Polvac Kashiyama All Pumps
User Manual: Polvac Kashiyama All Pumps
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SDE e-catalog SDEJ Ver2.1/06.6 Screw Dry Pump SDE Series SCREW DRY PUMP SDE SERIES Dry pumps reliable for all applications. Energy-saving features combine with the reliability, SDE Series achieved lower running cost. - Advanced screw technology allows longer life operation under hard applications. - Anti-corrosion material construction allows pumping of corrosive gasses. - Upgraded screw design and driving system realized 40% reduction in energy consumption, compared to conventional models. Specification Table Model Specification Maximum Pumping Speed (L/min) SDE90 1,300 SDE120 SDE303 SDE603 2,000 5,000 10,000 NW40 NW80 NW50 150 151 Electric Power Capacity (kVA) Cooling Water Supply Purge N2 Gas Supply 260 260 310 470 3.6 13.0 4.0 17.6 3 phase AC200-220V 50/60Hz Electric Power Supply Power in normal operation (kW)* NW160 NW40 Outlet Flange Weight(Approx.) (kg) NW100 Atmospheric pressure Maximum Inlet Pressure (Pa) Inlet Flange SDE2003 30,000 0.5 1.3 Ultimate Pressure (Pa) SDE1203 20,000 2.8 3.2 6.5 3.0 3.1 10.5 4L/min and over 0-60SLM * Power at ultimate pressure. KASHIYAMA IND., LTD. SDE e-catalog SDEJ Ver2.1/06.6 Pumping Curve(SP) 100000 Pumping Speed(L/ 10000 1000 SDE90 SDE120 SDE303 SDE603 SDE1203 SDE2003 100 10 0.1 1 10 100 1000 10000 100000 Pressure(Pa) 0.001 0.01 0.1 1 Pressure (Torr) 10 100 1000 Pump Schematics (SDE90,SDE120) C ontrol pa ne l 170 *80 *30 C ommunica tion ca ble (L =2000mm) D uct O D50 (50) 690 O utle t NW 40 370 Inle t 205 65 R e mote control connector 185 E MO N 2 control va lve E LC B N 2 pres s ure ga uge 13 P ower connector 50 Inle t NW 40 NW 50 143 D ime ns ion: mm Mode l H S DE 90 551 S DE 120 560 501 H (Inle t) 540 (O utle t) R e gula tor N 2 s upply port C ooling wa ter outle t R c3/8 with s e lf-s e a l coupler C a s ter with P IP E -F IT T IN G 1/4 s tra ight 44 42 C ooling wa ter inle t R c3/8 with s e lf-s e a l coupler Pump Schematics (SDE303,SDE603,SDE1203,SDE2003) D uct (163) Inle t (89) a (c) b W 60 O utle t NW 40 C ontrol pa ne l 170 *80 *30 C heck va lve (O P T IO N) d e E MO E LC B S ile ncer (O P T IO N) R e mote control connector R e gula tor P ower connector (90) f 50 C (O utle t) 13 H A (Inle t) N 2 control va lve N 2 pres s ure ga uge B (O utle t) SCREW DRY PUMP SDE SERIES 54 55 O utle t NW 40 Mode l S DE 303 S DE 603 S DE 1203 S DE 2003 Inle t NW 50 NW 80 NW 100 NW 160 D uct D W H A C a s ter (28) B C a b c d e g 42 (8) D f g O D 50 760 400 906 945 841 352 133 155 472 200 115 200 O D 50 O D 75 900 400 906 945 841 352 195 155 550 200 115 200 59 1000 500 1090 1165 850 360 155 195 650 250 135 208 108 59 C ooling wa ter outle t R c3/8 with s e lf-s e a l coupler Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. -Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System N 2 s upply port with P IP E -F IT T IN G 1/4 s tra ight C ooling wa ter inle t R c3/8 with s e lf-s e a l coupler KASHIYAMA IND., LTD. URL:www.kashiyama.co.jp/ mail address for inquiries: sales@kashiyama.co.jp RD e-catalog RDJ Ver2.1/06.6 Roots Dry Pump RD Series ROOTS DRY PUMP RD SERIES New lower running cost pump for light to medium applications. RD achieves significant improvements in environmental performance by innovative power-saving technology. - Multistage configuration optimizes pumping efficiency, minimizes power consumption. - Applicable from light processes such as load rock and transfer, to etching and other medium processes. - Upgraded roots element and driving system realized 70% reduction in energy consumption, compared to conventional models.