
pressure of < 1 x 10-4 mbar (< 0.75 x 10-4 mbar)
and when using the connectors recommended by
LEYBOLD. Electrical power may only be applied
via the external plugs.

C13.32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Feedthroughs

Vacuum Fittings and Feedthroughs

Electrical Feedthroughs
Technical Data

FE 16 / 9S

FE 16 / 9

Vacuum connection

DN 16 ISO-KF

Number of feedthroughs

9

Voltage per pole 1)

V

50

Current per pole 1)

A

2

Connection
Vacuum side
Air side

solder connection

connector
connector

Diameter of connecting wire

mm (in.)

1.2 (0.05)

V / Hz

500 / 50

Test voltage
Tigthness

1 x 10-9

mbar x l x s-1

Pressure (absolute) 2)

1 x 10-8 to 2.5 (0.75 x 10-8 to 1.9)

mbar (Torr)

Bakeout temperature (feedthrough, connector)

°C (°F)

130 (266)

Housing

nickel-plated brass

Insulator

PEEK / Araldit

Seal

FPM

Contact (feedthrough, connector)

gold-plated brass

Ordering Information

FE 16 / 9S

FE 16 / 9

Electrical Feedthroughs

Part No. 210 302

Connector: vacuum side

–

Part No. 210 305

Part No. 210 303

Part No. 210 303

Connector: air side
1)
2)

Part No. 210 304

Local regulations concerning use must be followed
Pressure max. 10 bar (7.5 Torr) with external centering ring

ød1

ød4

ød2

ød2

ød3
ød1

b1

ød3
b1
b2

b

b2

b

b2

C13

ød
ød

ød5

mm
in.

d

d1

d2

d3

d4

d5

b

b1

b2

16
0.63

14
0.55

1.2
0.05

0.8
0.03

15
0.59

8.7
0.34

23.2
0.91

6.8
0.27

50
1.97

Dimensional drawing for the feedthrough FE 16/9S (left) and the connector
for air side (right)

ød2
mm
in.

d

d1

d2

d3

b

b1

b2

16
0.63

14
0.55

8.7
0.34

15
0.59

40
1.57

5.5
0.22

50
1.97

ød3

Dimensional drawing for the feedthrough FE 16/9 (left), the connector for vacuum side (middle) and the connector for air side (right)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.33

Feedthroughs

Vacuum Fittings and Feedthroughs

ød2

Screw off tube

ød1

ød2

ød3

l2

ød

l1
l

l

l2

l4

l3

l1

ød

ød1

mm
in.

ød3

ød2

d

d1

d2

l

l1

l2

1.6
0.06

11.2
0.44

35
1.38

75
2.92

45
1.77

113
4.45

mm
in.

Dimensional drawing for the feedthrough FE 40/7S (left) and
the connector for air side (right)

d

d1

d2

d3

l

l1

l2

l3

l4

40
1.57

39
1.54

35
1.38

11.2
0.44

92
3.62

19
0.75

5.5
0.22

110
4.33

113
4.45

Dimensional drawing for the feedthrough FE 40/7 (left), the connector for vacuum side (middle) and the connector for air side (right)

ød1
M4

l1

l2
l

ød

mm
in.

d

d1

l

l1

l2

22.7
0.89

34
1.34

76.1
3.00

38.1
1.50

135
5.31

Dimensional drawing for the feedthrough FEHV 40/1 (left) and
the connector for air side (right)

Technical Data

FE 40 / 7S

FE 40 / 7

Vacuum connection

FEHV 40 / 1

DN 40 ISO-KF

Number of feedthroughs

7

1

Voltage per pole 1)

V

380

6000

Current per pole 1)

A

16

25

Connection
Vacuum side
Air side

solder connection
connector

Diameter of connecting wire

mm (in.)

Test voltage
Tigthness

connector
connector
l 1.6 (l 0.06)

kV / Hz

15 / 50
1 x 10-9

Pressure (absolute) 2)
Bakeout temperature (feedthrough, connector)

l 5 (l 0.2)

–

mbar x l x s-1

screw coupling
connector

1 x 10-8 mbar x l x s-1 to 2.5 bar (1.9 Torr)
°C (°F)

130 (266)

Housing

chrom-plated steel

Insulator

PTFE / Araldit

Seal

FPM

Contact (feedthrough, connector)

gold-plated stainless steel

gold-plated stainless steel

nickel-plated brass

FE 40 / 7S

FE 40 / 7

FEHV 40 / 1

Electrical Feedthroughs

Part No. 210 325

Part No. 210 326

Part No. 210 350

Connector: vacuum side

–

Part No. 210 328

–

Part No. 210 327

Part No. 210 327

Part No. 210 351

Ordering Information

Connector: air side
1)
2)

Local regulations concerning use must be followed
Pressure max. 10 bar (7.5 Torr) with external centering ring

C13.34

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Feedthroughs

Vacuum Fittings and Feedthroughs

High Current Feedthroughs
Selection of electrodes

mm
in.

Slide into mounted feedthrough

d

h

32.5
1.28

3 - 30
0.12 - 1.18

ød

Current connection with water cooling

h

Technical Data

FEHC 40/1

Vacuum connection

DN 40 ISO-KF

Number of feedthroughs

1

Voltage

V

50

Current, with water cooling

A

5000

mbar x l x s-1

Tigthness

1 x 10-9
1 x 10-8 mbar to 2.5 bar (max. 10 bar with external centering ring)

Pressure (absolute)
Bakeout temperature

°C (°F)

110 (230)

Housing

aluminium

Insulator

thermoplast

Seal

FPM

FEHC 40/1

Ordering Information
High Current Feedthroughs

Part No. 210 352

Current connection with water cooling

Part No. 210 356

Straight electrode

Part No. 210 353

Angle electrode

Part No. 210 354

T-electrode

Part No. 210 355

ød

l1

ød

l2

l3

l2

l

Feedthrough

b

ød1

ød1

ød

ød

a

b1

ød1

ød

C13

l1

l3

l
b
ød
a

mm
in.

Current connection

a

b

d

l

l1

l2

l3

32.5
1.28

18
0.71

G 3/8“
G 3/8“

90
3.54

73
2.87

110
4.33

41
1.61

Dimensional drawing for the feedthrough FEHC 40/1 (left) and
current connection with water cooling (right)

Straight electrode

mm
in.

angle electrode

a

b

b1

d

d1

l

l1

l2

l3

28
1.10

50
1.97

145
5.71

20
0.79

16
0.63

300
11.8

175
6.89

290
11.42

295
11.61

T-electrode

Dimensional drawings for the copper electrodes for the feedthrough FEHC 40/1

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.35

Feedthroughs

Vacuum Fittings and Feedthroughs

Rotary Feedthroughs
ISO-KF
For transmitting high torque
With FPM shaft seal and ball bearings

Technical Data

FR 25/50 N

Vacuum connection

FR 63/100 N

DN 25 ISO-KF

DN 63 ISO-KF

Feedthrough / seal

FPM

Shaft connection

mm (in.)

l 8 (0.31)

l 20 (0.79)

Transferable torque

Nm

6

100

Rotational speed 1)

1/min

1000

500

N
N

150
50

500
100

Shaft load
Radial
Axial
Service life (revolutions)

20 000 000

10 000 000

mbar x l x s-1

Tightness, static

1 x 10-9
1 x 10-9 mbar to 1 bar

Pressure (absolute)
Operating temperature, max.

°C (°F)

50 (122)

Bakeout temperature

°C (°F)

110 (230)

Materials exposed to process media

stainless steel, aluminum, FPM

Weight

kg (lbs)

Ordering Information
Rotary Feedthrough
1)
2)

0.2 (0.44)

2 (4.42)

FR 25/50 N

FR 63/100 N

Part No. 210 151

Part No. 210 153 2)

When a reduced service life is acceptable, the rotational speed can be increased by up to a factor of two
Centering ring
CR/aluminum Part No. 268 05
FPM/stainless steel Part No. 887 03

ød
b
a

l2

ød1

l3
l2

ød2

ød2

l3

l

l
l1

l1
ød1

l2
ød1

a

l2

ød
ød
b
mm
in.

d

d1

7 28 g6 8 g6
0.28 1.10 g6 0.31 g6

d2

l

l1

l2

l3

23
0.91

105
4.13

37
1.46

20
0.79

41.5
1.64

Dimensional drawing for the feedthrough FR 25/50 N

C13.36

mm
in.

a

d

d1

d2

l

l1

l2

l3

6 h9 x 32
0.24 h9 x 1.26

20 g6
0.79 g6

66 g6
2.60 g6

60
2.36

230
9.06

68
2.68

50
1.97

100
3.94

Dimensional drawing for the feedthrough FR 63/100 N

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Feedthroughs

Vacuum Fittings and Feedthroughs

Rotary / Linear Motion Feedthroughs
Two FPM shaft seals
Direct push/pull and rotary actuation
With locking ring and optional anti-rotation
device

Technical Data

FNRL 16/50

FNRL 25/100

Vacuum connection

DN 16 ISO-KF

DN 25 ISO-KF

Feedthrough / seal

FPM

FPM

Shaft connection

mm (in.)

M 3 x 6 / l 5 (0.2)

M 4 x 8 / l 8 (0.31)

Stroke

mm (in.)

50 (1.97)

100 (3.94)

10
2

15
8

Shaft load
Radial, at. max. displacement
Torsion

N
Nm
mbar x l x s-1

Tightness, static

1 x 10-9
1 x 10-8 mbar to 1 bar

Operating pressure range (absolute)
Operating temperature, max.

°C (°F)

50 (122)

Bakeout temperature

°C (°F)

110 (230)

Materials exposed to process media

stainless steel, aluminum, FPM

Weight

kg (lbs)

Ordering Information

0.1 (0.22)

0.2 (0.44)

FNRL 16/50

FNRL 25/100

Rotary / linear feedthrough

Part No. 210 200

Part No. 210 201

Anti-rotation device

Part No. 210 225

Part No. 210 226

C13

l8 = l1 from FNRL 16/50 FNRL 25/100
Anti-rotation device
Part No. 210 225

M3
l7
l6

l5

50
1.97

–
–

mm
in.

–
–

100
3.94

ød2

A

l1

ød 3
ød1

l3

l

Part No. 210 226

mm
in.

l2

ød
ød

l4
ød4

Dimensional drawing for the feedthroughs FNRL

l8
Detail A

DN 16 ISO-KF

DN

d

d1

d2

d3

d4

FNRL 16/50
mm

16

20 g6

15

15

5

in.

0.63

0.79 g6

0.59

0.59

0.20

FNRL 25/100
mm

25

25 g6

23

22

8

in.

0.98

0.98 g6

0.91

0.87

0.31

-0.03
-0.05

-0.03
-0.05

l

32

134

1.26

5.28

50

210

1.97

8.27

l1 max

l2

l3

l4

l5

l6

l7

FNRL 16/50
mm
in.

50
1.97

44
1.73

14
0.55

20
0.79

10.5
0.41

8
0.31

7
0.28

FNRL 25/100
mm
in.

100
3.94

58
2.28

24
0.94

32
1.26

11
0.43

9
0.35

8
0.31

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Dimensional drawing for the anti-rotation device

C13.37

Vacuum Fittings and Feedthroughs

Feedthroughs

Liquid Feedthroughs
For H2O and LN2
Thermically insulated
Especially suited for very hot and very cold
applications

Technical Data

FL 40K/2

Vacuum connection

DN 40 ISO-KF

Feedthrough / seal

welded

Connection

mm (in.)

l 8 x 1 (0.31 x =.04)
2

Number of tubes
mbar x l x s-1

Tightness

1 x 10-9
1 x 10-9 mbar to 2.5 bar (0.75 x 10-9 Torr to 1.9 Torr) [max. 10 bar (max. 7.5 Torr) with external centering ring]

Pressure (absolute)
Temperature range

°C (°F)

Material

-200 to +150 (-328 to +302)
stainless steel

Weight

kg (lbs)

Ordering Information
Liquid feedthrough

0.3 (0.66)

FL 40K/2
Part No. 210 275

b

ød
b1

ød1

l2

l1
l

mm
in.

b

b1

d

d1

l

l1

l2

20
0.79

1
0.04

40
1.57

8
0.31

200
7.87

40
1.57

57
2.24

Dimensional drawing for the liquid feedthrough FL 40K/2

C13.38

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

ISO-KF Flange Fittings and Components

Vacuum Fittings and Feedthroughs

Version for the North and South American Continents
KF Flanges with Short Weld Stub, Standard-Inch Diameters
DN
∅A

A
B

B
C

Dimensional drawing for the KF flanges with short weld stub

C
Tube fitting O. D. size
Stainless steel

KF
mm
in.
mm
in.
mm
in.

16
19
0.75
1.7
0.065
12.7
0.50
3/4 "
899 611

25
25.4
1.00
1.7
0.065
12.7
0.50
1"
899 612

40
38.1
1.50
2.1
0.083
19.0
0.75
1 1/2 "
899 614

50
50.8
2.00
2.1
0.083
19.0
0.75
2"
899 615

Part No.

16
19
0.75
1.7
0.065
40.0
1.575
3/4 "
899 621

25
25.4
1.00
1.7
0.065
40.0
1.575
1"
899 622

40
38.1
1.50
2.1
0.083
40.0
1.575
1 1/2 "
899 624

50
50.8
2.00
2.1
0.083
40.0
1.575
2"
899 625

KF
mm
in.
mm
in.
mm
in.
Part No.

16
16
0.630
20
0.787
16
0.630
884 21

25
25
0.984
28
1.102
19
0.750
884 22

40
40
1.575
45
1.772
25
0.984
884 23

50
50
1.968
55
1.165
25
0.984
883 85

Part No.

KF Flanges with Long Weld Stub, Standard-Inch Diameters
DN
∅A

A
B

B
C
C

Tube fitting O. D. size
Stainless steel

KF
mm
in.
mm
in.
mm
in.

Dimensional drawing for the KF flanges with long weld stub

KF Flanges with Weld Stub, Metric Diameters
DN
∅A

B
A

∅B
C

C
Stainless steel

Dimensional drawing for the KF flanges with weld stub

KF Flanges with Weld Neck, Metric Diameters
DN
∅A

B
A

∅B

C

C
Stainless steel

KF
mm
in.
mm
in.
mm
in.
Part No.

16
16
0.630
20
0.787
57
2.250
884 31

25
25
0.984
28
1.102
57
2.250
884 32

40
40
1.575
45
1.772
57
2.250
884 33

Dimensional drawing for the KF flanges with weld neck

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13.39

C13

Vacuum Fittings and Feedthroughs

ISO-KF Flange Fittings and Components

Version for the North and South American Continents
Flanges with Welded Socket
A

B

DN
∅A
B

Dimensional drawing for the flanges with welded sockets

Tube fitting O. D. size
Stainless steel

KF
mm
in.
mm
in.
Part No.

16
17.3
0.68
3.0
0.12
3/4 "
899 631

25
26.2
1.03
3.0
0.12
1"
899 632

40
41.1
1.62
3.0
0.12
1 1/2 "
899 634

50
52.1
2.05
3.0
0.12
2"
899 635

KF Flanges for Tube Fittings, Male
DN
∅A

A

B

B
C

C

Dimensional drawing for the KF flanges for tube fittings, male

Tube fitting I. D. size
Stainless steel

KF
mm
in.
mm
in.
mm
in.
Part No.

16
19.0
0.750
17.5
0.688
29.0
1.125
3/4 "
910280119

25
29.0
1.125
29.0
1.125
35.0
1.375
1 1/8 "
910280120

40
44.5
1.750
29.0
1.125
46.0
1.812
1 3/4 "
910280126

40
41.0
1.625
29.0
1.125
46.0
1.812
1 5/8 "
910280121

16
19.0
0.754
22.0
0.875
25.4
1.000
13.0
0.500
3/4 "
910280122

25
29.0
1.130
32.0
1.250
35.0
1.375
17.0
0.672
1 1/8 "
910280123

40
54.0
2.130
57.0
2.240
35.0
1.375
16.0
0.625
2 1/8 "
910280124

40
41.0
1.630
44.5
1.750
35.0
1.375
19.0
0.750
1 5/8 "
910280125

KF Flanges for Tube Fittings, Female
DN
∅A

B
A

∅B

D
C

C
D
Dimensional drawing for the KF flanges for tube fittings, female

Tube fitting O. D. size
Stainless steel

KF
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

KF Nipple, American Standard
A
B
C

DN
∅A
∅B
∅C

D

D
E

E
Dimensional drawing for the KF nipple

C13.40

Tubing size
Aluminum

KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
Part No.

16
9.5
0.375
7.6
0.300
5.6
0.219
40
1.575
12.7
0.500
1/4 "
899 674

16
16.1
0.635
14.3
0.563
11.9
0.469
40
1.575
12.7
0.500
1/2 "
899 675

25
16.1
0.635
14.3
0.563
11.9
0.469
40
1.575
12.7
0.500
1/2 "
899 676

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Adaptors

Vacuum Fittings and Feedthroughs

Version for the North and South American Continents
Hose Adapter
DN
∅A

C
B
A

KF
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.

∅B
∅C

D
E

D
E

Dimensional drawing for the hose adaptors

Nominal I. D. hose
Stainless steel

Part No.

16
16
0.625
19.5
0.770
20
0.787
29
1.125
13
0.500
3/4"
992780668

25
21
0.813
26
1.020
28
1.102
29
1.125
13
0.500
1"
992780670

40
32
1.250
39
1.540
45
1.772
29
1.125
13
0.500
1 1/2"
992780672

16
16
0.620
10
0.394
25.4
1.000
1/8"
899 604
1/4"
899 643

25
25
0.995
10
0.394
25.4
1.000
1/8"
899 605
1/4"
899 644

40
38
1.500
10
0.394
25.4
1.000
1/8"
899 606
1/4"
899 645

KF/NPT Female Adapter
DN
∅A

A
B

KF
mm
in.
mm
in.
mm
in.

B

C

C
Pipe size NPT
Stainless steel
Pipe size NPT
Stainless steel

Dimensional drawing for the KF/NPT female adaptors

Part No.
Part No.

KF/NPT Male Adapter
DN
∅A

A
B

B
C

Dimensional drawing for the KF/NPT male adaptors

C
Pipe size NPT
Carbon steel
Stainless steel

KF
mm
in.
mm
in.
mm
in.
Part No.
Part No.

16
9.5
0.375
10.0
0.402
38.0
1.500
1/4"

25
16.0
0.625
13.5
0.534
46.0
1.813
1/2"

992780678 992780679

899 601

899 602

25
23.8
0.937
17.0
0.683
63.5
2.500
1"

40
25.4
1.000
17.0
0.683
50.8
2.000
1"

40
31.8
1.250
18.0
0.707
63.5
2.500
1 1/4"

40
38.1
1.500
18.4
0.724
63.5
2.500
1 1/2"

–

992780680

–

–

899 626

899 603

899 627

899 628

40
38.2
1.503
19.2
0.757
63.5
2.500
2"
899 619
899 629

KF/Metric Adapter
C

DN
A

B

B
A

∅ D /thread)

Dimensional drawing for the KF/metric adaptors

Carbon steel

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

KF
mm
in.
mm
in.
mm
in.
Part No.

16
50.8
2.000
12.7
0.500
M 16 x 1.5
M 16 x 0.06
99258004

C13.41

C13

Vacuum Fittings and Feedthroughs

(ISO-K) Clamp Flange Fittings and Components

Version for the North and South American Continents
ISO-K to NPT Adapter
DN
A
A
∅B
B

Stainless steel

mm
in.
mm
in.
Part No.

63 ISO-K / 2" NPT
60
2.362
51
2" NPT
72103040

Dimensional drawing for the ISO-K / NPT adapter

C13.42

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

ISO-F and DIN 2501 Fixed Flange Fittings

Vacuum Fittings and Feedthroughs

Version for the North and South American Continents

Bold Type Flanges
Bolt Holes Size and Number of Holes

Size
DIN 63 ISO-K
DIN 100 ISO-K
DIN 160 ISO-K
DIN 250 ISO-K
DIN 350 ISO-K
DIN 500 ISO-K
ANSI 3 inch
ANSI 4 inch
ANSI 6 inch
ANSI 8 inch
ANSI 10 inch
ANSI 12 inch
ANSI 16 inch
DIN 63 ISO-F
DIN 100 ISO-F
DIN 160 ISO-F
DIN 250 ISO-F
DIN 400 ISO-F

B.C
O.D

Dimensional drawing for bold type flanges

Bolt circle (B.C.) in in.
Outside diameter (O.D.) in in.
dimensions in brakets ( ) in mm
5.118 (130)
6.299 (160)
6.693 (170)
8.268 (210)
8.858 (225)
10.433 (265)
13.189 (335)
14.764 (375)
17.520 (445)
19.291 (490)
23.622 (600)
25.394 (645)
6.000 (152.4)
7.500 (190.5)
7.500 (190.5)
9.000 (228.6)
9.500 (241)
11.000 (279.4)
11.750 (298)
13.500 (343)
14.250 (362)
16.000 (406.4)
17.000 (432)
19.000 (483)
21.250 (540)
23.500 (597)
4.311 (110)
5.118 (130
5.709 (145)
6.496 (165)
7.874 (200)
8.858 (225)
12.205 (310)
13.189 (335)
18.890 (480)
20.080 (510)

Size

Bolt holes
No. of holes

0.551 (14)
0.709 (18)
0.709 (18)
0.709 (18)
0.906 (23)
0.906 (23)
0.750 (19)
0.750 (19)
0.875 (22)
0.875 (22)
1.000 (25.4)
1.000 (25.4)
1.125 (29)
0.393 (10)
0.393 (10)
0.453 (11.5)
0.453 (11.5)
0.551 (14)

4
8
8
12
12
20
4
8
8
8
12
12
16
4
8
8
12
16

Maximum Recommended Counter Bore for ANSI Blank Flanges (for Carbon or Stainless Steel Pipe)
C-Bore
Thickness
Bore

Sealing Side

ANSI size
3
4
6

Outside diameter (O.D.) Bolt circle (B.C.)
7 1/2
6
9
7 1/2
11
9 1/2

Bolt holes
No. of holes
Diameter
4
3/4
8
3/4
8
7/8

Thickness
7/8
7/8
15/16

Max. C-Bore
4 1/4
5 3/4
7 1/2

Dimensional drawing for counter bore for ANSI blank flange
(dimensions in inches)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C13

C13.43

ANSI Fittings

Vacuum Fittings and Feedthroughs

Version for the North and South American Continents
Flanges, Rotatable Bolt Type
DN
B

A

C

A

∅B

C
Carbon steel
Spare retaining ring

Dimensional drawing for the flanges, rotatable type
(tube piece shown in phantom not included)

ISO-K
to ANSI
mm
in.
mm
in.
mm
in.
Part No.
Part No.

63
3 in.
13
0.500
95.5
3.760
1
0.039
982780700
23102401

100
4 in.
13
0.500
131
5.140
1
0.039
982780701
23102402

160
6 in.
16
0.625
181
7.120
1
0.039
982780702
23102412

250
10 in.
22
0.875
291
11.453
1
0.039
982780703
23102413

Bellows
DN
A

B

∅B
A

C
C

Rated deflection in axial
Dimensional drawing for the bellows

Rated deflection in lateral
Spring rate
Compression / tension
Stainless steel bellows with carbon steel flanges

ANSI
mm
in.
mm
in.
mm
in.
mm
in.
mm
in.
lb/in.
mm
in.
Part No.

3 in.
120
4.720
78
3.070
12.7
0.500
15
0.580
5
0.190
263
12 / 4
0.460 / 0.140
991051013

4 in.
120
4.720
102
4.030
12.7
0.500
18
0.700
6
0.220
340
15 / 4
0.560 / 0.140
991051014

6 in.
200
7.870
154
6.070
12.7
0.500
29.5
1.160
8
0.310
260
23 / 7
0.900 / 0.260
991051016

Combined axial/lateral deflection cannot exceed 100 %. Example: 75 % axial rating - 25 % lateral rating

Sealing Disk Assembly
DN
∅A

A
B

∅B
C

D

C
Dimensional drawing for the sealing disk assembly
∅D

Aluminum
Stainless steel

C13.44

ANSI
mm
in.
mm
in.
mm
in.
mm
in.
Part No.
Part No.

3 in.
91
3.600
78
3.070
3.2
0.125
4
0.157
910181605
910181616

4 in.
121
4.750
102
4.030
3.2
0.125
4
0.157
910181606
910181617

6 in.
171
6.720
154
6.070
3.2
0.125
4
0.157
910181607
910181618

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Valves

C14

Manually Operated
Electropneumatically Operated
Electromagnetically Operated
Special Valves
Gate Valves

Vacuum Valves

Contents
General
The LEYBOLD Valve Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.03

Products
Small Valves of the “micro” Range
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.06
Right-Angle and Straight-Through Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.07

Valves with KF Flanges
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.08
Nominal Width DN 16 KF to DN 40 KF
Right-Angle and Straight-Through Valves, Bellows-Sealed, Manually Operated. . . . . . . . . . . C14.09
Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated . . . . . . . . . . . . . . . . . . C14.10
Straight-Through Valves, Bellows-Sealed, Electropneumatically Operated . . . . . . . . . . . . . . C14.11
Right-Angle Valves, Bellows-Sealed, Electromagnetically Operated . . . . . . . . . . . . . . . . . . . C14.12

Valves with ISO-K or ISO-F Flanges
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.13
Nominal Width DN 63 ISO-K to DN 160 ISO-K
Right-Angle Valves, Bellows-Sealed, Manually Operated . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.14
Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated . . . . . . . . . . . . . . . . . . C14.15
Nominal Width DN 250
Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated . . . . . . . . . . . . . . . . . . C14.16

Special Valves
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.17
Nominal Width DN 10 KF to DN 40 KF or ISO-K
SECUVAC Vacuum Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.18
Variable-Leak Valves with and without Isolation Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.20
Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.21
Power Failure Venting Valves / Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.22
Vacuum Locks / Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.23
Right-Angle Valve for Mobile Systems in Accordance with the Regulations of the
Department of Transportation (DOT). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.24
Accessories for the Electropneumatically Operated Valves . . . . . . . . . . . . . . . . . . . . . . . . . . C14.25

High Vacuum Gate Valves
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.26
Miniature HV and UHV Gate Valves, Manually Operated, KF and CF Flange . . . . . . . . . . . . . C14.27
Miniature HV and UHV Gate Valves, Electropneumatically Operated, KF and CF Flange . . . . C14.28
HV Gate Valves, Manually Operated, ISO-F Flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.29
HV Gate Valves, Electropneumatically Operated, ISO-F Flange . . . . . . . . . . . . . . . . . . . . . . C14.30
UHV Gate Valves, Manually Operated, CF Flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.31
UHV Gate Valves, Electropneumatically Operated, ISO-F Flange . . . . . . . . . . . . . . . . . . . . . C14.32
UHV Gate Valves, Electropneumatically Operated, CF Flange . . . . . . . . . . . . . . . . . . . . . . . . C14.33

C14.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General
The LEYBOLD Valve Program
The long-standing experience of LEYBOLD in the
area of vacuum engineering is reflected in the
selection and the design of the valves and vacuum protection components for a wide variety of
applications. The range of products is such that a
reliable solution can be offered for every vacuum
engineering application. Many years of service
and the reliability of the valves is ensured by
design. LEYBOLD vacuum valves are well-proven
in many widely varying areas of research and
industry.

The Design of a Vacuum
Valve
Valve cover

Housing
seal

Type of operation:
-stepped rotary knob
-electropneumatic
-electromagnetic

Right-angle valves DN 16 to DN 40 KF as well as
DN 63 to DN 160 ISO-K are either available with
an aluminium or stainless steel body (the latter
up to DN 100 ISO-K only).

Vacuum

Valve disk with
vacuum seal

Housing

Valve
Vacuum

– Short switching cycles (e. g. 1.5 s)
– Very high number of opening and switching
cycles (e. g. over 10 million cycles)

The valves from LEYBOLD meet all these
demanding requirements!

The special characteristics of the application in
each case result in special requirements concerning features of the valves, for example:
♦ Coating:

♦ Analytical engineering:
– High conductance (similar to the corresponding flange components, like bends, for
example)
– High integral leak tightness for the valves
(leak rates below 10-9 mbar l/s)

– Permissible ambient temperatures,
50 °C max.

– Materials capable of resisting radiation,
high temperatures and corrosion at the
same time

The range of LEYBOLD valves comprises:

♦ Chemistry
– Choice of materials in contact with the
medium for the valve body

– Rugged and insensitive to contamination

♦ Right-angle and straight-through valves
(no slanted seat valve) with a nominal width of
DN 16 to DN 40 with KF flanges

All applications have the following requirements
in common:

♦ Right-angle valves with a nominal width of
DN 63 to DN 250 with ISO-K flanges

♦ Compact design, low weight

♦ Ball valves
♦ Special valves
It is the aim of LEYBOLD to meet, through the
offered range of isolation components and valves, the customers requirements regarding the
design of such components. For this reason all
valves are available with different driving
systems.

The flange designations used in this Product
Section are in line with the international standards and the nomenclature used in practice:

♦ Quiet opening action with very little vibration

♦ Highlyl visible, unambiguous position indicator
♦ For use within the pressure range from 10-8
to 2500 mbar, if not stated otherwise

Designation
with standardized
nominal width *)
(DN)

Flange Type

Standard

Small flanges

ISO 2861/I
DIN 28 403

“KF”
e.g. DN 40 KF

Clamp flanges

ISO 1609
DIN 28 404

“ISO-K”
e.g. DN 100 ISO-K

Fixed flanges/
ISO 1609
collar flanges with DIN 28 404
retaining ring

“ISO-F”
“F” for fixed flange
e. g. DN 250 ISO-F

♦ Accelerator technology:

♦ Metallurgy and furnace manufacture:

♦ Gate valves with a nominal width of DN 16
to DN 250 with various flanges

Flange Designations

♦ Lamps and tubes manufacture:

Scope of the Range of
Valves
♦ Small valves micro

Quality Assurance
The various markets, like Analytical or Coating,
for example are very demanding regarding certain
important features for the valves which are to be
used in the new generation of instruments currently under development. Demanded are, among
other things, high reliability during the entire service life, high integral leak tightness, a high number of opening/closing cycles as well as a fast
response.

– Temperature resistant
Bellow

Vacuum Valves

*) The standardized nominal width (DN) corresponds approximately to the inside diameter, but need not necessarily
be identical to the inside diameter.

In the case of gate valves equipped with CF flanges the following must be noted:
The designation DN 35 CF for UHV flanges has
been changed to DN 40 CF with the sealing parameters remaining unchanged; the same applies
to DN 150 CF which has changed to DN 160 CF.
For further information on flange connections and
flange components please refer to Product
Section C13 “Vacuum Fittings and Feedthroughs”
as well as C15 “Ultra-high Vacuum Components”.

♦ Fully operational within the entire specified
pressure range
LEYBOLD valves meet these requirements,
unless otherwise stated by the technical data.

With the exception of the special valves you may
select between a stepped rotary knob manual
drive, an electropneumatic drive or an electromagnetic drive system.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.03

C14

Vacuum Valves

General

Advantages to the User

Accessories

♦ Compact design

All connecting components like centering rings,
clamps or clamping rings needed to connect the
valves must be ordered separately (see Product
Section C13 “Vacuum Fittings and
Feedthroughs”).

♦ Integral leak rate less than 10-8 mbar l x s-1
♦ FPM sealed
♦ For pressures up to 2000 mbar
♦ Seal in both directions 1)
♦ Principal dimensions comparable to LEYBOLD
flange components of the same nominal width
♦ Reliable operation ensured regardless of the
valve’s orientation
♦ Optical valve position indicator as standard
(not for valves of the “micro” range)
♦ Electrical valve position indicator as standard
(not for valves of the “micro” range)
♦ Operation of electromagnetic KF valves off
supply voltages ranging from 100 to 230 V AC
♦ The inside of the housing in contact with the
medium is sealed off against the atmosphere
by a bellows type seal which is absolutely free
of any lubricants.
All further technical data as well possible
devia-tions from the general specifications
stated here can be found along with the
descriptions for the individual valve types.
For various applications and special design requirements LEYBOLD offers a range of special valves:
♦ SECUVAC vacuum safety valves
(DN 16 KF to DN 100 ISO-K)

Materials
The valve bodies and the inside parts are made of
selected, vacuum compatible materials, like
wrought aluminum or cast stainless steel.
The raw components are subjected to a 100%
test before they are further processed.
The materials which are used are described in the
tables at the end of the section “General”.

Gaskets
Shown in the table at the end of the section
“General” are the types of gasket used in the valves together with their brief or chemical designations and their thermal ratings.

Other Materials
Plastic:
Grey cast iron:
Brass:
Brass (nickel-plated):
Nimonic
Bronze
Spring steel

Polyamide 6 (PA 6)
GG 20 (0.6020)
Ms 58
CuZn39Pb3

♦ Venting valves / power failure venting valves
♦ Vacuum locks / sealing valves
♦ Variable leak valves
♦ Ball valves (straight-through valve)
♦ Right-angle valves for mobile systems which
comply with the American standard of the
Department of Transportation (DOT)

1)

C14.04

High vacuum systems are very demanding as to the leak
tightness of the vacuum components used. For this reason
each individual LEYBOLD valve is subjected to a helium
leak test before delivery. The valves are only considered as
leak tight, if a leak rate of less than 10-9 mbar x l x s-1 can
be measured for the body and the valve seat.
In the case of our high vacuum valves with KF and ISO-K
flanges a leak rate of less than 10-9 mbar x l x s-1 is maintained also during actuation.
This means that in the case of a gas flow of the mentioned
order of magnitude the pressure would increase only by
3 mbar in a vessel of 1 liter and in 100 years.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General
Aluminum Alloys
Material No.
DIN
AA

Brief Designation
DIN

Stainless Steels
Material No.
DIN
AISI

Vacuum Valves
Standard Steels

Brief Designation
DIN

Material No.
DIN

Brief Designation
DIN

3.0615

–

AlMgSiPbF28

1.4034

420

X 46 Cr 13

1.0388

St4/St14

3.2153

–

G AlSi7Cu3

1.4301

304

X5 CrNi 18 10

1.0425

H II

3.2315

6081

AlMgSi1F28

1.4305

303

X8 CrNiS 18 9

3.2341

–

G AlSi5Mg wa

1.4306

304 L

X2 CrNi 18 10

3.2371

–

G AlSi7Mg wa

1.4308

–

G-X6 CrNi 18 10

3.2373

–

G AlSi9Mg

1.4310

301

X10 CrNi 17 7

3.2381

–

G AlSi10Mg wa

3.3527

–

AlMg2Mn0,8F20

1.4404
1.4435

316 L
316 L

X2 CrNiMo 17 13 3
X2 CrNiMo 18 14 3

1.4541

321

X6 CrNiTi 18 10

1.4571

316 Ti

X6 CrNiMoTi 17 12 2

Materials used for the Gaskets
Brief Designation

Chemical Designation

Typical Trade Name

Degassing
Temperature

FPM

Fluor caoutchouc

Viton

up to 150 °C

NBR

Acrylonitrilebutadiene rubber

Perbunan

up to 80 °C

PTFE

Polytetrafluor ethylene

Teflon

up to 250 °C

EPDM

Ethylene-propylenedien
caoutchouc

–

up to 150 °C

Abbreviations used in the valve designations
Abbreviation

Valve type

EMD

Solenoid straight-through valve

EME

Solenoid right-angle valve

EPD

Electro-pneumatic straight-through valve

EPE

Electro-pneumatic right-angle valve

MAN

Manual operation

PD

Pneumatic straight-through valve

PE

Pneumatic right-angle valve

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14

C14.05

Overview

Small Valves

4
6

5
1

2

3

7

LEYBOLD small valves micro are available with
any of four drive systems, two types of body and
three adapters.

8

9

Types of drive

Types of valve body

♦ Manual (1)

♦ Right-angle valve (5)

♦ Pneumatic (2)

♦ Straight-through valve (6)

♦ Electropneumatic (3)

as well as adapter

♦ Electromagnetic (4)

♦ DN 10 KF flange (7)
♦ 1/4" tube (8)
♦ 6 mm tube (9)

Technical Information
ø35

micro valves are supplied without adaptor.
Hub 2

The adaptors must be ordered additionally.

18

66,1

M14x1

34,5

SW17

16

8
6,5

M14x1

14,5
ø30h11
SW 17
31

27,5

8
21

Dimensional drawing for the micro MAN

C14.06

26 14,5

18

DN 10 ISO-KF

Tube ø1/4" x 0,7
Tube ø6 x 0,5

Connection dimensions for small valves “micro”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Small Valves

Right-Angle and Straight-Through Valves, Bellows-Sealed, Various Drives
ø4

2
20

M14x1
6,5

10,3

ø4
29,5

59,5

/ 30

8
SW19

64

M14x1

/ 30

16

8 6,5

2
500

500

M14x1

M14x1

82

16

8 6,5

76

6,5
M14x1

8

6,5

21

6,5

6,5

M14x1
16

8

30,5

8

21
500

8

M14x1
6,5

M14x1

32
3,5

29

/ 25
29

/ 25

8
21

29

Dimensional drawing for the electropneumatically actuated
small valves “micro”

Dimensional drawing for the pneumatically actuated small valve “micro”

Dimensional drawing for the electromagnetic actuated small valves “micro”

Advantages to the User

Typical Applications

♦ Small size

♦ High switching frequency

♦ Gas handling systems in production machines

♦ High conductance in the molecular flow range

♦ Protection class IP 50

♦ Latest generation analytical equipment

♦ Long service life of over 2 million switching
cycles

Technical Data
Nominal width
Integral leak rate

Small Valve “micro”
Electropneumatic
Pneumatic

Manual
mm

5
10-9

mbar x l/s

Switching cycles

Electromagnetic

–

5 Mio.

> 2 Mio.

bar abs.

4

3

1

Closure time

ms

–

35

7

Opening time

ms

–

35

30

–

150

300

0.4

0.4

0.3

Max. pressure differential

min-1

Max. switching frequency
Conductance, molecular

l/s

Supply voltage
Max. power consumption

VDC

–

24 (with pilot valve)

–

24

W

–

1

–

10

Materials

Aluminum / Plastic

Ordering Information

Manual

Right-angle valves

Type

Manual

MAN

Without pilot valve normally closed

Valve body: Stainless steel (1.4301); Inside section: stainless steel (1.4301);
Gaskets: O-rings made of FPM
Drive:
Aluminum anodized
Aluminum anodized
stainless steel 1.4105

PE

With pilot valves normally closed

EPE

With pilot valve normally open

EPE

Small Valve “micro”
Electropneumatic
Pneumatic

Electromagnetic

Part No. 284 48
–
–
–

–
–
Part No. 284 41
Part No. 284 42

–
Part No. 284 40
–
–

–
–
–
–

With pilot valve normally closed,
with flanges

PE DN 10 KF

Electromagnetic, normally closed

EME

–
–

–
–

Part No. 284 47
–

–
Part No. 284 44

EMD
EMD

–
–

–
–

–
–

Part No. 284 45
Part No. 284 46

Part No. 105 81
Part No. 105 82

Part No. 108 82
Part No. 105 83/84/89

Straight-through valves
Electromagnetic, normally closed
Electromagnetic, normally open
Adapter (1 piece)
Flange DN 10 KF
Tube 1/4 "
Tube 6 mm
Spare parts
Seal kit
Inside section

Part No. 284 50
Part No. 284 51
Part No. 284 52
Part No. 105 80
Part No. 105 80

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Part No. 105 81
Part No. 105 82

C14.07

C14

Valves with KF Flanges

Overview

3
2

1

Not
for für
itemPosition
3
Nicht
3

4

5
6

LEYBOLD KF valves are available with any of
three drive systems and three types of body
having a nominal width of DN 16, 25 and
40 KF.

Types of drive

Types of valve body

♦ Stepped rotary knob (1) with bellows seal

♦ Right-angle valve, aluminum body (4)

♦ Electropneumatic with bellows seal (2)

♦ Right-angle valve, stainless steel body (5)

♦ Solenoid with bellows seal (3)

♦ Straight-through valve, stainless steel body (6)

Connection Pictograms
Position indicator connection
Compressed air connection
Power connection
Position indicator

C14.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Valves with KF Flanges

Right-Angle and Straight-Through Valves, Bellows-Sealed, Manually

Advantages to the User
Valves with Rotar y Knob
Isolation component with handy and easy to operate four position rotary knob
♦ Permits careful venting of systems
♦ Suited as a manually operated variable leak
valve to roughly control gas flows
♦ Leak tight in both directions up to a pressure
of 2.0 etc. 1.5 bar and easy to open
♦ Installation in any orientation
Dimensional drawing for the manually operated, bellows-sealed
right-angle valves

Dimensional drawing for the manually operated, bellows-sealed
straight-through valves

Dimensions for the Right-Angle Valves
DN
KF
16
25
A
mm
118.3
154.5
B
mm
44
58
C
mm
62
79
D
mm
40
50
E
mm
5
10

Dimensions for the Straight-Through Valves
DN
KF
16
25
A
mm
100.3
136
B
mm
44
58
C
mm
44
58
D
mm
80
100
E
mm
22
31.5
F
mm
5
10

40
173.8
82
106
65
12

Technical Data

40
154.3
82
82
130
44.5
12

DN 16 KF

DN 25 KF

DN 40 KF

Aluminum / Stainless

Aluminum / Stainless

Aluminum / Stainless

Right-Angle Valves
Service life

cycles

Conductance at molecular flow

l x s-1

Leak rate

10 000
4.5

4.5

16

16

mbar x l x s-1

Operating pressure range

40

40

1 x 10-9
10-8 - 2000

mbar

10-8 - 1500

Differential pressure, closing and opening direction

bar

2/2

2/2

2/2

2/2

2/2

Opening against differential pressure

bar

2

2

3

3

4

4

°C

50

50

50

50

50

50

FPM

FPM

FPM

FPM

FPM

FPM

0.30

0.43

0.40

0.68

0.55

1.35

Ambient / operating temperature, max.
Seal
Weight

kg

2 / 1.5

Straight-Through Valves
Service life

cycles

Conductance at molecular flow

l x s-1

–

2.5

–

8

–

20

mbar x l x s-1

–

1 x 10-9

–

1 x 10-9

–

1 x 10-9

Leak rate

10 000

mbar

–

10-8 / 2000

–

10-8 / 2000

–

10-8 / 1500

Differential pressure, closing and opening direction

bar

–

2/2

–

2/2

–

2/1.5

Opening against differential pressure

bar

–

2

–

3

–

4

°C

–

50

–

50

–

50

–

FPM

–

FPM

–

FPM

–

0.48

–

0.7

–

1.4

Operating pressure range

Ambient / Operating temperature, max.
Seal
Weight

kg

Ordering Information

DN 16 KF

Aluminum / Stainless

DN 25 KF

Aluminum / Stainless

DN 40 KF

Aluminum / Stainless

Right-Angle Valves, rotary knob
Aluminum body
Stainless steel body

Part No. 285 30

Part No. 286 30

Part No. 285 31

Part No. 286 31

Part No. 285 32

Part No. 286 32

Straight-Through Valves, rotary knob
Stainless steel body

–

Part No. 286 00

–

Part No. 286 01

–

Part No. 286 02

Spare parts
Seal kit
Inside section

Part No. 215 025
Part No. 215 042

Part No. 215 025
Part No. 215 042

Part No. 215 075
Part No. 215 092

Part No. 215 075
Part No. 215 092

Part No. 215 125
Part No. 215 142

Part No. 215 125
Part No. 215 142

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.09

C14

Valves with KF Flanges

Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated
Dimensions
DN
KF
A
mm
B
mm
C
mm
D
mm
E
mm
mm

M5

A DN

D

D

16
154
51
60
40
100
l4

25
176
63
74
50
108
l4

40
196.5
83
98
65
120
l4

♦ Very low leak rate and insensitive to particles
owing to bellows seal. Always closed in case
the compressed air supply fails
♦ Electric position indicator is standard

DN

♦ With and without pilot valve as standard
♦ Standard electrical and compressed air
connections

Advantages to the User

B

♦ Quiet opening and closing action with very
little vibration
C

♦ The valves are closed by the restoring force of
a spring

♦ Short opening and closing times

E

♦ Optical valve position indicator as standard

Dimensional drawing for the aluminum right-angle valves with built-in pilot valve

Technical Data
Service life

cycles

Conductance at molecular flow

l x s-1

Leak rate

♦ Protection class IP 50

DN 16 KF

DN 25 KF

DN 40 KF

Aluminum / Stainless

Aluminum / Stainless

Aluminum / Stainless

10 Million
4.5

16

mbar x l x s-1

Operating pressure range

40

1 x 10-9

mbar

10-8 - 2000

10-8 - 2000

10-8 - 1500

4/2

2 / 1.5

4

2

Differential pressure, closing and opening direction

bar

4/2

Opening against differential pressure at the valve disk

bar

4

Ambient / Operating temperature, max.

