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263-13228!

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Power Supply Unit
For Turbo Molecular Pump

Model:
Model:
Model:
Model:

EI-D1003M.-D1103M
EI-D1303M.-D2003M
EI-D2203M,-D2303M
EI-D3203M,-D3403M
Model: EI-D4203M

INSTRUCTION MANUAL

SHIMADZU

263-132281

Power Supply Unit for Turbo Molecular Pump
Model: EI-D1003M
Model:EI-D1103M
Model :EI-D1303M

Model:EI-D2003M

Model:EI-D2203M
Model:EI-D2303M
Model:EI-D3203M
Model:EI-D3403M
Model:EI-D4203M

INSTRUCTION MANUAL

Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.

SHIMADZU

CORPORATION

Semiconductor Equipment Division

: ■;,,:
Introduction

Introduction
Thank you for choosing the EI-DxxO3M Power Supply Unit for Turbo Molecular Pump

(hereafter referred to as "power supply unit" or "EI-DxxO3M"). Please read the instruction
manual carefully before using the power supply unit, and save the instruction manual for
future reference.

This instruction manual explains detailed operations of the power supply unit and cables.

For instructions regarding the pump unit, please refer to the instruction manual for the pump
unit to be used.

Standard type is explained in this manual. For special order type, please refer to the out
lines and constructions of each specification.

Copyrights and Disclaimers
This document is copyrighted by Shimadzu Corporation. Please refrain from reproducing
or copying part or all of this document without permission from Shimadzu.

In an effort to improve the product, this document may be revised in the future without
notice.

Every effort has been made to prepare an accurate and complete manual, but if an error
or omission should be discovered, revisions might not be possible immediately.
Shimadzu does not take responsibility for any effects that may result from the use of this
manual.

Power Supply Unit
INSTRUCTION MANUAL

Precautions for Safe Operation

Precautions for Safe Operation
The instruction manual's nomenclature for warnings and precautions complies with

the following safety warning symbols.

WARNING

CAUTION

NOTICE

Indicates a potentially hazardous situation whitch, if not avoided, could result

in serious injuly or possibly death.

Indicates a potentially hazardous situation whitch, if not avoided, may result in

minor to moderate injuly or equipment damage.

Emphasizes additional information that is provided to ensure the proper use of

this product.

WARNING

Turbo molecular pump repair and/or power supply repair can be very hazardous.
Only trained technicians who are authorized by Shimadzu may do service of
products.

WARNING
Neither overhaul nor modify the pump proper and power supply unit without
admission. Doing so would impair safety of the pump proper.

WARNING
Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who

decides system compatibility.

263-13228

Introduction

CAUTION
The standard power input voltage of the power supply unit EI-DxxO3M (the "xx" number
indicates the model of the corresponding pump) is AC 200 - 240 V ± 10%. Connect the power
supply unit to the voltage indicated on the rear panel label only.Connection of the power supply
unit to the incorrect input voltage can cause damage to the equipment. Supply the power via a
breaker (rating 15A).PIease provide PE(Protective Earth) connection to the terminal of a "PE"
marked wire in final application.

CAUTION

If an EI-DxxO3M power supply unit is used in combination with an existing pump that was
operated in combination with a power supply unit not having the variable speed function (ElxxO3MD), the variable speed function cannot be used, (the "xx" number indicates the model of

the corresponding pump.)

If the power supply unit is to be combined with an existing pump, modification and operational

inspections are necessary. Please contact Shimadzu for detailed information.

CAUTION
The following "CAUTIONS" are to prevent operation anomalies.

1 .Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.

2.Do not connect or disconnect the turbo molecular pump control cable during the time the
power supply is "ON".

3.Do not operate any equipment {i.e. drill motor, welding machine, etc.) that produces electro
magnetic pollution, noise, etc., in the immediate proximity of an operating turbo molecular
pumping system (pump, power supply, cables, etc).

4.When using the variable speed function to change the pump rotation rate, use a rotation rate
that does not cause resonance with other devices installed at the site.

Power Supply Unit
INSTRUCTION MANUAL

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O Explanation of label

(1) HOT SURFACE : Risk of burn. (Notes 1)

A CAUTION
HOT SURFACEffiSSft
Risk of burn. Avoid contact.

■ Keep off from touching surface of the pump as it is
heated.
■ Keep off from touching upper side surface of the

power supply while the pump is in deceleration as it is

heated.

(2) Do not remove cover, or else it may cause some
changes inside and it is failed.

A CAUTION
DO NOT REMOVE COVER.
2«J 16048

(3) Do not shut off ventilation, or else the inside of

A CAUTION

power supply get heated and it is failed.

USE SPECIRED CABLE ONLY.
?6J

I60S0

A CAUTION
DO NOT SHUT OFF VENTILATION.

(4) Be sure to use specified cable for this power supply.
If not, it may cause connector be broken and power
supply itself failed.

US P £&£*T?<*:Sl,*.

(5) SECURITY seal
This label certificates that the product was made or
maintenanced by Shimadzu or by Shimadzu
authorized facility.
In case "this label is removed" or "there is a mark
showing once this label has been removed",

Shimadzu warranty shall not be applied to the
product.

(Notes 1) The power supply units for some production lots come with a single nameplate, on
which the name is indicated in both English and Japanese, whereas the power supply units
for other production lots come with two nameplates, one in English and one in Japanese.

O Location of label

(3)

(1)

(same on reverse side)

263-13228

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Introduction

O Installation Precautions
Do not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.
Abnormal loads may cause cable disconnection.

(1)

Do not pull the turbo molecular pump control cable by the connector or plug.

(2) When installing the power supply unit into equipment, do not allow any electrical cables to
be in tension or to have very tight bending radii.

O
(3)

Do not bundle the turbo molecular pump control cable with any cables.

(4) Do not twist the turbo molecular pump control cable during connection.

Power Supply Unit
INSTRUCTION MANUAL

(&£2£'M
O Part Replacement
The lifetime of parts are specified as below.

The request for changing parts exceeding the estimated lifetime should be made to Shimadzu
or an approved service company in order for safety and adequate performance of the pump and
power supply unit.

Table 1

Estimated Part Life

Parts List

Estimated Part Life

Transformer

10 years

Electrolytic condenser

5 years

Cooling fan

5 years

Button-type battery

10 years

O Warranty period
12 months on new TMP's from the date of shipment from Shimadzu, or from any of its
worldwide sales offices.

O Conditional warranty
During the warranty period and under normal operation, if the TMP fails to meet its product
specification due to defects in material and/or workmanship, Shimadzu will, at its discretion,
either repair it or exchange it with a new one for free.

O Scope of the warranty
The warranty covers only TMPs, controllers and accessories sold by Shimadzu.

O Warranty of repaired or replacement parts
In-warranty repaired or replacement parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the parts that have been repaired or replaced.

O Exemption from the warranty
During the warranty period, Shimadzu will charge for repair or exchange in the following cases:
1) Failure caused by natural disasters or fire.
2) Failure or functional deterioration due to the following:
a) Pumping of special gases and materials
b) Ingestion of foreign objects through the TMP's protective net

c) TMP is operated differently than what is prescribed in the instruction manual
d) When Shimadzu determines through failure analysis that the cause of failure was due to
abnormal operation or external circumstances, our engineers judge that the cause of the
trouble is an irregular operation

3) Warranty is voided if the "Security Seal" on the product has been removed, hampered with,
or altered.

263-13228

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Introduction

O Disposal of Products and Parts
Please contact Shimadzu for proper disposal of its products or parts. There is a possibility to
pollute the environment with the material of the parts, when you dispose this product in an inap
propriate way.

O LIMITATION OF LIABILITY
EXCEPT AS STATED HEREIN, SHIMADZU MAKES NO WARRANTY, EXPRESSED OR
IMPLIED (EITHER IN FACT OR BY OPERATION OF LAW), STATUTORY OR OTHERWISE:
AND, EXCEPT AS STATED HEREIN, SHIMADZU SHALL HAVE NO LIABILITY FOR

SPECIAL OR CONSEQUENTIAL DAMAGES OF ANY KIND OR FROM ANY CAUSE ARISING
OUT OF THE SALE, INSTALLATION, OR USE OF ANY OF ITS PRODUCTS.

Power Supply Unit

INSTRUCTION MANUAL

VII

This page is intentionally left blank.

VIII

263-13228

Table of contents

Table of contents
Introduction
Copyrights and Disclaimers

Precautions for Safe Operation

O Explanation of label

O Location of label

O Installation Precautions

O Part Replacement

O Warranty period

O Conditional warranty

O Scope of the warranty

O Warranty of repaired or replacement parts

O Exemption from the warranty

O Disposal of Products and Parts

vii

O LIMITATION OF LIABILITY

vii

Table of contents

Section 1

Section 2

OUTLINE AND DESCRIPTIONS
1.1

Outline

1.2

Descriptions

1.2.1

Power Supply Unit

1.2.2

Control Cable

1.2.3

Motor Cable

1.2.4

Standard Accessories

IDENTIFICATION AND FUNCTION
2.1

Power Supply Unit

INSTRUCTION MANUAL

Table of contents

Section 3

CONSTRUCTION AND PRINCIPLE
3.1

Section 4

Section 5

SPECIFICATIONS
4.1

Power Supply Unit

4.2

Standards Fulfilled

INSTALLATION
5.1

Section 6

Power Supply Unit

Installation of the Power Supply Unit

5.1.1

Location of the Power Supply Unit

5.1.2

Installation of the Power Supply Unit

5.1.3

Compatibility with Previous Models

5.2

Connection of Power Cable

5.3

Connection of the Pump to the Power Supply Unit

OPERATION
6.1

6.2

6.3

6.4

6.5

Outline

6.1.1

Introduction

6.1.2

Operation Flowchart

Start-up Preparation

6.2.1

Start-up Preparation Sequence in LOCAL Mode

6.2.2

Start-up Preparation Sequence in REMOTE Mode

Start-up

6.3.1

Start-up Sequence in LOCAL Mode

6.3.2

Start-up Sequence in REMOTE Mode

Shutting Down

6.4.1

Preparations Prior to Shutting Down Operation

6.4.2

Shutting Down Sequence in LOCAL Mode

6.4.3

Shutting Down Sequence in REMOTE Mode

Variable Speed Operation

6.5.1

Outline

6.5.2

Operation from Start-up to Low Speed Rotation

263-13228

Table of contents

Section 7

6.5.3

Operation from Rated Speed Rotation to Low Speed Rotation...

6.5.4

Operation from Low Speed Rotation to Rated Speed Rotation...

6.6

Software Operation

6.7

Remote-Control Connector

6.7.1

Specifications

6.7.2

Compatibility with Previous Models

6.7.2.1

Replacing the EI-xxO3M/MD Power Supply Unit

6.7.2.2

Replacing EI-xxO3MZ Power Supply Units

TROUBLESHOOTING
7.1

Nothing Happens After an Operation is Made

7.2

Power Failures

7.2.1

Power Failure Counter-Operation

7.3

Vacuum Pressure Rise

7.4

Abnormal Noise and/or Vibration

7.5

Alarm Detection Capabilities

7.5.1

Appendix A

Movement in Alarm Detection Capabilities (ALARM)

7.5.2

Movement in Alarm Detection Capabilities (WARNING)

7.5.3

Reset Procedure

COMMUNICATIONS

A.1

GENERAL SPECIFICATION

A-2

A.2

INTERFACE SPECIFICATION

A-3

A.2.1

RS-232C
A.2.1.1

A.2.2

A-3

A.2.1.2

Communications Connector

A-3

A.2.1.3

CABLE

A-3

Transmission Specification

A-5

RS-485

A.2.2.1

A.3

A.4

A-3

Transmission Specification

A-5

A.2.2.2

Communications Connector

A-5

A.2.2.3

CABLE

A-5

POWER SUPPLY TO COMPUTER CONNECTION

A-7

A.3.1

Communication Cable Connection

A-7

A.3.2

Serial Communications Baud Rate Configuration

A-7

A.3.3

RS-485 Multi-drop Settings

A-7

SERIAL COMMUNICATIONS PROTOCOL
A.4.1

Basic Message Structure

A-8
A-8

Power Supply Unit

INSTRUCTION MANUAL

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Table of contents

A.4.2

A.5

A.6

A.7

Character to Character Time-out: 0.1 sec

A.4.3

Command to Answer Time-out: 1 sec

A-9

A.4.4

Power Supply Command Send Retry Cycles: 5

A-9

A.4.5

Command Transmission Specification

A-9

A.4.6

Receiving Sequence

A-9

A.4.7

Using the Checksum Byte

A.4.8

Outline of Multi-drop Communications

A-9

A-10

TABLE OF COMMANDS

A-11

COMMAND DESCRIPTION

A-17

A.6.1

Operation Mode

A.6.2

Operation

A-18

A.6.3

Run Status

A-19

A-17

A.6.4

Parameters

A-20

A.6.5

Events

A-20

A.6.6

Timer

A-21

A.6.7

History

A-21

A.6.8

Settings

A-22

A.6.9

Shared Answer

A-22

RS-232C COMMANDS / ANSWERS

A-23

A.8 RELATION OF LOCAL MODE TO REMOTE MODE
OPERATIONS

A-26

A.9

A-27

TROUBLESHOOTING
A.9.1

No Message can Transmit and Receive

A.9.2

Sending and Receiving are Done, But Receivable Messages are

Invalid

A.9.3

263-13228

A-27
A-27

Characters Get Disordered from Time to Time, Then Resulting in

CHECKSUM Error

XII

A-8

A-27

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OUTLINE AND
DESCRIPTIONS
©

1.1

Outline

1.2

Descriptions

1.2.1

Power Supply Unit

1.2.2

Control Cable

1.2.3

Motor Cable

1.2.4

Standard Accessories

SECTION 1

OUTLINE AND DESCRIPTIONS

l» 1.1 Outline
£"£■

-y

The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a
backing vacuum pump to create a high vacuum in a vacuum chamber.
Typical Applications ;

Semiconductor equipments,
Industrial equipments,
R&D applications,
The other ultra high vacuum applications.

The turbo molecular pump (one standard set) consists of the following items.
Pump

Power Supply Unit

Control Cable

Motor Cable

Standard Accessories

1 Set

The cable length must be specified for the magnetic bearing cable and motor cable. (Refer to
Sections 1.2.2 and 1.2.3.)

263-13228

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1.2

Descriptions

1.2 Descriptions
1.2.1 Power Supply Unit

.198. 110, 2

203'S-'

oane!

cut dimension

4-04. 5

rvi

196

Description

Parts number

EI-D1003M

262-78689-02

EI-D1103M

262-78690-02

EI-D1303M

262-78688-02

EI-D2003M

262-78691-02

EI-D2203M

262-78692-02

EI-D2303M

262-78693-02

EI-D3203M

262-78685-02

EI-D3403M

262-78694-02

EI-D4203M

262-78696-02

Fia.1-1

Outside Dimp nsions of Power Supply Unit

Power Supply Unit

INSTRUCTION MANUAL

SECTION 1

OUTLINE AND DESCRIPTIONS

1.2.2 Control Cable
The cable can be selected from the following.
Description

Note

Parts number

3 meters length, straight plugs for both sides.

262-78187-03

5 meters length, straight plugs for both sides.

262-78187-05

7 meters length, straight plugs for both sides.

262-78187-07

10 meters length, straight plugs for both sides.

262-78187-10

Control Cable

15 meters length, straight plugs for both sides.

262-78187-15

20 meters length, straight plugs for both sides.

262-78187-20

30 meters length, straight plugs for both sides.

262-78187-30

1.2.3 Motor Cable
The cable can be selected from the following
Description

Note

Parts number

(for Air cooled type and Air cooled chemical type)

Motor Cable

3 meters length, straight plugs for both sides.

262-76410-03

5 meters length, straight plugs for both sides.

262-76410-05

7 meters length, straight plugs for both sides.

262-76410-07

10 meters length, straight plugs for both sides.

262-76410-10

15 meters length, straight plugs for both sides.

262-76410-15

20 meters length, straight plugs for both sides.

262-76410-20

30 meters length, straight plugs for both sides,

262-76410-30

(for Wide range type and Wide range chemical
type)

3 meters length, straight plugs for both sides.

262-76409-03

5 meters length, straight plugs for both sides.

262-76409-05

7 meters length, straight plugs for both sides.

262-76409-07

10 meters length, straight plugs for both sides.

262-76409-10

15 meters length, straight plugs for both sides.

262-76409-15

20 meters length, straight plugs for both sides.

262-76409-20

30 meters length, straight plugs for both sides.

262-76409-30

263-13228

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1.2

Descriptions

1.2.4 Standard Accessories
Description
1

2
3

Power cable

Remote Control
Connector

Instruction Manual

Q'ty
1
1
1

Notes

Parts Number

5meters length

262-76773-05

MR-34MG

(Pin type connector)

070-50791-63

MR-34L4

(Connector hood)

070-50792-75
263-13228

Power Supply Unit
INSTRUCTION MANUAL

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263-13228

DENTIFICATION AND
FUNCTION
©

2.1

Power Supply Unit

..........

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SECTION 2

2.1

IDENTIFICATION AND FUNCTION

Power Supply Unit

■M

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(15) C7)

Fia.2-1

263-13228

Front Control Panel

Fia 2-2

24)

Rear Panel

:^._^..^._^

2.1

(1) LCD

Power Supply Unit

Display operation monitor, alarm contents,
settings (see Section 6.6 "Software Operation")

(2) SELECT KEY

LCD display operation key, select menu

(3) + KEY

LCD display operation key, previous menu or
addition

(4) - KEY

LCD display operation key, next menu or
subtraction

(5) SET KEY

LCD display operation key, set menu

(6) START SWITCH

Press to start rotation of the pump's rotor.

(7) STOP SWITCH

Press to apply the brake to stop rotation of the
pump's rotor.

(8) RESET SWITCH

Press to stop the buzzer after an alarm or
warning occurs. After remedying the cause of

the alarm, press the RESET switch again to turn
off the ALARM lamp. However, the buzzer
sounds again if the RESET switch is pressed

again before the cause of the alarm is remedied.

(9) DISPLAY SWITCH

LCD display operation key, change display
mode.

(10) POWER LAMP

Power On indicator lamp (green)

(11) ROTATION LAMP

Operation indicator lamp indicating that the
pump's rotor is running (green)

(12) NORMAL SPEED LAMP

Operation indicator lamp indicating that the
pump's rotor is rotating normally (green)

(13) TEMP. CONTROL LAMP

Not used with EI-DxxO3M.

(14) ALARM LAMP

Alarm/warning lamp (yellow). See 10.6 "Alarm
Detection Capabilities." Lights when an alarm
occurs or flashes to give a warning.

(15) REMOTE/LOCAL SELECTION SWITCH- Remote/Local selection switch; The remote
mode allows the turbo molecular pump to be

controlled by employing the external control
connector (24) or serial interface connector

((22), (23)), located on the rear panel of the
power supply unit. The local mode allows
controlling the turbo molecular pump from the
front panel

(16) AC INPUT CONNECTOR

Power cable receptacle

(17) POWER SWITCH

Power switch

(18) CONTROL CONNECTOR

Control cable receptacle

(19) MOTOR CONNECTOR

Motor cable receptacle

(20) EARTH GROUND

Electrical grounding terminal

(21) RS-485 CONNECTOR

Serial interface connector (Note 1)

(22) RS-232C CONNECTOR

Serial interface connector (Note 1)

(23) REMOTE CONNECTOR

Remote-control connector

(24) CONTRAST

Adjusts the contrast of the LCD

(Note 1) See APPENDIX-A "COMMUNICATIONS" for details.
Power Supply Unit
INSTRUCTION MANUAL

This page is intentionally left blank.