(RD90) Specification Table Specification Model RD90(RDE90) Maximum Pumping Speed (L/min) Ultimate Pressure (Pa) RD120 RD303 RD603 RD1203 RD2003 1,300 2,000 5,000 10,000 20,000 30,000 2.7 2.0 NW100 NW160 300 475 1.7 2.1 10.5 15.1 0.5 Atmospheric pressure Maximum Inlet Pressure (Pa) Inlet Flange NW40 NW80 NW40 Outlet Flange Weight(Approx.) (kg) 130 140 3 phase AC200-220V 50/60Hz Electric Power Supply Power in normal operation (kW)* Electric Power Capacity (kVA) 240 1.3 (0.65) 1.7 4.0 1.5 1.6 8.0 Cooling Water Supply 3.5L/min and over Purge N2 Gas Supply 0-50SLM *Power at ultimate pressure. KASHIYAMA IND., LTD. RD e-catalog RDJ Ver2.1/06.6 Pumping Curve(SP) 100000 Pumping Speed(L/min) 10000 1000 RD90 RD120 RD303 RD603 RD1203 RD2003 100 10 0.1 1 10 100 1000 10000 100000 Pressure(Pa) 0.001 0.01 1 0.1 10 100 Pressure (Torr) 1000 Pump Schematics (RD90,RD120) C ontrol pa ne l 170 *80 *30 C ommunica tion ca ble (L =2000mm) Inle t NW 40 50 80 197 (35) 380 R e mote control connector 230 65 50 N 2 control va lve 140 N 2 pres s ure ga uge R e gula tor E MO N 2 s upply port with P IP E -F IT T IN G 1/4 s tra ight 33 P ower connector 125 50 415 515 (O utle t) D ime ns ion: mm Mode l L R D90 735 R D120 785 437 (Inle t) E LC B C a s ter C ooling wa ter inle t R c3/8 with s e lf-s e a l coupler 43 28 22 C ooling wa ter outle t R c3/8 with s e lf-s e a l coupler Pump Schematics (RD303,RD603,RD1203,RD2003) D uct (163) Inle t (89) a (c) b W 60 O utle t NW 40 C ontrol pa ne l 170 *80 *30 d e E MO C heck va lve (O P T IO N) E LC B R e mote control connector S ile ncer (O P T IO N) N 2 control va lve H N 2 pres s ure ga uge R e gula tor 13 B (O utle t) P ower connector (90) f C (O utle t) 50 A (Inle t) ROOTS DRY PUMP RD SERIES O utle t NW 40 L D uct O D50 O utle t NW 40 Mode l R D303 R D603 R D1203 R D2003 Inle t NW 50 NW 80 NW 100 NW 160 D uct D W H A B C a s ter (28) C a b c d e f g 42 (8) D g O D 50 760 400 906 945 705 206 133 155 472 200 115 200 O D 50 O D 75 900 400 906 945 705 206 195 155 550 200 115 200 59 1000 500 1090 1165 704 214 155 195 650 250 135 208 108 C ooling wa ter outle t R c3/8 with s e lf-s e a l coupler 59 Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. -Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System N 2 s upply port with P IP E -F IT T IN G 1/4 s tra ight C ooling wa ter inle t R c3/8 with s e lf-s e a l coupler KASHIYAMA IND., LTD. URL:www.kashiyama.co.jp/ mail address for inquiries: sales@kashiyama.co.jp SDL e-catalog SDLJ Ver2.1/06.6 High Throughput Dry Pump SDL Series SCREW DRY PUMP SDE SERIES Higher pumping speed. Support larger diameter wafer and larger FPD substrate applications. Higher pumping speed minimizes the tact time for large load lock chamber. - Maximized the pumping speed in the atmospheric side to achieve higher throughput. - The combination with large booster pump allows higher pumping speed up to 35,000L/min. - Applicable for clean processes. Specification Table Model SD150L SD220L Maximum Pumping Speed (L/min) 2,000 3,100 (Upper 50Hz / Lower 60Hz) 2,400 3,700 Ultimate Pressure (Pa) 50/60Hz 4/2 4/3 Specification Inlet Flange NW50 Outlet Flange NW40 Electric Power Supply SDL40K SDL60K 25,000 40,000 55,000 0.5 Atmospheric pressure Maximum Inlet Pressure (Pa) Weight(Approx.) (kg) SDL25K 325 NW100 450 3 phase AC200 50/60Hz AC220V 60Hz 910 3 phase AC200-220V 