♦ Installation in any orientation and no restrictions as to the direction of flow

♦ Optical valve position indicator as standard

°C

50

Seal

FPM

Closing time

ms

200

290

250

Opening time

ms

100

110

150

1/min

100

100

75

Switching frequency
Electrical position indicator, load capacity

V AC / A
V DC / A

250 /0.1
50 / 0.25

Compressed air, overpressure

bar

3 to 5

Air cylinder, volume

cm3

5.5

Compressed air connection

mm

Weight, with pilot valve

Ordering Information

kg

3 to 5

3 to 6

12.1

26.2

4 and 6
0.3

0.4

0.4

0.7

0.9

1.6

DN 16 KF

DN 25 KF

DN 40 KF

Right-angle valves, bellows sealed, Electropneumatic
drive, without pilot valve
aluminum body
stainless steel body

Part No. 287 15
Part No. 288 15

Part No. 287 16
Part No. 288 16

Part No. 287 17
Part No. 288 17

Right-angle valves, bellows sealed, Electropneumatic
drive, with pilot valve
024 V DC aluminum body
024 V DC stainless steel body
024 V AC aluminum body
024 V AC stainless steel body
100 - 115 V AC aluminum body
100 - 115 V AC stainless steel body
200 - 240 V AC aluminum body
200 - 240 V AC stainless steel body

Part No. 287 45
Part No. 288 45
Part No. 287 28
Part No. 288 28
Part No. 287 55
Part No. 288 55
Part No. 287 75
Part No. 288 35

Part No. 287 46
Part No. 288 46
Part No. 287 29
Part No. 288 29
Part No. 287 56
Part No. 288 56
Part No. 287 76
Part No. 288 36

Part No. 287 47
Part No. 288 47
Part No. 287 30
Part No. 288 30
Part No. 287 57
Part No. 288 57
Part No. 287 77
Part No. 288 37

Part No. 215 025
Part No. 215 027

Part No. 215 075
Part No. 215 077

Part No. 215 125
Part No. 215 127

Spare parts
Seal kit
Inside section

C14.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Valves with KF Flanges

Straight-Through Valves, Bellows-Sealed, Electropneumatically Operated
Dimensions
DN
KF
A
mm
B
mm
C
mm
D
mm
E
mm
F
mm
mm

16
139.5
51
60
80
100
22
l4

25
157.5
63
74
100
108
31.5
l4

Advantages to the User

40
177
83
98
130
120
45.5
l4

♦ Quiet opening and closing action with very
little vibration
♦ Short opening and closing times
♦ Optical valve position indicator as standard
♦ Very low leak rate and insensitive to particles
owing to bellows seal – thus always closed in
case the compressed air supply fails
♦ Electric position indicator is standard
♦ With and without pilot valve as standard
♦ Protection class IP 50
♦ Standard electrical and compressed air
connections
♦ The valves are closed by the restoring force of
a spring

Dimensional drawing for the stainless steel straight-through valves

Technical Data

DN 16 KF

Service life

cycles

Conductance at molecular flow

l x s-1

Leak rate

mbar

DN 40 KF

10 Million
2.5

8

20

1 x 10-9

mbar x l x s-1

Operating pressure range

DN 25 KF

10-8 - 2000

10-8 - 2000

10-8 - 1500

Differential pressure, closing and opening direction

bar

4/2

4/2

2 / 1.5

Opening against differential pressure at the valve disk

bar

4

4

2

Ambient / Operating temperature, max.

50

°C

FPM

Seal
Closing time

ms

200

290

250

Opening time

ms

100

110

150

1/min

100

100

75

Switching frequency
Electrical position indicator, load capacity

250 / 0.1
50 / 0.25

V AC / A
V DC / A

Compressed air, overpressure

bar

3 to 5

Air cylinder, volume

cm3

5.5

Compressed air connection

mm

3 to 5

3 to 6

12.1

26.2

0.5

1.0

DN 16 KF

DN 25 KF

DN 40 KF

Straight-through valve, bellows sealed,
Electropneumatic drive, without pilot valve,
stainless steel body

Part No. 289 15

Part No. 289 16

Part No. 289 17

Straight-through valve, bellows sealed,
Electropneumatic drive, with pilot valve,
stainless steel body
24 V DC
24 V AC
100 - 115 V AC
200 - 240 V AC

Part No. 289 45
Part No. 289 28
Part No. 289 55
Part No. 289 35

Part No. 289 46
Part No. 289 29
Part No. 289 56
Part No. 289 36

Part No. 289 47
Part No. 289 30
Part No. 289 57
Part No. 289 37

Spare parts
Seal kit
Inside section

Part No. 215 025
Part No. 215 027

Part No. 215 075
Part No. 215 077

Weight, with pilot valve

Ordering Information

kg

C14

4 and 6

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

1.5

Part No. 215 125
Part No. 215 127

C14.11

Valves with KF Flanges

Right-Angle Valves, Bellows-Sealed, Electromagnetically Operated
Electromagnetic valves are particularly well suited
for vacuum systems in which the valves need to
be remotely controlled and where compressed air
is not readily available.

b1

h

d1

DN

♦ Integrated electrically floating position indicator (opto-coupler for 24 V DC)

h1

DN
d1
b

c

Dimensional drawing for the stainless steel right-angle valves, bellows-sealed

Technical Data

♦ Optical overload indicator (red flashing LED)

Dimensions
DN
KF
DN
mm
d1
mm
a
mm
b
mm
b1
mm
c
mm
h
mm
h1
mm
Travel
mm

16
14.5
18.5
40
96
84.5
59
160
58
4

DN 16 KF

Service life

cycles

Conductance at molecular flow

l x s-1

Leak rate

25
23.2
27.5
50
111
96.5
75
194
76
6.25

40
38.5
42.5
65
138
119.5
96
230
98
10

♦ Protection class IP 54
♦ Spring action closure, thus closed when the
power fails
♦ Low operating temperature
♦ Inverting operation of the remote control logic
♦ Installation in any orientation and no restrictions as to the direction of flow

DN 25 KF

4

16
10-9 to 1 300

Differential pressure, closing and opening direction

bar

1.3

Opening against differential pressure at the valve disk

bar

1.3

°C

Opening/closing time

ms

Rating for the valve position indicator

ms

A

Materials

Ordering Information
Right-angle valve, bellows-sealed,
electromagnetic actuator, microprocessor controlled
aluminum body
stainless steel body

C14.12

50

170

kg
kg

500

15-30 / 100
400
5.2 / 0.7

5.3 / 0.7

4.8 / 0.7

100-230. +8 %/-15 %; 50/60 Hz

V AC / Hz

Weight
aluminum body
stainless steel body

230 / 700

30, 20
40, 50

W

Actuation and holding current

Spare parts
Seal kit
Inside section

120 / 240

V DC / mA

Power consumption, max.
Supply voltage / Frequency

50
100 / 240

1/min
°C

Switch-off delay

40

1 x 10-9

mbar

Ambient / Operating temperature, max.

DN 40 KF

2 Million

mbar x l x s-1

Operating pressure range

Switching frequency
at ambient temperature

♦ Selectable operating mode:
– Remote control via programmable control
or personal computer
– direct operation by switching the supply
voltage on and off
♦ Well visible, unambiguous optical position
indicator: open (green LED) and closed (red
LED)

a

a

Advantages to the User

1.3
1.5

2.2
2.9

4
5.4

Valve body: aluminum alloy (G AlSi7Mg06) or stainless steel (1.4308);
Inside section: stainless steel (1.4301/1.4541); Gaskets: O-rings made of FPM;
Lid: high-quality plastic, temperature-resistant to 80 °C

DN 16 KF

DN 25 KF

DN 40 KF

Part No. 287 65
Part No. 288 65

Part No. 287 66
Part No. 288 66

Part No. 287 67
Part No. 288 67

Part No. 289 75
Part No. 288 88

Part No. 289 76
Part No. 288 89

Part No. 289 77
Part No. 288 90

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Overview

1

2

3

LEYBOLD valves with ISO-K flanges are available
with any of two drives and either of two bodies.
Types of drive
♦ Handwheel (1)
♦ Electropneumatic drive, bellows-sealed (2)
Body types
♦ Right-angle valve with aluminum body (3)
♦ Right-angle valve with stainless steel body (4)

Valves with ISO-K/F Flanges

4

Advantages to the User

Connection Pictograms

♦ Full exchangeability of the subassemblies

Position indicator connection

♦ Three types of drive

Compressed air connection

♦ Two body options

Power connection

♦ Standard nominal widths to DIN 28 404 and
ISO 1609

Position indicator

C14

♦ Simplified stocking of spare parts

From DN 63 ISO-K only right-angle valves are
available.
Nominal widths DN 63 ISO-K and DN 100 ISO-K
are available in aluminum and stainless steel,
DN 160 ISO-K in aluminum only.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.13

Valves with ISO-K Flanges

Right-Angle Valves, Bellows-Sealed, Manually Operated
Dimensions
DN
ISO-K
A
mm
B
mm
C
mm
D
mm
E
mm

63
266
124
150
88
20

These universal valves are ideal especially for
smaller systems, where remote control is not
essential. They may be also installed in larger
systems, where backing pumps or condensate
separators or similar units are to be cut off at
longer intervals for maintenance purposes by
maintenance personnel.

100
320
164
190
108
25

Advantages to the User
♦ Gentle venting of systems
♦ Seal in both directions up to a pressure
difference of 1.5 bar
♦ Easy manual operation, for an effortless
vacuum-tight seal
♦ May also be used as a variable leak valve to
roughly control gas flows

Dimensional drawing for the right-angle valves, bellows-sealed,
manually operated

♦ Installation in any orientation and no restrictions as to the direction of flow

Technical Data

DN 63 ISO-K

Service life

cycles

Conductance at molecular flow

l x s-1

Leak rate

> 1.5 Million
140

mbar x l x s-1

Operating pressure range

DN 100 ISO-K

330
1 x 10-9

mbar

10-8 - 1500

Differential pressure, closing and opening direction

bar

1.5

Opening against differential pressure at the valve disk

bar

1.5

°C

60

Ambient / Operating temperature, max.
Seal

FPM

Weight
aluminum body
stainless steel body
Materials

Ordering Information
Right-angle valve, bellows-sealed, manually operated
aluminum body
stainless steel body
Spare parts
Seal kit
Inside section

C14.14

kg
kg

3.6
6.5

6.1
11.1

Valve body: aluminum alloy (3.2373.63) or stainless steel (1.4305);
Inside section: stainless steel (1.4541/1.4301); Lid: grey cast iron (GG 20); Gaskets: O-rings made of FPM

DN 63 ISO-K

DN 100 ISO-K

Part No. 107 80
Part No. 107 83

Part No. 107 81
Part No. 107 84

Part No. 215 251
Part No. 215 254

Part No. 215 271
Part No. 215 274

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Valves with ISO-K Flanges

Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated
Dimensions
DN
ISO-K
A
mm
B
mm
C
mm
D
mm
E
mm
mm

63
250
130
168
88
14
+6

100
282
170
208
108
14
+6

Electropneumatically actuated right-angle valves
are used in automated vacuum systems which
need to be controlled electrically.

160
366
221
264
138
14
+6

Advantages to the User
♦ Pneumatic or electropneumatic opening
♦ Short opening and closing times
♦ Optical position indicator
♦ Electric position indicator
♦ With and without pilot valve IP 54
♦ Protection class IP 54
♦ The valves are closed by the restoring force
of a spring

Dimensional drawing for the electropneumatically actuated right-angle valves

Technical Data
Service life, cycles

DN 63 ISO-K
Million
l x s-1

Conductance for molecular flow
Operating pressure range

140

330

800

1 x 10-9
1 x 10-8 - 1500

mbar

Differential pressure, closing and opening direction

bar

1.5

Opening against differential pressure at the valve disk

bar

1.5

°C

60

Ambient / Operating temperature, max.

DN 160 ISO-K

1,5

mbar x l x s-1

Leak rate

DN 100 ISO-K

Seal

FPM

Closing time

ms

250

300

550

Opening time

ms

300

450

450

1/min

60

60

40

Switching frequency
Position indicator, rating

V AC/A
V DC/A

Compressed air, overpressure

bar

Compressed air volume

cm3

Compressed air connection

mm

Weight with pilot valve
Aluminum housing
Stainless steel housing

kg
kg

Ordering Information
Right-angle valve, bellows-sealed,
electropneumatic drive, without solenoid coil
Aluminum housing
Stainless steel housing

250/0.125
50/0.25
4 to 8
75

195

570

6
4
6.8

6.7
11.7

11.4
–

DN 63 ISO-K

DN 100 ISO-K

DN 160 ISO-K

Part No. 107 90
Part No. 107 93

Part No. 107 91
Part No. 107 94

Part No. 107 92
–

Valve with pilot valve 24 V DC

Aluminum housing
Stainless steel housing

Part No. 108 00
Part No. 108 10

Part No. 108 01
Part No. 108 11

Part No. 108 02
–

Valve with pilot valve 24 V AC

Aluminum housing
Stainless steel housing

Part No. 108 03
Part No. 108 13

Part No. 108 04
Part No. 108 14

Part No. 108 05
–

Valve with pilot valve 100 - 115 V AC

Aluminum housing
Stainless steel housing

Part No. 108 20
Part No. 108 30

Part No. 108 21
Part No. 108 31

Part No. 108 22
–

Valve with pilot valve 200 - 240 V AC

Aluminum housing
Stainless steel housing

Part No. 108 25
Part No. 108 35

Part No. 108 26
Part No. 108 36

Part No. 108 27
–

Part No. 215 271
Part No. 215 273

Part No. 215 291
Part No. 215 293

Spare parts
Seal kit
Inside section

Part No. 215 251
Part No. 215 253

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.15

C14

Valves with ISO-K Flanges

Right-Angle Valves, Bellows-Sealed, Electropneumatically Operated

d
e
Antrieb um

DN
DN
mm
h, approx.
mm
a
mm
mm
a1
mm
a2, a4
mm
a3
mm
h1
DN1, for bypass 1
DN2, for bypass 2
DN3, for meas. conn.
b
mm
c
mm
d
mm
e
mm
f
mm
Travel
mm
Travel/DN*
mm
* For example travel = 1/4 DN

b

Drive
drawn
90° versetzt
gezeichnet
offset
by 90°

c

h

DN

f

DN1
a1

h1

DN

a

Right-angle valves of this size are used, for
example in metallurgy, large coaters, in the area
of space simulation.

Dimensions

a3
DN2

a2

250 ISO-K
261
650
250
200
208
205
163
50 KF
40 KF
16 KF
69.5
218
250
58
363
62.5
1/4

Advantages to the User
♦ No vibrations when the valve open or closes
♦ Low leak rate (< 10-9 mbar x l x s-1) – drive
system basically insensitive to particles
♦ Non-contact valve position indicator for
reliable indication of the valve’s position
(open/closed)
♦ Wide range of different solenoid coils for all
commonly used control voltages
♦ Additional flange for bypass lines and for
connecting vacuum gauges (see Product
Section C16 “Total Pressure Gauges”)

DN1

a4
DN3

Dimensional drawing for the right-angle valves with bellows

Technical Data

DN 250 ISO-K

Service life

cycles

1 x 106

Conductance at molecular flow

l x s-1

2 700

Leak rate

mbar x l x s-1

Opening / closing time, at 6 bar compr. air pressure

1 x 10-9

s

6/6

Compressed air, overpressure

bar

4 to 8

Hose diameter

mm

6x1

Compressed air cylinder, volume

cm3

2 100

Max. ambient temperature

°C

40

Weight

kg

66

V

Various voltages are possible; see Accessoires

Supply voltage
Materials

Body, valve disk: stainless steel;
Drive/compressed air cylinder: aluminum/cast aluminum (3.2153);
Piston rod, intermediate flange: stainless steel (1.4305);
Gaskets: FPM; Lid: aluminum (3.2341); Hood: plastic (PA 6)

Ordering Information

DN 250 ISO-K

Right-angle valve, bellows-sealed, electropneumatic
drive, without solenoid coil, stainless steel body

Part No. 281 84

Solenoid coil for
various supply voltages

X

Interference suppression kits for different voltages

X

Spare parts
Seal kit
Inner part

Part No. 105 65
Part No. 105 75

X = Part Nos. see section “Accessories for the Electropneumatically Operated Valves, Valves with KF/ISO-K Flanges”

C14.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Overview

Special Valves with KF/ISO-K Flanges

4

3

1

6

2

5

7

LEYBOLD offers a range of special valves for a
variety of different applications and to meet
special design requirements of customers.
Among these are:

C14

♦ SECUVAC vacuum safety valves ➊
(DN 16 KF to DN 100 ISO-K)
♦ Venting valves ➋ /
power failure venting valves ➌
♦ Vacuum locks / sealing valves ➍
♦ Variable leak valves ➎
♦ Ball valves ➏
♦ Right-angle valves for mobile systems in
accordance with the American standard of the
Department of Transportation (DOT) ➐
These valves ideally supplement our range of
KF- and ISO-K valves.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.17

Special Valves

SECUVAC Vacuum Safety Valves
These solenoid right-angle valves were specially
developed for use with rotary vacuum pumps
which are not equipped with a built-in antisuckback valve.
The SECUVAC safety valve protects the vacuum
system against unplanned venting via the backing
pump in case of a power failure and it ensures
that the vacuum system remains sealed until the
backing pump, after it has restarted, has
evacuated the connecting lines.

b

b

h2
D

h2

h

h
øD

h1
h1

a
a

a
a

Dimensional drawing for the SECUVAC valves with KF small flanges

Dimensional drawing for the SECUVAC valves with ISO-K clamp flanges

Dimensions – SECUVAC valves with KF small flanges
DN
16 KF
25 KF
40 KF
a
mm
40
50
65
b
mm
49
49
49
D
mm
44
56
82
h
mm
138.6
161.8
178.3
h1
mm
62.3
82.5
100
h2
mm
24
27
26

Dimensions – SECUVAC valves with ISO-K clamp flanges
DN
63 ISO-K
100 ISO-K
a
mm
88
108
b
mm
150
190
D
mm
124
164
h
mm
220.5
263.5
h1
mm
150
175
h2
mm
18.2
36.2

Advantages to the User

♦ Venting valve for venting of the valve’s chamber and thus the pump (backing pump)

Two valve functions in one:
♦ Fast-closing high vacuum isolation valve for
separating the vacuum chamber or a vapor jet
pump (a diffusion pump, for example) from
the backing pump

Technical Data
Conductance at molecular flow
Current consumption DC
Actuation/holding AC

l x s-1

♦ Immediate closing action upon power failure
♦ Opening action only after the intake line has
been evacuated

Typical Applications
♦ Safety isolation valve between backing pump
and vacuum chamber or vapour jet pumps
(protection of the vacuum chamber against
venting in the event of a power failure)

♦ Delayed isolation of the vacuum chamber and
venting the vacuum pump (negligible “gulp”)

DN 16 KF

DN 25 KF

DN 40 KF

DN 63 ISO-K

DN 100 ISO-K

3.8

11

30.5

126

300

W
VA

2,5
5/3.7

2,5
5/3.7

Leak tightness, body

mbar x l x s-1

< 1 x 10-9

< 1 x 10-9

Leak tightness, valve disk

mbar x l x s-1

< 1 x 10-5

< 1 x 10-5

any

any
1 · 10-8 - 1000

Installation orientation
Operating pressure range

mbar

1 · 10-8 - 1000

Differential pressure Dp
for opening
for closing

mbar
mbar

150
150

150
150

Opening time
Closing time/reaction time

s
ms

< 15
< 100/< 50

< 30
< 100/< 50

Ambient temperature

°C

5 to 50

5 to 50

Protection

IP

65

65

Weight

kg

Materials

C14.18

0.3

0.5

0.9

Valve body: aluminum; Gaskets FPM

2.4

5.1

Valve body: aluminum; Gaskets: FPM

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

SECUVAC Vacuum Safety Valves
Ordering Information
SECUVAC valve
024 V DC
100 - 115 V AC
200 - 230 V AC
Spare parts
Seal kit
Solenoid coils
for SECUVAC valves and power failure venting valves
024 V DC
100 - 115 V AC/50-60 Hz
200 - 230 V AC/50-60 Hz
Filter for SECUVAC valves
and power failure venting valves (set of 5 pcs.)

DN 16 KF

DN 25 KF

DN 40 KF

Part No. 215 015 Part No. 215 065 Part No. 215 135
Part No. 215 016 Part No. 215 066 Part No. 215 136
Part No. 215 017 Part No. 215 067 Part No. 215 137
Part No. 105 02

Part No. 105 04

Part No. 105 05

Special Valves
DN 63 ISO-K

DN 100 ISO-K

Part No. 215 205
Part No. 215 206
Part No. 215 207

Part No. 215 225
Part No. 215 226
Part No. 215 227

Part No. 105 07

Part No. 105 08

Part No. 215 242
Part No. 215 241
Part No. 215 240
Part No. 215 701

Interference Suppression Kit
- Illuminated
As an option for the solenoid coil, an interference
suppression kit is offered which reliably prevents
any interferences from affecting other equipment
operating in the vicinity.

Ordering Information
Interference suppression kit
024 V DC
110 - 230 V AC

Interference Suppression Kit
Part No. 104 96
Part No. 104 95

C14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.19

Special Valves with KF Flanges

Variable Leak Valves with and without Isolation Valve
A
ø42 (1,65")

View A

130
(5,12")

Quick shut off ring
Ansicht A

117,5
(4,63")
DN 16 ISO-KF

2
4
3

30 (1,18")

DN 16 ISO-KF

Clo s e

30
(1,18")

Dimensional drawings for the variable leak valves Part No. 215 020 (left) and Part No. 215 010 (right)

Dimensions in ( ) = dimensions in inch

With variable leak valves precisely defined quantities of gas may be admitted within a controllable
period of time into evacuated vessels.

Skalenteile (1 Umdrehung = 12 Skalenteile)

Scale divisions [1 rotation = 12 scale divisions]

40

10

3

10

2

10

1

Variable leak valves with a isolation valve permit
an interruption of the gas supply without changing the gas admission rate setting.

30

20

10

Applications
0

0
0

200 400 600 800 1000 1200 1400
1800
mbar · l/s
Gasstrom
Gas flow

10
-6
-5
-4
-3
-2
-1
0
10 10 10 10 10 10
10

10

1

10
mbar · I/s

3

Grasstrom
Gas
flow

Variable leak characteristic for the variable leak valve 215 010

Variable leak characteristic for the variable leak valve 215 020

Technical Data

DN 10 ISO-KF

DN 16 ISO-KF

Gas flow controllable

mbar x l x s-1

40 - 1700

5 · 10-6 - 1000

Tightness

mbar x l x s-1

1 x 10-9

1 x 10-9

Differential pressure

bar

3

2.5

Dead volume

cm3

–

0.032

Operating temperature

°C

–

80

Bakeout temperature, flanges

°C

100

150

aluminum

stainless steel

–

flourplastomer

FPM

FPM

0.2

0.4

DN 10 ISO-KF

DN 16 ISO-KF

Housing, needle, filter
Needle sleeve
Seal
Weight

kg

Ordering Information
Variable leak valve
without isolation valve
with isolation valve

C14.20

Part No. 215 020

–

–

Part No. 215 010

♦ Gas admission rates of 1000 to 5 x 10-6
mbar x l x s-1 allow variable leak valves to be
used in almost all applications
♦ Through the integrated digital display, the
opening point may be accurately set at any
time or a certain gas flow may be defined
♦ Blocking valve

Technical Note
When using helium as the process gas, it must
be taken into account that the needle sleeve made
of modified PTFE is to a certain extent permeable
to helium.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Venting Valves

Special Valves with KF Flanges
Venting valves are used to vent small vacuum
systems and are closed when no power is
applied.

Advantages to the User
Venting valve with screw cap, manual operation
♦ Simple opening and closing of the valve by
loosening or tightening the screw cap
Venting valve, electromagnetically actuated
♦ Open when power is applied, closed with no
power

Dimensional drawings for the venting valves with screw cap (left) and the electromagnetic venting valves (right)

Technical Data

Manual

mbar x l x s-1

♦ Seals on one side against atmospheric
pressure

DN 10 KF

Electromagnetically

< 1 x 10-9

< 1 x 10-9

s

–

23

V / Hz
V / Hz
V DC

–
–
–

230 / 50 / 60
115 / 50 / 60
24

Power consumption, actuation/holding

VA

–

35 / 15

Differential pressure in closing / opening direction

bar

–

10 / 1

Can be opened to a pressure difference of

bar

–

2

Service life

cycles

–

1.5 million

Switching frequency

1/min

–

50

ms

–

60 / 45

l x s-1

–

1

kg

0.15

0.46

mm

51 x 42 x 30

105 x 120 x 42

Aluminum (3.0615)
Stainless steel (1.4301)
Aluminum (3.0615)
Stainless steel (1.4301)
FPM
Brass (nickel-plated)

Aluminum

Leak rate
Venting time for a 100 l chamber
Mains connection

Opening / closing time
Conductance for molecular flow
Weight
Dimensions (W x H x D)
Materials
Valve body
Inside section
Gasket
Screw cape

Ordering Information
Venting valve with screw cap
Aluminum
Stainless steel

Manual

♦ Protected against dirt by a filter

C14

–
FPM
–

DN 10 KF

Electromagnetically

Part No. 173 24
Part No. 173 37

–
–

Venting valve, electromagnetic
024 V DC
115 V AC
230 V AC

–
–
–

Part No. 215 021
Part No. 215 023
Part No. 215 024

Centering ring with sintered metal filter, DN 10 KF

–

Part No. 883 50

Spare parts
Seal kit

–

Part No. 215 208

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.21

Special Valves with KF Flanges

Power Failure Venting Valves and Ball Valves
Dimensions - Ball Valves
DN
10 KF
16 KF
b
mm
75
100
b1
mm
80
80
h
mm
55
55
h1
mm
55
58
h2
mm
15
15
D
mm
26
30

b1
b
65,8

DN
DN 10 ISO-KF

h

DN

h1

30

25 KF
130
110
62
80
20
42

40 KF
160
138
90
110
27.5
60

D

27

h2

41
64

Dimensional drawing for the power failure venting valve

Dimensional drawing for the DN 10 KF ball valve

Power Failure Venting
Valves

Advantages to the User

Ball Valves

♦ Can be installed in any orientation

Power failure venting valves are, when
deenergized at a pressure below 2.5 bar, open on
the vacuum side and are used to automatically
vent pumps, systems or vacuum chambers in the
event of a power failure.

♦ Protection against being contaminated by
filtering of the inflowing air

Ball valves are rugged and cost-effective straightthrough valves of small size, which are opened or
closed simply by operating a lever. The valve
position (OPEN/CLOSED) can be determined from
the lever’s position. The lever may be detached.

♦ Easy to install
♦ Simple filter exchange

Ball valves are provided with lubricated gaskets
and when open they permit an unobstructed
passage.

Advantages to the User
♦ Leak tight on both sides against the atmosphere; can be opened against atmospheric
pressure

Technical Data
Leak tightness
Venting time for a 50 l vessel
Opening time / closing time 1)
Protection class to DIN 40050
Permissible ambient temperature
Weight
Dimensions (B x H x T)
Materials

DN 10 KF Power Failure Venting Valve

mbar x l x s-1
s
ms
IP
°C
kg
mm

< 1 x 10-7
270
30 / 30
65
50
0.1
64 x 66 x 30
Valve body: aluminum; Gasket: NBR; Armature: brass; Filter: bronze

DN 10 KF Power Failure Venting Valve

Ordering Information
Power failure venting valve, with inlet filter
230 V / 50-60 Hz
024 V DC
Centering ring DN 10 KF with sinter filter
Spare solenoid valves

Part No. 174 26
Part No. 174 46
Part No. 883 50
see SECUVAC valves

Technical Data
Leak rate
Conductance for molecular flow
Pressure absolute, min. / max.
Weight
Materials

DN 10 KF

C14.22

Ball Valves

mbar x l x s-1
l x s-1
mbar / bar
kg

Ordering Information
Ball valve, brass body (nickel-plated)
1) at a differential pressure of D = 0 bar
p

DN 16 KF

DN 25 KF

DN 40 KF

350

550

< 1 x 10-6
60

130
10-5 / 5

0.35
0.4
0.75
2.6
Valve body: brass (nickel-plated); Gaskets: PTFE; Ball: brass (hard chromium-plated); KF flanges: aluminum (3.0615)

Ball valves

DN 10 KF

DN 16 KF

Part No. 174 94

Part No. 174 95

DN 25 KF

DN 40 KF

Part No. 174 96

Part No. 174 97

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Locks and Sealing Valves
Dimensions
DN
a
mm
d
mm
h
mm
h2
mm

16 KF
40
16
124
30

25 KF
50
25
160
30

40 KF
65
38
190
40

h

Special Valves with KF Flanges
Vacuum Locks and Sealing
Valves
A screw-in sealing element with a hex. socket
into which the spindle of the gas lock is inserted
for actuation has been integrated within the tubulation.
After having filled in the gas or evacuated the
chamber, the gas lock is detached from the small
flange and may thus be reused for an unlimited
number of times on other sealing valves.

DN
a

a

h2
d
Dimensional drawing for the sealing valves

Advantages to the User

♦ May be used in the entire rough and medium
vacuum range

♦ Simple to use, handy knob

♦ Long service life

♦ Compact, low weight
♦ Also well-suited for operating older types of
sealing valves from LEYBOLD
♦ Long travel and high conductance, thus short
pumpdown times
♦ Spindle can be arrested in its end position

Typical Applications
♦ Sealing of evacuated or gas-filled chambers
♦ Post-evacuation of vessels

♦ Secured against inadvertent opening

♦ Topping up and exchanging the gas filling in
vessels

♦ Temperature resistant
Vacuum lock 60 °C
Blocking valve 100 °C
♦ May be protected by a standard blank flange
against becoming dirty

♦ Sealing valves with stainless steel KF connection and stainless steel tubulation for welding
to the chamber

♦ Double O-ring seal offering a very low leak
rate (< 1 x 10-7 mbar x l x s-1) and a long
service life

Technical Data
Leak rate (Sealing valve / vacuum lock)

DN 16 KF

mbar x l x s-1

DN 25 KF

DN 40 KF

1 x 10-7 / 1 x 10-9

Travel for the vacuum lock

mm

56

76

108

Free passage in the sealing valve

mm

3

8

18

Absolute pressure

bar

Weight
vacuum lock
sealing valve

kg
kg

0.5
0.04

Materials

Ordering Information

C14

2.5
1.0
0.1

1.8
0.12

Bearing lid: aluminum
Gasket: FPM

DN 16 KF

DN 25 KF

DN 40 KF

Vacuum lock, aluminum body

Part No. 283 25 Part No. 283 26 Part No. 283 27

Sealing valve, stainless steel body
with tubulation (stainless steel)
with KF flanges (stainless steel)

Part No. 283 21 Part No. 283 22 Part No. 283 23
Part No. 283 51 Part No. 283 52 Part No. 283 53

Clamping ring

Part No. 183 41

Part No. 183 42

Part No. 183 43

Centering ring

Part No. 883 46

Part No. 883 47

Part No. 883 48

Repair kit
sealing valve
vacuum lock

Part No. 215 055
Part No. 107 70

Part No. 215 056
Part No. 107 71

Part No. 215 057
Part No. 107 72

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.23

Special Valves with KF Flanges

Right-Angle Valves for Mobile Systems according to DOT

30,5
6
M5

M5

Advantages to the User

This valve was especially developed for applications which involve brake fluid (in accordance
with DOT) and with special attention regarding
safety in the presence of increased differential
pressures.

42

♦ High degree of reliability and safety due to
EPDM gaskets at the valve disk as well as
within the body
♦ Stronger spring action on the valve disk

134,4
DN 16 ISO-KF

104,2
77,5

♦ Long service life
♦ Pilot valves for adaptation to all common control voltages and the interference suppression
kit can be retrofitted

63
40

28
40

DN 16 ISO-KF

♦ Visual valve position indicator is standard

109,5

♦ Installation in any orientation and no restrictions as to the direction of flow

Dimensional drawing for the stainless steel right-angle valves with pilot valve

Special valve - DOT

Technical Data

DN 16 KF

Service life

cycles

10 million

Conductance at molecular flow

l x s-1

4.5

Leak rate

mbar x l x s-1

Operating pressure range

mbar

1 x 10-9
10-8 - 5000

Differential pressure, closing and opening direction

bar

Opening against differential pressure

bar

5

°C

50

ms

100 / 100

Ambient / Operating temperature, max.
Opening / closing time for compressed air at 6 bar
Switching frequency

5/5

1/min

100

Compressed air, overpressure

bar

4-8

Compressed air volume

cm3

5,5

Compressed air connection

mm

4 and 6

Weight with pilot valve
Materials

Ordering Information
Right-angle valve, without pilot valve, aluminum body

0.3
Valve body: aluminum alloy (3.2381);
Inside section: stainless steell (1.4541 / 1.4301);
Gaskets: EPDM

Special valve - DOT
DN 16 KF

Part No. 215 009

Pilot valves

X

Interference suppression kits for different voltages

X

Spare parts
Seal kit EPDM

Part No. 215 012

X = for part numbers see section “Accessories for the electropneumatically operated valves, valves with KF / ISO K flanges”

C14.24

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for the Electropneumatically Operated Valves

Valves with KF Flanges
Solenoid Coils for Pilot Valves

Tec hnic al Data

V DC

V AC

Voltage

V

12/24 DC

24/110/230 AC; 50/60 Hz

Permissible voltage variation

%

± 10

± 10 at nominal frequency

Permissible frequency variation

%

–

± 10 at nominal frequency

Power consumption at nominal operating voltage

W

4.1 at 12 V
4.5 at 24 V

Actuate: 7.5 VA
Hold: 6.0 VA

Operating time

Pilot valve

Type of protection to DIN 0450

Pilot Valves
A range of pilot valves is available for actuation of
the electropneumatic KF valves, which cover all
commonly used control voltages.

Advantages to the User
♦ Easy to fit to the pneumatic cylinder,
adapter is included with the DOT valve

29,5
12,5

48

Dimensional drawing for the solenoid coils

Solenoid Coils for DN 250 ISO-K
LEYBOLD is offering a range of solenoid coils for
the purpose of adapting the electropneumatically
operated valve to different commonly used control voltages.

F
VDE

Max. response time

ms

Weight

kg

230 V AC/50-60 Hz
110 - 120 V/50-60 Hz
024 V AC/50-60 Hz
024 V DC

230 V/50-60 Hz (normally closed)
110 - 120 V/50-60 Hz (normally closed)
024 V DC (normally closed)

35,5
29

Pg 9

Test mark

Or der ing Information

60,5

65

Class of insulation material to VDE 0580

Or der ing Information

♦ Hose connection and gasket for connection to
the compressed air supply

IP

Hose connection

Torque for the knurled screw, min./max

Supplied Equipment

100 %

Or der ing Information
Pilot valve for
DN 250 ISO-K to DN 630 ISO-K

Or der ing Information
Interference suppression kit
024 V DC/AC
110 V AC
230 V AC

Ncm

10
0.065

0.055
100/150

Solenoid Coils for Pilot Valves
DN 250 ISO-K or as Spare Part
Part No. 280 77
Part No. 280 78
Part No. 280 79
Part No. 280 80

KF Pilot Valves for DOT valves
(incl. Solenoid Coil)
Part No. 280 70
Part No. 280 72
Part No. 280 74

Replacement Pilot Valves

for ISO-K valves from DN 250, without coil
Part No. 200 07 927

Interference Suppression Kit
for different voltages

C14

Part No. 287 84
Part No. 287 82
Part No. 287 83

Advantages to the User
♦ Easy to fit (plug on and tighten with a knurled
screw)

Interference Suppression Kit
- Illuminated
As an option for the solenoid coil and the pilot
valves an interference suppression kit is offered
so as to reliably prevent any pick-up of interference by sensitive equipment in the vicinity of the
solenoid coils.
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.25

Overview

Gate Valves

➊

➋

➌

➍

➊ Miniature UHV gate valves, KF flange
➋ Miniature UHV gate valves, CF flange
➌ UHV gate valve
➍ HV gate valve

C14.26

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Miniature HV and UHV Gate Valves, Manually Operated
Q

V

Gate Valves with KF/CF Flanges

Q

Q

U

U

U
T

I

H

L

N

K

O1
I

D B

BD

M

K
A

O

A
B
B1
C
D
ExF
G
H
H1
H2
I
K
L
M
N
O
O1
Q
T
U
V

KF

16 KF

mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm
mm

40
30
–
–
15
–
–
17.2
–
–
3
25
100
15
39
30
–
25
37
25
30

25 KF
Articulated lever
50
40
–
–
24
–
–
26.2
–
–
3
32
139
22
59
44
–
35
50
32
30

40 KF
51
55
–
–
39
–
–
41.2
–
–
3
31
208
32.5
93
65
–
55
85
40
50

DN 16 KF

mbar x l x s-1

Pressure range, abs.
High vacuum conductance

l x s-1

Differential pressure at the valve disk

bar

DN 25 KF

Articulated lever

DN 40 KF

Dimensional drawing for the miniature UHV gate valves, manually operated,
DN 40 CF

Advantages to the User
♦ Manually actuated; bellows-sealed push gate
feedthrough
♦ Valve technology with only one moving part
♦ Equipped with a mechanical position indicator
♦ Low particle generating and vibration free
actuation
♦ Compact, light-weight design

DN 40 KF

DN 40 CF

Manually operated
5 x 10-10 / < 1 x 10-9

1 x 10-7 mbar to 2 bar

1 x 10-10 mbar to 2 bar
140

160

220
≤ 2 in both directions

≤ 2 in both directions
≤ 30

≤ 30

50 000

50 000

100 / 100
80

250 / 200
250

any

any

°C
°C

Installation orientation
Weight

kg

0.4

Materials
Valve body
Valve disk
Bellows
Seals
Head
Disk

Ordering Information
Miniature gate valve, manually operated
6 set screws with nuts and washers *)

DN 16 KF

0.4

C14

1.5

0.7

AlMgSi1 (3.2315)
AlSI 301 (1.4310)
–

AlSI 304 (1.4301)
AlSI 304 (1.4301)
AlSI 316 L (1.44435)

Viton
Viton

metal
Viton

DN 25 KF

Articulated lever

DN 40 KF

–

DN 40 KF

DN 40 CF

Part No. 286 15

Part No. 286 84

–

Part No. 839 11

Manually operated

Part No. 286 06 Part No. 286 08 Part No. 286 09
–

O

G

< 1 x 10-9 / < 1 x 10-9
34

N

ExF

A

40 KF
40 CF
Manually operated
50
35
72
72
55
–
–
58.7
40
40
–
6 x M6
–
7
41.2
–
–
48.3
–
42
3
–
16
16
198
198
–
–
82
82
76
76
70
70
55
55
73
73
45
45
–
–

O1

H2
C

B D

cycles

Degassing temperature
for the valve
manual open / closed

*)

K

mbar

Max. differential pressure during opening
Service life until first maintenance

10

H1

O

Dimensional drawing for the miniature UHV gate valves, manually operated,
DN 40 KF

Technical Data
Leak tightness: body / valve seat

N

H

B1
A

Dimensional drawing for the miniature UHV gate valves, articulated lever,
KF flange

Dimensions
DN

T L

T

L

–

For dimensions E x F see table “Dimensions for CF”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.27

Gate Valves with KF/CF Flanges

Miniature HV and UHV Gate Valves, Electropneumatically Operated
Advantages to the User

U

119
68

R 1/8"

Q

119

U

Q

68
V

V

♦ Valve technology with only one moving part

R 1/8"

L

L

H1

K

O1

H2

K

O1

ExF

C

B D

N

I
BD

A

N

♦ Equipped with a mechanical position indicator
♦ Actuation free of particles and vibrations
♦ Short closing time, very long service life

H

B1

O

G

♦ Double-acting electropneumatic actuator (with
position indicator and pilot valve); bellowssealed push gate feedthrough

A

♦ Compact, light-weight design

O

Dimensional drawing for the miniature UHV gate valves; electropneumatically operated, CF flange (left) and KF flange (right)

Dimensions
DN
A
mm
B
mm
mm
B1
C
mm
D
mm
ExF
G
mm

40 KF
50
72
55
–
40
–
–

Dimensions
DN
H
mm
H1
mm
mm
H2
I
mm
K
mm
L
mm
N
mm

40 CF
35
72
–
58.7
40
6 x M6
7

mbar x l x s-1
mbar x l x s-1

Pressure range, abs.
l x s-1

High vacuum conductance

40 CF
–
48.3
42
–
16
230
82

Dimensions
DN
O
mm
O1
mm
Q
mm
T
mm
U
mm
V
mm

DN 40 KF

Technical Data
Leak tightness, valve body
valve seat

40 KF
41.2
–
–
3
16
198
82

Differential pressure at the valve disk

40 KF
76
70
55
73
45
–

DN 40 CF

Aluminum body

Stainless steel body

Stainless steel body

< 1 x 10-9
< 1 x 10-9

< 5 x 10-10
< 1 x 10-9

< 5 x 10-10
< 1 x 10-9

1 x 10-7 mbar to 2 bar

1 x 10-10 mbar to 2 bar

1 x 10-10 mbar to 2 bar

140

160

bar

220

≤ 2 in both directions

≤ 2 in both directions

mbar
bar

≤ 30
1

≤ 30
1

Service life until first maintenance

cycles

50 000

50 000

Bakeout temperature
Valve open / closed
pneumatic actuation
Position indicator / pilot valve

°C
°C
°C

Max. differential pressure
during opening
at reduced service live

≤ 100 / 100
≤ 80
≤ 80 / 50

≤ 250 / 200
≤ 200
80 (optional: 200) / 50

°C x h-1

Warming-up and cooling down speed
Compressed air min./max.

bar

Closing/opening time

s

Pilot valve
supply voltage / power consumption

80

≤ 250 / 200
≤ 200
80 (optional: 200) / 50
80

4.5/7

4.5/7

4.5/7

1.1

0.7

0.7

– / W 24 V DC / 6 or 230 V AC, 50/60 Hz / 224 V DC / 6 or 230 V AC, 50/60 Hz / 2

Switching capacity of the pos. indicator, at 080 °C

A

at 200 °C

A

0.5 at 50 V AC; max. 10 W /
0.5 at 75 V DC; max. 10 W
–

Installation orientation
Weight

Seals
Head
Disk

Ordering Information
Miniature gate valve, electropneumatically operated
024 V DC / 6 W
230 V AC, 50/60 Hz / 2 W
6 set screws with nuts and washers *)

5 at 250 V AC; 3 at 50 V DC

5 at 250 V AC; 3 at 50 V DC

1 at 48 V AC; 1 at 72 V DC

1 at 48 V AC; 1 at 72 V DC

any
kg

Materials
Valve body
Disk
Bellows

*)

40 CF
76
70
55
73
45
32.5

any

1.2

1.8

1.8

AlMgSi1 (3.2315)
AISI 301 (1.4310)
–

AISI 304 (1.4301)
AISI 304 (1.4301)
AISI 316 L (1.44435)

AISI 304 (1.4301)
AISI 304 (1.4301)
AISI 316 L (1.44435)

Viton
Viton

metal
Viton

metal
Viton

Aluminum body

Stainless steel body

Stainless steel body

Part No. 286 54
Part No. 286 44
–

Part No. 286 36
Part No. 286 35
–

Part No. 286 99
Part No. 286 94

DN 40 KF

DN 40 CF

Part No. 839 11

For dimensions E x F see table “Dimensions for CF”

C14.28

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

HV Gate Valves, Manually Operated
Q

V

U

Gate Valves with ISO-F Flanges
O1

Q
U

V

W

B D

T
L

H

T

J

L

P

M

O

K

P

O

N

N

K

C

A

G

Dimensional drawing for the HV gate valves; manually operated,
DN 63 ISO-F and DN 100 ISO-F

Dimensions
DN
K
mm
L
mm
N
mm
O
mm
P
mm
Q
mm
T
mm
U
mm
V
mm
W
mm

63 ISO-F
38
277
136
112
60
90
100
77
114
–

100 ISO-F
38
365
191
150
60
125
116
77
114
–

Dimensional drawing for the HV gate valves; manually operated,
DN 160 ISO-F

♦ Aluminum body
♦ Slim and light-weight
♦ Low play in the locked state and low wear

DN 63 ISO-F

mbar x l x s-1

l x s-1

550

bar

Max. differential pressure during opening

6 000

1.2 in both directions
≤ 30

cycles

50 000

°C
°C

120
80

Installation orientation

C14

any

Weight

kg

Materials
Valve body
Disk
Bellows
Seals (head, disk)

3

5

9

AlMg4.5Mn
G-AlSi7Mg
AlSI 304 (1.4301)
AlMgSi1
AlMgSi1, AlSI 303 (1.4305) AlSI 301 (1.4310), AlSI 304 (1.4301), AlSI 420 (1.4034)
Viton

Ordering Information
HV gate valve, manually operated

*)

2 000

mbar

Degassing temperature
valve
manual drive

Set screws with nuts and washers *)
Package each containing

DN 160 ISO-F

1 x 10-7 mbar to 1.2 bar

Differential pressure at the valve disk

Service life until first maintenance

DN 100 ISO-F
< 1 x 10-9

Pressure range, abs.
High vacuum conductance

Dimensions of ISO-F Connections (HV)
DN ISO-F
63
100
160
200
250
A
mm
60
60
70
80
100
B
mm 130
165
235
288
350
C
mm 110
145
200
260
310
D
mm
65
100
150
200
261
ExF
4 x M8 8 x M8 8 x M10 12 x M10 12 x M10
G
mm
12
12
16
16
16
H
mm
70
102
153
213
–
J
mm
3
3
5
5
–
M
mm 65.5
83
117.5
144
175
O1
mm 131
166
237
290
352

♦ Cost-effective gate valve for industrial
applications with elastomer-sealed push gate
feedthrough

Technical Data
Leak tightness: Body / valve seat

Connection dimensions for ISO-F flanges (HV gate valves)

Advantages to the User

160 ISO-F
58
547
280
192
70
60
267
65
122
95

ExF

pieces

DN 63 ISO-F

DN 100 ISO-F

DN 160 ISO-F

Part No. 286 25

Part No. 286 26

Part No. 215 633

Part No. 839 13
16

Part No. 839 13
16

Part No. 210 071
16

For dimensions E x F see table “Dimensions for ISO-F (HV)”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.29

Gate Valves with ISO-F Flanges

X

W

HV Gate Valves, Electropneumatically Operated

U

Q

V

V

X

Q

O1

B D
T

O

J

M

L

P

L1

R1/8"
P

L

H

T
U

K

O

C

A

N

N

K

G

Connection dimensions for ISO-F flanges
(For dimensions see table
“Dimensions of ISO-F Connections (HV Gate Valves)”)

Dimensional drawing for the gate valves; DN 63 ISO-F and DN 100 ISO-F (left), DN 160 ISO-F to DN 250 ISO-F (right)

Dimensions
DN ISO-F 63
K
mm
L
mm
L1
mm
N
mm
O
mm
P
mm

100
38
351
311
136
112
60

160
38
443
366
191
150
60

200
58
547
–
280
192
70

200
66
688
–
363.5
240
80

Dimensions
DN ISO-F
Q
mm
T
mm
U
mm
V
mm
W
mm
X
mm

250
76
843
–
453
308
96

63
90
174
55
80
50
59

ExF

100
125
211
55
80
50
59

160
60
267
65
71.5
–
57

200
80
324.5
75
76.5
–
62

Advantages to the User

250
100
390
86
84.5
–
67

♦ Cost-effective gate valve for industrial
applications with elastomer-sealed push gate
feedthrough
♦ Aluminum body
♦ Slim and light-weight
♦ Low play in the locked state and low wear