263-13228

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CONSTRUCTION AND
PRINCIPLE
0

3.1

Power Supply Unit

SECTION 3

3.1

CONSTRUCTION AND PRINCIPLE

Power Supply Unit

The power supply unit is composed of the magnetic bearing control system and the high
frequency motor system and does not use back up batteries for electrical power failure.
The magnetic bearing control system controls the levitation of the rotor inside the turbo

molecular pump. The system detects the rotor position by an electrical signal received from the
gap sensors and maintains the levitation by regulating the current to the magnetic bearings.
The high frequency motor system rotates the rotor at a rated rotational speed. This frequency

power system converts AC/single phase commercial power to controlled DC/three phase pulsed
power. The DC/three phase pulsed power drives the DC motor that is an integral part of the rotor.
If the electrical power is interrupted while the rotor is in a high-speed rotation, then the motor
becomes a generator to power the magnetic bearing system during a power failure deceleration
mode; therefore, the need for a battery backup system is eliminated.

The power supply unit is equipped with an RS-232C and an RS-485 serial interface and with
Contact input/ouitput to operate the turbo molecular pump from an external source. The

operational status can be monitored and the history retrieved through the RS-232C and RS-485.
See APPENDIX-A "COMMUNICATIONS" for instructions to remotely operate the turbo
molecular pump using the RS-232C and RS-485 serial interface.

The turbo molecular pump, the power supply, the control cable, and the motor cable are
respectively interchangeable among any products of the same model.

Fig.1-1 shows the external dimensions of the power supply unit.
The power supply unit, control cable, motor cable, and the pump unit are all mutually
compatible. However, only pumps and power supply units with the same series number (the "xx"
number) are compatible with each other.

263-13228

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SPECIFICATIONS

4.1

Power Supply Unit

4.2

Standards Fulfilled

SECTION 4

4.1

SPECIFICATIONS

Power Supply Unit

Power supply unit model

EI-D1003M
TMP-803M
TMP-803MC
TMP-803LM
TMP-803LMC

Suitable pump

Exchangeable Compatibility

TMP-1003M
TMP-1003MC
TMP-1003LM
TMP-1003LMC

EI-D1103M
TMP-1103MP

EI-D1303M
TMP-1303M

TMP-1103MPC
TMP-1303MC
TMP-1103LMP
TMP-1303LM
TMP-1103LMPC TMP-1303LMC

EI-D2003M
TMP-2003M
TMP-2003MC
TMP-2003LM
TMP-2003LMC

The control cable and the motor cable are interchangeable between any pump and
power supply unit.

5 axis control. No Battery is required.

Magnetic Bearing

(When power failure occur, magnetic bearing is support by regenerative power

from motor.)
Speed control

Feedback control

Speed variation

Speed is variable between 25% and 100% of the rated speed (set as 0.1%).

Display

Communicatio
n

LCD

20characters*2 lines (With LED back light)

LED

POWER / ROTATION / NORMAL SPEED / ALARM

Contact

REMOTE (MR 34pin) Input : START / STOP / RESET / LOW SPEED Output"
ROTATION / ACC. / BRAKE / NORMAL REMOTE / ALARM / WARNING

Serial

RS-232C (D-sub 9pin male, Screw lock size:M2.6) / RS-485 (D-sub 9pin female,

Screw lock size:M2.6)

Pump Temperature
Alarm
Detection

Alarm

Pump Startup Failure.Overload.Overspin for motor
Magnetic Bearing failure

Power supply malfunction

(Over Temperature inside power supply, Fail drive circuit)
Power failure
Warning

Failure of magnetic bearing

ALARM LED lights, buzzer sounds, alarm description displayed on LCD.
Power failure:

Decelerates while maintaining magnetic levitation by regenerative breaking
power.

Alarm

Levitation is stopped after deceleration, and the rotor is supported by the touch

down bearing.

Protection

Once power is restored, restart is possible after resetting. (Refer to Section 7.2)

When other alarms occur:

Stops operation or decelerates. Magnetic levitation is continued
Warning

Momentary power failure

ALARM LED flashes, buzzer sounds, warning description displayed on LCD.Pump
operation continues.

If the electrical power is recovered in 1 second or less, then the power supply
operation prior to the electrical power failure is continued. No change output
signal.Olherwise, the turbo molecular pump rotor is decelerated.
If the power is disrupted over one second, the brake will engage. The pump can be

restarted after the reset operation.
Alarm history

Stores the date, time and detected event information for the last 99 alarm events.
Voltage

Input electric
power

Maximum

1.0 kVA

power

Insulation
withstand
voltage

Mass

Single phase 200 to 240 VAC ± 10% (50 / 60 Hz ± 2 Hz)

1500 v,
8 kg

263-13228

1 minutes

1.0 kVA

1.2 kVA

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4.1

EI-D1003M

Power supply unit model
Environmental
Conditions

EI-D1103M

EI-D1303M

EI-D2003M

Operation : 0 to 45 °C / Storage : -25 to 70 °C (No dew condensation)

Relative
humidity

40 to 80 %RH

Power supply unit model

Use : Indoor, Altitude max : 2000 m
Overvoltage category III, Pollution degree 2
IP classification 20

EI-D2203M

EI-D2303M

TMP-2203MC

TMP-2203LM
TMP-2203LMC

EI-D3203M

EI-D3403M

EI-D4203M

TMP-3203M

TMP-2203M
Suitable pump

■ ■.

Power Supply Unit

Temperatures

Installation conditions
(See EN61010-1 standard)

i : . ■

TMP-W2303LMC

TMP-3203MC
TMP-3203LM
TMP-3203LMC

TMP-3403LMC

TMP-4203LMC

The control cable and the motor cable are interchangeable between any pump and

Exchangeable
Compatibility

power supply unit.

5 axis control. No Battery is required.
Magnetic Bearing

(When power failure occur, magnetic bearing is support by regenerative power from
motor.)

Speed control

Feedback control

Speed variation

Speed is variable between 25% and 100% of the rated speed (set as 0.1%).

Display

LCD

20characters*2 lines (With LED back light)

LED

POWER / ROTATION / NORMAL SPEED / ALARM

Contact

REMOTE (MR 34pin) Input : START/STOP/RESET/LOW SPEED Output:
ROTATION / ACC. / BRAKE / NORMAL REMOTE / ALARM / WARNING

Serial

RS-232C (D-sub 9pin male, Screw lock size:M2.6) / RS-485 (D-sub 9pin female. Screw
lock size:M2.6)

Alarm

Pump Temperature
Pump Startup Failure,Overload.Overspin for motor
Magnetic Bearing failure
Power supply malfunction
(Over Temperature inside power supply, Fail drive circuit)
Power failure

Warning

Failure of magnetic bearing

Communication

Alarm
Detection

Alarm
Protection

ALARM LED lights, buzzer sounds, alarm description displayed on LCD.
Power failure:
Decelerates while maintaining magnetic levitation by regenerative breaking power.
Levitation is stopped after deceleration, and the rotor is supported by the touch-down
bearing.

Once power is restored, restart is possible after resetting. (Refer to Section 7.2)
When other alarms occur:
Stops operation or decelerates. Magnetic levitation is continued
Warning

Momentary power failure

ALARM LED flashes, buzzer sounds, warning description displayed on LCD.Pump
operation continues.

If the electrical power is recovered in 1 second or less, then the power supply
operation prior to the electrical power failure is continued. No change output
signal.Otherwise, the turbo molecular pump rotor is decelerated.

If the power is disrupted over one second, the brake will engage. The pump can be
restarted after the reset operation.
Alarm history

Stores the date, time and detected event information for the last 99 alarm events.

Power Supply Unit
INSTRUCTION MANUAL

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——';

SECTION 4

Power supply unit model

EI-D2203M

Voltage

Input electric
power

Maximum

Insulation
withstand

Mass

EI-D2303M

EI-D3203M

EI-D3403M

1.2 kVA

1500 V.

1.4 kVA

1.2 kVA

1.3 kVA

1 minutes

8 kg
Temperat
ures

Relative
humidity

Installation conditions
(See EN61010-1 standard)

Operation : 0 to 45 °C / Storage : -25 to 70 °C (No dew condensation)
40 to 80 %RH

Use: Indoor, Altitude max: 2000 m
Overvoltage category III, Pollution degree 2
IP classification 20

4.2 Standards Fulfilled
EN61010-1;2001
UL61010A-1

Safety

SEMI S2

EN1012-2; 1996

EN61326-1; 1997 + A1; 1998 + A2; 2001 class A
EMC

EN61000-3-2; 1995 + A14; 2000
SEMI F47

EI-D4203M

Single phase 200 to 240 VAC ± 10% (50 / 60 Hz ± 2 Hz)

power

voltage

Environmental
Conditions

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SPECIFICATIONS

263-13228

1.5 kVA

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INSTALLATION

5.1

Installation of the Power Supply Unit

5.1.1

Location of the Power Supply Unit

5.1.2

Installation of the Power Supply Unit

5.1.3

Compatibility with Previous Models

5.2

Connection of Power Cable

5.3

Connection of the Pump to the Power Supply Unit

■

■■

■"■"■■.

SECTION 5

5.1

■

;■'

—-

...p..l1.1.1

.■■1.1.1.-.1.1.1lnr1

t in i-^i irim

INSTALLATION

Installation of the Power Supply Unit

5.1.1 Location of the Power Supply Unit
Install and anchor the power supply unit inside a rack, which shall be located at a place where
it is not exposed to direct sun ray and well ventilated. Avoid to locate it at the following places.

(1) Place where it is very humid, dusty and, in addition, oil smoke, vapor, water, etc, are exist.
(2) Place where the power supply unit is exposed to direct sun ray and abnormally high
temperature

(3) Place with high amplitude of vibration and impact
(4) Near chemically active gas and explosive/combustible gas

(5) Place with strong magnetic field and electric field, noisy place, and place with strong
radioactive ray

(6) Unventilatable place

5.1.2 Installation of the Power Supply Unit
When mounting the power supply unit onto the customer's rack, use the front panel installation
holes. The installation panel and screws are to be supplied by the customer.
Prepare the shelf to support the weight of the power supply unit in the rack.
How to install the unit onto a rack

(1) Turn the power supply unit over and remove the four rubber pads.
(2) Pass the power supply unit through the cutout hole in the installation panel and secure it
with four screws (See Fig. 5-2).

(3) In order to ensure that the interior of the power supply unit is cooled sufficiently, leave a gap
inside the rack of at least 30 mm above, 5 mm on either side, and 50 mm to the rear of the
power supply unit (See Fig. 5-1).

(4) The space required for installing the cables is shown in Fig. 5-4.
(5) Reattach the rubber pads if necessary.

263-13228

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5.1

Installation of the Power Supply Unit

>50mm

>30mm

-• «->5mm

front panel installation
holes (4places)

Fia.5-1

Leave enouah space around the power suddIv unit

rack

installation panel

198.1 ±0.2

4-M4

/ 4 PLACES

■..

in
1

203T
Panelcut dimensions

Fia.5-2

Mount the power sijppIv unit

Power Supply Unit
INSTRUCTION MANUAL

SECTION 5

INSTALLATION

160mm

12mm-»

rubber pads

(4 places)

MAX 20mm-

273mm

50mm

Fia.5-3

Location of rubber Dads

(Note 1) Use the prescribed screws to attach the rubber pads. Using the wrong screws can
lead to damage or failure of the power supply unit.
Fla.5-4

Attaching the rubber nads

240

Fia.5-5

263-13228

Space to connect the cable

5.1

Installation of the Power Supply Unit

5.1.3 Compatibility with Previous Models
If previous EI-xxO3M/MD/MZ power supply units (where "xx" is a number that indicates the
applicable pump type) are being used installed on a rack, then optional rack mounting kit is
required in order to replace these units with EI-DxxO3M power supply units.
The mounting screws are to be supplied by the customer.

Prepare the shelf to support the weight of the power supply unit in the rack.
Optional Parts (Rack Mounting Kit)
Q'ty

Description

Notes

Parts Number

Steel, painted same color as

Rack Mounting Panel

front panel of power supply

unit. (See Fig.5-5)
2

Panel Attachment Screws

263-14117

Stainless Steel, M4 L=6mm

How to install the unit onto the rack :

(1) Turn the power supply unit over and remove the four rubber pads.
(2) Attach the rack mounting panel to the power supply unit with four Panel Attachment

Screws. (See Fig. 5-7)
(3) Reattach the rubber pads of the power supply unit if they are necessary.
(4) Fix to the rack using 4 M4 tap screws. (See Fig. 5-7, Fig. 5-8)

t2.3

203

198.1

4-M4
M4TAP. 4 PLACES

Opening

205
213

Fia.5-6

Dimensions of Rack Mounting Panel

Power Supply Unit
INSTRUCTION MANUAL

SECTION 5

INSTALLATION

POWER SUPPLY
S3SS3

Fiq.5-7

Dimensions of the Power SuddIv Unit with Rack Mounting

206 min
1

172 ±0.2

4-M4

4 PL/

o
a

Opening

y
o

Fia.5-8

Panelcut Dimensions

If a remote-control signal is used, it must be checked for compatibility. For a detailed
procedure, please refer to Section 6.7.1 "Compatibility with Previous Models".

263-13228

V:;:' ■''■" '" ■''■■
5.2

Connection of Power Cable

5.2 Connection of Power Cable
NOTICE
The power input voltage of the power supply unit EI-DxxO3M (the "xx" number indicates the
model of the corresponding pump) is 200 to 240 VAC ± 10%. Connect the power supply unit to
the voltage specified on the rear panel label only.Connection of the power supply unit to the
incorrect input voltage can cause damage to the equipment. Supply the power via a breaker
(rating 15A).PIease provide PE(Protective Earth) connection to the terminal of a "PE" marked
wire in final application.

Connection of Power Cable:

(1) Connect the power cable terminal to the terminal board of user's power distribution board
for equipment. The wire with [PE] mark is for earth use and other remaining two wires are
for single phase AC power. (See Fig. 5-9, Table 5-1)
First, connect the wire [PE] mark. Next connect the other two wires.

(2) Turn off the POWER switch (Fig. 2-2 (17)) on the rear panel of the power supply unit. Or
otherwise be sure to check that it is in off.

(3) Connect the power cable connectors to the power supply unit AC INPUT connector (Fig.
2-2(16)).
REFERENCE

For the specified power voltage, see the side panel of the power supply unit.

WIRE MARK P\

TERMINAL
04.3

Fig.5-9
Table 5-1

Power Cable CONNECTION

Wire color of power

Green/Yellow

Black

GND

cable
Location

Power Cable

White

Power Supply Unit
INSTRUCTION MANUAL

SECTION 5

5.3

INSTALLATION

Connection of the Pump to the Power Supply Unit

NOTICE
Insert straight the control cable connector after checking its key direction. Inserting it in oblique
direction would cause damage of the connector pins. After the insertion, turn the cable connector
clockwise until the rotation lock clicks.

NOTICE
Don't disconnect each cable while the pump is running. Particularly before disconnecting the
control cable, Check complete shutdown of the pump by ROTATION lamp goes out and,
thereafter, turn off the POWER switch.

Control Cable:

Use the control cable that conformed CE marking. It has ferrite core at power supply side.
Control cables available for the use are identified with "262-75369A". But, If no ferrite core is not
fixed arround a control cable, it is not conformed CE marking.

Check that it is identified as specified. Even the use of other similar cable would disable start
up of the pump, even though it could be connected. After turn on the POWER switch of the power
supply unit, ALARM lamp (Fig. 2-1 (14)) lights, if an old type cable is connected.

SHIMADZU

Fiq.5-10

262-75369A

Control Cable

Connecting Sequence (See Fig. 2-2 and Fig. 5-10):
(1) Turn off the POWER switch (Fig. 2-2 (17)) on the rear panel of the power supply unit. Or
otherwise check that it is off.

(2) Connect the power supply unit to the control connector {Fig. 2-2 (19)) of the pump proper
with the control cable.

(3) Connect the power supply unit to the motor connector (Fig. 2-2 (20)) of the pump proper
with the motor cable.

(4) For remote operation of the turbo molecular pump or intake of status signal, etc., connect
the RS-485 connector (Fig. 2-2 (21)) or RS-232C connector (Fig. 2-2 (22)), Remote-Control
connector (Fig. 2-2 (23)). When using Remote-Control connector, make wiring connection
as instructed in Section 6.7 "Remote-Control Connector".
All interfaces are SELV(Safety extra-low Voltage).

263-13228

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5.3

...\..'

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.;'■ **'

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. ■'

".»■

■"'-■»

Connection of the Pump to the Power Supply Unit

WIDE RANGE TYPE

TURBO MOLECULAR PUMP

POWER SUPPLY UNIT
EI-DxxO3M
MAG. BRG.

AC INPUT.

MOTOR

POWER CABLE

AIR COOLED TYPE
TURBO MOLECULAR PUMP

POWER SUPPLY UNIT
EI-DxxO3M
MAG.BRG.
AC INPUT

MOTOR

POWER CABLE

Fia.5-11

Connection of Cables

Power Supply Unit
INSTRUCTION MANUAL

SECTION 5

INSTALLATION

This page is intentionally left blank.

263-13228

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OPERATION
©

6.1

Outline

6.1.1

Introduction

6.1.2

Operation Flowchart

6.2

Start-up Preparation

6.2.1

Start-up Preparation Sequence in LOCAL Mode

6.2.2

Start-up Preparation Sequence in REMOTE

Mode

6.3

Start-up

6.3.1

Start-up Sequence in LOCAL Mode

6.3.2

Start-up Sequence in REMOTE Mode

6.4

Shutting Down

6.5

Variable Speed Operation

6.5.1

Outline

6.5.2

Operation from Start-up to Low Speed Rotation

6.5.3 Operation from Rated Speed Rotation to Low
Speed Rotation

6.5.4

Operation from Low Speed Rotation to Rated

Speed Rotation

6.6

Software Operation

6.7

Remote-Control Connector

6.7.1

Specifications

6.7.2

Compatibility with Previous Models

u~^^~:^-:'..±!^Z^
SECTION 6

OPERATION

6.1 Outline
CAUTION
Neither disconnect and reconnect each cable while the pump is running. Particularly for
unplugging the control cable from the receptacle, check complete shutdown of the pump by

ROTATION lamp goes out and, thereafter, turn off the POWER switch.

CAUTION
Do not turn the power off while the pump is running. The touch-down bearing may need to be
replaced if the power is turned off repeatedly during operation. When the power is turned off
while the pump is rotating, power from regenerative braking maintains the magnetic levitation
until the rotational speed drops. Levitation then stops and the touch-down bearing supports the

rotor. Consequently, repeated touch-down operations can reduce the life of the bearing.

6.1.1 Introduction
(See Fig. 2-1 and Fig. 2-2)

The LCD (Fig. 2-1 (1)) displays the model name of the power supply unit corresponding to the
pump model name (e.g. SHIMADZU EI-DxxO3M) when the power supply unit POWER switch
(Fig. 2-2 (17)) is turned on.

It then displays "SELF CHECKING" and the power supply unit conducts self-diagnosis. If the
result is good, the LCD changes into monitor mode (See section 6.6 Software Operation (1)), and
the power supply is operatable. But if an alarm is delected, the LCD changes into alarm mode
(See Section 6.6 Software Operation (2)), and displays detected alarm.