50/60Hz 3.6 5.0 6.9 Electric Power Capacity (kVA) 6.1 8.3 17.0 Purge N2 Gas Supply 750 620 Power in normal operation (kW) Cooling Water Supply NW160 NW50 5L/min and over 0 or 8SLM KASHIYAMA IND., LTD. 7.0 7.4 23.6 28.1 6L/min and over 0-50SLM SDL e-catalog SDLJ Ver2.1/06.6 Pumping Curve(SP) 100000 Pumping Speed(L/min 10000 1000 SD150L(50Hz) SD150L(60Hz) SD220L(50Hz) 100 SD220L(60Hz) SDL25K SDL40K SDL60K 10 0.1 1 10 100 1000 10000 100000 100 1000 Pressure(Pa) 1 0.1 0.01 0.001 10 Pressure (Torr) Pump Schematics SDL25K W1 W3 W2 SD150L,SD220L D uct port O D50 C ontrol pa ne l 170 *80 *30 520 Inle t NW 100 355 260 140 60 155 W4 C ommunica tion ca ble (L =2000mm) O utle t NW 40 E LC B R e mote control connector (46) L1 L3 L2 Inle t NW 50 D uct O D50 C ontrol pa ne l 170*80*30 E MO P ower connector P ower connector ＥＭＯ R e mote control connector 1050 N2 pres s ure ga uge O utle t 633 R e gula tor C ooling wa ter Inle t R c1/2 with s e lf-s e a l coupler N2 C ooling wa ter O utle tR c1/2 with s e lf-s e a l coupler control va lve N 2 pres s ure ga uge 13 30 R e gula tor C a s ter D ime ns ion: mm Mode l H1 S D150L 492 S D220L 606 C ooling wa ter inle t R c3/8 with s e lf-s e a l coupler a L2 43 41 W3 177 217 b 182 f d e H1 H4 (O utle t) *1 C ooling wa ter outle t R c3/8 with s e lf-s e a l coupler Inle t 1110 85 H2 O utle t NW 50 E LC B H3 (Inle t) E MO N2 s upply port c with P IP E -F IT T IN G 1/4 s tra ight 27 (44) 1000 N 2 s upply port 80 50 40 P ipe fitting 1/4 H2 60 72 H3 518 630 H4 661 626 L1 950 960 L3 432 402 W1 440 524 W2 43 45 W4 43 62 a 67 74 b 35 57 c 184 152 d 135 130 e 35 15 f 109 143 C a s ter *1: T he pres s ure re gula tor la yout va ries from the dia gra m in the S D150L a nd S D220L mode ls . SDL40K SDL60K 750 D uct port O D50 D uct port O D50 170 375 Inle t NW 160 140 60 424 355 180 60 141 255 700 Inle t NW 160 C ontrol pa ne l 170*80*30 E LC B R e mote control connector C ontrol pa ne l 170*80*30 E MO press ure gauge R e gula tor N2 s upply port O utle t NW 50 30 O utle t 633 P ipe fitting 1/4 P ower connector (72) N2 E MO control va lve 13 O utle t 633 100 70 C ooling wa ter Inle t R c1/2 with s e lf-s e a l coupler C ooling wa ter O utle t R c1/2 with s e lf-s e a l coupler P ower connector R e gula tor R e mote control connector 182 1200 E MO press ure ga uge C ooling wa ter Inle t R c1/2 with s e lf-s e a l coupler 30 207 65 C a s ter N2 30 N2 E LC B control valve 1660 1250 Inle t 1315 N2 Inle t 1720 O utle t NW 50 1180 C ooling wa ter O utle t R c1/2 with s e lf-s e a l coupler Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. 80 40 50 C a s ter -Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System N2 s upply port P ipe fitting 1/4 KASHIYAMA IND., LTD. URL:www.kashiyama.co.jp/ mail address for inquiries: sales@kashiyama.co.jp HC e-catalog HCJ Ver1.1/06.6 Light Conpact Dry Pump HC Series LIGHT CONPACT DRY PUMP HC SERIES All-purpose dry pump. High performance and low cost together in a compact, lightweight package. Smaller footprint enables easy installation anywhere. - Innovative horizontal screw configuration in a compact design - Lightweight aluminum construction. - Applicable from light processes such as load rock and transfer, to light etching processes. Specification Table Model Specification Maximum Pumping Speed (L/min) HC60A/B 900 3,300 6,300 (Upper 50Hz / Lower 60Hz) 1,100 4,000 7,600 Ultimate Pressure (Pa) Maximum Inlet Pressure (Pa) Inlet Flange HC450 1 0.5 Atmospheric pressure 1,300 NW40 NW50 NW80 