Technical Data
Leak tightness: Body / valve seat

DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 200 ISO-F DN 250 ISO-F
< 1 x 10-9

mbar x l x s-1

1 x 10-7 mbar to 1.2 bar

Pressure range, abs.
High vacuum conductance

l x s-1

550

2 000

Diff. press. at the valve disk/during opening, max. mbar
Compressed air min./max.

bar

Closing/opening time
Service life until first maintenance

s

0.7

1

3

5

120
80
80
50

A

5 at 230 V AC; 3 at 50 V DC
any

Weight

4

kg

Materials
Valve body
Disk
Bellows
Seals (head, disk)

6

9

18

25

G-AlSi7Mg
AlSI 304 (1.4301)
AlMgSi1, AlSI 303 (1.4305) AlSI 301 (1.4310), AlSI 304 (1.4301), AlSI 420 (1.4034)
Viton

Ordering Information

DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 200 ISO-F DN 250 ISO-F

HV gate valve, electropneumatically operated
024 V DC / 2.5 W
024 V DC / 6 W
230 V AC, 50 Hz / 7.1 W

*)

22 000

100 000

Installation orientation

Set screws with nuts and washers *)
Package each containing

2

50 000

°C
°C
°C
°C

Switching capacity for the position indicator

12 000

4/7

cycles

Degassing temperature
valve
pneumatic drive
position indicator
pilot valve

6 000
≤ 1000 in both directions / ≤ 30

pieces

Part No. 286 55
–
Part No. 286 45

Part No. 286 56
–
Part No. 286 46

–
Part No. 215 643
Part No. 215 653

–
Part No. 215 644
Part No. 215 654

–
Part No. 215 645
Part No. 215 655

Part No. 839 13
16

Part No. 839 13
16

Part No. 210 071
12

Part No. 210 071
12

Part No. 210 071
12

For dimensions E x F see table “Dimensions for ISO-F (HV)”

C14.30

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Gate Valves with CF Flanges

UHV Gate Valves, Manually Operated

Advantages to the User
Q

♦ Valve and wheel can be degassed at
temperatures up to 250 °C

V

U

T
U1
O
10
DN 160/200

♦ Steel body (non-rusting)

H1

P

BD

L

♦ Bellows-sealed push gate feedthrough

H2

S
N

♦ Low play in the locked state and low wear

ExF

C

A

O1

Connection dimensions for CF flanges (UHV gate valves)

Dimensional drawing for the gate valves DN 63 CF to DN 200 CF

Dimensions
DN
K
mm
L
mm
M
mm
N
mm
O
mm
O1
mm
P
mm

63 CF
27
408
57
192
115
112
70

♦ Mechanically locked in the closed state

13

M
K

♦ Compact

100 CF
27
462
73
247
145
142
70

160 CF
27
552
99
336
200
192
70

200 CF
35
660
125
430
250
240
80

Technical Data
Leak tightness: Body / valve seat

Dimensions
DN
Q
mm
S
mm
T
mm
U
mm
U1
mm
V
mm

63 CF
180
11
184
70
83
77

DN 63 CF

100 CF
220
9
184
70
83
77

160 CF
290
25
184
70
83
77

DN 100 CF

mbar x l x s-1

l x s-1

600

1 700

bar

Max. differential pressure during opening

13

cycles

C14

any
kg

9

Materials
Valve body
Bellows
Mechanism
Gaskets (head / disk)

16 set screws with nuts and washers *)

17

80

Installation orientation

UHV gate valve, manually operated

17

250 / 200
250

°C x h-1

Ordering Information

12 000

50 000

°C
°C

Weight

6 000

30
10

Degassing temperature
valve open / closed
manual drive

*)

DN 200 CF

≤ 1.6 in both directions

mbar

Number of spindle turns for full travel

Warming-up and cooling down speed

200 CF
80
253.2
231.8
200
24 x M8
222.3
217

1 x 10-10 mbar to 1.6 bar

Differential pressure at the valve disk

Service life until first maintenance

DN 160 CF

160 CF
70
202.4
181
150
20 x M8
171.45
166

< 5 x 10-10 / < 1 x 10-9

Pressure range, abs.
High vacuum conductance

Dimensions of CF Connections (UHV)
DN
63 CF
100 CF
A
mm
70
70
B
mm
113.5
151.6
C
mm
92.1
130.2
D
mm
70
100
ExF
8 x M8
16 x M8
H1
mm
82.5
120.65
H2
mm
77.4
115.5

200 CF
350
38.5
200
90
103
94

12

18

28

AlSI 304 (1.4301)
AlSI 316 L (1.4435)
AlSI 304 (1.4301), AlSI 316 L (1.4404), AlSI 301 (1.4310), AlSI 420 (1.4034)
metal / Viton

DN 63 CF

DN 100 CF

DN 160 CF

DN 200 CF

Part No. 286 85

Part No. 286 86

Part No. 286 87

Part No. 286 88

Part No. 839 13

Part No. 839 13

2 x Part No. 839 13

2 x Part No. 839 13

For dimensions E x F see table “Dimensions for CF”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.31

Gate Valves with ISO-F Flanges

UHV Gate Valves, Electropneumatically Operated
Advantages to the User

V
R 1/8"
3,5
DN 63-160

T
B D

P

O
10
DN 160

J

♦ Steel body (non-rusting)
M

L
N

K

C

A

G

♦ Bellows-sealed push gate feedthrough
♦ Low play in the locked state and low wear

ExF

♦ Compact

O1

Dimensional drawing for the gate valves ISO-F

Connection dimensions for ISO-F flanges (UHV gate valves)

Dimensions
DN
K
mm
L
mm
M
mm
N
mm
O
mm
O1
mm
P
mm

Dimensions
DN
Q
mm
S
mm
T
mm
U
mm
U1
mm
V
mm
W
mm

100 ISO-F 160 ISO-F 250 ISO-F
27
27
41
418
523
800
73
99
161
247
336
560
145
200
345
142
192
322
70
70
80

Technical Data
Leak tightness: Body / valve seat

63 ISO-F
180
11
154
70
83
145
77

DN 63 ISO-F

DN 160 ISO-F

DN 250 ISO-F

< 5 x 10-10 / < 1 x 10-9
1 x 10-10 mbar to 1 bar

l x s-1

High vacuum conductance
Differential pressure at the valve disk

600

1 700

bar

Max. differential pressure during opening

bar

Closing/opening time

s
m3

Compressed air cylinder, volume
Service life until first maintenance

4/7

5/7

1

1.2

1.5

4

0.08

0.11

0.14

0.35

50 000
250/200 / 200
80 (optional: 200) / 50

°C x h-1

80

–/W

Switching capacity for position indicator, at 080 °C
at 200 °C

4/7

4/7

°C
°C

Pilot valve
supply voltage / power consumption

26 000

30

cycles

Degassing temperature
valve open/closed / pneumatic drive
position indicator / pilot valve

6 000
1 in both directions

mbar

Compressed air min./max.

24 V DC / 6 or 230 V AC, 50 Hz / 7.1

A
A

5 at 250 V AC; 3 at 50 V DC
1 at 48 V AC; 1 at 72 V DC

Installation orientation

any

Weight

kg

9

Materials
Valve body
Bellows
Mechanism
Gaskets (head / disk)

12

18

42

AlSI 304 (1.4301)
AlSI 316 L (1.4435)
AlSI 304 (1.4301), AlSI 316 L (1.4404) AlSI 301 (1.4310 ), AlSI 420 (1.4034)
metal / Viton

Ordering Information
UHV gate valve, electropneumatically operated
024 V DC / 6 W
230 V AC, 50 Hz / 7.1 W
Set screws with nuts and washers *)
Package each containing

Dimensions of ISO-F Connections (UHV)
DN 63 ISO-F 100 ISO-F 160 ISO-F 250 ISO-F
A
mm
70
70
70
100
B
mm
130
165
225
350
C
mm
110
145
200
310
D
mm
70
100
150
261
ExF
4 x M8
8 x M8
8 x M10 12 x M10
G
mm
13
13
15
15
H
mm
–
102
153
–
J
mm
–
3
5
–

DN 100 ISO-F

mbar x l x s-1

Warming-up and cooling down speed

♦ Mechanically locked in the closed state

100 ISO-F 160 ISO-F 250 ISO-F
220
290
450
9
25
65
171
187
240
70
70
90
83
83
103
145
145
155
77
77
87

Pressure range, abs.

*)

♦ Double-acting electropneumatic actuator
(with position indicator and pilot valve)

S

M

63 ISO-F
27
346
57
192
115
112
70

♦ Valve and pneumatic drive can be degassed at
temperatures up to 250 °C and 200 °C
respectively

O1

Q

W
U1

H

U

pieces

DN 63 ISO-F

DN 100 ISO-F

DN 160 ISO-F

DN 250 ISO-F

Part No. 286 72
Part No. 286 75

Part No. 286 73
Part No. 286 76

Part No. 286 74
Part No. 286 77

Part No. 286 81
–

Part No. 839 13
16

Part No. 839 13
16

Part No. 210 071
12

Part No. 210 071
12

For dimensions E x F see table “Dimensions for ISO-F (UHV)”

C14.32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

UHV Gate Valves, Electropneumatically Operated

Gate Valves with CF Flanges
Advantages to the User

V
U

R 1/8"

♦ Double-acting electropneumatic actuator
(with position indicator and pilot valve)

Q

W
U1

3,5
DN 63-160

T

P

O
10
DN 160

♦ Bellows-sealed push gate feedthrough

H1
H2

BD

L

S

ExF

N

♦ Valve and pneumatic drive can be degassed
at temperatures up to 250 °C and 200 °C
respectively

C

A

♦ Steel body (non-rusting)
13

♦ Low play in the locked state and low wear

M
K

O1

Dimensions
DN
K
mm
L
mm
M
mm
N
mm
O
mm

63 CF
27
346
57
192
115

100 CF
27
418
73
247
145

160 CF
27
523
99
336
200

200 CF
35
630
125
430
250

Technical Data
Leak tightness: Body / valve seat

Dimensions
DN
O1
mm
P
mm
Q
mm
S
mm
T
mm

63 CF
112
70
180
11
154

DN 63 CF

100 CF
142
70
220
9
171

160 CF
192
70
290
25
187

mbar x l x s-1

High vacuum conductance

63 CF
70
83
145
77

100 CF
70
83
145
77

DN 160 CF

160 CF
70
83
145
77

200 CF
90
103
155
87

DN 200 CF

< 5 x 10-10 / < 1 x 10-9
600

1 700

bar

Max. differential pressure during opening

bar

Closing/opening time

s
m3

Compressed air cylinder, volume

4/7

4/7

4/7

5/7

1

1.2

1,5

4

0.08

0.11

0.14

0.35

50 000

°C
°C

250/200 / 200
80 (optional: 200) / 50

°C x h-1

Pilot valve
supply voltage / power consumption

80
24 V DC / 6 or 230 V AC, 50 Hz / 7.1

–/W

Switching capacity for position indicator
at 080 °C
at 250 °C

any
kg

9

Materials
Valve body
Bellows
Mechanism
Gaskets (head / disk)

Ordering Information
UHV gate valve, electropneumatically operated
024 V DC / 6 W
230 V AC, 50 Hz / 7.1 W
Set screws with nuts and washers *)

C14

5 at 250 V AC; 3 at 50 V DC
1 at 48 V AC; 1 at 72 V DC

A
A

Installation orientation
Weight

12 000

30

cycles

Degassing temperature
valve open/closed / pneumatic drive
position indicator / pilot valve

6 000
1 in both directions

mbar

Compressed air min./max.

Warming-up and cooling down speed

Dimensions
DN
U
mm
U1
mm
V
mm
W
mm

200 CF
240
80
350
38,5
200

1 x 10-10 mbar to 1 bar
l x s-1

Differential pressure at the valve disk

Service life until first maintenance

♦ Mechanically locked in the closed state

DN 100 CF

Pressure range, abs.

*)

♦ Compact

Connection dimension for CF flanges
(For dimensions see table “Dimensions of CF Flanges (UHV Gate Valves)”)

Dimensional drawing for the CF gate valves

12

18

28

AlSI 304 (1.4301)
AlSI 316 L (1.4435)
AlSI 304 (1.4301), AlSI 316 L (1.4404) AlSI 301 (1.4310 ), AlSI 420 (1.4034)
metal / Viton

DN 63 CF

DN 100 CF

DN 160 CF

DN 200 CF

Part No. 286 89
Part No. 286 95

Part No. 286 90
Part No. 286 96

Part No. 286 91
Part No. 286 97

Part No. 286 92
Part No. 286 98

Part No. 839 13

Part No. 839 13

2 x Part No. 839 13

2 x Part No. 839 13

For dimensions E x F see table “Dimensions for CF”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C14.33

Vacuum Valves

C14.34

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Ultra-high Vacuum
Components

C15

Flange Components, Valves
and Feedthroughs

Ultra-high Vacuum Components

Contents

General

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.02

Products
CF Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.03
UHV Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.07
Accessories for UHV Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.10
UHV Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.12
UHV Sapphire Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.12
UHV All-Metal Right-Angle Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.13
UHV All-Metal Variable Leak Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.14
UHV Feedthroughs, Mechanical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.15
UHV Feedthroughs, Electric . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.17
Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.19
UHV Liquid Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.21

Introduction
According to DIN 28400, the term “Ultra-high
Vacuum (UHV)” designates the pressure range below
10-7 mbar.
Several physical quantities, such as mean free path,
monolayer time, flow density of the particles impinging on the walls, leak rate and the degassing rate are
of significance in the characterization of this pressure
range. For the definitions of these quantities refer to
technical publications on this subject.
In order to attain or maintain pressures below
10-7 mbar, the following pre-conditions must be met:
♦ The vapor pressure of the pump fluid or lubricant
should be in accordance with the desired ultimate
pressure

♦ the leak and degassing rates of the entire apparatus including its installations must be extremely
low.
Generally, both leak rate and backstreaming effects
through the pump can be kept at sufficiently low
levels by using suitable UHV sealing materials and
pumps.
However, a sufficiently low outgassing rate can only
be achieved by baking out the entire apparatus at
temperatures of about 300 °C for a longer period of
time. It is only under these conditions that the monolayers of atoms or molecules, which attach quite
firmly to the surfaces of the vacuum apparatus
including its installations, are desorbed.

Consequently, components for UHV systems are
generally made of stainless steel. Metal gaskets, ceramic feedthroughs and bakeable observation windows
are used exclusively.
For applications in the extreme UHV range (XHV) the
outgassing rate of the CF flanges and the UHV components can be reduced by about two orders of
magnitude by a special degassing process.
The high standard of development and manufacture
combined with the use of high quality materials guarantee that UHV components from LEYBOLD are able
to meet even the most demanding requirements.

Advantages to the User
♦ Stabilized LEYBOLD knife-edge
♦ High reliability
♦ Special knife edge profiles ensure the highest
degree of leak tightness
♦ Flange connection can be baked out up to
450 °C
♦ Easy to assemble, helium-tight
♦ Symmetrical flange connection

♦ Small outside diameter with respect to the
nominal width
♦ Can be joined by welding or brazing using any
desired process, also with other nickel chromium steel grades
♦ For use either with a flat gasket made of OFHC
copper (oxygen-free) or FPM O-ring
♦ Self-centering
♦ Fixed and rotary flanges in almost any size

♦ Equal sealing profiles

C15.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

CF Flanges

Ultra-high Vacuum Components

CF Flanges
The CF flange connection consists of two identical flanges with a flat gasket made of OFHC
copper, bolts, nuts and washers.

Sealing Principle
When assembling the CF flange connection, the
flat copper gasket fits with a slight clearance into
the outer recess of the flanges and thus assures
good centering of the flange connection. If the
flange bolts are properly tightened according to
the instructions, the knife edge of the flanges
penetrates into the flat copper gasket, whereby
the shear action of the outer face of the cutting
edge – as seen from the flange axis - produces a
yield pressure on the copper gasket, while the
inner face of the edge produces a cutting action.
During this process the copper gasket adapts itself optimally to the microstructure of the outer
knife edge. This explains the high sealing effect

and the especially low leak rates of CF flange
connections. A radial grove extending right up to
the sealing ring is provided for leak testing of the
flange connection. In order to ensure that the
sealing knife edge is not damaged during frequent use of the flanges, the conventional geometry of such knife edges for CF flanges has
been developed further. By using the LEYBOLDdeveloped obtuse angled knife edge profile the
strength of the sealing knife edges has been significantly stabilized. In addition to the actual knife
edge, the flanges are provided with a concentric
sealing surface for placement of a FPM gasket or
a supporting ring with FPM O-ring, which may be
baked up to 150 °C (does not apply to observation windows).

This design has the advantage, that it is possible
to equip the apparatus with elastomer gaskets
prior to final assembly, so that the system can be
tested under normal high vacuum conditions.

h
k

i.D
o.D

Dimensional drawing for CF flanges

Technical D ata
DN
Outside diameter o. D.
Outside diameter o. D.
Inside diameter i. D.
Inside diameter i. D.
Bolt circle diameter k
High h
Number of holes
Hole diameter

Conversion Factors

CF
inch
mm
inch
mm
mm
mm
mm

16
1 5/16"
34
5/8"
16
27
7.5
6
4.3

40
2 3/4"
69.5
1 3/8"
36.8
58.7
13
6
6.6

63
4 1/2"
113.5
2 1/2"
66
92.2
17.5
8
8.4

1. Magnetizing field H, unit:
Previously used unit: Oerstedt (Oe)
2. Strength of the magnetic field B, unit:
Previously used unit: Gauß (G)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

100
6"
152
4"
104
130.3
20
16
8.4

160
8"
202.5
6"
155
181
22
20
8.4

200
10"
253.0
8"
200
231.8
24.5
24
8.4

250
12"
305.0
10"
250
284.0
24.5
32
8.4

A x m-1
1 Oe = 79.577 (A x m-1)
Vs x m2 = Tesla (T)
1 G = 10-4 Vs x m2 = 10-4 T

C15.03

C15

CF Flanges

Ultra-high Vacuum Components

These Arguments Prove LEYBOLD’s QUALITY
◆ The well-proven LEYBOLD geometry for the cutting edges
The stabilized LEYBOLD profile for the cutting edges

Partial view

Diagrammatic view

◆ Forged steel materials of high tensile strength and density
◆ Material quality for standard applications DIN 1.4301 corresponds to AISI 304
◆ Tightly checked, close dimensional tolerances for the entire sealing geometry
◆ Low degassing rates of the tube material used

Advantages
Reliable sealing of UHV connections
over hundreds of
heating cycles
Bolt nut plate

Inner part

Copper gasket

Copper gasket
Nut

C15.04

Fixed CF flange

Bolts

Rotatable
CF flange

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

CF Flanges

Ultra-high Vacuum Components

CF Bore Flanges, Fixed
d1

h1
i.D
Dimensional drawing for the CF bore flanges, fixed

DN
CF
16
Outside diameter
inch
1 5/16"
Inside diameter
mm
16
d1
mm
18.3
h1
mm
4.2
For dimensions not given, see Technical Data
Material
DIN 1.4301
Part No.
835 41

40
2 3/4"
36.8
40.3
5.5

63
4 1/2"
66
70.3
9.5

100
6"
104
108.5
11

160
8"
155
159.5
12

200
10"
200
205.5
12.5

250
12"
250
256.5
12.5

835 37

835 38

835 39

835 40

835 47

835 49

40
2 3/4"
36.8
40.3
41
5.5
7.6

63
4 1/2"
66
70.3
71
9.5
12.6

100
6"
104
108.5
109
11
14.3

160
8"
155
159.5
160
12
15.8

200
10"
200
205.5
206
12.5
17.1

250
12"
250
256.5
257
12.5
18

835 58

835 59

835 60

835 69

835 67

835 78

DN
CF
16
40
Outside diameter
inch
1 5/16"
2 3/4"
Inside diameter
mm
14
38
d
mm
34
69.5
h
mm
7.5
13
For dimensions not given, see Technical Data
Material
DIN 1.4301
Part No.
835 01
835 03

63
4 1/2"
66
113.5
17.5

100
6"
104
152
20

160
8"
155
202.5
22

200
10"
205
253
24.5

250
12"
256
305
24.5

835 04

835 05

835 06

835 07

835 09

63
4 1/2"
66
71
12.6

100
6"
104
109
14.3

160
8"
155
160
15.8

200
10"
205
206
17.1

250
12"
256
257
18

835 24

835 25

835 26

835 27

835 29

CF Bore Flanges, Rotatable
d2
d1
h1 h2
i.D
Dimensional drawing for the CF bore flanges, rotatable

DN
CF
16
Outside diameter
inch
1 5/16"
Inside diameter
mm
16
d1
mm
18.3
d2
mm
18.6
h1
mm
4.2
h2
mm
5.8
For dimensions not given, see Technical Data
Material
DIN 1.4301
Part No.
835 61

CF Blank Flanges, Fixed
d
h

i.D

1,4

Dimensional drawing for the CF blank flanges, fixed

CF Blank Flanges, Rotatable
d1

h1
1,4

i.D

Dimensional drawing for the CF blank flanges, rotatable

DN
CF
16
40
Outside diameter
inch
1 5/16"
2 3/4"
Inside diameter
mm
14
38
d1
mm
18.6
41
h1
mm
5.8
7.6
For dimensions not given, see Technical Data
Material
DIN 1.4301
Part No.
835 21
835 23

CF Flanges with Tube End
i.D

s

h

Dimensional drawing for the CF flanges with tube end; left fixed, right rotatable

DN
CF
16
Outside diameter
inch
1 5/16"
Inside diameter
mm
16
s
mm
1
h
mm
38
For dimensions not given, see Technical Data
Material
Tube end, fixed
DIN 1.4301
Part No.
835 51
Tube end, rotatable
DIN 1.4301
Part No.
835 71

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

40
2 3/4"
36.8
1.6
63

63
4 1/2"
66
2
105

100
6"
104
2
135

160
8"
155
2
167

835 31

835 32

835 33

835 34

835 82

835 74

835 75

835 76

C15.05

C15

CF Flanges

Ultra-high Vacuum Components
CF Reducing Flanges
DN
h

h1
d1

ød

DN1

øk

Dimensional drawing for the CF reducing flanges, fixed

DN
CF
40
Outside diameter
inch
2 3/4"
DN1
CF
16
k
mm
27
h
mm
13
h1
mm
5.5
d
16
d1
M4
For dimensions not given, see Technical Data
Material
DIN 1.4301
Part No.
836 85
Matching stud bolts
Part No.
839 10

63
4 1/2"
40
58.7
17.5
9
39
M6

100
6"
40
58.7
20
9
39
M6

100
6"
63
92.15
20
11
66
M8

160
8"
40
58.7
22
9
39
M6

160
8"
100
130
22
11
104
M8

836 86
839 11

836 87
839 11

836 89
839 13

836 90
839 11

836 91
839 13

CF Reducing Pieces
DN
CF
40
Outside diameter
inch
2 3/4"
DN1
CF
16
h
mm
45
d (tube)
mm
18
For dimensions not given, see Technical Data
Material
DIN 1.4301
Part No.
837 10

DN1

d

h

DN

63
4 1/2"
40
75
40

100
6"
40
75
40

100
6"
63
95
70

160
8"
100
105
108

837 15

837 16

837 19

837 22

Dimensional drawing for the CF reducing pieces

UHV CF/KF Adaptors
DN1

DN
Outside diameter
DN1
d
h
d1 (tube)
Material
DIN 1.4301

d

d1

h

DN

CF
inch
KF
mm
mm
mm

16
1 5/16"
16
16
35
20

16
1 5/16
25
16
35
20

40
2 3/4"
16
16
30
20

40
2 3/4"
25
26
30
30

40
2 3/4"
40
37
50
41

63
4 1/2"
40
41
35
45

Part No.

837 81

837 83

837 82

837 84

837 36

837 86

Dimensional drawing for the CF/KF adapötors

UHV CF/ISO-K Adaptors
DN 1

DN 2

90

DN
Outside diameter
DN1
DN2
Material
DIN 1.4301

CF
inch
ISO-K
mm

63
4 1/2"
63
66

100
6"
100
104

160
8"
160
157

Part No.

837 01

837 02

837 03

DN
Dimensional drawing for the CF/ISO-K adaptors

C15.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

UHV Components

Ultra-high Vacuum Components

UHV Components
UHV components are manufactured according to
the requirements outlined in the introductory
chapter. They are made from selected and corrosion resistant types of stainless steel. Both
design and production methods are such, that
the components meet the requirements of UHV
applications. All components are fusion welded
from the inside to prevent fissures and pocket
holes (virtual leaks which cannot be located by
leak detection methods from the outside). If
welding from the outside cannot be avoided due
to design constraints, the welding seam penetrates to the inner side, the side of the vacuum.

Advantages to the User
♦ Low degassing rates
♦ High degassing temperature
♦ Leak rates below 1 x 10-11 mbar x l x s-1
♦ Basic dimensions correspond to those of the
components from other international manufacturers
♦ Bolts may be inserted from the side of the
body

A carefully implemented cleaning process and
suitable packaging for the components are essential pre-requisites for obtaining pressures in the
UHV range within reasonably short pump down
times after assembly (providing the remainder of
the apparatus is clean too).
For applications in the extreme UHV range (XHV)
the outgassing rate of the CF flanges and the
UHV components can be reduced by about two
orders of magnitude by a special degassing
process.

C15

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C15.07

UHV Components

Ultra-high Vacuum Components

Elbows 90°; from DN 160 CF Pipe Bend

a

DN
CF
Outside diameter
inch
a
mm
For dimensions not given, see Technical Data
Elbow 90° with a rotatable flange
Part No.

16
1 5/16"
38

40
2 3/4"
63

63
4 1/2"
105

100
6"
135

160
8"
167

836 04

836 05

836 06

836 07

836 08

DN
CF
Outside diameter
inch
a
mm
h
mm
For dimensions not given, see Technical Data
Tee with a rotatable flange on each axis Part No.

16
1 5/16"
38
76

40
2 3/4"
63
126

63
4 1/2"
105
210

100
6"
135
270

160
8"
167
334

836 14

836 15

836 16

836 17

836 18

DN
CF
Outside diameter
inch
a
mm
h
mm
For dimensions not given, see Technical Data
Cross with a rotatable flange
on each axis
Part No.

16
1 5/16"
38
76

40
2 3/4"
63
126

63
4 1/2"
105
210

100
6"
135
270

160
8"
167
334

836 34

836 35

836 36

836 37

836 38

a

Dimensional drawing for the 90° elbows/pipe bends

Tees
h

a

a

Dimensional drawing for the tees

Crosses
h

a

a

Dimensional drawing for the crosses

Double Crosses
h

a

DN
Outside diameter
a
h
For dimensions not given, see Technical Data
Double cross with a rotatable flange
on each axis

CF
inch
mm
mm

40
2 3/4"
63
126

63
4 1/2"
105
210

100
6"
135
270

160
8"
167
334

Part No.

836 45

836 46

836 47

836 48

a

Dimensional drawing for the double crosses

C15.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

UHV Components

Ultra-high Vacuum Components

Ceramic Nipples (1 rotatable Flange)
DN

x
h1

d

h2

h

Dimensional drawing for the ceramic nipples

DN
Outside diameter
Breakdown voltage *)
d
h
h1
h2 (length of the ceramic piece)
x (allowed length for the screws)
Caramic nipple with one rotatable flange

CF
inch
kV
mm
mm
mm
mm
mm
Part No.

40
2 3/4"
90
25
70
44
30
35
836 71

63
4 1/2"
140
53
90
55
45
45
836 70

*) With reference to the wall thickness of the ceramic material

Flexible Connecting Components
CF Bellows

h

DN

DN
CF
o. D.
inch
h
mm
CF bellows with one
rotatable flange
Part No.

16
1 5/16"
76 ±1,5

40
2 3/4"
126 ±2

63
1 1/2"
139 ±2

100
6"
142 ±2

160
8"
250 ±3

880 01

880 02

880 03

880 04

880 05

Dimensional drawing for the CF bellows

CF Corrugated Hoses
DN
o. D.
A = length
CF corrugated
hose with one
rotatable flange

CF
inch
mm

16
1 5/16"
250

16
1 5/16"
500

16
1 5/16"
750

16
1 5/16"
1000

40
2 3/4"
250

40
2 3/4"
500

40
2 3/4"
750

40
2 3/4"
1000

Part No.

885 56

885 68

885 65

885 73

885 57

885 69

885 66

885 75

Dimensional drawing for the CF corrugated hoses

Dimensions
DN
B
C
D
E
F
G

CF
mm
mm
mm
mm
mm
mm

16
23
16
15
22.5
70
50

40
46
36.8
40.5
53
130
100

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C15

C15.09

Accessories for UHV Components

Ultra-high Vacuum Components
Compensators
h

DN (both flanges fixed)
Outside diameter
Type
d1 (inside dia.)
hmax.
hmin.
sw
3 joints individually adjustable
Max. angular deviation, approx.
Permissible temperature of the hinges
Bakeout temperature of the bellows without hinges

SW

d1

DN

Dimensional drawing for the compensators

CF
inch
mm
mm
mm
mm

40
2 3/4"
bellows
36.8
130
120
10

63
4 1/2"
bellows
62
150
130
13

100
6"
bellows
92
157
127
13

°C
°C
°C
Part No.

10
200
400
880 11

12
200
400
880 12

12
200
400
880 13

Copper Gaskets for CF Flanges (OFHC Copper – Oxygen-Free)

d1
d

2

DN
Outside diameter
d
d1
Set of 5
Set of 10
Quality
Standard

CF
inch
mm
mm

16
1 5/16"
16.2
21.3
–
x

40
2 3/4"
39
48.1
–
x

63
4 1/2"
63.6
82.4
–
x

100
6"
101.8
120.5
–
x

160
8"
152.6
171.3
–
x

200
10"
203.4
222.1
–
x

250
12"
254
272.7
x
–

Part No.

839 41

839 43

839 44

839 45

839 46

839 47

839 48

CF
inch
mm
°C

16
1 5/16"
16
160
–
x
839 21

40
2 3/4"
42
160
–
x
839 23

63
4 1/2"
69.7
160
x
–
839 34

100
6"
107.8
160
x
–
839 35

160
8"
156
160
x
–
839 36

200
10"
1206
160
x
–
839 37

Dimensional drawing for the copper gaskets

FPM Profiled Gasket without Support Ring
DN 16 CF

DN 40 CF
d

DN 63 - 200 CF

DN
Outside diameter
d
Bakeout temperature
Set of 2
Set of 5

Part No.

d
Dimensional drawing for the profiled gaskets without support ring

FPM O-ring with Support Ring
DN
Outside diameter
d
Bakeout temperature

CF
inch
mm
°C
Part No.

250
12"
248.3
160
839 03

d

Dimensional drawing for the FPM O-rings with support ring

C15.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories for UHV Components

Ultra-high Vacuum Components

Hexagon Bolts, Set for CF Flanges
l

d
Dimensional drawing for the hexagon bolts for CF flanges

DN
Outside diameter
Dimensions (d x l)
Sealing torque 1)
Quantity per set
Bolts
Nuts
Washers
Set
1)

CF
inch
mm
Nm

Part No.

With separating agent

2)

16
1 5/16"
M 4 x 20
4

40
2 3/4"
M 6 x 35
10

63
4 1/2"
M 8 x 45
20

100
6"
M 8 x 50
20

160
8"
M 8 x 55
20

200
10"
M 8 x 60
20

250
12"
M 8 x 60
20

25
25
25
839 00

25
25
25
839 01

25
25
25
838 81

25
25
25
839 04

25
25
25
839 05

25
25
25
839 07

25
25
25
839 07 2)

2 sets are required

Set Screws, Nuts and Washers for CF Flanges

s

l

d

Dimensional drawing for the set screws, nuts and washers for CF flanges

DN
Dimensions (d x l)
s
Torque1)
Quantity per set
Set screws
Nuts
Washers
Set
1)

CF
mm
mm
Nm

Part No.

16
M 4 x 20
2
4

40
M 6 x 35
3
10

63-100
M 8 x 45
4
20

6
6
6
839 10

6
6
6
839 11

16
16
16
839 13

With separating agent

Bolts with Bolt Nut Plate and Washers
DN
Outside diameter
Dimensions (d x l)
A
B
C
Torque 1)

Dimensional drawing for the bolts with bolt nut plate and washers

Quantity per set
Bolts
Bolt nut plate
Washers
Set
1)

CF
inch
mm
mm
mm
mm
Nm

Part No.

16
1 5/16"
M 4 x 20
20
7
4
4

40
2 3/4"
M 6 x 35
35
10
5
10

6
3
6
838 87

6
3
6
838 88

63
4 1/2"
M 8 x 50
45
12
8

100/160
6"/8"
M 8 x 55
55
12
8

20

20

8
4
8
838 89

20
10
20
838 91

With separating agent

Lubricant for Threads
This thread lubricant is preferably applied to
stainless steel joints and is used to prevent bolts
from seizing due to high temperatures or high
mechanical stresses.

Temperature
Lubricant for threads, 28 g tube

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Part No.

C15

up to 1000 °C
839 99

C15.11

UHV Observation Windows

Ultra-high Vacuum Components

UHV Observation Windows
UHV Observation Windows
All UHV observation windows with CF flanges are
of a flat and embedded design (Zero-length
design). This design provides a much wider viewing angle compared to observation windows
manufactured according to a pot-type design.

UHV Sapphire Observation
Windows
The transmission range of sapphire lies between
250 nm and 5500 nm. The infrared limit is shifted far into the infrared range. Therefore these
observation windows are used, for example, in
solar simulation tests, laser experiments, hightemperature plasma research and spectrophotometric measurements.

Advantages to the User
♦ Embedded design

Standard types of glass are normally used for
visual observations, for taking photographs of
experimental details and, among other things, for
pyrometric measurements.

♦ Optically plane-parallel almost up to the
glass/metal seal
♦ Flange offering a wide viewing angle

α
s

Transmissivity [%]

h

d

50

Wavelength [nm]

Optical transmissivity for the UHV observation windows ––––– Sapphire

–– · –– Kodial

- - - - - - Borosilicate

Dimensional drawing for the UHV observation windows

Observation windows
DN
α
s

h

d
50

CF

40

40

63

100

160

Thickness of the glass (s)

mm

3,0

3.0

3.5

6

8.0

Diameter of viewing area (d)

mm

23

38

65

90

135

Viewing angle (α)

°

23

38

57

71

92

Spacing of the glass (h), approx.

mm

10

11

16.4

8

10

Viewing distance

mm

50

50

50

50

50

Wavelength range

nm

250 to 5500

400 to 3000

–

Vacon (compensation ring)

> 80

93 in the visible range

Sapphire

Kodial

Material
Mean transmission ratio

%

Type of glass
Dimensional drawing for the UHV sapphire observation windows

Max. heating rate
Max. bakeout temperature

C15.12

min

5

5

°C

400

400

UHV observation window

Part No.

–

210 112

210 114

210 115

210 116

UHVUHV sapphire observation windows

Part No.

210 122

–

–

–

–

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Valves

Ultra-high Vacuum Components

UHV All-Metal Right-Angle Valves
The all-metal right-angle valves are of a fully welded design. The valve disk may be exchanged
through the side flange.
Due to the selection of suitable materials, the
valve stem need not be lubricated after every
bake-out cycle.
The drive spindle of the valves transfers the motion via a pressure plate onto the sleeve-guided
valve stem carrying the screwed-on valve disk.
The valve disk consists of a copper plate.

Due to the specific properties of copper (ductility)
this design offers great advantages over other
materials: long service life and low closing forces
when operating the valve.
A very high leak tightness achieved, even with a
low closing force.
The compact design offers good operational characteristics also in view of temperature changes,
offers a short flow path and hence improved conductance.

Advantages to the User
♦ Leak rate at the valve seat below
10-11 mbar x l x s-1
♦ Absolutely reliable sealing of valve seat
♦ Simplest operation
♦ No lubrication of the spindle is necessary
after bakeout
♦ Large removable handwheel for easy
operation

UHV All-Metal Right-Angle Valves,
with Rotatable Flanges on Both Sides
DN
Connection flange rotatable

DN

Service life

cycles

Conductance for molecularflow
Pressure, absolute
min.
max.
Mounting orientation

DN
16 CF-R
40 CF-R
63 CF-R

A
88
140
211

B
38
63
105

C
15.5
26
36.4

SW
8
17
22

l/ s

16

40

63

16 CF-R

40 CF-R

63 CF-R

1000
3

bar

4

mm

any

Bake out temperature without handwheel

°C

300

Bake out temperature with handwheel

°C

80

Max. heating and cooling rate

°C/min

4

4

Bellows

stainless steel 1.4541

Housing

stainless steel 1.4301 welded

C15
2

copper

Valve disk seal
Weight

100

1 x 10-11

mbar

Valve disk
Dimensional drawing for the UHV all-metal right-angle valve

38

copper
kg

0.4

2.0

5.0

UHV All-Metal Right-angle Valves

Part No.

289 80

289 81

289 82

Spare valve disk, 2 pieces

Part No.

215 410

215 440

215 470

Spare hand wheel, plastic

Part No.

215 412

215 442

215 472

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C15.13

Valves

Ultra-high Vacuum Components

UHV All-Metal Variable Leak Valves

UHV All-Metal Variable Leak Valves

M5
85,5 (3.37")

DN 40 CF-F
50 (2")

Dimensional drawing for the all-metal variable leak valves

98,2 (3.87")

32,5
(1.28")

DN 16 CF-R

ø46
(1.81")

Connection flanges
Input
Output

DN
DN

Gas flow, min. for
Pure gas

mbar x l x s-1
mbar x l x s-1

10-10
10-9

Gas flow
max.
adjustable, max.

mbar x l x s-1
mbar x l x s-1

600
100

Tightness

mbar x l x s-1

1 x 10-11

Pressure absolute
min.
max.

mbar
bar

1 x 10-10
30

Conductance for molecular flow

l x s-1

0.7

Operating temperature

°C

200

Bakeout temperature

°C

Air

Valve seat
Valve plate

350
copper alloy
sapphire

Housing

stainless steel

Weight

C15.14

16 CF-R
40 CF-R

kg

1.4

UHV All-Metal variable Leak Valve

Part No.

289 90

Spare valve plate

Part No.

289 87

Spare valve seat

Part No.

289 88

Tool kit for valve seat

Part No.

290 97

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Feedthroughs

Ultra-high Vacuum Components

UHV Feedthroughs
UHV feedthroughs are available in a variety of
field-proven designs, specifically:
♦ Linear motion mechanical feedthroughs,
♦ Rotary motion mechanical feedthroughs,

A stainless steel bellows is used to seal off the
UHV linear, rotary and multi-motion feedthroughs
against the atmosphere.

Abbreviations used in connection with feedthroughs:

All feedthroughs can be installed in the vacuum
systems in any orientation.

F Feedthrough
E Electric
L Liquid
N Normal
P Precision
F Frequency
HC Current
HV Voltage
L Linear
R Rotary

Linear Motion Mechanical Feedthroughs
0

50

ø10 -0.1

105,5

183

ø33

77,5

15

M6x10

Dimensional drawing for the FNL 16/25 linear motion feedthrough

Dimensional drawing for the FNL 40/50 linear motion feedthrough

Technical Data and Ordering Information
Feedthrough

FNL 16/25

FNL 40/50

Nominal width

DN

16 CF-R

40 CF-R

Shaft connection

mm

M 4 x 16

M 6 x 10, ∅ 10

bellow

bellow

Feedthrough/seal
Actuator

manually

manually

Travel

mm

25

50

Scale division

mm

5

10

Shaft load
Radial at max. displacement
Axial, against vacuum
Axial, against vatmoshere
Torsion

N
N
N
Nm

20
85
100
0.2

200
140
200
0.5

Tightness

mbar x l x s-1

Pressure absolute
Bakeout temperature
Feedthrough

°C

Weight

kg

Materials exposed to process media
Linear motion feedthrough

Part No.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

1 x 10-10

1 x 10-10

1 x 10-9 mbar – 2 bar

1 x 10-9 mbar – 2 bar

300

300

0.15

0.75

stainless steel

stainless steel

210 250

210 251

C15

C15.15

Feedthroughs

Ultra-high Vacuum Components

Linear Motion Mechanical Feedthroughs
The rotation of the drive knob is translated via a
gearless drive system to the shaft on the vacuum
side. This shaft runs on ball bearings which do
not require any maintenance during the entire
service life.

Dimensional drawing for the FPR 16/5 N rotary feedthrough

Dimensional drawing for the FNR 40/20 N rotary feedthrough

Technical Data and Ordering Information
Feedthrough
Nominal width

DN

Shaft connection

mm

Feedthrough/seal
Transferable torque
Dynamic
Dynamic, at 300 °C
Static

Nm
Nm

FPR 16/5 N

FNR 40/20 N

16 CF-F

40 CF-F

∅4

∅8

bellow

bellow

0.4
0.2

4
2

Nm

0.2

3

Rotational speed

rpm

200

1000

at max. torque

rpm

–

500
–

Scale division

mm

10°

Shaft load
Radial

N

10

60

Axial

N

5

20

1 x 10-10

1 x 10-10

1 x 10-9 mbar – 2 bar

1 x 10-9 mbar – 2 bar

Tightness

mbar x l x s-1

Pressure absolute
Operating temperature

°C

300

300

Bakeout temperature

°C

300

300

Weight

kg

0.3

1.5

stainless steel

stainless steel

210 154

210 155

Materials exposed to process media
Rotary feedthrough

C15.16

Part No.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Feedthroughs

Ultra-high Vacuum Components

Electrical Feedthroughs
The electric UHV feedthroughs comply with the
relevant VDE regulations.
Concerning the air gaps and creepage paths, they
have been designed in accordance with
VDE 0100, i.e. both sides of the feedthrough are
tested under atmospheric pressure conditions.

Technical Note
Dimensional drawing for the FE 40/4 electrical feeedthrough

Dimensional drawing for the FE 40/9 electrical feeedthrough

Dimensional drawing for the FEHC 16/1 electrical feeedthrough

Dimensional drawing for the FEHC 40/1 electrical feeedthrough

All electric specifications of the described voltage
and current feedthroughs are rated in accordance
with overvoltage class 1 and contamination
grade 2.

Dimensional drawing for the FEHC 40/2 electrical feeedthrough

Technical Data and Ordering Information
Feedthrough
Nominal width
Number of feedthroughs
Number of connection pieces
vacuum side (set)
atmospheric side (set)
Voltage per pole 1)
Current per pole 1)
Bakeout temperature
Temperature rise at max. current
Tightness
Pressure absolute
Flange
Conductor
Insulator
Weight
Current feedthrough
Connection piece, vacuum side (set)
Connector, atmospheric side (set)
Connector, atmospheric side, H2O cooled
1)

Local safety regulations must be met

2)

with water-cooling

DN

kV
A
°C
°C/min
mbar x l x s-1

kg
Part No.
Part No.
Part No.
Part No.

FE 40/4
CF 40-F
4

FE 40/9
CF 40-F
9

FEHC 16/1
CF 16-F
1

FEHC 40/1
CF 40-F
1

FEHC 40/2
CF 40-F
2

5
5
1
8

10
10
1
1

1
1
1
250/1000 2)

2
2
4
150

5

5

4

4

stainless steel

stainless steel

copper

copper

0.3
210 310
210 312
210 311
–

0.4
210 313
2x 210 312
2x 210 311
–

2
2
4
150
400
5
1 x 10-10
1 x 10-10 mbar – 2 bar
stainless steel
copper
Al2O3
0.15
210 335
210 337
210 336
–

0.5
210 338
210 340
210 339
210 341

0.45
210 342
210 337
210 336
–

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C15.17

C15

Feedthroughs

Ultra-high Vacuum Components
Electrical Feedthroughs

The electric UHV feedthroughs comply with the
relevant VDE regulations.
Concerning the air gaps and creepage paths, they
have been designed in accordance with
VDE 0100, i.e. both sides of the feedthrough are
tested under atmospheric pressure conditions.

Technical Note
Dimensional drawing for the FEF 16/1 electrical feeedthrough

All electric specifications of the described voltage
and current feedthroughs are rated in accordance
with overvoltage class 1 and contamination
grade 2.

Dimensional drawing for the FEHV 16/1 electrical feeedthrough

Dimensional drawing for the FEHV 40/3 electrical feeedthrough

Technical Data and Ordering Information
Feedthrough
Nominal width

DN

Number of feedthroughs
Voltage
AC, 50 Hz

FEF 16/1
CF 16-F

FEHV 16/1
CF 16-F

FEHV 40/3
CF 40-F

1

1

3

kV

0.35

3.5

3.5

DC

kV

0.5

5.0

5.0

Current

A

3

3

3

Frequency

MHz

150

–

–

Impedance

Ö

50 - 60

–

–

Insulation resistance at 20 °C

Ö

10-10

10-10

10-10

Bakeout temperature
with connector
without connector

°C
°C

50
400

50
400

50
400

5
1 x 10-10

5
1 x 10-10

5
1 x 10-10

1 x 10-8 mbar – 10 bar

1 x 10-8 mbar – 10 bar

1 x 10-8 mbar – 10 bar

stainless steel
Al2O3
0.14
210 404
846 47
BNC
U6 88/U

stainless steel
Al2O3
0.14
210 402
846 47
MHV
U6 932/U

stainless steel
Al2O3
0.5
210 403
846 47
MHV
U6 932/U

Temperature rise at max. current
Tightness

°C/min
mbar x l x s-1

Pressure absolute
Housing, flange, conductor
Feedthrough, seal
Weight
Current feedthrough
Inside plug
Outside plug
1)

kg
Part No.
Part No.

with elastomer seal up to 150 °C

C15.18

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Feedthroughs

Ultrahigh Vacuum Components

Connectors, vacuum side

Dimensional drawing for the connector used on FE 40/4 / FE 40/9

3

6

Dimensional drawing for the connector
used on FE 16/1, FEHC 40/2 and FEHC 16/1

Dimensional drawing for the connector used on FEHC 40/1

8

2,4
12

M3

Dimensional drawing for the connector
used on FEHV 16/1, FEHV 40/3 and FEF 16/1

Technical Data and Ordering Information
Connector for feedthrough
Current max.
Bakeout temperature

FE 40/4 / FE 40/9

FEHC 40/1

FEHV 16/1 / FEHV 40/3
FEF 16/1

A

12

90

1000

3

°C

400

400

400

350

stainless steel

stainless steel

copper

copper

210 312 (set of 5)

210 337 (set of 2

210 340

846 47

Material
Connector, vacuum side

FE 16/1 /
FEHC 40/2 / FEHC 16/1

Part No.