263-13228

6.1

Outline

6.1.2 Operation Flowchart

Start-up preparation flowchart

LOCAL

REMOTE
operation

operation
Set the REMOTE/LOCAL

Set the REMOTE/LOCAL
selection switch to REMOTE.

selection switch to LOCAL.

Start cooling water.

(for cooling water method)/

Turn POWER switch from
0 (OFF) to 1 (ON).

!
•

Start cooling water

(for cooling water method)/

| \ Turn POWER switch from /

0 (OFF) to 1 (ON).

"REMOTE" signal output ON.

\ Backing vaccum pump /
operates.
/

Backing vaccum pump

Pump internal
pressure < 200 Pa

Pump internal

pressure < 200 Pa

Start-up preparation complete
(LOCAL operation)

Fia. 6-1

Start-up preparation complete
(REMOTE operation)

Start-up Preparation Flowchart

Power Supply Unit
INSTRUCTION MANUAL

!i^^^

±^^M:^
SECTION 6

OPERATION

Start-up flowchart

(LOCAL operation)

(

Start-up flowchart
(REMOTE operation)

LOCAL
operation

REMOTE
operation

itch. /

Press the START switch

LCD monitor mode/operation mode
Display: "STOP1—>"ACC."

ROTATION lamp lights.

\ Input "START" signal. /
"ACCELERATION" signal
output ON.

"ROTATION" signal output ON.

YES
NORMAL SPEED lamp lights.
LCD monitor mode/operation mode
Display: "ACC." -> "NORMAL'

"ACCELERATION" signal
output OFF.
"NORMAL" signal output ON.

Acceleration stops at rated
speed , speed is maintained.

Pump start-up complete.

Fia. 6-2

263-13228

Start-up Flowchart

6.1

Outline

f Shutting down flowchart J

Stop process gas

*--■*.
YES

No purge gas

No valve^-gjose va|ve betweer
cking vaccum

LOCAL
— operation

REMOTE
operation

Press STOP switch.

Input "STOP" signal.

NORMAL SPEED lamp goes out.
LCD monitor mode/operation mode
Display : "NORMAL"-> "BRAKE"

"NORMAL" signal output OFF
"BRAKE" signal output ON.

ROTATION lamp goes out.
LCD monitor mode/operation mode
Display : "BRAKE" -> "STOP"

ROTATION" signal output OFF
"BRAKE" signal output OFF.

Turn POWER switch from
1 (ON) to 0 (OFF).

Stop cooling water.

Pump shutting down.

Fia. 6-3

Shuttina down Flowchart
Power Supply Unit
INSTRUCTION MANUAL

SECTION 6

^^ '^3^& 5 fc::?' y^

OPERATION

f Speed setting flowchart \

Speed setting flowchart
Start-up to low speed rotation

f Start-up to low speed rotation ]

(LOCAL operation)

Set the low speed valuei

•

LCD setting mode

in the /

/ (Note 1)j |

itch. /

LCD setting mode

Input "LOW SPEED "

mode/low speed setting.

Press the START switch

! \S
Set the low speed valuei in the /

^Select the LOW SPEED mode
using the LCD setting

(REMOTE operation)

! | \

(Nole1)j

signal. /

Input "START" signal.

"?" is displayed after the LCD
monitor mode/speed display
LCD monitor mode/operation mode

Display: "STOP'-> "ACC."

"ACCELERATION" signal
output ON.

ROTATION lamp lights.

"ROTATION" signal output ON.

Speed
% low-speed valu

NORMAL SPEED lamp lights.
LCD monitor mode/operation mode
Display : "ACC." -> "NORMAL"

"ACCELERATION" signal
output OFF.

"NORMAL" signal output ON.

Acceleration stops at the set low
speed value and the speed is
maintained.

(Note 1)

Speed setting complete.

After this setting has been made once,

it does not have to be repeated each time.

Start-up to Low Speed Rotation
Fia. 6-4

263-13228

Speed Setting Flowchart

6.1

Outline

r Speed setting flowchart^v
Rated speed to low speed ]
rotation
J
V
Rated speed rotation or when
accelerating at a speed above

the low speed.

LOCAL
operation

REMOTE
operation

Set the low speed value in the
LCD setting mode.

Set the low speed value in the
(Notel);

Select the LOW SPEED mode

LCD setting mode.

(Note 1)

Input "LOW SPEED" signal.

using the LCD setting mode/
speed setting.

"*" is displayed after the LCD
monitor mode/speed display

"NORMAL" signal output OFF.
"BRAKE" signal output ON.

NORMAL SPEED lamp goes out.
LCD monitor mode/operation mode

Display : "NORMAL" —> "BRAKE"

Speed >
low-speed value

NORMAL SPEED lamp lights.
LCD monitor mode/operation mode

Display : "BRAKE1 —> "NORMAL"

YES

Speed >
low-speed value

YES

"BRAKE" signal output OFF.
"NORMAL" signal output ON.

The speed is maintained at the
low-speed value.

Speed setting complete.

(Note 1) After this setting has been made once,
it does not have to be repeated each time.

Rated Speed to Low Speed Rotation
Fia. 6-5

Speed Setting Flowchart

Power Supply Unit

INSTRUCTION MANUAL

SECTION 6

OPERATION

Speed setting flowchart
Low speed to rated speed
rotation

Low speed rotation

LOCAL

REMOTE
operation

operation
Select the NORMAL mode

Cancel "LOW SPEED" signal.

using the LCD setting mode/
speed setting.

"♦"" disappears after the LCD
monitor mode/speed display

Speed <
80% rated speed

Speed <
80% rated speed
YES

NORMAL SPEED lamp goes out.
LCD monitor mode/operation mode
Display : "NORMAL" -> "ACC

"NORMAL" signal output OFF.
"ACCELERATION" signal
output ON.

Speedy
80% rated speed

Speed £
80% rated speed

NORMAL SPEED lamp lights.
LCD monitor mode/operation mode
Display : "ACC." -> "NORMAL"

"ACCELERATION" signal
output OFF.

"NORMAL" signal output ON.

The acceleration stops at the
rated speed and the speed is

maintained.

Speed setting complete

Low Speed to Rated Speed Rotation
Fia. 6-6

263-13228

Speed Setting Flowchart

6.4

Shutting Down

6.4 Shutting Down
CAUTION
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may

result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by

stopping the pump and dispersal of parts.

CAUTION
When reducing internal pressure of the turbo molecular pump up to around the atmospheric
pressure by use of inert gas, etc., adjust the pressure reducing valve so that the internal pressure
of the same pump does not exceed 20 kPa [GAUGE].

For shut-down of the turbo molecular pump, follow the sequence below.

6.4.1 Preparations Prior to Shutting Down Operation
(1) Check that process gas inflow is in complete stop. When main valve is provided between
the turbo molecular pump and vacuum chamber, close the valve, too.

(2) When purge gas is being fed into the turbo molecular pump, stop the gas feed, too.

(3) When forevacuum valve is provided between the turbo molecular pump and backing
vacuum pump, close the valve, too.

6.4.2 Shutting Down Sequence in LOCAL Mode
(1) Press the STOP switch (Fig. 2-1 (7)) and check that the indication on the pump monitor
mode/operation mode LCD switches from "NORMAL" to "BRAKE."
Then the NORMAL SPEED lamp (Fig. 2-1 (12)) goes off.

(2) Wait until the ROTATION lamp (Fig. 2-1 (11)) goes out. The pump monitor mode/
operation mode LCD switches from "BRAKE" to "STOP."

(3) Turn off the power supply unit POWER switch (Fig. 2-2 (17)).
(4) Stop the cooling water flow.

Power Supply Unit

INSTRUCTION MANUAL

SECTION 6

OPERATION

6.4.3 Shutting Down Sequence in REMOTE Mode
(1) Input the "STOP" signal (see Table 6-3) from the remote-control connector (Fig. 2-2 (24))
and check that the "BRAKE" signal (see Table 6-3) is ON.

(2) Wait until the "ROTATION" signal (see Table 6-3) turns OFF. At this time, the "BRAKE"
signal (see Table 6-3) also turns OFF.

(3) Turn off the power supply unit POWER switch (Fig. 2-2 (17)).
(4) Stop the cooling water flow.

When the turbo molecular pump is turned off after pumping a corrosive gas, maintain a vacuum
inside the turbo molecular pump or purge the interior of the pump with an inert gas.

Further, in such a case when a hydraulic rotary vacuum pump is used as backing vacuum

pump and there is possible reverse flow and diffusion of oil from the backing vacuum pump,
return the pump internal pressure to atmospheric pressure using dry nitrogen gas, after complete
shut-down of the pump [ROTATION lamp (Fig. 2-1(11)) goes out], to prevent the turbo molecular
pump from being contaminated with oil vapor.

For shutting down the turbo molecular pump in running at high speed with infeed of dry nitrogen
gas to the pump, keep the nitrogen gas flow rate at 1500 mL/min maximum.
REFERENCE

ROTATION lamp (Fig. 2-1 (11)) goes out or "ROTATION" signal (see Table 6-3) turns off when
the pump rotational speed is 60rpm or less. Turning off the POWER switch (Fig. 2-2 (17)) permits
the pump rotor to be supported by the touch-down bearings.

263-13228

■■*■■ ■-;.-■ .■:■■;* .:. .■..: ■,■/;,■■. .

:■.■ •:':■:■ vi;r.yvy;-y;

6.5

,_....

' ■■: ■■■;■

......

■■ ■'."-■'

Variable Speed Operation

6.5 Variable Speed Operation
CAUTION
When using the variable speed function to change the pump rotation rate, use a rotation rate
that does not cause resonance with other devices installed at the site.

CAUTION
If an EI-DxxO3M power supply unit is used in combination with an existing pump that was
operated in combination with a power supply unit not having the variable speed function (El-

xxO3MD), the variable speed function cannot be used, (the "xx" number indicates the model of
the corresponding pump.)

If the power supply unit is to be combined with an existing pump, modification and operational
inspections are necessary. Please contact Shimadzu for detailed information.

6.5.1 Outline
(1) The rotational speed settings function sets the rotational speed by selecting between the
NORMAL speed mode or LOW SPEED mode.

(2) Select the NORMAL mode or LOW SPEED mode by LOCAL operation using the setting
mode/rotational speed settings/speed setting set value on the LCD display or by REMOTE
operation using the remote-control connector "LOW SPEED" signal input (see Table 6-3).

(3) The NORMAL mode or LOW SPEED mode selection can be made before or after start
up. (See the Speed Setting Flowcharts in Figs. 6-4, 6-5, and 6-6.)

(4) Set the low speed value between 25% and 100% of the rated speed in 0.1% increment
with the setting mode/rotational speed settings/low speed setting set value on the LCD
display.

(5) The low speed value can be set while the pump is rotating in the LOW SPEED mode. The
pump then accelerates or decelerates to the new set value and maintains the set speed.

(6) The time required for the speed to change is the same as the time for normal acceleration
or deceleration.

For example, if the low speed value is set to 80% and the LOW SPEED mode is selected
during normal rotation, the time for the speed to drop to 80% is approximately one-fifth the
time required to stop from rated speed.

Power Supply Unit
INSTRUCTION MANUAL

' .-|J'^:"i*#"!."■"■■■■

■ .: ■.■"' -.;.' ■ ■■■■

SECTION 6

■"..*"/' I". ':*--

"*!■'.■!:.""" '\ '.•"■■■' "■:.'.. .i"J ■■": "^ I1'.'11'1"■'...: ■ '}•',• .. ■. ■" ■■*■ "■.■■"

■. ^.'.S^i'/:■-|V•

OPERATION

6.5.2 Operation from Start-up to Low Speed Rotation
This is the procedure until low-speed rotation is achieved when the speed setting is made with
the pump stopped.
LOCAL Operation

(1) Start-up begins when the 6.2.1 "Start-up Preparation Sequence in LOCAL Mode" is
complete.

_^
: *\

rP:.--'

(2) Set the low speed value with the setting mode/rotational speed settings/low speed setting
set value on the LCD display. (See Section 6.6 "Software Operation" (4).) After this setting

has been made once, it does not have to be repeated each time.

(3) Select the LOW SPEED mode using the setting mode/rotational speed settings/low speed
setting set value. (See Section 6.6 "Software Operation" (4).)
(4) Press the START switch (Fig. 2-1 (6)).

(5) While the speed is changing, "*" is displayed after the monitor mode/speed display. (See
Section 6.6 "Software Operation" (1).)

(6) ACC is displayed on the pump monitor mode/operation mode LCD and the pump starts to
accelerate. After a few seconds the ROTATION lamp (Fig. 2-1 (11)) lights.

(7) When the rotational speed reaches 80% of low-speed value, the NORMAL SPEED lamp
lights (Fig. 2-1 (12)) and the pump monitor mode/operation mode LCD switches from "ACC."
to "NORMAL".

(8) When the pump speed reaches the set low speed value, acceleration stops and the pump
speed is maintained.

$6 The same operation occurs if the LOW SPEED mode is selected after the START switch is
pressed but before the pump speed reaches the set low speed value.
REMOTE Operation

(1) Start-up begins when the 6.2.2 "Start-up Preparation Sequence in REMOTE Mode" is
complete.

(2) Set the low speed value with the setting mode/rotational speed settings/low speed setting
set value on the LCD display. (See Section 6.6 "Software Operation" (4).) After this setting
has been made once, it does not have to be repeated each time.

(3) Input the "LOW SPEED" signal (see Table 6-3) from the remote-control connector (Fig. 22(23)).

(4) Input the "START" signal from the remote-control connector (Table 6-3).

(5) The pump starts to accelerate when the "ACCELERATION" signal (see Table 6-3) from
the remote-control connector (Fig. 2-2 (23)) turns ON. After a few seconds the "ROTATION"
signal turns ON.

(6) When the rotational speed reaches 80% of low speed value, the remote-control connector
"ACCELERATION" signal turns OFF and the "NORMAL" signal turns ON.

(7) When the pump speed reaches the set low speed value, acceleration stops and the pump
speed is maintained.

•)K The same operation occurs if the "LOW SPEED" signal is input after the "START" signal is
input but before the pump speed reaches the set low speed value.

263-13228

6.5

Variable Speed Operation

6.5.3 Operation from Rated Speed Rotation to Low Speed Rotation
This is the procedure to select low speed operation during rated speed rotation or when
accelerating at a speed above the low speed.(see Fig. 6-5)
LOCAL Operation

(1) Set the low speed value with the setting mode/rotational speed settings/low speed setting
set value on the LCD display. (See Section 6.6 "Software Operation" (4).) After this setting
has been made once, it does not have to be repeated each time.

(2) Next, select the LOW SPEED mode using the setting mode/rotational speed settings/
speed setting set value on the LCD display. (See Section 6.6 "Software Operation" (4).)

(3) While the speed is changing, "*" is displayed after the monitor mode/speed display. (See
Section 6.6 "Software Operation" (1).)

(4) The pump monitor mode/operation mode LCD switches from "NORMAL" to "BRAKE" and
the pump starts to decelerate. Then the NORMAL SPEED lamp (Fig. 2-1 (12)) goes off.

(5) When the rotational speed reaches the set low speed value, the NORMAL SPEED lamp
lights and the pump monitor mode/operation mode LCD switches from "BRAKE" to
"NORMAL."

(6) The pump stops decelerating and the pump speed is maintained.

%i A normal start-up and normal operation occurs if the mode is reverted to NORMAL speed
before the pump speed reaches the set low speed value.
REMOTE Operation

(2) Input the "LOW SPEED" signal (see Table 6-3) from the remote-control connector (Fig. 22 (23)).

(3) The pump starts to decelerate when the remote-control connector "NORMAL" signal (see
Table 6-3) turns OFF and the "BRAKE" signal (see Table 6-3) turns ON.

(4) When the pump speed reaches the set low speed value, the remote-control connector
"BRAKE" signal turns OFF and the "NORMAL" signal turns ON.

(5) The pump stops decelerating and the pump speed is maintained.

JK A normal start-up and normal operation occurs if the "LOW SPEED" signal is cancelled
before the pump speed reaches the set low speed value.

6.5.4 Operation from Low Speed Rotation to Rated Speed Rotation
This is the procedure to select normal speed operation during low speed rotation,
(see Fig. 6-6)

Power Supply Unit

INSTRUCTION MANUAL

i\-:2x.

■:

SECTION 6

""..:: " " " ■-* !

...■■."

■ ■ ■."■ll"

.■.'-'■"■-".■*'*■

*. .* ■ :

.":"-■■

OPERATION

LOCAL Operation

(1) Select the NORMAL mode using the setting mode/rotational speed settings/speed setting
set value on the LCD display. (See Section 6.6 "Software Operation" (4).)

(2) The "*" disappears after the monitor mode/speed display. (See Section 6.6 "Software
Operation" (1).)

(3) If the set low speed value did not exceed 80% rated speed, the pump monitor mode/
operation mode LCD switches from "NORMAL" to "ACC." and the pump starts to accelerate.
The NORMAL SPEED lamp (Fig. 2-1 (12)) goes off.

When the rotational speed reaches 80% rated speed, the NORMAL SPEED lamp lights and
the pump monitor mode/operation mode LCD switches from "ACC." to "NORMAL."

(4) If the set low speed value exceed 80% rated speed, the LCD display remains unchanged
and the pump accelerates.

(5) When the rated speed is reached, the pump stops accelerating and the pump speed is
maintained.
REMOTE Operation

(1) Cancel the "LOW SPEED" signal (See Table 6-3) inputted in the remote-control connector
(Fig. 2-2 (23)).

(2) If the set low speed value did not exceed 80% rated speed, the remote-control connector
"ACCELERATION" signal turns ON and (see Table 6-3) and the pump starts to accelerate.
The "NORMAL" signal turns OFF. When the rotational speed reaches 80% rated speed, the
remote-control connector "ACCELERATION" signal turns OFF and the "NORMAL" signal
turns ON (see Table 6-3).

(3) If the set low speed value exceed 80% rated speed, remote-control signals remain
unchanged and the pump accelerates.

(4) When the rated speed is reached, the pump stops accelerating and the pump speed is
maintained.

263-13228

6.6

O. u

Software Operation

The software operation functions are listed in Table 6-1.
Table 6-1

Software Operation Functions

Function
Operation mode
User memo
Operation status
Motor speed
Motor current
Magnetic bearing monitor (Note 1)

Description

Monitors pump operation status

Alarm and warning display

Displays details of alarms and
warnings.

Alarm and warning history and details

Display the alarm and warning
history.

Run time
Maintenance call time
Number of power failure touch-downs
Number of high-speed touch-downs
Number of magnetic bearing warnings

Resets times and counters.

User memo setting

Inputs user memo.

RS-232C setting

Sets the communication
environment.

RS-485 setting

Sets the communication
environment.

Rotational speed setting

Sets the pump speed display
format.

Remote-control signal setting

Sets the operations of the
remote-control signals.

Warning output setting (Note 2)

External output setting for
warnings

Default setting

Reverts to the default settings.

Reference flowchart

(1) Monitor mode

(2) Alarm mode

(3)Timer

Menu
mode

(4)Setting

(Note 1) When during the low speed rotation (less than 50% of rated speed), or detected alarm
below, the monitor function do not operate.

Alarm code:46,47(rotational speed error), 51 to 55(excessive vibration of the magnetic
bearing), 66(magnetic bearing control error), 68,69(rotor is out of balance)
(see Table 7-6)

(Note 2) The warning output setting function is installed in some custom-specification
instruments; it is not available in all instruments. Modifications are required to install this
function in an instrument that does not incorporate it. Consult your Shimadzu
representative for details.