NW40 Outlet Flange Weight(Approx.) (kg) HC250 77 160 195 3 phase AC200 50/60Hz AC220V 60Hz Electric Power Supply Power in normal operation (kW) 2.1 2.5 2.9 Electric Power Capacity (kVA) 3.0 5.1 5.8 3.5L/min and over Cooling Water Supply Purge N2 Gas Supply (Type B only) 12SLM KASHIYAMA IND., LTD. 0-12SLM HC e-catalog HCJ Ver1.1/06.6 Pumping Curve(SP) Pumping Speed(L/min) 10000 1000 100 HC60(50Hz) HC60(60Hz) HC250(50Hz) HC250(60Hz) HC450(50Hz) 1 0.001 10 0.01 100 Pressure(Pa) 0.1 1000 1 10000 100000 100 1000 10 Pressure (Torr) Pump Schematics (HC60) C ontroller P C 100 78 204 Duct OD50 222 Outlet NW40 Inlet NW40 11 745 5 170 S ilencer (OP T ION) 150 (attached to T ype B ) 285 10 142.5 (28) (63) C ooling water flow meter C oolin water outlet R c3/8 R egulator for N 2 C ooling water inlet R c3/8 (attached to T ype B ) 100 50 328 (Outlet) 304 320 (Inlet) 497 (Outlet) 6 90 50 N 2 s upply port R c1/4 142.5 (63) 10 240 220 58 20 2 40 20 25 P ower connector 23 S ignal connector Pump Schematics (HC250,HC450) L1 Duct OD50 65 W1 L3 L2 W3 Inlet W2 Outlet NW40 155 C ontrol panel N 2 flow meter 750 (Outlet) 720 750 (Inlet) E LC B 778 C ooling water flow meter N 2 pres s ure gauge R egulator 104 LIGHT CONPACT DRY PUMP HC SERIES HC450(60Hz) 10 0.1 N 2 s upply port R c1/4 P ower connector Dimens ion:mm Model Inlet HC 250 NW50 HC 450 NW80 C as ter L1 750 860 L2 105 120 L3 265 358 W1 400 430 W2 160 190 W3 315 340 R emote control connector Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. 40 35 67 -Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System C ooling water inlet R c3/8 C ooling water outlet R c3/8 KASHIYAMA IND., LTD. URL:www.kashiyama.co.jp/ mail address for inquiries: sales@kashiyama.co.jp KMB e-catalog KMBJ Ver2.0/04.6 Booster Pump KMB Series BOOSTER PUMP KMB SERIES Can be used in combination with the dry pumps to enhance pumping capacity. Rotational speed control enables operation from atmospheric pressure. - High efficiency motor and driving system realized significant downsize compare to conventional models. - Canned motor is adapted to improve reliability. - Improvements of the driving system and mechanical efficiency allow minimizing the power. - Rotation speed control achieves continuous operation under the atmospheric pressure. - Synchronous motor enables consistent pumping performance at any power supply frequency. (03 series) Specification Table Model Specification Maximum Pumping Speed (L/min)* KMB603 KMB1203 KMB2003 10,000 20,000 30,000 0.5 Ultimate Pressure (Pa)* Atmospheric pressure Maximum Inlet Pressure (Pa) Inlet Flange VG80 VG100 VG150 Outlet Flange VF65 VF100 VF150 85 110 230 Weight(Approx.) (kg) 3 phase AC200-220V 50/60Hz Electric Power Supply Power in normal operation (kW)** 0.3 Electric Power Capacity (kVA) 4.0 0.4 0.8 6.5 11.1 Cooling Water Supply 3L/min and over Purge N2 Gas Supply 0 or 20SCCM *The values shown here represent operation in combination with the dry pump as recommended by Kashiyama. **Power at ultimate pressure. KASHIYAMA IND., LTD. KMB e-catalog KMBJ Ver2.0/04.6 Pumping Curve(SP) 100000 Pumping Speed(L/mi 10000 1000 KMB603 (DP:SDE90) KMB1203(DP : SDE120) 100 KMB2003(DP : SDE120) 10 0.1 1 0.001 10 1000 0.01 100 Pressure(Pa 1000 1 0.1 10000 10 100000 100 1000 Pressure (Torr) Pump Schematics (KMB603,KMB1203) Inle t N2 C ooling wa ter O utle t O il dra in plug 72 72 113 (O utle t) 32 116 230 114 (Inle t) with P IP E -F IT T IN G 3/8 L2 O il le ve l ga uge 27 L1 D ime ns ion: mm Mode l Inle t O utle t L1 