C15

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C15.19

Feedthroughs

Ultrahigh Vacuum Components
Connectors, atmospheric side

25

SW8

53

19,5

ø10

M6

Dimensional drawing for the outside plug
used on FE 16/1, FEHC 40/2 and FEHC 16/1

Dimensional drawing for the outside plug used on FE 40 /4 and FE 40/9

Dimensional drawing for the outside plug used on FEHC 40/1

Technical Data and Ordering Information
Connector for feedthrough

FE 40/4 / FE 40/9

FE 16/1 / FEHC 40/2 / FEHC 16/1

FEHC 40/1

Current max.

A

12

90

250

Not insulated, for use up to

V

50

50

50

Bakeout temperature

°C

Material
Connector, atmospheric side

Part No.

50

150

150

gold-plated brass

silver-plated brass

silver-plated brass

2 x 210 311 (set of 5)

210 336 (set of 2)

210 339

Connectors, atmospheric side, H 2 O cooled

Dimensional drawing for the connector used on FEHC 40/1

Technical Data and Ordering Information
Connector for feedthrough
Current max.
Not insulated, for use up to
Bakeout temperature

FEHC 40/1
A
V

24

°C

120

Material
Connector, atmospheric side, with water-cooling

C15.20

1000

silver-plated brass
Part No.

210 341

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Feedthroughs

Ultrahigh Vacuum Components

UHV Liquid Feedthroughs
Technical Note

The thermally insulated UHV liquid feedthroughs
are used to convey cold or hot gases, liquids or
liquid nitrogen.

The ends of the tubes are long enough that they
may be bent apart so that an UHV compatible
connection can be provided.

Dimensional drawing for the FL 40C/2 UHV liquid feedthrough

Technical Data and Ordering Information
Feedthrough
Nominal width

FL 40C/2
DN

Feedthrough / seal
Connection

welded / brazed
mm

∅8x1

mbar x l x s-1

1 x 10-10

Number of tubes
Tightness

2
10-9 mbar – 10 bar (at 400 °C max. 2 bar)

Pressure absolute
Temperature range

°C

Material
Weight

40 CF-F

-400 – +400
stainless steel

kg
Part No.

0.4
210 276

C15

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C15.21

Ultrahigh Vacuum Components

C15.22

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16

Total Pressure Gauges

Vacuum Gauges and Control Instruments
10-12 – 2 000 mbar (10-12 – 1 500 Torr),
Calibration Service

–1

+1
+3

–6

–4
–2

Total Pressure Gauges

Contents
General
Basic Terms of Vacuum Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.03
Connection Accessories for Small Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.04

Products
Rough Vacuum Gauges, Mechanical Instruments
Bourdon Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.05
Capsule Vacuum Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.06
DIAVAC DV 1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.07

Active Sensors
CTR90/CTR91 CERAVAC Transmitters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TTR 90/TTR 90S THERMOVAC Transmitters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TTR 211/TTR 216 S THERMOVAC Transmitters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PTR 225/PTR 225 S/PTR 237 PENNINGVAC Transmitters . . . . . . . . . . . . . . . . . . . . . . . . .
ITR 90 IONIVAC Transmitter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ITR 100 IONIVAC Transmitter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C16.08
C16.10
C16.12
C16.14
C16.16
C16.18

Connection Cable for Active Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . .

C16.20

Operating Units for Active Sensors
DISPLAY ONE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CENTER ONE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
CENTER TWO / THREE. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
COMBIVAC 2T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C16.22
C16.24
C16.26
C16.28

Operating Units for Passive Sensors
PIEZOVAC PV 20 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.30
MEMBRANOVAC DM 11/DM 12 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.32

Fine Vacuum Gauges
THERMOVAC TM 21/TM 22/TM 23 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.34

High and Ultra High Vacuum Gauges
PENNINGVAC PM 31. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.36
COMBIVAC CM 31/CM 32/CM 33 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.38

Sensors
DI 200/DI 201/DI 2000/DI 2001/DI 2001 rel Linear Pressure Sensors . . . . . . . . . . . . . . . .
Series 200 THERMOVAC Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PR 25/PR 26/PR 27/PR 37 PENNINGVAC Sensors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
IE 414/IE 514 IONIVAC Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Spare Sensors for Older Operating Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C16.40
C16.42
C16.43
C16.44
C16.45

Pressures Switches and Control Instruments
PS 113 A Low Pressure Safety Switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PS 115 Pressure Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SV 110 Switching Amplifier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MR 16/MR 50 Diaphragm Pressure Regulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C16.46
C16.47
C16.48
C16.49

Miscellaneous
LEYBOLD Calibration Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.50

C16.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Total Pressure Gauges

Basic Terms of Vacuum Metrology
Today, the total range of vacuum pressure accessible to measurement extends from atmospheric
pressure (about 1000 mbar (750 Torr)) down to
10-12 mbar/Torr, i.e. it extends over 15 powers of
ten. The instruments used for measuring the pressure within this wide range are called vacuum
gauges. For physical reasons it is not possible to
create a single vacuum sensor through which it
might be possible to perform quantitative measurements within the entire pressure range. Therefore,
a variety of different vacuum gauges are available,
each with their own characteristic measurement
range which commonly extends over several
powers of ten. A difference is made between
direct and indirect pressure measurements. In the
case of direct (or absolute) pressure measurements, the readings obtained through the vacuum
gauge are independent of the type of gas and the
pressure which is to be measured. Common are
so-called mechanical vacuum gauges where the
pressure is determined directly by recording the
force acting on the surface of a diaphragm. In the
case of so-called indirect pressure measurements
the pressure is determined as a function of a
pressure dependant property of the gas (thermal
conductivity, ionization probability, for example).
These properties do not only depend on the pressure, but also on the molar mass of the gases.
For this reason, the pressure readings obtained
through vacuum gauges which rely on indirect
pressure measurements, depend on the type of
gas. The readings usually relate to air or nitrogen
as the measurement gas. For the measurement of
other vapors or gases the corresponding
correction factors must be applied.

Vacuum Gauges where the
Pressure Readings are
Independent of the Type of
Gas (Mechanical Vacuum
Gauges)
BOURDON Vacuum Gauge
The inside of a tube which is bent into a circular
arc (the so-called Bourdon tube) is connected to
the vacuum system. Due to the effect of the
external atmospheric pressure, the end of the
tube bends more or less during the evacuation
process. This actuates the pointer arrangement
which is attached to this point. The corresponding pressure can be read off on a linear scale.
With Bourdon gauges it is possible to roughly
determine pressures between 10 mbar (7.5 Torr)
and atmospheric pressure.

Capsule Vacuum Gauge
This vacuum gauge contains a hermetically
sealed, evacuated, thin-walled diaphragm capsule
which is located within the instrument. As the
vacuum pressure reduces, the capsule bulges.
This movement is transferred via a system of
levers to a pointer and can then be read off as the
pressure on a linear scale.

Diaphragm Vacuum Gauge
In the case of the diaphragm vacuum gauge
which is capable of absolute pressure measurements, a sealed and evacuated vacuum chamber
is separated by a diaphragm from the vacuum
pressure to be measured. This serves as the reference quantity. With increasing evacuation, the
difference between the pressure which is to be
measured and the pressure within the reference
chamber becomes less, causing the diaphragm
flex. This flexure may be transferred by mechanical means like a lever, for example, to a pointer
and scale, or electrically by means of a strain
gauge or a bending bar for conversion into an
electrical measurement signal. The measurement
range of such diaphragm vacuum gauges extends
from 1 mbar (0.75 Torr) to over 2000 mbar
(1500 Torr).

Capacitance Vacuum Gauge
The pressure sensitive diaphragm of these capacitive absolute pressure sensors is made of Al2O3
ceramics. The term “capacitive measurement”
means that a plate capacitor is created by the diaphragm with a fixed electrode behind the diaphragm. When the distance between the two plates of this capacitor changes, a change in capacitance will result. This change, which is proportional to the pressure, is then converted into a corresponding electrical measurement signal. Here
too, an evacuated reference chamber serves as
the reference for the pressure measurements.
With capacitance gauges it is possible to accurately measure pressures from 10-5 mbar/Torr to
well above atmospheric pressure, whereby different capacitance gauges having diaphragms of
different thickness (and therefore sensitivity) will
have to be used.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum Gauges where the
Pressure Readings Depend
of the Type of Gas
Thermal Conductivity Gauge
(Pirani)
This measurement principle utilizes the thermal
conductivity of gases for the purpose of pressure
measurements in the range from 10-4 mbar/Torr
to atmospheric pressure. Today, only the principle of the controlled Pirani gauge is used by
LEYBOLD in order to attain a quick response.
The filament within the gauge head forms one
arm of a Wheatstone bridge. The heating voltage
which is applied to the bridge is controlled in
such a way, that the filament resistance and thus
the temperature of the filament remains constant
regardless of the quantity of heat given off by the
filament. Since the heat transfer from the filament
to the gas increases with increasing pressures,
the voltage across the bridge is a measure of the
pressure.
Improvements with regard to temperature
compensation have resulted in stable pressure
readings also in the face of large temperature
changes, in particular when measuring low
pressures.

Cold Cathode Ionization
Vacuum Gauge (Penning)
Here the pressure is measured through a gas
discharge within a gauge head whereby the gas
discharge is ignited by applying a high tension.
The resulting ion current is output as a signal
which is proportional to the prevailing pressure.
The gas discharge is maintained also at low pressures with the aid of a magnet.
New concepts for the design of such sensors
permit safe and reliable operation of these socalled Penning sensors in the pressure range
from 10-2 to 1 x 10-9 mbar/Torr.

C16.03

C16

Total Pressure Gauges
Hot Cathode Ionization
Vacuum Gauge
These sensors commonly use three electrodes. A
hot cathode emits electrons which impinge on an
anode. The gas, the pressure of which is to be
measured, is thus ionized. The resulting positive
ion current is detected through the third electrode
- the so-called ion detector - and this current is
used as the signal which is proportional to the
pressure.
The hot cathode sensors which are mostly used
today, are based on the Bayard-Alpert principle.
With this electrode arrangement it is possible to

General

Selection of the Right
Vacuum Gauge

make measurements in the pressure range from
10-10 to 10-2 mbar/Torr. Other electrode arrangements permit access to a higher range of pressures from 10-1 mbar/Torr down to 10-10 mbar/Torr.
For the measurement of pressures below
10-10 mbar/Torr so-called extractor ionization
sensors after Redhead are employed. In extractor
ionization gauges the created ions are focused
onto a very thin and short ion detector. Due to
the geometrical arrangement of this system,
interfering influences such as X-ray effects and
ion desorption can be almost completely eliminated. The extractor ionization gauge permits pressure measurements in the range from 10-4 to
10-12 mbar/Torr.

When selecting a suitable instrument for pressure measurements, the pressure range is not
the only critera. The operating conditions for the
instrument play an important part. If, for example, there is the risk of excessive contamination,
vibrations, or if air inrushes are to be expected
etc., the instrument must be rugged enough.
Thus for industrial applications diaphragm gauges, controlled thermal conductivity gauges as
well as cold cathode ionization gauges after
Penning are strongly recommended. Precision
instruments are very often quite sensitive to
rough operating conditions. These should therefore only be used while observing the corresponding applications information.

Connection Accessories for Small Flanges
O rd e r i n g I n f orm ation

DN 10 KF DN 16 KF DN 25 KF
Part No. 183 53

Part No. 183 54

Part No. 883 95 Part No. 883 96

Part No. 883 97

–

Part No. 883 73
Part No. 883 74
Part No. 882 75

Part No. 883 75
Part No. 883 76
Part No. 882 77

–
–

Outer centering ring with O-ring Aluminium / FPM (Viton)
Fine filter on centering ring with O-ring
Stainless steel / FPM (Viton)
Connection accessories for metal seals
or degassing room up to 150 °C
Ultra sealing ring, aluminum (Set of 3)
Outer support ring
Clamping ring
Connection accessories for CF connections
Copper seals, (set of 10 pieces)
Screw (set of 25 pieces)

C16.04

DN 32 KF DN 40 KF DN 16 CF DN 40 CF

–
–

–
–

Part No. 183 55

–

–

Part No. 883 98

–

–

–
–
–

Part No. 883 75
Part No. 883 78
Part No. 882 78

–
–
–

–
–
–

–
–

–
–

Part No. 839 41 Part No. 839 43
Part No. 839 40 Part No. 839 01

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rough Vacuum Gauges

Total Pressure Gauges

Bourdon Vacuum Gauges
Rugged vacuum gauges based on the Bourdon
principle covering the pressure range from 1 to
1020 mbar (0.75 to 765 Torr).

Advantages to the User

Typical Applications

◆ Highly reliable, rugged, insensitive to
vibrations

◆ Vacuum distillation

◆ Excellent media compatibility owing to the
stainless steel movement (BOURDONVAC C)

36

101

50

105

◆ Drying processes

◆ Linear readout, independent of the type of gas

80

◆ For explosion hazard applications

64

◆ Vacuum conveying systems

◆ IP 54 protection (BOURDONVAC C)
◆ Safety gauge which complies with
UW-VBG 61 § 16 (BOURDONVAC C)

135

81

Dimensional drawing for the BOURDONVAC A (top) and the
BOURDONVAC C (bottom)

BOURDONVAC A

Technical D ata

BOURDONVAC C

Measurement range

mbar

1 to 1020

Measurement uncertainty

% FS

1

Overload range (abs. briefly)

bar

1.5

1.3
-25 to +60

Storage temperature range

°C

Nominal temperature range

°C

Flange connection

DN

Length of scale

mm

140

207

Diameter

mm

79

101

Overall height

mm

105

136

0.25 (0.55)

0.6 (1.3)

Nickel plated standard steel, bronze, soft solder

Stainless steel 1.4571

Part No. 160 40

Part No. 161 20

Weight

kg (lbs)

Materials in contact with the medium

Or dering Information

10 to 60

10 to 100 (max.)

C16

16 KF

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.05

Total Pressure Gauges

Rough Vacuum Gauges

Capsule Vacuum Gauges
Rugged absolute pressure gauges for the
pressure range from 1 to 1000 mbar
(0.75 to 765 Torr).

Advantages to the User
◆ Rugged and insensitive to vibrations
◆ Models available for two measurement
ranges (1 to 100 mbar/Torr and
1 to 1000 mbar/Torr)
◆ Readout independent of the type of gas and
changes in atmospheric pressure
◆ Linear pressure readout
◆ Installation direct via the connection flange or
panel mounting
◆ Model with integrated isolation valve for use
on packaging machines (Part No. 160 68)

110

132
68

14,5

10

60
73

116

100

101+1

40
53

◆ Measurement of absolute pressures (for inert
gases only)
◆ Vacuum conveying systems

3,5

92

◆ Operation monitoring

53
4,5

◆ Packaging

13

120°

Typical Applications

Dimensional drawings and panel cut-outs for the capsule vacuum gauges (left) 160 63/64 and 160 68 (right)

Technical D ata

Capsule Vacuum Gauges

Measurement range

mbar

1 to 100

1 to 100

1 to 1000

Measurement uncertainty

% FS

1.0

2.5

1.6

Overload range (abs.)

bar

1.5

Storage temperature range

°C

-25 to +60

Nominal temperature range

°C

10 to 50

Length of scale

mm

205

180

205

Dead volume, approx.

cm3

235

167

235

Diameter

mm

132

110

132

0.7 (1.54)

0.6 (1.32)

0.7 (1.54)

16 KF

10 mm dia. hose nozzle with integrated isolation valve

16 KF

Weight

kg (lbs)

Vacuum connection

DN

Max. inclination when installed
Materials in contact with the medium

Or dering Information

C16.06

45°
Brass, standard steel nickel-plated, glass, NBR, aluminum, copper beryllium, soft and hard solder, resin

Part No. 160 63

Part No. 160 68

Part No. 160 64

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Rough Vacuum Gauges

Total Pressure Gauges

DIAVAC DV 1000
Rugged mechanical diaphragm vacuum gauge of
high accuracy for the rough vacuum range from
1 to 1000 mbar (1 to 750 Torr).

Advantages to the User
◆ Wide measurement range from 1 to
1000 mbar (1 to 750 Torr) with high resolution in the range from 1 to 100 mbar
(1 to 75 Torr)

45°
170
166

203,5

156

152

155

◆ The scale of each gauge is individually calibrated; with factory certificate

4,5

◆ Absolute pressure gauge
180

166

166

◆ Stainless steel diaphragm for excellent compatibility with most media

Dimensional drawing and panel cut-out for the DIAVAC DV 1000

Technical Data
Measurement range

DIAVAC DV 1000
mbar (Torr)

Measurement uncertainty
1 x 10 mbar (Torr) / 10 x1 000 mbar (Torr)
Storage / nominal temperature range
Permissible overload (abs.)
Length of scale / dead volume

◆ Readout independent of the type of gas and
changes in atmospheric pressure

1 to 1 000 (1 to 750)

± 1 mbar (Torr) / ± 10 % of meas. value

°C

-25 to +60 / 0 to 60

bar

3

mm / cm3

270 / 130

◆ Laser welding technology for high precision
diaphragm mount
◆ Rugged table-top housing, can be freely
mounted above the flange connection; also for
panel mounting
◆ Measurement chamber can be easily cleaned
owing to the detachable measurement flange

Typical Applications

Vacuum connection

DN

40 KF

◆ Chemical processes

Dimensions (W x H x D)

mm

180 x 166 x 100

◆ Vacuum distillation

Weight

kg (lbs)

Materials in contact with the medium

Ordering Information

2.7 (5.95)
Stainless steel 1.4301, 1.4310 (diaphragm), FPM

DIAVAC DV 1000

DIAVAC DV 1000, mbar readout

Part No. 160 67 *)

DIAVAC DV 1000, Torr readout

Part No. 896 06 *)

DKD calibration
Replacement sintered filter with DN 40 KF centering ring
Replacement housing, complete

◆ Absolute pressure measurements for
gas mixtures
◆ For use in explosion hazard rated areas
◆ Drying processes
◆ Lamp manufacture

Part No. 157 12
Part No. 231 93 515
Part No. 240 000

*) Complete with centering ring and sintered filter
LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.07

C16

Total Pressure Gauges

Active Sensors

CTR90/CTR91 CERAVAC Transmitters
The CERAVAC Transmitter with its diaphragm
made of pure aluminium oxide ceramics offers
excellent accuracy and reproducibility.

Advantages to the User

Typical Applications

◆ Excellent accuracy

◆ General purpose pressure measurements in
the medium and rough vacuum range, also
for corrosive process gases

◆ Corrosion resistant
◆ High resolution

◆ Chemical process engineering

◆ Very good temperature stability

◆ Semiconductor production processes

◆ Electrically and mechanically compatible with
the conventional capacitance manometers
with stainless steel diaphragm

◆ Suited as a reference sensor for monitoring
test instruments in accordance with
DIN/ISO 9000

◆ Heated and unheated types are available

The Ceramics Diaphragm

reproducible. Since the diaphragm is not impaired by overpressures or frequent pressure changes, no blocking valves will be required – a significant contribution towards reducing costs.

The stiffness of aluminium oxide ceramics is
greater than that of metal so that the ceramics
material will offer improved long term stability
characteristics when exposed to frequent pressure changes or overpressures. For this reason the
aluminium oxide ceramics diaphragm of the
CERAVAC sensors is capable of returning precisely to its initial position with respect to a certain
pressure so that the measurements will be highly

View

View

A

A
CTR91

CTR90

C16.08

Whereas metal diaphragms suffer from residual
tensions and unavoidable irregularities due to
their production process, diaphragms made of
aluminium oxide ceramics are exceptionally
homogeneous, and owing to the firing process at
2500 °C entirely free of tensions. This considerably helps to reduce part to part variations in the
sensors.

A↓

↓ A

Dimensional drawing for the CERAVAC Transmitter CTR90

Moreover, aluminium oxide ceramics diaphragms
return faster to their initial position compared to
metal diaphragms; the time need between the
processes for the measurement to stabilise is
reduced. This is particularly important in the case
of measurements close to Zero where metal

diaphragms will take several minutes to return to
their resting position.

Dimensional drawing for the CERAVAC Transmitter CTR91

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Active Sensors

Technical Data

Total Pressure Gauges

CTR90 (Temperature Compensated)

Full scale (FS)
1000 Torr
0100 Torr
0010 Torr
0001 Torr
000.1 Torr

CTR91 (45 °C Heated)

Measurement range
Measurement range
0.1 - 1000 Torr
0.1 - 1000 Torr
0.01 - 100 Torr
0.01 - 100 Torr
1 · 10-3 - 10 Torr
1 · 10-3 - 10 Torr
1 · 10-4 - 1 Torr
1 · 10-4 - 1 Torr
–
1 · 10-5 - 0.1 Torr
Pressure units: 1 Torr = 1.33 mbar = 133 Pascal

Materials exposed to gases

Ceramic (Al2O3), stainless steel 316, Vacon 70

Max. overrange pressure

1000 Torr for 0.1 Torr sensors, 2000 Torr for 1/10/100 Torr sensors
3000 Torr for 1000 Torr sensors

Measurement uncertainty

0.2% of reading ± temperature effects

Resolution

0.15 % of reading ± temperature effects

0.0025 % of FS for 0.1/1 Torr sensors
0.0015 % of FS for 10/100/1000 Torr sensors

Temperature effects
Zero coefficient
% / °C
% / °C

Span coefficient
Reaction time

ms

Nominal temperature range

°C

Supply voltage

1 Torr sensor
0.015 of FS

10/100/1000 Torr sensor
0.1 Torr sensor
0.005 of FS
0.005 of FS
0.01 of reading
≤ 30
5 to 50

15 to 40

V DC

Current consumption

mA

Signal output
Weight, approx

either ± 15 or +24
23

300

V

0 - 10; linear

0 - 10; linear

kg (lbs)

0.26 (0.57)

0.485 (1.07)

6

7

cm3

Dead volume

1/10/100/1000 Torr sensor
0.0025 of FS

Connection cable

see section “Connection Cable for active Sensors”

Calibration

see section “Miscellaneous”, para. “LEYBOLD Calibration Service”

Part No. 159 – ___ ___ Or dering information

Ordering information
CTR90 (temperature compensated)

Part No. 159 – ___ ___

CTR91 (45 °C heated)

Vacuum fitting
DN KF 16
DN CF 16
Cajon 8 VCR
1/2" tube

2
3
4
5

Measurement range
1000 Torr
100 Torr
10 Torr
1 Torr

1
2
3
4

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Vacuum fitting
DN KF 16
DN CF 16
Cajon 8 VCR
1/2" tube

2
3
4
5

Measurement range
1000 Torr
100 Torr
10 Torr
1 Torr
0.1 Torr

5
6
7
8
9

C16

C16.09

Total Pressure Gauges

Active Sensors

TTR 90/TTR 90 S THERMOVAC Transmitters
The further developed THERMOVAC transmitter
with improved temperature compensation,
reduced size and optimized price-to-performance
ratio.
The value of the trigger point can be switched
easily on the analog output and be shown on the
display of the operating unit.

Advantages to the User

Typical Applications

Sensor

◆ Rugged sensing cells made of stainless steel

◆ Analytical engineering

◆ Compact design

◆ Safety circuits in vacuum systems

◆ Stabile measurements owing to optimized
temperature compensation

◆ Controlling ionization gauges

The highly compact sensing cell is equipped with
two filaments. Whereas one filament is used to
measure the pressure, the second filament serves
the purpose of temperature compensation by
directly detecting the gas temperature.

◆ Highly resistant to overpressures
◆ Exchangeable sensing cells

◆ General pressure measurement and control on
systems in the fine and rough vacuum range
which have the following requirements:
◆ Immediate data transfer to a programmable control/computer via analog interface

◆ Extremely fast response
◆ Upon request also available with integrated
switching relay

◆ Coverage of greater distances between the
point of the measurement and processing
location
◆ Several locations which are to be
monitored continuously
◆ Low voltage supply
◆ Simple, cost and space saving installation
◆ Increased reliability
◆ Simple operation

50

65
28

68.3

U(a)
/ Volt
U(a)
/ Volt

10
9
8

45

Equation
Formel

p = 10

0,778 (U(a) - 6,143)

mbar

7
6
5
4
3

19.4
DN 16 ISO-KF

19.35
41.4

1/2" tube

1/8" NPT

121.6

2
1
0
2
10-4

4 68

10-3

Characteristic of the THERMOVAC Transmitters

C16.10

10-2

10-1
100
Pressure
Druck

101

102 mbar 103

DN 16 CF-R

Dimensional drawing for the TTR 90 / TTR 90S

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Active Sensors

Technical D ata

TTR-Transmitter

Total Pressure Gauges

Order ing Inform a tio n

TTR-Transmitter

5 x 10-4 to 1 000 (3.75 x 10-4 to 750)

Without switching threshold

Measurement uncertainty

15 % in the Range
1 x 10-3 to 100 mbar

TTR 90, DN 16 KF

Part No. 128 10

TTR 90, 1/8" NPT

Part No. 128 11

Principle of measurement

Thermal conductivity acc. to Pirani

TTR 90, DN 16 CF

Part No. 128 12

TTR 90, 1/2" Tube

Part No. 128 13

Display range

mbar (Torr)

Supply voltage

14 to 32 V DC
Hum voltage ≤ 1 Vss

Power consumption

VA

≤1

Storage/nominal temperature range

°C

-20 to +65 / 5 to 60

Max. rel. humidity

% n.c.

Protection class
Weight, approx.

IP 40
kg (lbs)

Sensor

Dead volume, approx.

°C

KF: 80 / CF: 250

cm3

KF: 2 / CF: 10

Materials in contact with the medium

Stainless steel, tungsten, nickel, glass, copper
bar

Signal output (Ra > 10 kΩ)
Measurement signal

mbar (Torr)
ms

Status indicators (only TTR 90 S)

Normally open relay contact
2 x 10-3 to 500 (1.5 x 10-3 to 375)
30 %
50
60 V, 0.5 A DC
Relay contact open
Trigger (active): Green LED

Electrical connection
Cable length, max.

10
0 to 10.3 V
1.9 to 10 V, corresp. 5 x 10-4 to 1 x 103 mbar
1.286 V/decade
Error: ≤ 0.5 V

Status signal
Trigger (only TTR 90 S)
Adjustment range
Hysteresis
Reaction time
Rating
Error status

0.15 (0.34)
Exchangeable sensing cell

Degassing temperature, max

Over-pressure rating, abs.

≤ 80

FCC-68 socket, 8 way with shield
m

With switching threshold
TTR 90 S, DN 16 KF

Part No. 128 20

TTR 90 S, 1/8" NP,

Part No. 128 21

TTR 90 S, DN 16 CF

Part No. 128 22

TTR 90 S, 1/2" Tube

Part No. 128 23

Replacement sensing cell
DN 16 KF

Part No. 128 15

1/8" NPT

Part No. 128 16

DN 16 CF

Part No. 128 17

1/2“ Tube

Part No. 128 18

Calibration
Connecting cable, FCC 68 on both ends,
8 way with shield
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

see section “Miscellaneous”,
para. “LEYBOLD Calibration Service”

Type A
Part No. 124 26
Part No. 230 012
Part No. 124 27
Part No. 124 28
Part No. 124 29
Part No. 124 30
Part No. 124 31
Part No. 124 32

100

C16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.11

Total Pressure Gauges

Active Sensors

TTR 211/TTR 216 S THERMOVAC Transmitters
The THERMOVAC transmitters have been developed especially for integration into vacuum
systems. Being active sensors (pressure to voltage converters) with a well-proven Pirani
sensing cell and new operating and processing
electronics these units offer a measurement
range which spans 5 x 10-4 to 1000 mbar (3.75 x
10-4 to 750 Torr).

Advantages to the User

Typical Applications

Sensor

◆ Rugged Pirani sensing cells also for corrosive
media

◆ Analytical engineering

The well-proven Pirani sensing cells with tungsten filament and a DN 16 KF flange are built into
the TTR 211 THERMOVAC transmitters. The
TTR 216 S transmitter is equipped with a stainless steel sensing cell, with a platinum filament
and an Al2O3 ceramics current feedthrough for
use in connection with corrosive media or where
much water vapor is present. The sensing cells
can be easily exchanged on all transmitters.

◆ Logarithmic signal output (algrithm supplied)
◆ High reproducibility

◆ Safety circuits in vacuum systems
◆ Controlling ionization gauges
◆ Vacuum furnaces

◆ Easily exchangeable sensing cells

◆ General pressure measurement and control on
systems in the fine and rough vacuum range
which have the following requirements:

◆ Switching threshold adjustable over a wide
range (1 x 10-3 to 500 mbar (1 x 10-3 to
375 Torr)) and relay contact
◆ LED indicator for operation and trigger active

◆ Immediate data transfer to a programmable control/computer via analog interface

◆ Easily accessible monitoring connection to
check the measurement signal and the trigger
setting (voltmeter)

◆ Coverage of greater distances between the
point of the measurement and processing
location

◆ High EMI compatibility through screened housing, FCC-68 connector and cables

◆ Several locations which are to be
monitored continuously

◆ Computer interface

◆ Low voltage supply

◆ Field bus: Profibus DP/DeviceNet

◆ Simple, cost and space saving installation

◆ CE mark

◆ Increased reliability

If required, the sensing cell can easily be aligned
at atmospheric pressure and “Zero” pressure
through two potentiometers.
Integration of the transmitter in programmable
control systems is facilitated by the straight
characteristic which may be defined by entering a
simple equation into the computer.
Through the built-in relays it is possible to perform important switching functions directly
through the transmitter without the need of a
programmable control.

◆ Simple operation
◆ Increased requirements concerning electromagnetic compatibility (EMI)

U(a)/Volt

10
9
8

Equation
U(a) = lg (p/mbar) 1.286 + 6.143 Volt

7
6
5
4
3

0
Trigger

92

Characteristic of the TTR 211/216 S

C16.12

121

107
(116)

2
1
0
2
10-4

73

56

7

16
13

4 68

10-3

10-2

10-1

100
Pressure

101

102 mbar 103

DN 16 KF

1/8" NPT

Dimensional drawing for the TTR 211; 216 S in brackets

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Active Sensors

Technical D ata
Display range

TTR Transmitter

mbar (Torr)

5 x 10-4 to 1 000 (3.75 x 10-4 to 750)
20 % in the range 1 x 10-3 to 1 x 10-2 mbar
(0.75 x 10-3 to 0.75 x 10-2 Torr)
15 % in the range 1 x 10-2 to 30 mbar
(0.75 x 10-2 to 22.5 Torr)

Measurement uncertainty

Principle of measurement

Thermal conductivity acc. to Pirani

Supply voltage

14.5 to 36 V DC, typ. 24 V DC
Hum voltage < 2 Vpp

Power consumption

VA

<2

Storage/nominal temperature range

°C

-20 to +70/10 to 50

Max. rel. humidity (climatic class F) % n.c.
Protection class

IP 40

Dimensions (H x W x D)
Weight, approx.

95

mm
kg (lbs)

Inflammability

106 x 73 x 56
0.29 (0.64)
UL 94 - V 2

Sensor

Exchangeable sensing cell

Filament

Tungsten (TTR 211)/platinum (TTR 216)

Vacuum connection

DN

16 KF

Degassing temperature, max

°C

80 at the flange

cm3

11

Dead volume, max.

TTR 211: Aluminum,
nickel-plated steel, Vacon, tungsten, CrNi8020,
glass, epoxy cement;
TTR 216 S: Stainless steel, CrNi,
Al2O3 ceramics, NiFe, Mo, Ni, platinum

Materials in contact with the medium

Over-pressure rating, abs.

TTR 211: 3 bar, TTR 216: 10 bar

Signal output (Ra > 10 kΩ)
Measurement signal

0 to 10.6 V
1.9 to 10 V, corresp. 5 x 10-4 to 1 x 103 mbar
logarithmic divisions 1.286 V/decade
broken filament 10.5 V

Status signal
Trigger
Adjustment range
Hysteresis
Reaction time
Rating
Error status

mbar (Torr)
ms

Status indicators

TTR Transmitter

TTR 211 D, DN 16 KF
Tungsten filament (1 trigger)
DeviceNet interface
Replacement sensing cell

Part No. 896 51

TTR 211 PB, DN 16 KF
Tungsten filament (1 trigger)
Profibus DP interface
Replacement sensing cell

Part No. 896 50

TTR 216 S, DN 16 KF,
Platinum filament (1 trigger)
Replacement sensing cell

Part No. 157 31

TTR 216 D, DN 16 KF
Platinum filament (1 trigger)
DeviceNet interface
Replacement sensing cell

Part No. 896 53

TTR 216 PB, DN 16 KF
Platinum filament (1 trigger)
Profibus PB interface
Replacement sensing cell

Part No. 896 52

Calibration
Connecting cable, FCC 68 on both ends,
8 way with shield
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 157 75

Part No. 157 75

Part No. 157 77

Part No. 157 77

Part No. 157 77
see section “Miscellaneous”,
para. “LEYBOLD Calibration Service”

Type A
Part No. 124 26
Part No. 230 012
Part No. 124 27
Part No. 124 28
Part No. 124 29
Part No. 124 30
Part No. 124 31
Part No. 124 32
Part No. 124 33

n.o./changeover relay contact
1 x 10-3 to 500 (0.75 to 375)
about 30 % of the adjusted pressure
< 50
60 V, 0.5 A DC
contact open in case of broken filament
or supply off

C16

Jack socket (3.5 mm) at which the measurement signal and the trigger setting is available

Electrical connection

Interface
TTR 211 D
TTR 211 PB

Order ing Inform a tio n

Operation (Power): Orange LED
Trigger (active): Green LED

Monitor output (Ra > 100 kΩ)

Cable length, max.

Total Pressure Gauges

FCC-68 socket, 8 way with shield
m

100
DeviceNet
Profibus DP

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.13

Total Pressure Gauges

Active Sensors

PTR 225/PTR 225 S/PTR 237 PENNINGVAC Transmitters
The PENNINGVAC transmitters have been developed especially for integration into systems. Being
active sensors (pressure to voltage converters)
equipped with a rugged cold cathode sensing cell
and matching operating and processing electronics these units offer a wide measurement
range of 1 x 10-9 to 1 x 10-2 mbar (0.75 x 10-9 to
0.75 x 10-2 Torr). The measurement signal may
be transmitted over great distances without
problems.

Advantages to the User

Typical Applications

Sensor

◆ All-metal cold cathode sensors (inverted
Penning)

◆ Evaporation and sputtering systems

Cold cathode sensors based on the well proven
principle of the inverted PENNINGVAC having a
DN 25 KF or DN 40 CF flange are built into the
PENNINGVAC transmitters PTR 225/225 S/237 S.
For degassing of the all-metal sensor with Al2O3
current feedthrough the housing of the transmitter with its electronics as well as the magnet may
easily be removed. The magnet used offers a
closed magnetic field so that its stray field is
negligible. Thus the PTR 225/225 S/237 may also
be installed close to sensitive parts within a
system.

◆ Analytical engineering

◆ High reproducibility

◆ Vacuum furnaces

◆ Good ignition characteristics through the new
design for the electrodes
◆ Low tendency to collect contamination (also
during argon operation) due dropping of the
high voltage after the plasma has been ignited
and through the use of titanium cathodes
◆ Switching threshold adjustable over a wide
range (1 x 10-9 to 1 x 10-3 mbar (0.75 x 10-9
to 0.75 x 10-2 Torr)) and relay contact
(PTR 225 S)
◆ Low stray magnetic field
◆ High EMI compatibility through screened housing, FCC-68 connector and cables

◆ High vacuum systems
◆ General pressure measurement and control on
systems in the fine and rough vacuum range
which have the following requirements:
◆ Immediate data transfer to a programmable control/computer via analog interface
◆ Coverage of greater distances between the
point of the measurement and processing
location
◆ Several locations which are to be
monitored continuously
◆ Low voltage supply

◆ LED indicator for operation

◆ Simple, cost and space saving installation

◆ Logarithmic signal output (algrithm supplied)

◆ Increased reliability (sputtering)

◆ Intelligent interface (in preparation)

◆ Simple operation

◆ CE mark

◆ Increased requirements concerning
electromagnetic compatibility (EMI)

◆ High resistance against sputtering due to
titanium cathode plates

U(a)/Volt

10
9
8

Equation
U(a) = [1.33 * lg (p/mbar) + 12.66] Volt

The anode ring and the titanium cathode plates
may be exchanged easily for quick maintenance
of the sensors should they be contaminated. The
shape of the newly designed cathode plates is
such that they also act as a baffle for the sensors.
Integration of the transmitter in programmable
control systems is facilitated by the straight
characteristic which may be defined by entering a
simple equation into the computer.
Through the built-in relay (PTR 225 S) it is possible to perform important switching functions
directly through the transmitter without the need
of a programmable control.

73

7
6
5
4
3

80

POWER

READY

114
126

2
1
0
2
10-9

Characteristic of the PTR 225/225 S/237

C16.14

12
4 68

10-8

10-7

10-6

10-5
Pressure

10-4

10-3 mbar 10-2

Dimensional drawing for the PTR 225/225 S/237

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Active Sensors

Technical D ata

PTR Transmitter

Total Pressure Gauges

Order ing Inform a tio n

PTR Transmitter

1 x 10-9 to 1 x 10-2 (0.75 x 10-9 to 0.75 x 10-2)

PTR 225, DN 25 KF

Part No. 157 34

Measurement uncertainty

30 % in the range 1 x 10-8 to 1 x 10-4 mbar
(0.75 x 10-8 to 0.75 x 10-4 Torr)

PTR 225 S, DN 25 KF

Part No. 164 34

Cold cathode ionization after Penning

PTR 225 PB, DN 25 KF
Profibus interface

Part No. 896 41

Principle of measurement

PTR 237, DN 40 CF

Part No. 157 36

PTR 237 D, DN 40 CF
DeviceNet interface

Part No. 896 42

Display range

mbar (Torr)

14.5 to 36 V DC typ. 24 V DC
hum voltage < 2 Vpp

Supply voltage
Power consumption

VA

<2

Storage/nominal temperature range

°C

-20 to +70 / 10 to 50

Max. rel. humidity (climatic-class F) % n.c.

IP 40

Protection class
Dimensions (H x W x D)
Weight, approx.

95

mm
kg (lbs)

125 x 80 x 73
0.5 (1.1)
UL 94 - V 2

Inflammability

Detachable for cleaning

Sensor
Vacuum connection

DN

25 KF or 40 CF

Degassing temperature, max.

°C

350 with electronics detached

cm3

21

Dead volume, max.

Stainless steel, CrNi, Al2O3 ceramics, NiFe, Mo,
Cu, Ni, titanium

Materials in contact with the medium
Over-pressure rating (abs.)

bar

see section “Miscellaneous”,
para. “LEYBOLD Calibration Service”

Type A
Part No. 124 26
Part No. 230 012
Part No. 124 27
Part No. 124 28
Part No. 124 29
Part No. 124 30
Part No. 124 31
Part No. 124 32
Part No. 124 33

ON: At U < 2.9 V, or U > 12 V
OFF: At U > 3 V, or U < 7 V
Voltage level
HIGH (typ. 24 V DC)
LOW (0 V)

Status output
Ready to measure
Error (no ignition)
Status indicators

Operation: Orange LED
Ready to measure (ignited): Green LED
Trigger (active): Green LED

Monitor output (Ra > 100 kΩ)

Jack socket (3.5 mm)
at which the trigger setting is available

C16

FCC-68 socket, 8 way with shield

Electrical connection

Interface
PTR 225 PB
PTR 237 D

Connecting cable, FCC 68 on both ends,
8 way with shield
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 240 002

Changeover relay contact
mbar (Torr) 1 x 10-9 to 1 x 10-3 (0.75 x 10-9 to 0.75 x 10-3)
about 30 % of the adjusted pressure
60 V, 0.5 A DC
Contact in its rest position when
“no ignition” / “HT off”

High voltage control input

Cable length, max.

Calibration

Part No. 162 91

0 to 10.6 V
0.66 to 10 V,
corresponds to 1 x 10-9 to 1 x 10-2 mbar
logarithm. divisions 1.333 V/decade

Signal output (Ra > 10 kΩ)
Measurement signal

Trigger (PTR 225 S)
Adjustment range
Hysteresis
Rating
Error status

10

Replacement cathode plates, titanium
(set of 5 pieces)
Replacement anode ring

m

100
Profibus DP
DeviceNot

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.15

Total Pressure Gauges

Active Sensors

ITR 90 IONIVAC Transmitter
The ITR 90 is a new type of combination transmitter. The combination of a hot cathode ionisation sensor after Bayard-Alpert and a Pirani
sensor permits vacuum pressure measurements
on non-ignitable gases and gas mixtures in the
pressure range from 5 x 10-10 to 1000 mbar.
If needed, the pressure can be displayed via the
integrated display.

Advantages to the User

Typical Applications

Sensor

◆ Continuous pressure measurements from
10-10 mbar to atmospheric pressure

◆ Analytical

The sensor of the ITR 90 contains a dual filament
Pirani system as well as a Bayard-Alpert
measurement system.

◆ Controlled switching on and off sequencing
through the integrated double Pirani optimises
the service life of the yttrium coated iridium
cathodes
◆ Compact design
◆ Enclosed, rugged electrode geometry in a
rugged metal housing
◆ Efficient degassing by electron bombardment
◆ Simple fitting of the sensor
◆ Extension for higher degassing temperatures
during the measurements

◆ Evaporation and coating
◆ Vacuum furnaces
◆ General purpose pressure measurements in
the medium and high-vacuum ranges

When using the degassing extension, measurements will be possible also at flange temperatures up to 150 °C.

10
Volt
8
Formel
Equation
7
p = 10(u-7,75)/ 0,75
6
5
4
3
2
1
0 2 468
10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1
Pressure
Druck/mbar
U(a) / Volt

◆ High degree of reproducibility within the typical range for process pressures of 10-2 to
10-8 mbar

100

10 mbar 1000

Characteristic of the ITR 90

◆ Insertable baffle for potentially contaminating
applications and for protection against charged particles.
◆ One signal covering 13 decades
◆ One flange joint for 13 decade
◆ ITR 90 model with built-in display for
stand-alone operation without additional
display components
◆ RS 232 C interface

58 (2.28 )

67 (2.64 )

Top view

153 (6 )

48 (1.89 )

DN 40 CF-R

42 (1.65 )

DN 25 ISO-KF

Dimensional drawing for the ITR 90; dimensions in brackets ( ) are in inch

C16.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Active Sensors

Technical D ata
Display range

ITR-Transmitter

mbar (Torr)

Measurement uncertainty, 10-8 - 10-2 mbar

Reproducibility, 10-8 - 10-2 mbar
Principles of measurement

15 % of the meas. value
5 % of the meas. value

Electron bombardment 3 minutes, max.

Supply voltage

20 to 28 V DC, typ. 24 V DC

Power consumption, max.

W

16

Storage / nominal temperature range

°C

-20 to +70 / 0 to +50

Protection class

IP 30

Weight, approx.
ITR 90, DN 25 KF
ITR 90, DN 40 CF

kg (lbs)
kg (lbs)

Sensor

Order ing Inform a tio n

5 x 10-10 to 1000 (3.75 x 10-10 to 750)

Thermal conductivity after Pirani
Hot cathode ionization vacuum gauge after
Bayard-Alpert

Degas

Total Pressure Gauges

0.285 (0.64)
0.550 (1.24)

ITR 90, DN 25 ISO KF
ITR 90, DN 40 CF-R, rotatable CF flange

Dead volume, max.

°C

150 *)

cm3

24 at DN 25 KF
34 at DN 40 CF

Materials in contact with the medium

Without display
Part No. 120 90
Part No. 120 92

With display
Part No. 120 91
Part No. 120 94

Options
Power supply for IONIVAC transmitter
100 V - 240 V AC / 24 V DC
incl. 5 m connection cable and
5 m RS 232 C cable
Degassing extension (100 mm, approx.)
Baffle

Part No. 121 06
Part No. 127 06
Part No. 121 07

Replacement sensor
IE 90, DN 25 ISO KF **)
IE 90, DN 40 CF-R **)

Part No. 121 02
Part No. 121 03

Calibration

see section “Miscellaneous”,
para. “LEYBOLD Calibration Service”

Connection cable

see section
“Connection Cable for active Sensors”

Fully sealed, exchangeable

Degassing temperature, max.

ITR-Transmitter

Cu, W, Glas, NiFe, Mo, Stainl. steel, Al,
Iridium, Yttrium, NiCr,

Over-pressure rating (abs.)

bar

Signal output (Ra ≥ 10 kΩ)
Measurement signal

2
0 - 10 V,
0.774 - 10 V, 0.75 V pro decade
< 0,5 V

Error signal
Interface

RS 232 C

Electrical connection

15 way Sub-D male connector/
Pin contacts

Cable length, max.

m

100 / 30 at RS 232 C

*) Flange temperature when using the degassing extension

**) including hex. socket screw key

C16
~105

ø40

Dimensional drawing for the degassing extension

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.17

Total Pressure Gauges

Active Sensors

ITR 100 IONIVAC Transmitter
These IONI transmitters have been developed
especially for integration into vacuum systems.
Being active sensors (pressure to voltage converters) with the newly developed wide-range
Bayard-Alpert sensing system, this type of gauge
offers a measurement range which spans
2 x 10-10 to 1 x 10-1 mbar (1.5 x 10-10 to
0.75 x 10-1 Torr) and IP 54 protection.

Advantages to the User

Typical Applications

Sensor

◆ Wide measurement range of 2 x 10-10 to
1 x 10-1 mbar (1.5 x 10-10 to 0.75 x 10-1 Torr)
with a single sensor

◆ Analytical engineering

The wide range Bayard-Alpert sensing system is
mechanically protected by the metal tube which
surrounds it. The rugged arrangement of the
electrodes ensures highly reproducible measurements over the entire range.