Power Supply Unit
INSTRUCTION MANUAL

SECTION 6

OPERATION

A flowchart of the entire LCD display is shown below.

ISELECTj.r+I.PI, ISETI in the flowchart indicate keys on the power supply unit front
panelrepresent the LCD display.

LCD display

6
SELECT

Fia. 6-7

263-13228

—

DISPLAY

SET

Power SuddIv Unit Front Panel

6.6

Software Operation

i MENU MODE i
POWER SWITCH ON
SELF

SHKA02U £l-DxO3ll

| DISPLAY |

DIAGNOSIS SELF CKEKING

(2 Sec)

MONrTOR MODE

OPERATIC! REMOTE

assssuSER HEW::::::

□

sxi>

o\ sn=

Detail

S3S3SUSE »KKOMSasj

SIOP

ROT=

ED
STOP

ROT=

KC= 0 OA

LZI

SI'
UBI=

UB'

— P47

OS
OS UB2=

ALARM AMD

WARNING DISPLAY

ALARM MODE

DIDNT

loCCURHEO
ALARM

"V\ ALARM HISTORY

[OCCURRED ,j=pf COUNTEI! LIMIT

ALARM DETAILS

\X CONTENTS ^n^7
"
H01=2003/12 31 23 59

SELECTl

|ALAR»

[SETJ
I SET I

IEHP/IS CABLE

-I I5=PO«ER FAILURE

LZI

KORIUl

| SET |

I SET I

02=2003/12/31 23 59

21=ltP lECP/KB CABLE

gg 9A

R0UI0OS
UB=IOOS

sxmcxn

syi=ioo\

SX2=IOOS

S>2=IOOS

EJJ?E]

Detail

ALARB

95=2003/12/31 23 69

SMOOV

I3=»ROKO IIP EODEL

6l=re SENSOR ERR XI

UBI=IO0S

UB2=IOOS

ed,

LZI

— P49

RUN TI«E=99999HR

31'EI'BROVERHQ1

al 2003/12/31 23 69

ED..'E]
Just uaini =9999shr

Ifroa 2003/1/1 OO00E

TIMMER

tEUI

IIITECRMIKC IKER

INIECRA1IM 11 HER

RUN llt£=99999HR

INIEGRAIIMj TIKR

■IAIN! CALL=9999SHIi

13 Soc)

at 2003/12/31 23 69

at 2003/12/31 23 !
froa2003/!2/3l 23 !

LAST HAINT -99999HR

RESEI TIIIER=KO

INTEGRATING TIICER

DISPLAY

LAST UAINI =9999SHR

MINI CALI-39999KR
(99999KR!

Detail

IINTECRAIIKC 11 HER
|PO«ER

at 2003/12/31 23 59

Iroa2003/I2/3I 23 59

POKER FAILURE=999

- P50

RESET COUNIER=tiO

ED
INIEGRA1IKG 1IVER

KB ALARIN999

LZI

at 2003/12/31 23 59

froa20O3/12/3l 23 59

■1KB ALARIU999

•J RESET COUNTER>liO

INTEGRATING I HER
KB «ARUIKG=999

1 at 2003 12 31 23 59
fros>2003 12/31 23 59

KB «ARBIKC=999
RESET COUNTER-&O

Power Supply Unit
INSTRUCTION MANUAL

SECTION 6

OPERATION

SETTINGS

• MONITOR MODE j

263-13228

:^'.;s" *■.'■ ';y-:.■■■■■" ;'-"1"'."■■.-L-'-- ■"i"-

:. ■ ■■.■:.. :-':>

6.6

Software Operation

In the next tables, they are shown detailed flowchart of LCD display.
(1) MONITOR MODE

In monitor mode operation status of pump can be identified. If key DISPLAY is pushed in menu
mode, the LCD changes into monitor mode. The LCD changes automatically into monitor mode
after start or stop operation.
Mode

Operation and LCD Display

Description of Display

MONITOR 1

^Operation Mode

(Note 1)

OPERATION REMOTE
4*IMtiMtv5tR ifrTftt$m It IISJl

OPERATION REMOTE

V USER MEM o

(Note 3)

#####USER MEMO######
A i

MONITOR 2

USER ME

/^(Note 3)

#####USER MEM0##(r###
STOP

ROT=

STOP

R0I=

Pump Operation_/

I i

(ft

Ljlotor

Rotational
Speed (Note 4)

Mode (Note 2)

MONITOR 3

STOP

ROT=

UB=

MC= 0. OA

Pump Operation
Mode (Note 2) "^

STOP

ROT^ OS

KC- 0 0A

UB-

Motor Current _/'

Rotational
Speed (Note 4)

^/
OS

t_Urtb stance

Mort tor Value

MONITOR 4

SXI=

0% SYI=

SX2=

0% SY2=

Magnetic Bearing
Sen$or Input Value

/ X1.Y2.X2.Y2Axis

i k

SX1=

S1U

SX2=

SY2=

i r

MONITOR 5

SZ=
UB1=

Magnetic Bearing

0% UB2=

Sensorlnput

—.

Vatue Z Axis ^

Sh OS
UBI=

OS US2=

'^_ Unbabnce Monitor
Value 1.2 Axis

First, Monitor 2 display following to initial display after power switch turning on.
(Note 1) Operation Mode
LCD Display

Operation

LOCAL

Control by

manual switch operation on the front panel

REMOTE

Control by

remote-control signal operation

RS-232C

Control by

RS-232C communication

RS-485

Control by

RS-485 communication

Refer to Section 6.2 for details on changing the operation mode.

Power Supply Unit
INSTRUCTION MANUAL

SECTIONS

OPERATION

(Note 2) Pump Operation Mode
LCD Display
NORMAL

ACC.

Motor acceleration

BRAKE

Motor brake deceleration

STOP

Motor stop

IDLE

Free operation

E-STOP

Error occurs (stop)

E-BRAKE

Error occurs (motor deceleration)
Error occurs (free operation = motor stop)

E-IDLE

Pump Operation
Normal rotation

(Note 3) Any character can be entered in the USER MEMO from the menu mode "SETTINGS/
USER MEMO INPUT". Use it for displaying the chambers connected to the pump etc.
(Note 4) The Motor Rotational Speed display can be selected from %, rpm and rps in the menu
mode "SETTINGS/ ROT.SPEED/ DISPLAY".

An asterisk (*) is displayed after the speed display during variable speed operation.

263-13228

6.6

Software Operation

(2) ALARM MODE

Alarm mode is a mode to display detected alarm contents and alarm history. If key|DISPLAY|
is pushed in monitor mode, the LCD changes into alarm mode. The LCD changes automatically
changes into alarm mode when an alarm is detected. See Table 7-6 "Table of Alarms" and Table
7-7 "Table of Warnings" about alarm code.

Mode

Operation and LCD Display

Description of Display

ALARM

The currently detected error is displayed. If

LIST

there is more than one error, all the errors

can be displayed using the [T| andF1 keys
ALARM No.1

ALARM
12=PF COUNTER LIMIT

. ALARM Mode

L31,
!=PF COUNTER LIMIT

ALARM
21=THP TEMP/KB CABLE

ALARM Code-/

ALARM Contents

ALARM No.2
ALARM

13=ltR0NG TKP MODEL

ALARM No.3

ALARM

HISTORY

01=2003/12/31 23:59

02=2003/12/31 23:59

15=P0WER FAILURE

21=TKP TEBP/HB CABLE

Maximum ALARM No.99
HISTORY Nor

ALARM Mode

i
01=2003/12/31 23:59
15=P0*ER FAILURE

ALARM Code-^

-v

*- ALARM Contents

Dates and times are recorded as Green
wich Mean Time (GMT).
ALARM
HISTORY
DETAILS

NORMAL

R0T=10O\

KC=99.9A

a,"

SY1=100\

The pump's operating status when an error
is detected is displayed.
Motor
_ Rotational

Pump Opei
Mode

/"Speed
ROT=1OO\

SX2=100\

UB-1OO\

Q,,

-Unbalance
Monitor Value

Motor Current

Magnetic Bearing
Sensor Input Value
X1,Y2,X2.Y2Axis

UB2=100\

a,.
RUN TIHE=9999HR

at 2003/12/31 23:59

SY1=100*

SXZ=100%

SY2=1001i

- Magnetic Bearing
Sensormput Value Z Axis

SZ=10tH
LAST HAIHT. =99999HR

from 2003/1/1 00:00

UBUIOW UB2=IOOib

'\_ Unbalance Monitor
Value 1.2 Axis

/— Run time

RUN TIME=99999HR
at 2003/12/31 23 59

1-Update TIME
/—Maintenance

call time

LAST MAINT.=99999HR
from 2003/1/1 00:00

'^- Reset TIME

Power Supply Unit
INSTRUCTION MANUAL

SECTIONS

OPERATION

(3) MENU MODE/TIMER
Mode

Operation and LCD Display

Description of Display

/- MENU MODE

tiki

KNU

INTEGRA! IKS llttR

INTEGRAING TIBER

TIMER MODE TITLE

INTEGRA

The pump's integrated run time is
displayed.

TING

TIMER

INTEGRATING TIMER

at 2003/12/31 23 59

RUN TIME=99999HR

INTEGRATING TIKER
RUN TIK£=9999SHR

<- RUN TIME
/-Update TIME

^2(»37i2/3r23TSri

The pump's integrated run time is
displayed. Reset is possible at the same
time as, for example, maintenance.
INIECRAIIIIC IIKER

LAS! MINI =9999SHR
- Maintonancu call lime

INTEGRATING TIKER
UST HAINT =9S999HH

,-UpdalaTIME

at 2003/12/31 2359

froa2003/12/31 23:59

at 2003/12/31 23 59
trcrfOOJ'12/31 23S9

^-Resel TIME
Select Reset Timer
LAST HAINT. =99999HR

LAST MAiril =M999M)
RESEI 1IUR=HO

RESET TIKER=H0

Press Uw [71 o> ~

koy to select between

NO or YES

If the integrated value for the
maintenance call time exceeds the set
value, alarm code 99 (maintenance call
warning) occurs. Setting the set value to
0 disables this function.
IHIEGRA1IK0 TICK

INTEGRATING TIKER
HAINT. CALL=99999HR

HAINT. CALl=29999HR

MAIN! CAU.=88S99Wt

\_ Settings of Matntonanco

(99999HR)

call lime

Tho value is changed

using IheHandfJb
keys.

KAINT CALL-99999KR

A cursor moves to the right when pushes
SELECT] key.

The number of power failure touch-downs
is counted. If this number exceeds 250,
alarm code 12 (number of power failure
touch-downs alarm) occurs. Refer to
Table 7-4 for the appropriate remedy.
INIECRAIINC IIKER
POHJ* r»ILURE=999

SET

INTEGRATING TIKER

at 2003/12/31 23 59

POSER FA I LURE=999

frco2003/12/31 23 59

V Numbor of POWER
FAILURE

Update TIME

2d63/l2/3l 23S9

LZI

fr«20O3/l2/3t 23 59

^-Rosol TIME
POSER FA1LURE=999
RESET C0UNTER=K0

Select Reset Counter
POOR rAILUR$=»9

RESET COUNIERMiO

'\_Prass thot*] or Q

key to sotect botween
NO or YES

263-13228

.::■:■: ^;-n;.-

■wm

6.6

Software Operation

The number of alarms that occur for the
magnetic bearing system at speeds
exceeding 80% of the rated speed is
counted. If this number exceeds 10,
INIEFRAIIIffi TIBER

KB ALARH=999

at 2003-12 31 23 59
frjMULTIDRaP=OFF

MALTIDROP=OFF
(OFF)

(OFF)

Previous Setting

Set ON to select the multi-drop mode.
Network ID setting (Note 1)

1
1/

RS485

METKORK ID=0l

Press the LJ orQ
key to select a value
between 01 and 32.

NETWORK ID=01

NETWORK 10=01

(01)

\— Previous Setting

Setting required in multi-drop mode.

Event Transmission Settings (Note 1)
Press the [3 or Q
key to select between
ON or OFF.

EVENT SENDING
(ON)
>— Previous Setting

RS48S
EVENT SEKOING=ON

EVENT SENDIHG=ON
(ON)

The event sending function is enabled
or disabled.
If set to ON, an event command is sent
from the power supply unit when an
event occurs.

(Note 1) See APPENDIX-A "COMMUNICATIONS" for details.
Power Supply Unit

INSTRUCTION MANUAL

SECTION 6

Mode

OPERATION

Operation and LCD Display

Description of Display

ROTATIONAL
SPEED
SETTINGS

Speed display setting

SETTINGS

ROT SPEED

1
j,

ROT. SPEED

Press the Q or □

key to select between
%, rpm. or rps.

DISPLAY^

DISPLAYS

)

DISPUTE

"-Previous Setting

The format of the motor speed
display in the pump monitor mode is
changed.
Speed setting
Press the Li) or LJ key

to select between normal
speed or low speed.

SPEED=NORHAL
(NORUAL
ROT. SPEED
SPEED=NOfUJAL

L Previous Setting

SPEED40RMAI
(NORMAL

)

The pump rotates at the rated
speed when NORMAL is selected.

The pump rotates at the speed set
with the low speed setting when

LOW SPEED is selected. See
Section 6.5 "Variable Speed
Operation" for details.
Low speed setting
r Press the H or QJ key
/ to select a value

I between 50 and 100.
LOW SP=100. to
(100.0%)

Previous Setting
ROI. SPEED
LOB SP=1OO

LOS SP=1OO. 0\
(100 OS)

When the speed setting is set to
LOW speed or the remote-control
signal designates low speed, the
pump continues operation at the
speed set by the low speed setting.

263-13228

I
6.6

Mode

Operation and LCD Display

Description of Display

REMOTECONTROL
SIGNAL

Software Operation

"ALARM" signal setting of remotecontrol signal (Note 2)

SETTINGS

Press the [*} or Q) key

REMOTE SIGNAL KOBE

to select between
EI-O3 or SEMI E74.

SETTINGS

ALARH=EI-O3
REMOTE SIGNAL KODE
ALARB=£I-O3

(El-03)

ALARB=£l-03

—t Previous Setting

(El-03)

"REMOTE" signal setting nf remotecontrol signal (Note 2)
Press the Q) oO

to select between
EI-03 or SEMI E74.
REMOTE SIGNAL MODE
REK0TE=EI-03

REK0TE=EI-03

key

REMOTER I-03

(El-03)

(EI-03)

—h

"-Previous Setting

"STOP" signal setting of remntftcontrol signal (Note 2)
Press the j*\ orP) key

REKOTE SIGNAL KODE

ST0P=REKOTE ONLY

to select between remote
only or remote & RSXXX.

STOP=BEEOTE ONLY
(REKOTE ONLY

)

STOP=REBOTE ONLY
(RBI
(REMOTE ONLY)
Previous Setting

WARNING
OUTPUT
SETTINGS

Press the F+]orH

SETTINGS

DARNING DISPLAYS

(Note 1)

key to select between _,

ON or OFF.

DARNING DISPLAYED

(ON)
HARMING DISPLAYS
(ON)

f
Previous Setting —I

The setting changes the operation
when warnings of alarm codes 86 to
94 (See Table 7-7 "Table of

Warnings") occur, as follows:
ON: Buzzer ON, ALARM LED flashes,
Error event sent to RS-232C and
RS-485, The remote-control
connector "WARNING" signal turn
ON
OFF: Buzzer OFF, ALARM LED OFF
No error event sent to RS- 232C

and RS-485, The remote- control
connector "WARNING" signal turn
OFF

DEFAULT

SETTINGS

DEFAULT SETTINGS

DEFAULT SETTINGS
RESET SETTINGS=NO

Press the [+] or Q]

key to select between
NO or YES.

DEFAULI SETTINGS
RESET SETTIHGS-HO

■4/

Select YES and press the ISETl key
to return all the above items to their
default settings. (Note 3)

Power Supply Unit
INSTRUCTION MANUAL

SECTION 6

OPERATION

(Note 1) The warning output setting function is installed in some custom-specification

instruments; it is not available in all instruments. Modifications are required to install this
function in an instrument that does not incorporate it. Consult your Shimadzu representative
for details.

(Note 2) Remote-control signal settings mode
Signals

Description

ALARM

alarm occurrence

Power OFF and no failure

open

SEMI E74

Power OFF and alarm occurrence

open

No failure

open

(11M13)

(12M13)

EI-03

warning occurrence

open

•1

Power OFF and no failure

open

SEMI E74

Power OFF and warning occurrence

open

No failure

open

EI-03

REMOTE" signal is OFF in power failure regeneration braking
even if remote-controlled operation is available.

SEMI E74

"REMOTE" signal is always ON when remote-controlled operation

STOP

(21)-(22)

open

EI-03

WARNING

REMOTE

Pin No.
(20M22)

is available.

REMOTE

"STOP" signal ((16)-(14) open) is effective for only the time when

ONLY

remote-controlled operation is available.

REMOTE
&RS-

"STOP" signal ((16)-(14) open) is effective in operation by RS232C or RS-485 set it in the cases that wants to use hardware

XXX

inter rock.

*1 When set to EI-03, behavior of remote-control signals is the same as SHIMADZU Turbo
Molecular Pump power supply "EI-03MD" series.

*2 When set to SEMI E74, behavior of remote-control signals conform to SEMI E74 standard
"Specification for vacuum Pump Interface-Turbomolecular Pumps"
Refer to the same standard about the shape of connectors and the pin configuration.
(Note 3) default parameters
Function

default settings

User memo

SHIMADZU EI-DxxO3M

RS-232C

BAUD RATE = 9600bps
BAUD RATE = 9600bps

RS-485

MULTI DROP = OFF
NETWORK ID = 01

Variable speed

DISPLAY = %
SPEED = NORMAL
LOWSP= 100%
ALARM = EI-03

Remote-control signal

REMOTE = EI-03
STOP = REMOTE ONLY

Warning output setting

WARNING DISPLAY = ON

263-13228

6.6

Software Operation

(5) MENU MODE/SELF TEST
Mode

Operation and LCD Display

SELF

TEST

Description of Display
Select YES and press the|SETj key to

MENU
SELF TEST

execute self-diagnosis of the magnetic
bearing sensor. If an abnormality is
discovered by self-diagnosis, alarm codes
81 to 85 occur. Refer to Table 7-5 for the

SELF TEST

SENSOR CHECK

appropriate remedy. This function can be
used only when the pump is stopped.
SENSOR CHECK
CHECK :

SENSOR CHECK
CHECK SENSOR=NO

Press the Q or Qj]
key to select between

NO or YES.

Power Supply Unit

INSTRUCTION MANUAL

SECTION 6

OPERATION

6.7 Remote-Control Connector
6.7.1 Specifications
The controller is provided with remote-

control connector for connection with
remote operation, alarm signals, etc. Use

lip

svfi

this connector and a cable with shield as
necessary. The shield of the cable should

INSIDE OF POWER UNIT

be connect to case of Remote-connector.
(See Figs. 6-9, 6-10, 6-11 and Tables 6-2,

1.2k

6-3) For remote-controlled operation, shift
IN

the REMOTE/LOCAL selection switch (Fig.