L2 L3 K MB 603 V G 80 V F 65 596 457.5 230 K MB 1203 V G 100 V F 100 746 607.5 305 C ooling wa ter inle t O utle t with P IP E -F IT T IN G 3/8 Pump Schematics (KMB2003) O il le ve l check F ller neck Inle t V G 150 344 172(Inle t) 329 165(O utle t) BOOSTER PUMP KMB SERIES s upply port with P IP E -F IT T IN G 1/4 L3 O il s upply plug 150 150 229 330 C ooling wa ter dra in outle t F INE L O K 3/8 100 100 842 O utle t V F 150 C ooling wa ter fe e d wa ter F INE L O K 3/8 Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. -Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System KASHIYAMA IND., LTD. URL:www.kashiyama.co.jp/ mail address for inquiries: sales@kashiyama.co.jp MU e-catalog MUJ Ver1.0/04.6 Micro Dry Pump MU Series / For Tool Mount / MICRO DRY PUMP MU SERIES The world smallest and least power consumption. You can integrate into any equipment easily. - Kashiyama ultimate space save design has realized the pumping speed of 1660l/min with the small body 230 mm x 450 mm. - The MU series are perfect for load locks, clean exhaust for transfer rooms and any light process application of semiconductor manufacturing. Specification Table Specification Model Maximum Pumping Speed (L/min) Ultimate Pressure (Pa) MU100 1,660 1.5 Atmospheric pressure Maximum Inlet Pressure (Pa) Electric Power Capacity(kW) Power in normal operation (kW) 2.2 0.7 2.2+2.2 0.9 NW50 NW25 Inlet Flange Outlet Flange Weight(Approx.) (kg) MU300 5,000 0.5 60 KASHIYAMA IND., LTD. 100 MU e-catalog MUJ Ver1.0/04.6 Pump Schematics (MU100) P ower input connector(C N1) N2 press ure ga uge R e gula tor (a ttache d to MU100N) R emote control connector(C N2) P ower S upply LE D(LE D1/gre en) H a ndheld controller connector(C N3) R un LE D(LE D2/gre en) E rror W arning LE D(LE D3/ora nge) E rror Alarm LE D(LE D4/re d) 450 22 Ma in s witch (29) 76 H a ndheld controller C a ble Lifting B racket(*2) (R emoving the bracke ts is pos s ible a fter ins ta lling the pump) N2 G as inlet (with T ube F itting 1/4 s tra ight) (a ttache d to MU100N) Inlet NW50 26 125 230 89 275 185 13 2-M6 22 64 27 115 52 C ooling wa ter inle t R c1/4 (with s elf-s ea l coupler) 18 8 90 190 202 A djus ter (O D24*4) 252 414 85 60 17 R igid C as ter (O D40*4) C ooling wa ter outlet R c1/4 (with s elf-s ea l coupler) Pump Schematics (MU300) 89 (102) (99) N2 R e gula tor 230 109 35 P ower input connector (C N1) 26 125 450 279 H a ndheld controller C a ble 115 B ox Duct (O D50) Inlet NW50 R emote control connector(C N2) Lifting B olt 199 H a ndheld controller connector(C N3) P ower S upply LE D(LE D1/gre en) R un LE D(LE D2/gre en) E rror W arning LE D(LE D3/ora nge) E rror Alarm LE D(LE D4/re d) 50 (M8*4) N2 pres s ure ga uge Ma in s witch C ooling wa ter inlet R c3/8 (with s elf-s ea l coupler) C ooling wa ter outlet R c3/8 (with s elf-s ea l coupler) N2 G as inlet (with T ube F itting 1/4 s tra ight) 25 2-M8 A djus ter(O D24*4) 40 150 194 85.5 O utle t NW25 42 40 62.5 14 2219 252 413 202 Note 1) Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice. Note 2) Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department. R igid C as ter (O D40*4) 93 520 550 N2 C ontrol V a lve (for cas e purge) 2-M8 42 MICRO DRY PUMP MU SERIES O utle t NW25 90 6 (115) 33 43 33 66 37 131 2-M6 40 96.5 150 40 194 202 -Dry vacuum Pump -Mechanical Booster Pump -Air Discharge System KASHIYAMA IND., LTD. URL:www.kashiyama.co.jp/ mail address for inquiries: sales@kashiyama.co.jp
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