◆ High reproducibility of ±10 % of the meas.
value within the process pressure range
◆ Fully encapsulated sensor with a very stable
geometry for the electrodes
◆ Increased service life through dual cathodes –
automatic switchover in case of failure
◆ Long-life iridium cathodes with yttriumoxide
coating
◆ Uninterrupted measurements in the degas
mode through electron bombardment
◆ Easy to exchange sensors with automatic
self-calibration
◆ Switching threshold adjustable over a wide
range (1 x 10-9 to 1 x 10-1 mbar (0.75 x 10-9
to 0.75 x 10-1 Torr)) and relay contact
◆ Standardized measurement and control
signals
◆ 0 to 10 V analog output with selectable
logarithmic/linear characteristic (algrithm
supplied)
◆ Computer interfaces:
– RS 232 C
– Field bus: Profibus DP/DeviceNet
◆ LEDs to indicate operating modes, and for
selfdiagnosis
◆ Rugged IP 54 metal enclosure

◆ Evaporation and coating systems
◆ Vacuum furnaces
◆ General pressure measurement and control on
systems in the fine and rough vacuum range
which have the following requirements:
◆ Immediate data transfer to a programmable control/computer via analog interface
◆ Coverage of greater distances between the
point of the measurement and processing
location
◆ Several locations which are to be
monitored continuously
◆ Low voltage supply
◆ Simple, cost and space saving installation
◆ Increased reliability
◆ Simple operation
◆ Increased requirements concerning electromagnetic compatibility (EMI)

Each sensor is individually calibrated in the
factory. The calibration data is stored in an
EEPROM and is fully integrated into the sensor.
When exchanging the sensor, the electronics of
the transmitter are automatically adjusted to the
connected sensor, so that the specified reproducibility can be guaranteed.
The sensor with a CF flange is equipped with a
welded current feedthrough which enables degassing of the sensor at a temperature of 150 °C
with the electronics in place.
Sensor supply and processing of the measurement data is performed by microprocessor controlled electronics, which require a 24 V power
supply and draw a very low current.
The microcontroller also controls the ITR 100 in
that it monitors the emission, converts and corrects the measurement data (automatic correction of the sensor’s sensitivity, matching of the
unit etc.) and monitoring of the trigger thresholds
for the relay.
The selectable signal output characteristics (linear/logarithmic) as well as the digital computer
interfaces permits easy integration in existing or
future system concepts.
ITR 100 with tungsten filament ia available upon
request.

◆ High EMI compatibility through screened
enclosure, screened sensor and electric interference suppression on all inputs and outputs
◆ CE mark

C16.18

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Total Pressure Gauges

Active Sensors

Technical D ata

mbar (Torr) 2 x 10-10 to 1 x 10-1 (1.5 x 10-10 to 0.75 x 10-1)
Threshold 1 x 10-10 (0.75 x 10-10)

Reproducibility (standard
deviation to DIN 1319-1)

±10 % of the meas. value,
in proc. press. range 1 x 10-7 to 1 x 10-2 mbar

Principle of measurement

Wide range Bayard-Alpert
ionization gauge
Electron bombardment 3 minutes, max.

Degas

5 mA to about 5 x 10-5 mbar
25 µA from about 5 x 10-5 to 1 x 10-1 mbar

Emission current
(automatic switching)

20 to 28 V DC, typ. 24 V DC
Hum voltage < 2 Vpp

Supply voltage
Current consumption

A
A
A

Storage / nominal temperature range

°C

Max. rel. humidity (climatic class F) % n.c.

0.5 in the measurement mode
0.8 in the degassing mode
1.4 during start-up (about 1 s.)
-20 to +70 / 0 to +50

Dimensions (H x W x D)

mm

Weight, approx.
ITR 100, DN 25 KF
ITR 100, DN 40 CF

kg (lbs)
kg (lbs)

ITR 100, DN 40 CF
(RS 232 C interface)
and rotatable CF flange
Replacement sensor IE 100, DN 40 CF

Part No. 163 66

ITR 100, DN 25 KF, with Profibus DP

Part No. 163 70

ITR 100, DN 40 CF, with Profibus DP

Part No. 163 72

ITR 100, DN 25 KF, with DeviceNet

Part No. 163 74

ITR 100, DN 40 CF, with DeviceNet

Part No. 163 75

Part No. 163 61

Part No. 163 67

Calibration

see section “Miscellaneous”,
para. “LEYBOLD Calibration Service”

Connection cable

see section
“Connection Cable for active Sensors”

0.98 (2.2)
1.28 (2.8)

Cathode

2 x yttriumoxide coated
iridium cathode,
capable of withstanding air inrushes,
automatic switch off in case of overpressures

Vacuum connection

DN

25 KF or 40 CF-R

Degassing temperature, max.

°C

80 (DN 25 KF flange), 150 (DN 40 CF flange)

cm3

24 at DN 25 KF
34 at DN 40 CF-R

Dead volume, max.
Materials in contact with the medium

11
10
Equation
Formel
9
U(a) = lg (p/mbar) + 11 Volt
8
7
6
5
4
3
2
1
0 2 4 68
10-10 10-9 10-8 10-7 10-6 10-5 10-4
Pressure
Druck

bar

10-2 mbar 100

168
127

41

2
0 to 10 V, 1 V/decade, logarithm. divisions
or 3 decades selectable out of 9 decades;
linear over 9 decades, mantissa 0.8 to 10 V
with extra output for the exponent:
1 V increments/decade

ms

10-3

Characteristic of the ITR 100

Stainl. steel, yttriumoxide, glass, NiFe, NiCr, tungsten

Signal output (Ra > 10 kΩ)
Measurement signal (selectable)

DN 25 KF
107
DN 40 CF

< 100 (at p > 1 x 10-6 mbar)

189

C16

62

1 normally open relay contact
mbar (Torr) 1 x 10-9 to 1 x 10-1 (0.75 x 10-9 to 0.75 x 10-1)
about 10 % of the value
< 100 (at p > 1 x 10-6 mbar)
ms
60 V, 0.5 A DC

Control input (RE = 11 kΩ)
Programmable control compatible, 24 V logic

Emission: ON/OFF; DEGAS: ON/OFF
Switchover between
measurement signal/trigger level
15 way Sub-D male connector

Electrical connection
Cable length, max.

Part No. 163 60

See dimensional drawing

Fully sealed, exchangeable,
with automatic self-calibration

Trigger
Adjustment range
Hysteresis
Reaction time
Contact rating

ITR 100, DN 25 KF
(RS 232 C interface)
Replacement sensor IE 100, DN 25 KF

95

Sensor

Signal rise time

ITR Transmitter

IP 54

Protection class

Over-pressure rating (abs.)

Order ing Inform a tio n

U(a) / Volt

Display range

ITR Transmitter

m

100 / 30 at RS 232 C

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Dimensional drawing for the ITR 100

C16.19

Total Pressure Gauges

Connection Cable for Active Sensors
Operating Units for Active Sensors
Active Sensors
THERMOVAC
TTR 90, TTR 90S, TTR 211 S, TTR 216 S

DISPLAY ONE

CENTER ONE COMBIVAC IT 23 CAPACITRON DM 21
CENTER TWO COMBIVAC IT 2 CAPACITRON DM 22
CENTER THREE
COMBIVAC CM 33

Bare
wire ends

Type A

Type A

Type A

–

–

PENNINGVAC
PTR 225, PTR 225 S, PTR 237

–

Type A

Type A

–

–

CERAVAC
CTR90, CTR91

–

Type B

Type B

Type D

–

IONIVAC
ITR 90
ITR 100

–
–

Type C
Type C 1)

Type C
Type C

–
–

Type E
Type E

1)

Not in CENTER TWO and THREE

Technical Data

Connection Cable

Cables
Type A
Type B
Type C
Type D
Type E

Ordering Information
Cable lenght
005 m
010 m
015 m
020 m
030 m
040 m
050 m
075 m
100 m
*)

FCC 68 (RJ45) on both ends, 8 way, shielded
Sub-D 15 way female to FCC 68 (RJ45), 8 way, shielded
Sub-D 15 way female to Sub-D 15 way male, shielded
Sub-D 15 way female to MAS 70 S, shielded
Sub-D 15 way female to bare wire ends, shielded

Connection Cable
Type A

Type B

Type C

Type D

Type E

Part No. 124 26
Part No. 230 012
Part No. 124 27
Part No. 124 28
Part No. 124 29
Part No. 124 30
Part No. 124 31
Part No. 124 32
Part No. 124 33

Part No. 230 013
Part No. 230 014
Part No. 230 015
Part No. 230 016
Part No. 230 017
Part No. 230 018
Part No. 230 019
Part No. 230 020
Part No. 230 021

Part No. 124 55
Part No. 230 022
Part No. 124 56
Part No. 124 57
Part No. 124 58
*
*
*
*

Part No. 157 64
Part No. 124 41
Part No. 124 42
Part No. 124 43
Part No. 124 44
Part No. 124 45
Part No. 124 46
Part No. 124 47
Part No. 124 48

Part No. 124 63
Part No. 230 023
Part No. 124 64
Part No. 124 65
Part No. 124 66
Part No. 124 67
Part No. 124 68
Part No. 124 69
Part No. 124 70

Longer cable runs are not specified because of the RS 232 C connection

C16.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Total Pressure Gauges

N otes

C16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.21

Total Pressure Gauges

Operating Units for Active Sensors

DISPLAY ONE
Cost-effective, compact single channel and
display unit for the transmitters from the
THERMOVAC line.

Advantages to the User

Connectable Sensors

◆ Power supply voltage for the transmitters

◆ TTR 211

◆ Two-digit mantissa in the range from 5 x 10-4
to 1 x 103 mbar

◆ TTR 216

◆ Readout selectable between mbar, Torr or
Pascal

◆ TTR 90
◆ TTR 90 S

◆ 0 to 10 V chart recorder output via plug-in
screw terminals
◆ The switching thresholds of the transmitters
have been looped through to plug-in terminals
◆ Transmitter threshold settings can be
displayed by a single key press on the
transmitter
◆ Compact bench top enclosure
(1/4 19 in., 2 HU)
◆ For fitting into 19 in., 3 HU racks

M3 - 3,2 mm

66 78

91,5
105,5

85

106,5

102
170
172,5

Dimensional drawing and panel cut-out for the DISPLAY ONE

C16.22

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Operating Units for Active Sensors

Technical D ata
Number of measurement channels

1
Digital, 7 segment LED

Display for measured values
Display range

DISPLAY ONE

mbar (Torr)

Unit of measurement (selectable)

5 x 10-4 to 1 x 103 (3.8 x 10-4 to 7.5 x 102)
mbar, Torr, Pascal

Switching thresholds

from the transmitter are run to a terminal strip

Chart recorder output (Ra > 2.5 kΩ)

0 - 10 Volt, characteristic corresponds to the
connected transmitter

Main connection
EU version
US version

180 V - 250 V / 50-60 Hz
90 V - 130 V / 50-60 Hz

Total Pressure Gauges

Order ing Inform a tio n
EU version, including mains cord
US version, including mains cord

DISPLAY ONE
Part No. 230 001
Part No. 235 001

THERMOVAC Transmitter
TTR 90, DN 16 KF
TTR 90, 1/8" NPT
TTR 90, DN 16 CF-R
TTR 90, 1/2" Tube
TTR 90 S, DN 16 KF
TTR 90 S, 1/8" NPT
TTR 90 S, DN 16 CF-R
TTR 90 S, 1/2" Tube

Part No. 128 10
Part No. 128 11
Part No. 128 12
Part No. 128 13
Part No. 128 20
Part No. 128 21
Part No. 128 22
Part No. 128 23

Connecting cable, FCC 68 on both ends,
8 way, shielded
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 124 26
Part No. 157 33
Part No. 124 27
Part No. 124 28
Part No. 124 29
Part No. 124 30
Part No. 124 31
Part No. 124 32
Part No. 124 33

Adapter panel for installation in a
3 HU, 19 in. rack

Part No. 230 005

Type A

C16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.23

Total Pressure Gauges

Operating Units for Active Sensors

CENTER ONE
Universal and compact display and operating unit
for operating the active sensors from the
CERAVAC, THERMOVAC, PENNINGVAC and
IONIVAC series.

Advantages to the User

◆ Option of entering gas correction factors

Connectable Sensors

◆ Power supply voltage for the transmitters

◆ Chart recorder output 0 - 10 Volt

◆ THERMOVAC TTR 90, TTR 90 S, TTR 216

◆ Display range from 1 x 10-10 to 1330 mbar

◆ RS 232 C interface with adjustable baud rate

◆ PENNINGVAC PTR 225 and PTR 237

◆ Automatic switchover to exponential readout
of the measured data depending on the
pressure range

◆ Relay output for error signalling

◆ CERAVAC CTR90 and CTR91

◆ Compact bench top enclosure
(1/4 19 in., 2 HU)

◆ IONIVAC ITR 90 and ITR 100

◆ Readout selectable between mbar, Torr or
Pascal

◆ For fitting into 19 in., 3 HU racks

◆ Adjustable switching threshold with variable
hysteresis, floating changeover contact and
visual indication of the switching status on the
display
◆ Zero correction for both display and chart
recorder output through a key when using
CERAVAC transmitters

M3 - 3,2 mm

68 78

85

91,2
105

106,5

204,5
285
287,5

Dimensional drawing and panel cut-out for the CENTER ONE

C16.24

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Operating Units for Active Sensors

Technical D ata

CENTER ONE

Number of measurement channels

1

Display for measured values
Display range

Digital, 7 segment LED, 5 digits
mbar (Torr)

Unit of measurement (selectable)

1 x 10-10 to 1330 (0.75 x 10-10 to 1000)
mbar, Torr, Pascal, Micron

Gas type correction

Factor adjustable

Sensor connection

15 way Sub-D socket FCC68 (RJ45)

Sensor power supply

V DC

Electrical inputs and outputs

24
9 way Sub-D plug

Switching threshold
Number
Adjustment range
Hysteresis
Relay contact
Load rating

1
sensor dependent
adjustable
Floating changeover contact
60 V, 0.5 A DC / 30 V, 0.5 A AC

Error message
Relay contact
Load rating

Floating normally open contact
60 V, 0.5 A DC / 30 V, 0.5 A AC

Chart recorder output (Ra > 10 kΩ)

0 - 10 Volt, characteristic corresponds to
the connected transmitter

Control input

PTR: high voltage on / ITR 100: emission on

Interface RS 232 C
Mains connection
Power consumption
Weight
Protection class

9 way Sub-D socket
V AC / Hz
W
kg (lbs)
IP

85 V - 264 / 50-60
< 30
0.85 (1.9)
30

Total Pressure Gauges

Order ing Inform a tio n
EU version with 2 m EURO mains cord
US-Version with 2 m US mains cord

CENTER ONE
Part No. 230 002
Part No. 235 002

Connecting cable
THERMOVAC and PENNINGVAC
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 124 26
Part No. 230 012
Part No. 124 27
Part No. 124 28
Part No. 124 29
Part No. 124 30
Part No. 124 31
Part No. 124 32
Part No. 124 33

Connecting cable
CERAVAC
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 230 013
Part No. 230 014
Part No. 230 015
Part No. 230 016
Part No. 230 017
Part No. 230 018
Part No. 230 019
Part No. 230 020
Part No. 230 021

Connecting cable
IONIVAC
5m
10 m
15 m
20 m
30 m

Part No. 124 55
Part No. 230 022
Part No. 124 56
Part No. 124 57
Part No. 124 58

Type A

Type B

Type C

Adapter panel for installation in a
3 HU, 19 in. rack

Part No. 230 005

Screw terminal for the 25 way output socket

Part No. 230 006

C16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.25

Total Pressure Gauges

Operating Units for Active Sensors

CENTER TWO / THREE
Universal display and operating units for
operating the active sensors from the CERAVAC,
THERMOVAC, PENNINGVAC and IONIVAC series.
all channels are displayed simultaneously.

Advantages to the User
◆ Power supply voltage for the transmitters

◆ Zero correction for both display and chart
recorder output through a key when using
CERAVAC transmitters

◆ Display range from 1 x 10-10 to 1330 mbar

◆ Option of entering gas correction factors

◆ Automatic switchover to exponential readout
of the measured data depending on the
pressure range

◆ Separate chart recorder outputs 0-10 V for
each measurement channel

◆ Readout selectable between mbar, Torr,
Micron or Pascal
◆ Adjustable switching thresholds with variable
hysteresis, floating changeover contacts and
visual indication of the switching status in the
display, freely assignable to the individual
measurement channels

◆ Additional chart recorder output 0-10 V
programmable to several measurement
channels

Connectable Sensors
◆ THERMOVAC TTR 90, TTR 90 S, TTR 211 S,
TTR 216 S
◆ PENNINGVAC PTR 225 und PTR 237
◆ CERAVAC CTR90 und CTR91
◆ IONIVAC ITR 90

◆ RS 232 C interface with adjustable baud rate
◆ Relay output for error signalling
◆ Compact bench top enclosure
(1/4 19 in., 2 HU)
◆ For fitting into 19 in., 3 HU racks

M3 - 3,2 mm

122,5
128,5
112

91,5
104,5

106,5

206
290
293,5

Dimensional drawing and panel cut-out for the CENTER TWO and THREE

C16.26

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Operating Units for Active Sensors

Technical D ata

CENTER TWO CENTER THREE

Number of measurement channels

2

Display for measured values
Display range

3

Digital, 7 segment LED, 5 digits
mbar

Unit of measurement (selectable)

1 x 10-10 to 1330 (0.75 x 10-10 to 1000)
mbar, Torr, Pascal, Micron

Gas type correction

Factor adjustable

Sensor connection

15 way Sub-D socket FCC68 (RJ45)

Sensor power supply

V DC

Relaisausgänge

24
25 way Sub-D socket

Switching threshold
Number
Adjustment range
Hysteresis
Relay contact
Load rating

independently assignable
4
6
sensor dependent
adjustable
Floating changeover contact
60 V, 0.5 A DC / 30 V, 0.5 A AC

Error message
Relay contact
Load rating

Floating normally open contact
60 V, 0.5 A DC / 30 V, 0.5 A AC

Chart recorder output (Ra > 10 kΩ)

0 - 10 V per measurement channel,
output characteristic corresponds to
the connected sensorr, in addition one
chart recorder output can be programmed

Control input

PENNINGVAC PTR: high voltage on

Interface RS 232 C
Mains connection

9 way Sub-D socket
V AC / Hz

Power consumption

W

Nominal temperature range

°C

Weight
Protection class

kg (lbs)
IP

90 - 250 / 50 - 60
< 45

< 65
+ 5 to + 50

1.1 (2.43)

1.2 (2.65)

Total Pressure Gauges

Order ing Inform a tio n CENTER TWO CENTER THREE
EU-Version with 2 m EURO mains cord
US-Version with 2 m US mains cord

Part No. 230 004 Part No. 230 003
Part No. 235 004 Part No. 235 003

Connecting cable
THERMOVAC and PENNINGVAC
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 124 26
Part No. 230 012
Part No. 124 27
Part No. 124 28
Part No. 124 29
Part No. 124 30
Part No. 124 31
Part No. 124 32
Part No. 124 33

Connecting cable
CERAVAC
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 230 013
Part No. 230 014
Part No. 230 015
Part No. 230 016
Part No. 230 017
Part No. 230 018
Part No. 230 019
Part No. 230 020
Part No. 230 021

Connecting cable
IONIVAC
5m
10 m
15 m
20 m
30 m

Part No. 124 55
Part No. 230 022
Part No. 124 56
Part No. 124 57
Part No. 124 58

Screwed connection for
9 way Sub-D socket

Part No. 230 006

Type A

Type B

Type C

20

C16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.27

Total Pressure Gauges

Operating Units for Active Sensors

COMBIVAC 2T
The COMBIVAC 2T covers through its combination of up to two transmitter types the entire
range of vacuum pressures from 10-10 mbar to
2000 bar.
Moreover, the unit offers a manually or pressure
controlled switching function to START and STOP
the high-vacuum pumps from the TW line.
The pump status “normal operation”, “run-up”,
“standby” and “fail” is indicated on the display.

Advantages to the User
◆ Wide measurement and display range from
2 000 to 1 x 10-10 mbar (1500 to 0.75 x
10-10 Torr) by combinating two transmitters
max. with automatic switchover of the display
◆ Analog baragraph display runs simultaneously
with digital readouts
◆ Three adjustable thresholds with relay
contacts and adjustable hysteresis, assignable
to each channel

◆ Separate 0 to 10 V chart recorder outputs for
each measurement channel
◆ Additional 0 to 10 V chart recorder output,
programmable for coverage of several
measurement channels

Connectable Sensors
◆ THERMOVAC TTR 90, TTR 90S, TTR 216
◆ PENNINGVAC PTR 225 and PTR 237
◆ IONIVAC ITR 90 and ITR 100

◆ Full remote control via RS 232 C interface

◆ DI 200 and DI 2000

◆ Compact bench-top unit (1/4 19 in., 3 HU)
which can also be installed in panel cutouts
and 19 in. racks

Typical Applications
◆ General pressure measurements on high
vacuum pump systems

◆ CE mark

◆ Userfriendly adjustment to each application,
e. g. by
- selectable measurement unit
- automatic switch on of emission with
IONI transmitter
- automatic switch on of the ignition voltage
with the Penning transmitter

◆ Vacuum furnaces
◆ Coating systems
◆ Analytical instruments

Measurement channel

TW Pump

1

Series TW 70
or
Series TW 300
or
Series TW 700

2

TTR
or
PTR
or
DI

3

ITR

Connectable transmitters COMBIVAC 2T

C16.28

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Operating Units for Active Sensors

Technical D ata

2T

Number of measurement channels

2

Measurement display (backlit)

digital, 7-segments LCD
analog LCD-bargraph
display can be switched over by hand
or automatically to the connected sensors

Display range

mbar (Torr)

2 000 to 2 x 10-10 (1500 to 1.5 x 10-10)

Connectable transmitters with
display range
DI 200
DI 2000
TTR 90
PTR 225
ITR 90
ITR 100

mbar (Torr)
mbar (Torr)
mbar (Torr)
mbar (Torr)
mba (Torr)r
mbar (Torr)

1 to 200 (0.75 to 150)
1 to 2000 (0.75 to 1500)
5 x 10-4 to 1000 (3.75 x 10-4 to 750)
1 x 10-9 to 1 x 10-2 (0.75 x 10-9 to 0.75 x 10-2)
5 x 10-10 to 1000 (3.75 x 10-10 to 750)
1 x 10-10 to 1x 10-1 (0.75 x 10-10 to 0.75 x 10-1)

Unit of measurement (selectable)

mbar, Torr, Pascal, Micron

Type of gas (selectable)

Air, Ar, N2 (only ITR 100)

Switching thresholds
adjustment range
hysteresis
relay contact
capacity

3, independently assignable
according to the assigned sensor
adjustable
potential free changeover contact
60 V, 0.5 A DC

Ready indication

1 relay contact 60 V, 0.5 A DC
for all channels

Chart recorder output (Ra> 10 kΩ)

4,
each 0 to 10 V per channel:
initial characteristics dependent on
connected transmitters
one 0 to 10 V analog output per one or
several linear or logarithmic channels

Electric outputs

Order ing Inform a tio n
COMBIVAC 2T, 90 - 250 V AC
Calibration

2T
Part No. 230 000
see section “Miscellaneous”,
para. “LEYBOLD Calibration Service”

Connecting cable
THERMOVAC and PENNINGVAC
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 124 26
Part No. 230 012
Part No. 124 27
Part No. 124 28
Part No. 124 29
Part No. 124 30
Part No. 124 31
Part No. 124 32
Part No. 124 33

Connecting cable
IONIVAC
5m
10 m
15 m
20 m
30 m

Part No. 124 55
Part No. 230 022
Part No. 124 56
Part No. 124 57
Part No. 124 58

Connecting cable DI-Sensor IT23, 5 m

Part No. 163 84

Connecting cable
TW 70, TW 300 and TW 700
5m
10 m
15 m
20 m

Part No. 230 007
Part No. 230 008
Part No. 230 009
Part No. 230 010

Type A

Type C

relay contacts and chart recorder outputs
over 25 pin Sub-D-socket

Interface

RS 232 C

Main supply

90 - 250 V AC

Power consumption

VA

40

Nominal temperature range

°C

0 to 50

Max. rel. humidity

% n. c.

85

Weight

kg (lbs)

1.5 (3.31)

Dimensions (W x H x D)

Total Pressure Gauges

mm

C16

106.5 x 128.5 x 240

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.29

Total Pressure Gauges

Operating Units for Passive Sensors

PIEZOVAC PV 20
This complete vacuum gauge offers accurate and
cost-effective measurements in the range
between 1 and 2000 mbar (0.75 and 1500 Torr)
or 0.1 and 200 mbar (0.075 and 150 Torr).

Advantages to the User

Typical Applications

Sensors

◆ Complete instrument: Sensor and sensor
cable included

◆ General pressure measurements in the fine
and rough vacuum range, in connection with
vacuum furnaces and analytical instruments

The PIEZOVAC PV 20 is delivered complete with
a DI 2000 or DI 200 sensor. The sensor is supplied fully aligned for operation.

◆ Monitoring the operation of backing pumps
and vacuum systems

For information on the THERMOVAC sensors, see
the chapter “Sensors”.

◆ Dual LCD display – combines the advantages
of analog and digital readouts
◆ Clear display of pressure and operating status
with analog trend indication, can also be read
from a great distance.

◆ Replacement of mercury manometers in the
lab and in production lines

◆ Logarithmic/linear 0 to 10 V chart recorder
output
◆ Compact bench-top unit (1/4 19 in., 3 HU),
which may also be installed in panel cut-outs
and 19 in. racks

M3 - 3,2 mm

122,5
128,5
112

◆ Ceramic absolute pressure sensor which is
highly corrosion resistant
◆ THERMOVAC or absolute pressure sensors
may be alternatively connected
◆ CE mark

91,5

106,5

104,5

172
255
258,5

Dimensional drawing and panel cut-out for the PIEZOVAC PV 20

C16.30

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Operating Units for Passive Sensors

Technical D ata
Display range

PIEZOVAC PV 20

mbar (Torr)

0.1 to 2 000 (0.075 to 1500)
Digital: 7-segment LCD,
Analog: LCD bar

Display

Measurement uncertainty
with DI 200/201/2000 Sensor

% FS

0.2
mbar, Torr, Pa, Micron

Unit of measurement (selectable)

0 to 10 V, linear divisions for
absolute pressure sensors,
about 10.5 V during faults
0 to 10 V, logarithmic divisions for
THERMOVAC sensors (1.67 V/decade)

Chart recorder output (Ra > 2,5 kΩ)

V

90 to 130 / 180 to 250

Power consumption

VA

9

Storage temperature range

°C

-40 to +60

Nominal temperature range

°C

0 to 40

Main connection 50/60 Hz (selectable)

Max. rel. humidity
Weight, approx.
Dimensions (W x H x D)
Cable length, max.
Connectable sensors

% n.c.

80

kg (lbs)

2 (4.4)

mm
m

Total Pressure Gauges

Order ing Inform a tio n
Complete with 2 m long main cord
DI 2000 sensor,
with 5 m long cable, 230 V AC,
measurement range 1 - 2 000 mbar
(0.75 - 1500 Torr)
Complete with 2 m long main cord
DI 200 sensor,
with 5 m long sensor cable, 230 V AC,
measurement range 0.1 - 200 mbar
(0.075 - 150 Torr)
Calibration

Options
19" installation frame
1/4 19" blank panel

PIEZOVAC PV 20
Part No. 157 96

Part No. 157 97

see section “Miscellaneous”,
para. “LEYBOLD Calibration Service”

Part No. 161 00
Part No. 161 02

106.5 x 128.5 x 172
100
TR 211/212/216, DI 200/201/2000/2001

C16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.31

Total Pressure Gauges

Operating Units for Passive Sensors

MEMBRANOVAC DM 11/DM 12
Compact general purpose measurement and
control instruments for absolute, relative and
differential pressure measurements, measurements in the vacuum and over-pressure ranges,
with a wide measurement and display range.

Advantages to the User

Typical Applications

Sensors

◆ Illuminated dual LCD display combining the
advantages of analog and digital readouts

◆ General pressure measurement and control in
the rough and fine vacuum ranges, in connection with vacuum furnaces

These operating units have been universally
designed to accommodate the capacitive
pressure sensors DI 200, DI 201, DI 2000,
DI 2001 and DI 2001 rel are equipped with a
ceramic diaphragm (see chapter “Sensors”).

◆ Clear display of pressure and operating status
with analog trend indication, can also be read
from a great distance
◆ Simple trend indication through analog bargraph
◆ Locking of the keypad via softlock keylock

◆ Measurement of operating and filling pressure
during the production of lamps

Moreover, the thermal conductivity sensors from
the THERMOVAC series TR 300 can be connected
(see chapter “Sensors”).

◆ Vacuum packaging
◆ Chemical process engineering
◆ Drying processes

◆ Two adjustable switching thresholds with
relay contacts per measurement channel; can
also be operated as a three-position controller
◆ Logarithmic/linear 0 to 10 V chart recorder
output

M3 - 3,2 mm

◆ Full remote control via RS 232 C interface
122,5
128,5
112

◆ Compact bench-top unit (1/4 19 in., 3 HU),
which may also be installed in panel cut-outs
and 19 in. racks
◆ Wide measurement and display range, freely
adjustable from -1000 mbar up to 20 bar
depending on the type of pressure sensor
delivering an output signal of 4 to 20 mA

91,5

106,5

104,5

282
350
353,5

Dimensional drawing and panel cut-out for the MEMBRANOVAC DM 11/DM 12

◆ Universal connection for linear absolute, relative and differential pressure sensors with a
typical 24 V supply voltage requirement and a
measurement signal output of 4 to 20 mA
(2 wire connection)
◆ THERMOVAC sensors (TR 300 series) can be
connected for measurements in the fine
vacuum range
◆ Single or two channel instrument with
automatic channel switching
◆ CE mark

C16.32

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Operating Units for Passive Sensors

Technical D ata
Number of measurement channels
Display range

mbar (Torr)

Display (backlit)

DM 11

DM 12

1

2

-1 000 to +20 000 (-750 to +15 000),
freely adjustable for linear sensors,
10-3 to 1 000 (10-3 to 750) for THERMOVAC
Digital: 7 segment LCD, analog: LCD bar graph

Unit of measurement (selectable)

mbar, Torr, Pa, Micron

Display rate

4x

s-1

Type of gas (selectable)

Linear sensors independent of the type of gas,
THERMOVAC sensors air/argon

Switching thresholds
Operating mode
Adjustment range

2 floating changeover contacts per channel
single/interval/3 position controller
Linear sensors: Sensor range,
THERMOVAC sensors: 1 x 10-3 to 500 mbar
(0.75 x 10-3 to 375 Torr)
0.1 to 9.9 % of sensor fullscale
< 50

Hysteresis (adjustable)
Reaction time

ms

Ready relay

Floating contact,
Closed when ready

Rating of the relay contacts

AC 240 V/5 A, DC 60 V/0.7 A
> 6 x 104 cycles

Contact life at 5 A
Chart recorder output (Ra < 2.5 kΩ)

1 x per measurement channel,
0 to 10 V linear for linear sensors,
0 to 10 V logarithmic for
TM sensors, about 10.5 V in case of a fault

Control signal for external setting of the
reference pressure for 3 position control

V

Interface

0 to 10
RS 232 C

Main connection 50/60 Hz (selectable)

V

100/120/200/230 V +10/-15 %

Power consumption

VA

25

Storage temperature range

°C

-20 to +60

Nominal temperature range

°C

0 to 40

Max. rel. humidity
Weight, approx.
Dimensions (W x H x D)
Sensor supply

Sensors
(see chapter “Sensors”)

% n.c.

80

kg (lbs)

2.1 (4.6)

mm

Total Pressure Gauges

Order ing Inform a tio n

DM 11

DM 12

MEMBRANOVAC DM 11 (single channel)
Euro model, with 2 m long main cord,
mbar readout, 230 V AC
US model, with 2 m long main cord,
Torr readout, 120 V AC

Part No. 157 91

–

Part No. 896 91

–

MEMBRANOVAC DM 12 (two-channel)
Euro model, with 2 m long main cord,
mbar readout, 230 V AC
US model, with 2 m long main cord,
Torr readout, 120 V AC

–

Part No. 157 92

–

Part No. 896 92

Calibration
Options
19" installation frame
1/4 19" blank panel
Linear pressure sensors
DI 200, 0.1 - 200 mbar
(0.075 - 150 Torr)
(incl. 5 m long connection cable)
DI 201, 0.1 - 200 mbar
(0.075 - 150 Torr)
(incl. 5 m long connection cable)
DI 2000, 1 - 2000 mbar
(0.75 - 1500 Torr)
(incl. 5 m long connection cable)
DI 2001, 1 - 2000 mbar
(0.75 - 1500 Torr)
(incl. 5 m long connection cable)
DI 2001 rel, -1000 – +1000 mbar
(-750 - +750 Torr)
(incl. 5 m long connection cable)

see section “Miscellaneous”,
para. “LEYBOLD Calibration Service”
Part No. 161 00
Part No. 161 02

Part No. 158 12

Part No. 158 14

Part No. 158 13

Part No. 158 15

Part No. 245 000

THERMOVAC sensors *)
TR 301, tungsten filament
Connection cable for TR 301/306,
05 m long
10 m long
15 m long
20 m long
30 m long
40 m long
50 m long

Part No. 157 40
Part No. 157 63
Part No. 124 71
Part No. 124 72
Part No. 124 73
Part No. 124 74
Part No. 124 75
Part No. 124 76

C16

106.5 x 128.5 x 282
24 to 30 V DC,
Signal current 4 to 20 mA or 8 to 48 mA
for THERMOVAC sensors
DI 200/201/2000/2001/2001 rel,
THERMOVAC TR 301/306,
all common sensors on the market having a
supply voltage requirement of 24 V and
a measurement signal of 4 to 20 mA
*) to be discontinued

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.33

Total Pressure Gauges

Fine Vacuum Gauges

THERMOVAC TM 21/TM 22/TM 23
Instruments for operating thermal conductivity
sensors (PIRANI gauges) covering a measuring
range of 5 x 10-4 to 1000 mbar (5 x 10-4 to
750 Torr). The relays built into the TM 21/
TM 22/TM 23 make these instruments the ideal
choice for process control systems.

Advantages to the User

Typical Applications

Sensors

◆ One, two or three continuously operating
measurement channels, with selectable
display

◆ General purpose pressure measurement and
control in the fine and rough vacuum ranges,
vacuum furnaces and analytical instruments

Either the TR 211/TR 212 and TR 216 (corrosion
protected) may be connected to the THERMOVAC
TM 21/TM 22/TM 23 (see chapter “Sensors”).

◆ Dual LCD display combines the advantages of
analog and digital readouts

◆ Monitoring the operation of backing pumps
and vacuum systems

Upon delivery the sensors are supplied fully aligned and ready for operation.

◆ Clear display of pressure and operating status
with analog trend indication, can also be read
from a great distance

◆ Safety circuits in vacuum systems
◆ Control of ionization vacuum gauges

◆ Aligned and temperature compensated
sensors having a low filament temperature
◆ Simple to operate
◆ Cost-effective sensing cell replacements

M3 - 3,2 mm

◆ Fault indication in case of a broken filament
◆ Two adjustable switching thresholds with
relay contacts per measurement channel )

122,5
128,5
112

◆ Logarithmic/linear 0 to 10 V chart recorder
output
◆ Compact bench-top unit (1/4 19 in., 3 HU),
which may also be installed in panel cut-outs
and 19 in. racks
◆ Pirani principle

91,5

106,5

104,5

282
350
353,5

Dimensional drawing and panel cut-out for the THERMOVAC TM 21/TM 22/TM 23

◆ Full remote control via RS 232 C interface
(TM 21/TM 22)
◆ Locking of the keypad via softlock keylock
(TM 21/TM 22/TM 23)
◆ CE mark

C16.34

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Total Pressure Gauges

Fine Vacuum Gauges

Technical Data

TM 21

Number of measurement channels
Display range

1

TM 22

TM 23

2

3

5 x 10-4 to 1000 (3.75 x 10-4 to 750)

mbar (Torr)

Unit of measurement (selectable)

mbar, Torr, Pa, Micron

Display

Digital, 7 segment-LCD, analog, LCD bar graph

Type of gas (selectable)

Air, N2, Ar

Measurement uncertainty with THERMOVAC sensors
(after warming up)
Switching thresholdskte
Adjustment range for the switching

≤ 20 % of the meas. value in the range 10-3 to 10-2 mbar, ≤ 15 % v. of the meas. value in the range 10-2 to 102 mbar
2 floating changeover contacts per measurement channel
5 x 10-3 to 500 (3.75 x 10-3 to 375)

mbar (Torr)

Ready relay

Contact closed when ready

Rating of the relay contacts

AC 240 V/5 A (resistive load) / DC 60 V/0.7 A (resistive load)
≥ 6 x 104 cycles

Contact life at 5 A
Chart recorder output (Ra > 2.5 kΩ)

0 to 10 V, selectable: logarithmic/linear; logarithmic divisions: 1.67 V/decade,
linearly adjustable over 3 decades; 0 V corresponds to 10-3 mbar, 10.5 V for faults

Main connection 50/60 Hz (selectable)

V

100/120/200/230, +10/-15 %

Power consumption

VA

Storage temperature range

°C

-40 to +60

Nominal temperature range

°C

0 to 40

Max. rel. humidity
Weight, approx.

12

14

% n.c.

80

kg (lbs)

2 (4.4)

Dimensions (W x H x D)
Cable length, max.

mm

106.5 x 128.5 x 282

m

100

Interface

Ordering Information

RS 232 C

–

TM 21

TM 22

TM 23

Euro model, with 2 m long main cord,
mbar readout, 230 V AC

Part No. 157 83

Part No. 157 84

Part No. 157 98

US model, with 2 m long main cord,
Torr readout, 120 V AC

Part No. 896 83

Part No. 896 84

Part No. 896 98

Calibration

see section “Miscellaneous”, para. “LEYBOLD Calibration Service”

Options
19" installation frame
1/4 19" blank panel

Part No. 161 00
Part No. 161 02

THERMOVACsensors
TR 211, DN 16 KF
TR 211, 1/8" NPT
TR 212, DN 16 KF
TR 212, DN 16 CF
TR 216, DN 16 KF

Part No. 157 85
Part No. 896 33
Part No. 158 52
Part No. 158 86
Part No. 157 87

Connection cables
05 m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 162 26
Part No. 162 27
Part No. 124 34
Part No. 162 28
Part No. 124 35
Part No. 124 36
Part No. 124 37
Part No. 124 38
Part No. 124 39

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16

C16.35

Total Pressure Gauges

High and Ultra High Vacuum Gauges

PENNINGVAC PM 31
The PENNINGVAC PM 31 offers reliable
measurements as well as monitoring and control
functions in the vacuum range between 10-9 and
10-2 mbar/Torr.

Advantages to the User

Typical Applications

Sensors

◆ Illuminated dual LCD display combining the
advantages of analog and digital readouts

◆ Pressure measurements on pump systems,
for example:
– Diffusion pump systems
– Turbomolecular pump systems
– Cryo pump systems

Sensors PR 25, PR 26, PR 27 or PR 37 may be
connected to the PENNINGVAC PM 31
For information, see the chapter “Sensors”.

◆ Clear display of pressure and operating status
with analog trend indication, can also be read
from a great distance
◆ Locking of the keypad via softlock keylock
◆ Two adjustable switching thresholds with
relay contact
◆ Logarithmic/linear 0 to 10 V chart recorder
output

◆ Pressure measurements in the high vacuum
range, for example on vacuum melting,
soldering and annealing furnaces
◆ Analytical instruments
◆ Coating systems

◆ Easy to operate
◆ All-metal sensor with ceramics feedthrough

M3 - 3,2 mm

◆ Compact, rugged Penning gauge which is
capable of withstanding operation at high
pressures
◆ Principle of measurement based on cold
cathode ionization, thus no gas is emitted by
hot electrodes
◆ Cost-effective replacement cathodes
◆ Fault indication in the event of a broken cable
of failed discharge

122,5
128,5
112

91,5

106,5

104,5

282
350
353,5

Dimensional drawing and panel cut-out for the PENNINGVAC PM 31

◆ Compact bench-top unit (1/4 19 in., 3 HU),
with metal enclosure which may also be
installed in panel cut-outs and 19 in. racks
◆ Full remote control via RS 232 C interface
◆ CE mark

C16.36

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

High and Ultra High Vacuum Gauges

Technical D ata
Display range 1)

PENNINGVAC PM 31

mbar (Torr)

1 x 10-9 to 10-2 (0.75 x 10-9 to 10-2)
mbar, Torr, Pa, Micron

Unit of measurement (selectable)

± 30 % of the meas. value
in the range 1 x 10-8 to 10-4 mbar
(0.75 x 10-8 to 10-4 Torr)

Measurement uncertainty

digital, 7 segment LCD, analog, LCD bargraph
with logarithmic divisions

Measurement display (illuminated)

Air, N2, Ar

Type of gas (selectable)

2 floating changeover contacts
single, interval
1 x 10-8 to 9.9 x 10-3
mbar (Torr)
(0.75 x 10-8 to 7.4 x 10-3)
standard 10 % of trigger value, free adjustable
Hysteresis for the switching relay

Switching thresholds
Operating mode
Adjustment range

Contact, closed when ready

Ready indication

AC 240 V/5 A (Resistive load),
DC 60 V/0.7 A (Resistive load)

Rating of the relay contacts

> 6 x 10 4 cycles

Contact life at 5 A

0 to 10 V,
selectable: logarithmic/linear;
logarithmic divisions: 1.43 V/decade,
linearly adjustable over 3 decades;
0 V corresponds to 10-9 mbar/Torr,
about 10.5 V in case of a fault

Chart recorder output (Ra > 2.5 kΩ)

V

100/120/200/230, +10/-15 %

Power consumption

VA

20

Storage temperature range

°C

-40 to +60

Nominal temperature range

°C

0 to 40

Main connection 50/60 Hz (selectable)

Dimensions (W x H x D)
Cable length, max.
1)

PENNINGVAC PM 31

Euro model, with 2 m long main cord,
mbar readout, 230 V AC

Part No. 157 88

US model, with 2 m long main cord,
Torr readout, 120 V AC

Part No. 896 88

Options
19" installation frame
1/4 19" blank panel

Part No. 161 00
Part No. 161 02

PENNINGVAC sensors
PR 25, DN 25 KF
PR 26, DN 40 KF
PR 27, DN 40 CF
PR 37, DN 40 CF, bakeable
Replacement cathode plates, titanium
(set of 5 pcs.)
Replacement anode ring

Part No. 240 002

Sensor cables
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 162 88
Part No. 162 89
Part No. 124 49
Part No. 157 56
Part No. 124 50
Part No. 124 51
Part No. 124 52
Part No. 124 53
Part No. 124 54

Part No. 157 52
Part No. 136 46
Part No. 136 47
Part No. 157 54
Part No. 162 91

RS 232 C

Interface

Weight, approx.

Order ing Inform a tio n

Prog. contr. compatible, digital 24 V input,
logic level (LOW) < 7 V, 0 A,
logic level (HIGH) > 13 V, 7 mA

High voltage control input

Max. rel. humidity

Total Pressure Gauges

% n.c.

80

kg (lbs)

2.1 (4.6)

mm
m

C16

106.5 x 128.5 x 282
100

For a cable length of 20 m max.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.37

Total Pressure Gauges

High and Ultra High Vacuum Gauges

COMBIVAC CM 31/CM 32/CM 33
By combining two/three principles of measurement – absolute pressure sensor, Pirani and
Penning – the COMBIVAC CM 31/CM 32/CM 33
cover the entire pressure range from 10-9 to
2 000 mbar (10-9 to 1500 Torr) while offering
monitoring and control functions.

Advantages to the User

Typical Applications

COMBIVAC CM 32

◆ Selectable dual LCD display combining the
advantages of analog and digital readouts
(over 12 decades)

◆ General pressure measurements on pump
systems, for example:
– Turbomolecular pump systems
– Diffusion pump systems
– Cryo pump systems

For over-pressure measurements and pressure
measurements which do not depend on the type
of gas, the CM 32 offers the facility of connecting
a linear pressure sensor (DI 200/201/2000/2001/
2001 rel – see chapter “Sensors”) in combination
with THERMOVAC and PENNINGVAC sensors.
Suitable 4 to 20 mA pressure sensors having a
range up to 20 000 mbar (15 000 Torr) may be
connected.

◆ Automatic switchover from THERMOVAC to
Penning (cold cathode) operation

◆ Vacuum melting, soldering and annealing
furnaces

◆ Clear display of pressure and operating status
with analog trend indication, can also be read
from a great distance

◆ Coating systems

◆ Easy to operate

◆ Analytical instruments

◆ Locking of the keypad via softlock keylock
◆ Two adjustable switching thresholds with
relay contact per measurement channel
◆ Logarithmic/linear 0 to 10 V chart recorder
output
◆ Compact, rugged Penning gauge which is
capable of withstanding operation at high
pressures (see section “Sensors”)
◆ Aligned and temperature compensated
THERMOVAC sensors (see section “Sensors”)

COMBIVAC CM 33

COMBIVAC CM 31

If the utmost is required regarding accuracy and
resolution, then the CM 33 is the right choice. In
combination with THERMOVAC and PENNINGVAC
sensors, capacitive absolute pressure sensors may
be connected (see chapter “Sensors”) which offer,
depending on the type, a range of 2 x 10-4 to
13 300 mbar (1.5 x 10-4 to 10 000 Torr).

This combination instrument for standard applications covers with its three measurement channels (2 x THERMOVAC and 1 x PENNINGVAC) the
entire range of 12 decades between 1 x 10-9 and
1000 mbar.