A CONTACT

2-3 (15)) to REMOTE mode in advance.Fig.
6-9 Remote-Control Connector
Make contact with the
connector housing

Grip the cable shield\

with the clamp

Fia. 6-8

Table 6-2
Connection
method

Remote-Control Circuit

Remote-Control Connector

Start/Stop Accordina to Remote-Control Sianals

By momentary type START/

STOP switch

By alternate type switch

Wiring
connection

Pump start by shortStarting

circuiting (15) and (14).

Pump stop by opening (16)
and (14).

Electric
capacity
Input rating

Pump start, with the contact close or photo transistor
ON ((16) to (14) short-circuit)
Pump stop, with the contact open or photo transistor
OFF ((16) to (14) open)

[Contact] : It is connected to +12V circuit and subject to stable open-close of DC 5 V, 1 mA.
Voltage...30VDC or more, Current... 10mA or more
[Photo transistor ] : Select a photo transistor with a collector-emitter voltage limit of 30VDC
and an on-state collector current of 10mA or more.

Direct forward current 50mA; DC reverse voltage 5V

263-13228

;.',■: ■■;-:..':'V.1 s^ ■-■■■'.■::■•" ■■■■■■: "'i.''6.7
Table 6-3
Classifi

Signals

cation

Remote-Control Signals /Default Settings!
Pin No.

(15)

START

(16)

(33)

ROTATION

Contact input

Variable Speed Operation on GND and

During rotation;

(4),

(29) - (30): open — close (make contact)

(30)
(25),

(4 ) - (30): close —► open (break contact)

NORMAL

During normal rotation;

(2),

(25) - (26): open — close (make contact)

(26)
(23),

(2 ) - (26): close — open (break contact)

(1).

(23) - (24): open — close (make contact)

ACCELERATION

During acceleration;

(24)
(27),

(1 ) - (24): close — open (break contact)

(3),

(27) - (28): open — close (make contact)

BRAKE

During deceleration;

Contact output

(28)

( 3 ) - (28): close — open (break contact)

Contact capacity

(31),
(5),

Remote-controlled operation is available;

(resistance load)

(31) - (32): open — close (make contact)

(32)

( 5 ) - (32): close — open (break contact)
(Note 2)

(21),

Against alarm;

(20),
(22)
(12)

WARNING
(Note 4)

Resetting operation on GND an short-

(14)
(29),

(Note 4)

Stoppipp operation on GND and circuit

short-circuiting

GND

ALARM

Starting operation on GND and short-

circuiting

LOW SPEED

REMOTE

Electric spec.

opening (Note 1) (Note 2)

(17)

RESET

Outputs

Operation

circuiting (Note 1)

STOP

Inputs

Remote-Control Connector

(11)
(13)

30VDC 1A

(21) - (22): open — close (make contact)
(20) - (22): close — open (break contact)
(Note 2)
Against warning;

(12) - (13): open — close (make contact)

(11) - (13): close — open (break contact)
(Note 2)

(Note 1) "STOP" signal is prior to "START" signal.

(Note 2) It is possible to change movement by remote-control signal settings of settings mode.
(See Section 6.6 "Software Operation" (4).)

(Note 3) Don't connect any pins other than specified above.

(Note 4) See Table 7-6 "Table of Alarms" and Table 7-6 "Table of Alarms" about alarm and
warning.

(Note 5) One Reset signal is input each time the contacts close. Repeatedly short and open
the contacts to input multiple Reset signals. See section 7.5.3 for details about the
error-reset procedure.

(Note 6) Approximately 6 seconds is required for the remote control signal to turn ON after the
POWER switch is turned ON.

Power Supply Unit
INSTRUCTION MANUAL

[ ..' ...'..• '■'../ ' ■ ■: .;■■./■•■ '. .. ■'■■-■ \' ;f-£ _.'!••_.■ ^'-;; ;'■■'■'■':
SECTION 6

:■

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'• ■'.". ■ .]

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OPERATION

Fig. 6-9

Arrangement of Remote-Control Connector Pins

(The power supply unit rear panel attachment connectors, as viewed from the front)

6.7.2 Compatibility with Previous Models

6.7.2.1 Replacing the EI-xxO3M/MD Power Supply Unit

CAUTION
The transistor output has been discontinued. The pins that were used for that output are now
assigned to different functions.lf wires were connected to these pins with previous models, then
simply making the connection as it is could result in a malfunction on the system controller end.
Therefore, please revise the wiring.

To avoid the risk of fire, please remove wiring, if wiring of power supply for the transistor output
is connected to Pin No.1 and 2 of remote-control connector.

Replacing EI-xxO3M/MD Power Supply Units As-ls (EI-03 Compatible Mode)
(1) Connectors

The shape and pin count of connectors are mutually compatible and can be utilized as-is.
(2) Pin Configuration

It is compatible with EI-xxO3M/MD units, except for the transistor output. (See Table 6-4)
(3) Signal Activity
It is compatible with EI-xxO3M/MD units.

When using it, changing into SEMI E74 Standard Mode

Change the "ALARM" signal and "REMOTE" signal activation settings from EI-03 to SEMI E74,
in accordance with the "Remote-Control Signal Settings" instructions included in the (4) Menu
Mode table of Section 6.6 "Software Operation".
(1) Connectors

The shape and pin count of connectors are mutually compatible and can be utilized as-is.
(2) Pin Configuration

The "ALARM" signal pin assignments ("make contact" or "break contact") are the reverse of
EI-xxO3M/MD units. If necessary, change the wiring connections.

(3) Signal Activity
The "ALARM" signal and "REMOTE" signal activity differs from EI-xxO3M/MD units.

263-13228

nmkwtwm

6.7

Power Supply

ALARM Signal

Unit
EI-xxO3M/MD
EI-DxxO3M

SEMI E74

Settings

Remote-Control Connector

REMOTE Signal

When the power supply is turned off, the

Remote signal is forcibly off during

ALARM signal is off.

regenerative braking.

When the power supply is turned off, the

Remote signal during regenerative

ALARM signal is on.

braking depends on the control mode.

Table 6-4

Pin Configuration Comparison Chart /Default Settinas)
Kin numbers

Signals

Signal Type
INPUT

ti-uxxuawi

EI-xxO3M/MD

START

STOP

RESET

0UTPUT1 ROTATION
(Relay Out
put)
NORMAL

Variable rpm input added

29 : Make contact

Same pin number, same function
Same pin number, same function

30 : Common

30 : Common
4

25
26

ACCELERATION

23
24

BRAKE

ALARM

Make contact 23 : Make contact Same pin number, same function
24 : Common
1 : Break contact "Break contact" added

Make contact 27 : Make contact Same pin number, same function
28 Common
3 : Break contact 'Break contact" added

Make contact 21
Common
22
Break contact 20

11
i O

31 : Make contact 31
32 : Common
32

Make contact Same pin number, same function
Common
Break contact
Break contact Added function
Common
Make contact
Make contact Same pin number, same function
Common

5 : Break contact
OUTPUT2
(Transistor
Output)

MOTOR

MAG.BEARING
POWER FAILURE

"Break contact" added

Common

WARNING

: Break contact

Make contact 25 : Make contact Same pin number, same function
Common
26 : Common
2 ; Break contact
"Break contact" added

REMOTE

Same pin number, same function

LOW SPEED
GND(COMMON)

Break contact" added

Removed function
■l-Dxx03M units have a pin assigned

o the "Break contact" output terminal

PUMP TEMP.

of OUTPUT1

CONT. TEMP.

(If wiring is connected to the pin for
EI-xxO3M/MD units and is used with
out modification, a malfunction could
occur on the system controller side,
o please remove it.)

V(+)

(Notel)

COM(-)

(Notel)

Compatibility

(EI-03Compatible
Mode)

(Note 1) To avoid the risk of fire, please remove wiring, if wiring of power supply for the
transistor output is connected to the pin.

Power Supply Unit
INSTRUCTION MANUAL

:_^....

_..._^_

.^.^..^^..^_^.^^

..^.^....^

:.fc-y.y*C--^'
SECTION 6

OPERATION

6.7.2.2 Replacing EI-xxO3MZ Power Supply Units
If using the remote control signal for previous EI-xxO3MZ power supply units (where "xx" is a
number that indicates the applicable pump type), then the following checks and changes to
settings are necessary when replacing the unit with an EI-DxxO3M model.

The shape and pin count are both different. (See Figure 6-12)
(2) Pin Configuration
Different. (See Table 6-5)
(3) Signal Activity

Once the settings have been changed, it is compatible with SEMI 74 Standard Mode.

m in r« its in 14 !■> 12 ii io y

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ooooooooooooooo oooy

Remote-Control Connector

Arrangement of Remote-Control Connector Pins

(The power supply unit rear panel attachment connectors,
as viewed from the front)
Fia. 6-10

Previous EI-xxO3MZ Model Remote Control Connector and Pin Confiauration

263-13228

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■.',' '.■.-■■- .-,

6.7
Table 6-5

Remote-Control Connector

EI-xxO3MZ vs. EI-DxxO3M Pin Configuration Comparison Chart
-After Changing Settinas /SEMI E74 Standard Mode)
Pin numbers

Singal type

EI-DxxO3M

Signals

EI-xxO3M2

Compatibility

SEMI E74
Standard Mode

START

INPUT

STOP

RESET

LOW SPEED

GND(COMMON)

17 : Make contact

29 : Make contact

19 : Common

30 : Common

18 : Break contact

4 : Break contact

11 : Make contact

25 : Make contact

13 : Common

26 : Common

12 : Break contact

2 : Break contact

8 : Make contact

23 : Make contact

10 : Common

24 : Common

9 : Break contact

14 : Make contact

27 : Make contact

16 : Common

28 : Common

15 : Break contact

3 : Break contact

27 : Make contact

20 : Make contact

ROTATION

NORMAL

ACCELERATION
OUTPUT

(Relay

BRAKE

Output)
ALARM

WARNING

REMOTE

: Break contact

28 : Common

22 : Common

26 : Break contact

21 : Break contact

30 : Make contact

11 : Make contact

31 : Common

13 : Common

29 : Break contact

12 : Break contact

20 : Make contact

31 : Make contact

22 : Common

32 : Common

21 : Break contact

5: Break contact

Same function

Power Supply Unit

INSTRUCTION MANUAL

vs. fci-UxxujM Hin Configuration Compansoi

-After Changing Settinas (SEMI E74 Standard Mode
Pin numbers
Singal type

Signals

EI-DxxO3M

EI-xxO3M2

SEMI E74
Standard Mode

Compatit

w»"jtf?Sw

This page is intentionally left blank.

263-13228

■■■■■.;>!->:::^.:/.^;^;::V- ■,■:

TROUBLESHOOTING
o ©

7.1

Nothing Happens After an Operation is Made

7.2

Power Failures

7.3

Vacuum Pressure Rise

7.4

Abnormal Noise and/or Vibration

7.5

Alarm Detection Capabilities

SECTION 7

TROUBLESHOOTING

7.1 Nothing Happens After an Operation is Made
Table 7-1

PROBLEM

Nothing Happens After an Operation is
POSSIBLE CAUSES

CORRECTIVE ACTION

Power ON/OFF switcr

Electrical power cable not properly

in the ON position but

Properly connect the electrical power cable

connected.

the turbo molecular

Electrical power outside power

pump fails to operate.

Operate within power supply unit's power

supply unit's power range.

range.

Blown fuse (F1, F2)

Replace blown fuse.

POWER switch fails to the off

Replace POWER switch. Consult the

position.

nearest Shimadzu service company.

START switch

REMOTE/LOCAL selection switch

pressed but turbo

in the REMOTE position.

molecular pump does

Set the REMOTE/LOCAL selection switch
in the LOCAL position.

Other causes.

Check the power supply unit's ALARM lamp

not accelerate.

is not ON. If an alarm is indicated, correct
the malfunction and reset the power supply
unit.

Remote "START"

REMOTE/LOCAL selection switch

signal active but the

Set the selection switch in the REMOTE

in LOCAL position.

position.

turbo molecular pump

"STOP" signal active.

does not accelerate.

Deactivate "STOP" signal.

Other problems.

Check the unit's ALARM lamp is not ON. If
an alarm is indicated, correct the

malfunction and reset the power supply unit.
STOP switch pressed

REMOTE/LOCAL selection switch

but the turbo

Set the selection switch in the LOCAL

is in the REMOTE position.

position.

molecular pump does

not decelerate.
Remote "STOP"

REMOTE/LOCAL selection switch

signal activated but

Set the selection switch in the REMOTE

is in the LOCAL position.

position.

the turbo molecular
pump does not

decelerate.

263-13228

7.3

Vacuum Pressure Rise

7.3 Vacuum Pressure Rise
A rapid rise of vacuum pressure in the turbo molecular pump causes the internal motor of the
turbo molecular pump to start braking and the ALARM lamp (Fig. 2-3 (14)) lights.

7.4 Abnormal Noise and/or Vibration
Should the turbo molecular pump ever generate abnormal noise and/or vibration, the turbo
molecular pump operation is to be stopped immediately.

But there is possible that a race of touch-down bearing (Fig. 3-1 (9)) may make sounds for
seconds when the pump internal pressure gets back to atmospheric pressure using air (or nonactivity gas). This phenomena is not abnormal and make no damage to the pump, because the
air whirlpool sometimes occurs and then makes the touch-down bearing rotate slightly.

iS^

CAUTION
When turning the POWER switch for the power supply unit on or off, a "clunk" sound may be
heard from inside the pump. This sound is from the rotor inside the pump being levitated or delevitated. This is normal.

7.5 Alarm Detection Capabilities
The fault detection functions shown in Table 7-6 "Table of Alarms" and Table 7-7 "Table of
Warnings" are incorporated for protection in the event of a problem with the turbo molecular
pump or power supply unit.

When an error is detected, check the ALARM lamp (Fig. 2-3 (14)) and the alarm mode display
on the front panel (See Section 6.6 "Software Operation" (2)) and refer to Tables 7-4 and 7-5 for
the appropriate remedy.

7.5.1

Movement in Alarm Detection Capabilities (ALARM)

1. ALARM lamp (Fig. 2-1 (14)) lights.

2. Alarm description is displayed on LCD.
3. The remote-control connector "ALARM" signal turn ON.
4. The buzzer sounds.

Power Supply Unit

INSTRUCTION MANUAL

SECTION 7

TROUBLESHOOTING

5. The pump start the protective operations shown in Table 7-6 "Table of Alarms."
6. The detection error is recorded in the error log.

7.5.2 Movement in Alarm Detection Capabilities (WARNING)
The warning output setting in the menu mode "SETTINGS /WARNING DISPLAY" item on the
LCD changes the operation when a warning occurs.

1. ALARM lamp (Fig. 2-1 (14)) flashes.

2. Warning description is displayed on LCD.

3. The remote-control connector "WARNING" signal turn ON.
4. The buzzer sounds.

5. Pump operation continues.
6. The detection error is recorded in the error log.

[When warnings of alarm codes 86 to 94 do not occur.] (See Table 7-7 "Table of Warnings")
The operation is the same as the warning output setting is ON.

[When warnings of alarm codes 86 to 94 occur.] (See Table 7-7 "Table of Warnings")
(1. ALARM lamp (Fig. 2-1 (14)) does not flash.)
2. Warning description is displayed on LCD.

(3. The remote-control connector "WARNING" signal do not turn ON.)
(4. The buzzer does not sound.)
5. Pump operation continues.

6. The detection error is recorded in the error log.

7.5.3 Reset Procedure
1. The buzzer stops after the first reset operation.

2. Refer to the Troubleshooting information and eliminate the cause of the problem.
3. Conduct the reset operation again.

4. (ALARM) If the problem has been eliminated, the ALARM lamp (Fig. 2-1 (14)) goes out, the
"ALARM" remote-control signals (see Table 6-3) turn OFF after an alarm was given, the
pump rotor decelerates rotational speed.

(WARNING) When the problem is eliminated after a warning occurred, pump operation
continues.

5. If the problem was not completely eliminated, the buzzer sounds again and the error is
detected.

■)K When the buzzer does not sound and if the warning output setting is OFF in the menu mode
SETTINGS/WARNING DISPLAY item on the LCD, the first reset operation after a warning
occurs is equivalent to the third reset operation.

263-13228

■■.■■■ ■'■'':--:;:-%;'^.v;.Vvi!-;A

7m«Vffl^i

7.5
Table 7-4
LCD Display

Alarm Detection Capabilities

If the ALARM Lamp Liahts

Possible Cause

Remedy

The touch-down bearing may have
deteriorated. Consult Shimadzu or an
approved service company regarding
replacement of the touch-down bearing.

11=TD COUNTER

The number of high speed

LIMIT

or power failure touch

12=PF COUNTER

downs has exceeded the

LIMIT

prescribed number.

Secti
on

Check the combination of the pump and
power supply models.
2

13=WR0NGTMP
MODEL

The models of pump and
power supply do not
match.

Check the connection of the magnetic
bearing cable. Also check that the

5.3

connector pins are not bent. Turn off the
power supply before checking the

magnetic bearing cable. Never disconnect

the cable while the power is on.

Power failure or reduction
14=AC LOW
3

VOLTAGE

in the power supply
voltage.

Wait for the power to be restored. An
unfamiliar sound will be heard a few
minutes after a power failure. This sound
occurs when the rotor contacts the
protective bearing as magnetic levitation
cannot be maintained. This is not an

15=POWER FAILURE

abnormal sound.
POWER switch was
turned off by mistake.

Wait about 5 seconds before turning the
POWER switch back on. Re-acceleration
is possible after resetting and start-up.

Check that the outlet and inlet pressures
are below the specified maximum
4

16=TMP:OVERLOAD

Drop in rotation speed
during rotation at rated

Check for leakage.

speed (increased internal

Check that too much purge gas is not

pump pressure).

flowing.

pressures.

Check that process gas flow rate is not too
high.

Power Supply Unit
INSTRUCTION MANUAL

SECTION 7

TROUBLESHOOTING

LCD Display

Possible Cause

Remedy

Sect
ion

Check that the ambient temperature
around the pump is within the specified
range.

High pump unit
temperature.

For the air-cooled models, check that
the cooling fan is operating and cooling
is not hindered by peripheral objects.
For water-cooled models, check that the
temperature and flow rate of the cooling

water are within the specified ranges.

21=TMP TEMP/MB CABLE

Check that no load in excess of the
specified range is continuously applied
to the pump.

Magnetic bearing
cable is not
connected
correctly.

Check the connection of the magnetic
bearing cable. Also check that the
connector pins are not bent. Turn off the

5.3

power supply before checking the
magnetic bearing cable. Never

disconnect the cable while the power is
on.

22=TMP:SENSOR ERROR
46=MOTOR OVERSPEED
47=EI:R-SPEED ERROR

23=EI:MOTOR OVERCURR
34=EI:INV. OVERCURR

31=EI:BR OVERTEMP
32=EI:DC-DC OVERTEMP

Rotation detection
signal from the
motor cannot be

detected correctly.
Overcurrent
supplied to the
motor.

Temperature
increase in the
power supply unit.

Check that equipment causing noise is

5.1

not used around the power supply unit,

5.2

pump unit, motor cable, or magnetic
bearing cable.

5.3

Check the motor cable and magnetic
bearing cable.
(Check for connection and wiring likely
to cause disconnection or short circuit.)

Check that the ambient temperature

4.1

around the power supply unit is within
the specified range.

Check the ventilation of the power

5.1

supply unit.

33=EI:FAN ERROR

Fan stopped.

Check that the fan on the power supply
unit rear panel is operating.
Remove any object obstructing its
operation.

35=EI:INV. OVERVOLT
10

36=EI:DC-DC LOW VOLT

Defective circuit in

37=EI:DC-DC OVERCURR
38=EI:DC-DC OVERVOLT
45=EI:BRAKE OVERTIME

the power supply
unit.

43=EI:PARAM ERROR

the power supply

Turn the power on again after the pump
stops. The power supply unit must be

unit.

repaired if the problem occurs again.

Defective circuit in
11

263-13228

Turn the power on again after the pump
stops. The power supply unit must be
repaired if the problem occurs again.

5.1

7.5

LCD Display

Possible Cause

Alarm Detection Capabilities

Remedy

Check that the ambient temperature

Sect

ion
4.1

around the power supply unit is within
12

44=EI:CPU ERROR

Abnormal operation

the specified range.

66=MB:DSP ERROR

of circuit in the

67=MB:DSP OVERFLOW

power supply unit.

Check that equipment causing noise is
not used around the power supply unit,
pump unit, motor cable, or magnetic

5.1

5.2
5.3

bearing cable.

48=EI:ACCEL OVERTIME

Rotation speed

Check that the outlet and inlet pressures
are not too high.

does not increase

Check for leakage.

at start-up.

6.2

Check that too much purge gas is not
flowing.

Adhesion of reaction products or

49=TMP:CAN NOT START

Pump does not
rotate.

damage to the protective bearing is the
possible cause. Remove the pump from
the unit and check that the rotor blades
rotate smoothly at the inlet. An overhaul

is required if blades do not rotate
smoothly.

51=MB:VIBRATION2X1

52=MB:VIBRATION2
53=MB:VIBRATION2
54=MB:VIBRATION2
55=MB:VIBRATION2

Y1
X2
Y2
Z

56=MB:VIBRATION1 X1

If the shock or vibrations are transient,
re-acceleration is possible. If the shock
Strong external
shock or vibrations.

57=MB:VIBRATION1 Y1

58=MB:VIBRATION1 X2
59=MB:VIBRATION1 Y2
60=MB:VIBRATION1 Z

pump mounting method.

Magnetic bearing
cable is not

61=MB:SENSOR ERR. X1

connected

62=MB:SENSOR ERR. Y1

correctly.

63=MB:SENSOR ERR. X2

64=MB:SENSOR ERR. Y2

65=MB:SENSOR ERR. Z

68=MB:BALANCE AXIS1
69=MB:BALANCE AXIS2

or vibrations occur frequently, stop the
pump and remove the source of the
shock or vibrations; or re-examine the

Check the connection of the magnetic
bearing cable. Also check that the

5.3

connector pins are not bent. Turn off the

power supply before checking the
magnetic bearing cable. Never

disconnect the cable while the power is
on.

The rotor does not

Remove the pump and check that the

move due to

rotor rotates smoothly. The pump

adhering matter or
a damaged touch

requires an overhaul if the rotor does not
rotate or the resistance to rotation is

down bearing.

large.

Rotor inside the

pump is out of
balance.

Adhesion of reaction products is a
possibility. An overhaul is required.

Power Supply Unit
INSTRUCTION MANUAL

• "™"r~" ---.-_■':'■

■,

■:■.

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-.:■-:
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.....
.... . ■

.. f

SECTION 7

TROUBLESHOOTING
Table 7-5

LCD Display
81=MB:SELFCHECKX1
82=MB-SELFCHECK Y1
1

83=MB:SELFCHECK X2
84=MB:SELFCHECK Y2

85=MB:SELFCHECK Z

If the ALARM LamD Flashes

Possible Cause
Rattling of the

Deterioration of the protective bearing is

protective bearing

likely. Overhaul as soon as possible to

becomes

avoid damage to the protective bearing

pronounced.

in the event of a power failure etc.

86=MB:VIB. WARN. X1
2

Transient strong

However, if the shock or vibrations occur

88=MB:VIB. WARN. X2

external shock or

frequently, stop the pump and remove

89=MB:VIB. WARN. Y2

vibrations.

the source of the shock or vibrations; or

Rotor inside the

Adhesion of reaction products is a

pump is out of

possibility. An overhaul is

balance.

recommended.

91=MB:BALANCE WARN.1
92=MB:BALANCE WARN.2

93=MB:AIR RASH A

94=MB:AIR RASH B

99=MAINTENANCE TIME

Mimospnsnc

npnptralinn Hisiq

occurred

Create a vacuum system not allowing
atmospheric penetration by re-

examining the operating sequence of
the back pump and valves etc.

Maintenance call

prescribed by the customer, such an

timer has reached

overhaul. The alarm can be cancelled by

the set time.

resetting the maintenance call timer

after implementing necessary works.

When warninas
g of alarm codes 86 to 94 (fSfifi Tah Ifi 7-7 "Tflhlp nf Warninnc'M
g) nrrnr, th

alarm lamp does not flash and the display appears on the LCD only if the warning output
setting is OFF in the menu mode SETTINGSA/VARNING DISPLAY item on the LCD.

263-13228

ion

re-examine the pump mounting method.

Implement maintenance works
5

Sect

Continuous operation is possible.

87=MB:VIB. WARN. Y1

90=MB:VIB. WARN. Z
3

Remedy

6.6

7.5
Table 7-6
Alarm
Code

Alarm Detection Capabilities

Table of Alarms

LCD Display

Cause

11=TD COUNTER LIMIT

down counter exceeded the

Protective Action

Counts of the high speed touch
11

specified number.
Counts of the power failure touch
12

12=PF COUNTER LIMIT

down counter exceeded the
specified number.

Start-up impossible
(detected during power
supply self-diagnostics)

The combination of the pump and

13=WR0NGTMP MODEL

14=AC LOW VOLTAGE

Fall in AC input power voltage.

15=POWER FAILURE

Power failure.

power supply is wrong.

Regenerative braking

After accelerating to 80% of the
16

16=TMP:OVERLOAD

designated speed or low-speed
setting, the speed dropped below

Deceleration

80% due to overloading etc.
Increased pump drive motor
21

21=TMP TEMP/MB CABLE

temperature.

MB cable is not connected.
22

22=TMP:SENSOR ERROR

Pump rotation signal could not be
detected correctly.

23=EI:MOTOR OVERCURR

Overcurrent ran through the motor.

24=TMP PUMP TEMP

Pump Temperature

31=EI:BROVERTEMP

Increased temperature inside power

Free run

supply unit.

(motor stop)

Increased temperature inside power

32=EI:DC-DC OVERTEMP

33=EI:FAN ERROR

34=EI:INV. OVERCURR

35=EI:INV. OVERVOLT

36=EI:DC-DC LOW VOLT

37=EI:DC-DC OVERCURR

38=EI:DC-DC OVERVOLT

43=EI:PARAM ERROR

Stored parameters are not correct.

44=EI:CPU ERROR

Error in the CPU for inverter control.

45=EI:BRAKE OVERTIME

specified time after the stop

supply unit.

Power supply cooling fan has
stopped.
Overcurrent ran through the motor.
Defective circuit in the power
supply.

Defective circuit in the power
supply.

Regenerative braking

Defective circuit in the power
supply.

Defective circuit in the power

Deceleration

supply.

Start-up impossible
(detected during power
supply self-diagnostics)

Pump does not stop within the
operation.

46
47

46=MOTOR OVERSPEED

47=EI:R-SPEED ERROR

Pump rotation speed is too high.

Free run
(motor stop)

Pump rotation speed cannot be
detected.

Power Supply Unit

INSTRUCTION MANUAL

:>;.v^,o:.

■=■

SECTION 7

Alarm
Code

r ..■

. ■; :■

TROUBLESHOOTING

LCD Display

Cause

Protective Action

Pump does not accelerate to
48

48=EI:ACCEL OVERTIME

80% of the designated speed or
low-speed setting within the
specified time after start-up.

49=TMP:CAN NOT START

51=MB:VIBRATION2X1

52=MB:VIBRATION2 Y1

53=MB:VIBRATION2 X2

54=MB:VIBRATION2 Y2

55=MB:VIBRATION2 Z

56=MB:VIBRATION1 X1

57=MB:VIBRATION1 Y1

58=MB:VIBRATION1 X2

59=MB:VIBRATION1 Y2

60=MB:VIBRATION1 Z

61=MB:SENSOR ERR. X1

62=MB:SENSOR ERR. Y1

Pump fails to rotate within 15
seconds after start-up.

Continuous excessive vibration
of the magnetic bearing.

Excessive magnetic bearing
vibration.
Deceleration

Abnormal output signal from the
magnetic bearing sensor.

63=MB:SENSOR ERR. X2

64=MB:SENSOR ERR. Y2

65=MB:SENSOR ERR. Z

66=MB:DSP ERROR

Error in the DSP for magnetic
bearing control.

67=MB:DSP OVERFLOW

Overflow in the magnetic bearing
control calculations.

68=MB:BALANCE AXIS1

Rotor is out of balance.

69=MB:BALANCE AXIS2

263-13228

Z 'j^Jjijilc }^;^dli}i

J^J L^
7.5
Table 7-7

Alarm

Code
81

Alarm Detection Capabilities

Table of Warnings

LCD Display

Causes

Protective Action

Results of magnetic bearing

Operation is possible

81=MB:SELFCHECKX1

sensor self-diagnostics are

(detected during power

abnormal.

supply self-diagnostics).

82=MB:SELFCHECK Y1

83=MB:SELFCHECK X2

84=MB:SELFCHECK Y2

85=MB:SELFCHECK Z

86=MB:VIB. WARN. X1

Vibrations of the magnetic
bearing become temporarily

Operation continued.

excessive.
87

87=MB:VIB. WARN. Y1

88=MB:VIB. WARN. X2

89=MB:VIB. WARN. Y2

90=MB:VIB. WARN. Z

91=MB:BAL WARN. AXIS1

92=MB:BAL. WARN. AXIS2

94=MB:AIR RASH B

99=MAINTENANCE TIME

Rotor is slightly out of balance.
Atmospheric penetration.
Maintenance call timer reaches
its set time.

Power Supply Unit
INSTRUCTION MANUAL

This page is intentionally left blank.

263-13228

■■:-'■■■,':v::v:'r4"I' ■.■;?■ /■■■y,\r.:'■';'. ■: ■■'■'■<

COMMUNICATIONS

A1.
A2.

GENERAL SPECIFICATION
INTERFACE SPECIFICATION

A2.1

RS-232C

A2.2

RS-485

A3. POWER SUPPLY TO COMPUTER CONNECTION
A3.1 Communication Cable Connection

A3.2

Serial Communications Baud Rate Configuration

A3.3

RS-485 Multi-drop Settings

A4. SERIAL COMMUNICATIONS PROTOCOL
A5. TABLE OF COMMANDS
A6. COMMAND DESCRIPTION
A6.1
Operation Mode
A6.2

Operation

A6.3

Run Status

A6.4

Parameters

A6.5

Events

A6.6
A6.7

Timer
History

A6.8

Settings

A6.9

Shared Answer

A7.
A8.

RS-232C COMMANDS / ANSWERS
RELATION OF LOCAL MODE TO REMOTE MODE

A9.

TROUBLESHOOTING

OPERATIONS
A9.1

No Message can Transmit and Receive
A9.2 Sending and Receiving are Done, But Receivable
Messages are Invalid

A9.3

Characters Get Disordered from Time to Time, Then

Resulting in CHECKSUM Error

Appendix A

COMMUNICATIONS

A A1. GENERAL SPECIFICATION
The EI-D03M series power supply units contain serial interfaces conforming to RS-232C and
RS-485 specifications. The following functions are available by connecting a computer with
communication capacity to these interfaces and creating the appropriate software.
The RS-232C and RS-485 interfaces can be used simultaneously, permitting simultaneous
access from two computers. Also, the RS-485 interface permits multi-drop connections, allowing
multiple power supplies to be connected to a single computer.

Checking current operation mode: The serial interfaces allow the user to check the mode
selection switch status (REMOTE/LOCAL). In REMOTE mode, the user can change the
operation mode to RS-232C or RS-485.

Operation: Operations equivalent to the START, STOP, and RESET switches are

available in the RS-232C or RS-485 operation mode. Also, the speed setting can be made
using the set value write function.

Checking turbo molecular pump run status: The serial interfaces allow the user to check
the current turbo molecular pump's running status (Normal rotation, Accelerating,
Decelerating, failure occurrence, etc.).

Reading parameters: The serial interfaces allow the user to read a variety of turbo
molecular pump parameters such as pump rotational speed and motor current which are
stored in the power supply unit.

Receiving events: The power supply unit can transmit status commands for events such
as failure occurrences, rotation start and stop, and attainment of normal rotation speed.

Reading history data: The serial interfaces allow the user to read the alarm history data
displayed in the LCD display history mode.

Reading and writing timer data: The serial interfaces allow the user to read the timer and
counter values displayed in the LCD display timer mode and to reset the counters.

Reading and writing settings data: The serial interfaces allow the user to read and change
settings in the LCD display setting mode.

A-2

263-13228

"-N

A2.

INTERFACE SPECIFICATION

A2. INTERFACE SPECIFICATION
A2.1 RS-232C

A2.1.1 Transmission Specification
Interface

RS-232C

Synchronous system

Asynchronous

1200, 2400, 4800, 9600 and 19.2k bits per second
Transmission rate

(See Section 6.6 "Software Operation" (4) for
settings).
Start bit: 1

Character
configuration

Data bits: 8
Parity: None

Stop bits: 1
Flow control

None

A2.1.2 Communications Connector

Connector

Connector type

Rear panel RS-232C connector

(See Section 2.1 "Power Supply Unit").
D-Sub 9-pin Male, Screw lock size:M2.6
2 : RD (Receive data)
3 : SD (Transmit data)

4 : ER (Data terminal ready)
Pin assignment

5 : SG (Signal ground)
7 : RS (Transmit request)
* Other pins are not connected.

ER and RS are on during the power supply unit's power
up.

A2.1.3 CABLE

(1) Cable Connection

Use the connection cable as shown in Figs. A-1 to connect the power supply and computer.
(Number on figure is pin number of connector.
(2) Cable Length

Connection cables can be extended up to 15 meters, but may be subjects to errors depending
on actual operational environment.

Power Supply Unit
INSTRUCTION MANUAL

A-3

■ ■■?'•".'■■ :■■'.' ''■;'. !'■■ ■■■''•:-' '■'■,■-■' ■■*"■'.'"■ ;: •!. =!■■': ■...:' !.;.'• '
Appendix A

■ '" .'

'*':■' ':''„•'■ :■,.:'.'.'■■ ■-.''!'■''''■'"■■. '■'',: "'''■'"•" j''■'•'\.""•.■•'.

COMMUNICATIONS

Cable wiring connections for 9-pin to 9-pin connector cables
Connector of power supply
CD

1 e

Connector of computer

* 1

\^^^-

—\Y/—

—f

N—

*—I

D-Sub 9pin
Female

Female

Cable wiring connections for 9-pin to 25-pin connector cables
Connector of power supply

Fig. A-1

263-13228

Connector of computer

—^^ l
* sT^^

D-Sub 9pin
Female

A-4

I—?

D-Sub 9pin

D-Sub 25pin Male

Example of RS-232 cable wiring connprtinns

A2.

INTERFACE SPECIFICATION

A2.2 RS-485

A2.2.1 Transmission Specification
Interface

RS-485

Synchronous

Asynchronous

system

Transmission rate

1200, 2400, 4800, 9600 and 19.2k bits per second
(See Section 6.6 "Software Operation" (4) for settings).

Character
configuration

Start bit: 1
Data bits: 8
Parity: None
Stop bits: 1

Flow control

None

Number of power
supply

Multi-drop function OFF: 1

Multi-drop function ON: Max 32 (*1)

*1 : There may be restrictions depending on cable length or cable type. Perform appropriate
checks in the actual operating environment.

A2.2.2 Communications Connector

Connector

Rear panel RS-485 connector
(See Section 2.1 "Power Supply Unit").

Connector type

D-Sub 9-pin Female, Screw lock size:M2.6

Pin assignment

1,6: RxA (Receive data +)
2, 7 : RxB (Receive data -)
3. 8 : TxB (Transmit data -)
4, 9 : TxA (Transmit data +)
* Other pins are not connected.

A2.2.3 CABLE
(1) Cable Connection
a. Multi-drop function OFF
Power Supply Unit 1

COMPUTER

Terminator on
TXA

RXA

RXB

TXB

TXA

XXXX
o6

I20Q
TXB

hdoooc:::::::::::::)oooc

RXB
1200

RXA

Cable connector
D-Sub 9pin Male

Fia. A-2

Example of RS-485 cable wiring connections (Multi-drop function OFF)
Power Supply Unit

INSTRUCTION MANUAL

A-5

-" :" ■'.,;■. "" *
."::■■•

Appendix A

■■ ■■'

H'i-.V:-'.■.■-■:■-.■■':

v ■ .■■

COMMUNICATIONS

b. Multi-drop function ON
Power Supply Unit 1

COMPUTER

Szzxxxx

2:idooo(

TXA

XXX)C

I20O
TXB

RXB

xx>oc

[120R

RXA

Cable connector
D-Sub 9pin Male

Power Supply Unit 2

Cable connector
D-Sub 9pin Male

Power Supply Unit N

i TTSOO
TXB

TXA

°3
O8
O

Fig. A-3

|i20Q
I

—/

Cable connector
D-Sub 9pin Male

Example of RS-485 cable wiring connections IMulti-drop function ON)

(2) Cables used

RS-485 is a differential transmission and use twisted-pair cables in combinations as shown
in Figs. A-2 and A-3.

(3) Connecting the terminator

A terminator (120 Q, 1/4 W min.) is required for connection.
However, connection of the terminator may prevent communications with certain cable

lengths and RS-485 device types. Connect the terminator to determine whether it is required.
(4) Cable Length

Connection cables can be extended up to 1.2 kilometers, but may be subjects to errors
depending on actual operational environment.

A-6

263-13228

A3.

POWER SUPPLY TO COMPUTER CONNECTION

A3. POWER SUPPLY TO COMPUTER CONNECTION
A3.1 Communication Cable Connection
Turn off the power supply unit and the computer to be connected. Connect the RS-232C
connector on the power supply unit front panel or the RS-485 connector on the rear panel (refer

to section 2.2 in this document, "Power Supply Unit") to the communications port of the computer
with a cable, referring to section A2.

A3.2 Serial Communications Baud Rate Configuration
Check with a baud rate of a computer connected to, and set up a baud rate of RS-232C or RS485. See Section 6.6 "Software Operation" (4) for details about the setting method.

A3.3 RS-485 Multi-drop Settings
The RS-485 interface multi-drop function is used to connect multiple power supply units to a
single computer. Turn off the multi-drop function if the RS-485 is used instead of RS-232C to
extend the communication cable length.

When the multi-drop function is turned on, the network ID portion of the sent character strings
(see Section A4) is enabled and the event communication function that notifies the power supply
unit status to the connected computer is disabled.

Set up the RS-485 as described below when using a multi-drop connection.
(1) Turn On the Multi-drop Function

Turn ON the multi-drop function using setting mode/RS485 setting/multi-drop setting on
the LCD display. See Section 6.6 "Software Operation" (4) for details about the setting
method.

(2) Setting the Network ID

The network ID is set using setting mode/RS485 setting/network ID setting on the LCD

display to designate which power supply connected via the multi-drop connection the
computer is sending commands to.

The network ID is set as a number between 01 and 32, and must be unique for each power
supply connected to a computer. See Section 6.6 "Software Operation" (4) for details about
the setting method.