M3 - 3,2 mm

◆ Precision absolute pressure sensors with
ceramics or Inconel diaphragm (see section
“Sensors”)

122,5
128,5
112

◆ Cost-effective replacement sensing cells and
electrodes
◆ Fault indication for each channel in the event
of a broken filament, a broken cable or failed
plasma discharge
◆ Compact bench-top unit (1/4 19 in., 3 HU)
with metal enclosure, which may also be
installed in panel cut-outs and 19 in. racks

91,5

106,5

104,5

282
350
353,5

Dimensional drawing and panel cut-out for the COMBIVAC CM 31/CM 32/CM 33

◆ Full remote control via RS 232 C interface
◆ CE mark

C16.38

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

High and Ultra High Vacuum Gauges

Technical D ata

COMBIVAC CM 31/32/33

Number of measurement channels

3

Display range, CM 31
CM 32

mbar (Torr)
mbar (Torr)

CM 33

mbar (Torr)

Unit of measurement (selectable)

1 x 10-9 to 1000 (0.75 x 10-9 to 750)
1 x 10-9 to 2000 (or 20 000 *))
(0.75 x 10-9 to 1500 (or 15 000 *)))
1 x 10-9 to 1330 (or 13 300 *))
(0.75 x 10-9 to 998 (or 9980 *)))
mbar, Torr, Pa, Micron

Measurement uncertainty
PENNINGVAC

±30 % of the meas. value
in the range 10-8 to 10-4 mbar/Torr
< 20 % of the meas. value
in the range 10-3 to 10-2 mbar/Torr
< 15 % of the meas. value
in the range 10-2 to 102 mbar/Torr

THERMOVAC

Absolute pressure sensor

Depending on the type of sensor used

Measurement display (backlit)

digital, 7 segment LCD, analog,
LCD bar graph,
with logarithmic divisions (selectable)

Type of gas (selectable)

Air, N2, Ar

Switching thresholds
6, 2 per channel, floating changeover contacts
Operating mode
single, interval
Adjustment range
PENNINGVAC
mbar (Torr) 1 x 10-8 to 9.9 x 10-3 (0.75 x 10-8 to 7.4 x 10-3)
5 x 10-3 to 500 (3.75 x 10-3 to 375)
THERMOVAC
mbar (Torr)
standard 10 % of trigger value, free adjustable
Hysteresis for the switching relay
for THERMOVAC and PENNINGVAC
Ready indication

1 contact per channel,
closed when ready

Rating of the relay contacts

AC 240 V/5A (Resistive load)
DC 60 V/0.7 A (Resistive load)
> 6 x 104 cycles

Contact life at 5 A
Chart recorder output (Ra > 2.5 kΩ)
PENNINGVAC
THERMOVAC

Absolute pressure sensor
Control input for PENNINGVAC

Prog. contr. compatible digital 24 V input
Logic level (LOW) < 7 V, 0 A;
(HIGH) > 13 V, 7 mA

Interface
Main connection 50/60 Hz
CM 31/32 (selectable)
CM 33

0 to 10 V, log./lin. divisions
logarithm.: (0 V ; 1 x 10-9 mbar/Torr),
1.43 V/decade
linear: 3 decades, about 10.5 V for fault
logarithm.: (0 V ; 1 x 10-3 mbar/Torr),
1.67 V/decade
linear: 3 decades, about 10.5 V for fault
log./lin. 0 to 10 V

RS 232 C
V
V

100/120/200/230, +10/-15 %
90 to 250

Power consumption

VA

35

Storage temperature range

°C

-40 to +60

°C

0 to 40

Nominal temperature range
Max. rel. humidity
Weight
Dimensions (W x H x D)
*)

% n.c.

80

kg (lbs)

2.3 (5)

mm

106.5 x 128.5 x 282

When using suitable sensors

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Total Pressure Gauges

Order ing Inform a tio n COMBIVAC CM 31/32/33
Euro version with 2 m long main cord
mbar readout, 230 V AC
CM 31
CM 32
CM 33
US version with 2 m long main cord
Torr readout, 120 V AC
CM 31
CM 32
CM 33
Calibration
Options
19" installation frame
1/4 19" blank panel
THERMOVAC sensors for CM 31/32/33
TR 211, DN 16 KF
TR 211, 1/8" NPT
TR 212, DN 16 KF
TR 216, DN 16 KF
Sensor cable for TR sensors

Part No. 157 89
Part No. 157 90
Part No. 157 95
Part No. 896 89
Part No. 896 90
Part No. 896 95
see para. “LEYBOLD Calibration Service”
Part No. 161 00
Part No. 161 02

5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

PENNINGVAC sensors for CM 31/32/33
PR 25, DN 25 KF
PR 26, DN 40 KF
PR 27, DN 40 CF
PR 37, DN 40 CF, bakeable
Sensor cable for PR sensors
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m
Pressure sensors for CM 32
DI 200, 200 mbar, DN 16 KF,
incl. 5 m long cable
DI 201, 200 mbar, DN 16 KF,
incl. 5 m long cable
DI 2000, 2000 mbar, DN 16 KF,
incl. 5 m long cable
DI 2001, 2000 mbar, DN 16 KF,
incl. 5 m long cable
DI 2001 rel, 1000 mbar, DN 16 KF,
incl. 5 m long cable
Absolute pressure sensors for CM 33
CTR90, 1 Torr, DN 16 KF
CTR90, 10 Torr, DN 16 KF
CTR90, 100 Torr, DN 16 KF
CTR90, 1000 Torr, DN 16 KF
CTR90, 1 Torr, DN 16 CF
CTR90, 10 Torr, DN 16 CF
CTR90, 100 Torr, DN 16 CF
CTR90, 1000 Torr, DN 16 CF
Connection cables Type D
5m
10 m
15 m
20 m
30 m
40 m
50 m
75 m
100 m

Part No. 157 85
Part No. 896 33
Part No. 158 52
Part No. 157 87
Part No. 162 26
Part No. 162 27
Part No. 124 34
Part No. 162 28
Part No. 124 35
Part No. 124 36
Part No. 124 37
Part No. 124 38
Part No. 124 39
Part No. 157 52
Part No. 136 46
Part No. 136 47
Part No. 157 54
Part No. 162 88
Part No. 162 89
Part No. 124 49
Part No. 157 56
Part No. 124 50
Part No. 124 51
Part No. 124 52
Part No. 124 53
Part No. 124 54
Part No. 158 12
Part No. 158.14
Part No. 158 13
Part No. 158 25
Part No. 245 000

C16

Part No. 159 24
Part No. 159 23
Part No. 159 22
Part No. 159 21
Part No. 159 34
Part No. 159 33
Part No. 159 32
Part No. 159 31
Part No. 157 64
Part No. 124 41
Part No. 124 42
Part No. 124 43
Part No. 124 44
Part No. 124 45
Part No. 124 46
Part No. 124 47
Part No. 124 48

C16.39

Total Pressure Gauges

Sensors

DI 200/DI 201/DI 2000/DI 2001/DI 2001 rel Linear Pressure Sensors
Capacitive pressure sensor based on ceramics
technology.
Available as absolute or relative pressure sensor

Advantages to the User

Typical Applications

◆ Pressure sensor of the two-wire type

◆ Pressure measurements in the rough vacuum
range, and for corrosive media

◆ Absolute pressure ranges from 0.1 to 200
mbar or 1 to 2000 mbar
◆ Relative pressure range
from -1000 mbar to +1000 mbar

◆ Chemical process engineering
◆ Vacuum packaging
◆ Drying processes

◆ Excellent overload characteristic due to the
AI2O3 ceramics diaphragm
◆ Highly corrosion resistant

◆ Measurement of operating and filling
pressure, during the production of lamps

◆ Independent of the type of gas

◆ Filling systems for brake fluids
(DI 201/DI 2001)

◆ Vibration resistant

◆ Filling systems for refrigerants

◆ Supply voltage range of 12 to 30 V DC

◆ Measurement of pressure relative to atmospheric pressure (DI 2001 rel)

◆ Linear output signal of 4 to 20 mA
◆ Compact design

80
58

48,5

DN 16 KF

Dimensional drawing for the sensors DI 200/DI 201/DI 2000/DI 2001/DI 2001 rel

C16.40

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Sensors

Technical Data

DI 200

Measurement range

mbar
(Torr)

Overload range, max.

DI 201

DI 2000

0.1 to 200
(0.075 to 150)

bar

5

Measurement uncertainty 1)
(± temperature error)
Resolution
Reproducibility
Linearity

% FS
% FS
% FS
% FS

0.2
0.05
0.1
0.1

% FS/10°K
% FS/10°K

0.1
0.15
Capacitive

Sensing head supply

Two-wire system
mA

4 to 20

V DC
V

+ 24 typ.
12 to 30, Ripple 1 Vpp

cm3

3

Vacuum connection

DN

16 KF

Weight, approx.

kg

0.55

Protection class

IP

44

Dead volume

Materials in contact with the medium

Operating units

- 1000 to + 1000
(- 750 to + 750)

0 to 60

Principle of measurement

Supply voltage
Operating range

DI 2001 rel

10

°C

Output signal

DI 2001

1 to 2 000
(0.75 to 1500)

Nominal temperature range

Temperature error
Zero drift
Sensitivity drift

Total Pressure Gauges

Stainless steel 1.4305,
Al2O3 (96 %) ceramics,
FKM

Stainless steel 1.4305, Stainless steel 1.4305,
Al2O3 (96 %) ceramics, Al2O3 (96 %) ceramics,
EPDM
FKM

Stainless steel 1.4305,
Al2O3 (96 %) ceramics,
EPDM

MEMBRANOVAC DM 11, DM 12 / PIEZOVAC PV 20 / COMBIVAC CM 32

MEMBRANOVAC DM 11/12 /
COMBIVAC CM 32

Ordering Information
Linear absolute pressure sensor, complete
with 5 m long connection cable and connecting plug
1)

DI 200

DI 201

DI 2000

DI 2001

DI 2001 rel

Part No. 158 12

Part No. 158 14

Part No. 158 13

Part No. 158 15

Part No. 245 000

Sum of linearity, hysteresis and reproducibility

C16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.41

Total Pressure Gauges

Sensors

Series 200 THERMOVAC Sensor
35

133
(122)

135
(144)

Advantages to the User

TR 211

◆ Measurement range 5 x 10-4 to 1 000 mbar
(3.75 x 10-4 to 750 Torr)

◆ Aluminum sensing cell with tungsten filament

5

◆ Improved temperature compensation

20

40

Dimensional drawing for the TR 211, TR 212 and TR 216;
TR 211 NPT in brackets

◆ Tungsten or platinum filament
◆ Cost-effective sensing cell

TR 211 NPT/TR 212

TR 216

◆ Fully aligned and temperature compensated
0 to 40 °C

◆ Stainless steel sensing cell with tungsten
filament

◆ Stainless steel sensing cell with platinum/
tungsten filament and ceramics feedthrough

◆ Constant filament temperature

◆ Overpressure resistant

◆ Well suited for corrosive processes and water
vapour atmospheres, for furnace and heat
treating application

Technical Data
Measurement range

TR 211

TR 211 NPT

TR 212

5 x 10-4 to 1000 (3.75 x 10-4 to 750)

mbar (Torr)

Operating temperature range (compensated)

°C

0 to 40

Storage temperature range, max.

°C

80

Filament
Filament temperature

Tungsten
°C

Permissible overload (abs.), max.

bar

Volume of the sensing cell, approx.

cm3

Vacuum connection
Materials in contact with the medium

DN

THERMOVAC sensors Series 200
DN 16 KF
DN 16 CF
DN 1/8" NPT
Replacement sensing cell

C16.42

Platinum
110

3

10
11

16 KF

1/8" NPT

Aluminum, Vacon, glass, tungsten
CrNi 8020, epoxy cement

Operating units

Ordering Information

TR 216

16 KF/CF

Stainless steel, Vacon, glass,
tungsten, CrNi 8020, epoxy cement

16 KF
Stainless steel 1.4301 (SS 304),
Al2O3-ceramics, CrNi 8020

THERMOVAC TM 20, 21, 22 / COMBIVAC CM 31, 32, 33 / PIEZOVAC PV 20

TR 211

TR 211 NPT

TR 212

TR 216

Part No. 157 85
–
–

–
–
Part No. 896 33

Part No. 158 52
Part No. 158 86
–

Part No. 157 87
–
–

Part No. 157 75

Part No. 896 34

–

Part No. 157 77

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Sensors

Total Pressure Gauges

PR 25/PR 26/PR 27/PR 37 PENNINGVAC Sensors
50

132
94

DN 25 KF / DN 40 KF
50

Advantages to the User

Note

◆ Rugged

In applications involving significant contamination we recommend the use of a fine filter, see
chapter “General”, para. “Connection Accessories
for Small Flanges”.

◆ Insensitive to air inrushes and vibrations
◆ Easy disassembly and cleaning of the measurement system

147
107

◆ Exchangeable cathode plate
◆ Improved ignition characteristic through
titanium cathodes

DN 40 CF

Dimensional drawing for the PENNINGVAC PR Sensors

PR 25

Technical Data
Measurement range

PR 26

PR 27

PR 37

1 x 10-9 bis 10-2 (0.75 x 10-9 to 10-2 1))

mbar (Torr)

High voltage supply (anode potential)

kV

+ 3.3/+1.6

Storage temperature range

°C

-25 to +80

Nominal temperature range

°C

0 to 80

0 to 200

Degassing temperature (flange)

°C

–

350

Permissible overload (abs.)

bar

6 1)

Dead volume

cm3

21

Materials in contact with the medium
Weight, approx.

Stainless steel, nichrome, ceramics, titanium
kg (lbs)

Vacuum connection

DN

0.75 (1.7)
25 KF

Operating units 2)

Ordering Information
PENNINGVAC sensors

2)

40 KF

40 CF

40 CF

COMBIVAC CM 31, 32, 33 / PENNINGVAC PM 31

PR 25

PR 26

PR 27

PR 37

Part No. 157 52

Part No. 136 46

Part No. 136 47

Part No. 157 54

Replacement cathode plate, titanium
(5 pcs., incl. 5 ceramics discs)
Replacement anode ring
1)

C16

0.8 (1.8)

Part No. 162 91
Part No. 240 002

When using an ultra sealing gasket at the vacuum connection
For PR 25 also PTR 225

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.43

Total Pressure Gauges

Sensors

IE 414/IE 514 IONIVAC Sensors

Advantages to the User

IE 414

IE 514

◆ Exchangeable cathode

◆ Bayard-Alpert sensing system

◆ Extractor sensing system

◆ High accuracy of the measurements due to
individually calibrated sensing system

◆ Measurement range to 2 x 10-11 mbar
(1.5 x 10-11 Torr)

◆ Reliable to 1 x 10-12 mbar (0.75 x 10-12 Torr)

◆ Protection shied welded in place

Technical Data
Measurement range

X-ray limit

mbar (Torr)

mbar (Torr)

IE 414

IE 514

2 x 10-11 to 10-2
(1.5 x 10-11 to 10-2)

10-12 to 9.98 x 10-5
(10-12 to 750 x 10-5)

≤ 10-11 (≤ 10-11)

≤ 10-12 (≤ 10-12)

°C

0 to 80

Degassing temperature at the flange, max.

°C

250 1) / 350 2)
Iridium with
yttric oxide coating
NiFe 42
Pt/Ir 90/10/pt wire

Feedthrough pins
Anode
Vacuum connection

DN

Adjustment data, Ion detector potential
Cathode potential
Anode potential

V
V
V

Emission current

mA

Iridium with
yttric oxide coating
NiFe 42
Mo and CoNiCr

98

0
80

100

33
69,4

220
0.06 to 0.6

1.6
55

Heating voltage for the hot cathode

V

2.7

3.7

Sensitivity for nitrogen

mbar-1

17

6.6

Degassing operation / Electron bombardment

V / mA

1.4

DN 40 CF
12,8

58

700 / 30

Operating units

Replacement cathode

66

40 CF

A

IONIVAC sensors

DN 40 CF

12,8

Heating current for the hot cathode

Ordering Information

33
69,4

25

Operating temperature range

Material, Cathode

◆ Significant reduction of X-ray and
ion desorption effects

90

IM 520, 510

IE 414

IE 514

Part No. 158 66

Part No. 158 67

Part No. 158 63

Part No. 158 61

Dimensional drawing IE 414 (bottom) and IE 514 (top)

1)

With bakeable gauge head cable
2) With gauge head cable detached

C16.44

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Sensors

Total Pressure Gauges

Spare Sensors for Older Operating Units

Part No.

Type

Corresponding Sensors / Operating Units

163 43

IE 10

IM 110, IM 110 D

163 14

IE 20

IM 210, IM 210 D, IT 230

158 58

Cathode

IE 220

896 30

TR 901 KF

IG3 / CM 3

896 31

TR 901 NPT

IG3 / CM 3

162 09 *)

Sensing cell

TR 201/901 DN 16 KF

896 76 *)

Sensing cell

TR 201/901 NPT

157 40 *)

TR 301

TM 320, CM 350, IM 520, DM 11, DM 12, CM 32

157 43 *)

Sensing cell

TR 301

158 82

VK 201

VISCOVAC VM 212

158 17

IE 21

IM 210, IM 221

*) to be discontinued

C16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.45

Total Pressure Gauges

Pressure Switches and Control Instruments

PS 113 A Low Pressure Safety Switch
Switch indicating whether or not after venting the
pressure has reached the level of the atmospheric
pressure.
Preset diaphragm pressure switch set to a pressure of 6 mbar (4 Torr) below atmospheric pressure.

Advantages to the User

Ty pic al Applic ations

Te c h n ic a l N o te

◆ Rugged design

◆ Venting facilities

◆ High switching capacity

◆ Safety shutdown of vacuum systems

◆ Corrosion protected

◆ Load locks

Due to the diaphragm material used (EPDM) the
PS 113 A is not suited for applications in which
the process gas contains large quantities of helium. Owing to diffusion effects the leak rate of the
diaphragm settles at about 1 x 10-6 mbar x l x s-1
for helium.

◆ Easy to use
◆ IP 44 protection
◆ Can be connected to a programmable control

Technical Data

PS 113 A

Switching pressure

mbar (Torr)

Approx. 6 below atmospheric pressure

Return switching pressure

mbar (Torr)

3 below atmospheric pressure

Switching inaccuracy

mbar (Torr)

2 (1.5)

Max. permissible operating pressure (abs.)

mbar (Torr)

2 000 (1 500)

Storage temperature range

°C

-25 to +85

Nominal temperature range

°C

0 to 85

Switching contact

50

Changeover contacts, gold-plated, for prog. controls

Contact life (at 5 A)

> 105 switching cycles

Switching capacity

100mA / 24 V AC
30mA / 24 V DC

Electrical connection

6.3 mm flat plug

Vacuum connection

DN

Materials in contact with the medium

Protection class

Ordering Information
PS 113 A, DN 16 KF; complete with 3 m long cable

C16.46

72

DN 16 KF

16 KF
Stainless steel 1.4305, 1.4310,
Stainless steel 1.4300 PTFE coated

IP

48,5

Dimensional drawing for the PS 113 A low pressure safety switch

44

PS 113 A
Part No. 230 011

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Pressure Switches and Control Instruments

Total Pressure Gauges

PS 115 Pressure Switches
Rugged absolute pressure switch with electrical
switching contact and a switching pressure between 0.5 and 2 000 mbar (0.4 and 1500 Torr).

Advantages to the User
◆ Switching contact (n.c.) in the reference
chamber and thus protected against corrosion

◆ High switching accuracy (± 0.1 mbar)
◆ Stable long term operating characteristics

Through the differential pressure adapter (optional) the PS 115 pressure switch may be converted
to operate as a differential pressure switch. The
adapter consists of a DN 16 KF flange with screwin thread and a sealing arrangement, and it is
screwed into the PS 115 instead of the adjustment valve. The operating range extends to
2 000 mbar (1500 Torr). Brief overloading to
3 000 mbar (2250 Torr) is permissible without
impairing switching accuracy. In this operating
range differential values of +5 to -20 mbar
(+3.75 to -15 Torr) can be adjusted via the set
screw.
Option:
Differential pressure
adapter DN 16 KF

◆ For operating pressures up to 3 bar

◆ Rugged, corrosion protected design
◆ Increased switching capacity (floating) when
using the SV 110 switching amplifier

◆ For high ambient temperatures
◆ Upon request, the switching threshold may be
set in the factory

21
133

105
19
51

Technical D ata
Switching range

PS 115

mbar (Torr)

Overload limit

mbar (Torr)

3000 (2250)

Sensitivity

mbar (Torr)

0.1 (0.75)

Switching hysteresis

mbar (Torr)

0.5 (0.375)

Temperature coefficient

%/°K

Nominal temperature range
Briefly (max. 8 h)/continuous
Switching contact
Switching voltage
Switching current (max.)
Contact resistance, max.
Electrical connection
Protection class
Vacuum connection

18
85

DN 16 KF

Dimensional drawing for the PS 115

0.4 of the switching value

°C

120 / 0 to 90

V
mA
kΩ

Normally closed, gold-plated, for prog. controls
24
10
1
Plug (DIN 43 650)

IP

65

DN

16 KF

Materials in contact with the medium
Measurement chamber
Reference chamber

14

0.5 to 2 000 (0.375 to 1500)

Stainl. steel 1.4301; 1.4401; 1.4310; 1.3541; FPM
Stainl. steel 1.4301; 1.4401; 1.3541; glass; gold

Order ing Inform a tio n

PS 115

PS 115, DN 16 KF

Part No. 160 04

Pressure switch adjustment

Part No. 160 05

For floating installations without SV 110,
Clamping ring DN 16 KF, plastic
Centering ring, DN 16 KF, plastic

Part No. 200 28 306
Part No. 200 28 307

Volume of the measurement chamber

cm3

4

Option
Differential pressure adapter, DN 16 KF,
for connection to the PS 115

Volume of the reference chamber

cm3

20

Spare parts kit PS 115

Part No. 160 06

SV 110 switching amplifier

Part No. 160 78

Weight

kg (lbs)

1.3 (2.87)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Part No. 160 74

C16

C16.47

Total Pressure Gauges

Pressure Switches and Control Instruments

SV 110 Switching Amplifier
The diaphragm contact of the pressure switches is connected on one side to ground and
is rated 24 V / 10 mA max. When wanting to
switch higher voltages or currents, a switching
amplifier will be needed. The switching amplifier is equipped with powerful floating changeover contacts. The output relay is energized as
soon as the pressure drops below the switching threshold set up on the pressure switch.

The electrical connections are provided via
screw terminals and are run out of the plastic
enclosure through PG fittings.

Advantages to the User
◆ Increased ratings for the switch
◆ Changeover contact

Technical Data

SV 110

Mains supply, 50/60 Hz

110/130/220/240 V, selectable

Power consumption

VA

Output relay
Switching voltage/current
Switching power, max.

3

V/A
VA

250 / 5
500

Response time

ms

30

Relaise time

ms

7

Control circuit

V / mA

Ambient temperature, max.

24 / 10

°C

Weight, approx

50

kg (lbs)

0.36 (0.79)

SV 110

Ordering Information

Part No. 160 78

Switching Amplifier

55,5

121
109

15
4,2

21

80

50,5

Pg 9
Pg 9
21,5

163

Dimensional drawing for the SV 110 switching amplifier

C16.48

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Pressure Switches and Control Instruments

Total Pressure Gauges

MR 16/MR 50 Diaphragm Pressure Regulators
The MR 16/50 diaphragm regulators are absolute
pressure regulators which automatically adapt the
pumping speed of a vacuum pump depending on
the amount of gas, without the need for an external power supply.

98
120
58,5

67
130

Advantages to the User

Typical Applications

◆ Non-incremental, automatic pressure control

◆ Distillation processes of all kinds

◆ Simple setting of the control pressures

◆ Solvent recovery

◆ High control accuracy

◆ Drying processes

◆ Corrosion protected stainless steel design

◆ Temperature control on bath cryostats

◆ Easy to disassemble for cleaning and
maintenance

◆ Degassing of liquids and plastics

135

39

92,5

◆ Trouble-free operation in ex. areas

165

◆ Built-in isolation valves for the process
connection and the vacuum pump (MR 16)

Technical D ata
Control range

Dimensional drawing for the MR 16 diaphragm regulator (top)
and MR 50 diaphragm regulator (bottom)

MR 16

m3/h

Throughput

–

± 2 % of the control pressure
(10 - 90 % of flow)

MR 50, DN 40 KF

–

Part No. 160 27

16

50
5 to 100

Storage temperature range

°C

-25 to +60

%/K

0.3

Settling time

ms

5

Permissible overload for brief periods

bar

3

Diaphragm material

FPM/EPDM
Stainless steel 1.4571

Installation orientation

Measurement connection
Weight, approx.

Options
Stainless steel measurement flange,
DN 16 KF for connection to a reference
and/or process chamber or pumping stud
KALREZ diaphragm
Spare parts
EPDM diaphragm and seal kit
Viton diaphragm and seal kit
Seal kit MR 50,
incl. EPDM and Viton diaphragms
Adjustment screw of the adjustable valve,
complete with seal

–

Part No. 160 26
Part No. 200 28 597

Part No. 160 29
Part No. 160 31

–
–

–

Part No. 160 32
Part No. 240 001

Any

Dimensions
Vacuum connection

MR 50

Part No. 160 25

°C

Housing material

MR 16

MR 16, DN 16 KF

Nominal temperature range

Temperature coefficient

Order ing Inform a tio n

10 to 1 000 (7.5 to 750)

mbar (Torr)

Control inaccuracy

MR 50

See dimensional drawing
2x DN

16 KF
1/8"

3x thread R
kg (lbs)

40 KF

2.7 (6)

8 (17.6)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C16.49

C16

Total Pressure Gauges

Miscellaneous

LEYBOLD Calibration Service
Calibration of vacuum gauges in the pressure
range from 10-9 to 1 000 mbar (10-9 to 750 Torr)
through two systems.

Note
For US we offer NIST Calibration upon request.

Technical Data
Calibration range

DKD Calibration
mbar

to 10-3

Advantages to the User
◆
◆
◆
◆
◆

Clear reference to the reference quantities
Reproducible measurements
Constantly high quality over time
Reliable checking of existing gauges
Unambiguous description of the process

Since 1981 LEYBOLD has been offering to all
customers an impartial calibration service for
gauges and sensors of any make. A DKD calibration certificate or a factory calibration certificate
is issued for every calibration. Instruments with
insufficient long-term stability or such instruments where the principle of measurement is not
suited for calibration, can not be calibrated.

to 10-9

157 12

157 13

to 10-5

to 10-8

Factory Calibration
157 14

157 22

157 23

157 24

Typical Applications

DKD Calibration

Calibrated vacuum gauges are used under the following conditions:

It is the task of the German Calibration Service
(DKD) to ensure traceability of industrial
measurements and testing to national standards.

◆ If the requirements concerning reproducibility
and comparability of experiment runs are high
◆ If an unambiguous reference is required for a
large number of pressure gauges
◆ If an unambiguous description for processes
is required
◆ If for experiments and processes unambiguous traceability of the measured pressures
to basic quantities is demanded by the authorities
◆ If testing to DIN/ISO 9000 is required in the
following areas
◆ Research
◆ Thin-film engineering
◆ Manufacture of systems
◆ Military
◆ Energy
◆ Chemistry production
◆ Production of pharmaceuticals and
herbicides
◆ Sputtering systems
◆ Aircraft and space industry
◆ Manufacture of lamps

C16.50

to 10-3

DKD Calibration

Ordering Information
Part No.

to 10-5

Factory Calibration

The German Calibration Service is run jointly by
the Federal Institution for Physics and
Technology (PTB), the industry, the Federal
Minister for Economics and the Western
European Metrology Club (WEMC).
The transfer standards employed in the DKD
calibration facility run by LEYBOLD are checked
regularly (recalibrated) by the PTB.
Within the framework of the German Calibration
Service, the calibration pump system at
LEYBOLD has been checked and approved by the
PTB and the transfer standards employed have
been calibrated by the PTB.
Factory calibrations are run with standards which
have not been calibrated directly at the PTB;
instead the transfer standards of the in-house
DKD calibration service are used. Thus traceability to national standards is ensured in both cases.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17

Leak Testing Instruments

Helium Leak Detectors

Leak Testing Instruments

Contents

General
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.03
Leak Detection - Leak Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.04
Leak Detection Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.05
Operating Principles of the Helium Leak Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.06

Products
Helium Leak Detectors
L 200 plus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.08
L 200 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.09
Modul L 200 plus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.10
Mobile Leak Detection Systems fitted to the CART 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.12

Product-Related Accessories
Calibrated Leaks for Vacuum and Sniffer Aplications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.14
Screw-in Calibrated Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.16
Accessories
for the L 200 plus, L 200 dry and Modul L 200 plus . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.18
Helium Sample Probes (Sniffers). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.20

Other Accessories
Connection Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.21
Connection Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.21

C17.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Leak Testing Instruments

st
I
Le nst
ak rum
De en
t
te
ct s /
or
s

Applications and Accessories

s

s

plu

,

◆

◆

◆

Vacuum coating

◆

Research and development

◆

◆

◆

Chemistry/pharmaceutical

◆

◆

◆

Metallurgy/furnaces

◆

◆

Lamps and tube manufacture

◆

◆

Automotive industry

◆

◆

Laser engineering

◆

Mo

Mo

du
l
(o L 2
il- 0
se 0
ale
d)

y
dr
00
L2

Semiconductor production

Te

L2

00

s

plu

du
l
(o L 2
il- 0
fre 0
e)

,

plu

Applications

Particle accelerators

◆

◆

◆
◆

◆

Analytical engineering

◆

◆

◆

◆

Systems with cryo pumps

◆

◆

◆

◆

Cooling and air conditioning

◆

◆

Electrical engineering

◆

◆

Mechanical engineering

◆

◆

Power plants

◆

◆

Systems engineering

◆

◆

UHV applications

◆

◆

◆

◆

Accessories

Page

Calibrated leaks

C17.14

◆

◆

◆

◆

Screw-in calibrated leaks

C17.16

◆

◆

◆

◆

Transportation means

C17.18

◆

◆

◆

◆

Partial flow system

C17.18

◆

◆

PC software LeakWare

C17.18

◆

◆

◆

◆

Helium sniffers

C17.20

◆

◆

◆

◆

Exhaust filter sets

standard

standard

Interfaces

standard

standard

standard

standard

Gas ballast facilities

standard

Trigger relay boards

standard

standard

standard

standard

◆

◆

◆

◆

Seal kits

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17

C17.03

Leak Testing Instruments

General

Leak Detection – Leak Testing
Whether a component or a system is leak-tight
depends on the application it is to be used in and
the leak rate that is acceptable. Absolutely leaktight components and systems do not exist. A
component is considered technically leak-tight if
its leak rate remains below a value defined for
this particular component. In order to provide a
quantitative measure, the term “leak rate” with
the symbol “qL” was introduced. In vacuum technology mbar x l x s-1 is used as the unit for leak
rates.

Vacuum method

Helium leak detector L 200 plus with partial flow pump set

Helium leak detector L 200 dry
Helium leak detector L 200 plus / Modul L 200 plus

Pressure rise

A leak rate of 1 mbar x l x s-1 exists in a closed
vessel having a volume of 1 liter when the pressure increases by 1 mbar within one second, or
in case of an overpressure it decreases by
1 mbar within one second.

Overpressure method

103................100 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9 10-10 10-11 10-12 mbar · l · s-1

Helium leak detector L 200 plus with helium sniffer

qL = V x Dp (mbar x l x s-1)
Dt

Bubble test

Pressure drop test

The wide range of leak rates from several
100 mbar x l x s-1 to below 10-11 mbar x l x s-1
as they occur in practice necessitates the use of
different leak detection principles and hence leak
detectors (see figure).

Overview of the leak rate detection ranges

Besides the determination of the total leak tightness, it is usually important to locate the leak,
quickly and precisely, in order to seal it. Instruments for local leak detection are called leak
detectors. The leak detectors presented in this
product section can be used for the localization
of leaks, and in addition some are suitable for
determining the total leak rate of test objects.

Leak Rate

Pa x

Pa x m3 x s-1

m3

x

s-1

atm x cm3 x s-1 *
mbar x l x s-1 cm3 x s-1 * torr x l s-1 *

kg x h-1
air

g/a
C2H2F4 (R 134a)

1

10

9.87

7.5

4.28 x 10-2

2.28 x 106

0.1

1

0.99

0.75

4.3 x 10-3

2.28 x 105

1 atm x cm3 x s-1 * = cm3 (STP) x s-1

0.101

1.01

1

0.76

4.3 x 10-3

2.3 x 105

1 torr x l x s-1*

0.133

1.33

1.33

1

5.7 x 10-3

3.0 x 105

1 kg x h-1 air

23.4

234

234

175

1

–

6.41 x 10-7

7.58 x 10-6

6.3 x 10-6

4.8 x 10-6

–

1

1 mbar x l x s-1 (He)

1 g/a C2H2F4 (R 134a)

* According to international system of units only Pa x m3 x s-1 is permissible

C17.04

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Leak Testing Instruments

Leak Detection Methods
There are two main groups of leak detection
methods; for both there are special instruments
available:
Vacuum Methods
The equipment to be tested is evacuated. The
pressure ratio between inside and outside is 0:1.
Overpressure Methods
The equipment to be tested is pressurized with a
search gas or a search gas mixture. The pressure
ratio between inside and outside is over 1:1.
Between the two methods there exist many variations depending on the particular application.
General Notes
1. The lowest leak rates can only be measured by
employing the vacuum method, whereby the following applies: The lower the leak rate, the higher
the requirements are concerning cleanness and
ultimate vacuum.
2. If possible the test objects should be tested
under the same conditions that will be used in
their final application, i.e. parts for vacuum operation should be tested according to the vacuum
method and parts for overpressure operation
should be tested using the overpressure method.

Leak Testing Based on
Vacuum Methods
(Vacuum inside the test object)
Pressure Rise Method
With this method it is only possible to determine
the total leak rate. The test object is evacuated
with a vacuum pump or a vacuum pump system.
A valve is used to isolate the test object from the
vacuum pump. The pressure will then rise as a
function of time. Curve (a) shows the theoretical

pressure rise if there is only a leak. Curve (b)
shows the pressure rise due to outgassing from
the surfaces of the test object. This pressure rise
tends to tail off in the direction of a saturation
level. If in such a case the time allowed for monitoring the pressure rise is too short, a leak will be
indicated which in reality does not exist. If one
waits long enough for the pressure to rise, i.e.
after the bend of curve (b) the outgassing process can then be disregarded, so that the leak
rate can be determined from the known volume
of the test object and the measured pressure rise
over a fixed rise time (see equation on page 4).
Curve (c) shows the pressure rise as it occurs in
practice, where outgassing and leak rate add. The
detectable leak rate depends on the volume of the
test object, the obtained ultimate pressure and
the outgassing from the test object. In connection with very large test objects this method is
time consuming if extremely low leak rates are to
be determined in the fine and rough vacuum
range.
Local Leak Detection
The test object is evacuated by a vacuum pump
(auxiliary pump) until the pressure is low enough
for the leak detector to operate. When using a
helium leak detector, its own pump system will
take care of further evacuation. Suspicious spots
on the test object will then be sprayed with a fine
jet of search gas. Search gas entering through
leaks into the test object is pumped out by the
vacuum pump and it is converted by the leak
detector into an electrical signal which is then
displayed. This permits rapid detection and determination of the size of even the smallest leaks.
Integral Method
Determination of the total leak rate of a test
object. The testing arrangement is the same as
for local leak detection, but in this case the test
object is not sprayed with search gas on selected
areas, but it is surrounded by a hood or a cham-

5

ber which is filled with the search gas. Thus the
entire outer surface of the test object comes into
contact with the search gas. If the search gas
enters the test object, the total leak rate is indicat-ed independently of the number of existing
leaks. With helium leak detectors it is possible to
determine the helium content of the air. This is
utilized in the detection of gross leaks.

Leak Testing Based on
Overpressure Methods
(Overpressure within the test object)
Pressure Drop Method
The test object is filled with a gas (for example
air or nitrogen) until the testing pressure is
reached. Precision vacuum gauges are used to
detect a possible pressure drop during the testing
period. This method is simple to implement, it is
suitable for the determination of gross leaks and
can be improved upon by using differential pressure gauges. By applying soap solutions or similar, leaks can be located.
Local Leak Detection with Leak Detectors
– Sniffing
The test object is filled with the search gas or the
search gas/air mixture to which the leak detector
is sensitive. The leak detector is equipped with a
sniffer probe, whereby there is a low pressure at
the probe tip. If the sniffer tip passes suspicious
points on the test object the search gas coming
Key to the Figures
1
2
3
4
5
6
7

Test object
Leak detector
Search gas cylinder
Vacuum pump
Hood
Spray gun for search gas
Sniffer probe

1

5
3

LD
HELIUM

LD
HELIUM

2

a) Pressure rise due to leakage
b) Pressure rise due to outgassing from the chamber walls
c) Both effects combined

Pressure rise in a vacuum chamber after switching off the pump;
double log. plot

1

2

4

4

3

Local leak detection – Evacuated test object

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Integral method – Evacuated test object

C17.05

C17

General

Leak Testing Instruments
out of the leak is sucked in and transferred to the
detection system of the leak detector. After conversion into electrical signals these are displayed
optically and acoustically by the leak detector.

Uncertainties in the determination of the volume,
leaks in the hood and a wrong accumulation period make precise leak rate measurements based
on this method very questionable.
Integral Method – Vacuum Hood Test

Integral Method – Hood Test
To determine the total leak rate of a test object
subjected to a search gas overpressure, the test
object is surrounded by a hood of a known
volume. The search gas which escapes through
the leaks collects in the hood.
After a fixed accumulation period a sniffer probe
is used to measure the concentration of the
search gas which has collected in the hood.
Before this the leak detector should be calibrated
by a reference measurement using a known
search gas concentration.
The leak rate can then be determined by the
equation for qL where V is the volume of the
hood, Dp is the partial pressure difference of the
search gas (concentration change) and t is the
accumulation period.

This test is a variation of the hood test described
above, which has considerable advantages. A
vacuum chamber which is evacuated by an auxiliary pump and which is connected to a leak detector is used as the hood. The search gas escaping
through the leaks is converted by the detection
system of the leak detector into electrical signals
which are immediately displayed. After calibration
of the leak detector with a calibrated leak it is
possible to quantitatively determine the total leak
rate.
This method permits the detection of very small
leaks and is especially suited for automatic industrial leak detection.
Integral Method – Bombing-Test
This method is used for testing hermetically sealed
components such as transistors, IC-packages or

dry reed relays. It is basically a variation of the
vacuum hood test. Here the test objects are
placed in a vessel which is pressurized with the
search gas - preferably helium. At a fairly high
search gas pressure and after a period of up to
several hours it is tried to enrich the search gas
inside leaky test objects. This is the actual so
called “bombing” process.
After this, the test objects are transferred to a
vacuum chamber and their total leak rate is determined in the same way as in the vacuum hood
test. During evacuation of the vacuum chamber
down to the required testing pressure, those test
objects which have a gross leak already lost their
accumulated search gas. These parts are not
detected as leaking during the actual leak test.
Therefore the test with the vacuum chamber is
often preceded by a “bubble test”.
This method permits the detection of the lowest
leak rates and is used mainly in automatic industrial leak testing especially when it is not possible
to fill the parts with gas in any other way.

5

5
1
3

1
3

7

7

3

1
LD
HELIUM

2

2

LD
HELIUM

2

LD
HELIUM

4

Leak detection – Search gas overpressure in the test object

Integral method (search gas accumulation)
Search gas overpressure in the test object

Integral method – Search gas overpressure in the test object

Operating Principles of the Helium Leak Detectors
Operating Principle

Important Specifications

A helium leak detector permits the localization of
leaks and the quantitative determination of the
leak rate, i.e. the gas flow through the leak. Such
a leak detector is therefore a helium flow meter.

The two most important features of a leak detector are its measurement range (detection limits)
and its response time.
The measurement range is limited by the lowest
and the highest detectable leak rate. The lowest
detectable leak rate is defined by the sum of drift
and noise in the most sensitive measurement
range. Usually the sum of noise amplitude and
zero drift per minute is made to be equivalent to
the lowest detectable leak rate. With leak detectors the amount of drift is so low, that the noise
amplitude alone determines the detection limit.
The highest detectable leak rate depends strongly
on the method employed. Especially the counterflow method and partial flow operation (see
description below) permit the measurement of
very high leak rates even with a sensitive helium

In practice the leak detector performs this task by
firstly evacuating the part which is to be tested,
so that gas from the outside may enter through
an existing leak due to the pressure difference
present. If only helium is brought in front of the
leak (for example by using a spray gun) this helium flows through the leak and is pumped out by
the leak detector. The helium partial pressure
present in the leak detector is measured by a
sector mass spectrometer and is displayed as a
leak rate. This is usually given in terms of volume
flow of the helium (pV-flow).

C17.06

leak detector. In addition the multi-stage switchable high impedance input amplifiers of the leak
detectors also permit the measurement of high
leak rates.
In practical applications, especially in the localization of leaks the response time is of great significance. This is the time it takes from spraying the
test object with helium until a measured value is
displayed by the leak detector. The response time
of the electronic signal conditioning circuitry is
an important factor in the overall response time.
In the case of leak detectors the response time of
the electronic circuitry is well below 1 s.
The volume flow rate for helium at the point of
the test object is of decisive significance to leak
detection on components which are pumped
down solely by the leak detector. This volume
flow rate provided by the leak detector takes care

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

of the helium entering through a leak and it ensures quick detection by the leak detector. On the
other hand the volume of the test object delays
the arrival of the helium signal. The response
time can be calculated on the basis of the following simple equation:
V
Response time for helium tA = 3
SHe
(for 95% of the final value)
with

V
= Volume of the test object
SHe = Volume flow rate for helium at
the point of the test object
(or at the inlet of the leak detector, if it alone pumps down the
test object).

Main Flow Method
The classic operating principle of helium leak
detectors is based on the main flow method.
Here the entire helium flow passes through the
high vacuum system of the leak detector, where
the mass spectrometer measures the partial pressure of the helium. In this, the use of a liquid
nitrogen cold trap is essential to remove water
vapor or other condensible gases in the vacuum
system which impair the operation. Moreover, the
use of a cold trap permits the low operating pressures for the mass spectrometer to be reached
(below 10-4 mbar) despite the directly connected
(and possibly contaminated) test object.
The advantages of the main flow method are:
– Highest sensitivity, i.e. low detection limit
– Short response time due to a high volume
flow rate at the inlet.
The main flow method is thus especially suitable
for stationary leak detection on components.
Leak detection on systems having their own
pump sets and at higher pressures requires the
use of an external throttling valve, i.e. a partial
flow with subsequently reduced sensitivity is utilized.

Counterflow Method

With this method the test object is not connected
to the high vacuum. Instead it is connected to the
forevacuum (between turbomolecular pump and
backing pump), so that the entire gas flow (especially water vapor) does not contribute to the
pressure increase in the mass spectrometer. Thus
a cold trap is no longer required!
The helium which now enters the forevacuum can
still be detected, as it is able to flow against the
pumping direction of the turbomolecular pump
into the mass spectrometer. This is due to the
high particle velocity of the helium. The sensitivity of this counterflow arrangement is equal to
that of the main flow principle, provided the right
combination of volume flow rate of the backing
pump and helium compression of the turbomolecular pump is used.
The advantages of the counterflow method are:
– No liquid nitrogen is required
– High permissible inlet pressures (i.e. pressure
within the test object)
This makes the counterflow method especially
suitable for mobile leak detection on systems. For
leak detection on larger components where a
short response time is essential (i.e. high volume
flow rate) an additional turbomolecular pump
stage is required at the inlet of the leak detector.

Partial Flow Method
In order to expand the measurement range in the
direction of higher leak rates and for operation at
higher inlet pressures, helium leak detectors
incorporate a partial flow or a gross leak system.
This consists basically of a throttle and a rotary
vane pump. At pressures above the normal inlet
pressure (main flow: above 10-2 mbar, counterflow: above 10-1 mbar) or in the case of high helium leak rates, the inlet valve is closed and the
main flow is allowed to enter the partial flow
pump, whereas only a small part enters the leak

Leak Testing Instruments
detector via the partial flow throttle. Thus the
total pressure and the helium pressure are
dropped to values suitable for operation of the
leak detector.
To obtain correct leak rate readings in the partial
flow mode, the partial flow ratio, i.e. the ratio
between the actually measured gas flow and the
total gas flow must be known and stable.
In all leak detectors this is achieved by a partial
flow throttle made of ruby with a precisely machined hole. This ensures that the quantitatively
determined leak rates are always correct without
calibration, even for gross leaks.

Calibration of Helium Leak
Detectors with Calibrated
Leaks
In the process of leak detection one expects that
a test object which does not have a leak produces
a zero reading on the leak detector. In this any
malfunctions are excluded. Thus calibrated leaks,
i.e. artificial leaks which produce a known helium
leak rate are essential for reliable results.
To obtain a quantitatively correct leak rate reading
the sensitivity of the leak detector must also be
adjusted. This requires the use of a calibrated
leak.
LEYBOLD offers calibrated helium leaks of
various designs covering the range between 10-9
to 10-4 mbar x l x s-1 as part of the standard
range of products. All leak rates are traceable to
the standards of the German Calibration Service
controlled by the PTB (Federal Institution of Physics and Technology). If requested each helium
calibrated leak can be supplied with a calibration
certificate issued by the German Calibration
Service. The calibration itself is performed by the
German Calibration Service for Vacuum which is
run by LEYBOLD on behalf of the PTB.

Test
leak

Main flow or
counterflow
leak detector

C17

Main flow method

Counterflow method

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Partial flow method

C17.07

Leak Testing Instruments

Helium Leak Detectors

Helium Leak Detector L 200 plus
The L 200 plus is a portable multi-purpose helium leak detector and equally well suited to both
service and series production testing.
Its rugged design and its ease of use make the
L 200 plus to the best selling leak detector in the
world.