When the RS-485 interface multi-drop function is turned ON, the event sending function

(See A6.5) will be disabled, regardless of the SETTINGS/RS485/EVENT SENDING menu
settings on the LCD display.

Power Supply Unit
INSTRUCTION MANUAL

Appendix A

COMMUNICATIONS

A A4. SERIAL COMMUNICATIONS PROTOCOL
Communications software, between the power supply and customer equipment should be
design according to the following specifications.

A4.1 Basic Message Structure
A basic transmit and receive message begins with the characters "MJ" and ends with a
carriage return code (OdH : xxH means hexadecimal code). (See Table A-1)

The first message to be sent is referred as the COMMAND, while the reply to the command is
referred as the ANSWER.

Table A-1
Character

A4.2

Hex.

Code

Basic structure of Commands and Answers
Description

Command header characters

Number
Of Bytes
2

Network ID

Multi-drop function OFF: 01 fixed

Multi-drop function ON: 01 to 32

Command Characters

Sub-command Characters

Checksum characters

(Calculation result by Section A4.7

enters it.)

Carriage return character

Character to Character Time-out: 0.1 sec.

Delays between characters, in the answer message, longer that 0.1 sec, shall be considered
as a transmission line failure and special considerations should be made to re-send the
message.

A-8

263-13228

■*r ■"•".':;.; =.'■■'"'.' /"' •■"'!>.>■ .■'"■■'■■•" V^:\
A5.

TABLE OF COMMANDS

A5. TABLE OF COMMANDS
Table A-2
Type

Command/
answer

Command
Operation
mode

Answer

Command

Operation
request

Answer

Command

Answer

Run status

Table of Commands
Command

Name

string

Command
Parameters

Event

Answer

Command

Answer

Command
Timer
Answer

string

None

On-line request

None

Off-line request

None

Local

None

Remote

None

RS-232C

None

RS-485

None

START operation

None

STOP operation

None

RESET operation

None

Acceleration start

None

Deceleration start

None

Buzzer off

None

Failure occurred

Failure elimination

None

Operation invalid

None

Run status check

None

Stop

Acceleration

Normal rotation

Deceleration

Failure-Stop

Failure-Free run

Failure-Deceleration

Read alarm list

Send alarm list

aabb

No alarm list

Read parameter

Send parameter

aabbbb

Invalid parameter number

Failure occurred

Rotation start

None

Rotation stop

None

Normal rotation

None

Event confirmation

•4

Read timer

Clear timer

Write timer

06aaaaa

braking

Answer

Sub-command character

Operation mode check

Failure-Regenerative

Command

character

Send timer value

Invalid timer number

aabbbbbccc.cccd

dd...ddd
aa

Power Supply Unit

INSTRUCTION MANUAL

*9
*7

A-11

Appendix A

COMMUNICATIONS

Command
History

Answer

Command

Settings

Answer

Command

Read alarm history

•10

Send alarm history

XXX...XXX

•11

No history data

•10

Read settings

•12

Write settings

aabbbb

•13

Send settings value

aabbbb

*13
*12

Invalid setting number

Read user memo

None

Write user memo

XXX...XXX

*14

Answer

Send user memo

XXX...XXX

*14

Answer

Invalid command

None

aa: Failure alarm codes (hexadecimal) corresponding to the protection system. See

Table 7-6 "Table of Alarms" and Table 7-7 "Table of Warnings" in this manual for details.
*2
aa: Parameter number (decimal). See Table A-3 "Table of Parameters."
*3
aa: Parameter number (decimal). See Table A-3 "Table of Parameters."
bbbb: Parameter value (decimal). See Table A-3 "Table of Parameters."
*4

aa: Confirm event command character string

Send the unchanged command character string of the confirmed event command.
Example: Failure occurred -> "EF"

aa: Alarm list number (decimal)

bb: Alarm code (decimal) stored in the alarm list with the requested number.

See Table 7-6 'Table of Alarms" and Table 7-7 Table of Warnings" in this manual for details.
*7
aa: Timer number (decimal). See Table A-4 "Table of Timers."
*8

06 (fixed): Timer number (decimal). See Table A-4 Table of Timers."

aa: Timer number (decimal). See Table A-4 "Table of Timers."

aaaaa: Set value (decimal). See Table A-4 Table of Timers."

bbbbb: Timer value (decimal). See Table A-4 Table of Timers."
cccccccccc: Time when the timer updated. (YYMMDDHHMM format. Stored as
Greenwich Mean Time)

dddddddddd: Time when the timer reset. (YYMMDDHHMM format. Stored as
Greenwich Mean Time)

*10

aa: History number

*11

xxx...xxx: See Table A-5 "Alarm History Data Format."

*12

aa: Settings number (decimal). See Table A-6 Table of Settings."

*13

aa: Settings number (decimal). See Table A-6 Table of Settings."

*14

xxx...xxx: Any 20-character displayable character string.

bbbb: Set value (decimal). See Table A-6 Table of Settings."

A-12

263-13228

...„,.,........,

A5.
Table A-3
No.
01

Name
Model identification
number

Range

Fixed

Rotational speed

0000 to 5000

Motor current

0000 to 0150

TABLE OF COMMANDS

Table of Parameters
Description and format
Value representing the model.
Example: EI-D3203M -+ 3203
Rotational speed /10

Example: 15000 rpm -» 1500
Motor drive current x 10

Example: 2.3 A -> 0023
Pump temperature

Pump temperature

0000 to 0099

45°C -> 0045

(Valid only for a power supply with a temperature
control function.)

Temperature control function setting status
07

Temperature
control function

0000: Temperature control function on
0000 to 0002

0001: Temperature control function off
0002: Power supply has no temperature control
function

Target value of temperature control setting

Temperature
08

control set

Fixed

temperature

10
11

Rotational speed

{%)
Rotational speed

(%)
Rated rotational
speed

Axis 1 unbalance
monitor amount

Axis 2 unbalance
monitor amount

MB sensor output
X1

MB sensor output
Y1

MB sensor output
X2

MB sensor output
Y2

MB sensor output
Z

Example: 65°C -+ 0065

(Valid only for a power supply with a temperature
control function.)

0000 to 0100

0000 to 1000
0000 to 5000

Percentage of rated rotational speed.
Example: 80% -> 0080
Percentage of rated rotational speed. (x10)
Example: 80% -*■ 0800

Rated rotational speed /10
Example: 21000 rpm -> 2100
Unbalance monitor value of magnetic bearing:

0000 to 100

Axis 1

Example: 3% -> "0003"
Unbalance monitor value of magnetic bearing:
0000 to 0100

Axis 2
Example: 3% ->"0003"

Sensor output monitor value of magnetic bearing:
0000 to 0100

Axis X1

Example: 3% -> "0003"

Sensor output monitor value of magnetic bearing:
0000 to 0100

Axis Y1

Example: 3% -> "0003"
Sensor output monitor value of magnetic bearing:
0000 to 0100

Axis X2

Example: 3% -> "0003"
Sensor output monitor value of magnetic bearing:
0000 to 0100

Axis Y2

0000 to 0100

Sensor output monitor value of magnetic bearing:
AxisZ

Example: 3% -> "0003"

Power Supply Unit
INSTRUCTION MANUAL

A-13

Li-

Appendix A

^^: : ■■v;,r.■■■"■:■ .-.r^ ■.■■■•'.^^rr. ■<■■:::

^-\

COMMUNICATIONS
Table A-4

No.

Name

Range

Table of Timer
Description and format

Read the timer value in the "MENU MODE / INTEGRAL
01

Run time

00000 to 99999

TIMER / RUN TIME" on the LCD display. (Can not be
reset. Reset date is invalid.)

Example: 0 -> 00000, 99999 -> 99999

Read the timer value in the "MENU MODE / INTEGRAL
02

Last maintenance

00000 to 99999

time

TIMER / LAST MAINT." on the LCD display. (Can be
reset)

Example: 0 -> 00000, 99999 -> 99999
Read the timer value in the "MENU MODE / INTEGRAL
03

Power failure touch

00000 to 00999

down count

TIMER / POWER FAILURE" on the LCD display. (Can be
reset)

Example: 0 -> 00000, 999 -> 00999
04

Read the timer value in the "MENU MODE / INTEGRAL

High-speed touch

00000 to 00999

down count

TIMER / MB ALARM" on the LCD display. (Can be reset)
Example: 0 -» 00000, 999 -> 00999
Read the timer value in the "MENU MODE / INTEGRAL

MB warning counter

00000 to 00999

TIMER / MB WARNING" on the LCD display. (Can be
reset)

Example: 0 -> 00000, 999 -> 00999
Read or change the timer value in the "MENU MODE /
06

Maintenance call time

00000 to 99999

INTEGRAL TIMER / MAINT.CALL" on the LCD display.
Example: 0 -» 00000, 99999 -> 99999

Table A-5
Number

Item
1

of bytes

History number

Alarm Historv Data Format

Data
01 to 99

Comments
History number designated by the command.
Time when the failure occurred (stored as

Time

YYMMDDHHMM

Greenwich Mean Time)
YY: year, MM: month, DD: day,
HH: hour, MM: minutes

Alarm number of the failure that occurred. See
3

Alarm number

00 to 99

Table 7-6 "Table of Alarms" and Table 7-7
'Table of Warnings" in this manual for details.

Run status

NS, NA, NN-

Rotational speed

0000 to 0100

Motor current

0000 to 0150

Run status when the failure occurred. Data is
identical to CS command answer.
Speed when the failure occurred. Format is
identical to 09 in Table A-3.
Motor current in the event of a fault. The format
is the same as No.04 in Table A-3.

Pump temperature in the event of a fault. The

format is equivalent to the last two characters of
7

Pump temperature

00 to 99

No.05 in Table A-3.
(Valid only for a power supply with a temperature
control function.)

A-14

Temperature control
function

Temperature control function when the failure
2

00,01,02

occurred. Format is equivalent to last 2
characters of 07 in Table A-3.

263-13228

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gjfiE&a

A5.

Item

Number

of bytes

Data
55,65

(EI-D303MT to El-

Temperature
9

control set

temperature

D1303MT)
55, 65, 75

(EI-D2003MT to

EI-D4203MT)
10

Axis 1 unbalance
monitor amount

Axis 2 unbalance
monitor amount
MB sensor output
X1

MB sensor output
Y1
MB sensor output
X2

MB sensor output
Y2

TABLE OF COMMANDS

Comments

Temperature control set temperature when the
failure occurred. Format is equivalent to last 2
characters of 08 in Table A-3. (Valid only for a
power supply with a temperature control

function.)

Unbalance monitor value of magnetic bearing
4

0000 to 0100

when a fault occurs: Axis 1

Format is the same as No.21 in Table A-3.
Unbalance monitor value of magnetic bearing
4

0000 to 0100

when a fault occurs: Axis 2
Format is the same as No.22 in Table A-3.

Sensor output monitor value of magnetic bearing
4

0000 to 0100

when a fault occurs: Axis X1
Format is the same as No.26 in Table A-3.

Sensor output monitor value of magnetic bearing
4

0000 to 0100

when a fault occurs: Axis Y1

Format is the same as No.27 in Table A-3.
Sensor output monitor value of magnetic bearing
4

0000 to 0100

when a fault occurs: Axis X2

Format is the same as No.28 in Table A-3.
Sensor output monitor value of magnetic bearing
4

0000 to 0100

when a fault occurs: Axis Y2

Format is the same as No.29 in Table A-3.
Sensor output monitor value of magnetic bearing

MB sensor output Z

0000 to 0100

when a fault occurs: Axis Z
Format is the same as No.30 in Table A-3.

Operation time

000000 to 099999

Operation time when a fault occurs.
Format is the same as No.01 in Table A-4.

Power Supply Unit
INSTRUCTION MANUAL

A-15

Appendix A

COMMUNICATIONS
Table A-6

No.

Name

Range

Table of Settinas
Description and format

Read or change the set values in the "MENU / SETTINGS

/ TEMP.CONTORL / TEMP.CONTROL" on the LCD
01

Temperature control
on/off

display.
0000 / 0001

0000: Temperature control function on
0001: Temperature control function off

(Valid only for a power supply with a temperature control
function.)

Read or change the set values in the "MENU / SETTINGS
02

Speed display format

0000 to 0002

/ ROT.SPEED / DISPLAY" on the LCD display.
0000: %, 0001: rpm, 0002: rps

Read or change the set values in the "MENU / SETTINGS
03

Rotational speed

0000 / 0001

/ ROT.SPEED / SPEED" on the LCD display.
0000: NORMAL, 0001: LOW SPEED
Read or change the set values in the "MENU / SETTINGS

Low speed value

0025 to 0100

/ ROT.SPEED / LOW SPEED" on the LCD display.
Example: 25% -» 0025,100% -> 0100

"ALARM" signal
operation setting

Read or change the set values in the "MENU / SETTINGS
0000 / 0001

/ REMOTE SIGNAL MODE / ALARM" on the LCD display.
0000: SEMI-E74, 0001: EI-03

Read or change the set values in the "MENU / SETTINGS
06

"REMOTE" signal
operation setting

0000 / 0001

/ REMOTE SIGNAL MODE / REMOTE" on the LCD
display.

0000: SEMI-E74, 0001: EI-03
07

"STOP" signal
operation setting

Read or change the set values in the "MENU / SETTINGS
0000 / 0001

/ REMOTE SIGNAL MODE / STOP" on the LCD display.
0000: REMOTE ONLY, 0001: REMOTE&RSXXX

Read or change the set values in the "MENU / SETTINGS
08

Low rotation speed

0250 to 1000

/ ROT.SPEED / LOW SPEED" on the LCD display.
Example: 25.0% -> 0250, 99.9% -> 0999

A-16

263-13228

■V*.' ■ f':' '~\

:.-...:

A6.

.. ■■

".-.■

'■'.:?*""-■■

' ' ■' ;■ ■•".\*. ■.,»■■,■ ■-'

COMMAND DESCRIPTION

A6. COMMAND DESCRIPTION
A6.1 Operation Mode
Operation mode check
LS

Enables operation mode verification (LOCAL / REMOTE / RS-232C / RS-485)
Action: Power supply returns an ANSWER showing present operation mode.
ON-LINE request

Commands

If the current operation mode is REMOTE, the operation mode is shifted to RS232C or RS-485. This command is ineffective in other operation modes.
Action: Power supply returns an ANSWER showing the present operation mode.
OFF-LINE request

If the current operation mode is RS-232C or RS-485, the operation mode is shifted
to REMOTE. This command is ineffective in other operation modes.
Action: Power supply returns an ANSWER showing the present operation mode.
Operation mode LOCAL

This answer is returned when the operation mode is LOCAL.

The operation mode can also be shifted to LOCAL mode by the front panel

REMOTE/LOCAL selection switch.
Operation mode REMOTE

This answer is returned when the operation mode is REMOTE.
LR

The operation mode can also be shifted to REMOTE mode by the front panel
REMOTE/LOCAL selection switch or when in the RS-232C or RS-485 operation

Answers

mode by the "OFF-LINE" request command.
Operation mode RS-232C
LC

This answer is returned when the operation mode is RS-232C. The operation mode
is shifted to RS-232C when the "ON-LINE" request command is sending via RS232C in the remote operation mode.
Operation mode RS-485

This answer is returned when the operation mode is RS-485. The operation mode
is shifted to RS-485 when the "ON-LINE" request command is sending via RS-485
in the remote operation mode.

Power Supply Unit
INSTRUCTION MANUAL

A-17

Appendix A

COMMUNICATIONS

A6.2 Operation
START Operation
RT

This command is the equivalent of pressing the front panel START switch.

Action: The turbo molecular pump starts accelerating and sends the "Acceleration
Start" answer.

STOP Operation
RP

Commands

This command is the equivalent of pressing the front panel STOP switch.
Action: The turbo molecular pump starts decelerating and sends the "Deceleration
Start" answer.
RESET Operation

This command is the equivalent of pressing the front panel RESET switch.
RR

Action: This command is effective against failures. This command resets the alarm
buzzer sound and returns the "Buzzer Off" answer. If the buzzer is already off, this
command resets the ALARM. If the cause of the alarm is eliminated after resetting,
the "Failure Elimination" answer will be returned, else the buzzer will sound again
and the "Failure occurrence" Answer is sent back.
Acceleration Start

This answer is returned by the power supply after the acceleration is started on a
START operation.
Deceleration Start

This answer is returned by the power supply after the deceleration is started on a
STOP operation.
Buzzer Off

This answer is returned by the power supply after the buzzer is turned oft on a
RESET operation.
Failure elimination

Answers

This answer is returned by the power supply after the failure cause is removed after
the power supply is reset on a RESET operation.
Failure Occurrence

This answer is returned by the power supply if the failure cause is not removed after
the power supply is reset on a RESET operation. The alarm code of the failure that
has not been eliminated is returned as a 2-character sub-command.
Operation invalid

This answer is returned if the operation is invalid (START operation command sent
RV

during acceleration) or if the operation mode differs from the port that sent the
command (operation mode is RS-485 but operation command was sent from the
RS-232C port).

A-18

263-13228

A6.

COMMAND DESCRIPTION

A6.3 Run Status

Commands

Run Status Check

This command requests the current power supply status.
Stop

This answer is returned when the pump stops. Equivalent to the monitor mode/
NS

STOP run status on the LCD display.

For a normal status, "00" is returned as the sub-command. If a warning has
occurred, the 2-character alarm code is returned as the sub-command.
Acceleration

This answer is returned during pump acceleration. Equivalent to the monitor mode/
NA

ACC. run status on the LCD display.

For a normal status, "00" is returned as the sub-command. If a warning has
occurred, the 2-character alarm code is returned as the sub-command.
Normal rotation

This answer is returned during normal pump rotation. Equivalent to the monitor
NN

mode/NORMAL run status on the LCD display.

For a normal status, "00" is returned as the sub-command. If a warning has
occurred, the 2-character alarm code is returned as the sub-command.
Deceleration

This answer is returned during pump deceleration. Equivalent to the monitor mode/
NB

BRAKE run status on the LCD display.

For a normal status, "00" is returned as the sub-command. If a warning has

Answers

occurred, the 2-character alarm code is returned as the sub-command.
Failure-Stop

This answer is retumed when the pump is stopped after a failure occurs. Equivalent
to the monitor mode/E-STOP run status on the LCD display.

The 2-character alarm code is returned as the sub-command.
Failure-Free run

This answer is returned when the pump is free-running (neither accelerating nor
FF

decelerating) after a failure occurs. Equivalent to the monitor mode/E-IDLE run
status on the LCD display.

The 2-character alarm code is returned as the sub-command.
Failure-Regenerative braking
FR

This answer is returned when the pump is regenerative braking after a failure
occurs. Equivalent to the monitor mode/E-BRAKE run status on the LCD display.
The 2-character alarm code is returned as the sub-command.
Failure-Deceleration

This answer is returned when the pump is decelerating after a failure occurs.
Equivalent to the monitor mode/E-BRAKE run status on the LCD display.
The 2-character alarm code is returned as the sub-command.
Read alarm list

Reads the alarm that occurred for a designated alarm list number.
Commands

The alarm list numbers are equivalent to the sequence displayed on the LCD in the
LCD display alarm mode. To check all the current failures, the sub-command alarm
list number is increased sequentially from 01 until the answer CV is returned.
Send alarm list

Returns the alarm code corresponding to the requested alarm list number. The
sub-command returns a 2-character alarm list number and a 2-character alarm
code.

Answers

No alarm list

This answer is returned if no alarm corresponds to the requested alarm list number.
The sub-command returns a 2-character alarm list number.