L 200 plus

Advantages to the User
◆ Extremely fast response time
◆ Oil-free gas admission system
◆ One of the smallest helium leak detectors in
the world
◆ High sensitivity
◆ Ergonomically designed

L 200 plus

Tec hnic al Data

◆ Quick start-up

Smallest detectable helium leak rate
(Vacuum mode)

mbar x l x s-1

< 10 x 10-12

Smallest detectable helium leak rate
(Sniffer mode)

mbar x l x s-1

< 1 x 10-7

Max. detectable helium leak rate
(Vacuum mode)

mbar x l x s-1

1 x 10-1

Max. inlet pressure
with partial flow pump set

mbar (Torr)
mbar (Torr)

◆ Hand unit can be operated with one hand
equally well by right and left-handers

Pumping speed during the evacuation process
50 Hz
m3 x h-1 (cfm)
60 Hz
m3 x h-1 (cfm)

◆ Fast leak rate readout also at low leak rates

Pumping speed for helium at the inlet

Typical Applications
Leak tests in connection with
◆ Quality assurance
◆ Automotive industry

Time until ready for operation

Detectable masses

◆ Semiconductor industry

In connection with the sniffer lines which are
available as accessories the L 200 plus may also
be used as a sniffer leak detector.
In connection with a partial flow pump set the
L 200 may also be used for the detection of leaks
on large vessels.

C17.08

1
<1
1 x 10-12 to 1 x 10-1

<3
180° magnetic sector field
2 yttrium/iridium long-life cathodes

Test port
Length of the cable on the hand unit
Dimensions (W x H x D)

amu

2, 3 and 4

DN

1 x 25 KF

m

4

mm

Weight

◆ High vacuum and ultra-high vacuum
engineering
◆ Ideal tool for industrial series production
testing – in the cooling and air conditioning
industries, for example

min

Mass spectrometer

◆ Systems manufacture

2.5 (1.5)
3.0 (1.8)

mbar x l x s-1, atm x cc x sec-1, Pa x m3 x s-1, ppm,
Torr x l x s-1, g/a, oz/y

Units of measurement (selectable)

Ion source

◆ Research and development

s
mbar x l x s-1

Leak rate measurement range

◆ Analytical instruments

◆ Power station engineering

l/s

Time constant of the leak signal
(blanked off, 63 % of final value)

3 (2.25)
1000 (760)

kg (lbs)

Or der ing Information
L 200 plus
230 V / 50/60 Hz, mbar readout, with TL 7
230 V / 50/60 Hz, mbar readout, without TL 7
PC software LeakWare

490 x 430 x 250
35.5 (78.4)

L 200 plus
Part No. 140 00 L
Part No. 140 01 L
Part No. 140 90

Seal kit

Part No. 200 99 150

Calibrated leak TL 7 for fitting into the L 200

Part No. 140 23

For further accessories see Section
“Accessories for L 200 plus, L 200 dry and Modul L 200 plus”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Helium Leak Detectors

Leak Testing Instruments

Portable and Dry Helium Leak Detector L 200 dry
The L 200 dry is a compact portable helium leak
detector capable of meeting the highest cleanness requirements.

L 200 dry

Based on the well-proven technology of the
L 200, but equipped with an oil-free pump
system, the L 200 dry meets the highest requirements concerning cleanness while at the same
time being small in size.

Tec hnic al Data

L 200 dry

Smallest detectable helium leak rate
(Vacuum mode)

mbar x l x s-1

< 3 x 10-10

Smallest detectable helium leak rate
(Sniffer mode)

mbar x l x s-1

< 1 x 10-7

◆ Oil-free “dry” pump system

Max. detectable helium leak rate
(Vacuum mode)

mbar x l x s-1

1 x 10-1

◆ Small footprint

Max. permissible inlet pressure

mbar (Torr)

3.5 (2.63)

◆ Quick start-up

Pumping speed during the evacuation process
50 Hz
m3 x h-1 (cfm)
60 Hz
m3 x h-1 (cfm)

1.6 (0.94)
1.9 (1.12)

Advantages to the User

◆ Extremely fast response

Pumping speed for helium at the inlet

Typical Applications
Leak tests with stringent requirements concerning cleanness, for example
◆ Semiconductor industry
– after repairs or maintenance work
◆ Semiconductor industry
– Production of semiconductor components
◆ Pharmaceutical/medicine
◆ Laser

l/s

Time constant of the leak signal
(blanked off, 63 % of final value)
Leak rate measurement range

s
mbar x l x s-1

min

Mass spectrometer

Test port
Length of the cable on the hand unit
Dimensions (W x H x D)
Weight

<3
180° magnetic sector field

Ion source
Detectable masses

<1
1 x 10-11 to 1 x 10-1
mbar x l x s-1, atm x cc x sec-1, Pa x m3 x s-1, ppm
Torr x l x s-1, g/a, oz/y

Units of measurement (selectable)
Time until ready for operation

0.6

2 yttrium/iridium long-life cathodes
amu

2, 3 and 4

DN

1 x 25 KF

m

4

mm
kg (lbs)

Or der ing Information
L 200 dry
230 V / 50/60 Hz, mbar readout, with TL 7
PC software LeakWare
Seal kit

490 x 430 x 250
33 (72.8)

C17

L 200 dry
Part No. 140 15 L
Part No. 140 90
Part No. 200 99 150

For further accessories see Section
“Accessories for L 200 plus, L 200 dry and Modul L 200 plus”

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17.09

Leak Testing Instruments

Helium Leak Detectors

Mobile and Flexible Helium Leak Detector Modul L 200 plus
The Modul L 200 plus represents the basic unit
of an entire family of leak detectors. It is based
on the L 200 plus, is not equipped with an integrated backing pump and may be easily adapted
by adding an external backing pump to suit a
wide range of applications.

Modul L 200 plus

The Modul L 200 plus combines the excellent
character-istics of the L 200 plus with those of
the pump system which has been added to the
basic leak detector module.
This results in two basic groups:
◆ Dry, mobile leak detectors with selectable
pumping speed
◆ Oil-sealed, mobile leak detectors offering a
high pumping speed at an optimum price-toperformance ratio.

Modul L 200 plus with
Oil-Sealed Backing Pump

Modul L 200 plus with
Dry-Compressing Scroll Pump

This combination represents a powerful leak
detector, the pumping speed of which is adapted
to the particular application in each case.

This combination represents a dry high-performance leak detector.

Advantages to the User

Advantages to the User

◆ Cost-effective leak detector

◆ Very high pumping speed which is also
acceptable for testing semiconductor production chambers without having to use their
own pump systems

◆ Pumping speed optimized for the particular
application
◆ Fast response

◆ Fast response

◆ Quick recovery

◆ Quick recovery (after helium contamination)

◆ High sensitivity

◆ Absolutely dry

◆ Fast leak rate readout also at low leak rates

Typical Applications
All applications involving short cycles and/or larger volumes and which require a mobile system,
like for example:

Typical Applications
All applications which demand a clean process,
like for example:
◆ Semiconductor industry (chip manufacturers)

◆ Automotive industry
◆ Cooling and air conditioning
◆ Manufacturers of furnaces/machines/systems
◆ Packaging

◆ High sensitivity

◆ Semiconductor industry (tool manufacturers
and subcontractors)
◆ High purity gas industry
◆ Research and development
◆ UHV applications

C17.10

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Helium Leak Detectors

Leak Testing Instruments

Modul L 200 plus
with Rotary Vane Vacuum Pump
with Scroll Pump

Technical Data
Smallest detectable helium leak rate
(Vacuum mode)

mbar x l x s-1

< 10 x 10-12

Smallest detectable helium leak rate
(Sniffer mode)

mbar x l x s-1

< 1 x 10-7

Max. detectable helium leak rate
(Vacuum mode)

mbar x l x s-1

10-1

Max. permissible inlet pressure

mbar (Torr)

Pumping speed during the evacuation process
Scroll pump / TRIVAC D 25 B pump
m3 x h-1 (cfm)
Pumping speed for helium at the inlet flange

25 (14.7)

25 (14.7)

8

8

l/s

Time constant of the leak signal
(blanked off, 63 % of final value)
Leak rate measurement range

3 (2.25)

s

<1

mbar x l x s-1

mbar x l x s-1, atm x cc x sec-1, Pa x m3 x s-1, ppm, Torr x l x s-1, g/a, oz/y

Units of measurement (selectable)
Time until ready for operation

1 x 10-12 to 1 x 10-1

min

Mass spectrometer

180° magnetic sector field

Ion source
Detectable masses
Test port
Length of the cable on the hand unit
Dimensions (W x H x D)
Weight (without pump)

<3

2 yttrium/iridium long-life cathodes
amu

2, 3 and 4

DN

1 x 25 KF

m

4

mm
kg (lbs)

490 x 430 x 250
30.5 (67)

The following Part Nos. contain only the individual components needed for assembly by the customer. For building a
portable system we recommend our factory tested and pre-assembled systems (see next page “Mobile Leak
Detection Systems fitted to the CART 200”).

Or dering Info rmation

Modul L 200 plus

Modul L 200 plus without pump 1)
Euro, 230 V / 50/60 Hz
PC software LeakWare
Seal kit

Part No. 140 34 L
Part No. 140 90
Part No. 200 99 150

Pumps
TRIVAC D 25 B; 230 V, 50/60 Hz
Scroll, 230 V / 50/60 Hz
CART 200

C17

Part No. 113 35
Part No. 200 000 214
Part No. 140 93

For further accessories see Section
“Accessories for L 200 plus, L 200 dry and Modul L 200 plus”
1)

But without integrated backing pump

Please order cart separately

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17.11

Helium Leak Detectors

Leak Testing Instruments

Mobile Leak Detection Systems fitted to the CART 200
These mobile systems are accommodated on the
CART 200. Placed on these carts are the leak
detectors L 200 plus, L 200 dry or Modul
L 200 plus.
Additional backing pumps (depending on the
version required) are accommodated on the
bottom level of the carts.

CART 200 with Modul L 200 plus and TRIVAC D 25 B

CART 200
The CART 200 is a special transport cart made of
painted steel with an integrated holder for gas
cylinders and space for small parts and documents. The leak detector and the pump are
accommodated on two levels.

The pre-assembled and tested system according
to the Part Nos. on the next page include all
required connecting components between leak
detector and backing pump.
Then only the upper section of the system will be
packaged separately.
The helium cylinder is not part of the delivery.

Advantages to the User
◆ Complete, fully operational leak detection
system
◆ Simple to operate
◆ Choice of either oil-sealed or dry compressing
backing pump
◆ In the case of these systems, the transport
cart CART 200 is included

148

705

300

320

1108
685

225

560

480
540

Dimensional drawing for the CART 200

C17.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Helium Leak Detectors

Technical Data

CART L 200 plus

CART L 200 dry

CART Modul L 200 plus

< 10 x 10-12

< 3 x 10-10

< 10 x 10-12

Smallest detectable leak rate for air
(Vacuum mode)

mbar x l x s-1

Smallest detectable leak rate for helium
(Sniffer mode)

mbar x l x s-1

< 1 x 10-7

Max. detectable leak rate for helium
(Vacuum mode)

mbar x l x s-1

10-1

Max. inlet pressure

mbar (Torr)

1000 (752)

3.5 (2.63)

Pumping speed during the evacuation process with
Scroll
TRIVAC D 25 B, Euro

m3 x h-1
m3 x h-1

25
25

Max. pumping speed for helium at the inlet flange

l/s

8

s

<1

Time constant of the leak signal
(blanked off, 63 % of final value)
Leak rate measurement range

mbar x l x s-1

1 x 10-12 to 1 x 10-1

Time until ready for operationmin

180° magnetic sector field

Ion source

2 yttrium/iridium long-life cathodes

Detectable massesamu

Dimensions (W x H x D)
Weight

1 x 10-12 to 1 x 10-1

<3

Mass spectrometer

Cable length for the hand unit

1 x 10-11 to 1 x 10-1

3 (2.25)

mbar x l x s-1, atm x cc x sec-1, Pa x m3 x s-1, ppm, Torr x l x s-1, g/a, oz/y

Units of measurement (selectable)

Test port

Leak Testing Instruments

2, 3 and 4
DN

1 x 25 KF

m

4

mm
kg (lbs)

540 x 1350 x 1150
119 (263)

128 (283)

115 / 125 (254 / 276)

CART L 200 plus

CART L 200 dry

CART Modul L 200 plus

CART L 200 plus with partial flow pump set
TRIVAC D 25 B

Part No. 140 85 L

–

–

CART L 200 dry with partial flow pump set
Scroll pump

–

Part No. 140 75 L

–

–

–

upon request

–

–

upon request

Or dering Info rmation

Modul 200 plus 1) with

CART
Scroll pump

TRIVAC D 25 B
1)

Without integrated backing pump

C17

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17.13

Leak Testing Instruments

Accessories

Calibrated Leaks for Vacuum and Sniffer Applications
Calibrated leaks are required for the alignment of
mass spectrometers, for the calibration of leak
rates and for determining the response time of
vacuum systems.

Test leaks

Calibrated Leaks for Vacuum Applications

Advantages to the User

TL 4 and TL 6
Calibrated leaks without gas reservoir (capillary
type of leak) for sensitivity and signal response
time determinations during vacuum leak detection and for determination of sniffer sensitivity for
overpressure leak detection. Nominal leak rate
ranges 10-4 mbar x l x s-1 for TL 4 and
10-6 mbar x l x s-1 for TL 6. Suitable for helium.
A purging valve with hose nozzle permits a rapid
exchange of the gas in the dead volume.

◆ Factory certificate (included) in accordance
with DIN 55 350-18-4.2.2

the range of 10-5 mbar x l x s-1. Special calibrated leak for use in a vacuum.
TL 7
Helium calibrated leak (capillary leak) with helium
reservoir and electromagnetically operated valve,
for installation in the ULTRATEST L 200. Leak
rate range 10-7 mbar x l x s-1. The electromagnetically operated valve provided permits the
opening and closing of the calibrated leak to be
controlled by the leak detector’s software.

TL 4-6
Helium calibrated leak (capillary leak) for gross
leaks, adjustable in the range between 10-4 to
10-6 mbar x l x s-1, with exchangeable helium
reservoir, pressure gauge and two manually operated valves. For calibration of leak rate readings
and the alignment of helium mass spectrometers
in the vacuum pressure range and for determining the sensitivity of sniffers in the overpressure
range.

TL 8 and TL 9
Helium calibrated leak calibrated for a leak rate in
the range of 10-8 mbar x l x s-1 (helium leak rate)
for TL 8 and 10-9 mbar x l x s-1 for TL 9, with gas
reservoir and diaphragm shutoff valve. For alignment of a helium mass spectrometer, for calibration of the leak rate display of helium leak detectors and for response time measurements in
connection with larger volumes.

TL 5
Calibrated helium leak (capillary leak) with reservoir which may be refilled and with a leak rate in

Note
All calibrated leaks with the exception of the TL 5
are not suited for use in a vacuum.

◆ Highly accurate
◆ Very low temperature dependence
◆ Determination of the nominal leak rate by
comparison with a calibrated leak having a
PTB 1) certificate
◆ DKD 2) certificate (optional) traceable to PTB
◆ Custom models for special applications
The nominal leak rate applies only if the calibrated leak has been connected to a vacuum system
at a pressure of less than 1 mbar.
1)
2)

Federal Institution of Physics and Technology
German Calibration Service

Calibrated Leaks for Sniffer Applications
These calibrated leaks have been set to a fixed
value within the typical leak rate range (see
Ordering Information).
The exchangeable calibration gas reservoir is
monitored through the built-in manometer.

Helium calibrated leaks
S-TL 4 to S-TL 6 with leak rates from 10-4 to
10-6 mbar x l x s-1.

Set of Calibrated Leaks for Power Plants
These three calibrated leaks of 1000, 100 and
10 mbar x l x s-1 allow leak tests under partial
flow conditions under the ambient conditions of
power plants.

C17.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Leak Testing Instruments

Leak Rate Range

Leak Detection Method

Connection Flange

TL 4, without helium gas reservoir

10-4 mbar x l x s-1

Vacuum and sniffer

DN 16 KF

TL 6, without helium gas reservoir

10-6 mbar x l x s-1

Vacuum and sniffer

DN 16 KF

TL 4-6, with helium gas reservoir

10-4 to 10-6 mbar x l x s-1

Vacuum and sniffer

DN 16 KF

TL 5, mit He-Gasvorrat

10-5 mbar x l x s-1

Vacuum

Discharging opening

TL 7, with helium gas reservoir

10-7 mbar x l x s-1

Vacuum (for installation in the L 200 plus)

DN 10 KF

TL 8, with helium gas reservoir

10-8 mbar x l x s-1

Vacuum

DN 10 KF

TL 9, with helium gas reservoir

10-9 mbar x l x s-1

Vacuum

DN 10 KF

S-TL 4, with helium gas reservoir

10-4 mbar x l x s-1

Sniffer

Nozzle

S-TL 5, with helium gas reservoir

10-5 mbar x l x s-1

Sniffer

Nozzle

S-TL 6, with helium gas reservoir

10-6 mbar x l x s-1

Sniffer

Nozzle

Technical Data

Ordering Information

Calibrated Leak

TL 4, without helium gas reservoir *)

Part No. 155 65

TL 6, without helium gas reservoir *)

Part No. 155 66

TL 4-6, with helium gas reservoirt *)

Part No. 155 80

TL 5, mit He-Gasvorrat *)

Part No. 122 67

TL 7, with helium gas reservoir,
for installation within the L 200 *)

Part No. 140 23

TL 8, with helium gas reservoir *)

Part No. 165 57

TL 9, with helium gas reservoir *)

Part No. 144 08

S-TL 4, with helium gas reservoir *)

Part No. 122 37

S-TL 5, with helium gas reservoir *)

Part No. 122 38

S-TL 6, with helium gas reservoir *)

Part No. 122 39

Set of calibrated leaks for power plants
1000, 100, 10 mbar x l x s-1

Part No. 115 16

Rubber bladder

Part No. 200 20 218

Hose clamp

Part No. 200 20 217

Helium can; 1 l, 12 bar (for TL 4-6)

Part No. 252 001

DKD calibriation for TL 7/8

Part No. 154 15

*) with factory certificate

C17

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17.15

Leak Testing Instruments

Accessories

Screw-in Calibrated Leaks
The manufacturers of helium leak testing systems
are in need of calibrated leaks of various sizes
with individually adjusted leak rates for the
purpose of setting up and calibrating their
systems.

Calibrated leak with screw-in sleeve

Depending on the type of application these
calibrated leaks are either installed in the test
sample as a master leak or used as a continually
available facility in the test chamber itself.

Calibrated leak with pin type casing

LEYBOLD is now offering a new family of
calibrated leaks which are capable of meeting the
requirements concerning type and required leak
rate.

Calibrated leak with cylindrical casing

Calibrated Leak with
Screw-in Sleeve

Calibrated Leak with
Pin Type Casing

Calibrated Leak with
Cylindrical Casing

Is used as a so-called master leak to check the
entire helium leak testing system.

Serves as a calibrated leak for the entire helium
leak testing system without being influenced by
the presence of a test sample.

Is used to check the sensitivity of a sniffing
facility.

Generally two leaktight test samples are equipped
with these calibrated leaks. These will ensure
proper separation between “passed and rejected”
parts.
They are fitted to the customer’s test samples
either by a welded joint or the screw-in sleeve is
glued in place.

Typical Applications

Here a dummy is placed in the test chamber. The
connection to the test chamber is directly by a
DN 10 KF fitting. The test gas connection is
either by a VCO fitting or a hose nozzle for
flexible connections.

Before and after the actual test, the operator
checks the sensitivity of his test facility within
the scope of a plausibility check.
The connection on the side of the customer’s
system is provided via a VCO fitting for a
diameter of 10 mm.

Connections on the side of the customer’s
system are
- 16 KF running to the vacuum chamber
- Hose nozzle, 10 mm in diameter or
VCO fitting, 10 mm in diameter

◆ As a master calibrated leak built-in directly
into the test sample
◆ Directly installed to the test chamber
◆ Use as a calibrated leak for sniffer
applications

Advantages to the User
◆ Various types adapted to different customer
requirements
◆ Simple to operate
◆ Easy to install
◆ Ideal installation dimensions
◆ As a rule, all calibrated leaks are supplied with
a certificate (factory certificate) indicating the
leak rate which has been set up

C17.16

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Leak Testing Instruments

Leak rate as a function of applied test pressure vs. 0 bar

Calibrated leak with screw-in sleeve

Calibrated leak with pin type casing and hose nozzle

Calibrated leak with pin type casing and VCO fitting

Calibrated leak with cylindrical casing and VCO fitting

Technical Data
Leak rate

mbar x l x s-1

Calibrated Leak
Casing
only

Or dering Information * )
Calibrated leak
with screw-in sleeve
with pin type casing and VCO fitting
with pin type casing and hose nozzle
with cylindrical casing and VCO fitting

Field 1
1 - 10-4

Field 2
10-2 - 10-5

C17

Field 3
10-3 - 10-8

Calibrated Leak
–
Part No. 143 03
Part No. 143 07
Part No. 143 11

Part No. 143 00
Part No. 143 04
Part No. 143 08
Part No. 143 12

Part No. 143 01
Part No. 143 05
Part No. 143 09
Part No. 143 13

Part No. 143 02
Part No. 143 06
Part No. 143 10
Part No. 143 14

*) When ordering please always state leak rate, test pressure and helium concentration

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17.17

Leak Testing Instruments

Accessories

Accessories for the L 200 plus , L 200 dry and Modul L 200 plus

CART 200 (standard steel, painted)

CART 200
For the L 200 plus, L 200 dry and Modul
L 200 plus; including shelf and holder for gas
cylinders; made of painted sheet steel.

Transport case

Search gas spray gun

Transport Case
For impact protected transportation of the L 200 plus;
complete with strong carrying handles and plastic
castors. Separate case for accessories.

Search Gas Spray Gun
The search gas spray gun with PVC hose (5 m
long) is used for well aimed spraying of search
gas at places where a leak is suspected.

The CART’s are prepared for accommodating the
Scroll and the TRIVAC D 25 B pumps.

Partial flow system without pump

Partial Flow System L 200 plus and L 200 dry
For evacuation of test objects up to 100 l.
Gross leak detection up to 10 mbar x l x s-1.
Maximum test pressure: 1000 mbar.

Replacement ion source

Extension line

Replacement Ion Source
Complete replacement component, including two
built-in yttrium coated iridium cathodes

Equipment:
Valve block (with inlet valve, venting valve,
bypass or purging valve) plus right-angle bellows
valve DN 25 KF made of stainless steel, solenoid
drives, suited for remote control by the L 200 plus,
mains power 230 V / 50/60 Hz.

8 m Extension Line
The use of extension lines permits operation of
the L 200 plus up to 30 m away from the test
objects. A maximum of three extension lines (of 8
m each) may be connected in series.

PC software LeakWare
The Windows PC software is used for data acquisition, documentation of the measurements and
to control the operation of the leak detector.

The partial flow systems are available without
pumps or in mobile systems with oil-sealed
TRIVAC D 25 B rotary vane pumps or dry scroll
pumps.

Hardware > 486 DX and 8 MB Ram
Software Windows 95, 98, NT, 2000.

PC software LeakWare

C17.18

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Technical Data

Leak Testing Instruments

Accessories

Transport case

kg (lbs)

16.5 (36.4)

Transport cart CART 200

kg (lbs)

39 (86.1)

Partial flow system
for L 200; 230 V / 50/60 Hz, without pump
for L 200 dry; 230 V / 50/60 Hz, without pump

kg (lbs)
kg (lbs)

5.3 (11.7)
5.8 (12.8)

Or dering Info rmation

Accessories

Transport case

Part No. 140 96

Transport cart CART 200

Part No. 140 93

Partial flow system *)
for L 200; 230 V / 50/60 Hz, without pump
for L 200 dry; 230 V / 50/60 Hz, without pump

Part No. 140 20
Part No. 140 29

Pumps
TRIVAC D 25 B, 230 V / 50/60 Hz
Scroll, 230 V / 50/60 Hz

Part No. 113 35
Part No. 200 000 214

AF 16-25 exhaust filter, for partial flow system

Part No. 189 11

Replacement ion source

Part No. 165 04

PC software LeakWare

Part No. 140 90

8 m long extension line

Part No. 140 22

Search gas spray gun

Part No. 165 55

*)

5 centering rings, 5 clamping rings and 1 vacuum hose 1 m with DN 25 KF are included

C17

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17.19

Leak Testing Instruments

Accesssories

Helium Sample Probes (Sniffers)
Helium sniffers in connection with the leak detectors are used for leak testing test samples in
which a helium overpressure is present. Besides
accurate pinpointing of leaks it is also possible to
determine the leak rate of the escaping helium.

Helium sniffer line SL 200

Helium sniffer QUICK-TEST QT 100 with sniffer

Advantages to the User

Typical Applications

◆ Chemical production plants

Helium Sniffer Line SL 200 for L 200 plus

◆ Storage and transportation vessels for gases
and liquids

◆ Supply and phone lines laid in the ground

◆ Gas supply systems

◆ Window and door seals of car bodies, refrigerators and alike

◆ Sniffer line connects directly at the test
connection
◆ Very fast response

◆ Gas compressors

◆ Extremely low detection limit
< 1 x 10-7 mbar x l x s-1

◆ Components for the cooling and air
conditioning industries

◆ Rigid sniffer tips 120 mm (included)

◆ Heat pumps and components for thermal
energy recovery units

◆ Very rugged industrial design

◆ Power station condensers and turbines

◆ Revision checks on leak testing systems
◆ Measurement of helium concentrations ranging from ppm to %
◆ All hollow objects exposed to overpressures

Helium Sniffers QUICK-TEST QT 100 for L 200 plus

SL 200

QT 100

< 10-7

10-6

–

100-230 V, 50/60 Hz

<1
–
–

1
<6
20

25 KF

25 KF

0.6 (1.3)

3.5 (7.7)

SL 200

QT 100

Part No. 140 05

–

Helium sniffer QUICK-TEST QT 100

–

Part No. 155 94

Sniffer line for the QT 100
05 m
20 m
50 m

–
–
–

Part No. 140 08
Part No. 140 09
Part No. 121 83

Tec hnic al Data

◆ Sniffer leak detection for greater distances
between test object and leak detector
◆ Diaphragm pump for sucking the search gas
◆ Smallest detectable leak rate 1 x 10-6
mbar x l x s-1
◆ Short response and decay times
◆ High sniffer velocity
◆ Switching power supply, can be run off mains
voltages from 100 to 230 V AC

mbar x l x s-1

Smallest detectable leak rate
Supply voltage
Signal response time, approx.
at a length of
05 m
20 m
50 m

s
s
s

Connection flange

DN

Weight

kg (lbs)

Order ing Information
Helium sniffer line SL 200
4 m long, straight handle
with red/green LED for go/no-go indication,
rigid and flexible sniffer tip 120 mm

C17.20

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

Leak Testing Instruments

Connection Flanges
Leak Detectors

Helium Sniffers

Calibrated Leaks

L 200 plus

–

DN 25 KF

SL 200

–

DN 25 KF

TL 4

–

DN 16 KF

L 200 dry

–

DN 25 KF

QT

–

DN 25 KF

TL 6

–

DN 16 KF

Modul L 200 plus

–

DN 25 KF

ST 100

–

DN 25 KF

TL 4-6

–

DN 16 KF

If components of the same nominal width are connected, only one centering ring and one clamping ring will be required.

Connection Components
When wanting to connect accessories (helium sniffer and calibrated leaks) to a leak detector, the following reducers and components may be necessary:

Reduction

Reducers

Centering Rings
Stainless steel/FPM

Clamping Rings
Aluminium

DN 25 / 16 KF

Part No. 183 86, aluminium or
Part No. 885 04, stainless steel

DN 25 KF,
DN 16 KF,

Part No. 883 47
Part No. 883 46

DN 20 / 25 KF, Part No. 183 42
DN 10 / 16 KF, Part No. 183 41

DN 40 / 25 KF

Part No. 183 87, aluminium or
Part No. 885 05, stainless steel

DN 25 KF,
DN 40 KF,

Part No. 883 47
Part No. 883 48

DN 20 / 25 KF, Part No. 183 42
DN 32 / 40 KF, Part No. 183 43

DN 40 / 16 KF

Part No. 183 89, aluminium or
Part No. 885 07, stainless steel

DN 16 KF,
DN 40 KF,

Part No. 883 46
Part No. 883 48

DN 10 / 16 KF, Part No. 183 41
DN 32 / 40 KF, Part No. 183 43

The following metal hoses are recommended to connect the leak detectors to systems:

Nominal Width

Length

Ordering Information

DN 16 KF

1.0 m

Part No. 868 01

DN 16 KF

0.5 m

Part No. 867 91

DN 25 KF

1.0 m

Part No. 868 03

DN 25 KF

0.5 m

Part No. 867 93

DN 40 KF

1.0 m

Part No. 868 01

DN 40 KF

0.5 m

Part No. 867 95

Further connecting components, like quick clamping rings and other components are described in Product Section C13
“Vacuum Fittings and Feedthroughs”

C17

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C17.21

Leak Testing Instruments

C17.22

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

TST S und D

C18

Turboradial Blowers
TURBOSTREAM
Single-Stage and Dual-Stage

Turboradial Blowers

Contents
General
TURBOSTREAM Blowers for the Laser Industry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C18.02

Products
Turboradial Blowers
TURBOSTREAM TST S (single-stage) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C18.04
TURBOSTREAM TST D (dual-stage) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C18.08

TURBOSTREAM Blowers for the Laser Industry
Beginning in 1988, the TURBOSTREAM technology was introduced by LEYBOLD VAKUUM GmbH.
Since that time improvements have been worked
out and implemented together with our customers on a continual basis. This was very much
facilitated by the modular concept of the units,
which also today puts us in a position where we
are able to fulfil your future requirements as to a
tailor-made solution.

Today the unique TURBOSTREAM range from
LEYBOLD is capable of improving the capabilities
of your Laser system both at the Laser manufacturer and the end user with regard to:

TURBOSTREAM Blower and
Fast-flow CO 2 Laser

♦ Quality
♦ Productivity
♦ Compactness
♦ Efficiency
♦ Reliability and
♦ Saving of costs
Just see how this works for you!

The CO2 containing gas mixture which maintains
in the resonator the laser effect is discharged
from the resonator in the hot state and is cooled
in the heat exchanger. After the gas has passed
through the TURBOSTREAM, the gas is cooled
once more in the downstream heat exchanger
before it is returned back into the resonator.

1
2
3
4
5
6
7
8
9

Resonator
Laser mirror
Power supply
TURBOSTREAM blower
SOGEVAC vacuum pump
Control valve / roughing line
Metering orifice and bypass valve
Fresh gas supply
Heat exchanger

Gas circulation in a fast axial flow CO2 laser with TURBOSTREAM blower

C18.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

Turboradial Blowers

Design Principle

Supplied Equipment

Electric Power Supply

The gas flows via the inlet flange (1) into the
pump chamber of the blower. There it is radially
accelerated by the rotating blade wheel (2) and is
deflected via diffuser (4) into the ducts (5).

Depending on customer requirements the mechanical interface to the resonator can be designed
either as a pump chamber housing or a shroud.
The pump chamber housing completely matches
the contour of the blade wheel. Only the intake
piping and the two gas discharge pipings need to
be provided for integrating this blower flow-wise
in the resonator circuit. The shroud version of the
blower utilises for a partial section of the blade
wheel the matching structures provided by the
system. This arrangement of “resonator / TURBOSTREAM with shroud” can thus be more compact.

The TURBOSTREAM blower is supplied with
power from a separate frequency converter, the
COMBIVERT unit. TURBOSTREAM blower and
COMBIVERT are connected to each other by a
connecting cable and by a PTC monitoring cable.

The gas then leaves the TURBOSTREAM through
the outlet flanges (3).
The TURBOSTREAM blower is driven by a medium-frequency 3-phase asynchronous motor (8).
Blade wheel (2) and motor rotor are located on
one shaft (7). The stator of the motor has been
built into the motor housing (13). The two hybrid
ball bearings (6) of the shaft are oil-lubricated.
An oil pump (10) feeds the oil through the shaft
to the bearings. The motor housing of the
TURBOSTREAM is water-cooled (9).
Pump chamber housing and motor housing are
separated by a wear-free sealing gap.
Pump chamber housing and motor housing are
separated by a wear-free sealing gap. To prevent
small amounts of oil mist from enter-ing the
pump chamber via the gap (14), a small quantity
of gas is constantly extracted (12) from the
motor housing by the vacuum pump of the laser
system. This ensures a steady gas flow from the
pump chamber to the motor housing, reliably
excluding the entry of oil into the pump chamber.

♦ Generally all TURBOSTREAM blowers are
equipped with a vibration sensor (GUARD)
which monitors the ball bearings. The electrical connection between vibration sensor and
frequency converter is provided by a connecting cable which is laid separately.
♦ The TURBOSTREAM is equipped with an integrated motor temperature monitoring facility
(PTC) which will protect the motor against
overheating in case the motor cooling facility
fails because of an inadequate supply of cooling water, for example.

The COMBIVERT must be installed in an electrical
cabinet. It is short-circuit proof, can sustain short
circuits to ground and is protected against overloading. It is provided with a 5 digit display for
displaying the operating status, has a floating
contact for error status and is equipped with a
connector for the PTC resistor which monitors the
motor temperature.
The GUARD vibration sensor is supplied with
power from the frequency converter. The error
status generated when the GUARD comes into
action is evaluated by the frequency converter
and results in an interruption of the power supply
to the TURBOSTREAM blower and an error message on the frequency converter.
The drive of the TURBOSTREAM blower and the
COMBIVERT are perfectly matched to each other.

♦ Some versions of the TURBOSTREAM are
equipped with an oil level monitoring facility
which automates regular monitoring of the oil
level.

Inlet flange
Blade wheel
Outlet flanges
Diffuser
Ducts
Ball bearings
Shaft
Motor
Cooling coils
Oil pump
Oil supply system
Connection for vacuum pump
Motor housing
Sealing gap
Shroud for
TST S 1000 S, S 1500 S
16 Pump chamber housing for
TST S 1500, S 2500

01
02
03
04
05
06
07
08
09
10
11
12
13
14
15

C18

Cross-section of a TURBOSTREAM blower, left upper half: with shroud; right upper half: with pump chamber housing

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C18.03

Turboradial Blowers

TURBOSTREAM TST S (single-stage)
øc

d
g

d

f

c
DN 2
d2

k
h3

h
d1

h

h2

h2

h4

g

a

h1

a

h1

h

d1

e1

h1

h3

b

a

h4
c
a1

e2

Advantages to the User

h1

b

♦ High flow rate at small size
♦ Pump chamber free of hydrocarbons
♦ Non-wearing seal for the pump chamber
♦ Low gas exchange rates
♦ Pump sections in contact with the medium
are made of a special corrosion resistant
aluminium alloy
♦ Prefect integration in gas laser systems
♦ Simple to operate, minimum maintenance
requirements
♦ Low-vibration and low-noise operation
♦ Gas flow free of pulsations
♦ Reliable and rugged owing to oil lubricated
hybrid ball bearings
♦ Motor protection via built-in PTC resistor
♦ Water cooled motor casing
♦ Vibration sensor for monitoring the bearings
♦ Free of non-ferrous metals, including the cooling water circuit

C18.04

g

DN1

i

b1

d3

Dimensional drawing for the TURBOSTREAM TST S with pump chamber housing (left), with shroud (center)
and COMBIVERT (right top: dimensions, right bottom: connection dimensions)

Dimensions for TURBOSTREAMs with pump chamber
TST
S 1500
S 2500
DN1
160 ISO-F
160 ISO-F
DN2
100 ISO-F
100 ISO-F
a
mm
200.5
250
in.
7.89
9.84
b
mm
423
423
in.
16.65
16.65
c
mm
5
5
in.
0.20
0.20
ld
mm
420
420
in.
16.54
16.54
l d1
mm
170
170
in.
6.69
6.69
l d2
mm
145
145
in.
5.71
5.71
l d3
mm
200
200
in.
7.87
7.87
e1
mm
M 8 x 15
M 8 x 15
in.
M 8 x 15
M 8 x 15
e2
mm
M 10 x 18
M 10 x 18
in.
M 10 x 18
M 10 x 18
h
mm
355
357
in.
13.98
14.06
h1
mm
77.5
77.5
in.
3.05
3.05
h2
mm
210
210
in.
8.27
8.27
h3
mm
128.5
128.5
in.
5.06
5.06
h4
mm
19
19
in.
0.75
0.75

Dimensions for TURBOSTREAMs with shroud
TST
S 1000 SNG
S 1500 SN/SG/SNX
a
mm
250
250
in.
9.84
9.84
d
mm
320
320
in.
12.6
12.6
l d1
mm
170
170
in.
6.69
6.69
f
mm
167.5
167.5
in.
6.59
6.59
g
mm
280
280
in.
11.02
11.02
h
mm
322.5
325
in.
12.7
12.7
h1
mm
77.5
77.5
in.
3.05
3.05
h2
mm
207
207
in.
8.15
8.15
h3
mm
97.5
100
in.
3.84
3.94
i
mm
99.5
111
in.
3.92
4.37
k
mm
10.0
12.5
in.
0.39
0.49
h4
mm
19
19
in.
0.75
0.75

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turboradial Blowers

Technical Data
Pumping speed (max. volume flow rate
within the specified operating range)

S 1000

m3 x h-1 (cfm)

Compression ratio, max.1)
Permissible intake pressure, max.1)

rpm

S 1500

1400 to 2100 (824 to 1236)

1900 to 3000 (1118 to 1766)

1 : 1.35

1 : 1.45

1 : 1.35

120 (90)
41400

44 040

Cooling water consumption, approx.
(max. 6 bar (4.5 x 103 Torr))

l x h-1

Evacuation connection as an angled
fitting for the hose

mm (in.)

80

110 (180 for SNX version)

l x h-1

80

Maximum extraction rate at the motor casing 2)

l x h-1

400

Noise level at zero throughput 3)

dB(A)

≤ 56

Weight
with pump chamber housing
with shroud

DN
DN
kg (lbs)
kg (lbs)

Technical Data
Main supply voltage, 50/60 Hz
Power consumption
Main fuse rating max.
Permissible ambient temperature

–

–
26 (57.4)

6A
V AC

Weight
1)
2)
3)
4)

160 ISO-F

160 ISO-F

100 ISO-F

100 ISO-F

56 (123.6)
26 (57.4)

56 (123.6)
–

COMBIVERT
12 A

16,5 A

305 - 500

kVA

4.1

A

10

°C (°F)

8.3

11

20

25

0 to 45 (32 to 113)

Cooling
Type of protection to DIN 40 050

120

Elbow union 8/6 (0.31/0.24)

Minimum extraction rate at the motor casing 2)

Gas discharge flange (2 pieces) 4)

39000

G 3/8"

Cooling water connections, inside thread

Gas admission flange 4)

S 2500

800 to 1500 (472 to 885)

mbar (Torr)

Nominal speed

TURBOSTREAM TST

air
IP
kg (lbs)

20
14 (30.9)

19 (41.8)

31 (68.4)

For laser gas 70 % He, 25 % H2, 5 % CO2
Gas consumption referred to operating pressure
To DIN 45 635
Only for the models with pump chamber housing

C18

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C18.05

Turboradial Blowers

Ordering Information
TURBOSTREAM

S 1000 SN (with shroud and oil level sensor)
S 1500 (with pump chamber housing)
S 1500 SN (with shroud and oil level sensor)
S 1500 SG (with shroud and vibration sensor)
S 1500 SNX (with shroud, oil level sensor and
stronger motor 1)
S 2500 (with pump chamber housing)

S 1000

TURBOSTREAM TST
S 1500

S 2500

Part No. 858 69
–
–
–

–
Part No. 858 70
Part No. 858 79
Part No. 858 77

–
–
–
–

–
–

Part No. 858 74
–

–
Part No. 858 80

Hybrid bearing sensor
Guard 2 (retrofit kit)
with 2.5 m cable
Guard 3 (retrofit kit)
without cable
cable
2.5 m
cable
5m

Part. No. 858 03
Part. No. 896 201
Part. No. 870 000 136
Part. No. 870 000 137

Motor/PTC-cable set for COMBIVERT
2.5 m
4m

Part. No. 858 54
Part. No. 858 56

Metering orifice
DN 16 KF, approx. 08 NL x h-1
DN 16 KF, approx. 26 NL x h-1

Part. No. 858 01
Part. No. 896 152

Oil level sensor with 2 m long cable (retrofit kit)

Part. No. 119 99

TURBOSTREAM oil
TST oil F 12

600 ml (0.64 qt)

Part. No. 896 102

SOGEVAC SV 16 SL Rotary vane vacuum pump
with Motor for 220 - 240 V / 380 - 415 V, 50 Hz
with Motor for 208 - 230 V / 440 - 460 V, 60 Hz

Part. No. 109 01 21

SOGEVAC SV 25 SL Rotary vane vacuum pump
with Motor for 220 - 240 V / 380 - 415 V, 50 Hz
with Motor for 208 - 230 V / 440 - 460 V, 60 Hz

Part. No. 09 03 51

Ordering Information
COMBIVERT with motor-filter
6A
12 A
16,5 A
1)

10.F4
upon request
–
–

COMBIVERT
13.F4

16.F4

–
Part No. 858 78
upon request

–
Part No. 858 78
upon request

Only in connection with COMBIVERT 16.5 A

C18.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turboradial Blowers

N otes

C18

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C18.07

Turboradial Blowers

TURBOSTREAM TST D (dual-stage)
Ø 240
31

4 x M8 x 14

110

133

45°

232

DN 63 ISO-F
11

456

A

B
250,5

The dual-stage TURBOSTREAM D 2500 is a
market-orientated development based on our
well-proven single-stage series.

10

Ø 230

Advantages to the User
♦ High flow rate at small size
♦ Pump chamber free of hydrocarbons

430

♦ Non-wearing seal for the pump chamber
♦ Low gas exchange rates
♦ Pump sections in contact with the medium
are made of a special corrosion resistant
aluminium alloy

45°
4 x M10 x 18

♦ Prefect integration in gas laser systems

137

♦ Simple to operate, minimum maintenance
requirements
♦ Low-vibration and low-noise operation

434

200
DN 160 ISO-F

Dimensional drawing for the TURBOSTREAM TST D 2 500 NG

♦ Gas flow free of pulsations
♦ Reliable and rugged owing to oil lubricated
hybrid ball bearings
♦ Motor protection via built-in PTC resistor
♦ Water cooled motor casing
♦ Vibration sensor for monitoring the bearings
♦ Free of non-ferrous metals, including the
cooling water circuit for cooling the motor

C18.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Turboradial Blowers

Technical Data
Pumping speed (max. volume flow rate
within the specified operating range)

TURBOSTREAM TST

D 2500 G

D 2500 NG

m3 x h-1 (cfm)

1800 to 2800 (1062 to 1648)

Compression ratio 1), max.
Permissible intake pressure, max.1)

1 : 1,8
mbar (Torr)

Nominal speed

120 (90.0)
40 200

rpm

G 3/8"

Cooling water connections, inside thread
Cooling water flow, min. at. a max.
admission temperature of 30 °C
Extraction connection at the motor housing
for connecting a vacuum pump
as a small flange
as angled fitting for hose link

l x h-1

DN
mm (in.)

300

16 KF
–

16 KF
–

Minimum extraction rate at the motor casing 2)

l x h-1

80

Maximum extraction rate at the motor casing 2)

l x h-1

400

Noise level at zero throughput 3)

dB(A)

Gas admission flange 4)
Gas discharge flange (2 pcs.) 4)

DN
DN

Weight

kg (lbs)

Power consumption
Main fuse rating, max.
Permissible ambient temperature

≤ 60

80 (176.6)

80 (176.6)

Weight
1)
2)
3)
4)

50 (110.4)

COMBIVERT 33 A with Motor filter
V AC

305 - 500

kVA

23

A

50

°C (°F)

Cooling
Sype of protection to DIN 40 050

–
8/6

160 ISO-F
63 ISO-F

Technical Data
Main supply voltage, 50/60 Hz

D 2500 SN

0 bis 45 (32 to 113)
water

IP
kg (lbs)

air
20

43 (94.8)

38 (83.8)

For laser gas 70 % He, 25 % H2, 5 % CO2
Gas consumption referred to operating pressure
To DIN 45 635
Only for the models with pump chamber housing

C18

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C18.09

Turboradial Blowers

Ordering Information

D 2500 G

TURBOSTREAM TST
D 2500 NG

D 2500 SN

TURBOSTREAM

with pump chamber housing, vibration sensor,
metering orifice and motor cable, 2.5 m long
with pump chamber housing, oil level sensor
and vibration sensor
with pump chamber housing and oil level sensor

Part No. 877 011

–

–

–
–

Part No. 858 46
–

–
Part No. 858 48

Vibration sensor
Guard 2 (retrofit kit)
with 2.5 m cable
Guard 3 (retrofit kit)
without cable
cable 2.5 m
cable 5.0 m

Part No. 858 03
Part No. 896 201
Part No. 870 000 136
Part No. 870 000 137

Motor/PTC-cable set for COMBIVERT
2.5 m
4.0 m

Part No. 120 40
Part No. 858 08

Metering orifice
DN 16 KF, ca. 8 NL x h-1
DN 16 KF, ca. 26 NL x h-1

Part No. 858 01
Part No. 896 152

Oil level sensor with 2 m long cable (retrofit kit)

Part No. 119 99

TURBOSTREAM oil
TST oil F 12
TST oil 22

300 ml
600 ml

–
Part No. 896 112

Part No. 896 101
–

SOGEVAC SV 16SL Rotary vane vacuum pump
with Motor for 220 - 240 V / 380 - 415 V, 50 Hz
with Motor for 208 - 230 V / 440 - 460 V, 60 Hz

Part No. 109 01 21

SOGEVAC SV 25SL Rotary vane vacuum pump
with Motor for 220 - 240 V / 380 - 415 V, 50 Hz

Part No. 109 03 21

Part No. 896 101
–

with Motor for 208 - 230 V / 440 - 460 V, 60 Hz

Ordering Information
COMBIVERT with motor-filter
33 A, air cooled
33 A, water cooled

C18.10

COMBIVERT 16.F4
Part No. 120 30
Part No. 858 51

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

UNIVEX

C19

High Vacuum Experimentation Systems
UNIVEX 300, UNIVEX 450
UNIVEX 350, UNIVEX 450 B
Special plants

High Vacuum Experimentation Systems

Contents

General
Applications and Accessories / Process Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.02
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.03

Products

Bell Jar System
UNIVEX 300. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.04
UNIVEX 450. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.06
Door System
UNIVEX 350. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.08

Accessories
Standard Accessories for UNIVEX 300, 350, 450 and 450 B . . . . . . . . . . . . . . . . . . . . . . . . . C19.10
Components
for Glow Discharge Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.11
for Thermal Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.12
for Electron-Beam Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.13
for High Rate Sputtering. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.14
for Film Thickness Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.14

Miscellaneous

0B

nts

pla

EX

ial

IV

ec

Sp

UN

Applications

Bell jar system

Passive components

◆

◆

◆

◆

Sensor technology

◆

◆

◆

◆

Opto-electronics

◆

◆

◆

◆

Tribology

◆

◆

◆

◆

Soldering

◆

◆

◆

◆

Dactyloscopy

45

0
35
EX
IV
UN

IV
UN

UN

IV

EX

EX

45

30

0

0

Special Units
UNIVEX 450 B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.15
UNIVEX 450 for Daktyloscopy, UNIVEX 450 C, Test systems . . . . . . . . . . . . . . . . . . . . . C19.16

Door system

◆

Glove box applications

◆

◆

◆

◆

Special applications

◆

◆

◆

◆

Thermal conduction experiments

◆

◆

◆

◆
◆

◆

Accessories / Process Components
Standard accessories
Base plate and bell jar
Lifting facility, manually operated
Vacuum chamber with door

Page
C19.05 + 07
C19.07

◆

C19.09 + 15

Auxiliary operation
Substrate holder

C19.03

◆

◆

◆

◆

Substrate heater

C19.03

◆

◆

◆

◆

Gas admission

C19.03

◆

◆

◆

◆

Shutters

C19.12

◆

◆

◆

◆

Thin film measurement

C19.14

◆

◆

◆

◆

Custom installations

C19.03

◆

◆

◆

◆

Glow discharge cleaning

C19.11

◆

◆

◆

◆

Thermal evaporation

C19.12

◆

◆

◆

◆

Electron-beam evaporation

C19.13

◆

◆

◆

◆

DC high rate sputtering

C19.14

◆

◆

◆

◆

RF high rate sputtering

C19.14

◆

◆

Process equipment

Sources

C19.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

General

The UNIVEX multi-purpose experimentation
systems were developed by LEYBOLD for applications in research and development, as well as
for setting up pilot production systems.