Power Supply Unit
INSTRUCTION MANUAL

A-19

Appendix A

COMMUNICATIONS

A6.4 Parameters
Read paramater

Commands

Reads the parameter value for a designated parameter number.
Sends the 2-character parameter number as the sub-command.
Send parameter

Answers

Returns the parameter value for the designated parameter number. The 2character parameter number + 4-character parameter value is returned as the sub
command in the format shown in Table A-3 Table of Parameters."
Invalid parameter number

This answer is returned if the designated parameter number is invalid. Returns the
2-character parameter number as the sub-command.

A6.5 Events
For the event functions only, commands are sent from the power supply unit to the connected
computer, and the answers are sent from the computer to the power supply unit.

This function can also be disabled by setting the SETTINGS/RS232C/EVENT SENDING or
SETTINGS/RS485/EVENT SENDING menu setting to OFF on the LCD display.
This function will be disabled automatically if the RS485 multi-drop function is enabled.
In the default status, command ER is transmitted when either an alarm or warning occurs.
However, if the warning output setting is OFF in the menu mode SETTINGSA/VARNING DIS
PLAY item on the LCD, command ER is not transmitted when warnings of alarm codes 86 to 94
(Table 7-7 Table of Warnings") occur.

Failure occurred
EF

Sent to the connected computer when an failure occurs.
The 2-character alarm code for the failure is sent as the sub-command.
Start rotation

Sent to the connected computer when pump rotation starts. Equivalent to the
ROTATION lamp lighting.

Commands

Stop rotation

Sent to the connected computer when pump rotation stops. Equivalent to the
ROTATION lamp going out.
Normal speed

Sent to the connected computer when the normal rotation speed is achieved.
Equivalent to the NORMAL SPEED lamp lighting.
Confirm event

Return this answer to the power supply unit when an event is received from the
Answers

power supply unit. The power supply unit sends the command up to five times at

one-second intervals until it receives the confirm event answer. Send the 2-

character command character string for the received event command as a sub
command.

A-20

263-13228

'"■';; ^I'' :'■' .: ■■.■"-':■.■ :'£?.'";-( ■■.•' ■''•■V ^;.:;C^^'^;-/--;:<-^""?':;:^->"''
A6.

COMMAND DESCRIPTION

A6.6 Timer
Read timer
TR

Reads the timer value for a designated timer number.

Sends the 2-character timer number as the sub-command.
Clear timer

Commands

Clears the timer value for a designated timer number.
Sends the 2-character timer number as the sub-command.
Write timer

Overwrites the set value for a maintenance call timer.
Sends the 2-character settings number + 5-character set value data as the sub
command.
Send timer value

Returns the timer value for the designated timer number. The 2-character timer
number + 5-character timer value is returned as the sub-command in the format
shown in Table A-4 "Table of Timers."

Answers

Invalid timer number

This answer is returned if the designated timer number is invalid. Returns the 2character timer number as the sub-command.

A6.7 History
Read alarm history

Commands

Reads the alarm history for a designated alarm history number.
Sends the 2-character alarm history number as the sub-command.
Send alarm history

Returns the alarm history for the designated alarm history number. The 64character alarm history data is returned as the sub-command in the format shown in
Table A-5 "Alarm History Data Format."

Answers

No history data
GV

This answer is returned if no alarm history data corresponds to the designated
alarm history number. Returns the 2-character alarm history number as the sub
command.

Power Supply Unit
INSTRUCTION MANUAL

A-21

A6.6 Timer
Read timer
TR

Reads the timer value for a designated timer number.

Sends the 2-character timer number as the sub-command.

Appendix A

COMMUNICATIONS

A6.8 Settings

Read settings

Reads the set value for a designated settings number.

Sends the 2-character settings number as the sub-command.
Commands

Write settings
SW

Overwrites the set value for a designated settings number.
Sends the 2-character settings number + 4-character set value data as the sub
command.
Send settings value

Returns the set value for the designated settings number. The 2-character settings
number + 4-character set value is returned as the sub-command.

Answers

Invalid setting number

This answer is returned if the designated settings number is invalid. Returns the 2character settings number as the sub-command.

Read user memo

Reads the character string in the user memo.
Write user memo

Commands

Overwrites the character string in the user memo.
SX

Sends the 20 characters to set in the user memo as the sub-command. If less than
20 characters are set, the remaining characters are filled with spaces. Be sure to
always send 20 characters.
Send user memo

Answers

Returns as a sub-command the set user memo character string or the 20-character
user memo character string overwritten by the SX command.

A6.9 Shared Answer
Answers

A-22

Invalid Command

Answer returned by the power supply after it receives an invalid command.

263-13228

A6.8 Settings

Read settings
d.~a~ia *u_
«

l.._ x—

-i~~:~

ax:

*'?

':■

^k^

A7.

RS-232C COMMANDS / ANSWERS

A7. RS-232C COMMANDS / ANSWERS
(SEND AND RECEIVE Examples)
Table A-7
Type

RS-232C COMMANDS / ANSWERS (SEND AND RECEIVE ExamDlesl

Computer
(Host) *1

MJ01LS97$

Send/

Receive
*2

Power

Supply

Remarks

Operation Mode

-»

Check
MJ01LL90S

LOCAL

MJ01 LR96$

REMOTE

MJ01 LC87$

RS-232C

MJ01LD88S

RS-485

MJ01LN92S

ON-LINE Request

Operation

MJ01LC87$

Mode
-

MJ01LD88S

MJ01LL90$

MJ01LF8AS
MJ01LR96S
-

Operation Mode

Operation mode changed to
RS-232C ON-LINE

Invalid Request

When in RS-485 mode

Invalid Request

When in LOCAL mode

OFF-LINE

OFF-LINE request from

Request

RS-232C communication port

Operation Mode

Operation mode changed to
REMOTE

MJ01LD88S

Invalid Request

When in RS-485 mode

MJ01LL90S

Invalid Request

When in LOCAL mode

MJ01RA8BS

MJ01RVA0S

MJ01RP9AS
MJ01RB8CS
MJ01RVA0$

Operation

MJ01RZA4S

MJ01RF50F5S
MJ01RC8D$

MJ01RVA0S

232C communication port
When START operation is

Ineffective

ineffective or operation mode is

Operation

not RS-232C
STOP operation from

RS-232C communication port

Deceleration Start
When STOP operation is

Ineffective

ineffective or operation mode is

Operation

not RS-232C

RESET Operation

START operation from RS-

Acceleration Start

STOP Operation

TMP

RS-232C communication port

Change

START Operation

ON-LINE request from

Change

MJ01RT9ES

MJ01RR9CS

Description

RESET operation from

RS-232C communication port

Buzzer Off

When a buzzer sounded

Failure

When the failure was not

Occurrence

eliminated.

Failure Eliminated
Ineffective
Operation

When the failure was
eliminated.
When RESET operation is
ineffective or operation mode is

not RS-232C

Power Supply Unit
INSTRUCTION MANUAL

A-23

.„___.„.

•■.::■''':': ■

Appendix A

Type

.„..—.,....__

- -..■■'.■ .■.'■■■. /: ,■.■;.■■

■'.■.'■'■.■':.■:;

COMMUNICATIONS

Computer

(Host) *1
MJ01CS8E$

Send/

Power

Receive

Supply

Run Status

MJ01NS00F9S

Stop

MJ01NA00E7S

Acceleration

MJ01NB00E8S

Deceleration

MJ01NN00F4S

Normal Rotation

MJ01FS1C05$

Failure Stop

LCD: "TMP:CAN NOT START"

MJ01FF32E9$

Failure Idle

LCD: "EI:DC-DC OVERTEMP"

MJ01FR15F6$

MJ01FB60E6S
MJ01CF01E

—♦

MJ01PR03F

Parameter

MJ01CA01154
3$

MJ01PA03270
0B5$

MJ01PR150
0$
MJ01PV1504S
MJ01EF15E9$

Failure
Regeneration
Failure
Deceleration

Send Alarm List

Power failure occured.

Read Parameter

Parameter 03 (rotational speed)

Send Parameter

Data = 2700 (27,000 rpm)

Read parameter

Parameter 10 (invalid number)

Invalid parameter
number
Failure
Occurrence
Event

Confirmation

Power failure occured.

Rotation Start
Event

Confirmation
MJ01ES90$

Rotation Stop

MJ01ECES1

Event

Confirmation
MJ01EN8B$

MJ01ECEN1

Normal Rotation
Event

Confirmation

MJ01TR01F

Read Timer

F$
MJ01TA01001
-

Timer

350304051500
OOOOO0OO0OB9

MJ01TA03000
00E0$

263-13228

Last update: 2003/4/5 15:00
Last reset: (invalid)

Clear Timer

0000F6$

Timer 01 (Run time)

Timer 01 = 135 (135 hours)
Send Timer

$
MJ01TW030

A-24

LCD: "MB:VIBRATION 1 Z"
Confirm first alarm

MJ01ECER1

LCD: "POWER FAILURE"

Read Alarm List

MJ01ECEF0
MJ01ER8F$

Event

Remarks

Run Status Check

—•

Description

Timer Value

Clear timer 03 (Number of
power failure touch-downs.)

Timer 03 = 0 Value cleared.

^U'itrf/i tffV^fa'W:^m^;jfr^i^^

A9.

TROUBLESHOOTING

A9. TROUBLESHOOTING
A9.1

No Message can Transmit and Receive

(1) Start the pump in LOCAL mode and check if the event command of Rotation start can be
received in the timing at which ROTATION lamp lights.

Could be received » check if command from connected computer can be received or not,
using another computer, etc.

A nonsensical character string was received » Go to A9.2.
c. Not receivable » (2)

(2) Check the connection of RS-232C cable in reference to A2.

Check the polarity of RS-485 interface, because there is the case that polarity is reverse.
(3) Check the transmission specification of RS-232C at computer side.

A9.2 Sending and Receiving are Done, But Receivable Messages are
Invalid
(1) Check the transmission rate of the power supply unit and computer.

A9.3 Characters Get Disordered from Time to Time, Then Resulting in
CHECKSUM Error
(1) Remove the cable from equipment as noise source if it runs near it.
(2) When the cable in use is not a shield cable, replace it with the latter cable.

When shield cable is used, be sure to check that it is connected to the frame gland of the
connected computer.

Use twisted pair cable when RS-485 is used.

(3) When 10 m or longer cable is used, replace it with another cable as short as possible.
(4) Make the transmission rate smaller unless there is problem in application program .

Power Supply Unit
INSTRUCTION MANUAL

This page is intentionally left blank.

A-28

263-13228

Index

Index
A
ALARM
Alarm history
Alarm mode

69
14,

15, 49
43, 49

c
Control Cable

4, 24

H
How to install the unit onto a rack

M
Menu mode

Monitor mode
Motor Cable

43, 50, 52. 57

47
4

P
power failure

14, 15

Power switch

R
REMOTE signal

remote-control signal

Remote-Control Signals

Reset Procedure

RS-232C

52, 53. 3

RS-485

52. 53, 5

s
SEMI F47

SEMI S2

serial interface

12. 2

u
UL

263-13228

Power Supply Unit
INSTRUCTION MANUAL

lndex-1

This page is intentionally left blank.

lndex-2 f

Power Supply Unit

INSTRUCTION MANUAL

263-13228

Excerpt from No. FE8A-Q049F

Declaration of Conformity
SHIMADZU CORPORATION

SEMICONDUCTOR EQUIPMENT DIVISION

Address :380-1 ,HORIYAMASHITA,HADANO-CITY,

KANAGAWA, 259-1304, JAPAN
as the Manufacturer

declares in sole responsibility that the following product

Product Name

Turbo Molecular Pump

Model name , P/N
Vacuum Pump

Power Supply

Model name

P/N

Model name

TMP-803LM/LMC/M/MC

262-81453-xx

TMP-1003LM/LMC/M/MC

262-81410-xx

TMP-1103LMP/LMPC/MP/MPC

P/N

EI-D1003M

262-78689-xx

262-78492-xx

EI-D1103M

262-78690-xx

TMP-1303LM/LMC/M/MC

262-81475-xx

EI-D1303M

262-78688-xx

TMP-2003LM/LMC/M/MC

262-81439-xx

EI-D2003M

262-78691-xx

TMP-2203LM/LMC/M/MC

262-78453-xx

EI-D2203M

262-78692-xx

TMP-3203LM/LMC/M/MC

262-78430-xx

EI-D3203M

262-78685-xx

TMP-3403LM/LMC/M/MC

262-78503-xx

EI-D3403M

262-78694-xx

TMP-4203LM/LMC/M/MC

262-78512-xx

EI-D4203M

262-78696-xx

Note: -xx (P/N) means 00 to 99 or blank
referred to in this declaration conforms with following directives and standards
Machinery directive 98/37/EC

amended by 98/79/EC

EN292-1:1991, EN292-2:1991+A1:1995,
EN1012-2:1996

Low Voltage directive 73/23/EEC

amended by 93/68/EEC

EN61010-1:1993+A2:1995
EN61010-1:2001

EMC directive 89/336/EEC amended by 91/263/EEC, 92/31/EEC, 93/68/EEC, 93/97/EEC
EN61326:1997+A1:1998+A2:2001, class A

Note 1) This declaration becomes invalid if technical or operational modifications are
introduced without manufacturer's consent.
Note 2} This declaration is valid if this product is used alone or in combination with the
accessories of this product or other instruments which fulfill with the
requirement of mentioned directive.

Note3) Importer/Distributor and Authorized Representative in EU is as follows:
KRATOS ANALYTICAL LTD.
Address : Whartisid, Trafford Wharf Road, Manchester M17 1GP England

A. JAPAN..3.AML2Q03.
place and date of issue

signature

ShjnzQ.Jnoue.
name

Manager of Quality Assurance Dept.
Semiconductor Equipment Division
.Corporation
Position

SHIMADZU CORPORATION

SEMICONDUCTOR EQUIPMENT DIVISION

Address :380-1 ,HORIYAMASHITA,HADANO-CITY,

KANAGAWA, 259-1304, JAPAN
as the Manufacturer

FEM9M-E0122-02

TMP overhaul / repair request form

Please mark the item box. and fill out the blank.
s/n(

■

(1) Product

(2) Request

DPump

(TMP-

s/n(

DController (El-

QOvemau.

DRepair

DO.her

(3) Details

(4) Alarm code

(If status lamp indicates, No is

(6) Date for return shipment request (

^_^_———

(5) Date of failure occurrence (

(8) Date of previous delivery (

(7) Date of TMP operation start (
(9) Parts exchange
recommendation

If any parts exchange

is recommended due to the excess of usage recommendation period.

□(a) Please exchange the parts.

□(b) Don't exchange unless any deterioration is found in the inspection.
In case of (b). even if any failure occurs with the cause of parts

for which customers choose continuous usage, it's out of warranty.

EspedalyaUotor. it causes the material deterioration which even the fluorescent penetrant
test can't detect after long term running. For this reason, periodical exchange
is recommended in order to use the rotor safely.
Please fill out the following items to make sure of our safety
(10) Declaration
of contamination

Components which have been contaminated by hazardius substrates will not be accepted
or served without written evidence of decontamination.

- Equipment process

DEtch

DPVD

DCVD

D Others (

)

- Materials the equipment has been exposed to (

)

(Eched material, CVD/PVD target, etc)
- Gases the equipment has been exposed to
DAir, Nitrogen, etc (

)

DInert gas such as helium, etc (

D Corrosive gas (

DVirulent gas (

)

- Is it hazardous to human ?

DYes

D Reactive/active gas (
D Others (

DNo

- Is there color change or adhesion at inlet or outlet flange ?

DYes

DNo

(If yes, please let us perform TMP cleaning at additional charge to keep appropriate performance.
- Precaution and procedure for decontamination in case it's necessary at Shimadzu.

(11) Gas purge

DUsed i

seem)

DNot used

I declare that the TMP being returned doesn't contain any amount of hazardous residues

that exceed the permissible exposure limits on the MSDS and that the information
provided above is complete and accurate.
Date(

Company (

Job title (

Name (

Signature (

Phone

(

Fax(

Markinqs regarding the "Environmental Protection Use Period" and the "Names and Contents of Toxic

or SrdlSs Substances or Elements" for "Management Methods for Confrolhng Pollute by

Electronic Information Products" (Issued by: Ministry of Information Industry of the People's Republic
of China)
Model Name

Pump Unit:

TMP-03 series

Power Supply :

EI-DxxO3M/MT series

Environmental Protection Use Period

xxt

mm,
'j'M-

(fifiHiW

The Marking of Environmental Protection Use Period is formulated according to the stipulations in the
"Management Methods for Controlling Pollution by Electronic Information Products" and "Marking for Control ot
Pollution Caused by Electronic Information Products", and applies to the electronic information producls sold in
the People's Republic of China.

The number in the middle of the logo means the unit of years for the actual environmental protection use period
for this product Within the indicated period from the date of manufacture, the toxic or hazardous substances a
elements contained in the electronic information products will not leak or mutate under normal operating

conditions so that the use of this electronic information producls will not result in any severe environmental
pollution, any bodily injury or any damage to assets.

In addition, note that a time limit in this marking is different from a guarantee period for quality and functions oi

this product

Names and Contents of Toxic or Hazardous Substances or Elements
Toxic or Hazardous Substances and Elements

Part Name

Mercury

Cadmium

(Hg)

(Cd)

Pump Unit
Power Supply
(El-DxxO3M/MT series)

Cabl

Lead
(Pb)

Hexavalent

Poiybrominated

Chromium

biphenyte

Poiybrominated
diphenyl ethers
(PBDE)

(Cr(VI))

aim 136^2006

Indicates that this toxic or hazardous substance contained in all of the homogeneous materials used for this part is below the limit

Indicates that this toxic or hazardous substance contained in at least one of the homogeneous materials used for this part is above
the limit requirement in SJ/T11363-2006.

ig Pollution by

ople's Republic

or „««.««- w—«.
or Elements" for "Management Methods for Controlli
Electronic Information Products" (Issued by: Ministry of Information Industry of the P
of China)
Model Name

Pump Unit:

TMP-03 series

SHIMADZU CORPORATION
SHIMAOZU CORPORATION. Intornatinal Marketing Division
3 Kanda-NishiWcho 1-chomo. Chiyoda-ku. Tokyo 101-8448. Japan
Phone:81(3)3219-5641 Fax:81(3)3219-S710
SHIMADZU PRECISION INSTRUMENTS, INC.
SEMICONDUCTOR EQUIPMENT USA COMPANY
2340-C Walsh Avenue. Sanla Clara. CA95O51. USA

Phono 1(408)566-0960 Fax 1(408)5660961

hnp7/www.shimadzuv3cuumcom/

KRATOS ANALYTICAL LTD.
Whartside. Trafford Wharf Road. Manchester M17 1GP U.K.

Phono:44(161)888-4400 Fux 44(161)888^1402 E-mail:vacuum@kratos.co.uk
SHIMADZU (ASIA PACIFIC) PTE LTD.

16 Science Parti Drive B01-01 The Pasteur Singaporo Science Park. Singaporo 118227.
Republic of Singaporo

Phone:6S-6778-62S0 Fax:65-6779-2935

SHIMADZU INTERNATIONAL TRADING (SHANGHAI) Co., LTD.

24m Floor. Shanghai XinHualian Building No.755 Huaihai Zhong Lu. Shanghai 200020
Phone 86(21)6472-8442 Fax 86(21)6472-8648

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