Special Accessories for
UNIVEX 300, 350, 450
and 450 B

The range of applications for these systems
covers primarily vacuum coating as well as
experiments in vacuum process engineering.

Besides standard process components we can
also supply installations according to customers
requirements, for example for:

The multi-purpose experimentation systems from
LEYBOLD are based on a modern modular concept. The high vacuum pumps are installed horizontally at the level of the base plate or the
vacuum chamber.

♦ Vacuum soldering experiments
♦ Metallurgical experiments
♦ Thermal conduction experiments
♦ Diffusion experiments

High Vacuum Experimentation Systems
Cooling and
Heating Systems
Special experiments require that the temperature
of the samples be maintained constant within a
wide temperature range for the setpoint.
For this LEYBOLD delivers upon request cooling/
heating facilities with LN2 as the refrigerant and
an electric heater, complete with temperature
controller.
Special designs which are manufactured according to customer’s specifications are also available upon request.

♦ Dactyloscopy.

Automatic Pressure Control
Various processes require a constant pressure in
the UNIVEX vacuum chamber. For this purpose
LEYBOLD offers a wide range of different pressure or flow control systems.
Special designs which are manufactured according to customer’s specifications are available
upon request.

Substrate Holders
Upon request LEYBOLD is able to supply substrate holders according to customer’s specifications.
Substrate holders with planetary gear for the
UNIVEX 450 and UNIVEX 450 B are available
upon request.

Substrate Heater
For the purpose of heating substrates, LEYBOLD
offers a variety of heating facilities (radiation heaters, heaters with quartz lamps, for example).
These systems may be combined with different
temperature controllers.
Special designs which are manufactured according to customer’s specifications are available
upon request.

C19

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C19.03

High Vacuum Experimentation Systems

Bell Jar System

UNIVEX 300
1040
486 = 19"
61
Ø 300

LEYBOLD

UNIVEX 300

398

803
= 18 HE
928
620

462

304

566

280

269

Dimensional drawing for the UNIVEX 300 with base plate and bell jar

UNIVEX 300, typical arrangement with stainless steel bell jar and process components

Table-Top System with
300 mm dia. Chamber

Basic Unit

Pump System

♦ The pump system and the electrical supply
system are housed in a 19" rack cabinet.

Advantages to the User

♦ Moreover, the 19" cabinet provides space
(max. 6 height units) for a vacuum gauge and
a thickness measuring instrument as well as
power supply units for the process components.

♦ The standard pumping equipment comprises
a TRIVAC D 8 B two-stage rotary vane pump
and a TURBOVAC 151 turbomolecular pump.

♦ Modular system design
♦ Any kind of process component may be
installed
♦ Process components may be retrofitted
without problems

♦ The basic unit may be placed on a bench top.

♦ Freely accessible vacuum chamber

Vacuum Chamber

♦ Freely accessible base plate

♦ The base plate is attached to the lateral intake
port of the basic unit.

♦ Very simple to operate and use
♦ Pump system adapted to the individual
process

Typical Applications
♦ Vacuum coating in research and development
♦ Special experiments

C19.04

♦ Either a vacuum chamber made of stainless
steel or glass may be placed on the base
plate.

♦ For processes which develop increased quantities of gas or which require low operating
pressures, the TURBOVAC 361 may be builtin.
♦ For processes which involve pumping of
aggressive media, a barrier gas version of the
turbomolecular pump and a rotary vane pump
with a filling of special oil may be supplied.
♦ For especially sensitive processes also a dry
compressing vacuum pump like the EcoDry M
may be used as the backing pump.

Vacuum Measurement
♦ Depending on the type of application, a combination vacuum gauge operating according to
the cold cathode or hot cathode principle may
be installed.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Bell Jar System

Technical Data

Special

TURBOVAC 151

TURBOVAC 361

145

345

l x s-1

Pumping speed for N2

UNIVEX 300

Standard

High vacuum pump

High Vacuum Experimentation Systems

TRIVAC D 8 B / 9.7 m3 x h-1

Backing pump / nominal pumping speed
Supply unit for high vacuum pump

TURBOTRONIK NT 20

Control

Power supply with main switch plug-in

High vacuum connection flange

DN

100 ISO-F, lateral
230 V, 50 Hz, max. 16 A *)

Electrical connection
Cooling water connection; DN 10 hose

bar

Cooling water consumption

4 to 7

l x h-1

50

kg

130

Weight

Or dering Information
Basic unit

Standard

Special

Part No. 030 60

upon request

*) Other voltages and frequencies upon request

Special Accessories for UNIVEX 300
30°

15°

10

DN 40 KF
DN 10 KF

120

373
350

230

Drawn offset
by 90°

380
160

Height = 14
170

DN 100 ISO-K
DN 10 KF

341

Dimensional drawing for the base plate on the UNIVEX 300

300
190

Dimensional drawing for the glass bell jar with implosion protection

Stainless Steel Base Plate

321

Dimensional drawing for the stainless steel bell jar

Pyrex Glass Bell Jar
(Vacuum Chamber)

Stainless Steel Bell Jar
(Vacuum Chamber)

Technical Data and Ordering Information
Lateral high vacuum connection flange

DN 100 ISO-K

Dimensions (H x dia.)

Dimensions (H x dia.)

60 x 350 mm

Height, cylindrical section

Installation holes
Lateral connections
Weight
Base plate, stainless steel

34.5 mm dia. (13 x)

350 x 300 mm
200 mm

Seal

2 x DN 10 KF, 1 x DN 40 KF

Dimensions (H x dia.)
Height, cylindrical section

FPM

Weight

Seal

5.6 kg

Weight

380 x 300 mm
300 mm
FPM
9.6 kg

19 kg
Part No. 030 61

Bell jar, Pyrex glass
1)

Part No. 030 10 1)

With punched steel cover for implosion protection

Bell jar, stainless steel
1)

Part No. 030 12 1)

With DN 100 viewing window and 2 carrying handles; hole at the
top (34.5 mm dia.)

C19

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C19.05

High Vacuum Experimentation Systems

Bell Jar System

UNIVEX 450
404
486

500
2058

1606

1040

454

870
1690

1835

1260
60°

Dimensional drawing for the UNIVEX 450; with base plate, bell jar and hoist

UNIVEX 450, with turbomolecular pump system and various installations

Cabinet Housed System with
450 mm dia. Vacuum
Chamber

Basic Unit

Pump System

♦ The pump system and the electrical supply
system are housed in the UNIVEX 450 cabinet.

♦ The standard pumping equipment comprises
a TRIVAC D 40 B two-stage rotary vane pump
and a TURBOVAC 1000 turbomolecular pump.

Advantages to the User

♦ Moreover, the 19" cabinet provides space
(max. 20 height units) for a vacuum gauge
and a thickness measuring instrument as well
as power supply units for the process components.

♦ For processes which develop increased quantities of gas or which require low operating
pressures, the UNIVEX 450 can also be equipped with cryo pumps.

♦ Modular system design
♦ Any kind of process component may be
installed
♦ Process components may be retrofitted
without problems

Vacuum Chamber

♦ Freely accessible vacuum chamber

♦ The base plate is attached to the lateral intake
port of the basic unit.

♦ Freely accessible base plate
♦ Very simple to operate and use

♦ A vacuum chamber made of stainless steel
may be placed on this base plate.

♦ Pump system adapted to the individual
process

♦ A water-cooled vacuum chamber can also be
supplied.

Typical Applications

♦ The vacuum chamber is moved by the hoist
attached to the basic unit.

♦ Vacuum coating in research and development

♦ For processes which involve pumping of
aggressive media, a barrier gas version of the
turbomolecular pump and a rotary vane pump
with a filling of special oil may be supplied.
♦ For especially sensitive processes also a dry
compressing vacuum pump like the EcoDry M
may be used as the backing pump.

Vacuum Measurement
♦ Depending on the type of application, a combination vacuum gauge operating according to
the cold cathode or hot cathode principle may
be installed.

♦ Pre-production trials
♦ Dactyloscopy
♦ Special experiments

C19.06

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Bell Jar System

Technical Data

Special

TURBOVAC 1100

COOLVAC 1500 CL

1150

1500

l x s-1

Pumping speed for N2

UNIVEX 450

Standard

High vacuum pump

High Vacuum Experimentation Systems

TRIVAC D 40 B / 46 m3 x h-1

Backing pump / nominal pumping speed
Supply unit for high vacuum pump

TURBOTRONIK NT 20

Compressor unit

Power supply

Power supply with automatic pump system control

–

Push gate valve DN 250 ISO-F, 2 angled valves DN 40 KF

Control
Built-in electro-pneumatic valves
High vacuum connection flange

DN

250 ISO-F, lateral
400 V, 3 ph., 50 Hz, max. 32 A *)

Electrical connection
Cooling water connection; DN 10 hose

bar

4 to 7

l x h-1

Cooling water consumption
Compressed air connection, DN 10
Weight

100

140

bar

–

6 to 10

kg

225

350

Standard

Special

Part No. 030 70

upon request

Or dering Information
Basic unit
*) Other voltages and frequencies upon request

Specific Accessories for UNIVEX 450
DN 16 KF
Höhe = 15

340 280 220

DN 40 KF

10

20°
500

DN 250 ISO-K
255

DN 16 KF
20,5° 15°
20,5°

265

Dimensional drawing for the base plate for UNIVEX 450

468

Dimensional drawing for the stainless steel bell jar for UNIVEX 450

Stainless Steel Base Plate

Stainless Steel Bell Jar (Vacuum Chamber)

Technical Data and Ordering Information
Lateral high vacuum connection flange

DN 250 ISO-K

Dimensions (H x dia.)

Dimensions (H x dia.)

115 x 475 mm

Height, cylindrical section

Installation holes
Lateral connections
Weight
Base plate

Seal

34.5 mm dia. (19 x)

Weight

2 x DN 16 KF, 2 x DN 40 KF

500 x 450 mm
400 mm
FPM
23 kg

27 kg
Bell jar, stainless steel

Kat.-Nr. 030 71
1)

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Part No. 030 16 1)

With DN 100 viewing window; hole at the top fitted with a blank flange. Upon request the stainless steel
bell jar may be supplied with a coiled cooling or heating pipe

C19.07

C19

High Vacuum Experimentation Systems

Door System

UNIVEX 350
486 = 19"

486

LEYBOLD

UNIVEX 350

1742
1472
= 33 HE

1652
1233

100
566

566
1132

894
840
380

370

UNIVEX 350

Dimensional drawing for the UNIVEX 350

Door System with 350 mm
dia. Vacuum Chamber

Basic Unit

Pump System

♦ The UNIVEX 350 consists of two separable
19" rack mount cabinets.

Advantages to the User

♦ The process chamber and the pump system
are accommodated in one cabinet.

♦ The standard pumping equipment comprises
a TRIVAC D 16 B two-stage rotary vane pump
and a TURBOVAC TW 700 turbomolecular
pump.

♦ Modular system design
♦ Any kind of process component may be
installed
♦ Process components may be retrofitted
without problems
♦ Vacuum chamber with a door
♦ Freely accessible base plate
♦ Very simple to operate and use via programmable control
♦ For installation into clean-room walls
♦ For RF sputtering
♦ Pump system adapted to the individual
process

Typical Applications
♦ Vacuum coating in research and development
♦ Pre-production trials

♦ The electric power supply with the pump
system controller based on a PLC with display
and operating unit is accommodated in the
second cabinet. This cabinet also houses the
vacuum gauge as well as the power supply
units for the process components.

Vacuum Chamber
♦ The base plate is attached to the base fame.
♦ The door is equipped with a viewing window.
♦ Bottom plate and lid are provided with installation holes.
♦ Additional lateral flanges for installing process
components.
♦ A water-cooled vacuum chamber can also be
supplied.
♦ Evaporation protection plates which may be
easily disassembled are available.

♦ For processes which develop increased quantities of gas or which require low operating
pressures, the UNIVEX 350 can also be equipped with a turbomolecular pump having a
higher pumping speed (TURBOVAC 1000, for
example) or with cryopumps.
♦ For processes which involve pumping of
aggressive media, a barrier gas version of the
turbomolecular pump and a rotary vane pump
with a filling of special oil may be supplied.
♦ For especially sensitive processes also a dry
compressing vacuum pump like the EcoDry M
may be used as the backing pump.

Vacuum Measurement
Depending on the type of application, a combination vacuum gauge operating according to the
cold cathode or hot cathode principle may be
installed.

♦ Special experiments

C19.08

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Door System

Technical Data

Standard

High vacuum pump

680

1500

TRIVAC D 16 B / 18.9 m3 x h-1

TRIVAC D 25 B / 29.5 m3 x h-1

OEM power supply 59 V DC

Compressor unit

Power supply with programmable control

Power supply with programmable control

1 x DN 16 KF

1 x gate valve DN 160, 2 x right-angle valve DN 25, DN 16 KF

Supply unit for high vacuum pump

Built-in electro-pneumatic valves
High vacuum connection flange

Special
COOLVAC 1500 CL

Backing pump / nominal pumping speed

Control

UNIVEX 350

TURBOVAC TW 700
l x s-1

Pumping speed for N2

High Vacuum Experimentation Systems

DN

160 ISO-K
400 V, 3 ph., 50/60 Hz *)

Electrical connection
Cooling water connection; DN 10 hose

bar

Cooling water consumption

4 to 7

l x h-1

25

140

bar

–

6 to 10

kg

350

425

Compressed air connection, DN 10
Weight

Or dering Information

Standard

Special

upon request

upon request

Basic unit
*) Other voltages and frequencies upon request

Vacuum Chamber
Tec hnic al Data

484
440

Vacuum Chamber for UNIVEX 350

Material

500

580

370
220

220

380
195

Dimensions
Inside width
Inside depth
Inside height

Stainless steel

mm
mm
mm

370
380
500

Connections
Front side
Bottom plate
Lid
Rear
Left side
Right side

DN
DN
DN

Door with window
15 installation holes, 34.5 mm dia.
7 installation holes, 34.5 mm dia.
160 ISO-K, 2 x 10 KF, 2 x 40 KF
160 ISO-K, further flanges optional
160 ISO-K, further flanges optional

Weight

kg

55

Or der ing Information
Vacuum chamber

Vacuum Chamber for UNIVEX 350
Is included with the UNIVEX 350

C19

The position, number and size of the flanges and the installation
holes may be varied almost freely according to requirements!

Dimensional drawing for the vacuum camber

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C19.09

High Vacuum Experimentation Systems

Accessories

Standard Accessories for UNIVEX 300, 350, 450 and 450 B

Blank-off screw fitting

Rotary feedthrough with attached drive motor and control cable

Blank-Off Screw Fitting

Rotary Feedthrough

For 34.5 mm dia. hole.

With mount for substrate holder; for all common
bell jar sizes; suitable for 34.5 mm dia. holes.

Motor Drive for
Rotary Feedthrough
With connection flange and coupling; is
electrically operated through the VS 024 supply
unit.

Technical Data and Ordering Information
Material

Stainless steel

Gasket

FPM

Weight

0.1 kg

Total length

400 mm

Dimensions

Shaft dia.; atmosphere/vacuum

8/10 mm

Speed

Max. rotational speed

150 rpm

Electrical power supply

Permissible torque

2 Nm

Weight
Blank-off screw fitting

Part No. 030 40

70 mm dia., 300 mm long
0 to 150 rpm, load dependent control

Weight

24 V/DC
2 kg

2 kg

Rotary Feedthrough

Part No. 030 63

Control Cable, 6-Way

Supply Unit VS 024

Used to connect the motor to the power supply,
complete with plugs.

For driving the motor.

Motor drive for rotary feedthrough

Part No. 030 64

Technical Data and Ordering Information
Length

3m

Weight

0.2 kg

Cabinet
Output

Connection
Weight
Control cable

C19.10

Part No. 030 56

Supply unit VS 024

1/2 19" rack module, 3 HU
24 V/DC, load dependent control
via potentiometer
230 V, 50/60 Hz
3 kg
Part No. 200 02 466

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

High Vacuum Experimentation Systems

Components for Glow Discharge Cleaning

Glow discharge assembly with high voltage feedthrough
and connection cable

C 2000 high voltage power supply unit

Glow Discharge Assembly
With glow discharge electrode, high voltage feedthrough for 34.5 mm dia. hole and connection
cable for fitting to the central rotary feedthrough.

PS 113 Safety Switch

C 2000 High Voltage
Power Supply Unit

PS 113 Safety Switch

For supplying the glow discharge assembly;
with selector switch, meter and timer.

For pressure-dependant locking of the high voltage power supply C 2000.
Connecting the PS 113 to the C 2000 requires the
6-way control cable (Part No. 030 56) (see section
“Accessories”, paragraph “Standard Accessories”).

Technical Data and Ordering Information
Electrode material
Insulation
Max. ratings

Aluminium

Cabinet

Ceramics

Output

2000 V/65 mA

Sealing material of the high voltage feedthrough FPM
Length of the connection cable

2m

Weight

1 kg

Glow discharge assembly
for UNIVEX 300 and 350
for UNIVEX 450 and 450 B

Part No. 030 34
Part No. 030 35

Timer
Connection
Remote control
and locking input
C 2000 High voltage
power supply unit

19 " rack module, 3 HU
2000 V/65 mA, max.
continuously adjustable,
selectable + / – and 50 Hz AC
0 to 6 h max.

Switching pressure

5 mbar below
atmospheric pressure

Connection flange

DN 16 KF

Switching capacity

5 A at 250 V/AC

Weight

0.2 kg

230 V, 50/60 Hz, 150 VA

included

Part No. 032 95

PS 113 safety switch

Part No. 160 14

Variable Leak Valve with
Isolation Valve
Gas admission rate qL 5 x 10-6 to 1 x 103 mbar x l x s-1
Connection flange

DN 16 KF

(see also Product Section C14 “Vacuum Valves”)
Variable leak valve

Part No. 215 010

C19

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C19.11

High Vacuum Experimentation Systems

Accessories

Components for Thermal Evaporation

Single thermal evaporator

Dual thermal evaporator

Vapor source shutter, attached to the rotary feedthrough

Single Thermal Evaporator

Dual Thermal Evaporator

Consisting of two water-cooled high voltage feedthroughs with terminal blocks for 34.5 mm dia.
holes.

Consisting of three water-cooled high voltage
feedthroughs with terminal blocks for 34.5 mm
dia. holes.

Solenoid Actuated Vapor
Source Shutter
With rotary magnet and shutter screen;
for installation to the rotary feedthrough

Technical Data and Ordering Information
Rating per conductor

max. 100 V/500 A

Seals
Water connection

FPM
hose 4/6 mm dia.

Weight
Single thermal evaporator

2.5 kg
Part No. 030 20

Rating per conductor

max. 100 V/500 A

Seals
Water connection

FPM
hose 4/6 mm dia.

Weight

Connection for actuation

24 V = 1 s pulse

Dimensions of the shutter screen

50 x 50 mm

Weight

0.2 kg

3.9 kg

Dual thermal evaporator

Part No. 030 21

Vapor source shutter

Part No. 030 59

6-way measurement feedthrough

Power Supply Cables
For single and dual thermal evaporators, equipped with terminals and clamping pieces.

6-Way Measurement
Feedthroughs

Control cable, 6-way

For connection of the vapor source shutter; for
34.5 mm holes, plug-in soldered contact on the
inside.

For connection between measurement feedthrough and power supply unit for the vapor
source shutter, complete with connection plugs.

Technical Data and Ordering Information
Length

2m

Rating

max. 100/500 A

Cross section
Weight
Power supply cables (set of 2)

120 mm2

Rating per conductor
Seal
Weight

max. 700 V/16 A

Length

3m

FPM

Weight

0.2 kg

0.3 kg

3.5 kg
Part No. 030 53 *)

Measurement feedthrough

Part No. 500 001 543

9 way control cable

Part No. 500 001 549

*) Two sets of power supply cables are needed for the dual thermal evaporator

C19.12

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Accessories

High Vacuum Experimentation Systems

Components for Thermal Evaporation
AS 053 Power Supply Unit
For supplying thermal evaporators and one
solenoid-actuated source shutter.
With LCD display for current read out; with
membrane key pad.

Technical Data and Ordering Information
Cabinet

1/2 19" rack module, 3 HU, 400 mm deep

Outputs

1 x evaporator output, 5 V, 400 A max.
can be rewired to 10 V, 200 A max.
1 x shutter output, 24 V DC, 1 s pulse

Inputs

Remote control unit for controlling the evaporation power (0 to 10 V)
Remote control for the shutter

Main power supply

230 V, 50/60 Hz, 10 A

Weight

15 kg

AS 053 power supply unit
AS 053 power supply unit

Part No. 200 23 209

Cabinet

19" rack module, 3 HU, 400 mm deep

Outputs

2 x evaporator output, 5 V, 400 A max.
can be rewired to 10 V, 200 A max.
2 x shutter output, 24 V DC, 1 s pulse

AS 053-2 Power Supply Unit
For supplying power to two thermal evaporators
with vapor source shutters.
With LCD display for current read out; with membrane key pad.

Inputs

Remote control unit for controlling the evaporation power (0 to 10 V)
Remote control for the shutter
Switchover evaporator 1 / 2

Main power supply

230 V, 50/60 Hz, 10 A

Weight

30 kg

AS 053-2 power supply unit

Part No. 200 02 461

Components for Electron-Beam Evaporation
General

Electron-beam evaporator ESV 6

Safety regulations

Various types of electron-beam evaporators are
available for installation in the UNIVEX systems.

The electron-beam evaporator ESV 6 consists of
a beam generating system and a beam deflection
unit with electromagnetic deflection for the x and
y-axis, and a holder. Through the system of
interchangeable crucibles the ESV 6 may be used
to solve almost any evaporation problem. It is
suited to evaporate small to large amounts of
material.

When installing electron-beam evaporators in
UNIVEX bell jar systems only a stainless steel bell
jar must be used.

For the UNIVEX 300: electron-beam evaporator
ESV 4 as well as makes of other manufacturers.
For the UNIVEX 350: electron-beam evaporator
ESV 4 and ESV 6 as well as makes of other
manufacturers.
For the UNIVEX 450: electron-beam evaporator
ESV 4 and ESV 6 as well as makes of other
manufacturers.
The selection of a suitable electron-beam evaporator depends mostly on the space available, the
demanded evaporation rate, number and type of
materials which need to be evaporated.
Electron-beam evaporator ESV 4
The electron-beam evaporator ESV 4 consists of
a beam generating system and a beam deflection
unit with electromagnetic deflection for the x-axis
and a holder for accommodating various evaporation crucibles.
The ESV 4 has been designed to evaporate small
to medium amounts of material.

Electron-beam evaporators of other manufacturers
For the UNIVEX system exclusively evaporators
with high tension power supplies are used which
comply with EC regulations and directives.
However, depending on the kind of application
the customer may select the required evaporator
from a broad range of different power ratings and
crucible variants.
Power supplies
The selection of the power supply unit for the
individual electron-beam evaporator depends on
the manufacturer and the demanded maximum
evaporation power. As a rule, the maximum output power of the power supply unit must not
exceed the maximum power specified for the evaporator.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

In this application the bell jar must be secured in
place by an interlocking kit with a key operated
switch.
Interlocking kit with key-operated switch for
UNIVEX 300: Part No. 030 84
Interlocking kit with key-operated switch for
UNIVEX 450: Part No. 030 85
Interlocking kit with key-operated switch for
UNIVEX 350: included with the basic system.
UNIVEX 450 B: included with the basic system.
As further safety means a water flow monitor is
required for each electron-beam evaporation unit
so as to ensure intensive cooling of the electronbeam evaporator. This water flow monitor is
included with each electron-beam evaporator.
As further safety means a water flow monitor is
required for each electron-beam evaporation unit
so as to ensure intensive cooling of the electronbeam evaporator.

C19.13

C19

High Vacuum Experimentation Systems

Accessories

Components for High Rate Sputtering
DC Sputtering
Various DC sputtering sources may be built into
the UNIVEX units. The selection depends on the
size of the substrate, the required target material
and the available installation space. DC sputtering
sources from 50 mm to 200 mm as well as

corresponding DC sputtering power supply units
from 500 W to 3000 W are available. The power
supply units may be built into the basic units.
Further information upon request.

DC sputtering sources are suited for all UNIVEX systems.

RF Sputtering
Various RF sputtering sources may be built into
the UNIVEX 350 and UNIVEX 450 B. The selection depends on the size of the substrate, the
required target material and the available installation space. RF sputtering sources from 50 mm to
200 mm as well as corresponding RF sputtering

power supply units from 150 W to 1000 W are
available. The power supply units may be built
into the basic units.
Further information upon request.

RF sputtering sources are only suited for the UNIVEX 350 and UNIVEX 450 B.

Safety regulations:
When installing electron beam evaporators in the
UNIVEX 300 the stainless steel ball jar must be
used. Moreover, a safety interlocking arrangement is required. For the UNIVEX 300 and 450 a
separate interlocking kit is available; in the case
of the UNIVEX 350 and 450 B this kit is already
included.

Sputtering sources can only be operated with gas
admission. For this, manually operated variable
leak valves up to automatically controlled mass
flow controllers are available.

Interlocking kit

for
Part No.

UNIVEX 300

UNIVEX 450

UNIVEX 350

UNIVEX 450 B

030 84

030 85

Included

Included

Components for Film Thickness Measurements
Various thin film thickness measuring instruments may be installed in the UNIVEX units.
The selection depends on the demanded measurements tasks and the required degree of automation.

Further thin film measuring instruments which
may be used to check complex multi-layer films
are available.
Further information upon request.

We especially recommend the thin film thickness
measuring instruments which rely on quartz
oscillators XTM/2 in the case of simple tasks, and
the XTC/2 for complex control tasks.

C19.14

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Special Units

High Vacuum Experimentation Systems

UNIVEX 450 B (Chamber systems)

Besides the standard UNIVEX systems we are
also prepared to deliver modified systems for
special applications.
Besides the standard chamber system UNIVEX
350 we can also supply UNIVEX systems with
other chamber sizes. These are then so designed
that the chamber containing the processing components and the pump system are mounted to a
separate frame. The door flange of the chamber
may then easily be integrated in the wall of a
clean room. The electric power supply and the
system controller are accommodated in a separate 19" electrical cabinet. This will simplify installation and subsequent operation.
UNIVEX 450 B having a chamber diameter of 490 mm and with a 10-fold thermal evaporator

All processing components commonly used in
thin-film processing may be installed in the
chamber.
The scope of the pump system used will in each
case depend on the requirements of the desired
processes to be run in the chamber.
Design of the entire system in accordance with
customer requirements will be undertaken upon
request.

UNIVEX 450 B having a chamber diameter of 490 mm and with RF sputter sources and dry compressing vacuum pump system; with EcoDry L pump

666

1645
1415

173

780
1060

520

500
672

UNIVEX 450 B having a chamber diameter of 490 mm and with electron-beam evaporator
with heatable and coolable chamber walls; with COOLVAC 3010 cryopump

The position, number and size of the flanges and the installation
holes may be varied almost freely according to requirements!

Dimensional drawing for the UNIVEX 450 B

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

C19.15

C19

High Vacuum Experimentation Systems

UNIVEX 450 for Dactyloscopy

Dactyloscopy is a term from the area of criminal
investigation meaning: “Identification of a person
through his fingerprints”. Depending on the
material of the part which was touched, different
methods are used to render the fingerprints
visible.
In the case of materials like plastic shopping
bags, for example, foils, handlebars etc. evaporation methods have been found to be most useful.

UNIVEX 450 for dactyloscopy

The method itself utilises the effect well known
from normal evaporation processes where the
evaporated material will adhere better (and
thicker) on the skin material (water, amino acids,
fat and alike) deposited by the finger compared
to the surrounding untouched material. An optimum contrast is attained by selecting a suitable
evaporation material, usually gold or zinc.
Benefits of this method:
♦ No “smearing” of existing traces compared to
conventional methods
♦ Large surface areas (up to 80 x 40 cm max.)
carrying fingerprints can be checked completely in one pass
♦ The time needed for one pass is only about
10 minutes (depending on the material carrying the fingerprints)
♦ Good contrast also in the case of multicolour
surfaces
♦ Fixation of the deposited material with the traces is easy – the results may be well documented (can be photographed)

Cluster system with lock, transfer chamber and with the possibility of adding up to six processing chambers.

♦ The carrier of the fingerprints is not destroyed.

UNIVEX 450 C

For special applications we can also supply
cluster systems based on the UNIVEX concept.
These clusters are equipped according to customers requirements and incorporate separate
processing and load lock and transfer chambers.

Test systems with a vacuum chamber
Test system with a 700 mm dia. chamber

C19.16

We can also supply vacuum chambers with
custom pump systems for testing of various
components.

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Inquiry Form

T E L E FA X I N Q U I RY
To

Name:

LEYBOLD VAKUUM GmbH
Company:

(for Europe)

Position:

Fax:
+49 (0)221 3 47-12 45
e-mail: sales@leyboldvakuum.com

Street:
Code/City:
Phone:
Fax:
e-mail:

Please send me an offer for the following products:
Catalog No.

✄

Place/date

Quantity

Brief Designation

Signature

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Company stamp

Inquiry Form

T E L E FA X I N Q U I RY
To

Name:

LEYBOLD VACUUM USA INC.
Company:

(for USA)

Position:

Fax:

+41-724-733-12 17

Street:
Code/City:
Phone:
Fax:
e-mail:

Please send me an offer for the following products:
Catalog No.

✄

Place/date

Quantity

Brief Designation

Signature

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Company stamp

Product Index

A
Accessories

Components
for Electron-Beam Evaportion . . . . . . . . . . . . . . . . . . . . . . . C19.13
for Film Thickness Measurements . . . . . . . . . . . . . . . . . . . . C19.14

for Compressor Units COOLPAK . . . . . . . . . . . . . . . . . . . . . C12.34

for Glow Discharge Cleaning . . . . . . . . . . . . . . . . . . . . . . . . C19.11

for Serial Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.63

for High Rate Sputtering . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.14

for SOGEVAC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.39

for Leak Testing Instruments . . . . . . . . . . . . . . . . . . . . . . . . C17.21

for the Electropneumatically Operated Valves . . . . . . . . . . . . C14.25

for the modular DIVAC System . . . . . . . . . . . . . . . . . . . . . . C04.13

for UHV Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.10

for Thermal Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.12

for L 200 plus, L 200 dry and Modul L 200 plus . . . . . . . . . C17.18

Compressor Units COOLPAK . . . . . . . . . . . . . . . . . . . . . . . . . . C12.32

for UNIVEX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.10

Condensate Separators AK

Adaptors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.16 + C13.41

for E and DK Pumps . . . . . . . . . . . . . . . . . . . . . . .C06.11 + C11.12

Adsorption Traps with Aluminium Oxide Insert . . . . . C10.16 + C11.12

for TRIVAC B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.52

Air Cooling Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.61

Condensate Traps AK

ANSI Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.44

for TRIVAC E and B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.40

Astrotorus Baffles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.09

Condensate Traps SL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.34

B
Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.22
for SOGEVAC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.37
Bourdon Vacuum Gauges . . . . . . . . . . . . . . . . . . . . . C02.41 + C16.05

C

Condensers SEPC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.35
Connection Cables for Active Sensors . . . . . . . . . . . . . . . . . . . C16.20
Connection Components (for Leak Testing Instruments) . . . . . C17.21
Connection Fittings (for SOGEVAC) . . . . . . . . . . . . . . . . . . . . . C02.42
Connection Flanges (for Leak Testing Instruments) . . . . . . . . . C17.21
Connectors (for Feedthroughs) . . . . . . . . . . . . . . . . . . . . . . . . C15.19
Controllers and Monitoring Units for Cryopumps . . . . . . . . . . . C12.38
Cryopumps COOLVAC

Calibrated Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.14

Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.10

Calibration Service from LEYBOLD . . . . . . . . . . . . . . . . . . . . . C16.50

with fully automatic Control

Calibration Systems CS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.14

ClassicLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.12

Capsule Vacuum Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.06

SemiLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.24

Cart (for EcoDry L) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.14
CENTER ONE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.24
CENTER TWO / THREE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.26
Central Vacuum Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.47
CERAVAC Transmitters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.08
CF Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.03
Checklist for Inquiries (Vacuum Pump Systems) . . . . . . . . . . . C08.38
Clamp Flange Fittings and Components (ISO-K) . . . . . C13.18 + C13.42
Cold Heads
COOLPOWER, Single Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.28
COOLPOWER, Dual Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.30
Cold Trap TK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.47
COMBIVAC
CM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.38
2T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.28
Compact Oil Mist Exhaust Filter . . . . . . . . . . . . . . . . . . . . . . . C01.50

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

D
Delayed Venting Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.17
Diaphragm Pressure Regulators MR . . . . . . . . . . . . . . . . . . . C16.49
Diaphragm Vacuum Pumps
DIVAC, Single-Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.06
DIVAC L
Dual-Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.08
Dual-Stage with automatic Drying System . . . . . . . . . . . . C04.10
DIAVAC DV 1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.07
DISPLAY ONE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.22
DIVAC Sub-assemblies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.14
Modular Laboratory Pump Concept . . . . . . . . . . . . . . . . . . . . . C04.12
Dry Compressing Backing Pumps for Turbomolecular Pumps
DIVAC T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.18
MZ D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C04.24

B00.01

B00

Product Index
Dry Compressing Piston Vacuum Pump
EcoDry L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.06

H

EcoDry M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.10

Helium Leak Detector

Dry Compressing Screw Vacuum Pump . . . . . . . . . . . . . . . . . C05.03

Mobile and Flexible
Modul L 200 plus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.10

Dust Filters FS
for E and DK Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.12

Portable

for TRIVAC E and B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.46

L 200 plus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.08

Dust Filters (Suction Side) for SOGEVAC . . . . . . . . . . . . . . . . . C02.32

L 200 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.09

Dust Separators AS

Helium Sample Probes (Sniffers) . . . . . . . . . . . . . . . . . . . . . . C17.20

for E and DK Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.13

High Current Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.35

for TRIVAC E and B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.44

High Vacuum Experimentation Systems
Bell Jar System

E

UNIVEX 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.04

Electrical Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.32
Electrical Indicator System EIS . . . . . . . . . . . . . . . . . . . . . . . . C01.60
Electronic Frequency Converters
for Turbomolecular Pumps
with Mechanical Rotor Suspension . . . . . . . . . . . . . . . . C09.32
with Magnetic Rotor Suspension . . . . . . . . . . . . . . . . . C09.56
Exhaust Filter Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.09

UNIVEX 450 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.06
Door System
UNIVEX 350 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.08
Special Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.15
High Vacuum Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.26

I

Exhaust Filter Drain Tap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.42

Inert-Gas-System IGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.58

Exhaust Filters

IONIVAC Transmitter ITR . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.16

AF for E and DK Pumps . . . . . . . . . . . . . . . . . . . . .C06.11 + C13.39
AF for TRIVAC E and B . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.40
with Lubricant Return ARP / AR . . . . . . . . . . . . . . . . . . C01.54
with Lubricant Return ARS . . . . . . . . . . . . . . . . . . . . . . C01.55
AK for TRIVAC B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.53
Exhaust Filter Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.40
Exhaust Silencer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.17

F

IONIVAC Sensors IE (Extractors) . . . . . . . . . . . . . . . . . . . . . . . C16.44

J
K
L
Leak Detection Systems

Fine Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.61

mobile, fitted to the CART 200 . . . . . . . . . . . . . . . . . . . . . . C17.12

Fine Vacuum Adsorption Traps FA . . . . . . . . . . . . . . . . . . . . . . C01.45

Limit Switch System LSS . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.59

Fixed Flange Fittings

Linear Pressure Sensors DI . . . . . . . . . . . . . . . . . . . . . . . . . . C16.40

DIN 2501 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.28

Liquid Feedtroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.38

ISO-F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.27

Low Pressure Safety Switch PS 113 A . . . . . . . . . . . . . . . . . . C16.46

ISO-F and DIN 2501, ND6 . . . . . . . . . . . . . . . . . . . . . . . . . . C13.26

Low Temperature Controller Modell 970 . . . . . . . . . . . . . . . . . C12.42

ISO-F and DIN 2501 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.43

Low Temperature Measuring Instrument MODEL 1901 . . . . . . C12.43

Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.64
Flange Fittings and Components, ISO-KF . . . . . . . . . C13.06 + C13.39
Flange Heaters for CF High Vacuum Flanges . . . . . . . . . . . . . . C09.61

G
Gas Ballast Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.36

M
MEMBRANOVAC DM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.32
Molecular Filters MF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.44
Monitoring Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C11.10
Mounting Accessories for SOGEVAC Pumps . . . . . . . . . . . . . . C02.40

manually operated (Retrofit Kit) . . . . . . . . . . . . . . . . . . . . . C03.16

B00.02

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

Product Index

N

Roots Pump Adaptor
for EcoDry L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.15
for TRIVAC B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.61

O

Roots Vacuum Pumps

Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.30

RUVAC RA
with Flange-Mounted Motors (50 Hz) . . . . . . . . . . . . . . . C07.12

Oil Control Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.10
Oil Diffusion Pumps DIP, Water-Cooled . . . . . . . . . . . . . . . . . . C11.06
Oil Drain Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.42
Oil Drain Tap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.42
Oil Filter Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.10
Oil Filters
CF, Chemical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.56
CFS, Chemical, with Safety Isolation Valve . . . . . . . . . . . . . C01.57
OF, Mechanical

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.56

Oil Filtering System
OF1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.62 + C06.14
OF3000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.38 + C06.16
Oil Suction Facility
AR-M, Manually Operated . . . . . . . . . . . . . . . . . . . . . . . . . . C01.43
AR-V, Controlled by Solenoid Valve . . . . . . . . . . . . . . . . . . . C01.43

P

with Direct-Coupled Motors (60 Hz) . . . . . . . . . . . . . . . . C07.14
RUVAC RAV with Pre-Admission Cooling . . . . . . . . . . . . . . . C08.18
RUVAC WA/WAU with Flange-Mounted Motors . . . . . . . . . . C07.06
RUVAC WS/WSU/PFPE with Canned Motors . . . . . . . . . . . . C07.08
RUVAC WSLF for Laser Gas Systems . . . . . . . . . . . . . . . . . C07.10
Rotary Feedtroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C13.36
Rotary / Linear Motion Feedtroughs . . . . . . . . . . . . . . . . . . . . C13.37
Rotary Piston Vacuum Pumps
DK, Two-stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.06
E, Single-Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.04
Rotary Vane Vacuum Pumps
SOGEVAC SV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.14
SOGEVAC SV B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.04
TRIVAC B, Two-Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.10
TRIVAC BCS, Two-Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.26
TRIVAC BCS-PFPE, Two-Stage . . . . . . . . . . . . . . . . . . . . . . C01.32
TRIVAC B-DOT, Two-Stage . . . . . . . . . . . . . . . . . . . . . . . . . C01.22

PENNINGVAC PM 31 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.36

TRIVAC B-Ex, Two-Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.24

PENNINGVAC Sensors PR . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.43

TRIVAC E, Two-Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.06

PENNINGVAC Transmitters PTR . . . . . . . . . . . . . . . . . . . . . . . C16.14
PIEZOVAC PV 20 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.30
Power Failure Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . C14.22
for Turbomolecular Pumps . . . . . . . . . . . . . . . . . . . . . . . . . C09.62
Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.25 + C12.38
Precision Manometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.45
Pressure Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C07.16
PS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.47
Purge Gas and Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . C09.62

Q
R
Refrigerator Cryostats

S
Safety Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.45
Screw-in Calibrated Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.16
Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.23
Separators SEP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.35
Small Compact Pump S 1.5 . . . . . . . . . . . . . . . . . . . . . . . . . . C01.04
Small Valves micro . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.06
Smoke Eliminator SE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.49
Solenoid Gas Ballast Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.19
Solenoid Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.62
Spare Sensors for Older Operating Units
(Total Pressure Gauges) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.45
Special Oil Sight Glass . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.36

Based on RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.35

Special Units (UNIVEX) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.15

Optical, Based on RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . C12.36

Special Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.17

Refillable Traps RST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.48

System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . C12.25 + C12.38

Right-Angle Valves for Mobile Systems in Accordance with

Switching Amplifier SV 110 . . . . . . . . . . . . . . . . . . . . . . . . . . C16.48

the Regulations of the Department of Transportation . . . . . . . . C14.24

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004

B00.03

B00

Product Index

T

V

Temperature Sensors (Silicon Diode) . . . . . . . . . . . . . . . . . . . C12.44

Vacuum Greases (for Vacuum Fittings and Feedthroughs) . . . . C13.29

Thermal Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C02.36

Vacuum Locks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.23

THERMOVAC Sensors Series 200 . . . . . . . . . . . . . . . . . . . . . . C16.42

Vacuum Pump Oils . . . . C01.65 + C02.53 + C05.07 + C06.19 + C07.17

THERMOVAC TM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.34

Vacuum Pump Systems (Checklist for Inquiries) . . . . . . . . . . . C08.36

THERMOVAC Transmitters TTR . . . . . . . . . . . . . . . . . . . . . . . . C16.10

Vacuum Pump Systems

Turbomolecular Pump Systems

Dry Compressing

BMH70 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.28

with EcoDry L Backing Pump . . . . . . . . . . . . . . .C08.14 + C08.34

MINI-TOPS 50 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.20

with SCREWLine Backing Pump . . . . . . . . . . . . . . . . . . . . C08.16

PT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.04

RUTA

PT Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.10

with RUVAC RAV Roots Vacuum Pumps . . . . . .

PT KIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.08

with Single- and Two-Stage Rotary Piston Vacuum Pumps

TiPS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.26

as Backing Pumps . . . . . . . . . . . . . . . . . . . . . . .

TOPiX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.25

with Single-Stage SOGEVAC Backing Pumps

C08.20
C08.12

TOPS 151/361 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.22

Adapter Version . . . . . . . . . . . . . . . . . . . . . . .

TOSS 50 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.18

Frame Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.10

TURBOVAC TMV 40 000 . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.24

with Two-Stage TRIVAC Backing Pumps . . . . . . . . . . . . . C08.06

Turbomolecular Pumps

C08.08

HTS
with Single-Stage SOGEVAC Backing Pumps

with Mechanical Rotor Suspension
without Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . C09.08

Close-Coupled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.28

with Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.16

Frame Mounted . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.32

with Magnetic Rotor Suspension

RBS - B/BCS
with Two-Stage TRIVAC Backing Pumps . . . . . . . . . . . . . C08.24

without Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . C09.38
with Compound Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . C09.46

RM

TurboPump Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.31

with Single- and Two-Stage Rotary Piston Vacuum Pumps

Turboradial Blowers

as Backing Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C08.34

TURBOSTREAM TST D (dual-stage) . . . . . . . . . . . . . . . . . . C18.08

TVD for Drying, Evaporation and Destillation Application . . . C08.22

TURBOSTREAM TST S (single-stage) . . . . . . . . . . . . . . . . . C18.04

Vacuum Safety Valves SECUVAC . . . . . . . . . . . . . . . . . . . . . . . C14.18

TurboSystem Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.30

Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . C01.64 + C02.37 + C06.08

U
UHV All-Metal Right-Angle Valves . . . . . . . . . . . . . . . . . . . . . . C15.13
UHV All-Metal Variable Leak Valves . . . . . . . . . . . . . . . . . . . . . C15.14
UHV Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.07
UHV Feedthroughs
Electric . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.17
Mechanical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.15
UHV Liquid Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.21
UHV Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.12
UHV Sapphire Observation Windows . . . . . . . . . . . . . . . . . . . . C15.12

with ISO-K or ISO-F Flanges . . . . . . . . . . . . . . . . . . . . . . . . C14.13
with KF Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.08
Variable-Leak Valves with and without Isolation Valve . . . . . . . C14.20
Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C14.21
Vibration Absorber . . . . . . . . . . . . . . . . . . . . . . . . . . C06.17 + C09.61
Vibration Absorbing Feet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.17
Vibration Absorbing Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C03.18

W
X
Y
Z

B00.04

LEYBOLD VACUUM PRODUCTS AND REFERENCE BOOK 2003/2004



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